KR20160067106A - 연마 장치 및 연마 방법 - Google Patents

연마 장치 및 연마 방법 Download PDF

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Publication number
KR20160067106A
KR20160067106A KR1020167008523A KR20167008523A KR20160067106A KR 20160067106 A KR20160067106 A KR 20160067106A KR 1020167008523 A KR1020167008523 A KR 1020167008523A KR 20167008523 A KR20167008523 A KR 20167008523A KR 20160067106 A KR20160067106 A KR 20160067106A
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KR
South Korea
Prior art keywords
polishing
polished
workpiece
abrasive
shape
Prior art date
Application number
KR1020167008523A
Other languages
English (en)
Korean (ko)
Inventor
히토시 모리나가
히로시 아사노
신고 오츠키
가즈세이 다마이
Original Assignee
가부시키가이샤 후지미인코퍼레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 가부시키가이샤 후지미인코퍼레이티드 filed Critical 가부시키가이샤 후지미인코퍼레이티드
Publication of KR20160067106A publication Critical patent/KR20160067106A/ko

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/08Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding non-circular cross-sections, e.g. shafts of elliptical or polygonal cross-section
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/02Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/002Grinding heads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/02Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B24B9/107Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for glass plates while they are turning

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
KR1020167008523A 2013-10-04 2014-10-02 연마 장치 및 연마 방법 KR20160067106A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013209602 2013-10-04
JPJP-P-2013-209602 2013-10-04
PCT/JP2014/076360 WO2015050186A1 (ja) 2013-10-04 2014-10-02 研磨装置及び研磨方法

Publications (1)

Publication Number Publication Date
KR20160067106A true KR20160067106A (ko) 2016-06-13

Family

ID=52778773

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020167008523A KR20160067106A (ko) 2013-10-04 2014-10-02 연마 장치 및 연마 방법

Country Status (7)

Country Link
US (1) US20160236314A1 (de)
EP (1) EP3053703A4 (de)
JP (2) JPWO2015050186A1 (de)
KR (1) KR20160067106A (de)
CN (1) CN105658377A (de)
TW (1) TW201529224A (de)
WO (1) WO2015050186A1 (de)

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JP2015174180A (ja) * 2014-03-14 2015-10-05 株式会社東京精密 超音波面取り機
JP6398902B2 (ja) * 2014-08-19 2018-10-03 信越化学工業株式会社 インプリント・リソグラフィ用角形基板及びその製造方法
JP6568006B2 (ja) * 2016-04-08 2019-08-28 株式会社荏原製作所 研磨装置および研磨方法
CN108436650A (zh) * 2018-03-08 2018-08-24 北京铂阳顶荣光伏科技有限公司 磨边方法及装置
US11799150B2 (en) 2020-07-17 2023-10-24 Toyota Motor Engineering & Manufacturing North America, Inc. Cooling structure for hybrid-electric vehicle battery cell assemblies
CN115365928A (zh) * 2022-08-23 2022-11-22 北京航空航天大学宁波创新研究院 一种研磨方法及研磨机
CN117773697B (zh) * 2024-02-23 2024-05-14 山东旭辉玻璃科技有限公司 一种用于农机玻璃的切割边角打磨设备

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JPH11188590A (ja) 1997-12-22 1999-07-13 Speedfam Co Ltd エッジポリッシング装置
JP2001205549A (ja) 2000-01-25 2001-07-31 Speedfam Co Ltd 基板エッジ部の片面研磨方法およびその装置

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Publication number Priority date Publication date Assignee Title
JPH11188590A (ja) 1997-12-22 1999-07-13 Speedfam Co Ltd エッジポリッシング装置
JP2001205549A (ja) 2000-01-25 2001-07-31 Speedfam Co Ltd 基板エッジ部の片面研磨方法およびその装置

Also Published As

Publication number Publication date
EP3053703A1 (de) 2016-08-10
JPWO2015050186A1 (ja) 2017-03-09
JP2018001406A (ja) 2018-01-11
WO2015050186A1 (ja) 2015-04-09
CN105658377A (zh) 2016-06-08
EP3053703A4 (de) 2017-07-26
TW201529224A (zh) 2015-08-01
US20160236314A1 (en) 2016-08-18

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