CN105261606A - 无核心层封装基板及其制法 - Google Patents

无核心层封装基板及其制法 Download PDF

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CN105261606A
CN105261606A CN201410368060.9A CN201410368060A CN105261606A CN 105261606 A CN105261606 A CN 105261606A CN 201410368060 A CN201410368060 A CN 201410368060A CN 105261606 A CN105261606 A CN 105261606A
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layer
those
making
coreless
conductive
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CN105261606B (zh
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白裕呈
林俊贤
邱士超
萧惟中
孙铭成
沈子杰
陈嘉成
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Siliconware Precision Industries Co Ltd
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Abstract

一种无核心层封装基板及其制法,该无核心层封装基板包括:具有相对的第一表面与第二表面的介电层;嵌埋于该介电层内并外露于该第一表面的第一线路层,且该第一线路层具有多个第一电性接触垫;分别形成于该些第一电性接触垫上的多个突出构件,以供外部的导电元件包覆于该突出构件的接触面上;形成于该介电层的第二表面上的第二线路层;以及分别形成于该介电层内以电性连接该第一线路层及该第二线路层的多个导电盲孔。藉此,本发明可藉由该突出构件的较大接触面积,以强化该第一电性接触垫与该导电元件之间的接合力。

Description

无核心层封装基板及其制法
技术领域
本发明涉及一种无核心层封装基板及其制法,特别是指一种形成突出构件于线路层的电性接触垫上的无核心层封装基板及其制法。
背景技术
随着电子产业的蓬勃发展,电子产品也逐渐迈向多功能及高性能的发展趋势。为满足半导体封装件朝向高积集度(integration)及微型化(miniaturization)的封装需求,在无核心层封装基板中线路层的多个电性接触垫的尺寸愈来愈小,使得当以多个焊球将晶片接置于该些电性接触垫上时,该焊球与该电性接触垫之间的接触面积较小,因而容易导致该焊球与该电性接触垫之间产生接合力不足而影响后续产品的信赖性。
图1A为绘示现有技术的无核心层封装基板1的剖视示意图,图1B为绘示以焊球17将晶片16接置于现有技术图1A的无核心层封装基板1上的剖视示意图。
如图所示,无核心层封装基板1包括一介电层10、一第一线路层11、一第二线路层12、多个导电盲孔13、一第一绝缘保护层14以及一第二绝缘保护层15。
该介电层10具有相对的第一表面10a与第二表面10b,该第一线路层11具有多个第一电性接触垫111,该第二线路层12具有多个第二电性接触垫121,该些导电盲孔13电性连接该第一线路层11及该第二线路层12。
该第一绝缘保护层14形成于该介电层10的第一表面10a上,并具有多个第一开孔141以外露出该些第一电性接触垫111的接触面112。该第二绝缘保护层15形成于该介电层10的第二表面10b上,并具有多个第二开孔151以外露出该些第二电性接触垫121。
惟,上述图1A的无核心层封装基板1的缺点在于:该第一电性接触垫111的接触面112为平面,故如图1B所示,当以多个焊球17将晶片16接置于该些第一电性接触垫111时,该焊球17与该第一电性接触垫111之间的接触面积较小,因而容易导致该焊球17与该第一电性接触垫111之间产生接合力不足的问题,进而影响后续产品的信赖性。
因此,如何克服上述现有技术的问题,实已成目前亟欲解决的课题。
发明内容
本发明的目的为提供一种无核心层封装基板及其制法,可藉由突出构件的较大接触面积,以强化该第一电性接触垫与该导电元件之间的接合力。
本发明的无核心层封装基板包括:介电层,其具有相对的第一表面与第二表面;第一线路层,其嵌埋于该介电层内并外露于该第一表面,且该第一线路层具有多个第一电性接触垫;多个突出构件,其分别形成于该些第一电性接触垫上,且各该突出构件具有接触面,以供外部的导电元件包覆于该突出构件的接触面上;第二线路层,其形成于该介电层的第二表面上;以及多个导电盲孔,其分别形成于该介电层内以电性连接该第一线路层及该第二线路层。
该突出构件的接触面可包括该突出构件的上表面与侧表面,且该突出构件的宽度可小于或等于该第一电性接触垫的宽度,该突出构件与该第一电性接触垫可为相同材质所形成者或一体成形者,该突出构件可为导电柱或导电迹线的焊垫,该导电元件可为焊球。
该第二线路层可具有多个第二电性接触垫,该导电盲孔可形成于该第一线路层与该第二电性接触垫之间。
该无核心层封装基板可包括导电层,其形成于该突出构件的接触面上或再形成于部分该第一电性接触垫上;或者,该导电层形成于该突出构件与该第一电性接触垫之间。
该无核心层封装基板可包括具有多个开孔的绝缘保护层,其形成于该介电层的第二表面与该第二线路层上,并藉由该些开孔分别外露出该第二线路层的该些第二电性接触垫。
本发明还提供一种无核心层封装基板的制法,其包括:形成具有多个第一开孔的第一阻层于承载板上;形成多个突出构件于该些第一开孔内;形成具有多个第一电性接触垫的第一线路层于该第一阻层上,其中,该些第一电性接触垫对应形成于该些突出构件上;形成具有相对的第一表面与第二表面的介电层于该第一线路层上,以将该第一线路层嵌埋于该介电层内,其中,该介电层的第一表面接合至该第一阻层,且该第一线路层外露于该介电层的第一表面;形成多个导电盲孔于该介电层内以电性连接该第一线路层,并形成第二线路层于该介电层的第二表面上以电性连接该些导电盲孔;以及移除该第一阻层以外露出该些突出构件的接触面。
该介电层可具有多个第二开孔,该些导电盲孔藉由填充导电材料于该些第二开孔内所形成。
该无核心层封装基板的制法可包括:形成剥离层于该承载板的顶面与底面其中一者或二者上,该第一阻层形成于该剥离层上,且该些第一开孔外露出部分该剥离层。
该无核心层封装基板的制法可包括:形成导电层于该第一阻层、该些第一开孔的壁面及该些第一开孔的剥离层上,该第一线路层形成于该导电层上,该些突出构件分别形成于该些第一开孔内的导电层上。
该无核心层封装基板的制法可包括:形成第二阻层于该第一线路层及该些第一电性接触垫上;依据该第二阻层移除部分该导电层以外露出部分该第一阻层;以及移除该第二阻层以外露出该第一线路层及该些第一电性接触垫。
该无核心层封装基板的制法可包括:形成具有多个第三开孔的绝缘保护层于该第二线路层及其多个第二电性接触垫上,并藉由该些第三开孔分别外露出该些第二电性接触垫;以及去除该剥离层以移除该承载板。
该无核心层封装基板的制法可包括:依序形成剥离层与第一导电层于该承载板的顶面与底面其中一者或二者上,该第一阻层形成于该第一导电层上,且该些第一开孔外露出部分该第一导电层。
该无核心层封装基板的制法可包括:形成第二导电层于该第一阻层及该些突出构件上,该第一线路层与该些第一电性接触垫形成于该第二导电层上。
该无核心层封装基板的制法可包括:去除该剥离层以移除该承载板;移除该第一导电层与该第一阻层以外露出该些突出构件的接触面;形成第二阻层于该些突出构件上;依据该第二阻层移除部分该第二导电层以外露出部分该介电层;以及移除该第二阻层以外露出该些突出构件的接触面。
由上可知,本发明的无核心层封装基板及其制法中,主要通过在第一线路层的多个第一电性接触垫上形成多个具有立体的接触面(如上表面及侧表面)的突出构件,以供外部的多个导电元件(如焊球)分别包覆于该些突出构件的接触面上,并可藉由该些导电元件将半导体元件(如晶片)接置于该些突出构件及第一电性接触垫上。藉此,该突出构件与该导电元件之间可形成较大的接触面积,以强化该第一电性接触垫与该导电元件的接合力,进而提高后续产品的信赖性。
附图说明
图1A为绘示现有技术的无核心层封装基板的剖视示意图;
图1B为绘示以焊球将晶片接置于现有技术图1A的无核心层封装基板上的剖视示意图;
图2A至图2L为绘示本发明的无核心层封装基板及其制法的一实施例的剖视示意图;
图2M为绘示以导电元件将半导体元件接置于本发明图2L的无核心层封装基板上的一实施例的剖视示意图;
图3A至图3L为绘示本发明的无核心层封装基板及其制法的另一实施例的剖视示意图;以及
图3M为绘示以导电元件将半导体元件接置于本发明图3L的无核心层封装基板上的另一实施例的剖视示意图。
符号说明
1、2、2'无核心层封装基板
10、27介电层
10a、27a第一表面
10b、27b第二表面
11、25第一线路层
111、251第一电性接触垫
112、241接触面
12、29第二线路层
121、281第二电性接触垫
13、28导电盲孔
14第一绝缘保护层
141、221第一开孔
15第二绝缘保护层
151、271第二开孔
16晶片
17焊球
20承载板
20a顶面
20b底面
21剥离层
211、23导电层
22第一阻层
24突出构件
26第二阻层
30绝缘保护层
301第三开孔
31半导体元件
32导电元件。
具体实施方式
以下藉由特定的具体实施例说明本发明的实施方式,本领域技术人员可由本说明书所揭示的内容轻易地了解本发明的其他优点及功效。
须知,本说明书所附图式所绘示的结构、比例、大小等,均仅用于配合说明书所揭示的内容,以供本领域技术人员的了解与阅读,并非用于限定本发明可实施的限定条件,故不具技术上的实质意义,任何结构的修饰、比例关系的改变或大小的调整,在不影响本发明所能产生的功效及所能达成的目的下,均应仍落在本发明所揭示的技术内容得能涵盖的范围内。
同时,本说明书中所引用的如「上」、「一」、「第一」、「第二」、「表面」或「接触面」等用语,也仅为便于叙述的明了,而非用于限定本发明可实施的范围,其相对关系的改变或调整,在无实质变更技术内容下,当也视为本发明可实施的范畴。
图2A至图2L为绘示本发明的无核心层封装基板2及其制法的一实施例的剖视示意图,图2M为绘示以导电元件32将半导体元件31接置于本发明图2L的无核心层封装基板2上的一实施例的剖视示意图。
如图2A所示,先提供一具有相对的顶面20a与底面20b的承载板20,并形成一或二剥离层21于该承载板20的顶面20a与底面20b其中一者或二者上。该承载板20可为不锈钢板。
如图2B所示,依据该剥离层21是形成于该承载板20的顶面20a与底面20b其中一者或二者上,以形成一或二第一阻层22于该剥离层21上,且该第一阻层22具有多个第一开孔221以外露出部分该剥离层21。
如图2C所示,依据该第一阻层22是形成于该一或二剥离层21上,以藉由溅镀或其他方式形成一或二导电层23于该第一阻层22上、该些第一开孔221的壁面及该些第一开孔221的剥离层21上。该导电层23可为晶种层(seedlayer)。
如图2D所示,形成多个突出构件24于该些第一开孔221内的导电层23上,并形成具有多个第一电性接触垫251的第一线路层25于该导电层23上,且形成该些第一电性接触垫251于该些突出构件24及部分该导电层23上。该突出构件24可为导电柱(如铜柱)或导电迹线的焊垫等,且该突出构件24的宽度可小于或等于该第一电性接触垫251的宽度,该突出构件24与该第一电性接触垫251可为相同材质所形成者或一体成形者。
如图2E所示,形成第二阻层26于该第一线路层25及该些第一电性接触垫251上。
如图2F所示,依据该第二阻层26移除部分该导电层23以外露出部分该第一阻层22,再移除该第二阻层26以外露出该第一线路层25及该些第一电性接触垫251。
如图2G所示,形成具有相对的第一表面27a与第二表面27b的介电层27于该第一线路层25上以嵌埋该第一线路层25于该介电层27内。该介电层27的第一表面27a接合至该第一阻层22,该第一线路层25或该导电层23外露于该介电层27的第一表面27a。
如图2H所示,藉由激光钻孔或其他方式,自该第二表面27b形成多个第二开孔271于该介电层27中以外露出部分该第一线路层25。
如图2I所示,填充导电材料于该介电层27的第二开孔271内以形成多个导电盲孔28而电性连接该第一线路层25,并形成第二线路层29于该介电层27的第二表面27b上以电性连接该些导电盲孔28。该导电盲孔28与该第二线路层29两者可为同时形成、相同材质或一体成形;但在其他实施例中,两者也可为先后形成、不同材质或分别成形。
如图2J所示,形成具有多个第三开孔301的绝缘保护层30于该第二线路层29及其多个第二电性接触垫281上,并藉由该些第三开孔301分别外露出该些第二电性接触垫281。
如图2K所示,去除该剥离层21以移除该承载板20而外露出该第一阻层22。
如图2L所示,移除该第一阻层22以外露出该些突出构件24的接触面241或该导电层23,藉此形成一或二无核心层封装基板2。该突出构件24的接触面241可包括该突出构件24的上表面与侧表面,且该突出构件24的上表面高于该介电层27的第一表面27a,该第一线路层25上的导电层23齐平于该介电层27的第一表面27a。
此外,如图2M所示,可藉由外部的多个导电元件(如焊球)32包覆该些突出构件24的接触面(如上表面及侧表面)241或该些接触面241上的导电层23,以藉由该些导电元件32将半导体元件(如晶片)31接置于该些突出构件24及其下的第一电性接触垫251上。
图3A至图3L为绘示本发明的无核心层封装基板2'及其制法的另一实施例的剖视示意图,图3M为绘示以导电元件32将半导体元件31接置于本发明图3L的无核心层封装基板2'上的另一实施例的剖视示意图。
如图3A所示,先提供一具有相对的顶面20a与底面20b的承载板20,并形成一或二剥离层21于该承载板20的顶面20a与底面20b其中一者或二者上,且藉由溅镀或其他方式形成一或二导电层211于该剥离层21上。该承载板20可为不锈钢板,该导电层211可为晶种层。
如图3B所示,依据该剥离层21与该导电层211是形成于该承载板20的顶面20a与底面20b其中一者或二者上,以形成一或二第一阻层22于该导电层211上,且该第一阻层22具有多个第一开孔221以外露出部分该导电层211。
如图3C所示,形成多个突出构件24于该些第一开孔221所外露的导电层211上。该突出构件24可为导电柱(如铜柱)或导电迹线的焊垫等。
如图3D所示,依据该第一阻层22是形成于该一或二导电层211上,以藉由溅镀或其他方式形成一或二导电层23于该第一阻层22及该些突出构件24上。该导电层23可为晶种层。
如图3E所示,形成具有多个第一电性接触垫251的第一线路层25于该导电层23上。该第一电性接触垫251的宽度可小于、等于或大于该突出构件24的宽度。
在其他实施例中,也可不必形成有该导电层23,从而直接形成该第一线路层25于该第一阻层22上,并形成该些第一电性接触垫251于该些突出构件24上。
如图3F所示,形成具有相对的第一表面27a与第二表面27b的介电层27于该导电层23与该第一线路层25上,以将该第一线路层25嵌埋于该介电层27内且外露于该第一表面27a,且该介电层27的第一表面27a面向该第一阻层22。接着,可藉由激光钻孔或其他方式,自该第二表面27b形成多个第二开孔271于该介电层27中以外露出部分该第一线路层25。
在其他实施例中,也可不必形成有该导电层23,从而直接形成该介电层27于该第一阻层22上,并形成该些第一电性接触垫251于该些突出构件24上。
如图3G所示,填充导电材料于该介电层27的第二开孔271内以形成多个导电盲孔28而电性连接该第一线路层25,并形成第二线路层29于该介电层27的第二表面27b上以电性连接该些导电盲孔28。该导电盲孔28与该第二线路层29两者可为同时形成、相同材质或一体成形;但在其他实施例中,两者也可为先后形成、不同材质或分别成形。
如图3H所示,去除该剥离层21以移除该承载板20而外露出该导电层211与该第一阻层22。
如图3I所示,移除该导电层211与该第一阻层22以外露出该些突出构件24的接触面241及部分该导电层23。
如图3J所示,形成第二阻层26于该些突出构件24的上表面。
如图3K所示,依据该第二阻层26移除部分该导电层23以外露出部分该介电层27的第一表面27a。
如图3L所示,移除该第二阻层26以外露出该些突出构件24的接触面241,藉此形成一或二无核心层封装基板2。该突出构件24的接触面241可包括该突出构件24的上表面与侧表面,且该突出构件24的上表面高于该介电层27的第一表面27a,该第一线路层25齐平于该介电层27的第一表面27a。
此外,如图3M所示,可藉由外部的多个导电元件(如焊球)32包覆该些突出构件24的接触面(如上表面及侧表面)241与该些突出构件24下的导电层23,以藉由该些导电元件32将半导体元件(如晶片)31接置于该些突出构件24上。
本发明另提供一种无核心层封装基板2,如图2L所示,请一并参考图2M。无核心层封装基板2主要包括一介电层27、一第一线路层25、多个突出构件24、一第二线路层29以及多个导电盲孔28。
该介电层27具有相对的第一表面27a与第二表面27b。该第一线路层25嵌埋于该介电层27内并外露于该第一表面27a,且该第一线路层25具有多个第一电性接触垫251。
该些突出构件24分别形成于该些第一电性接触垫251上,且各该突出构件24具有接触面241,以供外部的导电元件32包覆于该突出构件24的接触面241上。该突出构件24的接触面241可包括该突出构件24的上表面与侧表面,且该突出构件24的宽度可小于或等于该第一电性接触垫251的宽度,该突出构件24与该第一电性接触垫251可为相同材质所形成者或一体成形者,该突出构件24可为导电柱(如铜柱)或导电迹线的焊垫等,该导电元件32可为焊球等。
该第二线路层29形成于该介电层27的第二表面27b上,并具有多个第二电性接触垫281,该导电盲孔28可形成于该介电层27内以电性连接该第一线路层25及该第二线路层29的第二电性接触垫281。
该无核心层封装基板2可包括导电层23,其形成于该突出构件24的接触面241上或再形成于部分该第一电性接触垫251上。该导电元件32包覆该接触面241的导电层23或再包覆该第一电性接触垫251的导电层23。
该无核心层封装基板2可包括具有多个开孔(如第三开孔301)的绝缘保护层30,该绝缘保护层30形成于该介电层27的第二表面27b与该第二线路层29上,并藉由该些开孔(如第三开孔301)分别外露出该第二线路层29的第二电性接触垫281。
本发明又提供一种无核心层封装基板2',如图3L所示,请一并参考图3M。图3L的无核心层封装基板2'与上述图2L的无核心层封装基板2大致相同,其主要差异如下:
在图3L中,该导电层23形成于该突出构件24与该第一电性接触垫251之间。因此,如图3M所示,该导电元件32可包覆该突出构件24的接触面241或再包覆该突出构件24下的导电层23。
由上可知,本发明的无核心层封装基板及其制法中,主要通过在第一线路层的多个第一电性接触垫上形成多个具有立体的接触面(如上表面及侧表面)的突出构件,以供外部的多个导电元件(如焊球)分别包覆于该些突出构件的接触面上,并可藉由该些导电元件将半导体元件(如晶片)接置于该些突出构件及第一电性接触垫上。藉此,该突出构件与该导电元件之间可形成较大的接触面积,以强化该第一电性接触垫与该导电元件的接合力,进而提高后续产品的信赖性。
上述实施例仅用于例示性说明本发明的原理及其功效,而非用于限制本发明。任何本领域技术人员均可在不违背本发明的精神及范畴下,对上述实施例进行修改。因此本发明的权利保护范围,应如权利要求书所列。

Claims (19)

1.一种无核心层封装基板,其包括:
介电层,其具有相对的第一表面与第二表面;
第一线路层,其嵌埋于该介电层内并外露于该第一表面,且该第一线路层具有多个第一电性接触垫;
多个突出构件,其分别形成于该些第一电性接触垫上,且各该突出构件具有接触面,以供外部的导电元件包覆于该突出构件的接触面上;
第二线路层,其形成于该介电层的第二表面上;以及
多个导电盲孔,其分别形成于该介电层内以电性连接该第一线路层及该第二线路层。
2.根据权利要求1所述的无核心层封装基板,其特征为,该突出构件的接触面包括该突出构件的上表面与侧表面。
3.根据权利要求1所述的无核心层封装基板,其特征为,该突出构件的宽度小于或等于该第一电性接触垫的宽度。
4.根据权利要求1所述的无核心层封装基板,其特征为,该突出构件与该第一电性接触垫为相同材质所形成者或一体成形者。
5.根据权利要求1所述的无核心层封装基板,其特征为,该突出构件为导电柱或导电迹线的焊垫,该导电元件为焊球。
6.根据权利要求1所述的无核心层封装基板,其特征为,该第二线路层具有多个第二电性接触垫,该导电盲孔形成于该第一线路层与该第二电性接触垫之间。
7.根据权利要求1所述的无核心层封装基板,其特征为,该无核心层封装基板还包括导电层,其形成于该突出构件的接触面上或再形成于部分该第一电性接触垫上。
8.根据权利要求1所述的无核心层封装基板,其特征为,该无核心层封装基板还包括导电层,其形成于该突出构件与该第一电性接触垫之间。
9.根据权利要求1所述的无核心层封装基板,其特征为,该无核心层封装基板还包括具有多个开孔的绝缘保护层,其形成于该介电层的第二表面与该第二线路层上,并藉由该些开孔分别外露出该第二线路层的第二电性接触垫。
10.一种无核心层封装基板的制法,其包括:
形成具有多个第一开孔的第一阻层于承载板上;
形成多个突出构件于该些第一开孔内;
形成具有多个第一电性接触垫的第一线路层于该第一阻层上,其中,该些第一电性接触垫对应形成于该些突出构件上;
形成具有相对的第一表面与第二表面的介电层于该第一线路层上,以将该第一线路层嵌埋于该介电层内,其中,该介电层的第一表面接合至该第一阻层,且该第一线路层外露于该介电层的第一表面;
形成多个导电盲孔于该介电层内以电性连接该第一线路层,并形成第二线路层于该介电层的第二表面上以电性连接该些导电盲孔;以及
移除该第一阻层以外露出该些突出构件的接触面。
11.根据权利要求10所述的无核心层封装基板的制法,其特征为,该介电层还具有多个第二开孔,该些导电盲孔藉由填充导电材料于该些第二开孔内所形成。
12.根据权利要求10所述的无核心层封装基板的制法,其特征为,该制法还包括形成剥离层于该承载板的顶面与底面其中一者或二者上,该第一阻层形成于该剥离层上,且该些第一开孔外露出部分该剥离层。
13.根据权利要求12所述的无核心层封装基板的制法,其特征为,该制法还包括形成导电层于该第一阻层、该些第一开孔的壁面及该些第一开孔的剥离层上,该第一线路层形成于该导电层上,该些突出构件分别形成于该些第一开孔内的导电层上。
14.根据权利要求13所述的无核心层封装基板的制法,其特征为,该制法还包括:
形成第二阻层于该第一线路层及该些第一电性接触垫上;
依据该第二阻层移除部分该导电层以外露出部分该第一阻层;以及
移除该第二阻层以外露出该第一线路层及该些第一电性接触垫。
15.根据权利要求14所述的无核心层封装基板的制法,其特征为,该制法还包括:
形成具有多个第三开孔的绝缘保护层于该第二线路层及其多个第二电性接触垫上,并藉由该些第三开孔分别外露出该些第二电性接触垫;以及
去除该剥离层以移除该承载板。
16.根据权利要求10所述的无核心层封装基板的制法,其特征为,该制法还包括依序形成剥离层与第一导电层于该承载板的顶面与底面其中一者或二者上,该第一阻层形成于该第一导电层上,且该些第一开孔外露出部分该第一导电层。
17.根据权利要求16所述的无核心层封装基板的制法,其特征为,该制法还包括形成第二导电层于该第一阻层及该些突出构件上,该第一线路层与该些第一电性接触垫形成于该第二导电层上。
18.根据权利要求17所述的无核心层封装基板的制法,其特征为,该制法还包括:
去除该剥离层以移除该承载板;
移除该第一导电层与该第一阻层以外露出该些突出构件的接触面;
形成第二阻层于该些突出构件上;
依据该第二阻层移除部分该第二导电层以外露出部分该介电层;以及
移除该第二阻层以外露出该些突出构件的接触面。
19.根据权利要求10所述的无核心层封装基板的制法,其特征为,该承载板为不锈钢板。
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