CN105097864B - 具电阻性元件的非易失性存储器与其制作方法 - Google Patents
具电阻性元件的非易失性存储器与其制作方法 Download PDFInfo
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- CN105097864B CN105097864B CN201410250984.9A CN201410250984A CN105097864B CN 105097864 B CN105097864 B CN 105097864B CN 201410250984 A CN201410250984 A CN 201410250984A CN 105097864 B CN105097864 B CN 105097864B
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- nonvolatile memory
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- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 230000007704 transition Effects 0.000 claims abstract description 51
- 229910052751 metal Inorganic materials 0.000 claims abstract description 24
- 239000002184 metal Substances 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 230000004888 barrier function Effects 0.000 claims description 26
- 229910017947 MgOx Inorganic materials 0.000 claims description 14
- 229910005855 NiOx Inorganic materials 0.000 claims description 14
- 229910003070 TaOx Inorganic materials 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 12
- 238000010292 electrical insulation Methods 0.000 claims description 11
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 230000008859 change Effects 0.000 claims description 8
- 229910004156 TaNx Inorganic materials 0.000 claims description 7
- 229910010421 TiNx Inorganic materials 0.000 claims description 7
- 229910003087 TiOx Inorganic materials 0.000 claims description 7
- 229910010303 TiOxNy Inorganic materials 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 229910052681 coesite Inorganic materials 0.000 claims 2
- 229910052906 cristobalite Inorganic materials 0.000 claims 2
- 239000000377 silicon dioxide Substances 0.000 claims 2
- 229910052682 stishovite Inorganic materials 0.000 claims 2
- 229910052905 tridymite Inorganic materials 0.000 claims 2
- 230000005669 field effect Effects 0.000 description 18
- DDQRQQJEQDOTFL-UHFFFAOYSA-N gold;molecular oxygen Chemical compound [Au].O=O DDQRQQJEQDOTFL-UHFFFAOYSA-N 0.000 description 13
- 229910000314 transition metal oxide Inorganic materials 0.000 description 10
- 238000003860 storage Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000002360 preparation method Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 4
- 229910052723 transition metal Inorganic materials 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- -1 transition metal nitride Chemical class 0.000 description 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- QRSFFHRCBYCWBS-UHFFFAOYSA-N [O].[O] Chemical compound [O].[O] QRSFFHRCBYCWBS-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/253—Multistable switching devices, e.g. memristors having three or more electrodes, e.g. transistor-like devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8833—Binary metal oxides, e.g. TaOx
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
Claims (12)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103116387 | 2014-05-08 | ||
TW103116387A TWI538108B (zh) | 2014-05-08 | 2014-05-08 | 具電阻性元件之非揮發性記憶體與其製作方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105097864A CN105097864A (zh) | 2015-11-25 |
CN105097864B true CN105097864B (zh) | 2017-12-22 |
Family
ID=54368541
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410250984.9A Expired - Fee Related CN105097864B (zh) | 2014-05-08 | 2014-06-06 | 具电阻性元件的非易失性存储器与其制作方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9287324B2 (zh) |
CN (1) | CN105097864B (zh) |
TW (1) | TWI538108B (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI619283B (zh) | 2016-05-30 | 2018-03-21 | 旺宏電子股份有限公司 | 電阻式記憶體元件及其製作方法與應用 |
CN108133946B (zh) * | 2016-12-01 | 2020-10-16 | 中芯国际集成电路制造(上海)有限公司 | 半导体装置及其制造方法 |
CN109698213A (zh) * | 2017-10-20 | 2019-04-30 | 联华电子股份有限公司 | 半导体结构及其制作方法 |
CN111785650B (zh) * | 2019-04-03 | 2023-07-04 | 林崇荣 | 微型探测器及缺陷量测方法 |
TWI723371B (zh) * | 2019-04-03 | 2021-04-01 | 國立清華大學 | 微型探測器及缺陷量測方法 |
US11289541B2 (en) * | 2019-11-14 | 2022-03-29 | Winbond Electronics Corp. | Resistive random access memory devices and methods for forming the same |
CN114792688A (zh) * | 2021-01-26 | 2022-07-26 | 上峰科技股份有限公司 | 电子系统、与宽带隙半导体器件集成的可编程电阻存储器及其操作方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1691294A (zh) * | 2004-04-28 | 2005-11-02 | 国际商业机器公司 | 鳍片场效应晶体管半导体结构及其制造方法 |
CN101097956A (zh) * | 2006-06-29 | 2008-01-02 | 国际商业机器公司 | 一种FinFET结构和制作FinFET结构的方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8063448B2 (en) * | 2007-03-16 | 2011-11-22 | Infineon Technologies Ag | Resistive memory and method |
US8107274B2 (en) * | 2009-07-30 | 2012-01-31 | Chrong-Jung Lin | Variable and reversible resistive element, non-volatile memory device and methods for operating and manufacturing the non-volatile memory device |
KR101785447B1 (ko) * | 2011-05-26 | 2017-10-16 | 삼성전자 주식회사 | 반도체 소자의 제조 방법 |
TWI553924B (zh) * | 2014-01-15 | 2016-10-11 | 林崇榮 | 具電阻性元件的非揮發性記憶體與晶胞結構及其製作方法 |
TWI534992B (zh) * | 2014-03-28 | 2016-05-21 | 林崇榮 | 具電阻性元件的非揮發性記憶體與晶胞結構及其製作方法 |
-
2014
- 2014-05-08 TW TW103116387A patent/TWI538108B/zh not_active IP Right Cessation
- 2014-06-06 CN CN201410250984.9A patent/CN105097864B/zh not_active Expired - Fee Related
- 2014-10-02 US US14/504,563 patent/US9287324B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1691294A (zh) * | 2004-04-28 | 2005-11-02 | 国际商业机器公司 | 鳍片场效应晶体管半导体结构及其制造方法 |
CN101097956A (zh) * | 2006-06-29 | 2008-01-02 | 国际商业机器公司 | 一种FinFET结构和制作FinFET结构的方法 |
Also Published As
Publication number | Publication date |
---|---|
US9287324B2 (en) | 2016-03-15 |
CN105097864A (zh) | 2015-11-25 |
US20150325626A1 (en) | 2015-11-12 |
TWI538108B (zh) | 2016-06-11 |
TW201543616A (zh) | 2015-11-16 |
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Effective date of registration: 20160727 Address after: Hsinchu County, Taiwan, China Applicant after: This is an electronic Limited by Share Ltd Address before: Hsinchu City, Taiwan, China Applicant before: Lin Chongrong |
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Effective date of registration: 20180604 Address after: Hsinchu City, Taiwan, China Patentee after: Kirby Technology Co. Ltd. Address before: Hsinchu County, Taiwan, China Patentee before: This is an electronic Limited by Share Ltd |
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