CN105093861B - Exposure device - Google Patents
Exposure device Download PDFInfo
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- CN105093861B CN105093861B CN201510244466.0A CN201510244466A CN105093861B CN 105093861 B CN105093861 B CN 105093861B CN 201510244466 A CN201510244466 A CN 201510244466A CN 105093861 B CN105093861 B CN 105093861B
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Abstract
A kind of exposure device is provided, it is the exposure device of volume to volume mode, shortens productive temp in the case of cut defect can not being produced on long size work, and the connection precision of the pattern formed is good.The exposure device has：Exposure desk (31), it keeps long size work (W)；Platform move portion (32), it moves back and forth exposure desk (31)；Supply side constraint roll (15), it is arranged on the downstream of supply spool (11) and the upstream side of exposing unit (51), constraint long size work (W)；And winding side constraint roll (25), it is arranged on the downstream of exposing unit (51) and the upstream side of winding reel (21), long size work (W) is constrained, at least one party in the supply side constraint roll (15) and winding side constraint roll (25) has roller driver element.
Description
Technical field
The present invention relates to the exposure device of so-called volume to volume mode, and from supplying, lateral exposure portion conveying long size work is (soft
Property substrate), using the exposure portion by pattern exposure in long size work, and long size work is transported to winding side.
Background technology
Generally, the electronic circuit board (printing on being used in the various miniature electrical equipments such as mobile phone, mobile device
Circuit substrate) channel base material, due to body is compact, and used thin and high precision long size work.
The thickness of the material of such long size work be 0.1mm or so to 0.06mm, and have the trend of slimming.And
Recently, very long long size work has been used, it is the wide long size work shape of thin and wide degree, and thickness is below 0.05mm, width
For 550mm, and length is 100m.Generally long size work wound into rolls is handled.
As the device that electronic circuit is formed on such long size work, it is known to the dress of so-called volume to volume mode
Put, it has supply spool, winding reel and the exposure portion between the supply spool and winding reel, an edge strip
The length direction conveying of workpiece is erected at long size work between supply spool and winding reel, while by exposure portion by pattern
It is exposed to the surface of long size work.
Also, it is also known that there is DMD (Digital Micro-mirror Device in exposure portion：Digital micromirror device
Part) etc. array of light modulation elements, volume to volume mode maskless exposure device.Using maskless exposure, with long size work
Conveying synchronously switches the driving data of array of light modulation elements successively, to be formed for example more than length as 1m thus, it is possible to expose
Bar pattern.
In the case of maskless exposure device, the relation of the depth of focus of exposure optical system is typically due to, it is necessary to use
Exposure desk keeps being exposed in the state of the plane of workpiece.In the maskless exposure dress of the volume to volume mode of patent document 1
In putting, exposure desk is being fixed in long size work absorption and is protecting the distance of exposure portion and long size work surface in the direction of the optical axis
Hold as in the state of constant, while make optical modulation element be relatively moved with long size work, while to being fixed on long size work surface
Photosensitive oxidant layer projection pattern light.
Patent document 1：Japanese Unexamined Patent Publication 2006-102991 publications
In the maskless exposure device of volume to volume mode as patent document 1, for the 1 of long size work conveying direction
Secondary exposure distance is exposed the travel limit of platform.In order to form over the pattern of the length of limitation, it is necessary to finish 1 exposure
After process, long size work and exposure desk is set to be moved respectively to respective exposure starting position.
However, in the maskless exposure device of the volume to volume mode of patent document 1, due to carrying out strip using exposure desk
The movement of workpiece, therefore when exposure desk to be made returns to the starting position of exposure at high speed, it is arranged at unwinding portion and winder
Dance roller can not follow the return speed of substrate and produce skidding, wear-out defect is produced on long size work.
On the other hand, reduce exposure desk acceleration with enable dance roller follow long size work return speed
In the case of degree, brought greater impact to productive temp, harmful effect is produced to productivity.
Also, the back amount due to long size work is different from the back amount of exposure desk, and (exposure desk about more to be returned and exposes
The corresponding degree of the length of light table in the conveying direction), therefore, although exist exposure desk release long size work absorption fixation,
The only process of exposure desk movement, still, now the deadweight of the weight of dance roller or long size work is uneven, and causes strip
Workpiece moves along conveying direction.Accordingly, there exist following problem：The end position of the 1st time of the pattern formed with next time
Starting position is inconsistent.
The content of the invention
The exposure device of the present invention has：Supply unit, it is exposed body from supply spool by strip with plasticity
It is transported to winding reel；Exposing unit, it is arranged on being exposed above body than supply spool downstream, has multiple spaces
Light-modulating cell；Exposure desk, it keeps the part for being exposed body；And mobile unit, it makes exposure desk along supply unit
The conveying direction for being exposed body move back and forth.
In addition, the exposure device of the present invention has：Supply side constraint roll, it is arranged on the downstream of supply spool and exposure
The upstream side of unit, constraint are exposed body；And winding side constraint roll, it is arranged on the downstream of exposing unit and winding reel
Upstream side, constraint is exposed body, and at least one party in supply side constraint roll and winding side constraint roll has roller driver element.
When exposure desk remains and is exposed body, supply side constraint roll and winding side constraint roll release the pact for being exposed body
Beam, moved freely through without prejudice to body is exposed with moving for exposure desk.
In addition, in the exposure device of the present invention, the state of body is exposed from conveying start bit to remain in exposure desk
Put be moved to conveying end position during, exposing unit by pattern exposure in being exposed body, in the end exposure of exposing unit
Afterwards, exposure desk conveys starting position not keep the state for being exposed body to be moved to from conveying end position.At the same time, supply
Side constraint roll makes to be exposed body to supply side movement.
Exposure desk has is pressed into exposure desk by the end face for the width for being exposed body (along the end face of conveying direction)
Clamping device.By clamping the both ends of the surface for the width for being exposed body between clamping device and exposure desk, will be exposed
The plane of exposure of body remains plane.
In addition, the exposure device of the present invention has：Shooting unit；And display unit, it can be shown by shooting unit
The image of shooting, shooting unit is used to shoot the telltale mark for being arranged at and being exposed body in positioning step, and is also confirming
It is used to observe pattern in the step of pattern after exposure.
According to the present invention, the exposure device of following volume to volume mode can be achieved, the exposure device can be in long size work
On do not produce cut in the case of shorten productive temp, and the connection precision of the pattern formed is good.
Brief description of the drawings
Fig. 1 is the side perspective view of the schematic configuration for the exposure device for showing one embodiment of the present invention.
Fig. 2 is the top view in the piece-holder portion for showing exposure desk.
Fig. 3 a are the 1st process charts of the action for showing exposure device.
Fig. 3 b are the 2nd process charts of the action for showing exposure device.
Fig. 3 c are the 3rd process charts of the action for showing exposure device.
Fig. 3 d are the 4th process charts of the action for showing exposure device.
Fig. 3 e are the 5th process charts of the action for showing exposure device.
Fig. 3 f are the 6th process charts of the action for showing exposure device.
Fig. 3 g are the 7th process charts of the action for showing exposure device.
Fig. 3 h are the 8th process charts of the action for showing exposure device.
Fig. 3 i are the 9th process charts of the action for showing exposure device.
Fig. 3 j are the 10th process charts of the action for showing exposure device.
Label declaration
1：Exposure device；2：Pallet；10：Throw-in part；11：Supply spool；12、14：Deflector roll；13：Supply side tension adjustment
Roller；15：Supply side brake roller；16：Endface position sensor；21：Winding reel；22、24：Deflector roll；23：Winding side tension adjustment
Roller；25：Winding side brake roller；30：Exposure portion；31：Exposure desk；32：Platform move portion；33：Guide rail；34：Elevation driving unit；
35：Workpiece grip mechanism；40：Calibration portion；41：Calibrated cameras；42：Monitor；50：Exposure-processed portion；51：Exposing unit；
W：Long size work (photosensitive substrate)；A：The exposure starting position (point A) of the 1st time on long size work W；B：On long size work W
The exposure starting position (point B) of the 2nd time.
Embodiment
《1st embodiment》
1~Fig. 2 of reference picture illustrates to the exposure device 1 of first embodiment of the present invention.Exposure device 1 is so-called
The exposure device of volume to volume mode, have successively towards downstream from the upstream side of long size work W conveying direction：Supply unit
10, it supplies long size work W；Exposure portion 30, pattern exposure is formed electronic circuit by it in long size work W surface；And
Winder 20, it reclaims the long size work W exposed.
＜ long size works W structure ＞
Long size work W is, for example, to make photonasty strip film (the synthetic resin soft film for being coated with photoreceptor on the surface)
Obtained from being formed as web-like, the photonasty strip film is the electronic circuit board (print for mobile phone or mobile device etc.
Brush circuit substrate) submount material.The long size work W for being coated with the photosensitive materials such as photoresist is formed as based on copper-clad laminated
The sheet of plate etc., there is tens~hundreds of meters of length.Hereinafter, by long size work W front and back towards in figure
The face of side is referred to as " front ", is referred to as " back side " towards the face of lower section in figure.
Hereinafter, represented with " X " along conveying direction M direction, the long size work W vertical with conveying direction M is represented with " Y "
Width, represent the direction (vertical direction) vertical with X and Y both sides with " Z ".Also, wanted in exposure device 1 is represented
During the position relationship of element, it will be close to supply spool side and be referred to as upstream side, be referred to as downstream close to winding reel side.
The structure ＞ of ＜ supply units 10 and winder 20
Supply unit 10 has supply spool 11 from the upstream side of long size work W conveying direction towards downstream, led successively
Roller 12, supply side dance roller 13, deflector roll 14, supply side brake roller 15 and endface position sensor 16, form for
Exposure portion 30 supplies long size work W Workpiece supply system.Upstream side direction of the winder 20 from long size work W conveying direction
Downstream has winding side brake roller 25, deflector roll 24, winding side dance roller 23, deflector roll 22 and winding reel 21 successively,
Form the workpiece reel system for winding the long size work W after being exposed by exposure portion 30.
Supply spool 11 keeps the long size work W of wound into rolls, by being pivoted about with the rotary shaft of itself,
Towards downstream supply (submitting) long size work W.Winding reel 21, will be from by being pivoted about with the rotary shaft of itself
Supply next long size work W wound into rolls in upstream side is simultaneously kept to it.Between supply spool 11 and winding reel 21 have
The rotary drive unit (not shown) of rotation driving is carried out to the supply spool 11 and winding reel 21 with having a rest.Long size work W
Quantity delivered and winding amount changed with long size work W conveying, thus, supply spool 11 and winding reel 21 it is outer
Footpath changes.
Long size work W is erected at supply by deflector roll 12,14,22,24, supply side brake roller 15 and winding side brake roller 25
Between spool 11 and winding reel 21, by being pivoted about with the rotary shaft of itself, come towards the conveying of winding reel 21
Automatically supply the long size work W of spool 11.
Supply side brake roller 15 and winding side brake roller 25 are configured to respective rotary shaft and are arranged roughly in the horizontal direction
Straight line.Supply side brake roller 15 and winding side brake roller 25 are made up of niproll, and the niproll is by across long size work W
Two rollers of relative configuration are formed.The two rollers can utilize mechanism (not shown), and (Z-direction) is mobile along the vertical direction respectively, with
Clamping or release long size work W.
Supply side brake roller 15 and winding side brake roller 25 can utilize niproll clamping long size work W, and not make
The mode of niproll rotation applies braking, and thus long size work W is applied and braked.On the other hand, releasing long size work W's
Under state, leave niproll from long size work W front and back, so as not to hinder long size work W movement.
Also, supply side brake roller 15 and winding side brake roller 25 have the rotation driving that two pairs of rollers carry out rotation driving respectively
Unit (not shown).In the state of long size work W is hold, rotary drive unit is intermittently and with roughly the same rotation
Drive volume carries out rotation driving to supply side brake roller 15 and winding side brake roller 25, and thereby, it is possible to will be erected at supply spool
Long size work W between 11 and winding reel 21 gradually conveys (segmentation feeding) specific length.Rotary drive unit for example using
Stepping motor, accurately control long size work the W amount of feeding and acceleration etc..
In addition, supply side brake roller 15 and winding side brake roller 25 can also without using clamping long size work W niproll,
And use the adsorption roller of the absorbing unit at the back side with absorption long size work W.By in supply side brake roller 15 and winding side
Brake roller 25 adsorbs and carries out rotation driving by rotary drive unit in the state of the long size work W back side, can be to strip work
Part W is conveyed.
Rotation driving list all be present in supply side brake roller 15 and the both sides of winding side brake roller 25 in addition, though exemplifying
The situation of member, still, in the case where brake roller only conveys long size work W in one direction, it can also only make introducing side (supply
Side) brake roller there is rotary drive unit, make the brake roller of the opposing party only there is brake.In such a case it is possible to drawing
When entering the brake roller progress rotation driving of side, the brake roller of the opposing party releases braking in the state of long size work W is hold, folder
Movement of the roller by long size work W is held with rotation.
Deflector roll 12,14,22,24 is that (submitting) the long size work W that will be supplied from supply spool 11 is guided to downstream
Help roll.In deflector roll, at least deflector roll 14 and 24 is configured to respective rotary shaft general alignment is in alignment in the horizontal direction.
Supply deflector roll 12,14,22,24 can also have prevent long size work W in the width direction (paper vertical direction in Fig. 1, Fig. 3,
Left and right directions in Fig. 2) deviate flange (not shown).
Supply side dance roller 13 and winding side dance roller 23 have the function as buffer：They are with length
Bar workpiece W conveying and lift, by long size work W apply tension force and prevent long size work W produce relaxation or fold, and
For the scan exposure in exposure portion described later, long size work W is set to be moved in exposure portion 30.
Supply unit 10 has the endface position sensor 16 for the endface position for being used to detect long size work W.According to end face position
The output of sensor 16 is put, supply unit 10 carries out the end face of the sinuous implementation correction to long size work W by mechanism (not shown)
Position controls.Such as framework (not shown) to being integrally supported from supply spool 11 to supply side brake roller 15 is set, and
Make width (Y-direction) of the framework along long size work W mobile, thus carry out endface position control.Endface position controls
Prior art, it can generally be realized using known controller.
The structure ＞ of ＜ exposure portions 30
Exposure portion 30 is configured between supply side brake roller 15 and winding side brake roller 25.Exposure portion 30 has exposure desk
31st, calibrated cameras 41 and exposing unit 51.
Exposing unit 51 has multiple photoheads (not shown), regularly configure from long size work W to vertical top every
Open the position of predetermined distance.Light source and lamp optical system (not shown) are configured with for each photohead, is gone out from light source radiation
Light is directed to corresponding photohead via corresponding lamp optical system respectively.Each photohead has：Multiple micro mirrors are made to be in
DMD (the Digital Micro-mirror Device of two-dimensional arrangements：DMD) and formed on long size work
The imaging optical system of DMD picture.
DMD micro mirror is selectively positioned to guide the 1st posture of light on long size work W and to outside long size work W
Any one posture in the 2nd posture of light is guided, each micro mirror is independently controlled.
Exposure area is distributed respectively for each photohead, and the exposure area is by splitting strip along conveying direction M
Workpiece W and it is defined, to each photohead provide scanning strip.Formed respectively according to the width of scanning strip as from each photohead
Light irradiation area exposure region, according to exposure region to long size work W irradiation lights.
Exposure desk 31 adsorbs the long size work W back side, and remains at flat.Exposure desk 31 can be driven by lifting
Moving cell 34, at the back side of the upper end position and exposure desk 31 and long size work W of exposure desk 31 and long size work W rear-face contact
Lifted between the lower end position of separation.Also, exposure desk 31 has the platform move portion 32 for scanning or Step-and-repeat.
As shown in Fig. 2 exposure desk 31 has the workpiece of the clamping long size work W end face along conveying direction (X-direction)
Clamping device 35.Workpiece grip mechanism 35 between platform by clamping the end face of long size work W conveying direction (X-direction) at it
Fixture 35a and fixture 35b is formed.Fixture 35a and fixture 35b is installed on Y-direction travel mechanism (not shown), can be according to strip
Workpiece W width adjusts clip position.
Because long size work W is relatively thin membranaceous, therefore warpage can be produced on width (Y-direction).Piece-holder
Mechanism 35 is clamped in a manner of long size work W is pressed into exposure desk, and thereby, it is possible to being exposed long size work W
Correct and remain flat in region.
Calibrated cameras 41 is arranged on the upstream side of exposing unit 51, the calibration being arranged on by shooting on long size work W
Mark, obtain long size work W positional information.While long size work W is set to move in X direction, while carrying out the bat of calibration mark
Take the photograph.
The exposure conveying action ＞ of ＜ exposure devices 1
Reference picture 3a~Fig. 3 j process chart, the exposure conveying action to exposure device 1 are described in detail.In addition,
Arrow near long size work W in figure represents long size work W movement.Also, the point A on long size work W represents the 1st exposure
The original position of light time, original position when point B represents end position during the 1st exposure and represents the 2nd exposure.
Step S1：Long size work W as the web-like of the new material before processing is arranged on supply spool 11, sends out length
Bar workpiece W leading section and be set up in deflector roll 12, supply side dance roller 13, deflector roll 14, supply side brake roller 15, volume
Around side brake roller 25, deflector roll 24, winding side dance roller 23, deflector roll 22, and it is fixed on winding reel 21.In the initial setting up
Under state, in supply side dance roller 13 and winding side dance roller 23, long size work W is not buffered.(Fig. 3 a)
Step S2：Start the automatic operation mode of exposure device.Rise etc. the exposure desk 31 stayed at calibration starting position
To upper end position, the 1 section of long size work W back side is adsorbed, and is remained at flat.Also, the piece-holder of exposure desk 31
Mechanism 35 clamps long size work W at it between platform.(Fig. 3 b)
Step S3：Rotation driving amount as defined in the rotary drive unit rotation (not shown) of supply spool 11, thus, supply
Long size work W is sent out amount corresponding with 1 stroke (about 2 sections) of exposure desk 31 by spool 11.The long size work W being sent via
Supply deflector roll 12 and enter supply side dance roller 13.Here, long size work W is exposed platform 31 in downstream and adsorbed, therefore, long
Bar workpiece W is buffered while moderate tension is kept by dance roller 13.(Fig. 3 c)
Step S4：Exposure desk 31 is driven in X direction, is shone in the state of absorption remains long size work W by calibrating
The lower section of camera 41.Now, with the movement of exposure desk 31, the long size work for being supplied to the buffering of side dance roller 13 is pulled out
W, while at winding side dance roller 23, long size work W U-shaped deepens, long size work W is buffered.(Fig. 3 c
→ Fig. 3 d)
In the case of interior layer pattern in long size work W being present (after the second layer of laminated substrate etc.), in long size work W
On be provided with calibration mark, the calibration mark is used for the position alignment for carrying out the pattern to be exposed and interior layer pattern.Coordinate exposure
The movement of platform 31, the calibration mark on long size work W is formed using the shooting of calibrated cameras 41.In addition, in long size work W
In the case of not having interior layer pattern (first layer of laminated substrate etc.), calibration mark is not provided with sometimes, still, in the situation
Under, because exposure device 1 is without calibration (exposure position based on exposure data corrects), therefore without the bat of calibration mark
Take the photograph.
Step S5：The long size work W positional information according to obtained from the shooting as calibration mark, carry out long size work
With the calibration for the pattern to be exposed.Specifically, long size work W positional information is sent to the spectrum assignment of exposing unit 51
Portion (not shown), the coordinate for the exposure data for using pattern exposure when the long size work W for exposing unit 51 are corrected
Processing.During the correction process of data is exposed, exposure desk 31 is opened in the state of long size work W is remain in exposure
Beginning opening position temporarily ceases.(Fig. 3 d)
Step S6：Exposure desk 31 starts to move downstream, in exposure portion 30, passes through known multiple-exposure skill
Art, exposing unit 75 is by electronic circuit pattern scan exposure in the sense on the surface for the long size work W that holding is adsorbed by exposure desk 31
Optical material layer (Fig. 3 d → Fig. 3 e).When 1 section of long size work W from point A to point B exposure complete when, exposure desk 31 terminate to
The movement of downstream direction, stop at end exposure opening position.(Fig. 3 e)
Step S7：Supply side brake roller 15 and winding side brake roller 25 clamp long size work W, and fixed long size work W (figures
3f).Then, absorption of the exposure desk 31 to long size work W is released, and workpiece grip mechanism 35 releases long size work W fixation,
Elevation driving unit 34 makes exposure desk 31 drop to lower end position (Fig. 3 g).Due to long size work W by roller 15 and 25 clamp, therefore
When platform 31 separates from long size work W, long size work W is braked without being moved to X-direction or Y-direction, so as to keep advising
Fixed position.
Step S8：By the rotary drive unit of supply side brake roller 15 and winding side brake roller 25 rotation regulation (not shown)
Rotation driving amount, thus, supply side brake roller 15 and winding side brake roller 25 are by long size work W backrush ormal weights, moving long
Bar workpiece W so that lower 1 section of 1 section after the completion of long size work W exposure, which comes calibration starting position, (that is, makes point B come step
The position of point A in rapid S2).Now, the sinuous same of long size work W is being corrected using the output of endface position sensor 16
Shi Yidong long size works W (Fig. 3 g → Fig. 3 h).
When supply side brake roller 15 and winding side brake roller 25 make long size work W be moved towards Return-ing direction, long size work W
U-shaped deepens at supply side dance roller 13, meanwhile, U-shaped shoals at winding side dance roller 23.This
When, driving long size work W acceleration drastically in the case of, dance roller can skid on long size work, it is possible to
Cut is produced on long size work W and turns into substandard products, and therefore, supply side brake roller 15 and winding side brake roller 25 are to carry out suitably
The mode of acceleration and deceleration is driven in rotation.
Also, while 25 backrush long size work W of supply side brake roller 15 and winding side brake roller, exposure desk 31 is from exposure
Light end position is moved to calibration starting position (Fig. 3 g → Fig. 3 h).In addition, it should be noted that after the completion of long size work W exposure
1 section of back amount is different from the back amount of platform 31, and the back amount of the latter is big.Long size work is moved relative to gentle acceleration and deceleration
W, carry out with high acceleration and at high speed the movement of the big exposure desk 31 of back amount.Therefore, both substantially simultaneously terminate to return
It is mobile.
Step S9：In the movement of supply side brake roller 15 and winding side brake roller 25 to long size work W and exposure desk 31
Mobile end after, exposure desk 31 rises to upper end position, adsorbs 1 section of the strip work of the 1 section the next position exposed just now
The part W back side and remain at flat (Fig. 3 i).Also, the workpiece grip mechanism 35 of exposure desk 31 presss from both sides at it between platform
Hold long size work W.Now, as shown in figure 3i, it is known that the position for the point A that point B has been come in step S2.
Step S10：Supply side brake roller 15 and winding side brake roller 25 release long size work W clamping.By that will supply
The rotary drive unit of spool 11 and winding reel 21 it is (not shown) rotation as defined in rotation driving amount so that supply spool 11 to
Dance roller 13 sends out 1 section of long size work W, and winding reel 21 winds 1 section of long size work from dance roller 23
W.(Fig. 3 i → Fig. 3 j)
Afterwards, step S4~step S10 is performed repeatedly successively untill production terminates.In last of long size work W
After the end exposure of section, reclaim by the long size work W of the wound into rolls of winding reel 21.
So, the exposure device 1 of present embodiment by supply side brake roller 15 and winding side brake roller 25 all the time by being entered
Capable clamping, or the holding carried out by exposure desk 31, maintain long size work W is braked in the state of carry out multistage
Exposure.Expose front and rear section in succession thereby, it is possible to high accuracy, particularly can in the long size work W of no calibration mark
Play preferable effect.
Also, during the return movement of the exposure desk 31 and long size work W after 1 section of exposure, make exposure desk 31 and strip work
Part W is dividually independently moved, therefore can be made the longer exposure desk 31 of displacement with high acceleration and be moved at high speed, another
Aspect, the shorter long size work W of displacement can be moved in a manner of rejection of acceleration so that not because of dance roller
And produce abrasion.Thus, the productivity of exposure device 1 is improved.
《2nd embodiment》
On the structure of exposure device 1, the 2nd embodiment is identical with the 1st embodiment.In the present embodiment, expose
The action of device 1 is branched off into following step after step S6 terminates.
Step S11：Exposure desk 31 is moved under calibrated cameras 41 in the state of absorption remains long size work W
Side.Now, for the movement of exposure desk 31, predetermined position can be automatically moved to, can also be manual by operator
Ground is moved to arbitrary position.
Step S12：The operator of exposure device 1 uses calibrated cameras 41 and the monitor being connected with calibrated cameras 41
42, the exposure by step S6 is observed to form the latent image on long size work W photosensitive material.In the result of observation
To confirm in the case of needing the correction of exposure position or light exposure etc., the operator of exposure device 1 according to the observation result to this
A little parameters are corrected.
Step S13：Supply side brake roller 15 and winding side brake roller 25 clamp long size work W, and fixed long size work W.
Then, absorption of the exposure desk 31 to long size work W is released, and workpiece grip mechanism 35 releases long size work W fixation, lifting
Driver element 34 makes exposure desk 31 drop to lower end position.
Step S14：The long size work W obtained based on the amount of movement according to the exposure desk in step 11 current location,
Supply side brake roller 15 and winding side brake roller 25 make long size work W, and downstream side is moved so that long size work W exposure is completed
Lower 1 section of 1 section afterwards comes calibration starting position (i.e. so that the position for the point A that point B is come in step S2).
Also, while supply side brake roller 15 and winding side brake roller 25 move to long size work W, the quilt of exposure desk 31
Driven towards updrift side, be moved to calibration starting position.So, make when using supply side brake roller 15 and winding side brake roller 25
When long size work W is moved, long size work W and exposure desk 31 is easily set to be moved towards different directions.
Step S15：Moved in the movement of supply side brake roller 15 and winding side brake roller 25 to long size work W and platform
After portion 32 is to the mobile end of exposure desk 31, exposure desk 31 rises to upper end position, adsorbs the 1 section the next position exposed just now
1 section of long size work W the back side and remain at flat.Also, the workpiece grip mechanism 35 of exposure desk 31 its with
The end face of long size work W conveying direction (X-direction) is clamped between platform.
Step S16：Supply side brake roller 15 and winding side brake roller 25 release long size work W clamping.By that will supply
Rotation driving amount as defined in the rotation (not shown) of the rotary drive unit of spool 11 and winding reel 21, supply spool 11 is to tension force
Regulating roller 13 sends out 1 section of long size work W, and winding reel 21 winds 1 section of long size work W from dance roller 23.
Afterwards, with performed repeatedly after step S4 successively in the same manner as embodiment 1 the step of.In addition, act to step S11
Branch can not only be performed after initial 1 section of long size work W of exposure, can also be performed on arbitrary opportunity.
So, the exposure device 1 of present embodiment has the process (step that exposure results are observed when performing and continuously running
S12).Due to that can prevent long size work W's by observing long size work W initial exposure results, adjustment exposure parameter
The formation of the pattern of multistage is bad, therefore the productivity of exposure device 1 improves.In addition, the observation process of exposure results not only may be used
To be performed in long size work W initial exposure, can also be performed on arbitrary opportunity (for example, often passing through the stipulated time).
In addition, when implementing the process of observation exposure results in continuously running, long size work W is also by by supply side system
The clamping or be braked by the holding that exposure desk 31 is carried out that dynamic roller 15 and winding side brake roller 25 are carried out.Thereby, it is possible to height
Front and rear section is exposed to precision in succession, particularly can play preferable effect in the long size work W of no calibration mark.
In addition, the setting of the observation and exposure parameter for exposure results, illustrates operator's utilization and calibrated cameras
The situation that the monitor 42 of 41 connections is manually carried out, but it is also possible to by the way that image processing apparatus (not shown) is connected to
Calibrated cameras 41, and automatically carried out by exposure device 1.
Claims (3)
1. a kind of exposure device, it has：
Supply unit, the body that is exposed with plasticity of strip is transported to winding reel by it from supply spool；
Exposing unit, it is arranged on supply spool between winding reel；
Exposure desk, its keep described in be exposed the part of body；And
Mobile unit, its conveying direction for making to be exposed body described in the exposure desk along the supply unit move back and forth,
Pattern exposure is exposed body in described using the relative movement of the exposing unit and the exposure desk,
The exposure device is characterised by,
The supply unit has：
Supply side constraint roll, it is arranged on the downstream of the supply spool and the upstream side of the exposing unit, described in constraint
It is exposed body；And
Winding side constraint roll, it is arranged on the downstream of the exposing unit and the upstream side of the winding reel, described in constraint
It is exposed body,
At least described supply side constraint roll in the supply side constraint roll and the winding side constraint roll, it is provided with roller driving
Unit,
When being exposed body described in being kept in the exposure desk, described in the supply side constraint roll and winding side constraint roll releasing
The constraint of body is exposed,
In the exposure desk conveying end position is moved to remain the state for being exposed body from conveying starting position
Pattern exposure is exposed body by period, the exposing unit in described,
After the end exposure of the exposing unit, the exposure desk is not to keep the state for being exposed body from the conveying
When end position is moved to the conveying starting position, the supply side constraint roll makes the body that is exposed be moved to supply side.
2. exposure device according to claim 1, it is characterised in that
The exposure desk has the clamping device that the end face for being exposed body is pressed into the exposure desk.
3. exposure device according to claim 1 or 2, it is characterised in that
The exposure device has：
Exposure position corrects unit, and it has a shooting unit, the shooting unit be arranged on the supply side constraint roll with it is described
It is exposed described between exposing unit above body；And
Display unit, it can show the image shot by the shooting unit,
The exposure device has following steps：
Step is shot, the shooting unit shooting is arranged at the telltale mark for being exposed body；
Exposure position aligning step, the exposing unit are carried out according to by the image that the shooting unit photographs to exposure data
Correction；
Pattern exposure is exposed body by step of exposure, the exposing unit according to the exposure data after correction in described；With
And
Verification step, after step of exposure terminates, confirm to be exposed to the pattern for being exposed body using the shooting unit.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-107235 | 2014-05-23 | ||
| JP2014107235A JP6510768B2 (en) | 2014-05-23 | 2014-05-23 | Exposure device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105093861A CN105093861A (en) | 2015-11-25 |
| CN105093861B true CN105093861B (en) | 2017-12-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510244466.0A Active CN105093861B (en) | 2014-05-23 | 2015-05-14 | Exposure device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6510768B2 (en) |
| KR (1) | KR102333945B1 (en) |
| CN (1) | CN105093861B (en) |
| TW (1) | TWI662373B (en) |
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| JP6723831B2 (en) * | 2016-06-01 | 2020-07-15 | 株式会社オーク製作所 | Exposure equipment |
| JP6818395B2 (en) * | 2016-12-22 | 2021-01-20 | 株式会社オーク製作所 | Exposure device |
| JP7041482B2 (en) * | 2017-09-13 | 2022-03-24 | 株式会社オーク製作所 | Exposure device |
| JP7175409B2 (en) * | 2017-09-13 | 2022-11-18 | 株式会社オーク製作所 | Exposure device |
| KR101869821B1 (en) | 2017-09-14 | 2018-07-19 | 주식회사 넥서스원 | Roll To Roll Exposure System |
| KR101863946B1 (en) | 2017-09-22 | 2018-06-01 | 주식회사 넥서스원 | Roll To Roll Exposure Control Method |
| JP7040981B2 (en) * | 2018-03-29 | 2022-03-23 | 株式会社オーク製作所 | Exposure device |
| JP7037416B2 (en) * | 2018-03-29 | 2022-03-16 | 株式会社オーク製作所 | Exposure device |
| JP7089920B2 (en) * | 2018-03-29 | 2022-06-23 | 株式会社オーク製作所 | Exposure device |
| CN110007569A (en) * | 2019-05-10 | 2019-07-12 | 苏州微影激光技术有限公司 | A kind of write-through exposure machine worktable component and write-through exposure machine |
| CN110196535B (en) * | 2019-06-20 | 2021-10-26 | 合肥芯碁微电子装备股份有限公司 | Sectional exposure method of roll-to-roll maskless laser direct writing photoetching equipment |
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| CN111640726A (en) * | 2020-07-24 | 2020-09-08 | 山东新恒汇电子科技有限公司 | Laser exposure process for lead frame |
| US11551970B2 (en) * | 2020-10-22 | 2023-01-10 | Innolux Corporation | Method for manufacturing an electronic device |
| CN112631081B (en) * | 2020-12-22 | 2022-12-16 | 江苏迪盛智能科技有限公司 | Reel-to-reel exposure method |
| JP2023078747A (en) | 2021-11-26 | 2023-06-07 | 株式会社オーク製作所 | Exposure apparatus |
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Also Published As
| Publication number | Publication date |
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| TW201546574A (en) | 2015-12-16 |
| KR102333945B1 (en) | 2021-12-01 |
| TWI662373B (en) | 2019-06-11 |
| JP6510768B2 (en) | 2019-05-08 |
| JP2015222370A (en) | 2015-12-10 |
| KR20150135094A (en) | 2015-12-02 |
| CN105093861A (en) | 2015-11-25 |
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