CN112631081B - Reel-to-reel exposure method - Google Patents

Reel-to-reel exposure method Download PDF

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Publication number
CN112631081B
CN112631081B CN202011526667.7A CN202011526667A CN112631081B CN 112631081 B CN112631081 B CN 112631081B CN 202011526667 A CN202011526667 A CN 202011526667A CN 112631081 B CN112631081 B CN 112631081B
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China
Prior art keywords
exposure
roll
lens
coil stock
alignment
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CN202011526667.7A
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CN112631081A (en
Inventor
朱夏彦
陈国军
吴景舟
马迪
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Jiangsu Desheng Intelligent Technology Co ltd
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Jiangsu Desheng Intelligent Technology Co ltd
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2051Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G03F7/2053Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704Scanned exposure beam, e.g. raster-, rotary- and vector scanning
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605Workpiece metrology
    • G03F7/70616Monitoring the printed patterns
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691Handling of masks or workpieces
    • G03F7/707Chucks, e.g. chucking or un-chucking operations or structural details

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

The invention discloses a roll-to-roll exposure method, which comprises the steps that a contraposition lens above a roll material moves along a first direction to obtain exposure parameters of the roll material, and exposure image data are adjusted according to the exposure parameters; and after the alignment is finished, the exposure lens above the coil stock moves along a second direction opposite to the first direction, and the coil stock is scanned and exposed according to the exposure image data. The invention adopts the mode of combining digital exposure and an alignment camera, firstly positioning and then exposing, thereby simplifying the exposure process and improving the exposure productivity while improving the exposure precision.

Description

Reel-to-reel exposure method
Technical Field
The invention relates to a roll-to-roll exposure technology, in particular to a roll-to-roll exposure method.
Background
As shown in fig. 1, in a conventional Roll-to-Roll (Roll) exposure machine, a film exposure mode is adopted in an exposure part 20, that is, a film 4 and a full light source are used to expose a web 2. The specific exposure process comprises the following steps: 1. the roll-up machine 40 and the roll-up machine 10 move to drive the roll material 2 to move a predetermined distance in the exposure part 20, and then the upper and lower transparent glass cover plates 3 of the exposure part 20 clamp and fix the roll material 2 to prevent the roll material from moving, bending and the like. 2. A CCD (charge coupled device) camera of the exposure part 20 captures a mark (mark) point 24 on the web, determines a position error (offset error, angle error, etc.) of the web 2, and then correspondingly adjusts a position compensation error of the film 4. 3. The whole light source covers the film 4 and the roll material 2, and the roll material 2 is exposed.
The disadvantages of the above solution are: 1. the accuracy of film exposure is low. 2. When the problem of expansion and shrinkage of the coil stock occurs, errors cannot be compensated.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a roll-to-roll exposure method which has high exposure precision and can compensate the expansion and contraction errors.
In order to achieve the purpose, the invention provides the following technical scheme: a roll-to-roll exposure method comprising:
s100, moving a contraposition lens above a coil material along a first direction, acquiring exposure parameters of the coil material, and adjusting exposure image data according to the exposure parameters;
s200, after the alignment is finished, the exposure lens above the coil stock moves along a second direction opposite to the first direction, and the coil stock is scanned and exposed according to the exposure image data;
and S300, repeating the steps S100 and S200 until the whole roll of material is exposed and processed.
Preferably, the exposure parameters include a position error, an angle error, and a harmomegathus deviation of the web.
Preferably, in S100, the alignment lens captures a mark point on the coil stock, and the exposure parameter is determined by the mark point.
Preferably, the number of the alignment lenses is at least two, the alignment lenses are distributed along a third direction perpendicular to the first direction or the second direction, and the coil stock is respectively provided with at least two mark points on two sides of the first direction or the second direction; the alignment lenses capture the mark points on one side of the coil material in the first direction, then capture the mark points on the other side of the coil material, and determine the exposure parameters according to all the captured mark points.
Preferably, the number of the exposure lenses is at least three, and a plurality of the exposure lenses are also distributed along the third direction, and the plurality of the exposure lenses cover the width of an exposed area on the roll material.
Preferably, in S100 and S200, the exposure lens and the alignment lens move simultaneously above the roll material.
Preferably, a buffer area is further arranged on the coil stock, the buffer area comprises an acceleration area for accelerating the exposure lens or comprises an acceleration area for accelerating the exposure lens and a deceleration area for decelerating the exposure lens, and the acceleration area and the deceleration area are respectively positioned on two sides of the exposed area.
Preferably, in S100 and S200, the roll material is adsorbed and fixed on an exposure adsorbing member.
Preferably, the method further comprises: after the exposure of present section coil stock, present section coil stock is promoted by lifting mechanism's centre gripping and is left the exposure and adsorb the piece, and before one section coil stock counterpoints next, one section coil stock next by lifting mechanism's centre gripping descends to adsorb on the exposure adsorbs the piece, waits to counterpoint.
Preferably, the contact part of the lifting mechanism and the coil stock is provided with at least one roller.
The invention also discloses another technical scheme:
a roll-to-roll exposure method comprising:
s10, the winding machine and the winding and unwinding machine move in a matched mode to drive the winding material to move for a preset distance at an exposure part, and the exposure part fixes the winding material;
s20, exposing the coil stock by the exposure part, wherein the exposure method adopts the coil-to-coil exposure method;
s30, after exposure is finished, unwinding a coil material by the exposure part;
and S40, repeating the steps S10-S30 until the whole roll of material is exposed and processed.
Preferably, after S30, the material pulling section between the winding machine and the exposure part moves in cooperation with the winding machine and the unwinding machine to drive the winding material to move at the exposure part.
The beneficial effects of the invention are:
1. the exposure part of the invention adopts digital exposure (specifically uses a digital micro-reflector DMD or laser direct projection), compared with film exposure, the exposure precision is improved, in addition, the exposure is carried out after positioning by combining the digital exposure and an alignment camera, the exposure precision is improved, meanwhile, the exposure process is simplified, and the exposure capacity is improved.
2. The invention can adopt the alignment camera to determine the expansion and shrinkage amount of the coil stock, and can compensate the expansion and shrinkage error when the coil stock has the expansion and shrinkage problem.
3. The invention sets buffer areas on both sides of the exposure area, and can adjust the speed of the exposure lens, so that the exposure lens moves at a constant speed in the exposure area, and the exposure precision is ensured.
4. The invention adopts the sucking disc to adsorb and fix the coil stock, can avoid the problems of light reflection and refraction of the existing glass clamping plate, and avoids exposure deviation.
Drawings
FIG. 1 is a schematic view of a conventional roll-to-roll exposure machine;
FIG. 2 is a schematic view of the structure of the roll-to-roll exposure machine of the present invention;
FIG. 3 is a schematic view of the distribution of the zones on the web of the present invention;
FIG. 4 is a schematic top view of the exposed portion of the present invention;
FIG. 5 is a schematic flow chart of a roll-to-roll exposure method of the present invention;
FIG. 6 is a schematic view of the exposure process of the exposed part of the present invention.
Reference numerals:
1. the exposure device comprises a roll-to-roll exposure machine 10, a roll-to-roll machine 20, an exposure part 201, an exposure adsorption piece 202, an alignment lens 203, an exposure lens 204, a lifting mechanism 30, a material pulling section 40, a roll-to-roll machine 2, a roll material 21, an exposed area 22, an exposure starting point 23, an end point 24, a marking point 25, an acceleration area 26, a deceleration area a, a first direction b, a second direction 3, a glass cover plate 4 and a film.
Detailed Description
The technical solution of the embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings of the present invention.
According to the roll-to-roll exposure method disclosed by the invention, the digital exposure and the alignment camera are combined, and the exposure is carried out after positioning, so that the exposure accuracy is improved, the exposure process is simplified and the exposure productivity is improved.
Referring to fig. 2, 5 and 6, a roll-to-roll exposure method disclosed in an embodiment of the present invention is implemented based on a roll-to-roll exposure machine 1, where the roll-to-roll exposure machine 1 disclosed in an embodiment of the present invention includes a reel-up machine 10, an exposure part 20, a material pulling section 30 and a reel-up machine 40, where the exposure part 20 is located between the reel-up machine 10 and the material pulling section 30, and the material pulling section 30 is located between the exposure part 20 and the reel-up machine 40, except for the exposure part 20, the reel-up machine 10, the material pulling section 30 and the reel-up machine 40 of the present invention can be implemented by using corresponding structures in an existing roll-to-roll exposure machine, so that the present invention is not described in detail for this, and the structure of the lower exposure part 20 is described in detail. In other alternative embodiments, the pulling section 30 may be omitted.
As shown in fig. 2, the exposure portion 20 of the present invention mainly includes an exposure absorption member 201, an alignment lens 202, an exposure lens 203, and a lifting mechanism 204, wherein the exposure absorption member 201 is located below the web 2 and is used for absorbing and fixing the web 2 before exposure, so as to prevent the web 2 from moving, bending, and the like, and in practice, the exposure absorption member 201 may adopt a suction cup. Because of in the current fixed knot who presss from both sides tight coil stock 2 with the glass apron, the glass apron can reflect partly light, has weakened the energy of laser, and light passes the glass apron moreover and can take place the refraction, causes the exposure deviation. Compared with the existing fixing structure adopting glass cover plate clamping, the exposure part of the invention adopts a mode of sucking and fixing the coil materials by the sucking disc, so that the problems of weakening laser energy, causing exposure deviation and the like can be avoided.
The alignment lens 202 and the exposure lens 203 are both installed above the coil stock 2, and in this embodiment, the alignment lens 202 and the exposure lens 203 are installed together and move synchronously, and the alignment lens 202 is located on one side of the exposure lens 203. In this embodiment, the alignment lens 202 is a CCD camera. In addition, in the present embodiment, two alignment lenses, that is, two alignment lenses 202 are arranged, and the two alignment lenses 202 are distributed along the width direction (defined as the Y direction) of the coil 2; the exposure lenses 203 are provided in three, and the three exposure lenses 203 are also provided in the width direction of the web 2. In other alternative embodiments, the alignment lens 202 and the exposure lens 203 may also be disposed independently and moved independently, and the number and the positions of the alignment lens 202 and the exposure lens 203 are not limited herein, and may be set according to actual needs as long as the alignment lens 202 and the exposure lens 203 cover the width of the exposed area 21 on the coil stock 2.
Preferably, because the front and back surfaces of the roll material 2 are coated with photosensitive materials, in order to avoid friction and scratch of the photosensitive materials with the exposure absorption member 201 when the roll material 2 moves, two sides of the exposure absorption member 201 are respectively provided with a lifting mechanism 204, which is used for lifting the clamping roll material away from the exposure absorption member 201 after the exposure of the current section of roll material is finished, and for descending and absorbing the clamping roll material onto the exposure absorption member 201 before the next section of roll material is aligned. More preferably, in order to avoid the friction between the lifting mechanism 204 and the web 2, the present invention provides a roller (not shown) at the contact part of the lifting mechanism 204 and the web 2, so as to reduce the friction between the lifting mechanism 204 and the web 2.
As shown in fig. 5, based on the roll-to-roll exposure machine, the roll-to-roll exposure method disclosed in the embodiment of the present invention specifically includes the following steps:
and S10, the winding machine 40 and the winding and unwinding machine 10 move in a matched manner to drive the winding material 2 to move for a preset distance in the exposure part 20, and then the exposure part 20 fixes the winding material 2.
Specifically, first, the roll 2 is threaded through the reel-out machine 10, the exposure part 20, the material pulling section 30, and the reel-in machine 40 in sequence, and after the threading is completed, the entire roll 2 is in a tensioned state. Then, the winding and unwinding machine 40, the winding and unwinding machine 10, and the material pulling section 30 move cooperatively to drive the web 2 to move a predetermined distance in the exposure portion 20, for example, the predetermined distance is d, that is, the exposure length of each section of the web 2 is d. Thereafter, the exposure suction member 201 of the exposure portion 20 sucks and fixes the web 2.
S20, the exposure section 20 exposes the web 2.
Specifically, as shown in fig. 6, the step S20 specifically includes the following steps:
s100, the alignment lens 202 above the coil stock 2 moves along the first direction a between the exposure starting point 22 and the exposure ending point 23, the exposure parameters of the coil stock 2 are obtained, and the exposure image data are adjusted according to the exposure parameters.
Specifically, as shown in fig. 3 and 4, each roll of the embodiment of the invention includes an exposure start point 22, an exposure end point 23, and an exposed area 21 and four Mark (Mark) points 24 located between the exposure start point 22 and the exposure end point 23, where the exposed area 21 is rectangular, the four Mark points 24 are located on the periphery of the exposed area 21, and the four Mark points 24 are respectively located near four vertices of the exposed area 21. The two alignment lenses 202 above the coil 2 respectively correspond to the two markers 24 on one side of the exposed area 21 in the width direction.
In the present embodiment, the alignment lens 202 moves from the end point 23 to the exposure start point 22 along the first direction a, if the first direction a is a left-to-right direction in fig. 2 and 3, during the movement of the alignment lens 202 from left to right, the two alignment lenses 202 first obtain the two mark points 24 at the left end and then obtain the two mark points 24 at the other end (i.e. the right end), and determine the exposure parameters of the web 2 according to the positions of the four mark points 24, where the exposure parameters specifically include a position error, an angle error, and a stretch and shrink deviation of the web 2. The exposure image data is adjusted according to these exposure parameters. Specifically, the position error and the angle error of the coil stock 2 can be calculated according to the position coordinates of the four marking points 24; by the position coordinates of the four mark points 24, if the distance between two mark points in the width direction and the distance between two mark points in the length direction are respectively compared with the distance before the coil stock is not expanded and contracted, whether the coil stock is expanded or contracted in the length and width directions is judged, if the distance is larger than the distance before the coil stock is not expanded and contracted, the coil stock is expanded, otherwise, the coil stock is contracted. According to the position error, the angle error and the expansion and contraction quantity, the roll-to-roll exposure machine correspondingly modifies the originally loaded exposure image data so as to adapt to the roll material, and performs the next work according to the modified exposure image data.
S200, after the alignment is finished, the exposure lens 203 above the web 2 moves in the second direction b opposite to the first direction a between the exposure start point 22 and the exposure end point 23, and scans and exposes the web 2 according to the exposure image data.
The alignment lens 202 and the exposure lens 203 of the roll-to-roll exposure machine 1 are mounted together, in the exposure process, the alignment lens 202 and the exposure lens 203 move along the first direction a at the same time, the alignment lens 202 obtains the exposure parameters of the roll material, the alignment lens 202 and the exposure lens move along the second direction b at the same time, the exposure lens 203 exposes the roll material, the motion space is fully utilized, the parameter obtaining and the exposure process are achieved in the process of moving back and forth, the process is simple, the time cost is saved, and the productivity is improved.
Specifically, after the alignment is finished, the three exposure lenses 203 above the web 2 start to move from the exposure starting point 22 to the end point 23, that is, the moving direction is opposite to the moving direction of the alignment lens 202, for example, the second direction b is the direction from right to left in fig. 2 and 3, and in the process that the three exposure lenses 203 move from right to left, the three exposure lenses 203 scan and expose the web 2 according to the exposure image data, and since the three exposure lenses 203 can cover the width of the exposed area 21, after moving from right to left, all areas of the exposed area 21 can be exposed. After the exposure is finished, the two alignment lenses 202 and the three exposure lenses 203 are all located at the leftmost exposure end point 23 (i.e., the starting point of the next alignment) of the web 2, and are ready for the next alignment and exposure.
Preferably, each section of the roll material of the embodiment of the present invention further includes a buffer area for adjusting the speed of the exposure lens 203 outside the exposed area 21, and in this embodiment, the buffer area includes an acceleration area 25 and a deceleration area 26, where the acceleration area 25 is located between the exposure starting point 22 and the exposed area 21 and is used for accelerating the exposure lens 203, and the deceleration area 26 is located between the end point 23 and the exposed area 21 and is used for decelerating the exposure lens 203 until the brake stops, so as to adjust that the exposure lens 203 moves at a constant speed in the exposed area 21, that is, uniformly exposes the exposed area 21, improve the exposure quality, and also make the data processing of the exposed image simpler.
S30, after the exposure is finished, the exposure part 20 releases the web 2.
Specifically, after the exposure of the current-segment coil stock 2 at the exposure part 20 is finished, the lifting mechanisms 204 at two sides of the exposure absorbing member 201 release the current-segment coil stock 2 after being clamped and lifted by a preset distance, so that the current-segment coil stock 2 leaves the exposure absorbing member 201. After the next roll 2 moves into the exposure portion 20, that is, before the next roll 2 is aligned, the lifting mechanisms 204 on both sides of the exposure adsorbing member 201 clamp, lower and adsorb the next roll 2 onto the exposure adsorbing member 201, and then release the next roll to wait for alignment.
And S40, repeating the steps S10 to S30 until the whole roll 2 is exposed and processed.
Therefore, the scope of the present invention should not be limited to the disclosure of the embodiments, but includes various alternatives and modifications without departing from the scope of the present invention, which is defined by the claims of the present patent application.

Claims (11)

1. A roll-to-roll exposure method, characterized in that the method comprises:
s100, moving a contraposition lens above a coil stock along a first direction to obtain exposure parameters of the coil stock, and adjusting exposure image data according to the exposure parameters;
s200, after the alignment is finished, the exposure lens above the coil stock moves along a second direction opposite to the first direction, and the coil stock is scanned and exposed according to the exposure image data;
and S300, repeating the steps S100 and S200 until the whole roll of material is exposed, wherein in the steps S100 and S200, the exposure lens and the alignment lens move above the roll of material simultaneously.
2. The roll-to-roll exposure method according to claim 1, wherein the exposure parameters include a position error, an angle error, and a harmomegathus deviation of the web.
3. The roll-to-roll exposure method according to claim 1, wherein in S100, the alignment lens captures a mark point on the roll stock, and the exposure parameter is determined by the mark point.
4. The roll-to-roll exposure method according to claim 3, wherein the number of the alignment lenses is at least two, and the alignment lenses are distributed along a third direction perpendicular to the first direction or the second direction, and the roll stock is provided with at least two of the mark points on two sides of the first direction or the second direction respectively; the alignment lenses capture the mark points on one side of the coil material in the first direction, then capture the mark points on the other side of the coil material, and determine the exposure parameters according to all the captured mark points.
5. The roll-to-roll exposure method according to claim 4, wherein the number of the exposure lenses is at least three, and a plurality of the exposure lenses are distributed along the third direction, and the plurality of the exposure lenses cover the width of the exposed area on the roll material.
6. The roll-to-roll exposure method according to claim 5, wherein a buffer area is further disposed on the roll stock, the buffer area comprises an acceleration area for accelerating the exposure lens or comprises an acceleration area for accelerating the exposure lens and a deceleration area for decelerating the exposure lens, and the acceleration area and the deceleration area are respectively located on two sides of the exposed area.
7. The roll-to-roll exposure method according to claim 1, wherein in S100 and S200, the web is adsorbed and fixed to an exposure adsorbing member.
8. The roll-to-roll exposure method according to claim 7, characterized in that the method further comprises: after the exposure of present section coil stock, present section coil stock is promoted by lifting mechanism's centre gripping and is left the exposure and adsorb the piece, and before one section coil stock counterpoints next, one section coil stock next by lifting mechanism's centre gripping descends to adsorb on the exposure adsorbs the piece, waits to counterpoint.
9. The roll-to-roll exposure method according to claim 8, wherein the contact portion of the lifting mechanism with the web is provided with at least one roller.
10. A roll-to-roll exposure method, characterized in that the method comprises:
s10, the winding machine and the winding and unwinding machine move in a matched mode to drive the winding materials to move for a preset distance at the exposure part, and the exposure part fixes the winding materials;
s20, exposing the coil stock by the exposure part, wherein the exposure method adopts the coil-to-coil exposure method of any one of claims 1 to 9;
s30, after exposure is finished, the coil stock is loosened from the exposure part;
and S40, repeating the steps S10-S30 until the whole roll of material is exposed and processed.
11. The roll-to-roll exposure method according to claim 10, wherein after S30, the material pulling section between the roll-up machine and the exposure part moves in cooperation with the roll-up machine and the roll-out machine to move the roll material at the exposure part by the preset distance.
CN202011526667.7A 2020-12-22 2020-12-22 Reel-to-reel exposure method Active CN112631081B (en)

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JP6510768B2 (en) * 2014-05-23 2019-05-08 株式会社オーク製作所 Exposure device
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