CN113189850B - Double-sided exposure device for RTR flexible printed circuit board - Google Patents
Double-sided exposure device for RTR flexible printed circuit board Download PDFInfo
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- CN113189850B CN113189850B CN202110441574.2A CN202110441574A CN113189850B CN 113189850 B CN113189850 B CN 113189850B CN 202110441574 A CN202110441574 A CN 202110441574A CN 113189850 B CN113189850 B CN 113189850B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention discloses a double-sided exposure device for an RTR flexible printed circuit board, and belongs to the technical field of exposure equipment. The alignment device and the exposure device in the double-sided exposure device are arranged above the exposure table top, the problem that equipment installation and maintenance are difficult in double-sided exposure of an RTR flexible printed circuit board at present is solved, the advancing direction of the flexible printed circuit board is converted by the double-sided exposure device of the RTR flexible printed circuit board through ingenious arrangement of the supporting roller, the front side and the back side of the exposed flexible printed circuit board are all positioned above the adsorption table top when being exposed, the flexible printed circuit board is positioned below the adsorption table top when the exposure device is exposed is avoided, the problem that the flatness of a substrate cannot be guaranteed due to the gravity of the flexible printed circuit board is completely solved by means of the adsorption force, and the qualification rate of double-sided exposure of the flexible printed circuit board is improved.
Description
Technical Field
The invention relates to a double-sided exposure device for an RTR flexible printed circuit board, and belongs to the technical field of exposure equipment.
Background
The flexible printed circuit board (Flexible Printed Circuit, FPC for short) is a printed circuit board made of flexible insulating base materials, and has more flexible application scene due to the characteristics of light weight, thin thickness, free bending and folding and the like, is applied to an electronic circuit, and can reduce the volume and weight of electronic products; compared with a hard circuit board, the circuit board is more suitable for high-density and miniaturized electronic products.
For FPC board, there are two modes of LDI equipment double-sided exposure at present: substrate-by-substrate exposure and Roll-to-Roll (RTR) exposure; the exposure of one substrate by one substrate is that the front and back exposure of one substrate is completed and then the next substrate is exposed; the so-called roll-to-roll exposure is to roll up a plurality of substrates into a roll, sequentially expose the front surfaces of the substrates, after the front surface exposure of all the substrates of the roll is completed, place the whole roll down to the area to be exposed, and sequentially expose the back surfaces of all the substrates of the roll.
For the roll-to-roll exposure method, patent document publication No. CN211741828U discloses two exposure devices, as shown in fig. 1 and 2, respectively. In the exposure apparatus shown in fig. 1, a flexible printed circuit board roll to be exposed is placed at an unreeling apparatus 1, and is reeled up to a reeling apparatus 2 after exposure of the front and back surfaces thereof is completed sequentially through a first exposure system and a second exposure system. The exposure device shown in fig. 1 comprises two sets of exposure systems, and in order to complete exposure on the front side and the back side of a substrate at one time, the unwinding device 1 and the winding device 2 are respectively arranged on two sides of the two sets of exposure systems, an alignment mechanism 5 and a projection mechanism 6 in a second set of exposure systems for realizing exposure on the back side of the substrate need to be installed reversely, an adsorption table surface in the second set of exposure systems is positioned above the substrate, the adsorption force of the adsorption table surface needs to overcome the gravity of the substrate, the flatness of the substrate needs to be ensured, the adsorption effect of the adsorption table surface is greatly discounted relative to that of the first set of exposure systems, the substrate is easy to discard, and the problems of difficult installation and maintenance and easy dust accumulation also exist in practical application.
The exposure device shown in fig. 2 is provided with an alignment mechanism 5 and a projection mechanism 6 which are vertically opposite, and the alignment mechanism 5 and the projection mechanism 6 below the exposure device are required to be installed reversely, so that the problems of difficult installation and maintenance and easy dust accumulation on the exposure device are also caused; in addition, the exposure device has the problem that the exposure device does not have an adsorption table top, and can only support the base material by means of clamping mechanisms at two sides, so that the flatness of the base plate cannot be ensured, and particularly, the large-size base plate has a concave at the middle part due to the action of gravity, so that the lens is easily defocused.
Furthermore, the exposure apparatus shown in fig. 2 has a problem of equipment versatility; because the thicknesses of the substrates of different batches are different in practical application, the alignment mechanism 5 in the upper and lower exposure systems needs to move up and down to adjust the focal length for the substrates of different thicknesses, that is, the auto-focusing function is required, which results in huge cost and cannot guarantee the auto-focusing effect.
Disclosure of Invention
In order to solve the problems of low exposure qualification rate and difficult equipment installation and maintenance existing in the prior double-sided exposure of the RTR flexible printed circuit board, the invention provides a double-sided exposure device for the RTR flexible printed circuit board, which comprises: the device comprises an unreeling device, a reeling device, a first adsorption table top, a second adsorption table top, an alignment device, an exposure device and a plurality of supporting rollers;
the first adsorption table top and the second adsorption table top are horizontally arranged, and the directions of the unreeling device and the reeling device are opposite; the relative position relationship between the first adsorption table top and the unreeling device is consistent with the relative position relationship between the second adsorption table top and the reeling device; the self-unreeling device of the flexible printed circuit board reaches a first adsorption table top, reaches a second adsorption table top after the advancing direction is converted by a part of supporting rollers, and finally reaches a reeling device for reeling;
the flexible printed circuit board completes exposure of one surface on the first adsorption table top and completes exposure of the other surface on the second adsorption table top; when the exposure of one surface of the flexible printed circuit board is completed on the first adsorption table top, the flexible printed circuit board is positioned above the first adsorption table top; and when the flexible printed circuit board completes the exposure of the other surface on the second adsorption table top, the flexible printed circuit board is positioned above the second adsorption table top.
Optionally, the double-sided exposure device for an RTR flexible printed circuit board further includes: a gantry support structure spanning over the first and second suction mesas; the alignment device and the exposure device are arranged above the first adsorption table top and the second adsorption table top through the gantry supporting structure.
Optionally, a guide rail is arranged on the gantry supporting structure, and the alignment device and the exposure device realize position switching above the first adsorption table top and above the second adsorption table top through the guide rail.
Optionally, the alignment device and the exposure device realize position switching through different guide rails, and the different guide rails are arranged in a staggered manner in the height direction.
Optionally, the plurality of support rollers include a plurality of support rollers for converting a forward direction of the flexible printed circuit board, wherein at least one of the support rollers is movable in different positions to adjust a length of the flexible printed circuit board between the first suction land and the second suction land.
Optionally, the left and right sides of the first adsorption table top and the second adsorption table top respectively comprise a supporting roller capable of moving up and down, and the supporting rollers are used for driving the flexible printed circuit board to move up and down.
Optionally, the double-sided exposure device for the RTR flexible printed circuit board is provided with two sets of alignment devices and two sets of exposure devices, which respectively correspond to the first adsorption table top and the second adsorption table top.
Optionally, the double-sided exposure device for the RTR flexible printed circuit board is provided with a set of alignment device and two sets of exposure devices, the two sets of exposure devices respectively correspond to the first adsorption table top and the second adsorption table top, and the exposure devices realize position switching above the first adsorption table top and above the second adsorption table top through a guide rail arranged on the gantry supporting structure.
Optionally, the lenses of the exposure device are arranged in at least one row, and when the lenses are arranged in two or more rows, the lenses are arranged in a staggered manner.
Optionally, the height positions of the first adsorption table top and the second adsorption table top are adjustable.
The invention has the beneficial effects that:
the double-sided exposure device for the RTR flexible printed circuit board solves the problem that equipment installation and maintenance are difficult when the existing double-sided exposure device for the RTR flexible printed circuit board is used for double-sided exposure of the RTR flexible printed circuit board, and the advancing direction of the flexible printed circuit board is converted by the aid of the support roller which is skillfully arranged, so that the front side and the back side of the exposed flexible printed circuit board are positioned above the adsorption table surface when the exposed flexible printed circuit board is exposed, the problem that the flatness of the substrate cannot be guaranteed due to the fact that the flexible printed circuit board is positioned below the adsorption table surface when the existing exposure device is exposed is avoided, and the qualification rate of double-sided exposure of the flexible printed circuit board is improved due to the fact that the gravity of the flexible printed circuit board is completely dealt with by the aid of adsorption force.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a conventional RTR exposure apparatus;
FIG. 2 is a schematic diagram of another structure of a conventional RTR exposure apparatus;
in FIGS. 1 and 2, the 1-unwind, 2-wind, 3-printed circuit board, 4.1-first suction table, 4.2-second suction table, 5-alignment, 6-exposure, 10-support, 20-clamp, 21-clamp.
FIG. 3 is a schematic diagram of a double-sided exposure apparatus for RTR flexible printed circuit boards according to one embodiment of the present invention, including a set of alignment devices and a set of exposure devices;
FIG. 4 is a flow chart of exposure performed by the double-sided exposure apparatus for RTR flexible printed circuit boards provided by the present invention;
FIG. 5 is a schematic diagram of a double-sided exposure apparatus for RTR flexible printed circuit boards according to one embodiment of the present invention, including one set of alignment devices and two sets of exposure devices;
FIG. 6 is a schematic diagram of a double-sided exposure apparatus for RTR flexible printed circuit boards according to one embodiment of the present invention, including two sets of alignment devices and two sets of exposure devices;
in fig. 3, 5 and 6, the support rollers within the dashed line frame are the support rollers for switching the advancing direction of the flexible printed circuit board, and 10-1, 10-2, 10-3 and 10-4 indicate the positions of the support rollers for switching the advancing direction of the flexible printed circuit board.
Fig. 7 is a top view of the overall structure of an embodiment of the present invention for a dual-sided exposure apparatus for an RTR flexible printed circuit board, including one set of alignment means and two sets of exposure means, wherein 9-marble Dan Pingtai, 4.1-first suction table, 4.2-second suction table, 11-alignment axis, 12-guide rail, 13-exposure axis.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the embodiments of the present invention will be described in further detail with reference to the accompanying drawings.
Embodiment one:
the present embodiment provides a double-sided exposure apparatus for an RTR flexible printed circuit board, including: the device comprises an unreeling device, a reeling device, a first adsorption table top, a second adsorption table top, an alignment device, an exposure device and a plurality of supporting rollers;
the first adsorption table top and the second adsorption table top are horizontally arranged, and the directions of the unreeling device and the reeling device are opposite; the relative position relationship between the first adsorption table top and the unreeling device is consistent with the relative position relationship between the second adsorption table top and the reeling device; the self-unreeling device of the flexible printed circuit board reaches a first adsorption table top, reaches a second adsorption table top after the advancing direction is converted by a part of supporting rollers, and finally reaches a reeling device for reeling;
the flexible printed circuit board completes exposure of one surface on the first adsorption table top and completes exposure of the other surface on the second adsorption table top; when the exposure of one surface of the flexible printed circuit board is completed on the first adsorption table top, the flexible printed circuit board is positioned above the first adsorption table top; and when the flexible printed circuit board completes the exposure of the other surface on the second adsorption table top, the flexible printed circuit board is positioned above the second adsorption table top.
The double-sided exposure device for the RTR flexible printed circuit board provided by the application can be provided with 1 set of alignment device and 1 set of exposure device (shown in fig. 3) according to actual demands, 1 set of alignment device and 2 sets of exposure device (shown in fig. 5), 2 sets of alignment device and 2 sets of exposure device (shown in fig. 6) are combined, and other combination modes can be provided according to actual demands.
This embodiment is described taking the combination of 1 set of alignment device+1 set of exposure device shown in fig. 3 as an example, in fig. 3, 1-unreeling device, 2-reeling device, 4.1-first adsorption table, 4.2-second adsorption table, 5-alignment device, 6-exposure device, 10-supporting roller; as shown in fig. 3, the double-sided exposure apparatus for an RTR flexible printed circuit board includes a plurality of support rollers 10, wherein the support rollers 10 at positions 10-1, 10-2, 10-3 function to switch the advancing direction of the flexible printed circuit board. The supporting roller 10 at the position 10-1 can be moved to the position 10-4 according to actual requirements to adjust the length of the flexible printed circuit board between the first adsorption table top 4.1 and the second adsorption table top 4.2, and can also be adjusted between the position 10-1 and the position 10-4, so that in actual application, the actions on the first adsorption table top 4.1 and the second adsorption table top 4.2 can be realized without mutual interference. For example, when the second adsorption table 4.2 is in an exposure state, the flexible printed circuit board is in an adsorption state and cannot move, and at this time, the exposure of the first adsorption table 4.1 is completed, and the flexible printed circuit board on the first adsorption table 4.1 is advanced by the length of an exposure pattern by the movement of the support roller 10 at the position 10-1, so as to perform alignment exposure; after the exposure of the second adsorption table top 4.2 is completed, the first adsorption table top 4.1 is still in an exposure state, the flexible printed circuit board is in an adsorption state and cannot move, and the flexible printed circuit board on the second adsorption table top 4.2 is advanced by the length of an exposure pattern by the movement of the supporting roller 10 at the position 10-4 at the moment, so that alignment exposure is performed.
The flexible printed circuit board completes exposure of one surface on the first adsorption table top 4.1 and completes exposure of the other surface on the second adsorption table top 4.2; when the flexible printed circuit board completes exposure on the adsorption table tops on two sides, the flexible printed circuit board is located above the adsorption table tops, the problem that the flatness of the flexible printed circuit board cannot be guaranteed due to the fact that the flexible printed circuit board is completely dependent on adsorption force to cope with the problem that the flatness of the flexible printed circuit board cannot be guaranteed due to the gravity of the flexible printed circuit board is avoided when the existing exposure device is used for exposure, and the qualification rate of double-sided exposure of the flexible printed circuit board is improved.
Example two
The present embodiment provides a double-sided exposure apparatus for an RTR flexible printed circuit board, including: the device comprises an unreeling device, a reeling device, a first adsorption table top, a second adsorption table top, an alignment device, an exposure device and a plurality of supporting rollers, and further comprises a gantry supporting structure which spans over the first adsorption table top and the second adsorption table top; the gantry supporting structure is provided with a guide rail, and the alignment device and the exposure device realize position switching above the first adsorption table top and above the second adsorption table top through the guide rail.
Referring to fig. 7, in fig. 7, each of the two sets of exposure devices 6 includes a series of lenses respectively mounted on two exposure axes 13, and the alignment device 5 is mounted on an alignment axis 11; the exposure axis 13 and the alignment axis 11 are positioned on guide rails 12 in the front-rear direction, the guide rails 12 are fixed to a gantry support structure (not shown in the figure), and finally the entire system is fixed to the marble platform 9.
In fig. 7, the alignment axis 11, in which the alignment device 5 is located, can be moved between the first suction table top 4.1 and the second suction table top 4.2 by means of a guide rail 12.
In the moving process of the flexible printed circuit board, the accuracy of exposure is realized and the productivity is improved by accurately adjusting the position of the supporting roller.
For a specific implementation of double-sided exposure, please refer to fig. 4:
taking the combination of 1 set of alignment devices and 2 sets of exposure devices as an example, which is shown in fig. 5, the unreeling device 1 rotates clockwise and the reeling device 3 rotates counterclockwise to drive the flexible printed circuit board to move from left to right. In order to reduce friction, the flexible printed circuit board driven by the supporting rollers 10 on the left side and the right side of the absorption table top is slightly higher than the absorption table top, when the area to be exposed of the flexible printed circuit board reaches the absorption position of the first absorption table top 4.1, firstly, the two supporting rollers 10 on the two sides of the first absorption table top 4.1 descend, then the first absorption table top 4.1 starts to work to absorb the flexible printed circuit board, the alignment device 5 aligns the alignment holes on the grabbing flexible printed circuit board, the alignment device 5 moves to the alignment initial position of the second absorption table top 4.2 after alignment is completed, and then the left exposure device 6 performs front exposure on the flexible printed circuit board according to alignment information fed back by the alignment device 5; after the front exposure is finished, the first adsorption table top 4.1 stops working, the supporting rollers 10 on the two sides of the first adsorption table top 4.1 ascend to drive the flexible printed circuit board to continue to move to the adsorption position of the second adsorption table top 4.2, the supporting rollers 10 on the two sides of the second adsorption table top 4.2 descend, the second adsorption table top 4.2 works to adsorb the flexible printed circuit board, then the alignment device 5 aligns, after the alignment is finished, the back exposure of the flexible printed circuit board is carried out by the right exposure device 6 according to alignment information, and simultaneously the alignment device 5 returns to the first adsorption table top 4.1 to be ready for the next alignment.
In the double-sided exposure process, in order to realize that the first adsorption table top 4.1 can simultaneously finish alignment action on the next flexible printed circuit board when the right exposure device 6 exposes the substrate on the second adsorption table top 4.2, a temporary storage area is required to be arranged below the platform; specifically, the second adsorption table 4.2 is partially motionless, the supporting roller 10 at the 10-1 position moves leftwards, so that the exposed substrate on the first adsorption table 4.1 moves forwards, and the next substrate enters the first adsorption table 4.1 for alignment and exposure.
When the second adsorption table top 4.2 finishes exposure, the first adsorption table top 4.1 is partially motionless, the supporting roller 10 at the 10-1 position moves rightwards to reset, the temporarily stored substrate is released to the adsorption position of the second adsorption table top 4.2, and in the process, the substrate is aligned to the second adsorption table top 4.2, so that alignment preparation is made.
The position and the stroke of the support roller 10 at the position 10-1 in the dashed line range of fig. 5 can be precisely adjusted, so that the exposure cadence and the relatively accurate position of the first suction table top 4.1 and the second suction table top 4.2 are ensured. For example, in the apparatus shown in fig. 5 comprising 1 set of alignment system and 2 sets of exposure system, by adjusting the position of the support roller 10 at the 10-1 position, it can be achieved that after the exposure of the first suction table 4.1 is completed, the alignment system 6 has been returned by the second suction table 4.2 and is ready for alignment of the next incoming substrate. In the apparatus shown in fig. 6 comprising 2 sets of alignment systems and 2 sets of exposure systems, simultaneous alignment and simultaneous exposure of the first suction table top 4.1 and the second suction table top 4.2, etc. can be achieved by adjusting the position of the support roller 10.
The winding device 1 and the unwinding device 2 can be interchanged in position, and the rotation direction is changed, so that the exposure of the second adsorption table top 4.2 to the front surface and the exposure of the first adsorption table top 4.1 to the back surface are realized.
The exposure device 6 and the alignment device 5 do not need to move in the vertical direction (Z direction), and the flexible printed circuit boards with different plate thicknesses can be exposed only by lifting the first absorption table top 4.1 and the second absorption table top 4.2, so that the universality of the equipment is greatly improved.
Because in the double-sided exposure device of the RTR flexible printed circuit board provided by the application, the exposure device 6 and the alignment device 5 are only positioned above the platform, the convenience of installation and maintenance is greatly improved, and the double-sided exposure device can be realized without complex alignment and optical path systems, and has larger cost advantage.
The adsorption structures of the left table surface and the right table surface can be made to be the same, the structure is the same as the adsorption structure of the existing mainstream LDI equipment, the structure is mature and reliable, and independent research and development are not needed; the adsorption capacity is ensured to suck, and a pipeline for sucking vacuum is positioned below the table top and is tidy.
For the exposure device 6 and the alignment device 5, referring to the top view shown in fig. 7, the exposure lenses are arranged in two rows in a staggered manner, so that one-time scanning exposure of the flexible printed circuit board can be realized, the exposure time is saved, and the productivity is improved.
Some steps in the embodiments of the present invention may be implemented by using software, and the corresponding software program may be stored in a readable storage medium, such as an optical disc or a hard disk.
The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the invention are intended to be included within the scope of the invention.
Claims (8)
1. A double-sided exposure method for an RTR flexible printed circuit board, characterized in that the method is implemented based on a double-sided exposure apparatus for an RTR flexible printed circuit board, the double-sided exposure apparatus for an RTR flexible printed circuit board comprising: the device comprises an unreeling device, a reeling device, a first adsorption table top, a second adsorption table top, an alignment device, an exposure device and a plurality of supporting rollers;
the first adsorption table top and the second adsorption table top are horizontally arranged, and the directions of the unreeling device and the reeling device are opposite; the relative position relationship between the first adsorption table top and the unreeling device is consistent with the relative position relationship between the second adsorption table top and the reeling device; the self-unreeling device of the flexible printed circuit board reaches a first adsorption table top, reaches a second adsorption table top after the advancing direction is converted by a part of supporting rollers, and finally reaches a reeling device for reeling;
the flexible printed circuit board completes exposure of one surface on the first adsorption table top and completes exposure of the other surface on the second adsorption table top; when the exposure of one surface of the flexible printed circuit board is completed on the first adsorption table top, the flexible printed circuit board is positioned above the first adsorption table top; when the flexible printed circuit board completes the exposure of the other surface on the second adsorption table top, the flexible printed circuit board is positioned above the second adsorption table top;
the plurality of support rollers comprise a plurality of support rollers for converting the advancing direction of the flexible printed circuit board, wherein at least one support roller can realize movement of different positions so as to adjust the length of the flexible printed circuit board between the first adsorption table top and the second adsorption table top;
the left and right sides of the first adsorption table top and the second adsorption table top respectively comprise a supporting roller capable of moving up and down, and the supporting rollers are used for driving the flexible printed circuit board to move up and down;
the method comprises the following steps:
the flexible printed circuit board driven by the supporting rollers at the left side and the right side of the absorption table top is slightly higher than the absorption table top, the unreeling device and the reeling device are rotated, when the region to be exposed of the flexible printed circuit board reaches the absorption position of the first absorption table top, the two supporting rollers at the two sides of the first absorption table top descend, the first absorption table top starts to work to absorb the flexible printed circuit board, the alignment device aligns alignment holes on the grabbing flexible printed circuit board, and the exposure device performs front exposure on the flexible printed circuit board according to alignment information fed back by the alignment device after alignment; after the front exposure is finished, the supporting rollers on two sides of the first adsorption table surface rise to drive the flexible printed circuit board to continue to move to the adsorption position of the second adsorption table surface, the supporting rollers on two sides of the second adsorption table surface descend, the flexible printed circuit board is adsorbed by the second adsorption table surface, then the alignment device aligns, and the back exposure of the flexible printed circuit board is carried out by the exposure device according to alignment information after the alignment is finished.
2. The double-sided exposure method for an RTR flexible printed circuit board according to claim 1, characterized in that the double-sided exposure apparatus for an RTR flexible printed circuit board further comprises: a gantry support structure spanning over the first and second suction mesas; the alignment device and the exposure device are arranged above the first adsorption table top and the second adsorption table top through the gantry supporting structure.
3. The double-sided exposure method for an RTR flexible printed circuit board according to claim 2, wherein a guide rail is provided on the gantry support structure, and the alignment device and the exposure device realize position switching above the first suction table and above the second suction table through the guide rail.
4. The double-sided exposure method for the RTR flexible printed circuit board according to claim 3, wherein the alignment device and the exposure device realize position switching through different guide rails, and the different guide rails are arranged in a staggered manner in a height direction.
5. The double-sided exposure method for an RTR flexible printed circuit board according to claim 1, wherein the double-sided exposure device for an RTR flexible printed circuit board is provided with two sets of alignment devices and two sets of exposure devices corresponding to the first suction land and the second suction land, respectively.
6. The double-sided exposure method for the RTR flexible printed circuit board according to claim 3 or 4, wherein the double-sided exposure device for the RTR flexible printed circuit board is provided with one set of alignment device and two sets of exposure devices, the two sets of exposure devices respectively correspond to the first suction table surface and the second suction table surface, and the exposure devices realize position switching above the first suction table surface and above the second suction table surface through guide rails provided on a gantry supporting structure.
7. The double-sided exposure method for an RTR flexible printed circuit board according to claim 1, wherein lenses of the exposure device are arranged in at least one row, and when the lenses are arranged in two or more rows, the lenses are arranged in a staggered arrangement.
8. The double-sided exposure method for an RTR flexible printed circuit board according to any one of claim 1, wherein the first suction land and the second suction land are adjustable in height.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110441574.2A CN113189850B (en) | 2021-04-23 | 2021-04-23 | Double-sided exposure device for RTR flexible printed circuit board |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110441574.2A CN113189850B (en) | 2021-04-23 | 2021-04-23 | Double-sided exposure device for RTR flexible printed circuit board |
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| CN113189850A CN113189850A (en) | 2021-07-30 |
| CN113189850B true CN113189850B (en) | 2023-06-13 |
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| CN104139601A (en) * | 2013-05-09 | 2014-11-12 | 北大方正集团有限公司 | Roll paper printing device |
| CN203438666U (en) * | 2013-08-22 | 2014-02-19 | 广东理想彩色印务有限公司 | High-speed energy-saving double-face printing machine |
| CN107891662A (en) * | 2017-12-06 | 2018-04-10 | 田园 | Novel intelligent perfecting press |
| CN108762009A (en) * | 2018-07-18 | 2018-11-06 | 苏州源卓光电科技有限公司 | A kind of double-station direct putting type litho machine and its exposure method |
| CN112612179A (en) * | 2019-10-04 | 2021-04-06 | 苏州源卓光电科技有限公司 | Double-station exposure machine and working method |
| CN211741828U (en) * | 2019-12-27 | 2020-10-23 | 苏州源卓光电科技有限公司 | Photoetching device applied to flexible printed circuit board |
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