CN2475052Y - Circuit board counterpoint device of exposure machine - Google Patents
Circuit board counterpoint device of exposure machine Download PDFInfo
- Publication number
- CN2475052Y CN2475052Y CN 01218815 CN01218815U CN2475052Y CN 2475052 Y CN2475052 Y CN 2475052Y CN 01218815 CN01218815 CN 01218815 CN 01218815 U CN01218815 U CN 01218815U CN 2475052 Y CN2475052 Y CN 2475052Y
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- CN
- China
- Prior art keywords
- circuit board
- contraposition
- exposure
- alignment pin
- exposure machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
A circuit board contraposition device of an exposure machine comprises two fine adjustment mechanism groups which are parallel arranged on the outer end of the bottom frame of an exposure frame. Minisize precision servo slid platforms are arranged in length and breadth on a movable platform, one of the slid platforms is provided with a contraposition pin with retractable elasticity, and the glass face of the bottom frame is opened with a through-hole corresponding to the contraposition pin. An upper negative film, a lower negative film and a circuit board are provided with targets for mutual contraposition, and the circuit board is opened with a contraposition hole relative to the contraposition pin. A CCD image pickup system is arranged at an intended position under the exposure frame, and controls the minisize precision servo slid platforms arranged in length and breadth on the fine adjustment mechanisms to move through utilizing picked-up targets laminated images, with the efficiency of very precise contraposition which meets contraposition precision requirements of precise exposure process.
Description
The utility model relates to a kind of alignment device, particularly relates to the circuit board alignment device of the exposure machine that aligning accuracy that a kind of status very precisely meets accurate exposure manufacture process requires.
The circuit board alignment device of existing exposure machine is that some register pins are set on the exposure frame of exposure machine, and is provided with pilot hole relatively in circuit board, with by the relation of the fit between register pin and pilot hole, with circuit board to being positioned at exposure frame; But smoothness for fit, generally can make the aperture of pilot hole be a bit larger tham the diameter of register pin, thus formed bit errors still can be used for general exposure manufacture process, but for the exposure manufacture process that requires high precision, then has the high defective of precision fraction defective.
Fundamental purpose of the present utility model is to provide a kind of circuit board alignment device of exposure machine, it is in exposure frame underframe outer end and establish two groups of micro-adjusting mechanisms, and the glass of underframe is provided with two perforation, elastic telescopic alignment pin for each micro-adjusting mechanism wears, be provided with the target that mutual contraposition is used at upper and lower egative film and circuit board in addition, the video camera of one CCD image pickup system is set in the exposure frame below again, whether arrive the location in order to the target of inspecting circuit board, sent controlling signal to micro-adjusting mechanism by CCD image pickup system simultaneously; By this, has the enhancement effect that contraposition very precisely meets the aligning accuracy requirement of accurate exposure manufacture process.
The purpose of this utility model is realized by following technical scheme.According to the circuit board alignment device of a kind of exposure machine that the utility model proposes, it includes:
Two groups and be located at the micro-adjusting mechanism of exposure frame underframe outer end root edge face, it movably is provided with a pair of miniature elaborate servo slide unit on the flat board in length and breadth in one, wherein, the first servo slide unit drives dull and stereotyped displacement, be located at the dull and stereotyped second inboard servo slide unit and then drive an extension board displacement, and be provided with one in the extension board end and have the alignment pin of telescopic resilience up and down, and the glass of this underframe stretches through and the vacillate perforation in space of tool to should alignment pin being provided with for it;
Upper and lower egative film and circuit board are provided with the target that mutual contraposition is used, and the relative alignment pin of circuit board is provided with registration holes;
One CCD image pickup system, it is arranged at exposure frame below book office with video camera, and the superimposed image of its target that is absorbed of mat, controls the two miniature elaborate servo slide unit actions that this micro-adjusting mechanism is provided with in length and breadth.
The purpose of this utility model can also further realize by following technical measures.
The circuit board alignment device of aforesaid exposure machine, the top of wherein said alignment pin is set as cone.
The circuit board alignment device of aforesaid exposure machine, wherein said upper and lower egative film and upper glass face also are provided with perforation or groove than large diameter with respect to alignment pin.And the circuit board that does not influence in the middle of the alignment pin drive is vacillated.
The utility model compared with prior art has tangible advantage and good effect.
By above technical scheme as can be known, the utility model is the frame mode with the circuit board contraposition, and existing fit contraposition mode with register pin and pilot hole has the effect that contraposition very precisely meets the aligning accuracy requirement of accurate exposure manufacture process.And it is to utilize micro-adjusting mechanism and CCD image pickup system, and both complement each other, and contraposition automatically need not used manually location one by one, so can develop efficiency and production capacity, meets the demand of high-tech industry fully.
In sum, the circuit board alignment device of the utility model exposure machine, no matter it structurally or bigger improvement all arranged on the function, and have large improvement technically, and produced handy and practical effect, and have the effect of enhancement really, thus be suitable for practicality more, really be a new and innovative, progressive, practical new design.
Concrete structure of the present utility model is provided in detail by following examples and accompanying drawing thereof.
Fig. 1 is the schematic perspective view that the utility model embodiment is arranged at exposure machine;
Fig. 2 is the relevant position synoptic diagram that the utility model embodiment is arranged at exposure machine;
Fig. 3 is the relevant position synoptic diagram that the micro-adjusting mechanism of the utility model embodiment is arranged at exposure frame;
Fig. 4 is the structure vertical view of the micro-adjusting mechanism of the utility model embodiment;
Fig. 5 is the cut-open view of A-A section among Fig. 4;
Fig. 6 is that the micro-adjusting mechanism of the utility model embodiment and the collocation of CCD image pickup system concern synoptic diagram ();
Fig. 7 is that the micro-adjusting mechanism of the utility model embodiment and the collocation of CCD image pickup system concern synoptic diagram (two);
Fig. 8 is the upper and lower egative film of the utility model embodiment and the synoptic diagram () of the mutual contraposition of its target of circuit board mat;
Fig. 9 is the upper and lower egative film of the utility model embodiment and the synoptic diagram (two) of the mutual contraposition of its target of circuit board mat.
The figure number explanation
(1) exposure frame (22), (23) first and second servo slide unit (52) perforation
(11) underframe (24) alignment pin (61) target
(111) glass (241) cone (62) registration holes
(112) perforation (3) CCD image pickup system (5) lower master film
(12) cabinet face (31) video camera (6) circuit board
(121) glass (4) is wound the film
(122) groove (41) target
(2) micro-adjusting mechanism (42) perforation
(21) dull and stereotyped (51) target
Below in conjunction with accompanying drawing and preferred embodiment, to circuit board alignment device according to the exposure machine that the utility model proposes, its concrete structure, feature and effect thereof, describe in detail as after.
At first, see also Fig. 1 to shown in Figure 3, the utility model is with two groups of micro-adjusting mechanisms 2 and is located at exposure frame 1, underframe 11 outer end root edge faces, the formation of micro-adjusting mechanism 2 is then extremely shown in Figure 6 as Fig. 4, movably on the flat board 21 a pair of miniature elaborate servo slide unit 22 is set in length and breadth one, 23, wherein, the first servo slide unit 22 is to drive dull and stereotyped 21 displacements (X-direction), the second servo slide unit 23 of being located at dull and stereotyped 21 inboards then drives an extension board 231 displacements (Y direction), and be provided with one in extension board 231 ends and have the alignment pin 24 of telescopic resilience up and down, and then make alignment pin 24 have X, the fine setting displacement function of Y-axis two degree plane spaces, and 111 pairs of the glass of this underframe 11 should alignment pin 24 be provided with the perforation 112 that supplies it to stretch through and have the space of vacillating.
Again, the top of this alignment pin 24 is set as cone 241.
Moreover, as Fig. 2, Fig. 6, shown in Figure 7, the video camera 31 of one CCD image pickup system 3 is set in exposure frame 1 below book office in addition, and CCD image pick-up 3 then is located at directly over the board, and has the screen picture 32 (shown in Figure 1) that shows video camera 31 captured target location.As for the inner structure of CCD image pickup system 3, it is a prior art, and non-pattern characteristics be not so repeat them here; The utility model only is to use it to control two groups of micro-adjusting mechanisms 2; And for example Fig. 7 is provided with the target 41,51,61 that mutual contraposition is used with upper and lower egative film 4,5 and circuit board 6 again, and makes circuit board 6 relative these alignment pin 24 be provided with a smaller registration holes 62 to shown in Figure 9, makes it can be nested with cone 241 places that are positioned at the top; And this upper and lower egative film 4,5 and upper glass face 121 are provided with perforation 42,52 or groove 122 than large diameter with respect to 24 of alignment pin, do not vacillate and do not influence the circuit board 6 of alignment pin 24 in the middle of driving.
Based on said structure, the utility model is a mat CCD image pickup system 3, earlier 4,5 pairs on upper and lower egative film is positioned on the glass 121,111 of table top 12 and underframe 11, and circuit board 6 that again will be to be exposed places lower master film 5 tops of underframe 11, and makes its registration holes 62 be sheathed on the alignment pin 24 (as Fig. 6, shown in Figure 7) of micro-adjusting mechanism 2; So, but the target 41 that this CCD image pickup system 3 is absorbed with regard to its video camera 31 of mat, 51,61 superimposed images (as shown in Figure 8), and then control that this micro-adjusting mechanism 2 is provided with in length and breadth miniature accurate first, two servo slide units 22,23 actions, vacillate and drive circuit board 6 with alignment pin 24, on this moment, following two glass 121,111 as shown in Figure 6, vacuumizing and adsorbing is not together as yet, two alignment pin 24 are then clamped circuit board just as the finger of both hands and are being done the fine setting location, only need time several seconds to treat that the target 61 of circuit board correctly is positioned at, the target 41 of lower master film, 51 centers, then make first, two servo slide units 22,23 stop action, can be with circuit board 6 with respect to last, lower master film 4,5 contrapositions accurately, then as shown in Figure 9, make, lower master film 4,5 because of last, lower-glass face 121,111 are attached together (Fig. 9 does not show), and it is precisely superimposed on circuit board 6, lower surface is so that circuit accurately exposes.Accurate positioning degree of the present utility model after tested can be controlled in ± 0.01mm, so be applicable to high-precision circuit board.
The above, it only is preferred embodiment of the present utility model, be not that the utility model is done any pro forma restriction, every foundation technical spirit of the present utility model all still belongs in the scope of technical solutions of the utility model any simple modification, equivalent variations and modification that above embodiment did.
Claims (3)
1. the circuit board alignment device of an exposure machine, it includes:
Two groups and be located at the micro-adjusting mechanism of exposure frame underframe outer end root edge face, it movably is provided with a pair of miniature elaborate servo slide unit on the flat board in length and breadth in one, wherein, the first servo slide unit drives dull and stereotyped displacement, be located at the dull and stereotyped second inboard servo slide unit and then drive an extension board displacement, and be provided with one in the extension board end and have the alignment pin of telescopic resilience up and down, and the glass of this underframe stretches through and the vacillate perforation in space of tool to should alignment pin being provided with for it;
Upper and lower egative film and circuit board are provided with the target that mutual contraposition is used, and the relative alignment pin of circuit board is provided with registration holes;
One CCD image pickup system, it is arranged at exposure frame below book office with video camera.
2. the circuit board alignment device of exposure machine according to claim 1 is characterized in that the top of described alignment pin is set as cone.
3. the circuit board alignment device of exposure machine according to claim 1 is characterized in that described upper and lower egative film and upper glass face also are provided with perforation or groove than large diameter with respect to alignment pin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01218815 CN2475052Y (en) | 2001-04-03 | 2001-04-03 | Circuit board counterpoint device of exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01218815 CN2475052Y (en) | 2001-04-03 | 2001-04-03 | Circuit board counterpoint device of exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2475052Y true CN2475052Y (en) | 2002-01-30 |
Family
ID=33636769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01218815 Expired - Lifetime CN2475052Y (en) | 2001-04-03 | 2001-04-03 | Circuit board counterpoint device of exposure machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2475052Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103676500A (en) * | 2013-12-31 | 2014-03-26 | 四川聚能核技术工程有限公司 | Full-automatic exposure machine |
| CN104111586A (en) * | 2013-06-27 | 2014-10-22 | 东莞市瑾耀精密设备有限公司 | Exposure machine based on CCD alignment system |
| CN108401373A (en) * | 2018-02-12 | 2018-08-14 | 广州兴森快捷电路科技有限公司 | Wiring board and its exposure foolproof method |
| CN111474830A (en) * | 2020-05-18 | 2020-07-31 | 深圳市绿基电子科技有限公司 | Photoelectric exposure machine for circuit board |
| CN111474829A (en) * | 2020-05-18 | 2020-07-31 | 深圳市绿基电子科技有限公司 | Circuit board exposure method |
-
2001
- 2001-04-03 CN CN 01218815 patent/CN2475052Y/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104111586A (en) * | 2013-06-27 | 2014-10-22 | 东莞市瑾耀精密设备有限公司 | Exposure machine based on CCD alignment system |
| CN103676500A (en) * | 2013-12-31 | 2014-03-26 | 四川聚能核技术工程有限公司 | Full-automatic exposure machine |
| CN103676500B (en) * | 2013-12-31 | 2016-08-17 | 四川聚能核技术工程有限公司 | Full-automatic exposure machine |
| CN108401373A (en) * | 2018-02-12 | 2018-08-14 | 广州兴森快捷电路科技有限公司 | Wiring board and its exposure foolproof method |
| CN111474830A (en) * | 2020-05-18 | 2020-07-31 | 深圳市绿基电子科技有限公司 | Photoelectric exposure machine for circuit board |
| CN111474829A (en) * | 2020-05-18 | 2020-07-31 | 深圳市绿基电子科技有限公司 | Circuit board exposure method |
| CN111474829B (en) * | 2020-05-18 | 2023-01-10 | 深圳市绿基电子科技有限公司 | Circuit board exposure method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: ZHANG HONGMING Free format text: FORMER OWNER: CHUANBAO SCIENCE AND TECHNOLOGY CO., LTD. Effective date: 20030829 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20030829 Address after: Taoyuan County of Taiwan province Luju South Road No. 56 Patentee after: Zhang Hongming Address before: Taiwan, China Patentee before: Chime Ball Technology Co., Ltd. |
|
| ASS | Succession or assignment of patent right |
Owner name: CHUANBAO SCIENCE AND TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: ZHANG HONGMING Effective date: 20080104 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20080104 Address after: Postcode of Taiwan, china: Patentee after: Chime Ball Technology Co., Ltd. Address before: China Taiwan Taoyuan County Lujhu Township South Road 56, zip: Patentee before: Zhang Hongming |
|
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20110403 Granted publication date: 20020130 |