CN216526729U - Pressing device for photoetching machine - Google Patents
Pressing device for photoetching machine Download PDFInfo
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- CN216526729U CN216526729U CN202123088529.8U CN202123088529U CN216526729U CN 216526729 U CN216526729 U CN 216526729U CN 202123088529 U CN202123088529 U CN 202123088529U CN 216526729 U CN216526729 U CN 216526729U
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- displacement
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- seat
- roller positioning
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- 238000003825 pressing Methods 0.000 title claims abstract description 91
- 238000001259 photo etching Methods 0.000 title claims abstract description 27
- 238000006073 displacement reaction Methods 0.000 claims abstract description 160
- 230000007246 mechanism Effects 0.000 claims abstract description 99
- 230000000712 assembly Effects 0.000 claims description 5
- 238000000429 assembly Methods 0.000 claims description 5
- 150000003071 polychlorinated biphenyls Chemical group 0.000 description 5
- 238000001035 drying Methods 0.000 description 4
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
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Abstract
The utility model discloses a pressing device for a photoetching machine, which relates to the technical field of photoetching machines and comprises a blank pressing lifting mechanism, a horizontal displacement mechanism, a blank pressing roller and a roller positioning mechanism, wherein the horizontal displacement mechanism can drive the blank pressing lifting mechanism to horizontally displace, and the blank pressing lifting mechanism can drive the horizontal displacement mechanism and the roller positioning mechanism to do lifting motion; the blank pressing lifting mechanism comprises a lifting cylinder and a lifting seat, and the lifting cylinder can drive the lifting seat to do lifting motion; the horizontal displacement mechanism comprises a displacement motor and a displacement screw rod, and the displacement motor can drive the displacement screw rod to move horizontally; the roller positioning mechanism comprises a roller positioning bracket and a roller positioning seat. The blank pressing lifting mechanism and the horizontal displacement mechanism of the pressing device work in a linkage manner, so that the roller positioning seat and the blank pressing roller can do lifting and horizontal movement, the blank pressing roller can flatten a PCB in the vertical direction, the stability of the PCB is ensured, and the quality of photoetching processing can be ensured.
Description
Technical Field
The utility model relates to the technical field of photoetching machines, in particular to a pressing device for a photoetching machine.
Background
The photoetching machine is called as a mask alignment exposure machine, the common photoetching machine adopts mask alignment photoetching, the general photoetching process needs to be subjected to a plurality of procedures of cleaning and drying the surface of a silicon wafer, coating a bottom, spin-coating photoresist, soft drying, alignment exposure, post-drying, developing, hard drying, etching and the like, the high-end projection photoetching machine can be divided into a stepping projection photoetching machine and a scanning projection photoetching machine, and the resolution ratio is usually between seven nanometers and several micrometers.
The PCB is named as a printed circuit board, also called as a printed circuit board, is a very important electronic component, is a support for electronic components, and is also a carrier for electrical connection of electronic components. Almost every electronic device, as small as electronic watches, calculators, remote controls, as large as computers, communication electronics, machine tools, military weapons systems, and so on, has electronic components such as integrated circuits, and for the electrical interconnection between the various components, a printed circuit board is used, which is called a "printed" circuit board because it is made by electronic printing.
In the prior art, a suction cup of a photoetching machine is an important component of the photoetching machine. Factors such as the size, the flatness, the adsorption mode and the adsorption force of the sucker have important influence on the actual production and manufacture of PCB plate making. When the existing sucker of the photoetching machine adsorbs a thinner PCB, the PCB can be adsorbed flatly, and certain stability is achieved. But when PCB was than thick, because the adsorption affinity of sucking disc is not enough, be not enough to make PCB adsorb and level, can't guarantee PCB's stability, not hard up skew takes place for the position of PCB easily to the quality of photoetching processing can not be guaranteed.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a pressing device for a photoetching machine, which has the beneficial effects that a blank pressing roller can flatten a PCB in the vertical direction, the stability of the PCB is ensured, and the photoetching processing quality can be ensured, so that the problems in the background art are solved.
In order to achieve the purpose, the utility model provides the following technical scheme:
a hold-down device for a photoetching machine comprises a blank pressing lifting mechanism, a horizontal displacement mechanism, a blank pressing roller and a roller positioning mechanism, wherein the horizontal displacement mechanism is arranged between the blank pressing lifting mechanisms and is connected with the blank pressing lifting mechanisms, the horizontal displacement mechanism can drive the blank pressing lifting mechanisms to horizontally displace, the blank pressing lifting mechanisms can drive the horizontal displacement mechanisms to do lifting motion, the blank pressing roller is connected with the roller positioning mechanism, the roller positioning mechanism is arranged at the bottom of the blank pressing lifting mechanisms and is connected with the blank pressing lifting mechanisms, and the blank pressing lifting mechanisms can drive the roller positioning mechanisms to do lifting motion;
the blank pressing lifting mechanism comprises a lifting cylinder and a lifting seat, the lifting cylinder is arranged on the top side of the lifting seat and is connected with the lifting seat, and the lifting cylinder can drive the lifting seat to do lifting motion;
the horizontal displacement mechanism comprises a displacement motor and a displacement screw rod, the displacement screw rod is arranged at the output end of the displacement motor and is connected with the displacement motor, and the displacement motor can drive the displacement screw rod to move horizontally;
the roller positioning mechanism comprises a roller positioning support and a roller positioning seat, the blank pressing roller is connected to the roller positioning support, and the roller positioning support is arranged on the roller positioning seat and connected with the roller positioning seat.
As a still further scheme of the utility model: the two blank pressing lifting mechanisms are respectively arranged at two ends of the roller positioning seat and fixedly connected with the roller positioning seat.
As a still further scheme of the utility model: blank pressing elevating system still includes cylinder fixed block, lift slide rail and lifting slide block, cylinder fixed block, lift slide rail, lifting slide block set gradually, connect, cylinder fixed block bottom with horizontal displacement mechanism fixed connection, the lift cylinder connect in the top of cylinder fixed block, lift slide rail fixed connection in cylinder fixed block side, lifting slide block slidable connect in on the lift slide rail, lifting slide block with lift seat fixed connection.
As a still further scheme of the utility model: the roller positioning seat is arranged between the lifting seats, and the end part of the roller positioning seat is fixedly connected with the lifting seats.
As a still further scheme of the utility model: the horizontal displacement mechanism also comprises a motor positioning seat, a displacement assembly, a displacement plate and a motor driving seat, wherein the motor positioning seat, the displacement assembly and the displacement plate are sequentially arranged and connected from top to bottom, and the displacement motor is fixed on the motor positioning seat; the displacement assembly comprises a displacement fixing seat, a displacement slide rail and a displacement slide block, the displacement fixing seat is fixed on the bottom side of the motor positioning seat, the displacement slide rail is fixed on the bottom side of the displacement fixing seat, the displacement slide block is connected to the displacement slide rail in a sliding mode, the displacement plate is fixed on the bottom side of the displacement slide block, and the motor driving seat is fixed at one end of the displacement screw rod and is fixedly connected with the top of the displacement plate.
As a still further scheme of the utility model: the displacement assembly is equipped with two, and two displacement assemblies all fix and locate on the displacement board.
As a still further scheme of the utility model: the displacement plate is arranged between the cylinder fixing blocks, and the end part of the displacement plate is fixedly connected with the cylinder fixing blocks.
As a still further scheme of the utility model: the roller positioning supports are two and are fixedly connected with the roller positioning seat, and each roller positioning support is connected with two blank pressing rollers.
As a still further scheme of the utility model: the roller positioning seat is provided with a support accommodating groove and a roller yielding hole, the roller positioning support is installed in the support accommodating groove, and the top of the blank pressing roller is arranged in the roller yielding hole.
Compared with the prior art, the utility model has the beneficial effects that:
the lifting cylinder of the blank pressing lifting mechanism of the pressing device can drive the lifting seat to lift, so that the roller positioning seat and the blank pressing roller are driven to do lifting motion, and the blank pressing roller can flatten a PCB in the vertical direction; the position of the edge pressing roller can be adjusted according to the size of the PCB, specifically, a displacement motor of a horizontal displacement mechanism can drive a displacement screw rod to move horizontally, the displacement screw rod drives a motor driving seat to move horizontally, the motor driving seat drives a displacement plate to move horizontally, the displacement plate drives a cylinder fixing block and a lifting seat to move horizontally, and then a roller positioning seat and the edge pressing roller are driven to move horizontally, so that the position of the edge pressing roller is adjusted to adapt to PCBs of different sizes; the blank pressing lifting mechanism and the horizontal displacement mechanism of the pressing device work in a linkage manner, so that the roller positioning seat and the blank pressing roller can do lifting and horizontal movement, the blank pressing roller can flatten a PCB in the vertical direction, the stability of the PCB is ensured, and the quality of photoetching processing can be ensured.
Drawings
Fig. 1 is a schematic structural diagram of the pressing device of the present invention.
Fig. 2 is a perspective view of the compression device of the present invention.
Fig. 3 is an exploded view of the compression device of the present invention.
Fig. 4 is an exploded view of another orientation of the compression device of the present invention.
The labels in the figure are:
1. a blank pressing lifting mechanism; 2. a horizontal displacement mechanism; 3. a blank pressing roller; 4. a roller positioning mechanism;
11. a lifting cylinder; 12. a lifting seat; 13. a cylinder fixing block; 14. lifting the slide rail; 15. a lifting slide block;
21. a displacement motor; 22. a displacement screw rod; 23. a motor positioning seat; 24. a displacement assembly; 25. a displacement plate; 26. a motor drive base; 27. a displacement fixing seat; 28. a displacement slide rail; 29. a displacement slide block;
41. a roller positioning bracket; 42. a roller positioning seat; 43. a rack receiving groove; 44. and the roller is provided with a yielding hole.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, in an embodiment of the present invention, a pressing device for a lithography machine, referring to fig. 1 and 2, includes a blank holder lifting mechanism 1, a horizontal displacement mechanism 2, a blank holder roller 3, and a roller positioning mechanism 4, where the horizontal displacement mechanism 2 is disposed between the blank holder lifting mechanisms 1 and fixedly connected to the blank holder lifting mechanism 1, the horizontal displacement mechanism 2 can drive the blank holder lifting mechanism 1 to horizontally displace, the blank holder lifting mechanism 1 can drive the horizontal displacement mechanism 2 to perform lifting motion, the blank holder roller 3 is disposed on the roller positioning mechanism 4 and fixedly connected to the roller positioning mechanism 4, the roller positioning mechanism 4 is disposed at the bottom of the blank holder lifting mechanism 1 and fixedly connected to the blank holder lifting mechanism 1, and the blank holder lifting mechanism 1 can drive the roller positioning mechanism 4 to perform lifting motion;
referring to fig. 1, the blank holder lifting mechanism 1 includes a lifting cylinder 11 and a lifting base 12, the lifting cylinder 11 is disposed on the top side of the lifting base 12, the lifting cylinder 11 is connected to the lifting base 12, and the lifting cylinder 11 can drive the lifting base 12 to perform lifting movement;
referring to fig. 1, the horizontal displacement mechanism 2 includes a displacement motor 21 and a displacement screw 22, the displacement screw 22 is disposed at the output end of the displacement motor 21 and connected to the displacement motor 21, and the displacement motor 21 can drive the displacement screw 22 to move horizontally;
referring to fig. 1, the roller positioning mechanism 4 includes a roller positioning bracket 41 and a roller positioning seat 42, the edge pressing roller 3 is connected to the roller positioning bracket 41, and the roller positioning bracket 41 is disposed on the roller positioning seat 42 and connected to the roller positioning seat 42. Referring to fig. 1 and 3, the lifting cylinder 11 of the blank holder lifting mechanism 1 of the pressing device of the present invention can drive the lifting seat 12 to lift, so as to drive the roller positioning seat 42 and the blank holder roller 3 to perform lifting movement, so that the blank holder roller 3 can flatten the PCB in the vertical direction; the displacement motor 21 of the horizontal displacement mechanism 2 can drive the displacement screw rod 22 to move horizontally, the displacement screw rod 22 drives the motor driving seat 26 to move horizontally, the motor driving seat 26 drives the displacement plate 25 to move horizontally, the displacement plate 25 drives the cylinder fixing block 13 and the lifting seat 12 to move horizontally, and further drives the roller positioning seat 42 and the blank pressing roller 3 to move horizontally, so that the position of the blank pressing roller 3 is adjusted to adapt to PCBs of different sizes; the blank pressing lifting mechanism 1 and the horizontal displacement mechanism 2 of the pressing device work in a linkage manner, so that the roller positioning seat 42 and the blank pressing roller 3 can do lifting and horizontal movement, the blank pressing roller 3 can flatten a PCB in the vertical direction, the stability of the PCB is ensured, and the quality of photoetching processing can be ensured.
Referring to fig. 3 and 4, two blank holder lifting mechanisms 1 are provided, which are respectively disposed at two ends of the roller positioning seat 42 and fixedly connected to the roller positioning seat 42; further, the blank pressing lifting mechanism 1 further comprises an air cylinder fixing block 13, a lifting slide rail 14 and a lifting slide block 15, the air cylinder fixing block 13, the lifting slide rail 14 and the lifting slide block 15 are sequentially arranged and connected, the bottom of the air cylinder fixing block 13 is fixedly connected with the horizontal displacement mechanism 2, the lifting air cylinder 11 is connected to the top of the air cylinder fixing block 13, the lifting slide rail 14 is fixedly connected to the side face of the air cylinder fixing block 13, the lifting slide block 15 is slidably connected to the lifting slide rail 14, and the lifting slide block 15 is fixedly connected with the lifting seat 12; furthermore, the roller positioning seat 42 is arranged between the lifting seats 12, and the end part of the roller positioning seat 42 is fixedly connected with the lifting seats 12; the lifting cylinder 11 drives the lifting seat 12 and the lifting slide block 15 to do lifting motion along the lifting slide rail 14, the lifting seat 12 drives the roller positioning seat 42 fixedly connected with the lifting seat to do lifting motion, and then the blank pressing roller 3 fixed on the roller positioning seat 42 is driven to do lifting motion.
In a preferred embodiment of the present invention, referring to fig. 3 and 4, the horizontal displacement mechanism 2 further includes a motor positioning seat 23, a displacement assembly 24, a displacement plate 25 and a motor driving seat 26, the motor positioning seat 23, the displacement assembly 24 and the displacement plate 25 are sequentially disposed and connected from top to bottom, and the displacement motor 21 is fixed on the motor positioning seat 23; the displacement assembly 24 comprises a displacement fixing seat 27, a displacement slide rail 28 and a displacement slide block 29, wherein the displacement fixing seat 27 is fixed at the bottom side of the motor positioning seat 23, the displacement slide rail 28 is fixed at the bottom side of the displacement fixing seat 27, the displacement slide block 29 is slidably connected to the displacement slide rail 28, the displacement plate 25 is fixed at the bottom side of the displacement slide block 29, and the motor driving seat 26 is fixed at one end of the displacement screw rod 22 and is fixedly connected with the top of the displacement plate 25; furthermore, two displacement assemblies 24 are arranged, the two displacement assemblies 24 are fixedly arranged on the displacement plate 25, and the two displacement assemblies 24 enable the displacement plate 25 to move more stably, so that the stability of horizontal displacement is improved; further, the displacement plate 25 is arranged between the cylinder fixing blocks 13, and the end of the displacement plate 25 is fixedly connected with the cylinder fixing blocks 13. The displacement motor 21 of the horizontal displacement mechanism 2 can drive the displacement screw rod 22 to move horizontally, the displacement screw rod 22 drives the motor driving seat 26 to move horizontally, the motor driving seat 26 drives the displacement plate 25 to move horizontally, the displacement plate 25 drives the cylinder fixing block 13 fixedly connected with the displacement plate to move horizontally, the cylinder fixing block 13 drives the lifting cylinder 11 and the lifting seat 12 to move horizontally, and then the roller positioning seat 42 and the blank pressing roller 3 are driven to move horizontally, so that the position of the blank pressing roller 3 is adjusted to adapt to PCBs with different sizes.
In a preferred embodiment of the present invention, referring to fig. 2, two roller positioning brackets 41 are provided, and are both fixedly connected to the roller positioning seat 42, and each roller positioning bracket 41 is connected to two edge pressing rollers 3; furthermore, a support accommodating groove 43 and a roller abdicating hole 44 are arranged on the roller positioning seat 42, the roller positioning support 41 is arranged in the support accommodating groove 43, and the top of the edge pressing roller 3 is arranged in the roller abdicating hole 44; through the lifting and horizontal movement of the edge pressing roller 3, the edge pressing roller 3 can flatten the PCB in the vertical direction and the horizontal direction, so that the stability of the PCB is ensured, and the quality of photoetching processing can be ensured.
The working process of the utility model is as follows: referring to fig. 1 and 3, the lifting cylinder 11 drives the lifting seat 12 and the lifting slider 15 to perform lifting motion along the lifting slide rail 14, the lifting seat 12 drives the roller positioning seat 42 fixedly connected with the lifting seat to perform lifting motion, and further drives the edge pressing roller 3 fixed on the roller positioning seat 42 to perform lifting motion, so that the edge pressing roller 3 can flatten the PCB in the vertical direction; the displacement motor 21 of the horizontal displacement mechanism 2 can drive the displacement screw rod 22 to move horizontally, the displacement screw rod 22 drives the motor driving seat 26 to move horizontally, the motor driving seat 26 drives the displacement plate 25 to move horizontally, the displacement plate 25 drives the cylinder fixing block 13 fixedly connected with the displacement plate 25 to move horizontally, the cylinder fixing block 13 drives the lifting cylinder 11 and the lifting seat 12 to move horizontally, and further drives the roller positioning seat 42 and the blank pressing roller 3 to move horizontally, so that the position of the blank pressing roller 3 is adjusted to adapt to PCBs of different sizes; the blank pressing lifting mechanism 1 and the horizontal displacement mechanism 2 work in a linkage mode, so that the roller positioning seat 42 and the blank pressing roller 3 can do lifting and horizontal movement, the blank pressing roller 3 can flatten the PCB in the vertical direction, the stability of the PCB is guaranteed, and the quality of photoetching processing can be guaranteed.
The blank pressing lifting mechanism 1 and the horizontal displacement mechanism 2 of the pressing device work in a linkage manner, so that the roller positioning seat 42 and the blank pressing roller 3 can do lifting and horizontal movement, the blank pressing roller 3 can flatten a PCB in the vertical direction, the stability of the PCB is ensured, and the quality of photoetching processing can be ensured.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the utility model can be made, and equivalents and modifications of some features of the utility model can be made without departing from the spirit and scope of the utility model.
Claims (9)
1. A hold-down device for a photoetching machine is characterized by comprising a blank pressing lifting mechanism, a horizontal displacement mechanism, a blank pressing roller and a roller positioning mechanism, wherein the horizontal displacement mechanism is arranged between the blank pressing lifting mechanisms and connected with the blank pressing lifting mechanisms, the horizontal displacement mechanism can drive the blank pressing lifting mechanisms to horizontally displace, the blank pressing lifting mechanisms can drive the horizontal displacement mechanisms to do lifting motion, the blank pressing roller is connected with the roller positioning mechanism, the roller positioning mechanism is arranged at the bottom of the blank pressing lifting mechanisms and connected with the blank pressing lifting mechanisms, and the blank pressing lifting mechanisms can drive the roller positioning mechanisms to do lifting motion;
the blank pressing lifting mechanism comprises a lifting cylinder and a lifting seat, the lifting cylinder is arranged on the top side of the lifting seat and is connected with the lifting seat, and the lifting cylinder can drive the lifting seat to do lifting motion;
the horizontal displacement mechanism comprises a displacement motor and a displacement screw rod, the displacement screw rod is arranged at the output end of the displacement motor and is connected with the displacement motor, and the displacement motor can drive the displacement screw rod to move horizontally;
the roller positioning mechanism comprises a roller positioning support and a roller positioning seat, the blank pressing roller is connected to the roller positioning support, and the roller positioning support is arranged on the roller positioning seat and connected with the roller positioning seat.
2. The clamping device of claim 1, wherein two of said blank holder lifting mechanisms are respectively disposed at two ends of said roller positioning seat and fixedly connected to said roller positioning seat.
3. The pressing device of claim 1, wherein the edge press lifting mechanism further comprises a cylinder fixing block, a lifting slide rail and a lifting slide block, the cylinder fixing block, the lifting slide rail and the lifting slide block are sequentially arranged and connected, the bottom of the cylinder fixing block is fixedly connected with the horizontal displacement mechanism, the lifting cylinder is connected to the top of the cylinder fixing block, the lifting slide rail is fixedly connected to the side of the cylinder fixing block, the lifting slide block is slidably connected to the lifting slide rail, and the lifting slide block is fixedly connected to the lifting base.
4. The pressing device of claim 1, wherein the roller positioning seat is disposed between the lifting seats, and an end of the roller positioning seat is fixedly connected to the lifting seats.
5. The pressing device of claim 3, wherein the horizontal displacement mechanism further comprises a motor positioning seat, a displacement assembly, a displacement plate and a motor driving seat, the motor positioning seat, the displacement assembly and the displacement plate are sequentially arranged and connected from top to bottom, and the displacement motor is fixed on the motor positioning seat; the displacement assembly comprises a displacement fixing seat, a displacement slide rail and a displacement slide block, the displacement fixing seat is fixed on the bottom side of the motor positioning seat, the displacement slide rail is fixed on the bottom side of the displacement fixing seat, the displacement slide block is connected to the displacement slide rail in a sliding mode, the displacement plate is fixed on the bottom side of the displacement slide block, and the motor driving seat is fixed at one end of the displacement screw rod and is fixedly connected with the top of the displacement plate.
6. A clamping device for a lithographic apparatus according to claim 5, wherein there are two displacement assemblies, both of which are fixedly arranged on the displacement plate.
7. The pressing device of claim 5, wherein the displacement plate is disposed between the cylinder fixing blocks, and an end of the displacement plate is fixedly connected to the cylinder fixing blocks.
8. The clamping device of claim 1, wherein two of said roller positioning brackets are fixedly connected to said roller positioning seat, and two blank pressing rollers are connected to each roller positioning bracket.
9. The clamping device of claim 1, wherein the roller positioning seat has a bracket receiving groove and a roller relief hole, the roller positioning bracket is mounted in the bracket receiving groove, and the top of the blank pressing roller is disposed in the roller relief hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123088529.8U CN216526729U (en) | 2021-12-10 | 2021-12-10 | Pressing device for photoetching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123088529.8U CN216526729U (en) | 2021-12-10 | 2021-12-10 | Pressing device for photoetching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216526729U true CN216526729U (en) | 2022-05-13 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123088529.8U Withdrawn - After Issue CN216526729U (en) | 2021-12-10 | 2021-12-10 | Pressing device for photoetching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216526729U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114047674A (en) * | 2021-12-10 | 2022-02-15 | 广东科视光学技术股份有限公司 | Pressing device for photoetching machine |
-
2021
- 2021-12-10 CN CN202123088529.8U patent/CN216526729U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114047674A (en) * | 2021-12-10 | 2022-02-15 | 广东科视光学技术股份有限公司 | Pressing device for photoetching machine |
| CN114047674B (en) * | 2021-12-10 | 2024-05-14 | 广东科视光学技术股份有限公司 | Pressing device for photoetching machine |
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| GR01 | Patent grant | ||
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| AV01 | Patent right actively abandoned |
Granted publication date: 20220513 Effective date of abandoning: 20240514 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20220513 Effective date of abandoning: 20240514 |