CN105607428B - A kind of automatic exposure machine mechanism - Google Patents
A kind of automatic exposure machine mechanism Download PDFInfo
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- CN105607428B CN105607428B CN201511024805.0A CN201511024805A CN105607428B CN 105607428 B CN105607428 B CN 105607428B CN 201511024805 A CN201511024805 A CN 201511024805A CN 105607428 B CN105607428 B CN 105607428B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention discloses a kind of automatic exposure machine mechanism, including：For upper and lower clamping egative film and the platform frame of substrate, described frame is divided into leave from office frame and frame of appearing on the stage arranged on the left and right sides；Installed in leave from office frame bottom and for control lifting leave from office frame to the mutually level lower frame hoisting mechanism of frame of appearing on the stage；Replaced with for left and right, the Huan Kuang mechanisms of leave from office frame position；And it is used to adjusting the lifting alignment device of lower substrate egative film position relatively above below the leave from office frame.The configuration of the present invention is simple, stability are good, exposure accuracy is high, leave from office frame is equipped with lower frame hoisting mechanism and ensures industrial camera when gathering image, error will not be produced because of the focusing problem of leave from office frame, lifting alignment device can adjust the position positioned at lower substrate with respect to egative film, realize precisely contraposition, and upper and lower frame carries out right position exchange by Huan Kuang mechanisms, running is simple, it is easy to operate so that exposure machine can stable operation, also improve work efficiency.
Description
Technical field
The present invention is applied to printed wiring board industry exposure manufacture process apparatus field, more particularly relates to a kind of automatic exposure machine
Mechanism.
Background technology
It is by the circuit image bat printing on egative film to substrate in printed wiring board exposure manufacture process.Bat printing is by right
A kind of material of ultraviolet-sensitive carries out ultraviolet irradiation, makes the material that chemical change occur, and is so then irradiated by ultraviolet
Material is just divided into two states afterwards, completes circuit image bat printing.How quickly the problem of image bat printing one is extremely important be,
Accurately egative film is aligned with the target position on substrate.
Existing exposure machine mechanism using after the image of industrial camera collection egative film and substrate, compares two picture positions more
Deviation, the position by moving back and forth substrate realize that the contraposition of itself and egative film acts.But due on existing double-station exposure machine,
Two platform frames up and down for placing egative film and substrate at the same time can be produced there are difference in height when gathering image using industrial camera
Focus the problem of inconsistent, focussing process is not only time-consuming, but also is also easy to produce error.And for exposure machine, exposure accuracy will
Seeking Truth is very high, and any error is likely to cause the failure of image bat printing.
It is industry so as to accurately, accurately complete contraposition action in consideration of it, how to provide a kind of automatic exposure machine mechanism
Technical problem urgently to be resolved hurrily.
The content of the invention
The technical problems to be solved by the invention are to overcome above-mentioned the deficiencies in the prior art, there is provided a kind of automatic exposure machine machine
Structure.
The present invention solves the technical solution that above-mentioned technical problem uses：
A kind of automatic exposure machine mechanism, including：For upper and lower clamping egative film and the platform frame of substrate, described frame, which is divided into, to be arranged on
The leave from office frame of the left and right sides and frame of appearing on the stage；Installed in leave from office frame bottom and for controlling lifting leave from office frame to height identical with frame of appearing on the stage
The lower frame hoisting mechanism of degree；Replaced with for left and right, the Huan Kuang mechanisms of leave from office frame position；And it is used to adjust below leave from office frame
The lifting alignment device of whole lower substrate egative film position relatively above.
Preferably, the lower frame hoisting mechanism includes：Installing plate, installation positioned at leave from office frame bottom front and rear sides
Cross rail in installing plate opposite flank left and right ends, the vertical guide rail installed in cross rail side, be slidably connected to horizontal lead respectively
The cross slider of rail and vertical guide rail and vertical sliding block, the connecting plate for being fixedly connected with two pieces of cross sliders and it is sequentially connected in one of horizontal stroke
The slider cylinder of sliding block, the side upper end of the cross slider towards vertical guide rail are equipped with angled-lift splits formed with fillet surface, fillet surface,
The vertical sliding block forms slope towards the side of cross rail, and slope is equipped with slant rail, and angled-lift splits, which is slidably connected at, tiltedly leads
On rail, the slider cylinder drives leave from office frame to move up and down by cross rail, vertical guide rail and slant rail.
Preferably, the Huan Kuang mechanisms include：Change frame motor, by the first synchronizing wheel be sequentially connected in change frame electricity
The transmission shaft of mechanomotive force output terminal, by the second synchronizing wheel be sequentially connected in the belt of both ends of the drive shaft.
Preferably, the leave from office frame front and rear sides are equipped with lower closed slide, and the vertical guide rail protrudes from installing plate
Upper end lateral surface at least a pair of of the sliding block for being movably connected on lower closed slide is installed, sliding block described in one pair of which is again
Stretch out and form a fixed connection in the lower belt connecting portion of belt lower part, the Huan Kuang mechanisms drive leave from office frame parallel under
Side-to-side movement on guide rail.
Preferably, the upper closed slide that frame front and rear sides are equipped with above lower closed slide of appearing on the stage, on
At least a pair of of the top shoe for being movably connected on closed slide is installed, top shoe described in one pair of which stretches out again on platform frame
Form a fixed connection in the upper belt connecting portion of part on belt, the Huan Kuang mechanisms drive frame of appearing on the stage left on upper closed slide
Right movement.
Preferably, the lifting alignment device includes：Elevating mechanism and the plane motion on elevating mechanism
Positioning mechanism, the elevating mechanism include running part, and the running part drives leading screw by servomotor by synchronous pulley
On ball spline move up and down, the ball spline is fixedly plugged on bottom plate, the leading screw top and upper mounted plate
It is fixedly connected.
Preferably, the buttcover plate for being connected to substrate bottom surface, the positioning mechanism are equipped with above fixed plate
Between upper mounted plate and buttcover plate, positioning mechanism include to slide along two vertical direction on four groups of same planes and
Revolvable slide unit, drives two groups of drive buttcover plate synchronous planes in slide unit to move by three motors by leading screw.
Preferably, the elevating mechanism further includes loss of weight part, and the t loss of weight portion point includes four counterweight cylinders,
The cylinder barrel of the counterweight cylinder is fixedly plugged on bottom plate, and the piston rod top of counterweight cylinder is fixed with upper mounted plate to be connected
Connect, the gas circuit of four counterweight cylinders is connected in parallel hydraulic control valve, and the hydraulic control valve is connected with the source of the gas of 0.5-0.6MPa
Connect.
Preferably, the elevating mechanism, which further includes, inserts solid linear bearing and and linear axis on bottom plate
The guide rod of cooperation is held, the guide rod is fixedly connected with upper mounted plate, and the other end is flexibly connected with linear bearing.
Preferably, the frame of appearing on the stage is identical with the structure of leave from office frame, it includes：The top frame corresponded up and down
Switching mechanism with bottom framework and arranged on frame both sides, a side of the top frame and bottom framework is hinged, described
Switching mechanism drives top frame to be flipped up using hinged side as shaft with respect to bottom framework.
Compared with prior art, beneficial effects of the present invention：It is simple in structure, stability is good, exposure accuracy is high.
1. in order to ensure industrial camera when gathering image, error will not be produced because of focusing problem, therefore to leave from office frame
Lower frame hoisting mechanism is provided with, industrial camera is set to focusing datum level with the height for frame of appearing on the stage, and leave from office frame is then lifted using lower frame
Mechanism is lifted up, so that the height of leave from office frame reaches the requirement of focusing datum level.
2. lifting alignment device is provided with below industrial camera, after industrial camera has gathered image, by lifting pair
Position device adjusts position of the underlying substrate with respect to egative film, so as to fulfill accurate contraposition.
3. upper and lower frame realizes that right position exchanges by Huan Kuang mechanisms, running is simple, easy to operate so that exposure
Machine can stable operation, also improve work efficiency.
Brief description of the drawings
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, wherein：
Fig. 1 is the overall structure diagram of present pre-ferred embodiments；
Fig. 2 is the platform mount structure schematic diagram of present pre-ferred embodiments；
Fig. 3 is that appearing on the stage for present pre-ferred embodiments and changes frame mechanism structure schematic diagram at frame；
Fig. 4 is the leave from office frame of present pre-ferred embodiments, lower frame hoisting mechanism and changes frame mechanism structure schematic diagram；
Fig. 5 is the lower frame hoisting mechanism structure diagram of present pre-ferred embodiments；
Fig. 6 is the lifting alignment device structure diagram of present pre-ferred embodiments；
Fig. 7 is the working state schematic representation of present pre-ferred embodiments.
Embodiment
Below in conjunction with attached drawing and embodiment, the present invention is described further.Drawn in preferred embodiment
Such as " on ", " under ", "left", "right", " centre " and " one " term, only understanding for ease of narration, and be not used to limit
The enforceable scope of the present invention, its relativeness are altered or modified, in the case where changing technology contents without essence, when being also considered as this hair
Bright enforceable category.
Fig. 1 is referred to, a kind of automatic exposure machine mechanism designed in present pre-ferred embodiments, it is specifically included：Appear on the stage
Frame 101, leave from office frame 102, lower frame hoisting mechanism 200, Huan Kuang mechanisms 300 and lifting alignment device 400.
Fig. 2 is referred to, specifically, frame 101 of appearing on the stage is identical with the basic structure of leave from office frame 102, it is mainly by top frame
110th, bottom framework 120 and switching mechanism 130 are formed.Top frame 110 and bottom framework correspond about 120, and plate-like square
Shape mount structure, top frame 110 and the side both ends of bottom framework 120 are hinged, and switching mechanism 130 is provided with two, point
Not Wei Yu frame both sides, it is and adjacent with above-mentioned hinged side.Switching mechanism 130 is driven by the central control system of exposure machine,
Switching mechanism 130 can drive top frame 110 to be flipped up using hinged side as shaft with respect to bottom framework 120.For track
The egative film 140 and substrate 150 of road plate are placed between top frame 110 and bottom framework 120, and egative film 140 is above, substrate 150
Positioned at lower section.
Fig. 3 is referred to, Huan Kuang mechanisms 300 include：Change frame motor 301, transmission shaft 302, a pair of first synchronizing wheel 303, two
To the second synchronizing wheel 304 and two belts 305, the power output end for changing frame motor 301 is inserted and is solidly connected the first synchronizing wheel 303A, and
One synchronizing wheel 303A is fixedly sleeved in transmission shaft by the first synchronizing wheel 303B, the first synchronizing wheel 303B of toothed belt transmission connection
On 302, the first synchronizing wheel 303B and 302 synchronous rotary of transmission shaft, two the second synchronizing wheel 304A are fixedly sleeved respectively to be driven
The both ends of axis 302, the drive connection of belt 305 second synchronizing wheel 304A and the second synchronizing wheel 304B.So that change frame motor 301
By the first synchronizing wheel 303,302 and second synchronizing wheel 304 of transmission shaft two belts 305 can be driven to be synchronized with the movement.Change frame machine
Structure 300 is driven by the central control system of exposure machine.
The appear on the stage front and rear sides of frame 101 are symmetrically arranged with closed slide 1011, and upper closed slide 1011 is located at two skins
With 305 inner side.Appear on the stage 120 front and rear sides of bottom framework of frame 101 are symmetrically installed with two pairs of top shoes 1012, sliding in one pair of which
Block 1012 stretches out again to be corresponded to formed with upper belt connecting portion 1013, top shoe 1012 and is slidably connected at closed slide 1011
Upper end, upper belt connecting portion 1013, which corresponds to, is fixedly connected on the upper part of belt 305.So that Huan Kuang mechanisms 300 can
Drive is appeared on the stage the side-to-side movement on upper closed slide 1011 of frame 101.
Fig. 5 is referred to, lower frame hoisting mechanism 200 is arranged on the bottom of leave from office frame 102, for controlling lifting leave from office frame 102,
Lower frame hoisting mechanism 200 is driven by the central control system of exposure machine.Lower frame hoisting mechanism 200 includes：Installing plate 201, horizontal lead
Rail 202 and vertical guide rail 203 and corresponding cross slider 204 and vertical sliding block 205.Installing plate 201 is arranged in parallel with two, point
Not Wei Yu leave from office frame 102 bottom front and rear sides, horizontal stroke is fixedly mounted respectively in the left and right ends of every piece of 201 opposite flank of installing plate
Guide rail 202, vertical guide rail 203 is fixedly mounted in the side of cross rail 202, since the vertical length for indulging guide rail 203 is longer, so vertical lead
Rail 203 will protrude from the upper end of installing plate 201.Cross slider 204 is slidably connected on cross rail 202, and cross slider 204 is led towards vertical
The side upper end of rail 203 is provided with angled-lift splits 206 formed with fillet surface on the fillet surface.Wherein one on every piece of installing plate 201
A 204 side of cross slider is provided with slider cylinder 208, and two cross sliders 204 on same installing plate 201 pass through connecting plate
209 are connected.Vertical sliding block 205 is slidably connected on vertical guide rail 203, is indulged sliding block 205 and is formed slope towards the side of cross rail 202
Face, is provided with slant rail 207 on the slope, and angled-lift splits 206 is corresponded to and is slidably connected on slant rail 207.In vertical sliding block 205
Top be provided with erecting bed 210, the bottom framework 120 of leave from office frame 102 is fixedly mounted on 210 upper end of erecting bed.Slider cylinder 208
204 side-to-side movement of cross slider is driven, due to moving the decomposition principle of active force, cross slider 204 drives 206 oblique fortune of angled-lift splits
Dynamic, angled-lift splits 206 drives vertical sliding block 205 to move up and down again, so that slider cylinder 208 passes through cross slider 204, angled-lift splits
206 and vertical sliding block 205 leave from office frame 102 can be driven to move up and down.
Fig. 4 is referred to, the front and rear sides of leave from office frame 102 are symmetrically arranged with lower closed slide 1021, lower closed slide 1021
Positioned at the lower section of upper closed slide 1011.The upper end lateral surface correspondence that installing plate 201 is protruded from four vertical guide rails 203 is provided with
Two pairs of sliding blocks 1022, one pair of which sliding block 1022 stretch out formed with lower belt connecting portion 1023, sliding block 1022 again
The corresponding upper end for being slidably connected at lower closed slide 1021, lower belt connecting portion 1023 are corresponded to and are fixedly connected under belt 305
Part.So that Huan Kuang mechanisms 300 can drive the side-to-side movement on lower closed slide 1021 of leave from office frame 102.
Fig. 6 is referred to, lifting alignment device 400 is arranged on the lower section of leave from office frame 102, and lifting alignment device 400 includes：One
A elevating mechanism and the positioning mechanism of a plane motion, elevating mechanism are located at the lower section of positioning mechanism, are driven by elevating mechanism
Positioning mechanism moves up and down, so that positioning mechanism is in the position of different height, completes contraposition action.
Wherein, elevating mechanism includes running part and loss of weight part.Running part is to pass through synchronous belt by servomotor 401
Ball spline on the driving leading screw 403 of wheel 402 moves along a straight line about 404, and ball spline 404 is fixedly plugged in bottom plate 405
On, the top of leading screw 403 is fixedly connected with upper mounted plate 406, enables upper mounted plate 406 with respect to bottom plate 405 with this
Move up and down.Ball spline 404 ensure that the precision to move along a straight line up and down at the same time, and will not turn round.T loss of weight portion point includes more
A counterweight cylinder 407, the cylinder barrel of counterweight cylinder 407 are fixedly plugged on bottom plate 405, the piston rod top of counterweight cylinder 407
End is fixedly connected with upper mounted plate 406, and counterweight cylinder 407 is preferably provided with four, and four counterweight cylinders 407 are with leading screw 403
Centered on be arranged symmetrically, the gas circuit of four counterweight cylinders 407 is connected in parallel hydraulic control valve, the hydraulic control valve and 0.5-
The source of the gas of 0.6MPa is connected.When elevating mechanism rises, cylinder 407 is inflated, and when mechanism declines, cylinder 407 is vented, and passes through gas
The gravity of 407 balance drive part of cylinder, increases the response speed of elevating mechanism.
Elevating mechanism, which further includes, to be inserted the solid linear bearing 408 on bottom plate 405 and is led with what linear bearing 408 coordinated
Bar 409, one end of guide rod 409 are fixedly connected with upper mounted plate 406, and the other end is flexibly connected with linear bearing 408, linear bearing
408 are capable of the stability of enhancing structure with the cooperation of guide rod 409.
The top of upper mounted plate 406 is provided with buttcover plate 410, and positioning mechanism is installed on upper mounted plate 406 and buttcover plate 410
Between, drive buttcover plate 410 to be synchronized with the movement by positioning mechanism, buttcover plate 410 is connected on 150 bottom surface of substrate for fitting.Contraposition
Mechanism includes four groups can pass through silk along two vertical direction slips and rotating slide unit by three motors at grade
Two groups in thick stick driving slide unit are moved within the specific limits, to achieve the purpose that to control buttcover plate 410 to move, so as to fulfill contraposition
Action.
Fig. 7 is referred to, the top for frame 101 of appearing on the stage is correspondingly arranged Exposing Lamp 500, and the top of leave from office frame 102 is correspondingly arranged
Industrial camera 600.The motion flow of the alignment system of the present invention：Leave from office frame 102 carries out material replacement, that is, replaces egative film and base
Plate, leave from office frame 102 is lifted by lower frame hoisting mechanism 200, makes leave from office frame 102 and frame 101 of appearing on the stage in the same plane；Industrial phase
Machine 600 gathers the image of the egative film and substrate in leave from office frame 102, while lifts alignment device 400 and risen to using elevating mechanism
The position being adjacent to the base lower surface in leave from office frame 102, after the completion of Image Acquisition, lifts the positioning mechanism of alignment device 400
Substrate is driven to perform contraposition action；After the completion of leave from office frame 102 aligns, lifting alignment device 400 recycles elevating mechanism to drop to
Position origin, leave from office frame 102 also drop to lower position, are performed by Huan Kuang mechanisms 300 and change frame action.Frame completion is changed, under
Platform frame 102 is exposed, and to appearing on the stage, frame 101 gathers image, while lifts alignment device 400 and move to be adjacent to and appear on the stage in frame 101
Substrate position perform contraposition action；After the completion of frame 101 of appearing on the stage contraposition, lifting alignment device 400 drops to lower position original
Point, is rotated by the belt 305 of Huan Kuang mechanisms 300 and drives upper and lower frame execution to change frame action；Change after the completion of frame, Exposing Lamp 500
To appearing on the stage, frame 101 is exposed, while frame 102 of leaving office carries out material replacement.One working cycles is completed with this.
The above described is only a preferred embodiment of the present invention, not making limitation in any form to the present invention, appoint
What those skilled in the art, without departing from the scope of the present invention, the technical spirit according to the present invention implement to more than
Example any brief introduction modification, equivalent variations and the modification made, in the range of still falling within technical solution of the present invention.
Claims (5)
- A kind of 1. automatic exposure machine mechanism, it is characterised in that including：For upper and lower clamping egative film and the platform frame of substrate, described Frame is divided into leave from office frame and frame of appearing on the stage arranged on the left and right sides；Installed in leave from office frame bottom and for control lifting leave from office frame to The mutually level lower frame hoisting mechanism of platform frame；Replaced with for left and right, the Huan Kuang mechanisms of leave from office frame position；And arranged on leave from office frame Lower section is used for the lifting alignment device for adjusting lower substrate egative film position relatively above；The frame of appearing on the stage is identical with the structure of leave from office frame, it includes：The top frame and bottom framework that correspond up and down and it is arranged on The switching mechanism of frame front and rear sides, left and right a side of the top frame and bottom framework are hinged, the switching mechanism band Dynamic top frame is flipped up using hinged side as shaft with respect to bottom framework；The lower frame hoisting mechanism includes：Installing plate positioned at leave from office frame bottom front and rear sides, installed in installing plate opposite flank The cross rail of left and right ends, the vertical guide rail installed in cross rail side, the sideslip for being slidably connected to cross rail and vertical guide rail respectively Block and vertical sliding block, the connecting plate for being fixedly connected with two pieces of cross sliders and it is sequentially connected in the slider cylinder of one of cross slider, For the cross slider towards the side upper end of vertical guide rail formed with fillet surface, fillet surface is equipped with angled-lift splits, the vertical sliding block direction The side of cross rail forms slope, and slope is equipped with slant rail, and angled-lift splits is slidably connected on slant rail, the slide unit gas Cylinder drives leave from office frame to move up and down by cross rail, vertical guide rail and slant rail；The Huan Kuang mechanisms include：Change frame motor, be sequentially connected by the first synchronizing wheel in the biography for changing frame motor power output terminal Moving axis, by the second synchronizing wheel be sequentially connected in the belt of both ends of the drive shaft；The leave from office frame front and rear sides are equipped with lower closed slide, and the vertical guide rail, which is protruded from the upper end lateral surface of installing plate, to be installed There is at least a pair of of the sliding block for being movably connected on lower closed slide, sliding block stretches out to form fixed company again described in one pair of which The lower belt connecting portion of belt lower part is connected to, the Huan Kuang mechanisms drive the side-to-side movement on lower closed slide of leave from office frame；The upper closed slide that frame front and rear sides are equipped with above lower closed slide of appearing on the stage, frame bottom of appearing on the stage are provided with activity At least a pair of of top shoe of closed slide is connected to, top shoe described in one pair of which stretches out again to form a fixed connection in skin The upper belt connecting portion of part is taken, the Huan Kuang mechanisms drive frame side-to-side movement on upper closed slide of appearing on the stage.
- 2. automatic exposure machine mechanism according to claim 1, it is characterised in that the lifting alignment device includes：Lifting Mechanism and on elevating mechanism plane motion positioning mechanism, the elevating mechanism includes running part, the running part The ball spline on leading screw is driven to move up and down by synchronous pulley by servomotor, the ball spline is fixedly plugged in lower solid On fixed board, the leading screw top is fixedly connected with upper mounted plate.
- 3. automatic exposure machine mechanism according to claim 2, it is characterised in that be equipped with and be connected to above fixed plate The buttcover plate of substrate bottom surface, the positioning mechanism are arranged between upper mounted plate and buttcover plate, and positioning mechanism is same flat including four groups It can pass through two groups in leading screw driving slide unit by three motors along two vertical direction slips and revolvable slide unit on face Drive the movement of buttcover plate synchronous plane.
- 4. automatic exposure machine mechanism according to claim 2, it is characterised in that the elevating mechanism further includes t loss of weight portion Point, the t loss of weight portion point includes four counterweight cylinders, and the cylinder barrel of the counterweight cylinder is fixedly plugged on bottom plate, counterweight gas The piston rod top of cylinder is fixedly connected with upper mounted plate, and the gas circuit of four counterweight cylinders is connected in parallel hydraulic control valve, the liquid Pressure control valve is connected with the source of the gas of 0.5-0.6MPa.
- 5. automatic exposure machine mechanism according to claim 2, it is characterised in that the elevating mechanism, which further includes, to be inserted admittedly under Linear bearing in fixed plate and the guide rod with linear bearing cooperation, the guide rod are fixedly connected with upper mounted plate, separately One end is flexibly connected with linear bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511024805.0A CN105607428B (en) | 2015-12-30 | 2015-12-30 | A kind of automatic exposure machine mechanism |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511024805.0A CN105607428B (en) | 2015-12-30 | 2015-12-30 | A kind of automatic exposure machine mechanism |
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| Publication Number | Publication Date |
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| CN105607428A CN105607428A (en) | 2016-05-25 |
| CN105607428B true CN105607428B (en) | 2018-04-17 |
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| CN201511024805.0A Active CN105607428B (en) | 2015-12-30 | 2015-12-30 | A kind of automatic exposure machine mechanism |
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106990675B (en) * | 2016-11-09 | 2018-06-19 | 保定来福光电科技有限公司 | A kind of exposure machine alignment platform of two-sided contraposition |
| CN106527061B (en) * | 2017-01-04 | 2019-07-16 | 广东海圣科技有限公司 | A kind of automatic three frames exposure machine |
| CN108614397B (en) * | 2017-06-16 | 2020-11-17 | 深圳市前海野马自动化设备有限公司 | Automatic alignment device with lower lens mechanism and exposure equipment thereof |
| CN207424529U (en) * | 2017-07-31 | 2018-05-29 | 东莞科视自动化科技有限公司 | Full-automatic exposure machine material-receiving device |
| CN109765762A (en) * | 2019-03-06 | 2019-05-17 | 昆山苏杭电路板有限公司 | PCB resource reutilization exposure machine |
| CN110376852A (en) * | 2019-08-01 | 2019-10-25 | 东莞科视自动化科技有限公司 | A kind of the fully automatic high-speed exposure sources and method of wiring board |
| CN113207231B (en) * | 2021-04-29 | 2022-06-28 | 东莞市多普光电设备有限公司 | Clamping lifting device |
| CN113934113A (en) * | 2021-10-18 | 2022-01-14 | 深圳市凯瑞得智能股份有限公司 | Exposure machine based on CCD (Charge coupled device) alignment system |
| CN114911143B (en) * | 2022-07-18 | 2022-10-18 | 苏州中特微电子科技有限公司 | Rotary lifting alignment device based on ball spline |
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| CN201170837Y (en) * | 2008-02-19 | 2008-12-24 | 川宝科技股份有限公司 | Contraposition device for single-side exposure machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH0734116B2 (en) * | 1991-05-29 | 1995-04-12 | 株式会社オーク製作所 | Workpiece positioning method in automatic exposure apparatus |
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| CN101504512A (en) * | 2003-08-07 | 2009-08-12 | 株式会社尼康 | Exposure method, expose apparatus, carrier apparatus and equipment manufacturing method |
| CN201181388Y (en) * | 2007-12-21 | 2009-01-14 | 清华大学 | Photo-etching machine silicon slice bench exchanging set adopting conveyor belt structure |
| CN201170837Y (en) * | 2008-02-19 | 2008-12-24 | 川宝科技股份有限公司 | Contraposition device for single-side exposure machine |
| CN204347436U (en) * | 2014-12-17 | 2015-05-20 | 东莞市海圣光电科技有限公司 | For the platform frame elevating mechanism of exposure machine |
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| Publication number | Publication date |
|---|---|
| CN105607428A (en) | 2016-05-25 |
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