CN215729275U - Pressing plate mechanism and exposure machine with same - Google Patents

Pressing plate mechanism and exposure machine with same Download PDF

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Publication number
CN215729275U
CN215729275U CN202121957794.2U CN202121957794U CN215729275U CN 215729275 U CN215729275 U CN 215729275U CN 202121957794 U CN202121957794 U CN 202121957794U CN 215729275 U CN215729275 U CN 215729275U
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China
Prior art keywords
connecting rod
pressing plate
connecting piece
piece
exposure
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CN202121957794.2U
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Chinese (zh)
Inventor
周川
张华�
林垂真
项铭
吴越
冯军
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Hangzhou Xinjunzhe Micro Nano Technology Co ltd
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Hangzhou Xinnuo Microelectronics Co ltd
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Abstract

The utility model belongs to the technical field of circuit board production, and particularly relates to a pressing plate mechanism and an exposure machine with the same. The utility model provides a pressing plate mechanism and an exposure machine with the same, aiming at the problems of complex structure and inconvenient use of a pressing plate in the prior art, the pressing plate mechanism comprises an installation base and a pressing plate assembly arranged on the installation base, wherein the pressing plate assembly comprises a connecting piece and a moving piece, the connecting piece is movably connected to the installation base up and down, the moving piece is horizontally and movably connected to the connecting piece, and when the moving piece is subjected to external force, the outermost side of the moving piece and/or the position of the farthest end of the moving piece, which is far away from the connecting piece, move relative to the connecting piece. The utility model enables the moving part to move by applying external force to the moving part so as to compress the side edge of the PCB to be exposed, and has simple structure and convenient use.

Description

Pressing plate mechanism and exposure machine with same
Technical Field
The utility model belongs to the technical field of circuit board production, and particularly relates to a pressing plate mechanism and an exposure machine with the same.
Background
The chuck of the direct-write lithography machine is an important component of the lithography machine. Factors such as the size, the flatness, the adsorption mode and the adsorption force of the sucker have important influence on the actual production and manufacture of PCB plate making. When a direct-write lithography machine is used for making a PCB plate, the lithography machine has a limited focal depth, so that the exposure surface is required to have higher flatness. In addition to the higher flatness requirements for suction cups and the like, there are also flatness requirements for PCB boards. However, for various reasons, the PCB board has more or less edge warpage problem, which results in that the PCB board cannot be flatly sucked only by the suction force of the suction cup.
In view of this problem, research and study have been conducted in long-term production and life practice, for example, the chinese patent application discloses a direct-write lithography machine chuck platen device [ application No.: 201910262132.4], the utility model discloses several fixed pressing mechanisms installed on the suction cup and movable pressing rod mechanisms installed on the suction cup; the fixed pressing mechanism comprises a first air cylinder and a pressing plate, wherein the first air cylinder penetrates through the left end part of the sucker, and the pressing plate is arranged at the top of a piston rod of the first air cylinder; the movable pressure rod mechanism comprises a front hanging plate assembly and a rear hanging plate assembly which are symmetrically arranged at the front side and the rear side of the sucker, and pressure rods connected between the front hanging plate assembly and the rear hanging plate assembly; the front hanging plate assembly and the rear hanging plate assembly are identical in structure and respectively comprise a hanging plate, a motor arranged on the outer wall of the left end part of the hanging plate, a ball screw connected with an output shaft of the motor and a second air cylinder connected with a nut of the ball screw; the front end and the rear end of the pressure lever are respectively connected with the piston rods of the second cylinders of the front hanging plate assembly and the rear hanging plate assembly.
According to the utility model, the movable pressing rod moves back and forth through synchronous operation of the transmission mechanisms on the left side and the right side of the sucking disc, and then the movable pressing rod is driven by the cylinder to press the plate. The structure is very complicated, and the use is not convenient enough.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problems and provides a pressing plate mechanism which is simple in structure and convenient to use.
Another object of the present invention is to provide an exposure machine having a pressing plate mechanism with a simple structure and convenient use.
In order to achieve the purpose, the utility model adopts the following technical scheme:
the pressing plate mechanism comprises an installation base and a pressing plate assembly arranged on the installation base, wherein the pressing plate assembly comprises a connecting piece and a moving piece, the connecting piece is movably connected to the installation base from top to bottom, the moving piece is movably connected to the connecting piece horizontally, and when the moving piece receives external force, the outermost side of the moving piece and/or the position, far away from the farthest end of the connecting piece, of the moving piece move relative to the connecting piece.
In foretell pressure plate mechanism, the moving part includes a plurality of end to end and the body of rod of mutual rotation connection, and at least one body of rod rotates with the connecting piece to be connected, the moving part is the box form with the connecting piece end to end connection.
In the pressing plate mechanism, the number of the rod bodies is three, and the three rod bodies comprise an active connecting rod, a pressing plate connecting rod and a passive connecting rod which are sequentially and rotatably connected, wherein one end of the active connecting rod, which is far away from the pressing plate connecting rod, is rotatably connected with the connecting piece, and one end of the passive connecting rod, which is far away from the pressing plate connecting rod, is rotatably connected with the connecting piece;
or the body of rod is equipped with three, including rotating initiative connecting rod, clamp plate connecting rod and the passive connecting rod of connecting in proper order, still be equipped with driving motor on the connecting piece, driving motor fixed connection runs through the connecting piece at connecting piece bottom surface and driving motor's output shaft, the one end that the clamp plate connecting rod was kept away from to the initiative connecting rod is connected with driving motor's output shaft, the one end that the clamp plate connecting rod was kept away from to the passive connecting rod rotates with the connecting piece and is connected.
In the pressing plate mechanism, the connecting piece is in a rod shape or a plate shape, the driving connecting rod, the pressing plate connecting rod, the driven connecting rod and the connecting piece are sequentially connected to form a parallelogram, and the pressing plate connecting rod is parallel to the connecting piece; the bottom surface of the pressing plate connecting rod protrudes with a pressing plate step, the pressing plate step is integrally formed on the bottom surface of one side, away from the connecting piece, of the pressing plate connecting rod, and the bottom of the pressing plate step is provided with a horizontally arranged pressing plate surface.
In the above-mentioned platen mechanism, a driving assembly for driving the platen assembly to ascend or descend is further provided on the mounting base, one end of the driving assembly is fixedly connected to the mounting base, and the other end of the driving assembly is connected to the platen assembly.
In the above-mentioned platen mechanism, the drive assembly includes a drive cylinder fixedly connected to the mounting base, an output shaft of the drive cylinder is fixedly connected to the platen assembly, the drive assembly further includes a slide rail rotor fixedly connected to the platen assembly and a slide rail stator fixedly connected to the mounting base, a guide groove recessed toward the inside of the slide rail rotor is formed in a surface of one side of the slide rail rotor, which is close to the slide rail stator, the slide rail rotor is slidably connected to the guide groove, and an extending direction of the guide groove is parallel to an axial lead of the output shaft of the movable cylinder.
The utility model provides an exposure machine, includes the exposure platform, two adjacent sides of exposure platform are equipped with fixed spot pressure equipment and put, and the exposure platform upper surface has the exposure area that is used for placing the PCB board, still be equipped with foretell presser bar mechanism on the exposure platform, remove the moving part of presser bar mechanism, can make the one end of moving part extend to in the exposure area.
In the exposure machine, the pressing plate mechanisms are arranged on the sides of the exposure platform where the fixed point pressing devices are not arranged, a plurality of pressing plate mechanisms are arranged on each side where the fixed point pressing devices are not arranged, and the exposure area is also provided with vacuum suction holes.
A pressing plate method of an exposure machine realized by the pressing plate mechanism comprises the following steps:
the method comprises the following steps: placing the PCB in an exposure area of an exposure platform, and pressing two adjacent side edges of the PCB by using a fixed point pressing device;
step two: the movable pressing plate mechanism enables one end of the pressing plate mechanism to extend into the exposure area and to be pressed on two side edges of the PCB which are not pressed by the fixed point pressing device;
step three: after exposure is finished, the fixed point pressing device is released, the movable pressing plate mechanism enables the pressing plate mechanism to retract outside the exposure area, and the PCB is taken out.
In the above method for pressing the plate of the exposure machine, the pressing plate mechanism comprises a mounting base and a pressing plate assembly arranged on the mounting base, the mounting base is fixedly connected on the exposure platform, the mounting base is L-shaped, the mounting base is attached to the bottom surface and the side surface of the exposure platform, the pressing plate assembly comprises a connecting piece and a moving piece, the connecting piece is movably connected to the mounting base from top to bottom, the moving piece is movably connected to the connecting piece horizontally, the moving piece comprises a plurality of rod bodies which are connected end to end and are connected in a mutually rotating manner, at least one rod body is rotatably connected with the connecting piece, the moving piece is connected with the connecting piece end to form a frame, the three rod bodies comprise a driving connecting rod, a pressing plate connecting rod and a driven connecting rod which are sequentially connected in a rotating manner, a driving motor is further arranged on the connecting piece, the driving motor is fixedly connected to the bottom surface of the connecting piece, and an output shaft of the driving motor penetrates through the connecting piece, the end, far away from the pressing plate connecting rod, of the driving connecting rod is connected with an output shaft of the driving motor, the end, far away from the pressing plate connecting rod, of the driven connecting rod is rotatably connected with the connecting piece, and the driving motor drives the driving connecting rod to rotate, so that the pressing plate connecting rod is arranged on two side edges, which are not pressed by the fixed pressing device, of the PCB in a pressing mode.
Compared with the prior art, the utility model has the advantages that:
1. the utility model enables the moving part to move by applying external force to the moving part so as to compress the side edge of the PCB to be exposed, and has simple structure and convenient use.
2. The active connecting rod, the pressure plate connecting rod, the passive connecting rod and the connecting piece are sequentially connected to form a parallelogram, and when the active connecting rod is rotated, the pressure plate connecting rod can move away from or close to the connecting piece, so that the pressure plate connecting rod can be positioned at different positions by changing the rotating angle of the active connecting rod, and PCBs (printed circuit boards) with different sizes can be pressed.
3. The exposure machine provided by the utility model is provided with the pressing plate mechanism on the side edge without the fixed point pressing device, so that the PCB can keep better flatness, and the exposure precision during exposure is further improved.
Drawings
FIG. 1 is a schematic view of the structure of an exposure machine;
FIG. 2 is a top view of the exposure machine;
FIG. 3 is a schematic structural view of the platen mechanism;
FIG. 4 is a schematic structural view of another perspective of the platen mechanism;
in the figure: the device comprises a mounting base 1, a pressing plate assembly 2, a driving assembly 3, a connecting piece 21, a movable piece 22, a driving cylinder 31, a sliding rail mover 32, a sliding rail stator 33, a driving connecting rod 221, a pressing plate connecting rod 222, a driven connecting rod 223, a driving motor 224, a pressing plate step 225, a pressing plate surface 226, an exposure platform 100, a fixed spot pressing device 200, an exposure area 300, a vacuum suction hole 400 and a PCB 500.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Example 1
The embodiment provides a pressing plate mechanism, which is shown in fig. 3 and 4 and comprises a mounting base 1 and a pressing plate assembly 2 arranged on the mounting base 1, wherein the pressing plate assembly 2 comprises a connecting member 21 movably connected to the mounting base 1 up and down and a movable member 22 movably connected to the connecting member 21 horizontally, and when the movable member 22 is subjected to an external force, the outermost side of the movable member 22 and/or the position of the farthest end of the movable member 22 away from the connecting member 21 move relative to the connecting member 21.
When the movable element 22 is used, external force is applied to the movable element 22, so that the movable element 22 moves relative to the connecting element 21, and the outermost side of the movable element 22 or the position of the farthest end of the movable element 22 away from the connecting element 21 is changed, so that the movable element 22 is switched between the pressing plate state and the non-pressing plate state. Therefore, the utility model can move the moving part 22 by applying external force to the moving part 22 to compress the side edge of the PCB 500 to be exposed, and has simple structure and convenient use.
Specifically, the movable member 22 includes a plurality of rod bodies connected end to end and rotatably connected to each other, at least one rod body is rotatably connected to the connecting member 21, and the movable member 22 and the connecting member 21 are connected end to form a frame.
The number of the rods is not limited in the present invention, but preferably, the number of the rods is three, so that the moving track of each rod is constant during the movement of the movable member 22.
As shown in fig. 3 and 4, the number of the rod bodies is three, and the three rod bodies include an active connecting rod 221, a pressure plate connecting rod 222 and a passive connecting rod 223, which are rotatably connected in sequence, wherein one end of the active connecting rod 221, which is far away from the pressure plate connecting rod 222, is rotatably connected with the connecting member 21, and one end of the passive connecting rod 223, which is far away from the pressure plate connecting rod 222, is rotatably connected with the connecting member 21; or the rod body is provided with three rods, including an active connecting rod 221, a pressure plate connecting rod 222 and a passive connecting rod 223 which are connected in sequence in a rotating manner, the connecting piece 21 is further provided with a driving motor 224, the driving motor 224 is fixedly connected to the bottom surface of the connecting piece 21, an output shaft of the driving motor 224 penetrates through the connecting piece 21, one end, far away from the pressure plate connecting rod 222, of the active connecting rod 221 is connected with the output shaft of the driving motor 224, and one end, far away from the pressure plate connecting rod 222, of the passive connecting rod 223 is connected with the connecting piece 21 in a rotating manner.
That is, the source of the external force for driving the driving link 221 may be divided into a manual mode and an automatic mode, and preferably, the automatic mode. In the automatic mode, the driving motor 224 drives the driving link 221 to rotate through the output shaft, so as to drive the platen link 222 and the driven link 223 to rotate correspondingly, thereby implementing the position change and the switching between the platen state and the non-platen state.
Preferably, the active link 221, the platen link 222, the passive link 223 and the connecting member 21 are connected in sequence to form a parallelogram, and the platen link 222 is parallel to the connecting member 21. Because the PCB boards 500 are mostly rectangular and are connected in sequence to form a parallelogram, and the pressing plate connecting rod 222 is parallel to the connecting piece 21, the PCB boards 500 can be ensured to have larger pressing plate length.
The active connecting rod 221, the pressure plate connecting rod 222, the passive connecting rod 223 and the connecting piece 21 are sequentially connected to form a parallelogram, when the active connecting rod 221 is rotated, the pressure plate connecting rod 222 moves away from or close to the connecting piece 21, so that the pressure plate connecting rod 222 can be positioned at different positions by changing the rotating angle of the active connecting rod 221, and the PCB 500 with different sizes can be pressed. Compared with the pressing plate mode that the pressing plate mechanism needs to be disassembled or integrally moved aiming at PCBs with different sizes in the prior art, the PCB pressing mechanism can achieve the same effect and is more convenient to use only by rotating the driving connecting rod 221.
As shown in fig. 4, the connecting member 21 is in a rod shape or a plate shape, a pressing plate step 225 protrudes from a bottom surface of the pressing plate connecting rod 222, the pressing plate step 225 is integrally formed on a bottom surface of the pressing plate connecting rod 222 on a side away from the connecting member 21, and a horizontally arranged pressing plate surface 226 is arranged at the bottom of the pressing plate step 225. Thus, the pressing plate effect and the stability of the pressing plate can be ensured.
Referring to fig. 3 and 4, the mounting base 1 is further provided with a driving assembly 3 for driving the platen assembly 2 to ascend or descend, one end of the driving assembly 3 is fixedly connected to the mounting base 1, and the other end of the driving assembly 3 is connected to the platen assembly 2.
Specifically speaking, drive assembly 3 includes drive cylinder 31 of fixed connection on installation base 1, drives the output shaft and the clamp plate subassembly 2 fixed connection of cylinder 31, drive assembly 3 still includes slide rail active cell 32 and the slide rail stator 33 of fixed connection on installation base 1 of fixed connection on clamp plate subassembly 2, slide rail active cell 32 is close to slide rail stator 33's a side surface and has the guide groove to the inside sunken of slide rail active cell 32, slide rail active cell 32 sliding connection is in the guide groove, the extending direction of guide groove parallels with the axial lead of moving cylinder 31 output shaft.
During the use, start and drive actuating cylinder 31, the output shaft that drives actuating cylinder 31 drives the whole ascending removal that takes place of vertical side of clamp plate assembly 2 for clamp plate assembly 2 is whole to be close to or keeps away from exposure platform 100, and slide rail active cell 32 and slide rail stator 33 mutually support and lead and regular to clamp plate assembly 2's moving direction.
The working principle of the embodiment is as follows: during the use, driving motor 224 passes through output shaft drive initiative connecting rod 221 and rotates to drive clamp plate connecting rod 222 and passive connecting rod 223 take place corresponding rotation, until clamp plate connecting rod 222 is located PCB board 500 top, start and drive actuating cylinder 31, the output shaft that drives actuating cylinder 31 drives the whole ascending removal that takes place of clamp plate subassembly 2, makes clamp plate subassembly 2 whole be close to exposure platform 100, thereby makes the clamp plate face 226 on the clamp plate connecting rod 222 press and establish on PCB board 500. When the PCB 500 needs to be taken out, the above steps are reversed, so that the pressing plate link 222 is switched between the pressing plate state and the non-pressing plate state. Therefore, the utility model can move the moving part 22 by applying external force to the moving part 22 to compress the side edge of the PCB 500 to be exposed, and has simple structure and convenient use.
Example 2
The present embodiment provides an exposure machine, which is shown in fig. 1 and fig. 2, and includes an exposure stage 100, two adjacent sides of the exposure stage 100 are provided with fixing and pressing devices 200, an exposure area 300 for placing a PCB 500 is provided on an upper surface of the exposure stage 100, the exposure stage 100 is further provided with a pressing mechanism described in embodiment 1, and a movable member 22 of the pressing mechanism is moved, so that one end of the movable member 22 can extend into the exposure area 300. The PCB 500 is mostly rectangular, so two adjacent sides of the PCB 500 can be attached to two sides provided with the fixing and pressing device 200, and the two adjacent sides of the PCB 500 are pressed by the fixing and pressing device 200. The remaining side was pressed by the platen mechanism described in example 1.
Referring to fig. 1 and 2, the platen mechanisms are disposed on the sides of the exposure stage 100 where the fixed spot pressing device 200 is not disposed, and each side where the fixed spot pressing device 200 is not disposed is provided with a plurality of platen mechanisms, and the exposure region 300 is further provided with a vacuum suction hole 400. The exposure machine provided by the utility model is provided with the pressing plate mechanism on the side which is not provided with the fixed point pressing device 200, so that the PCB 500 can keep better flatness, and the exposure precision during exposure is further improved.
Example 3
This embodiment provides a method for pressing a plate of an exposure machine, which is implemented by using the pressing mechanism described in embodiment 1, and is shown in fig. 1 to 4, and includes the following steps:
the method comprises the following steps: placing the PCB 500 in the exposure area 300 of the exposure platform 100, and pressing two adjacent sides of the PCB 500 by using a fixed point pressing device 200;
step two: the movable pressing plate mechanism enables one end of the pressing plate mechanism to extend into the exposure area 300 and to be pressed on two side edges of the PCB 500 which are not pressed by the fixed point pressing device 200;
step three: after exposure is finished, the fixed pressing device 200 is released, the movable pressing plate mechanism enables the pressing plate mechanism to retract to the outside of the exposure area 300, and the PCB 500 is taken out.
Specific speaking, the clamp plate mechanism includes installation base 1 and the clamp plate subassembly 2 of setting on installation base 1, installation base 1 fixed connection is on exposure platform 100, and installation base 1 is L shape, and the bottom surface of installation base 1 and exposure platform 100 and side homogeneous phase laminating, and installation base 1 that is L shape can realize the location with exposure platform 100 bottom lateral part in addition simultaneously. The pressing plate component 2 comprises a connecting piece 21 and a moving piece 22, wherein the connecting piece 21 is movably connected to the mounting base 1 from top to bottom, the moving piece 22 comprises a plurality of rod bodies which are connected end to end and are rotatably connected with each other, at least one rod body is rotatably connected with the connecting piece 21, the moving piece 22 and the connecting piece 21 are connected end to form a frame body, the number of the rod bodies is three, the three rod bodies comprise a driving connecting rod 221, a pressing plate connecting rod 222 and a driven connecting rod 223 which are sequentially and rotatably connected, a driving motor 224 is further arranged on the connecting piece 21, the driving motor 224 is fixedly connected to the bottom surface of the connecting piece 21, an output shaft of the driving motor 224 penetrates through the connecting piece 21, one end, far away from the pressing plate connecting rod 222, of the driving connecting rod 221 is connected with an output shaft of the driving motor 224, one end, far away from the pressing plate connecting rod 222, of the driven connecting rod 223 is rotatably connected with the connecting piece 21, the driving motor 224 drives the driving link 221 to rotate, so that the pressing plate link 222 is pressed on both sides of the PCB 500 which are not pressed by the fixing spot pressing means 200.
The specific embodiments described herein are merely illustrative of the spirit of the utility model. Various modifications or additions may be made to the described embodiments or alternatives may be employed by those skilled in the art without departing from the spirit or ambit of the utility model as defined in the appended claims.
Although the terms of the mounting base 1, the platen assembly 2, the driving assembly 3, the connecting member 21, the movable member 22, the driving cylinder 31, the slide rail mover 32, the slide rail stator 33, the driving link 221, the platen link 222, the driven link 223, the driving motor 224, the platen step 225, the platen surface 226, the exposure stage 100, the fixed spot-bonding apparatus 200, the exposure area 300, the vacuum suction hole 400, the PCB 500, etc. are used more herein, the possibility of using other terms is not excluded. These terms are used merely to more conveniently describe and explain the nature of the present invention; they are to be construed as being without limitation to any additional limitations that may be imposed by the spirit of the present invention.

Claims (8)

1. The utility model provides a clamp plate mechanism, includes installation base (1) and sets up clamp plate subassembly (2) on installation base (1), its characterized in that: the pressure plate assembly (2) comprises a connecting piece (21) which is movably connected to the mounting base (1) up and down and a moving piece (22) which is movably connected to the connecting piece (21) horizontally, and when the moving piece (22) is subjected to external force, the outermost side of the moving piece (22) and/or the position of the farthest end of the moving piece (22) far away from the connecting piece (21) move relative to the connecting piece (21);
the movable part (22) comprises a plurality of rod bodies which are connected end to end and are mutually and rotatably connected, at least one rod body is rotatably connected with the connecting piece (21), and the movable part (22) and the connecting piece (21) are connected end to form a frame;
still be equipped with on installation base (1) and be used for driving clamp plate subassembly (2) rising or drive assembly (3) that reduce, drive assembly (3) one end fixed connection is on installation base (1), and the other end is connected on clamp plate subassembly (2).
2. The platen mechanism of claim 1, wherein: the body of rod is equipped with three, including initiative connecting rod (221), clamp plate connecting rod (222) and passive connecting rod (223) that rotate the connection in proper order, the one end and connecting piece (21) rotation that clamp plate connecting rod (222) were kept away from in initiative connecting rod (221) are connected, the one end and the connecting piece (21) rotation that clamp plate connecting rod (222) were kept away from in passive connecting rod (223) are connected.
3. The platen mechanism of claim 1, wherein: the body of rod is equipped with three, including the initiative connecting rod (221), clamp plate connecting rod (222) and passive connecting rod (223) that rotate the connection in proper order, still be equipped with driving motor (224) on connecting piece (21), driving motor (224) fixed connection runs through connecting piece (21) at the output shaft of connecting piece (21) bottom surface and driving motor (224), the one end that clamp plate connecting rod (222) were kept away from in initiative connecting rod (221) is connected with the output shaft of driving motor (224), the one end that clamp plate connecting rod (222) were kept away from in passive connecting rod (223) rotates with connecting piece (21) and is connected.
4. A platen mechanism according to claim 2 or 3, wherein: the connecting piece (21) is in a rod shape or a plate shape, the driving connecting rod (221), the pressing plate connecting rod (222), the driven connecting rod (223) and the connecting piece (21) are sequentially connected to form a parallelogram, and the pressing plate connecting rod (222) is parallel to the connecting piece (21).
5. A platen mechanism according to claim 2 or 3, wherein: the pressing plate connecting rod (222) is provided with a pressing plate step (225) in a protruding mode on the bottom face, the pressing plate step (225) is integrally formed on the bottom face, away from the connecting piece (21), of one side of the pressing plate connecting rod (222), and the bottom of the pressing plate step (225) is provided with a pressing plate face (226) which is horizontally arranged.
6. The platen mechanism of claim 1, wherein: drive assembly (3) are including drive actuating cylinder (31) of fixed connection on installation base (1), the output shaft and the clamp plate subassembly (2) fixed connection that drive actuating cylinder (31), drive assembly (3) still include slide rail active cell (32) and the slide rail stator (33) of fixed connection on installation base (1) of fixed connection on clamp plate subassembly (2), slide rail active cell (32) are close to a side surface of slide rail stator (33) and have to the inside sunken guide groove of slide rail active cell (32), slide rail active cell (32) sliding connection is in the guide groove, the extending direction of guide groove parallels with the axial lead of moving actuating cylinder (31) output shaft.
7. An exposure machine, including exposure platform (100), two adjacent sides of exposure platform (100) are equipped with fixed point pressure equipment (200), and exposure platform (100) upper surface has exposure area (300) that is used for placing PCB board (500), its characterized in that: the exposure stage (100) is further provided with a pressing plate mechanism according to any one of claims 1 to 6, and the movable member (22) of the pressing plate mechanism is moved so that one end of the movable member (22) extends into the exposure area (300).
8. Exposure machine according to claim 7, characterized in that: the pressing plate mechanisms are arranged on the side edges of the exposure platform (100) where the fixed point pressing devices (200) are not arranged, a plurality of pressing plate mechanisms are arranged on the side edges of the exposure platform (100) where the fixed point pressing devices (200) are not arranged, and the exposure area (300) is further provided with vacuum suction holes (400).
CN202121957794.2U 2021-08-19 2021-08-19 Pressing plate mechanism and exposure machine with same Active CN215729275U (en)

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CN202121957794.2U CN215729275U (en) 2021-08-19 2021-08-19 Pressing plate mechanism and exposure machine with same

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CN202121957794.2U CN215729275U (en) 2021-08-19 2021-08-19 Pressing plate mechanism and exposure machine with same

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113777892A (en) * 2021-08-19 2021-12-10 杭州新诺微电子有限公司 Pressing plate mechanism, exposure machine with same and pressing plate method of exposure machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113777892A (en) * 2021-08-19 2021-12-10 杭州新诺微电子有限公司 Pressing plate mechanism, exposure machine with same and pressing plate method of exposure machine

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Effective date of registration: 20240410

Address after: Room 165-4, Bonded Building, West Side of Bonded Road, Hangzhou Airport Economic Zone, Xiaoshan District, Hangzhou City, Zhejiang Province 310000

Patentee after: Hangzhou Xinjunzhe Micro Nano Technology Co.,Ltd.

Country or region after: China

Address before: 311200 No. 772-28, Yanfeng Village (Natural Village), Nanyang street, Xiaoshan District, Hangzhou City, Zhejiang Province

Patentee before: Hangzhou Xinnuo Microelectronics Co.,Ltd.

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