CN113777890A - Telescopic pressing plate mechanism, exposure machine with telescopic pressing plate mechanism and pressing plate method of exposure machine - Google Patents
Telescopic pressing plate mechanism, exposure machine with telescopic pressing plate mechanism and pressing plate method of exposure machine Download PDFInfo
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- CN113777890A CN113777890A CN202110950185.2A CN202110950185A CN113777890A CN 113777890 A CN113777890 A CN 113777890A CN 202110950185 A CN202110950185 A CN 202110950185A CN 113777890 A CN113777890 A CN 113777890A
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- 238000003825 pressing Methods 0.000 title claims abstract description 138
- 230000007246 mechanism Effects 0.000 title claims abstract description 85
- 238000000034 method Methods 0.000 title claims abstract description 14
- 230000006835 compression Effects 0.000 claims abstract description 20
- 238000007906 compression Methods 0.000 claims abstract description 20
- 238000013519 translation Methods 0.000 claims description 8
- 230000000694 effects Effects 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 150000003071 polychlorinated biphenyls Chemical class 0.000 abstract 1
- ZHBBDTRJIVXKEX-UHFFFAOYSA-N 1-chloro-2-(3-chlorophenyl)benzene Chemical compound ClC1=CC=CC(C=2C(=CC=CC=2)Cl)=C1 ZHBBDTRJIVXKEX-UHFFFAOYSA-N 0.000 description 26
- 101100327917 Caenorhabditis elegans chup-1 gene Proteins 0.000 description 25
- 230000008569 process Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0023—Etching of the substrate by chemical or physical means by exposure and development of a photosensitive insulating layer
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
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Abstract
The invention belongs to the technical field of circuit board production, and particularly relates to a telescopic pressing plate mechanism, an exposure machine with the telescopic pressing plate mechanism and a pressing plate method of the exposure machine. The invention provides a movable pressing plate structure, an exposure machine with the structure and a pressing plate method of the exposure machine, aiming at the problems of complex structure and inconvenient use of the pressing plate structure in the prior art, and the movable pressing plate structure comprises a sucker, a first pressing plate assembly, a second pressing plate assembly, a third pressing plate assembly and a fourth pressing plate assembly, wherein the first pressing plate assembly and the third pressing plate assembly are arranged oppositely, the second pressing plate assembly and the fourth pressing plate assembly are arranged oppositely, and the first pressing plate assembly, the second pressing plate assembly, the third pressing plate assembly and the fourth pressing plate assembly are provided with a horizontal movement unit and a vertical movement unit. The invention can realize the compression of the four sides of the PCB to be exposed, so that the PCB keeps better flatness, further improves the exposure precision during exposure and can adapt to the compression of PCBs with different sizes.
Description
Technical Field
The invention belongs to the technical field of circuit board production, and particularly relates to a telescopic pressing plate mechanism, an exposure machine with the telescopic pressing plate mechanism and a pressing plate method of the exposure machine.
Background
Circuit boards are becoming more widely used in electronic devices as providers of electrical connections to electronic components. For example, when a PCB is manufactured, a board exposure machine is usually used to perform photo-processing on the PCB. In order to ensure the exposure quality, the circuit board needs to be stably positioned before exposure treatment. The PCB is subjected to different degrees of expansion and strain by the dry-wet process in the former process in the process of producing and processing the thin plate/small plate by the ink process and the pattern forming process of the inner layer and the outer layer of the PCB, so that the PCB is subjected to different degrees of deformation such as warping, twisting, bowing and the like; meanwhile, if the PCB is too small to cover the whole exposure table, the adsorption force of the vacuum suction plate on the PCB for vacuum adsorption is insufficient, and the corners of the PCB are tilted; the warping of the PCB can lead to the inconsistent exposure focal plane of the PCB, and finally causes bad exposure and defects of the PCB, which affects the product quality. Traditional locate mode adds through the manual work and establishes fasteners such as bolt or nut in order to realize fixed in the locking of circuit board, and traditional locate mode not only work efficiency is lower, can't guarantee the stability of circuit board location moreover to influence exposure quality.
In order to solve the problems of the prior art, various solutions have been proposed through long-term research, and for example, chinese patent literature discloses a platen mechanism and an exposure machine [ application No.: 201922502660.0]: the pressure plate mechanism includes: the device comprises an exposure platform, a first pressure plate structure positioned on one side of the exposure platform and a second pressure plate structure movably positioned on the opposite side of the first pressure plate structure; the first platen structure includes: the first power unit drives the first pressing plate to apply a pressing acting force to the edge of one side of the exposure platform; the second platen structure includes: the second power unit drives the second pressing plate to apply a pressing acting force towards the exposure table, and the third power unit drives the second pressing plate and the second power unit to move towards or away from each other relative to the first pressing plate structure.
As another example, chinese patent document discloses a chuck platen device of a direct-write lithography machine [ application number: 201910262132.]: comprises a plurality of fixed point pressing mechanisms arranged on a sucker and a movable pressing rod mechanism arranged on the sucker. The fixed pressing mechanism comprises a first air cylinder which is arranged at the left end of the sucker in a penetrating mode and a pressing plate which is arranged at the top of a piston rod of the first air cylinder. The movable pressure lever mechanism comprises a front hanging plate assembly and a rear hanging plate assembly which are symmetrically arranged on the front side and the rear side of the sucker, and a pressure lever connected between the front hanging plate assembly and the rear hanging plate assembly. The front hanging plate assembly and the rear hanging plate assembly respectively comprise a hanging plate, a motor arranged on the outer wall of the left end part of the hanging plate, a ball screw connected with an output shaft of the motor and a second air cylinder connected with a nut of the ball screw. The front end and the rear end of the pressure rod are respectively connected with the piston rods of the second cylinders of the front hanging plate assembly and the rear hanging plate assembly.
The two schemes relieve the problems of inconvenient positioning and the like of the existing PCB to a certain extent, but the schemes only press two sides of the PCB, the phenomena of warping, deformation and the like can still exist on the remaining two sides, and the pressing plate effect is poor.
Disclosure of Invention
The invention aims to solve the problems and provides a telescopic pressing plate mechanism.
Another object of the present invention is to provide an exposure machine having a retractable platen mechanism.
The invention also aims to solve the problem and provides a pressing plate method of the exposure machine, which is realized by utilizing a telescopic pressing plate mechanism.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a telescopic clamp plate mechanism, includes the sucking disc, its characterized in that, sucking disc circumference side be equipped with first clamp plate subassembly, second clamp plate subassembly, third clamp plate subassembly and fourth clamp plate subassembly in proper order, and first clamp plate subassembly and third clamp plate subassembly set up relatively, second clamp plate subassembly and fourth clamp plate subassembly set up relatively, first clamp plate subassembly, second clamp plate subassembly, third clamp plate subassembly and fourth clamp plate subassembly all have horizontal motion unit and vertical movement unit, and first clamp plate subassembly and third clamp plate subassembly relative displacement and second clamp plate subassembly and fourth clamp plate subassembly relative displacement under the horizontal motion unit effect, and first clamp plate subassembly, second clamp plate subassembly, third clamp plate subassembly and fourth clamp plate subassembly under the vertical movement unit effect are for the vertical lift of sucking disc.
In the above-mentioned telescopic platen mechanism, the horizontal movement unit is a short-stroke horizontal movement mechanism, the vertical movement unit is a short-stroke vertical movement mechanism, and at least one of the first platen assembly, the second platen assembly, the third platen assembly and the fourth platen assembly has a long-stroke horizontal movement mechanism.
In the above-mentioned telescopic platen mechanism, at least one of the first platen assembly, the second platen assembly, the third platen assembly and the fourth platen assembly has a platen telescoping mechanism.
In the above telescopic pressing plate mechanism, the sucker is rectangular, the first pressing plate component and the third pressing plate component are correspondingly arranged on two short sides of the sucker, the second pressing plate component and the fourth pressing plate component are correspondingly arranged on long sides of the sucker, any one of the second pressing plate component, the third pressing plate component and the fourth pressing plate component is provided with a long-stroke horizontal movement mechanism, and the second pressing plate component and/or the fourth pressing plate component is provided with a pressing rod telescopic mechanism.
In foretell telescopic clamp plate mechanism, first clamp plate subassembly include along the horizontal extension of sucking disc width direction set up the first depression bar at the sucking disc short side, first depression bar both ends install respectively in the first vertical moving unit upper end that is located two long side tip of sucking disc, just first vertical moving unit be connected with and drive first vertical moving unit and link to each other along the first horizontal moving unit of the horizontal slip of the long side of sucking disc.
In the above telescopic platen mechanism, the second platen assembly includes a first long stroke guide rail axially extending along one of the long sides of the suction cup, the first long stroke guide rail is provided with a first sliding seat in a sliding manner, the first sliding seat is provided with a first manual locking knob capable of enabling the first sliding seat to be positioned relative to the first long stroke guide rail, the long side of the suction cup is provided with a second pressing rod axially extending, the second pressing rod is arranged at the upper end of the second vertical movement unit, the second vertical movement unit is connected with a second horizontal movement unit capable of driving the second vertical movement unit to horizontally move towards the direction far away from or close to the suction cup, and the second horizontal movement unit is installed on the first sliding seat.
In the above-mentioned telescopic platen mechanism, the third platen assembly includes that the axial setting is kept away from the long side that has first long stroke guide rail and the second long stroke guide rail that sets up with first long stroke guide rail parallel at the sucking disc, first long stroke guide rail and second long stroke guide rail on slide respectively and be equipped with the second sliding seat, the second sliding seat on be equipped with and enable the second sliding seat for the manual locking knob of second of first long stroke guide rail or second long stroke guide rail location, just at least one long side axial of sucking disc be equipped with first scale, the short side of keeping away from the one end that has first depression bar at the sucking disc is equipped with the third depression bar that transversely extends the setting and with first depression bar parallel arrangement, just the both ends of third depression bar set up in third vertical movement unit upper end through depression bar translation unit activity respectively, just third vertical movement unit be connected with and can drive third vertical movement unit along the horizontal gliding third water of sucking disc long side The third horizontal movement unit is arranged on the second sliding seat; the compression bar translation unit comprises a sliding fixing plate which is arranged along the axial extension of the long side edge of the suction cup and is arranged at the upper end of the third vertical movement unit, the sliding fixing plate is provided with a fixing plate sliding guide rail which is axially extended, the third pressure lever is perpendicular to the sliding fixing plate, the end part of the third pressure lever is provided with a fixing plate sliding block which is arranged with the fixing plate sliding guide rail in a sliding way, one side of the fixed plate sliding guide rail is provided with a plurality of first grooves which are arranged in sequence, a first movable rod is vertically and movably arranged at the end part of the third pressure rod in a penetrating way, the lower end of the first movable rod is provided with a first clamping hook which is meshed with the first grooves, and the first movable rod is sleeved with a first jacking spring, the first jacking spring acts on the first clamping hook, the other end of the first jacking spring acts on the third pressing rod, and the upper end of the first movable rod is exposed out of the upper side of the third pressing rod and is connected with a first lifting plate.
In the telescopic platen mechanism, the fourth platen assembly comprises a third sliding seat arranged on the second long-stroke guide rail in a sliding manner, a third manual locking knob capable of positioning the third sliding seat relative to the second long-stroke guide rail is arranged on the third sliding seat, a fourth pressure rod arranged in parallel with the second pressure rod is arranged on the long side edge of the sucker away from the second pressure rod, the fourth pressure rod is movably arranged at the upper end of a fourth vertical movement unit through a pressure rod telescopic mechanism, the fourth vertical movement unit is connected with a fourth horizontal movement unit capable of driving the fourth vertical movement unit to horizontally move towards the direction away from or close to the sucker, and the fourth horizontal movement unit is arranged on the third sliding seat; the compression bar telescoping mechanism comprises a telescoping fixed plate which extends to the upper part of the sucker along the width direction of the sucker and is arranged at the upper end of a fourth vertical movement unit, the telescoping fixed plate is provided with a plurality of axially extending telescoping plate sliding guide rails, the fourth compression bar is perpendicular to the telescoping fixed plate, the middle part of the third compression bar is provided with a compression bar connecting part, the end part of the compression bar connecting part is provided with a telescoping plate sliding block which is arranged in a sliding way with the telescoping plate sliding guide rails, two sides of the telescoping plate sliding guide rails are respectively provided with a plurality of sequentially arranged second grooves, a second movable bar is vertically movably penetrated at the end part of the compression bar connecting part, the lower end of the second movable bar is provided with a second clamping hook which is meshed with the second grooves, the second movable bar is sleeved with a second jacking spring, the second jacking spring acts on the second clamping hook, and the other end acts on the compression bar connecting part, the upper end of the second movable rod body is exposed out of the upper side of the compression bar connecting part and is connected with a second pulling plate; the compression bar connecting part is formed by connecting at least two compression bar connecting rod bodies in a sliding manner in sequence.
An exposure machine comprises the telescopic pressing plate mechanism.
A pressing plate method of an exposure machine realized by utilizing the telescopic pressing plate mechanism comprises the following steps:
s1, placing the pre-exposed PCB on a sucker and positioning the PCB by the lower left corner of the sucker;
s2, operating the horizontal movement unit of the first pressure plate assembly to enable the first pressure lever of the first pressure plate assembly to horizontally move to the upper side of the lower edge of the PCB, and enabling the first pressure lever to press the lower edge of the PCB through the vertical movement unit of the first pressure plate assembly;
s3, operating the long-stroke horizontal movement mechanism of the second pressure plate assembly to enable the second pressure rod of the second pressure plate assembly to be aligned to the left side of the PCB, operating the horizontal movement unit of the second pressure plate assembly to enable the second pressure rod to horizontally move to the upper side of the left edge of the PCB, and enabling the second pressure rod to press the left edge of the PCB through the vertical movement unit of the second pressure plate assembly;
s4, operating a long-stroke horizontal movement mechanism of the fourth pressure plate assembly to enable a fourth pressure rod of the fourth pressure plate assembly to be aligned to the right edge of the PCB, operating a horizontal movement unit of the fourth pressure plate assembly to enable the fourth pressure rod to horizontally move to the upper side of the right edge of the PCB, and enabling the fourth pressure rod to press the right edge of the PCB through a vertical movement unit of the fourth pressure plate assembly;
and S5, operating the long-stroke horizontal movement mechanism of the third pressure plate assembly to enable the third pressure rod of the third pressure plate assembly to be aligned with the upper edge of the PCB, operating the horizontal movement unit of the third pressure plate assembly to enable the third pressure rod to horizontally move to the position above the upper edge of the PCB, and enabling the third pressure rod to press the upper edge of the PCB through the vertical movement unit of the third pressure plate assembly.
Compared with the prior art, the invention has the advantages that:
1. the invention can compress the four sides of the PCB to be exposed, so that the PCB can keep better flatness, and further the exposure precision during exposure is improved.
2. The invention can adapt to the compression of PCBs with different sizes, and fully meets the exposure requirements of different PCBs in industrial production.
3. The pressing plate has high force and can well press the PCB with large warpage.
4. The plate pressing method can realize the combination of automatic operation and manual control, and reduce the operation time.
Drawings
FIG. 1 is a schematic structural diagram of a use state of the embodiment;
FIG. 2 is a partial structural view of the first embodiment;
FIG. 3 is a schematic view of the first platen assembly according to one embodiment;
FIG. 4 is a schematic view of a second platen assembly according to one embodiment;
FIG. 5 is a schematic view of a third platen assembly according to one embodiment;
FIG. 6 is a schematic partial view of a third platen assembly according to one embodiment;
FIG. 7 is a schematic view of a portion of a strut translation unit of the third platen assembly in accordance with one embodiment;
FIG. 8 is a schematic view of a fourth platen assembly according to one embodiment;
FIG. 9 is a schematic view of a portion of a fourth platen assembly according to one embodiment;
FIG. 10 is a partial schematic structural view of a fourth platen assembly according to the second embodiment;
FIG. 11 is a partial schematic structural view of a fourth platen assembly according to a third embodiment;
in the figure: the suction cup comprises a suction cup 1, a short side 11, a long side 12, a first pressure plate assembly 2, a first pressure lever 21, a first vertical moving unit 22, a first vertical cylinder 221, a first pressure lever mounting block 222, a first horizontal moving unit 23, a first horizontal cylinder 231, a second pressure plate assembly 3, a first long stroke guide rail 31, a first sliding seat 32, a first manual locking knob 33, a second pressure lever 34, a second vertical moving unit 35, a second vertical cylinder 351, a movable frame body 352, a second horizontal moving unit 36, a second horizontal cylinder 361, a third pressure plate assembly 4, a second long stroke guide rail 41, a second sliding seat 42, a second manual locking knob 43, a first scale 44, a third pressure lever 45, a pressure lever translation unit 46, a sliding fixing plate 461, a fixing plate sliding guide rail 462, a fixing plate 463 slider, a first groove 464, a first movable lever 465, a first hook 466, a first jacking spring 467, The first lifting plate 468, the third vertical movement unit 47, the third horizontal movement unit (48), the fourth press plate assembly 5, the third sliding seat 51, the third manual locking knob 52, the fourth press rod 53, the press rod telescopic mechanism 54, the telescopic fixing plate 541, the telescopic plate sliding guide 542, the press rod connecting portion 543, the press rod connecting rod body 5431, the telescopic plate sliding block 544, the second groove 545, the second movable rod 546, the second hook 547, the second jacking spring 548, the second lifting plate 549, the fourth vertical movement unit 55, the fourth horizontal movement unit 56, and the PCB board 6.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Example one
As shown in fig. 1-2, this embodiment provides a telescopic platen mechanism, which includes a chuck 1, a first platen assembly 2, a second platen assembly 3, a third platen assembly 4, and a fourth platen assembly 5 are sequentially disposed on the circumferential side of the chuck 1, the first platen assembly 2 and the third platen assembly 4 are disposed oppositely, the second platen assembly 3 and the fourth platen assembly 5 are disposed oppositely, the first platen assembly 2, the second platen assembly 3, the third platen assembly 4, and the fourth platen assembly 5 are all provided with a horizontal movement unit and a vertical movement unit, wherein the horizontal movement unit is a short-stroke horizontal movement mechanism, the vertical movement unit is a short-stroke vertical movement mechanism, and under the action of the horizontal movement unit, the first platen assembly 2 and the third platen assembly 4 displace with a relatively short stroke, and the second platen assembly 3 and the fourth platen assembly 5 displace with a relatively short stroke, and the first pressure plate component 2, the second pressure plate component 3, the third pressure plate component 4 and the fourth pressure plate component 5 are vertically lifted and lowered in a short stroke relative to the sucker 1 under the action of the vertical movement unit.
The sucker 1 is rectangular, the first pressure plate assembly 2 and the third pressure plate assembly 4 are correspondingly arranged on two short sides 11 of the sucker 1, the second pressure plate assembly 3 and the fourth pressure plate assembly 5 are correspondingly arranged on a long side 12 of the sucker 1, any one of the second pressure plate assembly 3, the third pressure plate assembly 4 and the fourth pressure plate assembly 5 is provided with a long-stroke horizontal movement mechanism, and the second pressure plate assembly 3 and/or the fourth pressure plate assembly 5 are/is provided with a pressure bar telescoping mechanism 54.
It is clear that by arranging the first and third platen assemblies 2 and 4 on the two short sides 11 of the suction cup 1 respectively, the second pressure plate component 3 and the fourth pressure plate component 5 are correspondingly arranged on the long side 12 of the sucker 1, the long-stroke horizontal movement mechanism is used for adjusting the horizontal long-stroke position of the second pressure plate component 3, the third pressure plate component 4 and the fourth pressure plate component 5, and the compression bar telescoping mechanism 54 is used for adjusting the long-stroke horizontal position of the second pressure plate component 3 and the fourth pressure plate component 5, therefore, the telescopic pressing plate mechanism can be suitable for edge pressing and positioning of PCBs (printed circuit boards) of different sizes, the first pressing plate component 2, the second pressing plate component 3, the third pressing plate component 4 and the fourth pressing plate component 5 are respectively provided with a horizontal movement unit for adjusting the respective horizontal position of the PCBs in a short stroke manner, and after the position is adjusted, each side edge of the PCB 6 is pressed through the vertical movement unit to realize positioning and pressing of the PCB 6.
As shown in fig. 3, the first pressing plate assembly 2 includes a first pressing rod 21 transversely extending along the width direction of the suction cup 1 and disposed on the short side 11 of the suction cup 1, two ends of the first pressing rod 21 are respectively mounted on the upper ends of first vertical moving units 22 located at the end portions of the two long sides 12 of the suction cup 1, and the first vertical moving units 22 are connected with a first horizontal moving unit 23 capable of driving the first vertical moving units 22 to horizontally slide along the long sides 12 of the suction cup 1. The first vertical moving unit 22 herein may employ a first vertical cylinder 221 which is vertically arranged, an output shaft of the first vertical cylinder 221 is connected with an end portion of the first pressing rod 21 through a first pressing rod mounting block 222, the first horizontal moving unit 23 is a first horizontal cylinder 231 which is arranged at one side of the first vertical cylinder 221, the first horizontal cylinder 231 is arranged outside the long side 12 of the suction cup 1, an output shaft of the first horizontal cylinder 231 is connected with the first vertical cylinder 221, this allows the first horizontal cylinder 231 to drive the first vertical cylinder 221 and the first presser bar 21 to slide axially along the long side 12 of the suction cup 1, and a vertical guide assembly is arranged between the first vertical cylinder 221 and the first pressure lever mounting block 222, a horizontal guide assembly is arranged between the first vertical cylinder 221 and the first horizontal cylinder 231, here, the strokes of the first vertical cylinder 221 and the first horizontal cylinder 231 are both short strokes.
As shown in fig. 4, the second pressing plate assembly 3 herein includes a first long stroke guide rail 31 extending axially along one of the long sides 12 of the suction cup 1, the first long stroke guide rail 31 is provided with a first sliding seat 32 in a sliding manner, the first sliding seat 32 is provided with a first manual locking knob 33 capable of positioning the first sliding seat 32 relative to the first long stroke guide rail 31, the long side 12 of the suction cup 1 is provided with a second pressing rod 34 extending axially, the second pressing rod 34 is arranged at the upper end of a second vertical moving unit 35, the second vertical moving unit 35 is connected with a second horizontal moving unit 36 capable of driving the second vertical moving unit 35 to move horizontally in a direction away from or close to the suction cup 1, and the second horizontal moving unit 36 is mounted on the first sliding seat 32.
It is clear that the second presser plate assembly 3 here can be slid a long distance along the long side 12 of the suction cup 1, to a certain position and locked by the first manual locking knob 33. The second vertical moving unit 35 here includes a movable frame body 352 movably disposed outside the first sliding seat 32, a second vertical cylinder 351 is vertically disposed on the movable frame body 352, an output shaft of the second vertical cylinder 351 is connected with an end of the second pressure lever 34, the second horizontal moving unit 36 is a second horizontal cylinder 361 disposed at a bottom of the second vertical cylinder 351, an output shaft of the second horizontal cylinder 361 is connected with the movable frame body 352, so that the second horizontal cylinder 361 can drive the second vertical cylinder 351 and the second pressure lever 34 to horizontally slide in a direction of moving away from or approaching the suction cup 1, and the first sliding seat 32 and the movable frame body 352 are provided with a horizontal guide assembly, wherein strokes of the second vertical cylinder 351 and the second horizontal cylinder 361 here are both short strokes.
Further, as shown in fig. 5-7, the third pressing plate assembly 4 herein includes a second long stroke guide 41 axially disposed on the suction cup 1 far from the long side 12 having the first long stroke guide 31 and disposed in parallel with the first long stroke guide 31, a second sliding seat 42 is slidably disposed on each of the first long stroke guide 31 and the second long stroke guide 41, a second manual locking knob 43 capable of positioning the second sliding seat 42 relative to the first long stroke guide 31 or the second long stroke guide 41 is disposed on each of the second sliding seats 42, at least one long side 12 of the suction cup 1 is axially provided with a first scale 44, a third pressing rod 45 transversely extending and disposed in parallel with the first pressing rod 21 is disposed on the short side 11 far from one end of the suction cup 1 having the first pressing rod 21, and two ends of the third pressing rod 45 are movably disposed on a third vertical moving unit 47 through a pressing rod translating unit 46, the third vertical moving unit 47 is connected with a third horizontal moving unit 48 which can drive the third vertical moving unit 47 to horizontally slide along the long side 12 of the suction cup 1, and the third horizontal moving unit 48 is arranged on the second sliding seat 42; the third pressing plate mechanism 4 can slide along the long side 12 of the sucker 1 for a long distance, and the third pressing plate mechanism slides to a certain position and then is locked by the second manual locking knob 43, so that the third pressing rod 45 can move back and forth above the sucker 1. Here, the third vertical moving unit 47 is similar to the first vertical moving unit 22 in structure and principle, and the third horizontal moving unit 48 is similar to the first horizontal moving unit 23, and thus, a description thereof is omitted.
Specifically, the pressing rod translation unit 46 includes a sliding fixing plate 461 axially extending along the long side 12 of the suction cup 1 and mounted on the upper end of the third vertical movement unit 47, the sliding fixing plate 461 is provided with a fixing plate sliding guide 462 axially extending, one side of the fixing plate sliding guide 462 is provided with scales, the third pressing rod 45 is perpendicular to the sliding fixing plate 461, the end of the third pressing rod 45 is provided with a fixing plate slider 463 slidably arranged with the fixing plate sliding guide 462, one side of the fixing plate sliding guide 462 is provided with a plurality of first grooves 464 arranged in sequence, the end of the third pressing rod 45 is vertically movably penetrated with a first movable rod 465, the lower end of the first movable rod 465 is provided with a first hook 466 engaged with the first groove 464, the first movable rod 465 is sleeved with a first pressing spring 467, and the first hook spring 467 acts on the first hook 466, the other end acts on the third pressing rod 45, and the upper end of the first movable rod 465 is exposed out of the upper side of the third pressing rod 45 and is connected with a first pulling plate 468. When the first pulling plate 468 is pulled up manually, the first movable rod 465 is driven to move upward, so that the first hook 466 is disengaged from the first recess 464, and the third pressing rod 45 moves back and forth along the fixed plate sliding rail 462 above the suction cup 1.
As shown in fig. 8-9, the fourth platen assembly 5 herein includes a third sliding seat 51 slidably disposed on the second long stroke guide rail 41, a third manual locking knob 52 capable of positioning the third sliding seat 51 relative to the second long stroke guide rail 41 is disposed on the third sliding seat 51, a fourth pressing rod 53 disposed in parallel with the second pressing rod 34 is disposed on the long side 12 of the suction cup 1 away from the second pressing rod 34, the fourth pressing rod 53 is movably disposed at the upper end of a fourth vertical moving unit 55 through a pressing rod extending mechanism 54, the fourth vertical moving unit 55 is connected to a fourth horizontal moving unit 56 capable of driving the fourth vertical moving unit 55 to horizontally move in a direction away from or close to the suction cup 1, and the fourth horizontal moving unit 56 is mounted on the third sliding seat 51; preferably, the fourth presser means 5 here is slidable a long distance along the long side 12 of the suction cup 1, to a position to be locked by the third manual locking knob 52. The fourth vertical moving unit 55 is similar to the second vertical moving unit 35 in structure and principle, and the fourth horizontal moving unit 56 is similar to the second horizontal moving unit 36, and they will not be described in a single-to-one correspondence.
Specifically, the pressure bar telescoping mechanism 54 includes a telescoping fixed plate 541 extending above the suction cup 1 along the width direction of the suction cup 1 and mounted on the upper end of the fourth vertical moving unit 55, the telescoping fixed plate 541 is provided with a plurality of telescoping plate sliding rails 542 extending axially, one side of the telescoping plate sliding rails 542 is also provided with scales, the fourth pressure bar 53 is perpendicular to the telescoping fixed plate 541, a pressure bar connecting part 543 is arranged in the middle of the third pressure bar 45, an end of the pressure bar connecting part 543 is provided with a telescoping plate sliding block 544 sliding with the telescoping plate sliding rails 542, both sides 542 of the telescoping plate sliding rails 542 are respectively provided with a plurality of second grooves 545 arranged in sequence, the end of the pressure bar connecting part is vertically movably penetrated with a second movable bar 546, the lower end of the second movable bar 546 is provided with a second hook 547 engaged with the second grooves 545, the second movable rod 546 is sleeved with a second pressing spring 548, the second pressing spring 548 acts on the second hook 547, the other end of the second pressing spring 548 acts on the pressing rod connecting portion 543, and the upper end of the second movable rod 546 is exposed out of the upper side of the pressing rod connecting portion 543 and is connected with a second lifting plate 549. Preferably, the plunger connecting portion 543 is of unitary construction, thus forming a 2-segment structure with the retractable plate slide rail 542. Wherein the telescoping plate slide rails 542 and telescoping plate slide 544 combine to form a cross roller guide mechanism.
The embodiment provides an exposure machine, which comprises the telescopic pressing plate mechanism.
The embodiment provides an exposure machine pressing plate method realized by using a telescopic pressing plate mechanism, which comprises the following steps:
s1, placing the pre-exposed PCB 6 on the sucker 1 and positioning the PCB by the lower left corner of the sucker 1;
s2, operating the horizontal movement unit of the first pressure plate assembly 2 to enable the first pressure lever 21 of the first pressure plate assembly 2 to horizontally move to the upper side of the lower edge of the PCB 6, and enabling the first pressure lever 21 to press the lower edge of the PCB 6 through the vertical movement unit of the first pressure plate assembly 2; that is, the first horizontal moving unit 23 is operated to move the first pressing rod 21 above the edge of the PCB 6, and then the first vertical moving unit 22 is operated to press the first long pressing rod against the lower edge of the PCB 6.
S3, operating the long-stroke horizontal movement mechanism of the second platen assembly 3 to make the second press rod 34 of the second platen assembly 3 align with the left side of the PCB 6, operating the horizontal movement unit of the second platen assembly 3 to make the second press rod 34 move horizontally to the upper side of the left edge of the PCB 6, and then making the second press rod 34 press the left edge of the PCB 6 by the vertical movement unit of the second platen assembly 3; namely, the long-stroke horizontal movement mechanism of the second press plate component 3 is operated firstly, so that the second press rod 34 is aligned to the left side of the PCB, the second manual locking knob 43 is locked, then the second horizontal movement unit 36 is operated, the second press rod 34 is moved to the position above the edge of the PCB 6, and then the second vertical movement unit 35 is operated, so that the second press rod 34 presses the left edge of the PCB 6.
S4, operating the long-stroke horizontal movement mechanism of the fourth pressure plate assembly 5 to enable the fourth pressure rod 53 of the fourth pressure plate assembly 5 to be aligned to the right edge of the PCB 6, operating the horizontal movement unit of the fourth pressure plate assembly 5 to enable the fourth pressure rod 53 to horizontally move to the upper side of the right edge of the PCB 6, and enabling the fourth pressure rod 53 to press the right edge of the PCB 6 through the vertical movement unit of the fourth pressure plate assembly 5; namely, the long-stroke horizontal movement mechanism of the fourth pressing plate component 5 is operated firstly, the fourth pressing rod 53 is aligned to the right side of the PCB 6, the third manual locking knob 52 is locked, the pressing plate telescoping mechanism is operated again, the fourth pressing rod 53 is lengthened to the right edge of the PCB 6, the fourth horizontal movement unit 56 is operated again, the fourth pressing rod 53 is moved to the position above the edge of the PCB 6, and the fourth vertical movement unit 55 is operated, so that the fourth pressing rod 53 presses the right edge of the PCB 6.
And S5, operating the long-stroke horizontal movement mechanism of the third pressure plate assembly 4 to enable the third pressure rod 45 of the third pressure plate assembly 4 to be aligned with the upper edge of the PCB 6, operating the horizontal movement unit of the third pressure plate assembly 4 to enable the third pressure rod 45 to horizontally move to the upper edge of the PCB 6, and enabling the third pressure rod 45 to press the upper edge of the PCB 6 through the vertical movement unit of the third pressure plate assembly 4. Namely, the long-stroke horizontal movement mechanism of the third pressing plate component 4 is operated to enable the third pressing rod 45 of the third pressing plate component 4 to be aligned to the upper edge of the PCB 6, the second manual locking knob 43 is locked, the pressing rod translation unit 46 is operated again to enable the third pressing rod 45 to move to the position near the upper edge of the PCB 6, the horizontal movement unit of the third pressing plate component 4 is operated to enable the third pressing rod 45 to horizontally move to the upper edge of the PCB 6, and the vertical movement unit of the third pressing plate component 4 enables the third pressing rod 45 to press the upper edge of the PCB 6.
Example two
As shown in fig. 10, the structure, principle and steps of the embodiment are similar to those of the embodiment except that the telescopic plate sliding guide 542 and the telescopic plate slider 544 are combined to form a dovetail groove and slider structure, and the plunger connecting portion 543 of the plunger telescopic mechanism 54 is formed of an integral structure, thus forming at least a 2-segment structure with the telescopic plate sliding guide 542.
EXAMPLE III
As shown in fig. 11, the structure, principle and steps of the embodiment are similar to those of the embodiment, except that the sliding rail 542 of the expansion board and the sliding block 544 of the expansion board are combined to form a dovetail groove and a sliding block structure, the press rod connecting portion 543 of the press rod expansion mechanism 54 is formed by sequentially slidably connecting at least two press rod connecting rod bodies 5431, and the press rod connecting portion 543 is a multi-segment structure, so that the sliding rail 542 of the expansion board and the press rod connecting portion 543 form at least a 3-segment structure, which makes the sliding rail 542 of the expansion board suitable for PCB boards with smaller size.
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications or additions may be made to the described embodiments or alternatives may be employed by those skilled in the art without departing from the spirit or ambit of the invention as defined in the appended claims.
Although the suction cup 1, the short side 11, the long side 12, the first presser plate assembly 2, the first presser bar 21, the first vertical moving unit 22, the first vertical cylinder 221, the first presser bar mounting block 222, the first horizontal moving unit 23, the first horizontal cylinder 231, the second presser plate assembly 3, the first long stroke guide 31, the first sliding seat 32, the first manual locking knob 33, the second presser bar 34, the second vertical moving unit 35, the second vertical cylinder 351, the movable frame body 352, the second horizontal moving unit 36, the second horizontal cylinder 361, the third presser plate assembly 4, the second long stroke guide 41, the second sliding seat 42, the second manual locking knob 43, the first scale 44, the third presser bar 45, the presser bar translating unit 46, the slide fixing plate 461, the fixing plate slide guide 462, the fixing plate slide 463, the first groove 464, the first movable bar 465, the first hook 466, the second hook 466, the first manual locking knob 33, the first vertical cylinder 33, the first presser bar mounting block 222, the second vertical moving unit 35, the second vertical moving unit 351, the movable frame body 352, the second horizontal moving unit 36, the second horizontal moving unit 361, the second horizontal cylinder 361, the third presser bar 466, the third presser bar assembly 4, the second long stroke guide 44, the second long stroke guide, the third scale 44, the third scale guide, the third scale guide 462, the third scale, the slide holder, the slide guide, the slide holder, the slide guide 462, the slide guide, the slide holder, the slide guide, the slide holder, the first top pressure spring 467, the first lifting plate 468, the third vertical movement unit 47, the third horizontal movement unit (48), the fourth pressing plate assembly 5, the third sliding seat 51, the third manual locking knob 52, the fourth pressing rod 53, the pressing rod telescopic mechanism 54, the telescopic fixing plate 541, the telescopic plate sliding guide rail 542, the pressing rod connecting portion 543, the pressing rod connecting rod body 5431, the telescopic plate sliding block 544, the second groove 545, the second movable rod 546, the second hook 547, the second top pressure spring 548, the second lifting plate 549, the fourth vertical movement unit 55, the fourth horizontal movement unit 56, the PCB plate 6, and other terms, but the possibility of using other terms is not excluded. These terms are used merely to more conveniently describe and explain the nature of the present invention; they are to be construed as being without limitation to any additional limitations that may be imposed by the spirit of the present invention.
Claims (10)
1. The utility model provides a telescopic clamp plate mechanism, includes sucking disc (1), its characterized in that, sucking disc (1) circumference side be equipped with first clamp plate subassembly (2), second clamp plate subassembly (3), third clamp plate subassembly (4) and fourth clamp plate subassembly (5) in proper order, and first clamp plate subassembly (2) and third clamp plate subassembly (4) set up relatively, second clamp plate subassembly (3) and fourth clamp plate subassembly (5) set up relatively, first clamp plate subassembly (2), second clamp plate subassembly (3), third clamp plate subassembly (4) and fourth clamp plate subassembly (5) all have horizontal motion unit and vertical motion unit, and first clamp plate subassembly (2) and third clamp plate subassembly (4) relative displacement and second clamp plate subassembly (3) and fourth clamp plate subassembly (5) relative displacement under the horizontal motion unit effect, and first clamp plate subassembly (2) under the vertical motion unit effect, The second pressure plate component (3), the third pressure plate component (4) and the fourth pressure plate component (5) vertically lift relative to the sucker (1).
2. The telescoping platen mechanism of claim 1, wherein the horizontal motion unit is a short stroke horizontal motion mechanism, the vertical motion unit is a short stroke vertical motion mechanism, and at least one of the first platen assembly (2), the second platen assembly (3), the third platen assembly (4), and the fourth platen assembly (5) has a long stroke horizontal motion mechanism.
3. The telescoping platen mechanism of claim 1, wherein at least one of the first platen assembly (2), the second platen assembly (3), the third platen assembly (4), and the fourth platen assembly (5) has a ram telescoping mechanism (54).
4. The retractable platen mechanism of claim 1, wherein the suction cup (1) is rectangular, the first platen assembly (2) and the third platen assembly (4) are correspondingly disposed on two short sides (11) of the suction cup (1), the second platen assembly (3) and the fourth platen assembly (5) are correspondingly disposed on a long side (12) of the suction cup (1), any one of the second platen assembly (3), the third platen assembly (4) and the fourth platen assembly (5) has a long-stroke horizontal movement mechanism, and the second platen assembly (3) and/or the fourth platen assembly (5) has a compression bar retracting mechanism (54).
5. The telescopic platen mechanism according to claim 4, wherein the first platen assembly (2) comprises a first pressing rod (21) transversely extending along the width direction of the suction cup (1) and disposed on the short side (11) of the suction cup (1), two ends of the first pressing rod (21) are respectively mounted on the upper ends of first vertical moving units (22) disposed at the ends of the two long sides (12) of the suction cup (1), and the first vertical moving units (22) are connected with a first horizontal moving unit (23) capable of driving the first vertical moving units (22) to horizontally slide along the long sides (12) of the suction cup (1).
6. The retractable platen mechanism of claim 5, wherein the second platen assembly (3) includes a first long-stroke guide (31) extending axially along one of the long sides (12) of the suction cup (1), the first long-stroke guide (31) is slidably provided with a first sliding seat (32), the first sliding seat (32) is provided with a first manual locking knob (33) for positioning the first sliding seat (32) relative to the first long-stroke guide (31), the long side (12) of the suction cup (1) is provided with a second axially extending pressing rod (34), the second pressing rod (34) is disposed at the upper end of a second vertical moving unit (35), and the second vertical moving unit (35) is connected with a second horizontal moving unit (36) for driving the second vertical moving unit (35) to move horizontally in a direction away from or close to the suction cup (1), and the second horizontal motion unit (36) is arranged on the first sliding seat (32).
7. The retractable platen mechanism of claim 6, wherein the third platen assembly (4) includes a second long-stroke guide (41) axially disposed on the suction cup (1) away from the long side (12) having the first long-stroke guide (31) and parallel to the first long-stroke guide (31), the first long-stroke guide (31) and the second long-stroke guide (41) are respectively slidably provided with a second sliding seat (42), the second sliding seat (42) is provided with a second manual locking knob (43) for positioning the second sliding seat (42) relative to the first long-stroke guide (31) or the second long-stroke guide (41), at least one long side (12) of the suction cup (1) is axially provided with a first scale (44), and the short side (11) of the suction cup (1) away from the end having the first presser bar (21) is provided with a third presser bar (45) extending transversely and parallel to the first presser bar (21) The two ends of the third pressure lever (45) are movably arranged at the upper end of a third vertical movement unit (47) through a pressure lever translation unit (46), the third vertical movement unit (47) is connected with a third horizontal movement unit (48) which can drive the third vertical movement unit (47) to horizontally slide along the long side (12) of the sucker (1), and the third horizontal movement unit (48) is arranged on a second sliding seat (42); the pressure lever translation unit (46) comprises a sliding fixing plate (461) which axially extends along the long side edge (12) of the sucker (1) and is arranged at the upper end of the third vertical movement unit (47), the sliding fixing plate (461) is provided with a fixing plate sliding guide rail (462) which axially extends, the third pressure lever (45) is perpendicular to the sliding fixing plate (461), a fixing plate sliding block (463) which is slidably arranged with the fixing plate sliding guide rail (462) is arranged at the end part of the third pressure lever (45), one side of the fixing plate sliding guide rail (462) is provided with a plurality of first grooves (464) which are sequentially arranged, a first movable rod (465) is vertically movably penetrated at the end part of the third pressure lever (45), the lower end of the first movable rod (465) is provided with a first clamping hook (466) which is engaged with the first grooves (464), and the first movable rod (465) is sleeved with a first jacking spring (467), the first top pressure spring (467) acts on the first clamping hook (466), the other end of the first top pressure spring acts on the third pressure lever (45), and the upper end of the first movable lever (465) is exposed out of the upper side of the third pressure lever (45) and is connected with a first lifting plate (468).
8. The retractable platen mechanism of claim 7, wherein the fourth platen assembly (5) includes a third sliding seat (51) slidably disposed on the second long stroke guide rail (41), a third manual locking knob (52) is disposed on the third sliding seat (51) for positioning the third sliding seat (51) relative to the second long stroke guide rail (41), a fourth pressing rod (53) disposed in parallel with the second pressing rod (34) is disposed on the long side (12) of the suction cup (1) away from the second pressing rod (34), the fourth pressing rod (53) is movably disposed at the upper end of a fourth vertical moving unit (55) through a pressing rod retracting mechanism (54), and the fourth vertical moving unit (55) is connected with a fourth horizontal moving unit (56) for driving the fourth vertical moving unit (55) to move horizontally in a direction away from or close to the suction cup (1), the fourth horizontal moving unit (56) is arranged on the third sliding seat (51); the pressure lever telescopic mechanism (54) comprises a telescopic fixing plate (541) which extends to the upper part of the sucker (1) along the width direction of the sucker (1) and is arranged at the upper end of a fourth vertical movement unit (55), the telescopic fixing plate (541) is provided with a plurality of telescopic plate sliding guide rails (542) which axially extend, a fourth pressure lever (53) is perpendicular to the telescopic fixing plate (541) and is provided with a pressure lever connecting part (543) in the middle of a third pressure lever (45), the end part of the pressure lever connecting part (543) is provided with a telescopic plate sliding block (544) which is arranged in a sliding way with the telescopic plate sliding guide rails (542), two sides of the telescopic plate sliding guide rails (542) are respectively provided with a plurality of second grooves (545) which are sequentially arranged, a second movable rod (546) is vertically movably arranged at the end part of the pressure lever connecting part (543), and the lower end of the second movable rod (546) is provided with a second clamping hook (547) which is meshed with the second grooves (545), a second jacking spring (548) is sleeved on the second movable rod (546), the second jacking spring (548) acts on the second clamping hook (547), the other end of the second jacking spring acts on the compression bar connecting part (543), and the upper end of the second movable rod (546) is exposed out of the upper side of the compression bar connecting part (543) and is connected with a second lifting plate (549); the compression bar connecting part (543) is formed by sequentially sliding and connecting at least two compression bar connecting rod bodies (5431).
9. An exposure machine characterized in that: comprising a telescopic platen mechanism according to any of claims 1-8.
10. An exposure machine platen method implemented by using the telescopic platen mechanism of any one of claims 1 to 8, comprising the steps of:
s1, placing the pre-exposed PCB (6) on the sucker (1) and positioning the PCB by the lower left corner of the sucker (1);
s2, operating the horizontal movement unit of the first pressure plate assembly (2) to enable the first pressure lever (21) of the first pressure plate assembly (2) to horizontally move to the position above the lower edge of the PCB (6), and enabling the first pressure lever (21) to press the lower edge of the PCB (6) through the vertical movement unit of the first pressure plate assembly (2);
s3, operating the long-stroke horizontal movement mechanism of the second pressure plate assembly (3) to enable the second pressure rod (34) of the second pressure plate assembly (3) to be aligned to the left side of the PCB (6), operating the horizontal movement unit of the second pressure plate assembly (3) to enable the second pressure rod (34) to horizontally move to the upper side of the left edge of the PCB (6), and enabling the second pressure rod (34) to press the left edge of the PCB (6) through the vertical movement unit of the second pressure plate assembly (3);
s4, operating a long-stroke horizontal movement mechanism of the fourth pressure plate assembly (5) to enable a fourth pressure rod (53) of the fourth pressure plate assembly (5) to be aligned to the right edge of the PCB (6), operating a horizontal movement unit of the fourth pressure plate assembly (5) to enable the fourth pressure rod (53) to horizontally move to the upper side of the right edge of the PCB (6), and enabling the fourth pressure rod (53) to press the right edge of the PCB (6) through a vertical movement unit of the fourth pressure plate assembly (5);
s5, operating the long-stroke horizontal movement mechanism of the third pressure plate assembly (4) to enable the third pressure rod (45) of the third pressure plate assembly (4) to be aligned to the upper edge of the PCB (6), operating the horizontal movement unit of the third pressure plate assembly (4) to enable the third pressure rod (45) to horizontally move to the upper edge of the PCB (6), and enabling the third pressure rod (45) to press the upper edge of the PCB (6) through the vertical movement unit of the third pressure plate assembly (4).
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| CN202110950185.2A CN113777890B (en) | 2021-08-18 | 2021-08-18 | Telescopic pressing plate mechanism, exposure machine with same and pressing plate method of exposure machine |
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| CN202110950185.2A CN113777890B (en) | 2021-08-18 | 2021-08-18 | Telescopic pressing plate mechanism, exposure machine with same and pressing plate method of exposure machine |
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| CN113777890A true CN113777890A (en) | 2021-12-10 |
| CN113777890B CN113777890B (en) | 2024-04-26 |
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| CN113777890B (en) | 2024-04-26 |
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