CN115954314B - Flattening jig for ceramic copper-clad substrate - Google Patents
Flattening jig for ceramic copper-clad substrate Download PDFInfo
- Publication number
- CN115954314B CN115954314B CN202310215807.6A CN202310215807A CN115954314B CN 115954314 B CN115954314 B CN 115954314B CN 202310215807 A CN202310215807 A CN 202310215807A CN 115954314 B CN115954314 B CN 115954314B
- Authority
- CN
- China
- Prior art keywords
- fixed
- supporting seat
- ceramic copper
- flattening
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
The invention discloses a flattening jig for a ceramic copper-clad substrate, relates to the field of ceramic copper-clad substrate production, and aims to solve the technical problem of ceramic copper-clad substrate warpage, and the technical scheme is as follows: the utility model provides a pottery covers tool that flattens of copper base plate, includes the vacuum negative pressure platform that is used for adsorbing the pottery and covers the copper base plate, vacuum negative pressure platform's top is provided with the vertical supporting seat of adjusting through servo linear mechanism, the bilateral symmetry of supporting seat is provided with the carrier, both sides the bottom of carrier is fixed with a plurality of buffer respectively, a plurality of the bottom of buffer is fixed with the rubber pressure pad respectively. The flattening jig for the ceramic copper-clad substrate has good flattening and warping preventing effects when in use.
Description
Technical Field
The invention relates to the field of ceramic copper-clad substrate production equipment, in particular to a flattening jig for a ceramic copper-clad substrate.
Background
The ceramic copper-clad substrate product (DCB/AMB/DPC/DBA) is superior to copper-ceramic collocation difference after atmosphere or vacuum sintering, distortion can occur, the highest point of the distortion can reach more than 2mm, the highest point exceeds the focal depth of laser cutting (generally about 1mm of focal depth of laser), and a defocusing phenomenon occurs in the cutting process, so that the cutting depth is different, and breakage is caused during slicing. The traditional mode cutting and fixing mode is simple vacuum adsorption and fixing, and no matter when a person manually places or a manipulator places, the product is only placed on the table top.
The prior Chinese patent with publication number of CN101958230B discloses a pressing plate jig, wherein a jig frame consists of a pair of connecting frames, a pair of pressing plate frames and a connecting plate, two ends of one connecting frame are respectively corresponding to one end of each of the two pressing plate frames, and two ends of the other connecting frame are respectively corresponding to the other end of each of the two pressing plate frames, so that the using direction is taken as a reference: the connecting plate is fixedly connected to the outer side of a connecting frame, the connecting plate can be detachably fixed on machine equipment, each independent beam is detachably and slidably positioned between the two connecting frames at intervals, and the bottoms of the independent beams are flush with the bottoms of the pressing plate frames.
The prior Chinese patent with publication number CN104118598A discloses a film flattening jig. The fixture comprises a base and an inverted L-shaped supporting frame, wherein the base is connected with the supporting frame through a locating pin, a fixing device is arranged on the base and comprises a support, a first mechanical arm and a second mechanical arm which are connected with the support, the support is fixed on the base, the first mechanical arm and the second mechanical arm are arranged in parallel, the supporting frame supports a push rod capable of moving up and down, and the central axis of the push rod is perpendicular to the central lines of the two mechanical arms.
In the above patents, the product is not adsorbed and fixed by the negative pressure generated by vacuum, if the product is tilted, the product is not tilted, but the product cannot be sucked flat by the negative pressure generated by vacuum if the product is tilted reversely.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a flattening jig for a ceramic copper-clad substrate to solve the problems in the background art.
The technical aim of the invention is realized by the following technical scheme: the utility model provides a pottery covers tool that flattens of copper base plate, includes the vacuum negative pressure platform that is used for adsorbing the pottery and covers the copper base plate, vacuum negative pressure platform's top is provided with the vertical supporting seat of adjusting through servo linear mechanism, the bilateral symmetry of supporting seat is provided with the carrier, both sides the bottom of carrier is fixed with a plurality of buffer respectively, a plurality of the bottom of buffer is fixed with the rubber pressure pad respectively.
Through adopting above-mentioned technical scheme, this flattening jig of pottery copper-clad substrate is when using, through automatic or manual after putting the product on with vacuum adsorption platform, opens vacuum adsorption, and available servo linear mechanism takes the supporting seat to move downwards, can drive buffer and rubber pressure pad and push down fixedly with the substrate when the supporting seat is down, drives the supporting seat after vacuum negative pressure reaches-13 kpa and rises, can flatten the substrate and can effectively prevent the substrate warpage.
The invention is further provided with: the bottom of supporting seat is fixed with the mount, the symmetry is provided with two sets of sliding seat on the mount, two sets of the both sides of sliding seat are rotated respectively and are connected with the compression roller.
By adopting the technical scheme, the pressing roller on the sliding seat at the bottom of the fixing frame can be used for assisting in flattening the ceramic copper-clad substrate.
The invention is further provided with: the sliding seat is driven by a power mechanism and is adjusted in position, the power mechanism comprises a servo motor, a bidirectional screw rod, a threaded cylinder, a bolt rod, a worm part, a worm wheel part and a traction spring, the servo motor is fixed on a fixed frame, the bidirectional screw rod is horizontally and rotatably connected in the fixed frame through a bearing, the threaded cylinder is vertically and rotatably connected on the fixed frame through a bearing, the two groups of sliding seats are respectively and spirally connected with the outside of the bidirectional screw rod, the bolt rod is spirally connected in the threaded cylinder, one end of the bolt rod is inserted into a bearing frame and a supporting seat, the worm part is fixed on the outside of the bidirectional screw rod, the worm wheel part is fixed on the outside of the threaded cylinder, the worm part and the worm wheel part are meshed with each other, and the traction spring is connected between the two bearing frames.
By adopting the technical scheme, when a servo motor in the power mechanism is started, the servo motor can drive the bidirectional screw rod to rotate, when the rotationally connected bidirectional screw rod in the fixing frame rotates, the servo motor can drive the two sliding seats to be close to or far away from each other, and when the two sliding seats are close to or far away from each other, the compression roller on the sliding seats can be driven to change the pressing position; can drive worm portion in step when two-way lead screw rotates and rotate, can drive the screw section of thick bamboo through the meshing of worm portion and worm wheel portion and rotate, can drive the bolt pole when the screw section of thick bamboo rotates and go up and down, can break away from in bearing frame and the supporting seat when the bolt pole descends, release the locking of bearing frame and supporting seat, after the locking is released, the compression roller can be along with the sliding seat position adjustment and the position adjustment, the compression roller can promote blotter and rubber pressure pad and break away from the base plate top to realize breaking away from flattening, prevent that warping from taking place, traction spring can guarantee two follow-up bearing frame return.
The invention is further provided with: the motor shaft end of the servo motor is fixed with a first gear, the outside of the bidirectional screw rod is fixed with a second gear, and the first gear and the second gear are meshed with each other.
Through adopting above-mentioned technical scheme, when servo motor starts, can drive first gear and rotate, drive the second gear through the meshing of first gear and second gear and rotate to drive two-way lead screw and rotate.
The invention is further provided with: the bottom of supporting seat has offered the guide way, both sides the top of bearing frame is fixed with the guide block respectively, guide block horizontal sliding connection is in the guide way.
Through adopting above-mentioned technical scheme, when the carriage slides in the supporting seat bottom, it can be through the guide cooperation of guide block and guide way, improves the gliding stability of carriage.
The invention is further provided with: the sections of the guide groove and the guide block are respectively trapezoidal.
By adopting the technical scheme, the sliding stability of the bearing frame can be improved by adopting the guide blocks with the trapezoid cross sections.
The invention is further provided with: auxiliary frames are symmetrically fixed on two sides of the supporting seat, two product brackets are respectively fixed on the bottoms of the two auxiliary frames, and four grooves for clamping the product brackets are formed in the vacuum negative pressure platform.
By adopting the technical scheme, the flattening effect on the substrate can be improved by adopting the auxiliary frame and the product bracket.
The invention is further provided with: the number of the buffers is six, the rubber press pads are chloroprene rubber blocks, and the rubber press pads are connected to the bottoms of the buffers in a threaded mode.
By adopting the technical scheme, when the buffer adopts 6 numbers and the rubber pressing pad adopts the chloroprene rubber block, the flattening effect is good.
In summary, the invention has the following beneficial effects:
when the flattening jig for the ceramic copper-clad substrate is applied, the flattening jig has good flattening and warping preventing effects; when the flattening jig for the ceramic copper-clad substrate is applied, after a product is automatically or manually placed on a vacuum adsorption platform, vacuum adsorption is started, a servo linear mechanism can be utilized to drive a supporting seat to move downwards, a buffer and a rubber pressing pad can be driven to press and fix the substrate downwards when the supporting seat descends, and the supporting seat is driven to ascend after vacuum negative pressure reaches-13 kpa, so that the substrate can be flattened and the substrate can be effectively prevented from warping; when a servo motor in the power mechanism is started, the servo motor can drive the bidirectional screw rod to rotate, when the rotationally connected bidirectional screw rod in the fixing frame rotates, the servo motor can drive the two sliding seats to be close to or far away from each other, and when the two sliding seats are close to or far away from each other, the compression roller on the sliding seats can be driven to change the pressing position; can drive worm portion in step when two-way lead screw rotates and rotate, can drive the screw section of thick bamboo through the meshing of worm portion and worm wheel portion and rotate, can drive the bolt pole when the screw section of thick bamboo rotates and go up and down, can break away from in bearing frame and the supporting seat when the bolt pole descends, release the locking of bearing frame and supporting seat, after the locking is released, the compression roller can be along with the sliding seat position adjustment and the position adjustment, the compression roller can promote blotter and rubber pressure pad and break away from the base plate top to realize breaking away from flattening, prevent that warping from taking place, traction spring can guarantee two follow-up bearing frame return.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic diagram of the present invention after hiding the vacuum negative pressure platform;
FIG. 3 is an enlarged view at A in FIG. 2;
FIG. 4 is a second schematic view of the present invention after hiding the vacuum platen;
fig. 5 is an enlarged view at B in fig. 4.
In the figure: 1. a vacuum negative pressure platform; 2. a servo linear mechanism; 3. a support base; 4. a carrier; 5. a buffer; 51. a rubber press pad; 6. a fixing frame; 61. a sliding seat; 62. a press roller; 7. a power mechanism; 71. a bidirectional screw rod; 72. a thread cylinder; 73. a latch rod; 74. a worm part; 75. a worm wheel section; 79. a traction spring; 76. a servo motor; 77. a first gear; 78. a second gear; 41. a guide block; 42. a guide groove; 8. an auxiliary frame; 81. a product carrier; 82. a groove.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and examples.
Referring to fig. 1 to 5, a flattening jig for a ceramic copper-clad substrate comprises a vacuum negative pressure platform 1 for adsorbing the ceramic copper-clad substrate, wherein a supporting seat 3 which is vertically heightened by a servo linear mechanism 2 is arranged above the vacuum negative pressure platform 1, a bearing frame 4 is symmetrically arranged on two sides of the supporting seat 3, a plurality of buffers 5 are respectively fixed on the bottoms of the bearing frames 4 on two sides, and rubber pressing pads 51 are respectively fixed on the bottoms of the buffers 5. When the flattening jig for the ceramic copper-clad substrate is used, after a product is automatically or manually placed on a vacuum adsorption platform, vacuum adsorption is started, the servo linear mechanism 2 can be utilized to drive the supporting seat 3 to move downwards, when the supporting seat 3 descends, the buffer 5 and the rubber pressing pad 51 can be driven to press and fix the substrate downwards, when vacuum negative pressure reaches-13 kpa, the supporting seat 3 is driven to ascend, the substrate can be flattened, and the substrate can be effectively prevented from warping.
Referring to fig. 1 to 5, in order to achieve a good flattening effect when the suction cup is separated from the substrate by using the device, a fixing frame 6 is fixed at the bottom of the supporting seat 3, two groups of sliding seats 61 are symmetrically arranged on the fixing frame 6, two groups of sliding seats 61 are respectively and rotatably connected with a pressing roller 62 at two sides, and the flattening of the ceramic copper-clad substrate can be assisted by using the pressing roller 62 on the sliding seat 61 at the bottom of the fixing frame 6.
Referring to fig. 1 to 5, in order to realize linkage control, the sliding seat 61 is driven by the power mechanism 7 to adjust the position, the power mechanism 7 comprises a servo motor 76, a bidirectional screw 71, a threaded cylinder 72, a latch rod 73, a worm part 74, a worm part 75 and a traction spring 79, the servo motor 76 is fixed on the fixed frame 6, the bidirectional screw 71 is horizontally and rotatably connected in the fixed frame 6 through a bearing, the threaded cylinder 72 is vertically and rotatably connected in the fixed frame 6 through a bearing, two groups of sliding seats 61 are respectively and threadedly connected outside the bidirectional screw 71, the latch rod 73 is threadedly connected in the threaded cylinder 72, one end of the latch rod 73 is inserted into the bearing frame 4 and the supporting seat 3, the worm part 74 is fixed outside the bidirectional screw 71, the worm part 75 is fixed outside the threaded cylinder 72, the worm part 74 and the worm part 75 are meshed with each other, and the traction spring 79 is connected between the two bearing frames 4; when the servo motor 76 in the power mechanism 7 is started, the servo motor can drive the bidirectional screw rod 71 to rotate, when the rotationally connected bidirectional screw rod 71 in the fixing frame 6 rotates, the servo motor can drive the two sliding seats 61 to be close to or far away from each other, and when the two sliding seats 61 are close to or far away from each other, the pressing roller 62 on the sliding seat 61 can be driven to change the pressing position; when the bidirectional screw rod 71 rotates, the worm part 74 can be synchronously driven to rotate, the threaded cylinder 72 can be driven to rotate through the engagement of the worm part 74 and the worm wheel part 75, the bolt rod 73 can be driven to lift when the threaded cylinder 72 rotates, the bolt rod 73 can be separated from the bearing frame 4 and the supporting seat 3 when being lowered, the locking of the bearing frame 4 and the supporting seat 3 is released, after the locking is released, the press roll 62 can be adjusted along with the position adjustment of the sliding seat 61, the press roll 62 can push the cushion pad and the rubber press pad 51 to be separated from the upper part of the base plate, so that the separation flattening is realized, the warping is prevented, and the traction spring 79 can ensure the return of the two subsequent bearing frames 4.
Referring to fig. 1 to 5, a first gear 77 is fixed to an end of a motor shaft of the servo motor 76, a second gear 78 is fixed to an outside of the bi-directional screw 71, and the first gear 77 and the second gear 78 are engaged with each other; when the servo motor 76 is started, the first gear 77 can be driven to rotate, and the second gear 78 is driven to rotate through the engagement of the first gear 77 and the second gear 78, so that the bidirectional screw 71 is driven to rotate.
Referring to fig. 1 to 5, a guide groove 42 is formed at the bottom of the supporting seat 3, guide blocks 41 are respectively fixed at the tops of the bearing frames 4 at two sides, the guide blocks 41 are horizontally and slidably connected in the guide groove 42, and when the bearing frame 4 slides at the bottom of the supporting seat 3, the bearing frame 4 can be matched with the guide groove 42 through the guide of the guide blocks 41, so that the sliding stability of the bearing frame 4 is improved; wherein the sections of the guide groove 42 and the guide block 41 are respectively trapezoidal, and the stability of the sliding of the carrier 4 can be improved by adopting the guide block 41 with a trapezoidal section.
Referring to fig. 1 to 5, auxiliary frames 8 are symmetrically fixed on two sides of the supporting seat 3, two product brackets 81 are respectively fixed on the bottoms of two auxiliary frames 8, four grooves 82 for clamping the product brackets 81 are formed in the vacuum negative pressure platform 1, and flattening effects on the substrate can be improved by adopting the auxiliary frames 8 and the product brackets 81; the number of the buffers 5 is six, the rubber pressing pads 51 are neoprene blocks, the rubber pressing pads 51 are in threaded connection with the bottoms of the buffers 5, and when the buffers 5 adopt 6 numbers, the rubber pressing pads 51 have good flattening effect when the neoprene blocks are adopted.
When the device is applied, after a product is automatically or manually placed on the vacuum negative pressure platform 1, vacuum adsorption is started, the servo linear mechanism 2 can be utilized to drive the supporting seat 3 to move downwards, and when the supporting seat 3 descends, the buffer 5 and the rubber pressing pad 51 can be driven to press and fix the substrate downwards; then, a servo motor 76 in the power mechanism 7 is started and can drive the bidirectional screw rod 71 to rotate, when the rotationally connected bidirectional screw rod 71 in the fixing frame 6 rotates, the servo motor can drive the two sliding seats 61 to be close to or far away from each other, and when the two sliding seats 61 are close to or far away from each other, the pressing roller 62 on the sliding seat 61 can be driven to change the pressing position; when the bidirectional screw rod 71 rotates, the worm part 74 can be synchronously driven to rotate, the threaded cylinder 72 can be driven to rotate through the engagement of the worm part 74 and the worm wheel part 75, the bolt rod 73 can be driven to lift when the threaded cylinder 72 rotates, the bolt rod 73 can be separated from the bearing frame 4 and the supporting seat 3 when the bolt rod 73 descends, the locking of the bearing frame 4 and the supporting seat 3 is released, after the locking is released, the press roll 62 can be adjusted along with the position adjustment of the sliding seat 61, the press roll 62 can push the cushion pad and the rubber press pad 51 to separate from the upper part of the base plate, so that the separation flattening is realized, the warping is prevented, and the traction spring 79 can ensure the return of the two subsequent bearing frames 4; when the vacuum negative pressure reaches 13kpa below zero, the supporting seat 3 is driven to rise, so that the substrate can be flattened and can be effectively prevented from warping.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the present invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.
Claims (6)
1. The utility model provides a pottery coats tool that flattens of copper base plate, includes vacuum negative pressure platform (1) that are used for adsorbing the pottery and coats the copper base plate, its characterized in that: a supporting seat (3) which is vertically heightened by a servo linear mechanism (2) is arranged above the vacuum negative pressure platform (1), bearing frames (4) are symmetrically arranged at two sides of the supporting seat (3), a plurality of buffers (5) are respectively fixed at the bottoms of the bearing frames (4) at two sides, and rubber pressing pads (51) are respectively fixed at the bottoms of the buffers (5);
a fixing frame (6) is fixed at the bottom of the supporting seat (3), two groups of sliding seats (61) are symmetrically arranged on the fixing frame (6), and two sides of the two groups of sliding seats (61) are respectively and rotatably connected with a compression roller (62);
the sliding seat (61) is driven by a power mechanism (7) and is adjusted in position, the power mechanism (7) comprises a servo motor (76), a bidirectional screw (71), a threaded cylinder (72), a bolt rod (73), a worm part (74), a worm wheel part (75) and a traction spring (79), the servo motor (76) is fixed on a fixed frame (6), the bidirectional screw (71) is horizontally and rotatably connected in the fixed frame (6) through a bearing, the threaded cylinder (72) is vertically and rotatably connected on the fixed frame (6) through a bearing, two groups of sliding seats (61) are respectively in threaded connection with the outside of the bidirectional screw (71), the bolt rod (73) is in threaded connection with the threaded cylinder (72), one end of the bolt rod (73) is inserted into a bearing frame (4) and a supporting seat (3), the worm part (74) is fixed on the outside of the bidirectional screw (71), the worm part (75) is fixed on the outside of the threaded cylinder (72), the worm part (74) and the worm wheel part (75) are meshed with each other, and the traction spring (79) is connected between the two bearing frames (4).
2. The flattening fixture for ceramic copper-clad substrates according to claim 1, wherein: a first gear (77) is fixed at the end part of a motor shaft of the servo motor (76), a second gear (78) is fixed outside the bidirectional screw (71), and the first gear (77) and the second gear (78) are meshed with each other.
3. The flattening fixture for ceramic copper-clad substrates according to claim 1, wherein: guide grooves (42) are formed in the bottoms of the supporting seats (3), guide blocks (41) are respectively fixed at the tops of the bearing frames (4) on two sides, and the guide blocks (41) are horizontally and slidably connected in the guide grooves (42).
4. The flattening fixture for a ceramic copper-clad substrate according to claim 3, wherein: the sections of the guide groove (42) and the guide block (41) are respectively trapezoidal.
5. The flattening fixture for ceramic copper-clad substrates according to claim 1, wherein: auxiliary frames (8) are symmetrically fixed on two sides of the supporting seat (3), two product brackets (81) are respectively fixed on the bottoms of the two auxiliary frames (8), and four grooves (82) for clamping the product brackets (81) are formed in the vacuum negative pressure platform (1).
6. The flattening fixture for ceramic copper-clad substrates according to claim 1, wherein: the number of the buffers (5) is six, the rubber pressing pads (51) are chloroprene rubber blocks, and the rubber pressing pads (51) are connected to the bottoms of the buffers (5) in a threaded mode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202310215807.6A CN115954314B (en) | 2023-03-08 | 2023-03-08 | Flattening jig for ceramic copper-clad substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202310215807.6A CN115954314B (en) | 2023-03-08 | 2023-03-08 | Flattening jig for ceramic copper-clad substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
CN115954314A CN115954314A (en) | 2023-04-11 |
CN115954314B true CN115954314B (en) | 2023-05-16 |
Family
ID=85906861
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202310215807.6A Active CN115954314B (en) | 2023-03-08 | 2023-03-08 | Flattening jig for ceramic copper-clad substrate |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN115954314B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116921877B (en) * | 2023-09-14 | 2023-12-01 | 四川富乐华半导体科技有限公司 | Copper-clad ceramic carrier plate cutting and coding device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101610256B1 (en) * | 2014-11-05 | 2016-04-07 | 김성기 | Apparatus For Vacuum Suction Plate |
CN112571367A (en) * | 2019-09-30 | 2021-03-30 | 盟立自动化股份有限公司 | Laminating equipment, intermediary mechanism thereof and laminating method |
CN217892212U (en) * | 2022-07-04 | 2022-11-25 | 深圳思睿辰新材料有限公司 | High positioning accuracy pottery copper-clad plate printing jig |
CN218473509U (en) * | 2022-09-15 | 2023-02-10 | 宁夏储芯科技有限公司 | Flattening mechanism for preventing substrate from warping and chip packaging machine |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0511500U (en) * | 1991-07-22 | 1993-02-12 | 日本ケミコン株式会社 | Substrate pressing guide device |
JP2000124299A (en) * | 1998-10-16 | 2000-04-28 | Hitachi Ltd | Manufacture of semiconductor device and semiconductor manufacturing apparatus |
JP2003243817A (en) * | 2002-02-20 | 2003-08-29 | Asuriito Fa Kk | Pickup head, device, and method for supplying solder ball |
JP2008034766A (en) * | 2006-08-01 | 2008-02-14 | Allied Material Corp | Suction member |
US20170053822A1 (en) * | 2015-08-23 | 2017-02-23 | Camtek Ltd. | Warped wafers vacuum chuck |
CN109179037A (en) * | 2018-08-13 | 2019-01-11 | 上海申和热磁电子有限公司 | It is a kind of for reduce DBC substrate single side sintering after buckling deformation presser device |
CN109244028B (en) * | 2018-09-28 | 2022-11-18 | 上海微松工业自动化有限公司 | Wafer flattening and fixing method |
CN109351808A (en) * | 2018-10-19 | 2019-02-19 | 杨翠痕 | A kind of adjustable sheet metal component pressing jig |
CN112192033B (en) * | 2020-10-22 | 2024-08-27 | 技感半导体设备(南通)有限公司 | Flattening, absorbing and positioning device for large-area substrate |
CN213888739U (en) * | 2020-10-27 | 2021-08-06 | 江苏富乐德半导体科技有限公司 | Laser cutting adsorbs tool with covering copper base plate warpage blank pressing |
CN215200237U (en) * | 2021-04-06 | 2021-12-17 | 江苏富乐德半导体科技有限公司 | Semiconductor substrate laser cutting fixing jig |
CN215644409U (en) * | 2021-06-22 | 2022-01-25 | 南瑞联研半导体有限责任公司 | Welding tool for large warping degree long substrate of IGBT device |
TWI794116B (en) * | 2021-10-28 | 2023-02-21 | 盟立自動化股份有限公司 | Attaching device and attaching module |
CN114501784A (en) * | 2022-03-10 | 2022-05-13 | 深圳洲旭电路科技有限公司 | Device for improving warping of circuit board |
CN217822719U (en) * | 2022-05-31 | 2022-11-15 | 江苏芯德半导体科技有限公司 | Vacuum base plate for wafer |
-
2023
- 2023-03-08 CN CN202310215807.6A patent/CN115954314B/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101610256B1 (en) * | 2014-11-05 | 2016-04-07 | 김성기 | Apparatus For Vacuum Suction Plate |
CN112571367A (en) * | 2019-09-30 | 2021-03-30 | 盟立自动化股份有限公司 | Laminating equipment, intermediary mechanism thereof and laminating method |
CN217892212U (en) * | 2022-07-04 | 2022-11-25 | 深圳思睿辰新材料有限公司 | High positioning accuracy pottery copper-clad plate printing jig |
CN218473509U (en) * | 2022-09-15 | 2023-02-10 | 宁夏储芯科技有限公司 | Flattening mechanism for preventing substrate from warping and chip packaging machine |
Also Published As
Publication number | Publication date |
---|---|
CN115954314A (en) | 2023-04-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN115954314B (en) | Flattening jig for ceramic copper-clad substrate | |
CN220679017U (en) | Positioning frame of numerical control bending machine | |
CN110996527B (en) | Hot-pressing equipment for producing circuit board in electronic product | |
CN112099249A (en) | Size detection device for liquid crystal panel processing and working method thereof | |
CN111717663A (en) | A feed mechanism and processing platform for large-scale glass processing | |
CN117773367A (en) | Toughened glass integrated into one piece cutting machine | |
CN209776862U (en) | Automatic compression fittings of box | |
CN117049149A (en) | Automatic feeding device for new energy motor controller shell | |
CN215515608U (en) | Mechanism for realizing rapid alternate handoff of front and back sides of screen through overturning and positioning | |
CN116493895A (en) | Photovoltaic board group frame machine | |
CN210283578U (en) | Product lifting device applied to steel mesh printing equipment | |
CN212173917U (en) | Paper feeding device of gilding press | |
CN210048198U (en) | Tray position adjusting device for printing paper | |
CN217639608U (en) | Lens membrane carrier of adjustable angle | |
CN221248159U (en) | Aluminum profile polishing mechanism | |
CN220009021U (en) | Pulp processing line | |
CN215203453U (en) | Screen film pasting device | |
CN217393445U (en) | Front blowing movable material taking mechanism and punching equipment | |
CN219408309U (en) | Pusher is used in preparation of high performance ceramic heated board | |
CN218808975U (en) | Plate carrying device | |
CN217072405U (en) | Material clamping function equipment for automatic production line of multi-layer plate assembly blanks | |
CN210732534U (en) | Vacuum film self-adsorption box film pressing cutting mechanism | |
CN221700336U (en) | Toughened glass processing automatic feeding equipment | |
CN218931038U (en) | Vertical type gluing machine body with positioning and conveying functions | |
CN220812205U (en) | Photovoltaic glass processing apparatus for producing |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |