CN106990675B - A kind of exposure machine alignment platform of two-sided contraposition - Google Patents
A kind of exposure machine alignment platform of two-sided contraposition Download PDFInfo
- Publication number
- CN106990675B CN106990675B CN201610981587.8A CN201610981587A CN106990675B CN 106990675 B CN106990675 B CN 106990675B CN 201610981587 A CN201610981587 A CN 201610981587A CN 106990675 B CN106990675 B CN 106990675B
- Authority
- CN
- China
- Prior art keywords
- platen
- frame
- exposure machine
- pcb board
- sliding part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention discloses a kind of exposure machine alignment platforms of two-sided contraposition, including pedestal, the first platen and the second platen, first platen is driven by first driving means relative to base motions, second platen is driven by second device and is moved relative to the first platen, it can also be synchronized with the movement together with the first platen, equipped with pcb board supporting rack adsorption fastener on the first platen, lower film frame adsorption fastener is equipped on the second platen.The aligning platform can align pcb board in the case where not depending on through-hole target spot, not overturning pcb board with the upper and lower film respectively, and volume can be made compacter, original positioning mechanism is directly replaced for the confined space of existing exposure machine, the contraposition of single side twice that need to overturn pcb board progress originally is become not overturn the two-sided contraposition of pcb board.
Description
Technical field
The present invention relates to exposure machine machinery field, in particular to one kind can by pcb board upper and lower surface respectively with it is upper
The film and the exposure machine alignment platform of lower film alignment.
Background technology
Exposure machine refers to by opening ultraviolet light device, by the film（It is printed on the egative film of circuit relevant information）On image letter
Breath is transferred to the circuit board for being coated with photoactive substance（Pcb board）On equipment, be widely used in semiconductor, microelectronics, biology
Device and nanosecond science and technology neck.It needs to align the film and pcb board when film information is transferred on pcb board, after alignment again
It is exposed.Now with the single side that one piece of film and pcb board one side are aligned to bit pattern, also up and down two pieces of films with
Intermediate pcb board aligns two-sided to bit pattern respectively.Two-sided in bit pattern, utilizing the through-hole on pcb board and the upper and lower film
Through-hole aligned as alignment target, however, it is this selection through-hole be only suitable for staying on pcb board as the alignment method of target
There is the preliminary stage of through-hole, to pcb board of the later stage after solder resistance process, above without through-hole, thus can only select at present
Disk thereon is taken to carry out single side contraposition as target spot, then carries out the single side contraposition of pcb board another side again by overturning, this is just
Cause operation link more, working efficiency is low.But the confined space reserved in exposure machine to lift frame is limited to, no matter and increased
Cost, it is also difficult to which two sets of aligning platforms are set and respectively to the upper film, the lower film and pcb board progress list using the upper and lower in lift frame
Two-sided contraposition on the whole is realized in face of the pattern of position, therefore, is not changing existing exposure machine（It is exposed for anti-postwelding pcb board
Light）Structural framing and using it is existing lift frame technology on the basis of, research and develop new aligning platform, realize in the feelings for not overturning pcb board
Two-sided contraposition can be carried out under condition, is the technical issues of this field is extremely expected to solve.
Invention content
The object of the present invention is to provide a kind of exposure machine alignment platform of two-sided contraposition, which can not depend on through-hole
Target spot aligns pcb board, and volume can be made compacter in the case of not overturning pcb board with the upper and lower film respectively,
Original positioning mechanism is directly replaced for the confined space of existing exposure machine, will need to overturn the single side twice of pcb board progress originally
Contraposition becomes not overturn the two-sided contraposition of pcb board.
To achieve the above object, the present invention takes following technical scheme：
A kind of exposure machine alignment platform of two-sided contraposition, including pedestal and the first platen, the first platen is pacified through the first rotating member
On the first sliding part, the first sliding part is mounted on pedestal, and the first sliding part is connected with first driving means, the second platen
It is mounted on the first platen through the second sliding part, the second platen is connected through transmission connection piece with the second driving device, the second driving
Device is mutually fixed with the first platen, pcb board supporting rack adsorption fastener is equipped on the first platen, under being equipped on the second platen
Film frame adsorption fastener.
Preferably, second sliding part includes upper ball, lower ball and tie-beam, and second platen is downwards through upper rolling
Pearl is connected with the first platen, and the tie-beam side is connected with the second platen, and is passed down through the first platen and makes opposite side
It is connected upwards through lower ball with the first platen.
Preferably, the tie-beam is U-shaped tie-beam, and is connected with connecting pole upwards in the bottom of U-shaped tie-beam, described
Two upper ends of U-shaped tie-beam are connected across first platen with second platen, and the upper end of the connecting pole is through under described
Ball is connected upwards with the first platen.
Preferably, the transmission connection piece upper end is mutually fixed with second platen, and lower end passes through first platen, institute
The second driving device is stated by the second motor and the second motor-driven eccentric group into the eccentric wheel and the transmission connection piece
Lower end be in contact, transmission connection piece lower end is connected through spring with the fixed seat of the second motor.
Preferably, there are axis holes for the transmission connection piece lower end, and axis hole is interior equipped with shaft, and the both ends of the shaft pass through respectively
The spring is connected with the fixed seat of second motor.
Preferably, second sliding part has four groups, and is distributed in the opposite both sides of second platen, and the transmission connects
Fitting and the second driving device have three groups, wherein two groups are located at the side of the second platen, and drive the second platen horizontal horizontal
To movement, another set is located at the opposite opposite side of the second platen and drives the second platen in horizontal longitudinal movement.
Preferably, second platen is " work " word frame, and second sliding part, transmission connection piece and second drive
Device is respectively positioned below the both sides frame of " work " word frame, and the lower film frame adsorption fastener has two groups, and be located at respectively
Above the both sides frame of " work " word frame.
Preferably, first platen is made of center platen, connecting plate, extension frame, and two extension frames pass through respectively
Connecting plate is connected on the platen of center and is mutually parallel, and the center platen is mounted on described first through first rotating member and slides
On moving part, first sliding part is mounted on the pedestal, and the both sides frame of " work " the word frame is located at the extension frame
Top, the pcb board supporting rack adsorption fastener be mounted on the center platen on.
Preferably, first rotating member be rolling bearing, the first driving means be the first motor and leading screw, it is described
First sliding part is made of glidepath, sliding block, upper sliding rail and top shoe, and glidepath is fixed on pedestal, under sliding block is located at
On sliding rail, upper sliding rail is fixed on sliding block, and top shoe is located on upper sliding rail, and top shoe is connected with the rolling bearing, described
First rotating member and the first sliding part share four groups, respectively positioned at four sides of the center platen, there is the first sliding part of three sides
Respectively it is connected with leading screw and the first motor, and the sliding block for the both sides that are mutually parallel is connected with leading screw, the top shoe of opposite side
It is connected with leading screw.
Preferably, pcb board supporting rack adsorption fastener is formed by adsorbent equipment and fixing device combination, and fixing device is two
There are pin shaft holes for side.
The invention has the advantages that the lower film frame lifted in frame is adsorbed admittedly using lower film frame adsorption fastener
After fixed, it can utilize the second motor that the second platen is driven to drive lower film frame relative to the pcb board movement in lift frame and and PCB
Plate is aligned；Then using pcb board supporting rack adsorption fastener by the pcb board supporting rack absorption lifted in frame it is fixed after, can be with
The pcb board on pcb board supporting rack, the lower film frame on the second platen phase together are moved using the first motor driving First strip
It is aligned for upper film frame movement and with the upper film, is achieved in not overturning the two-sided contraposition under the conditions of pcb board.This hair
Components and the occupation modes such as the second motor of bright middle use, eccentric wheel, drive connection block, spring coordinate " work " of the second platen
Font mechanism, the first platen center platen extend to the outside structure, the second platen can be made to be close to the first platen, so as to effectively disappearing
It, can be direct except gap, enhancing volume compactness, and cause for the confined space that lift frame operates in exposure machine therebetween
Original positioning mechanism is replaced, so that original single-side exposure machine becomes sided exposure machine, working efficiency is greatly improved and carries
Rise exposure machine value.
Description of the drawings
Fig. 1 is schematic structural view of the invention（Angle from top to bottom）；
Fig. 2 is schematic structural view of the invention（Angle from bottom to top）；
Fig. 3 is pedestal and zone center plate portion bit architecture schematic diagram；
Fig. 4 is the second motor and region of interest structure diagram；
Fig. 5 is the extension frame and the second motor combination structure diagram of " work " word frame side frame, its lower first platen；
Fig. 6 is U-shaped tie-beam structure diagram.
Specific embodiment
Below in conjunction with the accompanying drawings, by preferred embodiment, the present invention will be further described：
As shown in Figures 1 to 6, the exposure machine alignment platform of this two-sided contraposition has 1 and first platen 2 of pedestal, the first platen
2 can extend frame 5 by center platen 3, connecting plate 4 and both sides forms.With rolling bearing on the center platen 3 of first platen 2
31 are mounted on as the first rotating member on top shoe, and top shoe is mounted on upper sliding rail, can be slided, upper sliding rail is fixed on
On sliding block, sliding block is mounted on glidepath, and glidepath is fixed on pedestal 1, and top shoe or sliding block pass through silk
Button is connected with leading screw 6, recycles the first motor 7 driving leading screw 6, you can realize the cunning of top shoe or sliding block in respective rail
It is dynamic, and and then the first platen 2 is driven to be moved.Top shoe, upper sliding rail, sliding block, glidepath constitute the first sliding part, silk
6 and first motor 7 of thick stick composition is the first driving mechanism.First rotating member and the first sliding part can set four groups, be located at respectively
Four sides of the center platen 3 of the first platen 2, wherein there is three groups to be connected with leading screw and the first motor, and in opposite both sides, be all
Sliding block is connected through screw thread with leading screw, can respectively drive sliding block in horizontal longitudinal movement, opposite side is top shoe through screw thread
It is connected with leading screw, top shoe can be driven to be moved in horizontal cross, thus three the first motors is combined, and are slided by first
Part and the first rotating member may finally drive the first platen in transverse direction, longitudinal movement or be rotated.Above-mentioned pedestal,
Drive mode between one platen can also refer to many existing general aligning platform driving structures.
Also equipped with pcb board supporting rack adsorption fastener 8 on the first platen 2, pcb board supporting rack adsorption fastener 8 is by inhaling
Adsorption device 9 and fixing device 10 are composed, and there are pin shaft holes 11 in both sides for fixing device 10.In use, adsorbent equipment 9 can be with
The pcb board supporting rack lifted in frame is inhaled lower and is inserted into pin shaft hole 11, pcb board supporting rack is made to be fixed with 2 phase of the first platen, and band
Dynamic pcb board supporting rack moves together.Pcb board supporting rack adsorption fastener 8 can also be other common structures.
Second platen 12 is built on the first platen 2, can be designed as the frame of I-shaped, the both sides of " work " word frame
Frame 14 is located at the top of the extension frame 5 of the first platen 2, and is connected through the second sliding part.In order to reduce gap, and it is simultaneous simultaneously
It cares for and slides and rotating property, the second sliding part preferentially select ball to add the combination of U-shaped tie-beam 13, i.e. 12 both sides of the second platen
14 surface of frame is connected, while 13 liang of upper ends of U-shaped tie-beam is made to be upward through extension through upper ball with extending the upper surface of frame 5
Frame 5 is fixed with 14 phase of frame, and 13 lower bottom part of U-shaped tie-beam is equipped with connecting pole 15, and connecting pole 15 is upwards through lower ball with expanding
The lower surface of side frame 5 is connected.When U-shaped tie-beam 13 is extended through frame, around there are enough free gaps.Thus may be used
So that the second platen can be moved freely relative to the first platen, and also closely it is affixed, will not detaches with the first platen.It is protecting
Under the premise of demonstrate,proving above-mentioned first platen and the second platen reduction gap, in order to which the second platen 12 is given to transmit driving force, transmission is used
Connector 16 is fixed across the first platen 2 with 12 phase of the second platen, and when transmission connection piece 16 passes through the first platen, around there are foots
Enough free gaps.16 lower section of transmission connection piece is in contact with eccentric wheel 17, and eccentric wheel 17 is mounted on the second motor 18, eccentric
17 and second motor 18 of wheel forms the second driving device.The rotation of eccentric wheel 17 squeezes transmission connection piece 16, so that it may so that transmission connects
Fitting 16 drives " work " word frame to generate the displacement met needed for contraposition scale.And eccentric wheel 17 is opposite with transmission connection piece 16
Position is different, so that it may so that eccentric wheel squeezes drive connection block to different directions, " work " word frame can also be driven to generate horizontal
Lateral displacement or horizontal length travel.It is imitated to enhance close contact of the transmission connection piece 16 with eccentric wheel 17 with enhancing transmission
Fruit, for 16 lower end of transmission connection piece there are axis hole 28, the inside is installed with shaft 29, and 29 both ends of shaft are fixed on second through spring 10 respectively
In the fixed seat 21 of motor.Other than effective transmission of enhancing eccentric wheel 17 and transmission connection piece 16, when eccentric wheel does not rotate,
The stretching of spring can also promote the fixed seat 21 of the second motor 18 and the second motor to keep opposing stationary with transmission connection piece 16,
So as to opposing stationary with the second platen for the first platen and be externally synchronized with the movement and create conditions.Fixed seat 21 is also by the second motor
The lower section of extension frame 5 is fixed on, the second motor is arranged so, has both ensured effective transmission under above-mentioned environment, is also rationally occupied
Idle space effectively controls the total volume of whole machinery.
The second sliding part being made of upper and lower ball, U-shaped tie-beam can set four groups, and every two groups are directed to one " work "
The extension frame 5 of 14 and first platen of frame of word frame.But transmission connection piece 16 and eccentric wheel 17, the second motor 18 can be with cloth
Three groups are put, two groups are located on a line frame 14 and extension frame 5, and 14 horizontal cross of frame is driven to move, and another group positioned at another
On outer a line frame 14 and extension frame 5, and 14 horizontal longitudinal movement of frame is driven, three the second motors match, can be with
" work " word frame is made to rotate.
Equipped with lower film frame adsorption fastener 19 on the both sides frame 14 of " work " word frame, for adsorbing lower film frame
Frame.
During using this aligning platform, lift frame pulls out, and aligning platform can rise under the action of lifting platform and below lift frame,
Adsorb the lower film frame of lift frame by lower film frame adsorption fastener 19 first, then the second electric motor starting drives the
Two platens and lower film frame movement, the lower film on lower film frame also move together, lift at this time PCB supporting racks in frame and
Pcb board thereon is motionless, and then according to the disk target on pcb board, the lower film is aligned with pcb board, contraposition it is accurate
Degree can be controlled according to visual image principle by camera and control system, be independent technology, this aligning platform is not related to.Alignment
Afterwards, pcb board supporting rack adsorption fastener 8 acts, and PCB supporting racks is made to be moved downward in lift frame and are inserted into the absorption of PCB supporting racks
The pin shaft hole 11 of the fixing device of fixing piece, so as to lock PCB supporting racks.Then the first electric motor starting, the second motor is at this time not
Dynamic, the first motor drives the first platen, the second platen and lower film frame thereon and the lower film, PCB supporting racks and thereon
Pcb board is aligned relative to the upper film frame movement in lift frame and with the upper film together, until alignment.It is not turning over thus
In the case of turning pcb board and in the case of no through-hole alignment target, two-sided contraposition is realized.The volume of this aligning platform
Advantage allows existing exposure machine directly to replace original positioning mechanism with this aligning platform, greatly promotes the value and work of exposure machine
Make efficiency, without being changed to realize that identical contraposition effect is exposed the whole of machine structure, while raising efficiency
It is effectively saved cost.
The present embodiment is to present inventive concept and the explanation realized, is not intended to limit it, in structure of the present invention
Under think of, without the technical solution that substantially converts still in protection domain.
Claims (10)
1. a kind of exposure machine alignment platform of two-sided contraposition, including pedestal and the first platen, the first platen is installed through the first rotating member
On the first sliding part, the first sliding part is mounted on pedestal, and the first sliding part is connected with first driving means, and feature exists
In the second platen is mounted on through the second sliding part on the first platen, and the second platen is through transmission connection piece and the second driving device phase
Even, the second driving device is mutually fixed with the first platen, equipped with pcb board supporting rack adsorption fastener on the first platen, second
Lower film frame adsorption fastener is equipped on platen.
2. the exposure machine alignment platform of two-sided contraposition as described in claim 1, which is characterized in that second sliding part includes upper
Ball, lower ball and tie-beam, second platen are connected downwards through upper ball with the first platen, the tie-beam side and the
Two platens are connected, and are passed down through the first platen and opposite side is made to be connected upwards through lower ball with the first platen.
3. the exposure machine alignment platform of two-sided contraposition as claimed in claim 2, which is characterized in that the tie-beam is connected for U-shaped
Beam, and it is connected with connecting pole upwards in the bottom of U-shaped tie-beam, two upper ends of the U-shaped tie-beam pass through first platen
It is connected with second platen, the upper end of the connecting pole is connected through the lower ball with the first platen upwards.
4. the exposure machine alignment platform of the two-sided contraposition as described in claim requires 1,2 or 3, which is characterized in that the transmission
Connector upper end is mutually fixed with second platen, and lower end passes through first platen, and second driving device is by the second electricity
Machine and the second motor-driven eccentric group are into the eccentric wheel is in contact with the lower end of the transmission connection piece, is sequentially connected
Part lower end is connected through spring with the fixed seat of the second motor.
5. the exposure machine alignment platform of two-sided contraposition as claimed in claim 4, which is characterized in that stay the transmission connection piece lower end
There is axis hole, be equipped with shaft in axis hole, the both ends of the shaft are connected respectively through the spring with the fixed seat of second motor.
6. the exposure machine alignment platform of the two-sided contraposition as described in claim 1,2,3 or 5, which is characterized in that described second slides
Moving part has four groups, and is distributed in the opposite both sides of second platen, and the transmission connection piece and the second driving device have three groups,
Wherein two groups are located at the side of the second platen, and the second platen is driven to be moved in horizontal cross, and another set is located at second
The opposite opposite side of plate simultaneously drives the second platen in horizontal longitudinal movement.
7. the exposure machine alignment platform of two-sided contraposition as claimed in claim 6, which is characterized in that second platen is " work " word
Frame, and second sliding part, transmission connection piece and the second driving device are respectively positioned below the both sides frame of " work " word frame, institute
Stating lower film frame adsorption fastener has two groups, and respectively above the both sides frame of " work " word frame.
8. the exposure machine alignment platform of two-sided contraposition as claimed in claim 7, which is characterized in that first platen is by zone center
Plate, connecting plate, extension frame composition, two extension frames are connected on the platen of center and are mutually parallel through connecting plate respectively, institute
It states center platen to be mounted on first sliding part through first rotating member, first sliding part is mounted on the pedestal
On, the both sides frame of " work " the word frame is located at the top of the extension frame, the pcb board supporting rack adsorption fastener installation
On the center platen.
9. the exposure machine alignment platform of two-sided contraposition as claimed in claim 8, which is characterized in that first rotating member is rotation
Bearing, the first driving means be the first motor and leading screw, first sliding part by glidepath, sliding block, upper sliding rail and
Top shoe forms, and glidepath is fixed on pedestal, and sliding block is located on glidepath, and upper sliding rail is fixed on sliding block, top shoe
On upper sliding rail, top shoe is connected with the rolling bearing, and first rotating member and the first sliding part share four groups, respectively
Positioned at four sides of the center platen, the first sliding part for having three sides is respectively connected with leading screw and the first motor, and mutually
The sliding block of parallel both sides is connected with leading screw, and the top shoe of opposite side is connected with leading screw.
10. the exposure machine alignment platform of the two-sided contraposition as described in claim 1,2,3,5,7,8 or 9, which is characterized in that PCB
Plate bracing frame adsorption fastener is formed by adsorbent equipment and fixing device combination, and there are pin shaft holes in both sides for fixing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610981587.8A CN106990675B (en) | 2016-11-09 | 2016-11-09 | A kind of exposure machine alignment platform of two-sided contraposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610981587.8A CN106990675B (en) | 2016-11-09 | 2016-11-09 | A kind of exposure machine alignment platform of two-sided contraposition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106990675A CN106990675A (en) | 2017-07-28 |
| CN106990675B true CN106990675B (en) | 2018-06-19 |
Family
ID=59413934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610981587.8A Active CN106990675B (en) | 2016-11-09 | 2016-11-09 | A kind of exposure machine alignment platform of two-sided contraposition |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106990675B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108303857B (en) * | 2018-01-25 | 2020-08-14 | 北京控制工程研究所 | Method, system and storage medium for improving consistency of double-sided lithography |
| CN110609454A (en) * | 2019-07-27 | 2019-12-24 | 东莞科视自动化科技有限公司 | Alignment switching method and module for double-sided exposure of PCB |
| CN110488577A (en) * | 2019-09-06 | 2019-11-22 | 东莞科视自动化科技有限公司 | A kind of free-moving high-precision of bilayer is to bit platform |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006084783A (en) * | 2004-09-16 | 2006-03-30 | Nsk Ltd | Mask alignment method and mask alignment device for double-face exposure apparatus |
| JP2006349769A (en) * | 2005-06-13 | 2006-12-28 | Ono Sokki Co Ltd | Aligning device |
| CN202210214U (en) * | 2011-09-01 | 2012-05-02 | 志圣科技（广州）有限公司 | Platform device for exposure machine |
| CN202904224U (en) * | 2012-11-09 | 2013-04-24 | 川宝科技股份有限公司 | Double-sided light-sensitive circuit board alignment device for exposure machine |
| CN203204302U (en) * | 2013-03-26 | 2013-09-18 | 上海飞为自动化系统有限公司 | Alignment mechanism of semi-automatic exposure machine |
| CN203689009U (en) * | 2013-12-31 | 2014-07-02 | 四川聚能核技术工程有限公司 | Contraposition exposure rack applicable to exposure machine |
| CN204116808U (en) * | 2014-09-12 | 2015-01-21 | 川宝科技股份有限公司 | exposure frame alignment device |
| CN105607428B (en) * | 2015-12-30 | 2018-04-17 | 深圳市鑫富宝科技有限公司 | A kind of automatic exposure machine mechanism |
| CN206133186U (en) * | 2016-11-09 | 2017-04-26 | 保定来福光电科技有限公司 | Exposure machine counterpoint platform of two -sided counterpoint |
-
2016
- 2016-11-09 CN CN201610981587.8A patent/CN106990675B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN106990675A (en) | 2017-07-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106990675B (en) | A kind of exposure machine alignment platform of two-sided contraposition | |
| CN206133186U (en) | Exposure machine counterpoint platform of two -sided counterpoint | |
| CN104808363B (en) | A kind of pinpoint polarized light sheet pasting device | |
| CN104808364B (en) | A kind of liquid crystal display polarized light sheet pasting device | |
| CN106098601B (en) | A kind of support device of substrate, drying equipment and related work method | |
| CN201122419Y (en) | Rotating platform for OLED test equipment | |
| KR20110030097A (en) | Game simulator | |
| CN201590412U (en) | Clamping-type upending device | |
| CN206331616U (en) | A kind of law teaching demo rack | |
| CN103622348B (en) | One-driving-two electric cylinder dynamic seat | |
| CN104064100A (en) | Mechanism motion demonstrating platform | |
| DE602004026801D1 (en) | Kit for producing a sports floor, in particular for gymnasiums | |
| JP2004327963A5 (en) | ||
| CN202052332U (en) | Robot shadow puppet device | |
| CN204737568U (en) | Passenger conveyor | |
| KR101326181B1 (en) | 3-axis motion based apparatus | |
| CN205812506U (en) | A kind of flexible circuit board clamp | |
| CN106064479A (en) | A kind of many shower nozzles 3D printer | |
| CN206991573U (en) | Crosshead slides experience apparatus | |
| CN205465113U (en) | Tool is disassembled to display module assembly | |
| CN105970853B (en) | Flexible lifeline | |
| KR102207946B1 (en) | Pad-printing device using silk-printing method | |
| CN112756143B (en) | PVC paint spraying system and method | |
| DE602005014060D1 (en) | Collapsible support frame for a ride | |
| CN208477243U (en) | A kind of LCD absorption feeding device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230525 Address after: 062250 No. 8, Xianwang Road, Xianxian County Economic Development Zone, Cangzhou City, Hebei Province Patentee after: Baoding Laifu automobile lighting group Cangzhou Co.,Ltd. Address before: 071700 south side of Jinbao highway, 4km east of Rongcheng County, Baoding City, Hebei Province Patentee before: BAODING LAIFU PHOTOELECTRIC TECHNOLOGY Co.,Ltd. |