CN106990675A - A kind of exposure machine alignment platform of two-sided contraposition - Google Patents
A kind of exposure machine alignment platform of two-sided contraposition Download PDFInfo
- Publication number
- CN106990675A CN106990675A CN201610981587.8A CN201610981587A CN106990675A CN 106990675 A CN106990675 A CN 106990675A CN 201610981587 A CN201610981587 A CN 201610981587A CN 106990675 A CN106990675 A CN 106990675A
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- China
- Prior art keywords
- platen
- exposure machine
- sliding part
- pcb board
- alignment platform
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention discloses a kind of exposure machine alignment platform of two-sided contraposition, including base, the first platen and the second platen, first platen is driven relative to base motions by first driving means, second platen is driven by second device and moved relative to the first platen, it can also be synchronized with the movement together with the first platen, pcb board support frame adsorption fastener is equipped with the first platen, lower film framework adsorption fastener is equipped with the second platen.The aligning platform can independent of through hole target spot, do not overturn pcb board in the case of pcb board is aligned with the film up and down respectively, and volume can be made compacter, the confined space for existing exposure machine directly replaces original positioning mechanism, and the contraposition of one side twice that pcb board progress need to be overturn originally is become not overturn the two-sided contraposition of pcb board.
Description
Technical field
The present invention relates to exposure machine mechanical field, in particular to one kind can by pcb board upper and lower surface respectively with it is upper
The film and the exposure machine alignment platform of lower film alignment.
Background technology
Exposure machine refers to by opening ultraviolet light device, by the film（It is printed on the egative film of circuit relevant information）On image letter
Breath is transferred to the circuit board for scribbling photoactive substance（Pcb board）On equipment, be widely used in semiconductor, microelectronics, biology
Device and nanosecond science and technology neck.Need to be aligned the film with pcb board when film information is transferred on pcb board, after alignment again
It is exposed.The one side aligned now with one piece of film and pcb board one side to bit pattern, also have above and below two pieces of films and
It is two-sided to bit pattern that middle pcb board is aligned respectively.Two-sided in bit pattern, using the through hole on the pcb board and up and down film
Through hole aligned as alignment target, however, it is this selection through hole be only suitable for staying on pcb board as the alignment method of target
There is the preliminary stage of through hole, to pcb board of the later stage after solder resistance process, above without through hole, thus can only select at present
Disk thereon is taken as target spot and carries out one side contraposition, the one side contraposition of pcb board another side is then carried out again by upset, this is just
Cause operation link many, operating efficiency is low.But the confined space reserved in exposure machine to lift frame is limited to, no matter and increased
Cost, it is also difficult to two sets of aligning platforms are set using the upper and lower in lift frame and carried out respectively to the upper film, the lower film and pcb board single
Two-sided contraposition on the whole is realized in face of the pattern of position, therefore, is not changing existing exposure machine（Exposed for anti-postwelding pcb board
Light）Structural framing and using existing lift frame technology on the basis of, research and develop new aligning platform, realization is not overturning the feelings of pcb board
Two-sided contraposition can be carried out under condition, is the technical problem that this area is extremely expected to solve.
The content of the invention
It is an object of the invention to provide a kind of exposure machine alignment platform of two-sided contraposition, the aligning platform can be independent of through hole
Target spot, do not overturn pcb board in the case of pcb board is aligned with the film up and down respectively, and volume can be made compacter,
The confined space for existing exposure machine directly replaces original positioning mechanism, the one side twice of pcb board progress will need to be overturn originally
Contraposition becomes not overturn the two-sided contraposition of pcb board.
To achieve the above object, the present invention takes following technical scheme：
A kind of exposure machine alignment platform of two-sided contraposition, including base and the first platen, the first platen are arranged on through the first tumbler
On first sliding part, the first sliding part is arranged on base, and the first sliding part is connected with first driving means, and the second platen is through the
Two sliding parts are arranged on the first platen, and the second platen is connected through transmission connection piece with the second drive device, the second drive device
Mutually fixed with the first platen, pcb board support frame adsorption fastener is equipped with the first platen, the lower film is equipped with the second platen
Framework adsorption fastener.
It is preferred that, second sliding part includes upper ball, lower ball and tie-beam, and second platen is downwards through upper rolling
Pearl is connected with the first platen, and the tie-beam side is connected with the second platen, and is passed down through the first platen and makes opposite side
It is connected upwards through lower ball with the first platen.
It is preferred that, the tie-beam is U-shaped tie-beam, and is connected with connecting pole in the bottom up of U-shaped tie-beam, described
Two upper ends of U-shaped tie-beam are connected through first platen with second platen, and the upper end of the connecting pole is through under described
Ball is connected with the first platen upwards.
It is preferred that, the transmission connection piece upper end is mutually fixed with second platen, and lower end passes through first platen, institute
The second drive device is stated by the second motor and the second motor-driven eccentric group into the eccentric wheel and the transmission connection piece
Lower end be in contact, transmission connection piece lower end is connected through spring with the fixed seat of the second motor.
It is preferred that, the transmission connection piece lower end, which is left, is equipped with rotating shaft in axis hole, axis hole, the two ends of the rotating shaft are passed through respectively
The spring is connected with the fixed seat of second motor.
It is preferred that, second sliding part has four groups, and is distributed in the relative both sides of second platen, and the transmission connects
Fitting and the second drive device have three groups, wherein two groups are located at the side of the second platen, and drive the second platen horizontal in level
To motion, another set is located at the relative opposite side of the second platen and drives the second platen in horizontal lengthwise movement.
It is preferred that, second platen be " work " word frame, and second sliding part, transmission connection piece and second driving
Device is respectively positioned on below two side frames of " work " word frame, and the lower film framework adsorption fastener has two groups, and is located at respectively
Above two side frames of " work " word frame.
It is preferred that, first platen is made up of center platen, connecting plate, extension frame, and two extension frames are passed through respectively
Connecting plate is connected on the platen of center and is parallel to each other, and the center platen is arranged on described first through first tumbler and slided
On moving part, first sliding part is arranged on the base, and two side frames of " work " the word frame are located at the extension frame
Top, the pcb board support frame adsorption fastener be arranged on the center platen on.
It is preferred that, first tumbler be rolling bearing, the first driving means be the first motor and leading screw, it is described
First sliding part is made up of glidepath, sliding block, upper slide rail and top shoe, and glidepath is fixed on base, under sliding block is located at
On slide rail, upper slide rail is fixed on sliding block, and top shoe is located on upper slide rail, and top shoe is connected with the rolling bearing, described
First tumbler and the first sliding part have four groups, respectively positioned at four sides of the center platen, there is the first sliding part of three sides
Respectively it is connected with leading screw and the first motor, and the sliding block for the both sides that are parallel to each other is connected with leading screw, the top shoe of opposite side
It is connected with leading screw.
It is preferred that, pcb board support frame adsorption fastener is formed by adsorbent equipment and fixing device combination, and fixing device is two
Leave pin shaft hole in side.
The beneficial effects of the invention are as follows adsorb solid using lower film framework adsorption fastener by the lower film framework for lifting inframe
After fixed, it is possible to use the second motor drives the second platen to drive lower pcb board motion of the film framework relative to lift inframe and and PCB
Plate is aligned；Then using pcb board support frame adsorption fastener by the pcb board support frame for lifting inframe adsorb it is fixed after, can be with
First strip is driven to move the pcb board on pcb board support frame, the lower film framework on the second platen phase together using the first motor
Aligned for upper film frame movement and with the upper film, be achieved in not overturning the two-sided contraposition under the conditions of pcb board.This hair
Part and the occupation modes such as the second motor, eccentric wheel, drive connection block, the spring of bright middle use, coordinate " work " of the second platen
The outside expansion structure of center platen of font mechanism, the first platen, can make the second platen be close to the first platen, so as to effectively disappear
, can be direct except gap, enhancing volume compactness, and cause for the confined space that lift frame is operated in exposure machine therebetween
Original positioning mechanism is replaced, and then causes original single-side exposure machine to become sided exposure machine, operating efficiency is greatly improved and carries
Rise exposure machine value.
Brief description of the drawings
Fig. 1 is schematic structural view of the invention（Angle from top to bottom）；
Fig. 2 is schematic structural view of the invention（Angle from bottom to top）；
Fig. 3 is base and zone center plate portion bit architecture schematic diagram；
Fig. 4 is the second motor and region of interest structural representation；
Fig. 5 is the side frame of " work " word frame one, the extension frame and the second motor combination structural representation of its lower first platen；
Fig. 6 is U-shaped tie-beam structural representation.
Embodiment
Below in conjunction with the accompanying drawings, by preferred embodiment, the present invention will be further described：
As shown in Figures 1 to 6, the exposure machine alignment platform of this two-sided contraposition, with the platen 2 of base 1 and first, the first platen 2 can
To be made up of center platen 3, connecting plate 4 and both sides extension frame 5.Made on the center platen 3 of first platen 2 with rolling bearing 31
It is arranged on for the first tumbler on top shoe, top shoe is arranged on upper slide rail, can enter line slip, upper slide rail is fixed on downslide
On block, sliding block is arranged on glidepath, and glidepath is fixed on base 1, top shoe or sliding block by screw thread with
Leading screw 6 is connected, and recycles the first motor 7 driving leading screw 6, you can realize the slip of top shoe or sliding block in respective rail,
And and then drive the first platen 2 to be moved.Top shoe, upper slide rail, sliding block, glidepath constitute the first sliding part, leading screw 6
It is the first drive mechanism with the first motor 7 composition.First tumbler and the first sliding part can set four groups, respectively positioned at first
Four sides of the center platen 3 of platen 2, wherein there is three groups to be connected with leading screw and the first motor, and are all to glide in relative both sides
Block is connected through screw thread with leading screw, can drive sliding block in horizontal lengthwise movement respectively, opposite side is top shoe through screw thread and silk
Thick stick is connected, and top shoe can be driven to be moved in horizontal cross, thus three the first motors are combined, by the first sliding part and
First tumbler, may finally drive the first platen in transverse direction, lengthwise movement or be rotated.Above-mentioned base, First
Drive pattern between plate can also refer to many existing general aligning platform driving structures.
Pcb board support frame adsorption fastener 8 is also equipped with the first platen 2, pcb board support frame adsorption fastener 8 is by inhaling
Adsorption device 9 and fixing device 10 are combined, and fixing device 10 leaves pin shaft hole 11 in both sides.In use, adsorbent equipment 9 can be with
The pcb board support frame for lifting inframe is inhaled lower and inserted in pin shaft hole 11, pcb board support frame is mutually fixed with the first platen 2, and band
Dynamic pcb board support frame is moved together.Pcb board support frame adsorption fastener 8 can also be other common structures.
Second platen 12 is built on the first platen 2, can be designed as the framework of I-shaped, the both sides of " work " word frame
Frame 14 is located at the top of the extension frame 5 of the first platen 2, and is connected through the second sliding part.In order to reduce gap, and it is simultaneously simultaneous
Turn round and look at and slide and rotating property, the second sliding part preferentially adds the combination of U-shaped tie-beam 13, the i.e. both sides of the second platen 12 from ball
The surface of frame 14 is connected through upper ball with extending the upper surface of frame 5, while making 13 liang of upper ends of U-shaped tie-beam be upward through extension
Frame 5 is mutually fixed with frame 14, and the lower bottom part of U-shaped tie-beam 13 is equipped with connecting pole 15, and connecting pole 15 is upwards through lower ball with expanding
The lower surface of side frame 5 is connected.When U-shaped tie-beam 13 is extended through frame, enough free gaps are around left.Thus may be used
So that the second platen can be moved freely relative to the first platen, and also closely it is affixed, will not separates with the first platen.Protecting
On the premise of demonstrate,proving above-mentioned first platen and the second platen reduction gap, in order to give the second platen 12 to transmit driving force, transmission is used
Connector 16 is mutually fixed through the first platen 2 with the second platen 12, when transmission connection piece 16 passes through the first platen, around leaves foot
Enough free gaps.The lower section of transmission connection piece 16 is in contact with eccentric wheel 17, and eccentric wheel 17 is arranged on the second motor 18, eccentric
The motor 18 of wheel 17 and second constitutes the second drive device.Eccentric wheel 17 rotates extruding transmission connection piece 16, so that it may so that transmission connects
Fitting 16 drives " work " word frame to produce the displacement met needed for contraposition yardstick.And eccentric wheel 17 is relative with transmission connection piece 16
Position is different, so that it may so that eccentric wheel also can just drive " work " word frame to produce level to different directions extruding drive connection block
Lateral displacement or horizontal length travel.Imitated to strengthen transmission connection piece 16 with the close contact of eccentric wheel 17 with strengthening transmission
Really, axis hole 28 is left in the lower end of transmission connection piece 16, and the inside is installed with rotating shaft 29, and the two ends of rotating shaft 29 are fixed on second through spring 10 respectively
In the fixed seat 21 of motor.In addition to effective transmission of the enhancing eccentric wheel 17 with transmission connection piece 16, when eccentric wheel does not rotate,
The stretching of spring can also promote the fixed seat 21 of the second motor 18 and the second motor and transmission connection piece 16 to keep geo-stationary,
So as to be created conditions for the first platen and the second platen geo-stationary and being externally synchronized with the movement.Fixed seat 21 is also by the second motor
The lower section of extension frame 5 is fixed on, the second motor is arranged so as to, has both ensured effective transmission under above-mentioned environment, is also rationally taken
Idle space, effectively controls the cumulative volume of overall machinery.
The second sliding part being made up of upper and lower ball, U-shaped tie-beam can set four groups, and every two groups are directed to one " work "
The extension frame 5 of the platen of frame 14 and first of word frame.But transmission connection piece 16 and eccentric wheel 17, the second motor 18 can be with cloth
Three groups are put, two groups are located on a line frame 14 and extension frame 5, and drive the horizontal cross of frame 14 to move, and another group positioned at another
On outer a line frame 14 and extension frame 5, and the horizontal lengthwise movement of frame 14 is driven, three the second motors are engaged, can be with
" work " word frame is set to rotate.
Lower film framework adsorption fastener 19 is equipped with two side frames 14 of " work " word frame, for adsorbing lower film frame
Frame.
During using this aligning platform, lift frame is pulled out, and aligning platform can rise in the presence of lifting platform and below lift frame,
Adsorb the lower film framework of lift frame by lower film framework adsorption fastener 19 first, then the second electric motor starting drives the
The lower film on two platens and lower film frame movement, lower film framework is also moved together, now lift inframe PCB support frames and
Pcb board thereon is motionless, and then according to the disk target on pcb board, the lower film and pcb board are aligned, contraposition it is accurate
Degree can be controlled according to visual image principle by camera and control system, and it is independent technology, and this aligning platform is not related to.Alignment
Afterwards, pcb board support frame adsorption fastener 8 is acted, and PCB support frames is moved downward in lift inframe and is inserted the absorption of PCB support frames
The pin shaft hole 11 of the fixing device of fixture, so as to pin PCB support frames.Then the first electric motor starting, the second motor is now not
Dynamic, the first motor drives First plate, the second platen and lower film framework and the lower film thereon, PCB support frames and thereon
Pcb board is aligned relative to the upper film frame movement for lifting inframe and with the upper film together, until alignment.Do not turning over thus
It is also in the case of no through hole alignment target, to realize two-sided contraposition in the case of turning pcb board.The volume of this aligning platform
Advantage allows existing exposure machine directly to replace original positioning mechanism with this aligning platform, greatly promotes the value and work of exposure machine
Make efficiency, without being changed to realize that identical contraposition effect is exposed the overall of machine structure, while raising efficiency
It is effectively saved cost.
The present embodiment is, to present inventive concept and the explanation realized, to be not limited, in structure of the present invention
Under think of, the technical scheme without essence conversion is still in protection domain.
Claims (10)
1. a kind of exposure machine alignment platform of two-sided contraposition, including base and the first platen, the first platen are installed through the first tumbler
On the first sliding part, the first sliding part is arranged on base, and the first sliding part is connected with first driving means, and its feature exists
In the second platen is arranged on the first platen through the second sliding part, and the second platen is through transmission connection piece and the second drive device phase
Even, the second drive device is mutually fixed with the first platen, pcb board support frame adsorption fastener is equipped with the first platen, second
Lower film framework adsorption fastener is equipped with platen.
2. the exposure machine alignment platform of two-sided contraposition as claimed in claim 1, it is characterised in that second sliding part includes upper
Ball, lower ball and tie-beam, second platen are connected downwards through upper ball with the first platen, the tie-beam side and the
Two platens are connected, and are passed down through the first platen and make another on the side through lower ball with the first platen to be connected.
3. the exposure machine alignment platform of two-sided contraposition as claimed in claim 2, it is characterised in that the tie-beam connects for U-shaped
Beam, and connecting pole is connected with the bottom up of U-shaped tie-beam, two upper ends of the U-shaped tie-beam pass through first platen
It is connected with second platen, the upper end of the connecting pole is connected with the first platen upwards through the lower ball.
4. the exposure machine alignment platform of the two-sided contraposition as described in claim requirement 1,2 or 3, it is characterised in that the transmission
Connector upper end is mutually fixed with second platen, and lower end passes through first platen, and second drive device is by the second electricity
Machine and the second motor-driven eccentric group are into the eccentric wheel is in contact with the lower end of the transmission connection piece, drive connection
Part lower end is connected through spring with the fixed seat of the second motor.
5. the exposure machine alignment platform of two-sided contraposition as claimed in claim 4, it is characterised in that stay the transmission connection piece lower end
Have and rotating shaft is equipped with axis hole, axis hole, the two ends of the rotating shaft are connected through the spring with the fixed seat of second motor respectively.
6. the exposure machine alignment platform of the two-sided contraposition as described in claim 1,2,3 or 5, it is characterised in that described second slides
Moving part has four groups, and is distributed in the relative both sides of second platen, and the transmission connection piece and the second drive device have three groups,
Wherein two groups are located at the side of the second platen, and drive the second platen to be moved in horizontal cross, and another set is located at second
The relative opposite side of plate simultaneously drives the second platen in horizontal lengthwise movement.
7. the exposure machine alignment platform of two-sided contraposition as claimed in claim 6, it is characterised in that second platen is " work " word
Frame, and second sliding part, transmission connection piece and the second drive device are respectively positioned on the two side frames lower section of " work " word frame, institute
Stating lower film framework adsorption fastener has two groups, and respectively above two side frames of " work " word frame.
8. the exposure machine alignment platform of two-sided contraposition as claimed in claim 7, it is characterised in that first platen is by zone center
Plate, connecting plate, extension frame composition, two extension frames are connected on the platen of center and are parallel to each other through connecting plate respectively, institute
State center platen to be arranged on first sliding part through first tumbler, first sliding part is arranged on the base
On, two side frames of " work " the word frame are located at the top of the extension frame, and the pcb board support frame adsorption fastener is installed
On the center platen.
9. the exposure machine alignment platform of two-sided contraposition as claimed in claim 8, it is characterised in that first tumbler is rotation
Bearing, the first driving means be the first motor and leading screw, first sliding part by glidepath, sliding block, upper slide rail and
Top shoe is constituted, and glidepath is fixed on base, and sliding block is located on glidepath, and upper slide rail is fixed on sliding block, top shoe
On upper slide rail, top shoe is connected with the rolling bearing, and first tumbler and the first sliding part have four groups, respectively
Positioned at four sides of the center platen, the first sliding part for having three sides is respectively connected with leading screw and the first motor, and mutually
The sliding block of parallel both sides is connected with leading screw, and the top shoe of opposite side is connected with leading screw.
10. the exposure machine alignment platform of the two-sided contraposition as described in claim 1,2,3,5,7,8 or 9, it is characterised in that PCB
Plate bracing frame adsorption fastener is formed by adsorbent equipment and fixing device combination, and fixing device leaves pin shaft hole in both sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610981587.8A CN106990675B (en) | 2016-11-09 | 2016-11-09 | A kind of exposure machine alignment platform of two-sided contraposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610981587.8A CN106990675B (en) | 2016-11-09 | 2016-11-09 | A kind of exposure machine alignment platform of two-sided contraposition |
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| Publication Number | Publication Date |
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| CN106990675A true CN106990675A (en) | 2017-07-28 |
| CN106990675B CN106990675B (en) | 2018-06-19 |
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| CN201610981587.8A Active CN106990675B (en) | 2016-11-09 | 2016-11-09 | A kind of exposure machine alignment platform of two-sided contraposition |
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| CN108303857A (en) * | 2018-01-25 | 2018-07-20 | 北京控制工程研究所 | A kind of method, system and storage medium improving dual surface lithography consistency |
| CN110488577A (en) * | 2019-09-06 | 2019-11-22 | 东莞科视自动化科技有限公司 | A kind of free-moving high-precision of bilayer is to bit platform |
| CN110609454A (en) * | 2019-07-27 | 2019-12-24 | 东莞科视自动化科技有限公司 | Alignment switching method and module for double-sided exposure of PCB |
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| CN110609454A (en) * | 2019-07-27 | 2019-12-24 | 东莞科视自动化科技有限公司 | Alignment switching method and module for double-sided exposure of PCB |
| CN110488577A (en) * | 2019-09-06 | 2019-11-22 | 东莞科视自动化科技有限公司 | A kind of free-moving high-precision of bilayer is to bit platform |
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| Publication number | Publication date |
|---|---|
| CN106990675B (en) | 2018-06-19 |
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Effective date of registration: 20230525 Address after: 062250 No. 8, Xianwang Road, Xianxian County Economic Development Zone, Cangzhou City, Hebei Province Patentee after: Baoding Laifu automobile lighting group Cangzhou Co.,Ltd. Address before: 071700 south side of Jinbao highway, 4km east of Rongcheng County, Baoding City, Hebei Province Patentee before: BAODING LAIFU PHOTOELECTRIC TECHNOLOGY Co.,Ltd. |