JP2007314347A - Conveying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a conveying mechanism capable of conveying a tape-like work in a stable state without applying a load thereto. <P>SOLUTION: The feed reel rotating part 1 of the conveying mechanism A is disposed higher than a feed side first guide roller 2. A feed side second guide roller 3 is disposed at the position equal to or lower than the feed side first guide roller 2, and at the position higher than the first conveying roller 4. A winding roller rotating part 9 is disposed higher than a winding side second guide roller 8. The winding side second guide roller 8 is disposed at the position equal to or higher than the winding side first guide roller 7, and at the position lower than the winding reel rotating part 9. The first conveying roller 4 and a second conveying roller 6 has a sucking means 42 for sucking the work to the surface 41a thereof. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a transport device for transporting a film tape work from a supply side to a processing unit and transporting the work processed by the processing unit to a winding side.

  In general, an electric circuit base material of an electronic circuit board (printed circuit board) used for various small electric devices such as a mobile phone and a mobile device is a thin plate-like material in the manufacturing process because the body is light, thin and short. Because it is difficult to handle with a thin film, it must be handled with a thin and highly accurate film tape (hereinafter referred to as “work”).

  In such a workpiece, the material actually used has conventionally been about 0.1 mm in thickness. However, in recent years, it has become a trend of thinning to 0.06 mm. Furthermore, recently, a tape-shaped workpiece having a thickness of 0.05 mm or less and a width as thin as 100 to 250 mm has been demanded.

  When an electronic circuit board is manufactured from such a tape-shaped workpiece, there are problems such as the workpiece is loosened during conveyance and the right and left edges are warped. As a transport mechanism that solves the problem, there is known a horizontal transport type transport mechanism that transports a work in a horizontal state so that the work can be reliably handled (see, for example, Patent Document 1).

  This transport mechanism is a device that transports a tape-shaped workpiece to manufacture an electronic circuit board, and is used in a state of being incorporated in an exposure apparatus. The mask pattern can be exposed.

  The workpiece sent out toward the exposure stage is in a slack state due to its own weight at a location where the workpiece is conveyed horizontally. In order to prevent the slack, the transport mechanism is provided with a holding mechanism that adjusts the slack by holding the work with a pressing roller (see, for example, Patent Document 1).

  In the transport mechanism, it is necessary to prevent a load from being applied to a part where the transport direction is changed. In the transport mechanism, so-called air dancers (boxes 41 and 51 of Patent Document 1) for adjusting the tension of the workpiece are provided in order to send the workpiece to the exposure stage without causing any extra tension and to stabilize the workpiece.

  In such an exposure apparatus, as disclosed in Japanese Patent Application Laid-Open No. H10-228707, most of the horizontal conveyance vertical exposure methods irradiate exposure light while conveying a workpiece horizontally. In addition, in order to prevent the dust in the air from adhering to the work and the mask and increase the resolution, a transport mechanism that transports the work in the vertical direction with the exposure stage vertical is also known (for example, Patent Document 2). To Patent Document 4).

In the transport mechanism as disclosed in Patent Documents 2 to 4, a roller is used to supply the transported work to the exposure stage.
In addition, in order to appropriately send the workpiece conveyance direction to the processing unit, a direction changing device that changes the conveyance direction is also known. This direction changing device blows air out of a gas jet hole formed in a thin plate on the surface of a fixed shaft, causes the workpiece to float by air pressure, and changes the conveying direction of the workpiece (see, for example, Patent Document 5).
Japanese Patent No. 2836787 (Claims, FIGS. 1 and 2) Japanese Patent Laying-Open No. 2005-326550 (Claims, FIG. 1) Japanese Patent Laying-Open No. 2005-91903 (Claim 1, FIG. 1) Japanese Patent No. 2798158 (Claims, FIG. 1) Japanese Patent No. 2788207 (paragraphs 0011 to 0012, FIGS. 1 to 3)

However, the conventional transport mechanism has the following problems.
In a transport mechanism such as that disclosed in Japanese Patent Application Laid-Open No. H10-228707, the air dancer reduces that the workpiece fed from the supply reel is loosened by its own weight and is excessively tensioned.
However, in such a transport mechanism, since the workpiece and the workpiece are in a horizontal state on the exposure stage, the mask and the workpiece come into contact with each other. There is a problem that the slack cannot be resolved.
In such a transport mechanism, since the mask and the workpiece are in close contact with each other, dust or the like may be transferred to the mask and the workpiece due to static electricity, so that the resolution of the pattern after exposure is reduced. There is a problem.

  Further, in the transport mechanism disclosed in Patent Documents 2 to 4, the mask, the optical system, and the work can be smoothly aligned with each other by holding them with a pressing roller that sandwiches both surfaces of the work at positions before and after the exposure stage. However, there is a problem in that the work is loaded more than necessary by sandwiching both sides of the work.

  In addition, in an exposure apparatus that performs processing while conveying a work intermittently frame by frame, it is necessary to eliminate the looseness of the work that occurs in the conveyance path. In addition, in order to prevent exposure of a high-resolution mask pattern while preventing dust and the like from being transferred to the work, it is desired to transport the work in a stable state so as not to apply a load to the work. .

  Therefore, the present invention has been made in view of the problem, and an object of the present invention is to provide a transport mechanism that can transport the tape-shaped workpiece in a stable state without applying a load.

  As means for solving the problems, a transport device according to a first aspect is a transport device for transporting and processing a tape-shaped work on a processing section provided in a vertical direction, and a supply reel for feeding the work A supply reel rotating portion for rotating the supply reel, a supply side first guide roller and a supply side second guide roller for guiding the work fed from the supply reel by the rotation of the supply reel rotating portion, and the supply side first guide roller And a supply side relaxation absorbing means for applying tension to the work between the supply side second guide rollers, and a work piece from the supply side second guide roller conveyed along the processing unit and disposed above and below the processing unit. A first conveying roller and a second conveying roller, a winding side first guide roller and a winding side second guide roller for guiding a work from the second conveying roller; A take-up side slack absorbing means for applying tension to the work between the take-up side first guide roller and the take-up side second guide roller, and a take-up reel for taking up the work from the take-up side second guide roller. A take-up reel rotating unit. The supply reel rotating unit is disposed at a position higher than the supply side first guide roller, and the supply side second guide roller is disposed at a position equal to or lower than the supply side first guide roller, and the first transport roller. The take-up reel rotating part is arranged at a position higher than the take-up side second guide roller, and the take-up side second guide roller is at a position equal to or higher than the take-up side first guide roller. In addition to being disposed, the structure is disposed at a position lower than the take-up reel rotating unit.

According to such a configuration, in the transport device, the tape-like work wound around the supply reel is sent to the supply side relaxation absorbing means side by the take-up reel rotating unit and the supply side first guide roller, and further, the supply side The sheet is fed toward the processing section by the second guide roller, the first conveying roller, the second conveying roller, and the winding-side first guide roller. Further, the conveying device winds the work at the position of the winding side relaxation absorbing means around the winding reel by the winding side second guide roller and the winding reel rotating part. The first conveyance roller and the second conveyance roller convey the workpiece in the vertical direction while adsorbing the workpiece to the roller surface through the suction holes when intermittently conveying the workpiece in accordance with a predetermined pitch processed by the processing unit. is doing.
In addition, in a conveyance path | route, it can send without interlocking | conveying the conveyance of the continuous workpiece | work with a supply side relaxation absorption means and a winding side relaxation absorption means as a boundary.
Further, since the work is transported obliquely downward due to the positional relationship from the supply reel rotating unit to the first transport roller, the looseness due to the weight of the work is eliminated. Furthermore, since the workpiece is conveyed obliquely upward due to the positional relationship from the second conveyance roller to the take-up reel rotating portion, it is possible to eliminate the slack due to the weight of the workpiece.

In the conveying device according to the second aspect, the supply-side second guide roller and the winding-side first guide roller are supplied with the supply-side second guide roller and the winding-side first guide roller according to the positional deviation amount of the workpiece on the processing unit. It was set as the structure provided with the workpiece position adjustment means to move to the axial direction of 1 guide roller.
According to such a configuration, the conveying device moves the supply-side second guide roller and the winding-side first guide roller in the axial direction by the work position adjusting means, so that the position of the work in the axial direction on the processing unit and The workpiece can be positioned with higher accuracy by adjusting the inclination.

In the invention of the conveying device according to the third aspect, the first conveying roller and the second conveying roller are configured such that the roller body is formed of a synthetic resin.
According to such a configuration, in the transport device, since the roller main bodies of the first transport roller and the second transport roller are formed of synthetic resin, minute vibrations of the work to be transported are absorbed by the resin roller main body. The

According to a fourth aspect of the present invention, there is provided a transport device between the supply reel and the first guide roller on the supply side, and the transport device includes a tail end of the workpiece being processed by the processing section and a leading edge of the next new workpiece. And a work connecting means for connecting to each other.
According to such a configuration, the conveyance device includes the work connecting means, so that the rear end of the tape-shaped work being processed in the processing unit and the most advanced part of the new tape-shaped work to be used next can be obtained. It is possible to connect and connect in the form of a conveyance path.

In the invention of the transfer apparatus according to the fifth aspect, the processing unit is an exposure stage for exposing a mask pattern onto a work that is transferred frame by frame by the transfer apparatus.
According to this configuration, when the processing unit is the exposure stage, the transport device transports the tape-shaped workpiece in a stable state one frame at a time in accordance with the processing of the exposure device, and exposes the mask pattern on the workpiece. be able to.

According to a sixth aspect of the invention, in the fifth aspect, when the amount of positional deviation of the workpiece on the processing unit is less than or equal to a threshold value, one frame of the workpiece stationary on the exposure stage and a mask When the mask moves to almost zero, and the workpiece displacement on the processing unit is larger than the threshold value, the next frame of the workpiece stationary on the exposure stage is the exposure stage. The supply-side second guide roller and the take-up-side first guide roller move in the axial direction so as to move to a predetermined position above.
According to this configuration, when the supply-side second guide roller and the take-up-side first guide roller move in the axial direction, the posture (inclination) of one frame of the workpiece to be sent next becomes a predetermined position on the exposure stage. To match. For this reason, the amount of positional deviation between the next frame sent to the exposure stage and the mask is reduced, and the alignment time between the mask and the workpiece is shortened.

According to a seventh aspect of the present invention, there is provided a transfer apparatus according to the fifth aspect, wherein one frame of a workpiece stationary on an exposure stage and a mask when the amount of positional deviation of the workpiece on the processing unit is a threshold value or less. When the mask moves to almost zero, and the workpiece displacement on the processing unit is larger than the threshold value, the next frame of the workpiece stationary on the exposure stage is the exposure stage. The work feed amount by the first transport roller and the second transport roller is set so as to move to the predetermined position above.
According to such a configuration, the first transport roller and the second transport roller set the feed amount of the work by one frame stationary on the exposure stage. For this reason, one frame of the workpiece sent next matches the predetermined position of the exposure stage. For this reason, the amount of positional deviation between the next frame sent to the exposure stage and the mask is reduced, and the alignment time between the mask and the workpiece is shortened.

According to the eighth aspect of the present invention, the first and second transport rollers have suction holes for sucking the workpiece onto the roller surface, and suction means for sucking the workpiece is connected via the suction holes. The configuration is as follows.
According to such a configuration, the transport device is transported while being attracted when the work is sent to the processing unit, so that the work does not slip on the roller surface, and the feed amount for one frame can be accurately fed. .

According to the ninth aspect of the present invention, the supply side first guide roller, the supply side second guide roller, the winding side first guide roller, and the floor side second guide roller adsorb the workpiece to the roller surface. And a suction means for sucking the workpiece through the suction hole is connected.
According to such a configuration, since the workpiece is conveyed while being attracted by the supply side first guide roller, the supply side second guide roller, the winding side first guide roller, and the winding side second guide roller, The workpiece does not slide on the roller surface, and the workpiece can be smoothly fed out from the supply reel, and the workpiece can be smoothly wound around the take-up reel.

  Since the conveying device according to the present invention can convey the workpiece from the supply reel to the processing unit and from the processing unit to the take-up reel without pinching and relaxing the workpiece, an excessive load is not applied to the workpiece. The workpiece can be transported in a stable state, and can be transported to an accurate position in the processing unit.

Next, an example of the transport mechanism according to the embodiment of the present invention will be described with reference to FIGS.
First, prior to describing the transport mechanism A according to the embodiment of the present invention, a tape-shaped workpiece (hereinafter referred to as “tape”) T transported by the transport mechanism A will be described.
FIG. 1 is a block diagram illustrating a transport mechanism according to an embodiment of the present invention. FIG. 2 is a schematic perspective view showing the transport mechanism according to the embodiment of the present invention.

≪Configuration of tape (work) ≫
As shown in FIGS. 1 and 2, the tape T is made of a film-like tape material such as a flexible substrate used as an electronic circuit board or a hoop material used when hoop-molding a resin molded product. The tape T is formed of a thin and wide member having a tape width of 160 mm and a total tape length of 200 m, for example, and is wound around the supply reel rotating unit 1. There are tape tapes on which the perforation holes (not shown) are formed on the left and right edges, and those on which there are no perforation holes.

  The transport mechanism A according to the present invention transports the tape T. Hereinafter, as an example of the embodiment of the present invention, the transport mechanism A transports a tape (film tape) T used as a material for a flexible substrate. Will be described as an example.

<< Construction of transport mechanism >>
The transport mechanism A is an apparatus that intermittently transports the tape T to the exposure stage 51a (processing unit 51) provided in the vertical direction one frame at a time in accordance with the processing of each block as a unit processed by the exposure device 5. is there. The transport mechanism A includes a supply reel rotating unit 1 that rotates the supply reel B1 by being mounted in a central reel hole of the supply reel B1 around which the tape T is wound, and a first supply side that guides the transported tape T. A guide roller 2 and a supply-side second guide roller 3 are provided. Further, the transport mechanism A is disposed at the upper and lower positions of the processing section 51, and includes a first transport roller 4 and a second transport roller 6 for transporting the tape T, a winding side first guide roller 7 and a winding side second. A guide roller 8 and a take-up reel rotating unit 9 that rotates a take-up reel B2 that takes up the tape T are provided. Further, the transport mechanism A includes a supply side relaxation absorbing means D1 and a winding side relaxation absorbing means D2 that absorb the slack of the tape T being transported.

<Configuration of supply reel rotating unit>
The supply reel rotating unit 1 is a member for supporting the bobbin-shaped supply reel B1 around which the tape T, which is the material of the electronic circuit board, is wound, and feeding the tape T, and the shaft cylinder portion of the supply reel B1 is It is disposed in an apparatus housing (not shown) so as to be rotatable about a shaft portion to be mounted, and is rotated by a drive motor (not shown).
The supply reel B1 is made of, for example, a winding portion having a diameter of 750 mm, and has flange portions (not shown) on the left and right edges. The tape T wound around the supply reel B <b> 1 is pulled by the first transport roller 4, thereby rotating with the supply reel rotating unit 1 and being sent out to the supply-side first guide roller 2.

<Configuration of supply side first guide roller>
As shown in FIGS. 1 and 2, the supply-side first guide roller 2 is an auxiliary roller that is wound around such that the tape T wound around the supply reel B1 is fed toward the supply-side relaxation absorbing means D1. The shaft portion is disposed so as to be rotatable. The supply-side first guide roller 2 is disposed below the supply reel rotating unit 1, and the tape T sent obliquely downward from the supply reel rotating unit 1 is fed from the supply-side first guide roller 2 by its own weight. It is arranged so as to hang down substantially vertically downward.

FIG. 3 is an enlarged cross-sectional view showing the supply-side first guide roller 2 in the transport mechanism according to the embodiment of the present invention.
As shown in FIG. 3, the supply-side first guide roller 2 includes a roller body 21 that is in surface contact with the tape T, a support shaft 22 that rotatably supports the roller body 21, and the support shaft 22. A bearing 23 and a device housing 24 that holds the bearing 23 are provided.
In addition, the winding side second guide roller 8 (see FIG. 2) described later has the same structure as the supply side first guide roller 2, for example.

<Configuration of supply side relaxation absorbing means>
1 and 2 again, the supply side slack absorbing means D1 is disposed at a position for storing the tape T between the supply reel rotating portion 1 and the supply side second guide roller 3, and the supply reel rotating portion 1 It is a device that applies tension to the supplied tape T to absorb slack. More specifically, the supply side relaxation absorbing means D1 is configured such that the tape T fed from the supply reel rotating unit 1 is provided between the supply reel rotating unit 1 and the supply side first guide roller 2 and the supply side second guide unit 2. This is a device that applies tension to the box body so that it is loosened by its own weight in a U-shape so that excessive load and slack do not occur when it is transported between the guide roller 3 and the first transport roller 4.

  The supply side relaxation absorbing means D1 includes a cylindrical box D1a having a transport space in which the tape T passing over the opening formed on the upper side can hang down in a U shape by its own weight. In the box D1a, the tape T passing over the opening formed on the upper side is fed from the upstream side toward the lower side in the transport direction of the tape T, hangs down by its own weight, and is pulled by the first transport roller 4. Thus, the tape T is sent out upward in the transport direction of the tape T. The box D1a is formed of, for example, a rectangular bottomed cylindrical body having openings on the top and bottom.

<Configuration of supply side second guide roller>
FIG. 4 is an enlarged cross-sectional view showing a supply-side second guide roller in the transport mechanism according to the embodiment of the present invention.
The supply-side second guide roller 3 shown in FIG. 4 sends the tape T from the supply-side relaxation absorbing means D1 toward the first transport roller 4 (see FIGS. 1 and 2), and the tape T is fed in the width direction of the arrow b. It is a roller provided with a work position adjusting means 32 that can be moved (in the axial direction of arrow a). The supply-side second guide roller 3 includes a motor M1, a device housing 33 that holds the motor M1, and a ball screw 34 fixed to the motor shaft M1a. The supply-side second guide roller 3 includes a rotatable roller body 31 for transporting the tape T, a nut 35 that moves in the axial direction by the rotation of the ball screw 34, and a spline shaft that moves integrally with the nut 35. 36, a support shaft 37 that moves integrally with the spline shaft 36, and a bearing 38 that is interposed between the support shaft 37 and the roller body 31.

  The work position adjusting means 32 is an apparatus for adjusting the position of the tape T in the processing unit 51 by moving the position of the roller body 31 in the axial direction (the width direction of the tape T). The work position adjusting means 32 includes, for example, a motor M1, a ball screw 34, a nut 35, a spline shaft 36, a support shaft 37, and a roller body 31.

  The motor M1 shown in FIG. 4 moves in the axial direction of the arrow a (the width direction of the tape T) while rotating the roller body 31, and is forwardly and reversely rotated around the roller body 31 by a signal from the control device 10. The tape T is moved in the width direction of the arrow b. The supply-side second guide roller 3 is held at a predetermined position of the apparatus housing 33.

  The ball screw 34 is connected to the motor shaft M1a of the motor M1 and rotates integrally. A reduction gear mechanism may be interposed between the ball screw 34 and the motor shaft M1a. The nut 35 is screwed into the ball screw 34 and mounted in a spline shaft 36 in which a spline groove is formed. As the ball screw 34 rotates, the nut 35 moves in the axial direction of the arrow a.

  The spline shaft 36 rotates integrally with the nut 35 and moves in the axial direction of the arrow a. The support shaft 37 is fixed to the bottom surface portion of the spline shaft 36 and rotates while moving in the axial direction together with the spline shaft 36, and both end portions thereof are supported by bearings 38.

  The bearing 38 is rotatably attached to the support shaft 37 and is assembled so as to move in the axial direction (arrow a direction) integrally with the support shaft 37. The roller body 31 is a roller that moves in the axial direction of the arrow a together with the bearing 38 and is wound around the tape T, and has, for example, a bobbin shape having flange portions at both ends. The roller body 31 has at least a roller surface 31a formed of synthetic resin and absorbs fine vibrations. In this case, the synthetic resin forming the roller surface 31a is preferably a soft resin having a buffering property, and may be one that is attached to the roller surface 31a.

  The supply-side second guide roller 3 configured as described above rotates and linearly moves the interposition member including the ball screw 34, the spline shaft 36, the support shaft 37, and the bearing 38 by rotating the motor M1. Thus, the position of the tape T can be adjusted by moving the roller body 31 in the axial direction. The supply-side second guide roller 3 provided with the roller body 31 movable in the axial direction in this way moves the position of the roller body 31 in the axial direction and adjusts it to an appropriate position, whereby the tape in the processing section 51 is adjusted. It is possible to accurately match the desired position in the positioning of T.

Note that the supply-side second guide roller 3 shown in FIG. 4 simply rotates the support shaft 37 directly by the motor M1, and the supply-side second guide roller 3 is entirely connected to another motor, a linear slide mechanism or the like (see FIG. 4). (Not shown) may be configured to move in the axial direction.
Moreover, the winding side first guide roller 7 (see FIG. 2) described later has the same structure as the supply side second guide roller 3, for example.

<Configuration of first conveying roller>
FIG. 5 is an enlarged cross-sectional view showing the first transport roller in the transport mechanism according to the embodiment of the present invention.
The first transport roller 4 shown in FIG. 5 is a roller for transporting the tape T from the supply-side second guide roller 3 toward the exposure stage 51a (processing unit 51) (see FIGS. 1 and 2). The transport roller 4 is intermittently rotated by the motor M2 to transport the tape T frame by frame. The first conveying roller 4 has an adsorption hole 41b for adsorbing the tape T to the roller surface 41a of the roller body 41, and an adsorption means 42 for adsorbing the tape T through the adsorption hole 41b. . For this reason, the first transport roller 4 is configured so that the tape T transported by the rotation of the first transport roller 4 does not idle.

  In addition, the first conveying roller 4 is connected to the motor M2 for rotating the roller main body 41, the apparatus housing 43 that supports the motor M2 and the motor shaft M2a, and the motor shaft M2a, and is sucked by the suction means 42. A rotary shaft 44 having a path 44a and an exhaust part 45 communicating with the intake path 44a and connected to a suction pump (not shown) are provided.

  As shown in FIG. 1, the first transport roller 4 is arranged on the downstream side in the transport direction of the supply side slack absorbing means D1, and the exposure stage so that the tape T is located at the center of the exposure stage 51a. It is arranged directly above the exposure stage 51a so as to be parallel to the surface of 51a.

A roller main body 41 shown in FIG. 5 is a hollow rotating body that is fixed to a rotating shaft 44 that is rotated by a motor M2 and transports a tape T, and has a bobbin shape having flange portions at both ends in the axial direction. In the roller body 41, at least a roller surface 41a around which the tape T is wound is formed of a synthetic resin such as a soft resin having a buffering property so that the fine vibration of the tape T can be easily absorbed.
A number of suction holes 41b are formed in the roller surface 41a. For this reason, the tape T can cool the roller surface 41a when air flows through the suction holes 41b of the wound roller surface 41a.
The roller surface 41a may be stainless steel or a stainless steel thin wire wound closely.

The suction means 42 is a device for sucking the tape T wound around the roller surface 41a of the roller body 41 by the suction force of a suction pump (not shown) and bringing it into close contact with the roller surface 41a. The adsorbing means 42 includes an adsorbing hole 41b that draws in air for sucking the tape T and bringing it into close contact with the roller surface 41a, an inner space 41c into which air sucked from the adsorbing hole 41b is sent, and an inner space of the roller. An intake passage 44a communicated with 41c, an exhaust part 45, and a suction pump are provided.
The first transport roller 4 includes the resin roller main body 41 and the suction means 42 as described above, and is configured so that the tape T can be smoothly transported while being attracted to the roller surface 41a by the negative pressure of air. .

A motor M2 shown in FIG. 5 rotates the roller body 41 in order to intermittently transport the tape T wound around the roller body 41. The motor M2 is electrically connected to the control device 10 and its rotation is controlled (see FIG. 1).
The device housing 43 is a member for supporting the motor M2 and the motor shaft M2a at predetermined positions, and the first transport roller 4 is disposed at a predetermined height by the device housing 43 (see FIG. 1).

  The rotary shaft 44 serves as a shaft for transmitting the rotation of the motor M2 to the roller main body 41 to rotate the roller main body 41, and serves as a pipe for sending air in the roller main body 41 to a suction pump (not shown). It is a member that fulfills. The rotating shaft 44 is connected to the motor shaft M2a at one end and is provided with an exhaust portion 45 of the suction means 42 at the other end. The rotation shaft 44 is provided with a suction port 44b for sucking air in the roller main body 41 at the center, and a discharge port 44c for discharging air to the exhaust unit 45 is provided at the end of the intake passage 44a. Thus, a hollow shape is formed from the suction port 44b to the discharge port 44c.

A suction pump (vacuum pump) (not shown) is connected to the exhaust part 45 through a pipe and a leak valve, and sucks air from the roller surface 41a through the intake passage 44a and the suction hole 41b. This is a negative pressure generating device for sucking the tape T wound around 41a by negative pressure.
In addition, the 2nd conveyance roller 6 mentioned later has the same structure as this 1st conveyance roller 4, for example.

<Configuration of processing unit>
Here, the processing unit 51 shown in FIG. 2 will be described. The processing unit 51 is a device that is disposed directly below the first transport roller 4 and performs a predetermined process on the tape T supplied from the first transport roller 4. The processing unit 51 is disposed along the processing surface at a location where the tape T between the first transport roller 4 and the second transport roller 6 is transported vertically downward. In the present embodiment, the processing unit 51 is an exposure stage 51a that performs an exposure process of the exposure apparatus 5 described later. The exposure stage 51a has a suction hole for sucking the tape T (not shown), and sucks and holds the tape T frame by frame.

<Configuration of second transport roller>
The second transport roller 6 is a roller that is arranged on the downstream side in the transport direction of the exposure stage 51a and transports the tape T processed by the exposure stage 51a to the take-up side, and the first transport roller 4 and the exposure stage 51a. It is arranged directly below (processing unit 51). The second transport roller 6 has the same structure as the first transport roller 4 shown in FIG. 5, and as shown in FIG. 2, suction means 62 for sucking the tape T to the roller surface 61 a of the roller body 61, And a motor M3 for rotating the roller body 61.

<Configuration of winding side first guide roller>
The winding-side first guide roller 7 is a roller that is arranged on the downstream side in the transport direction of the second transport roller 6 and sends the tape T to the winding-side relaxation absorbing means D2. The winding-side first guide roller 7 has the same structure as the supply-side second guide roller 3 shown in FIG. 4, and moves the position of the tape T in the width direction (axial direction) as shown in FIG. A work position adjusting means 72 for adjusting the work position, and a motor M4 as a power source for the work position adjusting means 72.

<Configuration of winding side relaxation absorbing means>
The winding side relaxation absorbing means D2 is disposed at a position where the tape T between the winding side first guide roller 7 and the winding side second guide roller 8 can be stored. The take-up side slack absorbing means D2 is provided between the second transport roller 6 and the take-up side first guide roller 7, and between the take-up side second guide roller 8 and the take-up reel B2. It is a device that absorbs the slack of the tape T. A winding-side first guide roller 7 is arranged on the upstream side in the transport direction of the winding-side relaxation absorbing means D2, and a winding-side second guide is disposed on the downstream side in the transport direction of the winding-side relaxation absorbing means D2. A roller 8 is arranged. The winding side relaxation absorbing means D2 has the same configuration as the supply side relaxation absorbing means D1, for example, and includes a box D2a.
The tape T passing through the winding side relaxation absorbing means D2 is fed from the winding side first guide roller 7 and hangs down in a U shape in the box body D2a due to the weight of the tape T. It is conveyed toward the guide roller 8.

<Configuration of winding side second guide roller>
As shown in FIG. 2, the take-up-side second guide roller 8 is an auxiliary roller for guiding the tape T wound around the take-up reel B2 to be conveyed toward the take-up reel B2. 3 has the same structure as the supply-side first guide roller 2 shown in FIG. The winding-side second guide roller 8 is disposed at a predetermined position by an apparatus housing (not shown) so as to be rotatable around the shaft portion. The winding side second guide roller 8 is arranged so that the tape T conveyed from the winding side relaxation absorbing means D2 is fed obliquely upward from the winding side second guide roller 8. Yes.

<Configuration of take-up reel rotating unit>
As shown in FIG. 2, the take-up reel rotating unit 9 supports the take-up reel B <b> 2 that takes up the tape T processed by the processing unit 51 (exposure device 5), and the shaft cylinder of the take-up reel B <b> 2. It is rotatably arranged around a shaft portion on which the portion is mounted and is driven by a drive motor (not shown).

≪Configuration of exposure system≫
Returning to FIG. 1, the exposure apparatus 5 is an apparatus that exposes the pattern of the mask M one block at a time to the tape T that is transported frame by frame by the transport mechanism A. The exposure apparatus 5 includes a light source 52, a reflecting mirror 53, a fly-eye lens L, a support means 54 that supports a mask M, a projection optical system (for example, a Dyson optical system or a reduced projection optical system) 55, and an imaging. An apparatus 56 and an exposure stage 51a are provided. The exposure apparatus 5 includes a camera data input device 57, an image processing device 58, a storage device 59, a control device 10, and a switch device 12.

  The light source 52 irradiates light including ultraviolet rays having a predetermined wavelength, and includes a lamp 52a and an elliptical mirror 52b disposed so as to cover the rear surface of the lamp 52a. The reflecting mirror 53 is a flat mirror that reflects the light emitted from the light source 52 toward the mask M. The fly-eye lens L is a lens for adjusting the illuminance distribution of the light from the reflecting mirror 53.

  The mask M shown in FIG. 1 is supported by the support means 54 and installed so as to face the projection optical system 55. The support means 54 includes a drive mechanism (not shown) so that it can move in a plane perpendicular to the optical axis of the projection optical system 55.

  Here, the projection optical system 55 is installed such that the incident optical axis and the outgoing optical axis are parallel to the installation surface of the apparatus, and the exposure stage 51a is opposed to the front side. The projection optical system 55 is configured by combining a plurality of lenses, mirrors and the like (not shown).

  The imaging apparatus 56 shown in FIG. 1 has a drive system that can move in a three-dimensional direction between the projection optical system 55 and the exposure stage 51a, and a plurality of CCD cameras are arranged. The CCD camera images the alignment mark formed on one frame of the tape T stationary on the exposure stage 51a and the alignment mark formed on the mask M. As already described, the exposure stage 51a is provided with an exhaust system for evacuating the tape T through an adsorption hole (not shown) and a compressed air system for blowing compressed air. Yes.

  The camera data input device 57 captures an alignment mark of one frame of the tape T and an alignment mark of the mask M captured by the imaging device 56. The image processing device 58 calculates the alignment mark for controlling the exposure device 5. In this image processing device 58, the alignment mark received from the camera data input device 57 is converted into position data for controlling the exposure device 5, and the result is sent to the control device 10 and the storage device 59. The storage device 59 stores position data imaged by the imaging device 56.

The control device 10 controls the transport mechanism A and the entire exposure device 5 and comprises a CPU. The control device 10 aligns the position of the alignment mark of one frame of the tape T and the alignment mark of the mask M based on the position data of the image processing mechanism 58. The mask M is moved by the driving mechanism (not shown) of the support means 54 so as to align with the tape T attracted to the exposure stage 51a, and the tape T and the mask M are aligned. However, if the alignment mark on the tape T and the alignment mark on the mask M are greatly deviated, the distance to move the mask becomes large in the alignment of the positions for each frame. Therefore, when the alignment mark on the tape T and the alignment mark on the mask M are shifted from the threshold value δ or more, the supply-side second guide roller 3, the first transport roller 4, and the second transport roller 6 The winding side first guide roller 7 is controlled. Then, the position of the alignment mark of the tape T on the exposure stage 51a is set within the threshold value δ.
Further, the control device 10 monitors the position of the tape T in the supply side relaxation absorption means D1 and the take-up side relaxation absorption means D2, the attachment / detachment of the tape T in the exposure stage 51a, the movement of the imaging device 56, and the light source 52. Control of blinking and shading and monitoring of all of them are controlled. The switch device 12 is a controller for turning on and off the motors M1, M2, M3, and M4 of the transport mechanism A, a suction pump (not shown), the exposure device 5, and the like.

<Description of positional relationship of each member>
Next, the positional relationship of each member of the transport mechanism A will be described with reference to FIG.
FIG. 6 is a schematic configuration diagram illustrating a transport mechanism according to the embodiment of the present invention.
As shown in FIG. 6, the supply reel rotating unit 1, the supply-side first guide roller 2, the supply-side second guide roller 3, the first conveyance roller 4, the second conveyance roller 6, and the winding-side first The one guide roller 7, the winding side second guide roller 8, and the winding reel rotating portion 9 are arranged on the same plane, and are arranged on substantially the same straight line in the vertical direction when viewed from the front.

  Between the supply reel rotating unit 1 and the first transport roller 4, the tape T is transported substantially obliquely downward as viewed from the side. The tape T is transported vertically downward between the first transport roller 4 and the second transport roller 6. Between the second conveyance roller 6 and the take-up reel B2, the tape T is conveyed substantially obliquely upward as viewed from the side.

The supply reel rotating unit 1 is disposed at a position higher by a height H1 than the supply side first guide roller 2 on the downstream side in the transport direction. The supply side first guide roller 2 is disposed obliquely below the supply reel rotating unit 1, is disposed at a height equal to or higher than the supply side second guide roller 3, and the supply side relaxation absorbing means D1. It is arrange | positioned above the opening part of the box D1a.
The supply side relaxation absorbing means D1 is a tape T that hangs down between the supply side first guide roller 2 and the supply side second guide roller 3 disposed at the same height as the supply side first guide roller 2. It is provided in a position where it can be stored.

The supply-side second guide roller 3 is disposed at a position that is equal to or lower than the supply-side first guide roller 2 and is disposed at a position that is higher than the first conveyance roller 4 by a height H2.
The first transport roller 4, the exposure stage 51a (processing unit 51), and the second transport roller 6 are arranged in a substantially straight line in the vertical direction. The tape T passing through the first transport roller 4 is transported from the supply-side second guide roller 3 obliquely downward, and is wound around the first transport roller 4 so as to be exposed in the vertical direction. The direction is changed toward 51a.

  The exposure stage 51 a (processing unit 51) is disposed at an intermediate position between the first transport roller 4 and the winding-side first guide roller 7. The second transport roller 6 is disposed directly below the exposure stage 51a. The tape T passing through the second transport roller 6 is wound around the second transport roller 6 so as to be turned obliquely upward after being transported in the vertically downward direction.

  The winding-side first guide roller 7 is disposed on the downstream side in the transport direction of the second transport roller 6 and is disposed at a position higher by the height H3 than the second transport roller 6. The take-up side first guide roller 7 is arranged at a position higher than the opening of the take-up side relaxation absorbing means D2, and is arranged at a position lower than the take-up reel rotating section 9 by a height H4.

  The take-up side second guide roller 8 is arranged at a position equal to or higher than the take-up side first guide roller 7 and is arranged at a position lower than the take-up reel rotating part 9 by a height H4, and absorbs the take-up side relaxation. It is disposed above the box D2a of the means D2. The take-up reel rotating unit 9 is disposed obliquely above the take-up side second guide roller 8.

<< Operation of transport mechanism >>
Next, the operation of the transport mechanism A will be described mainly with reference to FIG.
FIG. 7 is a flowchart showing the operation of the transport mechanism according to the embodiment of the present invention.
First, as shown in FIGS. 1 and 2, the tape T, which is a new material before processing, is set in the transport mechanism A so as to be transportable. That is, the supply reel B1 around which the new tape T is wound is set on the supply reel rotating unit 1, and the supply side first guide roller 2, the supply side second guide roller 3 and the first side are pulled out while the leading end of the tape T is pulled out. Each is wound around the transport roller 4 and inserted between the exposure stage 51 a and the imaging device 56. Further, the tape T is wound around the second conveying roller 6, the take-up side first guide roller 7, and the take-up side second guide roller 8, and the take-up reel is attached to the take-up reel rotating part 9. Lock to reel B2. Then, the tape T on the supply side relaxation absorbing means D1 and the winding side relaxation absorbing means D2 is loosened in a U shape in the box bodies D1a and D2a.

Next, the power switch (not shown) of the switch device 12 shown in FIG. 1 is turned on to activate the exposure device 5 and the transport mechanism A (step S1). Then, the lamp 52a of the exposure apparatus 5 is turned on (step S2). At this time, light from the lamp 52a is blocked by a shutter mechanism (not shown).
Then, the conveyance driving motors M2 and M3 disposed on the first conveyance roller 4 and the second conveyance roller 6 shown in FIG. 2 are driven, and the suction pump (not shown) is also driven to remove the tape T from the roller surface. An operation of sending one block while performing adsorption on 41a and 61a is performed.

  As shown in FIG. 2, the supply reel B1 of the supply reel rotating unit 1 is transported by pulling the tape T as the first transport roller 4 and the second transport roller 6 are rotated by driving the motors M2 and M3. Therefore, the tape T is rotated and sent out (step S3).

  The tape T is fed obliquely downward from the supply reel rotating unit 1 and is received so as to be wound around the supply-side first guide roller 2 under its own weight, and the box body of the supply-side relaxation absorbing means D1 by its own weight. It is sent into D1a (step S4).

  In the supply side slack absorbing means D1 between the supply side first guide roller 2 and the supply side second guide roller 3, the tape T hangs down in a U shape in the ground direction due to its own weight. The tape T is conveyed to the supply-side second guide roller 3 in a state in which the slack between the supply reel rotating unit 1 and the first conveyance roller 4 is adjusted and tension is applied by the supply-side relaxation absorbing means D1 (step). S5).

  That is, in the supply side relaxation absorbing means D1, the tape T that has entered the box body D1a from the supply side first guide roller 2 is the same as the transport direction (arrow d direction) due to its own weight as shown in FIG. Pulling in the direction of the arrow e eliminates the slack between the supply reel rotating unit 1 and the supply-side first guide roller 2. Further, the tape T which is pulled by the first transport roller 4 and is fed from the inside of the box D1a toward the supply-side second guide roller 3 (arrow d direction) is reverse to the transport direction (arrow f) by the self-weight of the tape T. (The state in which tension is applied) is conveyed from the box D1a to the supply-side second guide roller 3 and the first conveyance roller 4, so that the slack is eliminated.

Further, the tape T is fed obliquely downward between the supply reel rotating unit 1 and the supply-side first guide roller 2 and between the supply-side second guide roller 3 and the first transport roller 4. Therefore, it is arranged in a state where it is difficult to loosen.
The first transport roller 4 rotates the motor M2 in a state where the tape T is attracted to the roller surface 41a by the adsorbing means 42, thereby transporting one frame of the tape T by changing its direction vertically downward. At this time, the first transport roller 4 is made of synthetic resin, and therefore absorbs vibration of the tape T.

The tape T for one frame transported by the transport mechanism A is attracted by the exposure stage 51a, and one frame of the tape T comes to rest on the exposure stage 51a. Then, the imaging device 56 moved between the projection optical system 55 and the exposure stage 51a images the alignment mark (not shown) displayed on the exposed portion of the tape T and the alignment mark (not shown) of the mask M. (Step S6).
The positional deviation amount and the posture deviation amount between the tape T and the mask M are calculated from both mark images captured by the imaging device 56 and transmitted to the control device 10 (step S7).
In step S8, the mask M is moved by the drive mechanism of the support means 54 based on the positional deviation amount from the control device 10, and the mask M and the tape T are aligned.
Next, the tape T that can be aligned with the mask M on the exposure stage 51a is temporarily fixed on the surface of the exposure stage 51a at a position facing the projection optical system 55 (see FIG. 1), and a shutter mechanism (not shown). , The pattern of the mask M is transferred by irradiating exposure light from the projection optical system 55 (step S9).

  Next, in step S10, the control device 10 determines whether or not the amount of positional deviation between the alignment mark on the tape T and the alignment mark on the mask M is equal to or less than the threshold value δ. If the positional deviation amount is less than or equal to the threshold δ, the process proceeds to step S13, and if the positional deviation amount is greater than the threshold δ, the process proceeds to step S11. That is, when the amount of positional deviation is large, the tape T is often not sent straight to the exposure stage 51a frame by frame. Therefore, if the feed amount and posture of the tape T are controlled, the next frame of the tape T stationary on the exposure stage 51a is accurately fed to the exposure stage 51a. If the tape T is accurately conveyed, the amount of movement of the mask M by the drive mechanism of the support means 54 that supports the mask M is reduced or reduced, and the throughput can be improved. Accordingly, in step S10, it is determined whether or not the positional deviation amount is equal to or smaller than the threshold value δ. If the positional deviation amount is larger than the threshold value δ, the process proceeds to step S11 and step S12 to determine the position of the tape T. The guide roller is controlled so that the amount of deviation is small.

In step S11, the control device 10 sends drive signals to the motor M1 and the motor M4, and moves the supply-side second guide roller 3 and the take-up-side first guide roller 7 in the width direction of the tape T, respectively. To adjust the posture of the tape T.
For example, as shown in FIG. 2, the control device 10 rotates the motors M <b> 1 and M <b> 4 of the supply-side second guide roller 3 and the take-up-side first guide roller 7, so that the roller main bodies 31 and 71 have the axis indicated by the arrow a. When moving in the direction, the tape T moves in the width direction of the arrow b. The supply-side second guide roller 3, the first conveyance roller 4, the second conveyance roller 6, and the winding-side first guide roller 7 are arranged in parallel to each other. When the take-side first guide roller 7 is moved in the axial direction indicated by the arrow a, the tape T conveyed between the first conveying roller 4 and the second conveying roller 6 (exposure stage 51a) extends in the width direction indicated by the arrow c. The position and inclination (posture) of the tape T in the width direction are adjusted by moving the tape T.

Further, in step S12, the control device 10 controls the number of rotations of the motor M2 of the first transport roller 4 and the motor M3 of the second transport roller 6 so that the alignment mark on the mask M and the alignment mark on the tape T are aligned. Adjust the feed amount so that it is conveyed and adjust the vertical position. Since the first transport roller 4 and the second transport roller 6 have the suction means 42, the roller surface does not slip and can accurately transport one frame.
In this way, the transport mechanism A can accurately transport the tape T to the exposure stage 51a by adjusting the width direction and the feed amount of the tape T.

  The tape T that has passed through the exposure stage 51a is attracted to the roller surface 61a by the suction means 62 of the second transport roller 6 along with the driving of the first transport roller 4 and the second transport roller 6, and is substantially horizontal while being pulled vertically downward. The conveying direction is converted into the direction, and the sheet is sent to the winding side relaxation absorbing means D2 via the winding side first guide roller 7 (step S13).

  The tape T adjusted in tension by the winding side relaxation absorbing means D2 in the same manner as the supply side relaxation absorbing means D1 receives the tape T from the winding side relaxation absorbing means D2 by the winding side second guide roller 8, and takes up the winding reel. The take-up reel B2 mounted on the rotary unit 9 is rotated to rotate (step S14).

  Thus, the transport mechanism A adjusts the vertical feed amount of the tape T on the exposure stage 51a by the first transport roller 4 and the second transport roller 6, and supplies the second guide roller 3 on the supply side and the take-up side. The first guide roller 7 adjusts the inclination direction of the tape T on the exposure stage 51a. For this reason, when the amount of positional deviation is larger than the threshold value δ, the amount of movement of the mask M is reduced, so that throughput can be improved and alignment with a highly accurate mask can be performed. Further, in the exposure stage transport path, at a portion where the tape T is transported in a substantially horizontal direction (obliquely downward direction, obliquely upward direction), a tensile force (tension) is applied in the direction opposite to the transport direction due to the weight of the tape T and loosens. Is absorbed. As a result, the transport mechanism A transports the tape T to the exposure device 5 in a stable state and sends it so that it can be accurately transferred to a predetermined circuit pattern, and rotates the take-up reel of the tape T processed by the exposure device 5. The winding reel B2 of the portion 9 can be smoothly wound up.

  The present invention is not limited to the embodiments, and various modifications and changes can be made within the scope of the technical idea. Of course, the present invention extends to these modifications and changes. It is.

≪Modification≫
Next, a modified example of the transport mechanism according to the embodiment of the present invention will be described with reference to FIG.
In addition, in a modification, description of the member which has the same function as the conveyance mechanism A which concerns on embodiment shown in FIGS. 1-7 is abbreviate | omitted.
FIG. 8 is a view showing a modified example of the transport mechanism according to the embodiment of the present invention, and is an enlarged schematic view of the main part showing the installation state of the work connecting means.

The transport mechanism A according to the embodiment (see FIGS. 1 and 2) connects a workpiece between the supply reel rotating unit 1 and the supply-side first guide roller 2 like the transport mechanism A1 of the modification shown in FIG. You may interpose so that the means 11 can be installed.
In this case, the workpiece connecting means 11 is arranged at a position higher than the supply side relaxation absorbing means D1 on the upstream side in the transport direction of the supply side relaxation absorbing means D1.
As shown in FIG. 8, the work connecting means 11 is a connection for connecting the tail T2a of the tape T2 being processed in the exposure stage 51a (see FIG. 1) and the most advanced portion T1a of the next new tape T1. Device. The workpiece connecting means 11 is, for example, a thermocompression bonding of a stage 11a whose surface is coated with Teflon (registered trademark), a holding portion 11c arranged on the stage 11a and holding the tape T1, and the tape T1 and the tape T2. And a crimping portion 11b.

Next, connection of the tapes T1 and T2 will be described.
When the tape T2 comes close to the final end in a series of processing steps, the operation of the transport mechanism A is stopped, and the tail T2a of the tape T2 wound around the supply reel rotating unit 1 is transferred to the supply side relaxation absorbing means D1. Place on the upper stage 11a. The upper position of the supply side relaxation absorbing means D1 where the stage 11a is disposed is the closest position where the tape T2 that has been processed up to now is wound around the supply side first guide roller 2, and the tapes T1 and T2 Easy connection.

The tail T2a of the tape T2 is placed at the center of the stage 11a, and the tape T2 is pressed by the holding portion 11c. Then, the leading edge T1a of the new tape T1 is superposed on the tail T2a of the tape T2 being processed, and pressed against the tapes T1 and T2 and bonded by thermocompression bonding.
As described above, since the transport mechanism A1 includes the workpiece connecting means 11 in the transport path, the tapes T1 and T2 can be connected in a short time, so that work efficiency can be improved.

≪Other variations≫
The supply side relaxation absorbing means D1 and the winding side relaxation absorbing means D2 shown in FIGS. 1 and 2 may be any one that absorbs the slack of the tape T in the transport path or applies tension to the tape T. For example, the supply side relaxation absorbing means D1 and the winding side relaxation absorbing means D2 are a box D1a into which the tape T is fed, and a tape T that blows air toward the opening of the box D1a and passes over the opening. An air dancer including a fan that hangs down in a U shape may be used.

  Further, the supply side relaxation absorbing means D1 and the winding side relaxation absorbing means D2 place a roller that can move up and down and rotate on the tape T, and use the weight of the roller to transport the tape T in the transport direction. Alternatively, a roller dancer that absorbs the slack of the tape T by pulling the tape T in a U-shape by pulling in the direction opposite to the conveyance direction may be used.

Further, in the embodiment, the case where the motors M2 and M3 for transporting the tape T are installed in the first transport roller 4 and the second transport roller 6 has been described as an example, but all the other rollers and reels are described. Alternatively, a conveyance motor may be installed. That is, the supply reel rotation unit 1, the supply side first guide roller 2, the supply side second guide roller 3, the take-up side first guide roller 7, the take-up side second guide roller 8, and the take-up reel rotation unit 9 Alternatively, a conveyance motor may be installed.
In this way, the tape T can be fed out from the supply reel rotating unit 1 more smoothly, and the tape T can be wound up more smoothly at the take-up reel rotating unit 9.

  In the embodiment, the case where the suction holes 41b and 61b and the suction means 42 and 62 are installed in the first and second transport rollers 4 and 6 has been described as an example, but the supply side first and second guide rollers 2 and 2 are described. 3 and the winding side first and second guide rollers 7 and 8 may be similarly provided with suction holes and suction means. In this way, the tape T can be transported more smoothly.

Furthermore, the processing unit 51 is not limited to the exposure apparatus 5, and may be, for example, an inspection apparatus for tape T, a hoop forming apparatus, or other machines.
In addition, when using the process part 51 as a hoop shaping | molding apparatus, you may make it the cutting device which cuts the take-up reel rotation part 9 for every part block.

It is a block diagram which shows the conveyance mechanism which concerns on embodiment of this invention. It is a schematic perspective view which shows the conveyance mechanism which concerns on embodiment of this invention. It is an expanded sectional view showing the supply side 1st guide roller in the conveyance mechanism concerning an embodiment of the present invention. It is an expanded sectional view showing the supply side 2nd guide roller in the conveyance mechanism concerning an embodiment of the present invention. It is an expanded sectional view showing the 1st conveyance roller in the conveyance mechanism concerning an embodiment of the present invention. It is a schematic block diagram which shows the conveyance mechanism which concerns on embodiment of this invention. It is a flowchart which shows the action | operation of the conveyance mechanism which concerns on embodiment of this invention. It is a figure which shows the modification of the conveyance mechanism which concerns on embodiment of this invention, and is the principal part expansion schematic which shows the installation state of a workpiece | work connection means.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Supply reel rotation part 2 Supply side 1st guide roller 3 Supply side 2nd guide roller 4 1st conveyance roller 5 Exposure apparatus 6 2nd conveyance roller 7 Winding side 1st guide roller 8 Winding side 2nd guide roller 9 Winding Reel reel rotating part 11 Work connection means 32 Work position adjusting means 41, 61 Roller body 41a, 61a Roller surface 41b Adsorption hole 42, 62 Adsorption means 51 Processing part 51a Exposed stage A, A1 Conveying mechanism B1 Supply reel B2 Take-up reel
D1 Supply side relaxation absorption means D2 Winding side relaxation absorption means M Mask T Tape (workpiece)
T1 New tape (new work)
T1a Cutting edge T2 Processing tape (work being processed)
T2a tail

Claims (9)

A transport mechanism for transporting and processing a tape-shaped workpiece on a processing unit provided in a vertical direction,
A supply reel rotating unit that rotates a supply reel that feeds the workpiece;
A supply-side first guide roller and a supply-side second guide roller for guiding the work fed from the supply reel by rotation of the supply reel rotating unit;
Supply side relaxation absorbing means for applying tension to the workpiece between the supply side first guide roller and the supply side second guide roller;
A first conveying roller and a second conveying roller that convey the workpiece from the supply-side second guide roller along the processing unit and are disposed above and below the processing unit;
A winding-side first guide roller and a winding-side second guide roller for guiding the workpiece from the second conveying roller;
Winding side relaxation absorbing means for applying tension to the workpiece between the winding side first guide roller and the winding side second guide roller;
A take-up reel rotating unit that rotates a take-up reel that takes up the work from the take-up side second guide roller;
The supply reel rotating unit is disposed at a position higher than the supply side first guide roller;
The supply-side second guide roller is disposed at a position equal to or lower than the supply-side first guide roller, and is disposed at a position higher than the first transport roller,
The take-up reel rotating part is disposed at a position higher than the take-up-side second guide roller,
The take-up side second guide roller is arranged at a position equal to or higher than the take-up side first guide roller, and is arranged at a position lower than the take-up reel rotating part.   The supply-side second guide roller and the take-up-side first guide roller correspond to the supply-side second guide roller and the take-up-side first guide roller according to the positional deviation amount of the workpiece on the processing unit. The transport apparatus according to claim 1, further comprising a work position adjusting unit that moves the work in an axial direction.   3. The transport device according to claim 1, wherein the first transport roller and the second transport roller have a roller body formed of a synthetic resin.   A work connection means for connecting the rear end of the work being processed by the processing section and the leading edge of the next new work is installed and removed between the supply reel and the first guide roller on the supply side. The conveying apparatus according to any one of claims 1 to 3, wherein the conveying apparatus is provided freely.   The said process part is an exposure stage for exposing the pattern of a mask to the workpiece | work conveyed frame by frame by the said conveying apparatus, The Claim 1 thru | or 4 characterized by the above-mentioned. Conveying device. When the amount of positional deviation of the workpiece on the processing unit is less than or equal to a threshold value, the amount of positional deviation between one frame of the workpiece stationary on the exposure stage and the mask is approximately To zero,
When the amount of positional deviation of the workpiece on the processing unit is larger than a threshold value, the next frame of the one frame of the workpiece stationary on the exposure stage moves to a predetermined position on the exposure stage. The transport apparatus according to claim 5, wherein the supply-side second guide roller and the winding-side first guide roller move in the axial direction. When the amount of positional deviation of the workpiece on the processing unit is less than or equal to a threshold value, the amount of positional deviation between one frame of the workpiece stationary on the exposure stage and the mask is approximately To zero,
When the amount of positional deviation of the workpiece on the processing unit is larger than a threshold value, the next frame of the one frame of the workpiece stationary on the exposure stage moves to a predetermined position on the exposure stage. The conveying apparatus according to claim 5, wherein a feed amount of the workpiece by the first conveying roller and the second conveying roller is set.   The first transport roller and the second transport roller have suction holes for attracting the work to the roller surface, and are connected to suction means for sucking the work through the suction holes. The transport apparatus according to claim 1, wherein   The supply side first guide roller, the supply side second guide roller, the take-up side first guide roller, and the take-up side second guide roller have suction holes for attracting the work to the roller surface, The conveying device according to any one of claims 1 to 8, wherein a suction unit for sucking the workpiece is connected through the suction hole.