CN104810314A - Industrial robot - Google Patents
Industrial robot Download PDFInfo
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- CN104810314A CN104810314A CN201510039803.2A CN201510039803A CN104810314A CN 104810314 A CN104810314 A CN 104810314A CN 201510039803 A CN201510039803 A CN 201510039803A CN 104810314 A CN104810314 A CN 104810314A
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- arm
- motor
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- hand
- main part
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- 238000001514 detection method Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000009471 action Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 230000003028 elevating effect Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000003638 chemical reducing agent Substances 0.000 description 3
- 230000008602 contraction Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000011553 magnetic fluid Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention discloses an industrial robot. There is no need of the adjustment of the storage of the absolute rotation position information of a motor in a coder after reassembly even if the robot is reassembled after assembly and adjustment. The robot (1) comprises a plurality of motors (23, 24, 31, 40) which are used for driving a hand (8) and an arm (9). A main body part (10) and the arm (9) are connected through screws under the condition of being positioned by a positioning part, and the arm (9) and the hand (8) are connected through screws under the condition of being positioned by a positioning part. The main body part (10), the arm (9) and the hand (8) can be segmented. In the robot (1), the motors (23, 24), the coders of the motors (23, 24) and a battery (25) connected with the coders are disposed on the arm (9), and are disposed in the main body part (10).
Description
Technical field
The present invention relates to the industrial robots such as a kind of horizontal articulated robot.
Background technology
In the past, a kind of industrial robot (such as with reference to patent documentation 1) carrying semiconductor crystal wafer was known to.The arm that the industrial robot recorded in patent documentation 1 comprises two hands loading semiconductor crystal wafer, two hands can be connected with its end side rotationally and the base end side of arm can connected main parts rotationally.Arm is made up of the first arm, the second arm and the 3rd arm, the base end side of described first arm can be connected with main part rotationally, the base end side of described second arm can be connected with the end side of the first arm rotationally, the base end side of described 3rd arm can be connected with the end side of the second arm rotationally, and two hands are connected with the end side of described 3rd arm.
In the industrial robot that patent documentation 1 is recorded, the first drive motor is configured in the inside of main part, and described first drive motor is used for making the first arm rotate relative to main part and the second arm is rotated relative to the first arm.The second drive motor for making the 3rd arm rotate relative to the second arm is had in the internal configurations of the second arm.Have in the internal configurations of the 3rd arm and make two hands respectively relative to two hand drive motors that the 3rd arm rotates.
Further, the industrial robot recorded in patent documentation 1 comprises the first encoder of the encoder of the position of rotation as detection first drive motor, the hand encoder as the second encoder of the encoder of the position of rotation of detection second drive motor and the encoder as the position of rotation of detection hand drive motor.When this industrial robot is arranged at the manufacturing system of semiconductor, industrial robot is adjusted, the information of the absolute rotational position of the first drive motor is stored in the first encoder, the information of the absolute rotational position of the second drive motor is stored in the second encoder, the information of the absolute rotational position of hand drive motor is stored in hand encoder.
Patent documentation 1: Japanese Unexamined Patent Publication 2011-230256 publication
In industrial robot, have the industrial robot being configured at and using in vacuum chamber, but the industrial robot be configured in recent years in vacuum chamber there is the trend of maximization.Therefore, after industrial robot is configured in vacuum chamber, in narrow vacuum chamber, for making the hand of large-scale industrial robot and arm action and the information of the absolute rotational position of motor to be stored in the adjustment of encoder difficult all the more.And, due to generally can not from the outside of vacuum chamber by the inside of visual confirmation vacuum chamber, therefore, carried out in vacuum chamber for making the hand of industrial robot and arm action and the information of the absolute rotational position of motor to be stored in the adjustment of encoder more difficult in the past.
At this, if main part configuration and first encoder of the industrial robot such as recorded in patent documentation 1, the battery that second encoder and hand connect with encoder, and after maquila has assembled industrial robot, industrial robot is adjusted, the information of the absolute rotational position of the first drive motor is stored in the first encoder, the information of the absolute rotational position of the second drive motor is stored in the second encoder, the information of the absolute rotational position of hand drive motor is stored in hand encoder, then industrial robot to deliver to from maquila be arranged on semiconductor manufacturing system during, the information of the absolute rotational position of each motor being stored in each encoder can be kept by the electric power provided from battery.Therefore, in this case, need not carry out for making the hand of industrial robot recorded in patent documentation 1 and arm in vacuum chamber action, and make the information of the absolute rotational position of motor be stored in the adjustment of encoder.
On the other hand, as mentioned above, the industrial robot be configured in vacuum chamber has the trend of maximization.Therefore, if move into vacuum chamber after such as the industrial robot carried out at maquila after assembling, adjustment not being resolved into hand, arm and main part, and again assemble at vacuum chamber, then large-scale industrial robot cannot be configured in vacuum chamber, such situation is occurring always.
In the industrial robot that patent documentation 1 is recorded, if such as the industrial robot carried out after assembling, adjustment is resolved into hand, arm and main part, even if be then configured with battery at main part, the information of the absolute rotational position of the information being stored in the absolute rotational position of the second drive motor of the second encoder and the hand drive motor being stored in hand encoder also can be reset.Therefore, when the large-scale industrial robot recorded in patent documentation 1 is configured in vacuum chamber, after assembling in vacuum chamber, must adjust again industrial robot, the information of the absolute rotational position of the second drive motor is stored in the second encoder, and the information of the absolute rotational position of hand drive motor is stored in hand encoder.But, as mentioned above, in vacuum chamber, for making the hand of large-scale industrial robot or arm action and the adjustment information of the absolute rotational position of motor being stored in encoder is difficult to carry out.
Summary of the invention
Therefore, problem of the present invention is to provide a kind of industrial robot, even if described industrial robot is decomposed and is again assembled after assembling, adjustment, after again assembling, the adjustment being stored in encoder for the information of the absolute rotational position by motor also need not be carried out.
In order to solve above-mentioned problem, industrial robot of the present invention comprises hand, arm, main part and multiple motor, hand can be connected with the end side of described arm rotationally, the base end side of arm can be connected with described main part rotationally, described multiple motor is for driving hand and arm, the feature of industrial robot is, industrial robot by under the state of being located by positioning element by screw connect and the plural dividing body that can split form, motor and the encoder for the position of rotation that detects motor is had in the internal configurations of at least two dividing bodies, and the battery be connected with encoder is had in the internal configurations of the dividing body being configured with motor and encoder.
Industrial robot of the present invention is made up of the plural dividing body that can split, and has the battery be connected with encoder in the internal configurations of the dividing body being configured with motor and encoder.Therefore, in the present invention, even if the industrial robot after maquila has carried out assembling, adjustment is divided into plural dividing body, the electric power provided from the battery of the inside of the dividing body being configured with motor and encoder also can be provided, the information of the motor absolute rotational position stored at maquila is continued to be held in encoder.Therefore, in the present invention, even if industrial robot is decomposed and is again assembled after assembling, adjustment, also the adjustment being stored in encoder for the information of the absolute rotational position by motor need not can be carried out after again assembling.Further, in the present invention, dividing body connects by screw each other under the state of being located by positioning element, therefore easy assembly industry robot again.
In the present invention, such as, hand, arm and main part become dividing body, have motor, encoder and battery in the inside of arm and the internal configurations of main part.And, in the present invention, also can be that hand comprises the hand fork of loading conveying object and is fixed with hand fork and the hand base portion be connected with the end side of arm, hand fork, hand base portion, arm and main part become dividing body, and have motor, encoder and battery in the inside of arm and the internal configurations of main part.In this case, industrial robot can be split relatively easily.
In the present invention, such as arm is made up of first arm that mutually can connect in relative rotation and the second arm, the base end side of the first arm can be connected with main part rotationally, the base end side of the second arm can be connected with the end side of the first arm rotationally, hand can be connected with the end side of the second arm rotationally, the first motor as the motor for making the second arm rotate relative to the first arm is had in the internal configurations of arm, as the second motor of the motor for making palmistry rotate for the second arm, as the first encoder of the encoder of the position of rotation of detection first motor, as the second encoder of the encoder of the position of rotation of detection second motor and the first battery as the battery be connected with the first encoder and the second encoder, the 3rd motor as the motor for making the first arm rotate relative to main part is had in the internal configurations of main part, as the 4th motor of the motor for making arm be elevated, as the 3rd encoder of the encoder of the position of rotation of detection the 3rd motor, as the 4th encoder of the encoder of the position of rotation of detection the 4th motor and the second battery as the battery be connected with the 3rd encoder and the 4th encoder.
In the present invention, such as arm is made up of first arm that mutually can connect in relative rotation and the second arm, the base end side of the first arm can be connected with main part rotationally, the base end side of the second arm can be connected with the end side of the first arm rotationally, hand can be connected with the end side of the second arm rotationally, when observing from above-below direction, first arm relative to main part center of rotation and the second arm relative to the first arm center of rotation between distance with the second arm relative to the first arm center of rotation and palmistry for the second arm center of rotation between distance equal, and configure successively from downside and assemble body, arm and hand, described arm is in center of rotation and the palmistry of the first arm relative to main part for the overlapping in the vertical direction state of the center of rotation of the second arm.In this case, by the first arm relative to the center of rotation of main part and palmistry for disposal subject portion, arm and hand in order on the axle center of the center of rotation of the second arm, can assembly industry robot.Therefore, assembly industry robot is easier to.
In the present invention, such as at least hand and arm are configured in vacuum chamber.For making the action the information of the absolute rotational position of motor to be stored in the adjustment of encoder more difficult in narrow vacuum chamber of the hand of large-scale industrial robot and arm, but in the present invention, the adjustment being stored in encoder for the information of the absolute rotational position by motor can be carried out in vacuum chamber.
Invention effect
As mentioned above, in the present invention, even if industrial robot is decomposed and again assembles after assembling, adjustment, also the adjustment being stored in encoder for the information of the absolute rotational position by motor need not can be carried out after again assembling.
Accompanying drawing explanation
Fig. 1 is the vertical view that the state industrial robot involved by embodiments of the present invention being assembled into the manufacturing system of OLED display is shown.
Fig. 2 (A), (B) are the figure of the industrial robot shown in Fig. 1, Fig. 2 (A) is vertical view, and Fig. 2 (B) is end view.
The vertical view of Fig. 3 to be the arm of the industrial robot shown in Fig. 2 be contraction state.
Fig. 4 is the cutaway view for the internal structure of the industrial robot shown in key diagram 2 from the side.
(symbol description)
1 robot (industrial robot)
4 chambers (transition chamber thereof, vacuum chamber)
8 hands (dividing body)
9 arms (dividing body)
10 main parts (dividing body)
15 hand base portions (dividing body)
16 hand forks (dividing body)
18 first arms
19 second arms
23 motors (the first motor)
24 motors (the second motor)
25 batteries (the first battery)
31 motors (the 3rd motor)
40 motors (the 4th motor)
45 batteries (the second battery)
Embodiment
Referring to accompanying drawing, embodiments of the present invention are described.
(structure of industrial robot)
Fig. 1 is the vertical view that the state industrial robot 1 involved by embodiments of the present invention being assembled into the manufacturing system 3 of OLED display is shown.Fig. 2 (A), (B) are the figure of the industrial robot 1 shown in Fig. 1, Fig. 2 (A) is vertical view, and Fig. 2 (B) is end view.Fig. 3 is the vertical view of arm 9 in contraction state of the industrial robot 1 shown in Fig. 2.Fig. 4 is the cutaway view of the internal structure for the industrial robot 1 from the side shown in key diagram 2.
Industrial robot 1 (hereinafter referred to as " robot 1 ") in the manner is the robot for carrying the glass substrate 2 (hereinafter referred to as " substrate 2 ") as organic EL (organic field luminescence) display of conveying object.As shown in Figure 1, this robot 1 be assembled into OLED display manufacturing system 3 and use horizontal articulated robot.
The transition chamber thereof 4 (hereinafter referred to as " chamber 4 ") that manufacturing system 3 comprises the center of being configured in and the multiple process chambers 5 (hereinafter referred to as " chamber 5 ") configured in the mode of surrounding chamber 4.The inside of chamber 4,5 is vacuum.That is, chamber 4,5 is vacuum chambers.A part for robot 1 is had in the internal configurations of chamber 4.Robot 1 stretches in chamber 5 by the hand fork described later 16 forming robot 1, carrying substrate 2 between multiple chamber 5.Be configured with various devices etc. at chamber 5, and be accommodated with the substrate 2 carried by robot 1.Further, various process is carried out at chamber 5 pairs of substrates 2.
As shown in Fig. 2 (A) to Fig. 4, the main part 10 that robot 1 comprises the hand 8 of mounting substrate 2, arm 9 that hand 8 can be connected with its end side rotationally and can be connected with the base end side of arm 9 rotationally.Main part 10 comprise be connected with the base end side of arm 9 lifting unit 11, make the elevating mechanism 12 that lifting unit 11 is elevated and the housing 13 receiving lifting unit 11 and elevating mechanism 12.Housing 13 is formed as roughly bottomed cylindrical.The flange 14 being formed as discoideus is fixed with in the upper end of housing 13.The through hole of the upper end side part for configuring lifting unit 11 is formed at flange 14.
Hand 8 and arm 9 are configured in the upside of main part 10.As mentioned above, a part for robot 1 is configured in the inside of chamber 4.Specifically, the inside being partly arranged at chamber 4 of the top side, lower surface of the ratio flange 14 of robot 1.That is, the ratio flange 14 of robot 1 top side, lower surface be partly arranged in vacuum area VR, hand 8 and arm 9 are configured in (in vacuum) in vacuum chamber.And the lower surface of the ratio flange 14 of robot 1 on the lower be partly arranged at (in air) in atmosphere zone AR.
Hand 8 comprises four hand forks 16 of hand the base portion 15 and mounting substrate 2 be connected with the end side of arm 9.Hand fork 16 is formed as linearity.Two hand forks 16 in four hand forks 16 configure with the states parallel at the mutual interval across specifying.These two hand forks 16 are fixed on hand base portion 15 in the mode outstanding to the side of horizontal direction from hand base portion 15.Two remaining hand forks 16 are to be fixed on hand base portion 15 from hand base portion 15 towards the mode that the side that two hand forks 16 with outstanding to the side of horizontal direction from hand base portion 15 are contrary is outstanding.
Arm 9 is made up of first arm 18 that mutually can connect in relative rotation and these two arms of the second arm 19.First arm 18 and the second arm 19 are formed as hollow form.That is, arm 9 entirety is formed as hollow form.The base end side of the first arm 18 can be connected with main part 10 rotationally.The base end side of the second arm 19 can be connected with the end side of the first arm 18 rotationally.Hand 8 can be connected with the end side of the second arm 19 rotationally.Second arm 19 is configured in the position than the first top side of arm 18.Further, hand 8 is configured in the position than the second top side of arm 19.
Arm 9 becomes joint portion 20 with the connecting portion (i.e. the connecting portion of the first arm 18 and main part 10) of main part 10.The connecting portion of the first arm 18 and the second arm 19 becomes joint portion 21.Arm 9 becomes joint portion 22 with the connecting portion (i.e. the connecting portion of the second arm 19 and hand 8) of hand 8.First arm 18 relative to main part 10 center of rotation and the second arm 19 relative to the first arm 18 center of rotation between distance with the second arm 19 relative to the first arm 18 center of rotation and hand 8 relative to the second arm 19 center of rotation between distance equal.
The motor 23 for making the second arm 19 rotate relative to the first arm 18 and the motor 24 for making hand 8 rotate relative to the second arm 19 is had in the internal configurations of the first arm 18 being formed as hollow form.Further, the battery 25 having the encoder of the position of rotation detecting motor 23 (omitting diagram) in the internal configurations of the first arm 18, detect the encoder (omitting diagram) of the position of rotation of motor 24 and be connected with these two encoders.Motor 23 in the manner is first motors, and motor 24 is second motors.Further, the encoder detecting the position of rotation of motor 23 is the first encoder, and the encoder detecting the position of rotation of motor 24 is the second encoder, and battery 25 is first batteries.
Be configured with at joint portion 21 and the rotation of motor 23 slowed down and is passed to the reductor 26 of the second arm 19.Further, hollow rotating shaft 27 is configured with at joint portion 21.Reductor 26 is the hollow reducer being formed with through hole at the center of radial direction, and hollow rotating shaft 27 is configured in the inner circumferential side of reductor 26.Motor 23 is connected with the input side of reductor 26 by belt wheel and driving-belt.The outlet side of reductor 26 is connected with the base end side of the second arm 19.The housing of reductor 26 is connected with the end side of the first arm 18.When motor 23 rotates, the power of motor 23 is passed to the base end side of the second arm 19 by reductor 26 etc., the second arm 19 rotates.
Motor 24 is connected with the lower end side of hollow rotating shaft 27 by belt wheel and driving-belt.Be configured with at joint portion 22 and the rotation of motor 24 slowed down and is passed to the reductor 28 of hand 8.Reductor 28 is the hollow reducer being formed with through hole at the center of radial direction.The upper end side of hollow rotating shaft 27 is connected with the input side of reductor 28 by belt wheel and driving-belt.The outlet side of reductor 28 is connected with the hand base portion 15 of hand 8.The housing of reductor 28 is connected with the end side of the second arm 19.When motor 24 rotates, the power of motor 24 is passed to the hand base portion 15 of hand 8 by hollow rotating shaft 27 and reductor 28 etc., hand 8 rotates.
The inside of the first arm 18 and the inside of the second arm 19 are sealed, and the internal pressure of the internal pressure of the first arm 18 and the second arm 19 is atmospheric pressure.That is, motor 23,24, reductor 26,28 and battery 25 configure in an atmosphere.Further, battery 25 is configured in the inside of the base end side of the first arm 18.Being configured with the magnetic fluid seal of the sealing state of the inside for guaranteeing the first arm 18 at joint portion 21, being configured with the magnetic fluid seal of the sealing state of the inside for guaranteeing the second arm 19 at joint portion 22.In addition, the inside of the first arm 18 is communicated with by the inner circumferential side of hollow rotating shaft 27 with the inside of the second arm 19.
At lifting unit 11, the motor 31 for making the first arm 18 rotate relative to main part 10 is installed.Further, lifting unit 11 comprise the base end side being fixed on the first arm 18 hollow rotating shaft 32, the rotation of motor 31 slowed down and is passed to the reductor 33 of the first arm 18 and keeps the housing of reductor 33 and hollow rotating shaft 32 remained the roughly cylindric holding member 34 that can rotate.
Reductor 33 is the hollow reducer being formed with through hole at the center of radial direction.This reductor 33 configures in the mode that the axle center of through hole is consistent with the axle center of hollow rotating shaft 32.Motor 31 is connected with the input side of reductor 33 by belt wheel and driving-belt.The lower end of hollow rotating shaft 32 is fixed with at the outlet side of reductor 33.The lower surface of the base end side of the first arm 18 is fixed on the upper end of centre rotational axis 32.Hollow rotating shaft 32 is configured in the inner circumferential side of holding member 34, and is configured with bearing between the outer peripheral face and the inner peripheral surface of holding member 34 of hollow rotating shaft 32.When motor 31 rotates, the power of motor 31 is passed to the first arm 18, the first arm 18 by hollow rotating shaft 32 and reductor 33 etc. and rotates.
The motor 40 that elevating mechanism 12 comprises the screw component 38 using above-below direction as axial arrangement, the nut part 39 engaged with screw component 38 and screw component 38 is rotated.Screw component 38 can be installed on the bottom surface side of housing 13 rotatably.Motor 40 is arranged on the bottom surface side of housing 13.Screw component 38 is connected with motor 40 by belt wheel and driving-belt.Nut part 39 is installed on lifting unit 11 by the bracket of specifying.When motor 40 rotates, screw component 38 rotates, and lifting unit 11 and nut part 39 are together elevated.That is, when motor 40 rotates, arm 9 and lifting unit 11 are together elevated.
The internal pressure of housing 13 is atmospheric pressure.The magnetic fluid seal preventing air from flowing out to vacuum area VR is configured with at joint portion 20.Further, the retractable sack for preventing air from flowing out to vacuum area VR is configured with at joint portion 20.In addition, be formed with the through hole be communicated with the inner circumferential side of hollow rotating shaft 32 at the lower surface of the base end side of the first arm 18, the inside of the first arm 18 is communicated with the inside for atmospheric housing 13.
The battery 45 having the encoder of the position of rotation detecting motor 31 (omitting diagram) in the internal configurations of housing 13, detect the encoder (omitting diagram) of the position of rotation of motor 40 and be connected with these two encoders.That is, the encoder of the position of rotation detecting motor 31, the encoder detecting the position of rotation of motor 40 and the battery 45 be connected with these two encoders is had in the internal configurations of main part 10.Motor 31 in the manner is the 3rd motors, and motor 40 is the 4th motors.Further, the encoder detecting the position of rotation of motor 31 is the 3rd encoder, and the encoder detecting the position of rotation of motor 40 is the 4th encoder, and battery 45 is second batteries.
In the robot 1 formed like this, when completing assembling at maquila, adjust, the information of the absolute rotational position of motor 23,24,31 and 40 is stored in respective encoder respectively.Further, after maquila completes assembling, adjustment, when robot 1 being delivered from maquila, robot 1 is resolved into main part 10, arm 9, hand base portion 15 and hand fork 16, and be carried to manufacturing system 3.Or after maquila has carried out assembling, adjustment, before robot 1 is arranged on manufacturing system 3, robot 1 is resolved into main part 10, arm 9, hand base portion 15 and hand fork 16.Under this decomposing state, main part 10 is fixed on the framework of chamber 4, and arm 9, hand base portion 15 and hand fork 16 are moved in chamber 4, again assemble robot 1.
Robot 1 is resolved into main part 10, arm 9, hand base portion 15 and four hand forks 16 as prerequisite after maquila assembling, adjustment, as shown in Figure 4, the robot 1 of the manner can be divided into main part 10, arm 9, hand base portion 15 and four hand forks 16.Specifically, main part 10 and arm 9 are (more particularly, first arm 18 and hollow rotating shaft 32) be interconnected by screw under the state of being located by positioning elements such as alignment pins, arm 9 and hand base portion 15 are (more particularly, be held in outlet side and the hand base portion 15 of the reductor 28 of the second arm 19) be interconnected by screw under the state of being located by positioning elements such as alignment pins, hand base portion 15 and four hand forks 16 are interconnected by screw under the state of being located by positioning elements such as alignment pins.Main part 10 in the manner, arm 9, hand base portion 15 and hand fork 16 connect and the dividing body that can split by screw under the state of being located by alignment pin.
And, the robot 1 of the manner can by from downside successively disposal subject portion 10, arm 9 (with reference to Fig. 3) and hand 8 assemble, described arm 9 is in center of rotation and the hand 8 of the first arm 18 relative to main part 10 relative to the center of rotation of the second arm 19 in the overlapping state of above-below direction.That is, robot 1 can by from downside, the arm 9 of disposal subject portion 10, contraction state, hand base portion 15 and four hand forks 16 assemble successively.
(main efficacy results of the manner)
As described above, in the manner, form robot 1 by main part 10, arm 9, hand base portion 15 and four hand forks 16, described main part 10, arm 9, hand base portion 15 and four hand forks 16 connect by screw and can split under the state of being located by positioning element.And, in the manner, there is battery 25 in the internal configurations of arm 9 of encoder of the position of rotation being configured with motor 23,24 and detecting motor 23,24, have battery 45 in the internal configurations of main part 10 of encoder of the position of rotation being configured with motor 31,40 and detecting motor 31,40.
Therefore, in the manner, even if the industrial robot 1 after maquila has carried out assembling, adjustment is broken down into main part 10, arm 9, hand base portion 15 and four hand forks 16, also can by the electric power provided from battery 25, the information of the absolute rotational position of the motor 23,24 stored at maquila is continued to be held in encoder, and the electric power by providing from battery 45, the information of the absolute rotational position of the motor 31,40 stored at maquila is continued to be held in encoder.Therefore, in the manner, even if robot 1 is decomposed and again assembles after carrying out assembling, adjusting, after assembling again, the adjustment being stored in respective encoder for the information of the absolute rotational position by motor 23,24,31 and 40 respectively also can be carried out.That is, in the manner, hand 8 and arm 9 action can be made in narrower chamber 4, the information of the absolute rotational position of motor 23,24,31 and 40 is stored in respective encoder respectively.
And, in the manner, because main part 10 and arm 9 are interconnected by screw under the state of being located by positioning element, arm 9 and hand base portion 15 are interconnected by screw under the state of being located by positioning element, hand base portion 15 and four hand forks 16 are interconnected by screw under the state of being located by positioning element, therefore easily assemble robot 1 again.
In the manner, by from downside successively disposal subject portion 10, arm 9, hand base portion 15 and four hand forks 16 carry out mounter people 1, described arm 9 is in center of rotation and the hand 8 of the first arm 18 relative to main part 10 relative to the center of rotation of the second arm 19 in the overlapping state of above-below direction.Therefore, in the manner, by main part 10, arm 9 and hand 8 being configured in order the first arm 18 relative in the center of rotation of main part 10 and the axle center of hand 8 relative to the center of rotation of the second arm 19, can mounter people 1.Therefore, in the manner, be easier to mounter people 1.
(other execution modes)
Aforesaid way is an example of optimal way of the present invention, but the present invention is not limited thereto, and can carry out various change in the scope not changing purport of the present invention.
In aforesaid way, battery 25 is configured in the inside of the first arm 18, but battery 25 also can be configured in the inside of the second arm 19.Further, in aforesaid way, motor 23,24 is configured in the inside of the first arm 18, but motor 23 and/or motor 24 also can be configured in the inside of the second arm 19.In this case, battery 25 both can be configured in the inside of the first arm 18, also can be configured in the inside of the second arm 19.
In aforesaid way, to resolve into premised on main part 10, arm 9, hand base portion 15 and four hand forks 16 by robot 1 after maquila assembling, adjustment, robot 1 can be resolved into main part 10, arm 9, hand base portion 15 and four hand forks 16.In addition, such as also can assemble at maquila, adjust after robot 1 is resolved into premised on main part 10, arm 9 and hand 8, robot 1 can resolve into main part 10, arm 9 and hand 8.In this case, hand base portion 15 and four hand forks 16 also can not be located by positioning element mutually.Further, in this case, main part 10, arm 9 and hand 8 become under the state of being located by positioning element by screw connect and the dividing body that can split.
And, also can assemble at maquila, adjust after robot 1 is resolved into premised on main part 10, first arm 18, second arm 19, hand base portion 15 and four hand forks 16, robot 1 can be divided into main part 10, first arm 18, second arm 19, hand base portion 15 and four hand forks 16.In this case, the first arm 18 and the second arm 19 are interconnected by screw under the state of being located by positioning elements such as alignment pins.Further, in this case, main part 10, first arm 18, second arm 19, hand base portion 15 and hand fork 16 become under the state of being located by positioning element by screw connect and the dividing body that can split.
Further, in this case, motor 23,24 both can be configured in the inside of the first arm 18, also can be configured in the inside of the second arm 19.Further, in this case, also can be such as the inside that motor 23 is configured in the first arm 18, motor 24 be configured in the inside of the second arm 19.When motor 23,24 is configured at the inside of the first arm 18, battery 25 is configured in the inside of the first arm 18, and when motor 23,24 is configured in the inside of the second arm 19, battery 25 is configured in the inside of the second arm 19.And, the inside of the first arm 18 is configured at motor 23, when motor 24 is configured in the inside of the second arm 19, the cell arrangement be connected with the encoder of motor 23 is in the inside of the first arm 18, and the cell arrangement be connected with the encoder of motor 24 is in the inside of the second arm 19.
In aforesaid way, robot 1 comprises for making the motor 23 that the second arm 19 rotates relative to the first arm 18 and the motor 24 making hand 8 rotate relative to the second arm 19.In addition, such as also can be formed the transmission mechanism of the power from motor to arm 9 and hand 8 by motor, to make the second arm 19 rotate relative to the first arm 18, and hand 8 be rotated relative to the second arm 19.Further, in aforesaid way, main part 10 has elevating mechanism 12, but main part 10 also can not have elevating mechanism 12.
In aforesaid way, arm 9 is made up of the first arm 18 and these two arms of the second arm 19, but arm 9 also can be made up of the arm of more than three.Further, in aforesaid way, arm 9 is made up of first arm 18 and second arm 19, but arm 9 also can be made up of first arm 18 and two the second arms 19.In this case, the first arm 18 is formed as roughly V-arrangement shape or linearity, and the central part of the first arm 18 becomes the base end part that can be connected with main part 10 rotationally.Further, the second arm 19 can be connected with two end sides of the first arm 18 respectively rotationally.Further, in aforesaid way, robot 1 has an arm 9, but robot 1 also can have two arms 9 that base end side can be connected with main part 10 rotationally.
In aforesaid way, the conveying object utilizing robot 1 to carry is the substrate 2 of OLED display, but the conveying object utilizing robot 1 to carry both can be the glass substrate of liquid crystal display, also can be semiconductor crystal wafer etc.Further, in aforesaid way, robot 1 is the horizontal articulated robot for carrying conveying object, but robot 1 both can be the horizontal articulated robot for other purposes, also can be the vertical multi-joint robot for purposes such as welding.
Claims (6)
1. an industrial robot, comprises hand, arm, main part and multiple motor, and described hand can be connected with the end side of described arm rotationally, the base end side of described arm can be connected with described main part rotationally, described multiple motor, for driving described hand and described arm, is characterized in that
Described industrial robot by under the state of being located by positioning element by screw connect and the plural dividing body that can split form,
There are described motor and the encoder for the position of rotation that detects described motor in the internal configurations of at least two described dividing bodies, and have the battery be connected with described encoder in the internal configurations of the described dividing body being configured with described motor and described encoder.
2. industrial robot according to claim 1, is characterized in that,
Described hand, described arm and described main part become described dividing body,
Described motor, described encoder and described battery is had in the internal configurations of the inside of described arm and described main part.
3. industrial robot according to claim 1, is characterized in that,
Described hand comprises the hand fork for loading conveying object and is fixed with described hand fork and the hand base portion be connected with the end side of described arm,
Described hand fork, described hand base portion, described arm and described main part become described dividing body,
Described motor, described encoder and described battery is had in the internal configurations of the inside of described arm and described main part.
4. the industrial robot according to Claims 2 or 3, is characterized in that,
Described arm is made up of first arm that mutually can connect in relative rotation and the second arm,
The base end side of described first arm can be connected with described main part rotationally, and the base end side of described second arm can be connected with the end side of described first arm rotationally, and described hand can be connected with the end side of described second arm rotationally,
Have in the internal configurations of described arm:
First motor, described first motor is as the described motor for making described second arm rotate relative to described first arm;
Second motor, described second motor is as the described motor for making described palmistry rotate for described second arm;
First encoder, described first encoder is as the described encoder of the position of rotation of described first motor of detection;
Second encoder, described second encoder is as the described encoder of the position of rotation of described second motor of detection; And
First battery, described first battery as the described battery be connected with described first encoder and described second encoder,
Have in the internal configurations of described main part:
3rd motor, described 3rd motor is as the described motor for making described first arm rotate relative to described main part;
4th motor, described 4th motor is as the described motor for making described arm be elevated;
3rd encoder, described 3rd encoder is as the described encoder of the position of rotation of described 3rd motor of detection;
4th encoder, described 4th encoder is as the described encoder of the position of rotation of described 4th motor of detection; And
Second battery, described second battery is as the described battery be connected with described 3rd encoder and described 4th encoder.
5. the motor according to any one of claim 2 to 4, is characterized in that,
Described arm is made up of first arm that mutually can connect in relative rotation and the second arm,
The base end side of described first arm can be connected with described main part rotationally, and the base end side of described second arm can be connected with the end side of described first arm rotationally, and described hand can be connected with the end side of described second arm rotationally,
When observing from above-below direction, described first arm relative to described main part center of rotation and described second arm relative to described first arm center of rotation between distance with described second arm relative to described first arm center of rotation and described palmistry for described second arm center of rotation between distance equal
Configure successively from downside and assemble described main part, described arm and described hand, described arm is in center of rotation and the described palmistry of described first arm relative to described main part for the center of rotation of described second arm in the overlapping state of above-below direction.
6. motor according to any one of claim 1 to 5, is characterized in that,
At least described hand and described arm are configured in vacuum chamber.
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| CN201911086701.0A CN110808225A (en) | 2014-01-29 | 2015-01-27 | Industrial robot |
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| JP2014014565A JP6499826B2 (en) | 2014-01-29 | 2014-01-29 | Industrial robot |
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Also Published As
| Publication number | Publication date |
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| KR20150090834A (en) | 2015-08-06 |
| CN110808225A (en) | 2020-02-18 |
| KR101694602B1 (en) | 2017-01-09 |
| JP6499826B2 (en) | 2019-04-10 |
| JP2015139854A (en) | 2015-08-03 |
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