JP3202297U - Transfer chamber lid door actuator - Google Patents

Abstract

A transport chamber used in a substrate processing system is provided with a lid and an actuator coupled thereto. An actuator assembly 202 can be coupled between a chamber body 204 and a lid 206, wherein one or more first brackets 214, one or more arms 212, one or more first shafts 222, one or more gears. Box 216 includes one or more second shafts and a motor 218. The actuator assembly 202 is configured to move the lid 206 from a closed position to an open position, and the lid 206 in the open position can be rotated between about 100? And about 180? From the closed position. The lid 206 can rotate about an axis defined by the one or more first shafts 222. [Selection] Figure 4

Description

Invention background

(Field)
Embodiments of the present disclosure generally relate to a transfer chamber used in a substrate processing system. Specifically, the embodiments described herein relate to a transfer chamber lid and an actuator coupled thereto.

(Description of related technology)
Organic light emitting diodes (OLEDs) are used in the manufacture of television screens, computer monitors, cell phones and the like for displaying information. A typical OLED can include a layer of organic material located between two electrodes, all deposited on a substrate, so as to form a matrix display panel having individually energizable pixels. An OLED is typically placed between two glass panels, and the edge of the glass panel is sealed to seal the OLED inside.

  With the acceptance of the market for flat panel technology, the demand for larger displays, increased production, and lower manufacturing costs has led equipment manufacturers to develop new systems that accept larger size glass substrates for flat panel display assemblers. I let you. Also, the ability to maintain various system components efficiently and cost-effectively can help improve the costs associated with operating such equipment. However, when such a large apparatus for processing large area substrates is employed, access and maintenance of such a system is time consuming and difficult. For example, a crane is required to remove the transport chamber lid to provide cleaning and maintenance access. The need for cranes is an additional cost and often limits the flexibility with which manufacturing facilities can be built. Furthermore, the increase in size of the equipment may hinder the operation of the crane.

  Therefore, what is needed in the art is an improved lid and actuator assembly for a transfer chamber.

  In one embodiment, a chamber lid device is provided. The chamber lid apparatus can include a lid, one or more arms coupled to the lid, and one or more gearboxes coupled to the one or more arms by one or more first shafts. The motor can also be coupled to one or more gearboxes by one or more second shafts.

  In another embodiment, a transfer chamber apparatus is provided. The transfer chamber device can include a chamber body defining a volume therein and a lid rotatably coupled to the chamber body. One or more brace members can be coupled to the chamber body adjacent to the lid, and one or more arms can be coupled to the lid and chamber body. One or more gearboxes may be coupled to one or more arms by one or more first shafts, and a motor may be coupled to one or more gearboxes by one or more second shafts.

  In yet another embodiment, an apparatus for lifting a lid is provided. The apparatus can include a plurality of arms coupled to the plurality of first brackets and the plurality of second brackets. The plurality of first shafts can be coupled to the plurality of arms via the plurality of second brackets, and the plurality of gear boxes can be coupled to the plurality of first shafts. One or more second shafts can be coupled to the plurality of gearboxes, and a motor can be coupled to the one or more second shafts.

In order that the above-described structure of the present disclosure may be understood in detail, a more specific description of the present disclosure briefly summarized above will be given with reference to the embodiments. Some embodiments are shown in the accompanying drawings. It should be noted, however, that the attached drawings only illustrate exemplary embodiments and therefore should not be construed as limiting the scope and may include other equally effective embodiments. is there.
FIG. 2 shows a schematic plan view of a transfer chamber in a processing system. The top view of a conveyance chamber is shown. FIG. 3 shows a side view of the transfer chamber of FIG. 2. FIG. 6 shows a partial side view of a transfer chamber lid and actuator assembly. FIG. 5 is a perspective view of the inside of the transfer chamber lid of FIG. 4. Fig. 5 shows a side view of the indicator pin and sensor.

  To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the drawings. It is understood that elements and configurations of one embodiment may be beneficially incorporated into other embodiments without further explanation.

Detailed description

  Embodiments of the present disclosure relate to a transfer chamber having a lid and an actuator assembly. The lid can be rotatably coupled to the transfer chamber, and the actuator assembly can open and close the lid to allow access to the interior of the transfer chamber. The actuator assembly generally includes a bracket that couples the arm to the lid and the chamber body. A plurality of shafts and gearboxes may be coupled between the arm and the motor. The motor can rotate the shaft to open and close the lid. A sensor for determining the position of the lid is also disclosed.

  FIG. 1 shows a schematic plan view of a transfer chamber 102 within the processing system 100. The processing system 100 can generally be configured to manufacture OLED devices on display-type substrates. The transfer chamber 102 can be centrally located within the processing system 100 and a plurality of processing chambers 108 can be coupled to the transfer chamber 102. The load lock chamber 104 can also be coupled to the transfer chamber 102 and the load lock chamber 104 can be configured to be operably coupled to the factory interface 106.

  The load lock chamber 104 can be coupled to a vacuum generator (not shown) to create a pressure environment similar to the environment maintained within the transfer chamber 102. During operation, the substrate can be transferred from the factory interface 106 to the load lock chamber 104 and then into the transfer chamber 102. A robot in the transfer chamber 102 can transfer substrates to and from one or more processing chambers 108 coupled to the transfer chamber 102. In one embodiment, the transfer chamber 102 can be octagonal. Although five process chambers 108 are illustrated, it is understood that a greater or lesser number of process chambers 108 may be coupled to the transfer chamber 102. In certain embodiments, a mask chamber (not shown) may also be coupled to the transfer chamber 102.

  FIG. 2 shows a plan view of the transfer chamber 102. The transfer chamber 102 includes a chamber body 204 that defines a volume therein. The lid 206 can be rotatably coupled to the chamber body 204. The lid 206 can be mainly rectangular in shape. However, it is understood that other shapes may be utilized. At least a portion of the lid 206 may be dome-shaped (shown in more detail with respect to FIG. 5), and the gusset member 210 is coupled to the dome portion, thereby improving the structural integrity of the lid 206. it can. In one embodiment, the lid 206 can be made from an aluminum material. However, it is understood that other materials (eg, stainless steel) may be utilized. In general, the materials selected for manufacturing the lid 206 and the chamber body 204 can be the same material.

  One or more brace members 208 may also be coupled to the chamber body 204. The brace member 208 can be linearly disposed adjacent to the lid 206. In one embodiment, the brace member 208 may be disposed on both sides of the lid 206. For example, the brace member 208 can be disposed adjacent to the long side of the rectangular lid 206. The brace member 208 can be configured to improve the structural integrity of the chamber body 204, particularly when the lid 206 is opened and closed. In one embodiment, the brace member 208 can be formed from an aluminum material, although it will be appreciated that other suitable materials may be utilized.

  The actuator assembly 202 can be coupled between the chamber body 204 and the lid 206. The actuator assembly 202 generally includes one or more first brackets 214, one or more arms 212, one or more first shafts 220, 222, one or more gearboxes 216, one or more second shafts 224, and a motor. 218. One or more first brackets 214 can be coupled to the lid 206. The first bracket 214 can be coupled to the lid 206 by a plurality of fastening members (for example, screws or bolts). The first bracket 214 can also be coupled to one or more arms 212. The arm 212 can be secured to the first bracket 214 by any suitable device (eg, by welding or the like). The arm 212 can extend from the first bracket 214 to one or more second brackets 406 described in more detail with reference to FIG. The arm 212 can be rotatably coupled to the one or more first shafts 220 and 222. The first shaft 220, 222 can extend through the arm 212, and the arm 212 can rotate relative to the one or more first shafts 220, 222. In one embodiment, the first shafts 220, 222 interface with bearings configured to allow rotation of the first shafts 220, 222, and thus the arm 212 about the centerline of the first shafts 220, 222. be able to.

  The first shafts 220, 222 can also be coupled to one or more gearboxes 216. Gearbox 216 can be coupled to one of chamber body 204 and / or brace 208. The gear box 216 can accommodate a plurality of gears that apply a rotational force to the first shafts 220 and 222 during rotation. The gearbox can also be coupled to one or more second shafts 224. The second shaft 224 can be coupled to a motor 218 that is configured to rotate the second shaft 224. In operation, the motor 218 can generate a rotational force on the second shaft 224. The rotational force of the second shaft 224 can be converted into a plurality of gears housed in the gear box 216. The gear can further convert the rotational force to the first shafts 220, 222. Thereafter, the first shafts 220, 222 can convert the rotational force to an arm 212 that opens or closes the lid 206, depending on the desired motion.

  FIG. 3 shows a side view of the transfer chamber 102 shown in FIG. The lid 206 is shown in the closed position. Also, the dome shape of the lid 206 is clearly shown in FIG. The lid 206 in the closed position can be opened by the actuator assembly 202 to the open position shown in FIG.

  FIG. 4 shows a partial side view of the lid 206 and actuator assembly 202 with the lid 206 in the open position. Actuator assembly 202 can be configured to move lid 206 from a closed position (shown in FIG. 3) to an open position. In one embodiment, the lid 206 in the open position can be rotated between about 100 degrees and about 180 degrees (eg, about 150 degrees) from the closed position. The lid 206 can rotate about an axis defined by the one or more first shafts 220, 222. The ability to rotate the lid 206 beyond a position perpendicular to the closed position of the lid provides improved clearance from the facility crane. In this way, the production facility crane can move freely around the facility when the lid 206 is in the open position.

  One or more second brackets 406 referred to above may be coupled to the chamber body 204 and / or the brace member 208. The first shafts 220, 222 can extend through the second bracket 406, whereby the arm 212 can be coupled to the first shafts 220, 222. In one embodiment, the second bracket 406 can include a stop member 404. Stop member 404 may be coupled to second bracket 406 and may have at least one beveled or chamfered edge configured to contact arm 212. In one embodiment, the stop member 404 is positioned such that the arm 212 contacts the stop member 404 when the lid 206 is in the open position.

  A pin member 402 can also be coupled to the arm 212. The pin member 402 can extend through the second bracket 406 and can be configured to lock the arm 212 in place when the lid 206 is in the open position. In one embodiment, the pin member 402 is spring-loaded so that the pin member 402 can engage a hole (not shown) formed in the second bracket 406 when the lid 206 is in the open position. Can be fastened. The pin member 402 extends through the hole in the second bracket and can lock the arm 212 in place. The pin member 402 can be selectively disengaged to allow the actuator assembly 202 to return the lid 206 to the closed position.

  An indicator pin bracket 408 can also be coupled to the lid 206. The indicator pin bracket 408 can be fixed around the lid 206 by various coupling devices (eg, screws, bolts / nuts, and welding) or the like. The indicator pin bracket 408 can extend beyond the periphery of the lid 206 so that the indicator pin 608 (see FIG. 6) can engage the sensor assembly 602.

  FIG. 5 shows a perspective view of the inside of the lid 206. As described above, the lid 206 can include a dome-shaped portion that can be defined by the inner surface 502 of the lid 206. In general, the transfer chamber 102 is maintained in a vacuum during substrate transfer and processing. Thus, the lid 206 must be structurally able to withstand high vacuum. A plurality of truss members 504 may be hung inside the lid 206 along the inner surface 502. A truss member 504 may extend between the long sides of the rectangular lid 206, and the truss member 504 may be coupled to and in contact with the inner surface 502. In one embodiment, truss member 504 can be welded to inner surface 502. One or more holes 506 may be formed in each of the truss members 504. The hole 506 can reduce the weight of the lid 206, which can be provided by the actuator assembly 202 for improved opening and closing of the lid 206.

  FIG. 6 shows a side view of the indicator pin bracket 408 and sensor assembly 602. As previously described, the indicator pin bracket 408 is coupled to the lid 206 and extends beyond the periphery of the lid 206. The joining member 606 can be coupled to the indicator pin bracket 408, and the indicator pin 608 can extend from the joining member 606. In one embodiment, the joining member 606 can accommodate a spring (not shown) coupled to the indicator pin 608.

  Block member 604 can be coupled to chamber body 204 and sensor assembly 602 can be coupled to block member 604. The blocking member can be configured to position the sensor assembly 602 to receive the indicator pin 608. Sensor assembly 602 can include a sensor 610 (eg, a proximity sensor) configured to sense a measurement indicative of the position of indicator pin 608 relative to lid 206. As shown in FIG. 6, the lid 206 is placed in the closed position and the indicator pin 608 is placed completely within the sensor 610. When indicator pin 608 engages sensor 610, a signal can be sent to the transfer chamber controller. The signal can provide an indication that the lid 206 is properly positioned to ensure vacuum operation. The indicator pin 608 can move away from the sensor 610 when the lid 206 is lifted by the actuator assembly 202. The amount by which the lid 206 is slightly displaced from the closed position can also be detected by the sensor 610. In this way, the sensor assembly 602 can provide a signal to the transport chamber controller indicating that the lid 206 is in the desired position for vacuum operation.

  In summary, the transfer chamber actuator assembly can allow the transfer chamber lid to be opened and closed in an efficient manner. The lid can be opened and closed to allow maintenance access to the transfer chamber. The lid can be opened to a position that allows more effective use of the crane. As described above, the downtime of the chamber can be reduced, which can contribute to the improvement of the throughput of the processing system in which the transfer chamber is used.

  While the above is directed to embodiments of the present disclosure, other and further embodiments of the present disclosure may be created without departing from the basic scope of the present disclosure, the scope of which is as follows: It is determined based on the range.

Claims (20)

A lid,
One or more arms coupled to the lid;
One or more gearboxes coupled to one or more arms by one or more first shafts;
A chamber lid device including a motor coupled to one or more gearboxes by one or more second shafts.   The apparatus according to claim 1, wherein the lid is a rectangular dome-shaped structure.   The apparatus of claim 2, wherein the one or more gusset members are coupled to the lid and configured to structurally strengthen the dome-like structure.   The apparatus of claim 2, wherein the lid comprises an aluminum material.   The apparatus of claim 1, wherein the one or more brackets couple the one or more arms to the lid.   The apparatus of claim 1, wherein the one or more first shafts include a bearing assembly configured to allow rotation of the one or more arms relative to the one or more first shafts.   The apparatus of claim 1, wherein the one or more gearboxes include a plurality of gears configured to convert rotational force between the one or more second shafts and the one or more first shafts.   The apparatus of claim 1, comprising one or more pin members disposed through the one or more arms.   The apparatus of claim 1, comprising an indicator pin bracket coupled around the lid. A chamber body defining a volume therein;
A lid rotatably coupled to the chamber body;
One or more brace members coupled to the chamber body adjacent to the lid;
One or more arms coupled to the lid and the chamber body;
One or more gearboxes coupled to one or more arms by one or more first shafts;
A transfer chamber apparatus including a motor coupled to one or more gearboxes by one or more second shafts.   The apparatus of claim 10, wherein the lid is a rectangular dome-shaped structure comprising aluminum material.   The apparatus of claim 10, wherein the one or more first brackets couple one or more arms to the lid.   The apparatus of claim 12, wherein the one or more second brackets couple one or more arms to the chamber body.   The apparatus of claim 13, wherein the one or more arms extend from the one or more second brackets to the one or more first brackets over at least one of the one or more brace members.   The apparatus of claim 10, comprising a sensor coupled to the chamber body.   The apparatus of claim 15, comprising an indicator pin coupled around the lid, the indicator pin configured to interface with and contact the sensor.   The apparatus of claim 10, wherein the one or more gearboxes include a plurality of gears configured to convert rotational force between the one or more second shafts and the one or more first shafts.   The apparatus of claim 10, wherein the lid is configured to rotate from a first position contacting the chamber body to a second position of 150 ° from the first position.   The apparatus of claim 18, wherein the one or more first shafts define a rotation axis of the lid. A device for lifting the lid,
A plurality of arms coupled to the plurality of first brackets and the plurality of second brackets;
A plurality of first shafts penetrating the plurality of second brackets and coupled to the plurality of arms;
A plurality of gearboxes coupled to a plurality of first shafts;
One or more second shafts coupled to a plurality of gearboxes;
An apparatus including a motor coupled to one or more second shafts and configured to rotate the one or more second shafts.