CN206768214U - Bearing assembly and substrate unloading module - Google Patents
Bearing assembly and substrate unloading module Download PDFInfo
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- CN206768214U CN206768214U CN201720443855.0U CN201720443855U CN206768214U CN 206768214 U CN206768214 U CN 206768214U CN 201720443855 U CN201720443855 U CN 201720443855U CN 206768214 U CN206768214 U CN 206768214U
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- bearing
- power transmission
- transmission shaft
- block
- set block
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Abstract
A kind of bearing assembly is the utility model is related to, it includes bearing, bearing block, power transmission shaft, the quiet set block for being arranged on bearing block and being sheathed on outside power transmission shaft, the dynamic cover for being fixed on power transmission shaft and covering at outside quiet set block；Meandering slit is formed between dynamic cover and quiet set block；The trap for being used for catching grit is provided with meandering slit.Above-mentioned bearing assembly, first, dynamic cover rotates the centrifugal action to be formed with power transmission shaft, and dust etc. is thrown off dynamic cover, so as to form first of dust-proof barrier；Second, meandering slit is formed between dynamic cover and quiet set block, to extend the path that dust touches bearing, forms the dust-proof barrier of second；3rd, trap is provided with meandering slit, trap can catch grit, form the 3rd dust-proof barrier；By above-mentioned three dust-proof barriers, it is possible to prevente effectively from grit enters in bearing, so as to be effectively ensured bearing rotate it is smooth while the problem of avoid bearing clamping stagnation from failing.The utility model additionally provides a kind of substrate unloading module.
Description
Technical field
Panel production field is the utility model is related to, module is unloaded more particularly to a kind of bearing assembly and substrate.
Background technology
On the coating process line of organic light emitting apparatus in process of production, substrate first transmits from transfer matic, successively by the
One gate valve, substrate load module (Loading Module), the second gate valve, the first buffering cavity, plated film cavity, the second cushion chamber
Body, the 3rd gate valve, substrate unloading module (Unloading Module), the 4th gate valve, finally pass from transfer matic again.
Substrate Unload module needs frequent switching vacuum and atmospheric condition, when the chamber vacuum degree reaches low vacuum (such as
5pa), the 3rd gate valve of the cavity and the second buffering cavity (high vacuum side) is opened, and substrate enters substrate Unload module and closed
3rd gate valve.Now the cavity of substrate Unload module will perform vacuum breaker action, substrate Unload module cavity from low vacuum
(such as 5pa), which is arrived, forms a standard atmospheric pressure (101325pa).In the process, drop in the target mask deposits on substrate
And substrate adheres to bad film layer, rolled by the air-flow of disorder, pollute whole substrate Unload module.
So substrate Unload module after a period of time is run, can cause bearing rotation to have some setbacks, clamping stagnation failure, and then lead
Phenomena such as causing the interruption of vacuum cavity drive line, substrate striker, shutting down.
Utility model content
Based on this, it is necessary to for prior art middle (center) bearing rotate have some setbacks, clamping stagnation fail the problem of, there is provided a kind of bearing
Rotate bearing assembly that is smooth, preventing bearing clamping stagnation from failing.
A kind of bearing assembly, including：
Bearing；
Bearing block, for carrying the bearing；
Power transmission shaft, it is supported on the bearing；
Quiet set block, is arranged on the bearing block, and is sheathed on the periphery of the power transmission shaft；
And dynamic cover, it is fixed on the power transmission shaft, and cover at outside the quiet set block；
Meandering slit is formed between the dynamic cover and the quiet set block.
Above-mentioned bearing assembly, first, dynamic cover rotates the centrifugal action to be formed with power transmission shaft, and dust etc. is thrown off dynamic cover,
So as to form first of dust-proof barrier；Second, meandering slit is formed between dynamic cover and quiet set block, axle is touched to extend dust
The path held, form the dust-proof barrier of second；By the dust-proof barrier of above-mentioned twice, it is possible to prevente effectively from grit enters in bearing,
So as to be effectively ensured bearing rotate it is smooth and meanwhile avoid bearing clamping stagnation fail the problem of.
In one of the embodiments, the described quiet one end of set block away from the bearing block is surrounded by half in the dynamic cover.
In one of the embodiments, the dynamic cover includes being close to the inner tube wall of the power transmission shaft, put down with the inner tube wall
The outer tube wall and the tegmental wall between the inner tube wall and the outer tube wall that row is set.
In one of the embodiments, the trap for being used for catching grit is provided with the meandering slit.So in complications
Slit is provided with trap, and trap can catch grit, form the 3rd dust-proof barrier；Grit can be further avoided to enter axle
In holding, so as to be effectively ensured bearing rotate it is smooth and meanwhile avoid bearing clamping stagnation fail the problem of.
In one of the embodiments, the trap is arranged on the quiet set block.
In one of the embodiments, the trap is the annular recess for being opened in the quiet set block side.
In one of the embodiments, the rectangular in cross-section of the annular recess.
In one of the embodiments, the number of the annular recess is two.
In one of the embodiments, the bearing is vacuum operating bearing.
In one of the embodiments, the quiet set block is located at the non-shaft end of the bearing block.
The utility model additionally provides a kind of substrate unloading module.
A kind of substrate unloads module, including some bearing assemblies be arrangeding in parallel；
The bearing assembly includes：
Bearing；
Bearing block, for carrying the bearing；
Power transmission shaft, it is supported on the bearing；
Quiet set block, is arranged on the bearing block, and is sheathed on the periphery of the power transmission shaft；
And dynamic cover, it is fixed on the power transmission shaft, and cover at outside the quiet set block；
Meandering slit is formed between the dynamic cover and the quiet set block；
The substrate unloading module also includes some support wheels being arranged on the power transmission shaft.
Aforesaid substrate unloads module, due to using bearing assembly provided by the utility model, so it is possible to prevente effectively from
Grit enters in bearing, rotates smooth while the problem of avoid bearing clamping stagnation from failing so as to which bearing be effectively ensured, and then makes substrate
It is smooth to unload module operation, phenomena such as avoiding the interruption of vacuum cavity drive line, substrate striker, shut down.
Brief description of the drawings
Fig. 1 is the cross section structure schematic diagram of the bearing assembly of the embodiment of the utility model one.
Fig. 2 is the cross section structure schematic diagram of the quiet set block in Fig. 1.
Fig. 3 is the structural representation of the dynamic cover of the bearing assembly of another embodiment.
Fig. 4 is the structural representation that substrate unloads module.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with specific embodiment party
Formula, the utility model is further elaborated.It should be appreciated that embodiment described herein is only solving
The utility model is released, is not used to limit the utility model.
Unless otherwise defined, all of technologies and scientific terms used here by the article is led with belonging to technology of the present utility model
The implication that the technical staff in domain is generally understood that is identical.It is simply in term used in the description of the present utility model herein
The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term as used herein " and/or " bag
Include the arbitrary and all combination of the Listed Items of one or more correlations.
Referring to Fig. 1-3, the bearing assembly 100 of the embodiment of the utility model one, there is dust reduction capability.Specifically, bearing group
Part 100 includes bearing 110, bearing block 120, power transmission shaft 130, quiet set block 140 and dynamic cover 150.
Wherein, bearing 110 is the core parts of bearing assembly 100.In the present embodiment, bearing 110 is vacuum operating bearing.Tool
Body, vacuum operating bearing selects deep groove ball bearing and angular contact ball bearing.It is, of course, understood that bearing of the present utility model
110 are not limited to vacuum operating bearing, can also be other bearings.
Wherein, the main function of bearing block 120 is loading bearing 110.That is, bearing 110 is arranged on bearing block 120
On.In the present embodiment, bearing block 120 is substantially plate-like, bearing hole 121 is offered on bearing block 120, bearing 110 is embedded in should
In bearing hole 121.It is, of course, understood that bearing block 120 of the present utility model is not limited to tabular, it can also be
His shape, those skilled in the art can select suitable shape according to actual conditions.
Wherein, power transmission shaft 130 is supported on bearing 110.Because bearing 110 is arranged on bearing block 120.That is,
Power transmission shaft 130 is installed on bearing block 120 by bearing 110, and power transmission shaft 130 can rotate relative to bearing block 120.It is new in this practicality
In type, power transmission shaft 130 is not particularly limited, and can be used the various power transmission shafts well known to those skilled in the art, be will not be repeated here.
Wherein, quiet set block 140 is arranged on bearing block 120, and is sheathed on the periphery of power transmission shaft 130.For example, quiet set block
140 centers are provided with through hole 141, and power transmission shaft 130 is combined together through the through hole 141 and with quiet set block 140, as shown in Figure 2.Cause
This, quiet set block 140 has no effect on the rotation of power transmission shaft 130.
Wherein, move cover 150 to be fixed on power transmission shaft 130, and cover on quiet set block 140.Due to dynamic cover 150 and power transmission shaft
130 be fixed relationship, so when power transmission shaft 130 rotates, dynamic cover 150 can follow power transmission shaft 130 to rotate together.Dynamic cover 150 with
The centrifugal action that power transmission shaft 130 rotates and formed, the dust being attached on dynamic cover 150 etc. is thrown off dynamic cover 150, so as to be formed
First of dust-proof barrier.
Formed with meandering slit 160 between dynamic cover 150 and quiet set block 140.For example, the inner surface and quiet set of dynamic cover 150
There is certain interval between the outer surface of block 140, form slit therebetween, slit bending extension forms meandering slit
160.Dust must get to bearing 110 by meandering slit 160.Due to the presence of meandering slit 160, extend dust and enter
Enter to the path of bearing 110, form the dust-proof barrier of second.
In the present embodiment, trap 170 is provided with meandering slit 160, the main function of trap 170 is to be used to catch dirt
Grain.So, even if there is grit to enter in meandering slit 160, due to being provided with trap 170 on meandering slit 160, grit is also caught
Catch and fall into trap 170 and cannot be introduced into bearing 110.Trap 170 so on meandering slit 160, it is dust-proof to form the 3rd
Barrier.By above-mentioned three dust-proof barriers, the amount up to the dust at bearing 110 effectively can be greatly reduced to.So, also
The amount of the dust entered in bearing 110 is considerably reduced, rotates smooth while avoids axle so as to which bearing 110 be effectively ensured
The problem of holding the failure of 110 clamping stagnations.
In the present embodiment, the quiet one end of set block 140 away from bearing block 120 is surrounded by half in dynamic cover 150.That is,
Dynamic cover 150 surrounds the quiet one end (upper end in figure) of set block 140 away from bearing block 120.
From the point of view of Fig. 3, in the present embodiment, dynamic cover 150 includes inner tube wall 151, outer tube wall 152 and tegmental wall 153.Inner tube wall
151 are arranged to be close to power transmission shaft 130；Outer tube wall 152 be arranged in parallel with inner tube wall 151；Tegmental wall 153 be connected to inner tube wall 151 with
Between outer tube wall 152.A cavity 158 is formed between inner tube wall 151, outer tube wall 152 and tegmental wall 153, it is quiet to cover the upper of block 140
End is contained in the cavity 158.It is highly preferred that tegmental wall 153 is vertical with inner tube wall 151 and outer tube wall 152.It is more specifically, dynamic
Cover 150 is rotary body.
In the present embodiment, cover 150 is moved to be fixed on power transmission shaft 130 by pin (not shown).Specifically, in dynamic cover
The upper end of 150 inner tube wall offers fixing hole 156, and dynamic cover is fixed on power transmission shaft by pin through fixing hole 156.Certainly,
It is understood that in the utility model, the fixed form of dynamic cover 150 and power transmission shaft 130 is not construed as limiting, can also be it
Its fixed form, such as dynamic cover 150 is pasted and fixed on power transmission shaft 130.
With reference to Fig. 1,2 and 3, trap 170 is arranged on quiet set block 140.More specifically, trap 170 is to be opened in quiet set block
The annular recess of 140 sides.Accordingly even when when grit of a small amount of size less than 0.5mm enters meandering slit in Atmospheric processes are filled
In 160, even if more sub-fraction grit rests on trap 170 and is captured.When substrate unloading module starts to vacuumize, into song
Grit in folding slit 160 will be carried over by air motion.The trap 170 of annular recess shape causes each position of the inside
Grit can leave trap 170 in the presence of pull of vacuum, and leave bearing assembly 100 through meandering slit 160, from
And further improve dust-proof effect.
In the present embodiment, the rectangular in cross-section of annular recess.So, the bottom land corner that bottom land intersects with cell wall is difficult to
Influenceed by air-flow, therefore enter and be easier to retain and gather in bottom land corner by the grit of shape groove, so as to effectively
Ground prevents grit from inwardly being moved along meandering slit 160.It is, of course, understood that the section of annular recess is not limited to
Rectangle, it can also be the other shapes such as triangle, semicircle, trapezoidal.It is, of course, also possible to understand, trap 170 does not limit to
In annular recess, also or cuboid pit.
In the present embodiment, the number of annular recess is two.It so can further improve dust-proof effect.Certainly, may be used
With understanding, the utility model is not limited to two to the number of annular recess, can also be one, three, four, very
To more.
It can also be appreciated that annular recess is not limited on the lateral surface of quiet set block 140, can also be located at
It is quiet set block 140 top surface, also or on medial surface.
It is, of course, also possible to understand, trap 170 is not limited to be arranged on quiet set block 140, can also be arranged at dynamic
, can also be on quiet set block 140 with being respectively provided with trap 170 on dynamic cover 150 on cover 150.
In the present embodiment, quiet set block 140 is located at the non-shaft end (namely upper end in Fig. 1) of bearing block 120.Namely
Say, three dust-proof barriers are only positioned at the non-shaft end of bearing 110.Due to the shaft end (namely lower end in Fig. 1) of bearing 110, it is not required to
To pass through for power transmission shaft 130, shut the shaft end of bearing 110 so lid 190 can directly be sealed on bearing block 120.
Dust-proof effect so can be further improved, while structure is simpler.It is, of course, understood that the utility model is not
Above-mentioned form is confined to, can also be the both ends of bearing 110 using the structure of quiet set block 140 and dynamic cover 150.
Above-mentioned bearing assembly 100, first, move cover 150 and the quilt such as centrifugal action, dust formed is rotated with power transmission shaft 130
Dynamic cover 150 is thrown away, so as to form first of dust-proof barrier；Second, form meandering slit between dynamic cover 150 and quiet set block 140
160, to extend the path that dust touches bearing 110, form the dust-proof barrier of second；3rd, set on meandering slit 160
There is trap 170, trap 170 can catch grit, form the 3rd dust-proof barrier；Pass through above-mentioned three dust-proof barriers, Ke Yiyou
Effect avoid grit enter bearing 110 in, so as to be effectively ensured bearing 110 rotate it is smooth and meanwhile avoid the clamping stagnation of bearing 110 fail
Problem.
The utility model additionally provides a kind of substrate unloading module.
Referring to Fig. 4, the substrate unloading module 1000 of the embodiment of the utility model one, for unloading carried base board 9 in evaporation；Its
Including some bearing assemblies provided by the utility model be arrangeding in parallel.
Specifically, substrate Unload module 1000 includes some power transmission shafts 130 be arrangeding in parallel, at the both ends of power transmission shaft 130
It is supported on by bearing (not shown) on bearing block 120.In the present embodiment, all both ends of power transmission shaft 130 share one respectively
Bearing block 120, that is to say, that one end of all power transmission shafts 130 is supported on a bearing block 120, all power transmission shafts 130 it is another
End is supported on another bearing block 120.
It is, of course, understood that substrate unloading module also includes some support wheels 300 being arranged on power transmission shaft 130.
Substrate is by the frame of support wheel 300 on power transmission shaft 130.
Aforesaid substrate unloads module 1000, due to using bearing assembly provided by the utility model, so can be effective
Avoid grit from entering in bearing, rotate smooth while the problem of avoid bearing clamping stagnation from failing so as to which bearing be effectively ensured, and then make
Substrate unloading module 1000 run it is smooth, avoid interruptions of vacuum cavity drive line, substrate striker, shutdown phenomena such as.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope that this specification is recorded all is considered to be.
Embodiment described above only expresses several embodiments of the present utility model, and its description is more specific and detailed,
But therefore it can not be interpreted as the limitation to utility model patent scope.It should be pointed out that the common skill for this area
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (10)
- A kind of 1. bearing assembly, it is characterised in that including：Bearing；Bearing block, for carrying the bearing；Power transmission shaft, it is supported on the bearing；Quiet set block, is arranged on the bearing block, and is sheathed on the periphery of the power transmission shaft；And dynamic cover, it is fixed on the power transmission shaft, and cover at outside the quiet set block；Meandering slit is formed between the dynamic cover and the quiet set block.
- 2. bearing assembly according to claim 1, it is characterised in that the described quiet one end of set block away from the bearing block half It is surrounded in the dynamic cover.
- 3. bearing assembly according to claim 2, it is characterised in that the dynamic cover includes the inner cylinder for being close to the power transmission shaft The outer tube wall that wall and the inner tube wall be arranged in parallel and the tegmental wall between the inner tube wall and the outer tube wall.
- 4. bearing assembly according to claim 1, it is characterised in that be provided with the meandering slit and be used to catch grit Trap.
- 5. bearing assembly according to claim 4, it is characterised in that the trap is arranged on the quiet set block.
- 6. bearing assembly according to claim 5, it is characterised in that the trap is to be opened in the quiet set block side Annular recess.
- 7. bearing assembly according to claim 6, it is characterised in that the rectangular in cross-section of the annular recess.
- 8. bearing assembly according to claim 6, it is characterised in that the number of the annular recess is two.
- 9. according to the bearing assembly described in claim any one of 1-7, it is characterised in that the quiet set block is located at the bearing block Non- shaft end.
- 10. a kind of substrate unloads module, it is characterised in that including some bearing assemblies be arrangeding in parallel；The bearing assembly includes：Bearing；Bearing block, for carrying the bearing；Power transmission shaft, it is supported on the bearing；Quiet set block, is arranged on the bearing block, and is sheathed on the periphery of the power transmission shaft；And dynamic cover, it is fixed on the power transmission shaft, and cover at outside the quiet set block；Meandering slit is formed between the dynamic cover and the quiet set block；The substrate unloading module also includes some support wheels being arranged on the power transmission shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720443855.0U CN206768214U (en) | 2017-04-25 | 2017-04-25 | Bearing assembly and substrate unloading module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720443855.0U CN206768214U (en) | 2017-04-25 | 2017-04-25 | Bearing assembly and substrate unloading module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206768214U true CN206768214U (en) | 2017-12-19 |
Family
ID=60635580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720443855.0U Active CN206768214U (en) | 2017-04-25 | 2017-04-25 | Bearing assembly and substrate unloading module |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206768214U (en) |
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2017
- 2017-04-25 CN CN201720443855.0U patent/CN206768214U/en active Active
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