KR101019530B1 - Chemical vapor deposition apparatus - Google Patents

Abstract

A chemical vapor deposition apparatus is disclosed. The chemical vapor deposition apparatus of the present invention includes: a transfer module chamber (TRANSFER MODULE CHAMBER) connecting a load lock chamber and a process module chamber, wherein a robot installation hole is formed in a central area of a bottom portion; A support frame supporting the transfer module chamber from below; A substrate handling robot configured to transfer a substrate to a load lock chamber and a process module chamber by disposing a portion of the upper portion inside the transfer module chamber while a portion is inserted into the robot installation hole; And a deformation absorbing unit coupled to the bottom and the substrate handling robot, the buffer absorbing unit absorbing the deformation of the bottom buffer so that the deformation of the bottom is prevented from being transferred to the substrate handling robot. According to the present invention, it is possible to prevent the substrate handling robot from changing its position as the bottom portion of the transfer module chamber is deformed due to an internal pressure change or an external force such as vibration. To the correct position.

Description

Chemical Vapor Deposition Apparatus {CHEMICAL VAPOR DEPOSITION APPARATUS}

The present invention relates to a chemical vapor deposition apparatus, and more particularly, the position of the substrate handling robot is changed as the bottom portion of the transfer module chamber is deformed by an external pressure change or an external force such as vibration of the transfer module chamber. The present invention relates to a chemical vapor deposition apparatus capable of preventing and transferring a substrate to an accurate position of a load lock chamber or a process module chamber.

Flat panel displays are widely used in personal handheld terminals, as well as TVs and computer monitors.

Such flat displays include liquid crystal displays (LCDs), plasma display panels (PDPs), and organic light emitting diodes (OLEDs).

Among them, liquid crystal displays (LCDs) inject liquid crystals, which are solid and liquid intermediates, between two thin upper and lower glass substrates, and generate contrast by changing the arrangement of liquid crystal molecules by the electrode voltage difference between the upper and lower glass substrates. It is a device using a kind of optical switch phenomenon to display an image.

LCDs are now widely used in electronic clocks, electronic calculators, TVs, notebook PCs, electronic products, automobiles, aircraft speed displays, and driving systems.

Previously, LCD TVs had a size of about 20 inches to about 30 inches, and most monitors had a size of 17 inches or less. However, in recent years, large TVs of 40 inches or more and large monitors of 20 inches or more have been released and sold, and the preference for them is increasing day by day.

Therefore, manufacturers of LCDs are researching to produce wider glass substrates. Currently, mass production of so-called 8th generation glass substrates with widths and widths of about 2 meters is in progress at some manufacturers. It is in sight.

Such LCD is a TFT process in which deposition, photolithography, etching, chemical vapor deposition, etc. are repeatedly performed, a cell process for bonding upper and lower glass substrates, and an apparatus It is released as a product through a module process that completes the process.

The chemical vapor deposition process, which is one of the above-described TFT processes, is performed in a process module chamber in which an optimal environment for the process is established. In particular, recently, a chemical vapor deposition apparatus (CHEMICAL VAPOR DEPOSITION APPARATUS) having a plurality of process module chambers arranged at regular intervals to process many substrates in a short time has been widely used.

The chemical vapor deposition apparatus includes a transfer module chamber, a load lock chamber coupled to one side of the transfer module chamber, and a plurality of process module chambers coupled to the other side of the transfer module chamber. do.

Thus, when the substrate of the working object is introduced into the load lock chamber, the substrate handling robot provided in the transfer module chamber transfers the substrate to the transfer module chamber, and then transfers the substrate to any one of the plurality of process module chambers to the corresponding process module chamber. The deposition process is performed on the substrate within the substrate, and when the operation is completed, the substrate is taken out in the reverse order described above.

1 is a schematic configuration diagram of a chemical vapor deposition apparatus according to the prior art.

As shown in this figure, inside the transfer module chamber 30, the substrate of the load lock chamber (not shown) is transferred to the process module chamber (not shown), or the substrate on which the deposition process is completed is removed from the load lock chamber. There is provided a substrate handling robot 40 for transferring to the substrate.

The substrate handling robot 40 may be an important requirement because the assembly or installation position may be an important requirement because the substrate handling robot 40 needs to transfer the substrate while minimizing vibration as well as transferring the substrate to the load lock chamber or the process module chamber. .

As shown by the solid line in FIG. 1, the substrate handling robot 40 is typically assembled to the inner bottom 35 of the transfer module chamber 30. That is, when assembling the substrate handling robot 40, the vacuum inside the transfer module chamber 30 is released and converted into an atmospheric pressure state, and then assembled to the bottom 35 of the transfer module chamber 30.

On the other hand, the assembly operation of the substrate handling robot 40 is performed at atmospheric pressure, but during the chemical vapor deposition process, the interior of the transfer module chamber 30 is maintained in a vacuum state, so the bottom of the transfer module chamber 30 is maintained. The part 35 may be deformed in the direction A of FIG. 1 (see the dotted line in FIG. 1) due to the relative pressure difference with the external atmospheric pressure, in which case the substrate handling robot 40 may be modified according to the deformation of the bottom part 35. The unexpected position change of H) from H1 to H2 in the original assembly state causes a problem that it is difficult to transfer the substrate to the correct position of the load lock chamber or the process module chamber.

An object of the present invention is to prevent the substrate handling robot from changing its position as the bottom portion of the transfer module chamber is deformed by an external pressure change or an external force such as vibration, thereby preventing the substrate from being loaded into the load lock chamber or the process module. It is to provide a chemical vapor deposition apparatus that can be transferred to the correct position of the chamber.

According to the present invention, a load module chamber (LOADLOCK CHAMBER) and a process module chamber (PROCESS MODULE CHAMBER), the transfer module chamber (TRANSFER MODULE CHAMBER) is formed in the central area of the robot installation hole; A support frame supporting the transfer module chamber from below; A substrate handling robot configured to transfer a substrate to the load lock chamber and the process module chamber by arranging an upper portion of the upper portion of the transfer module chamber while a portion is inserted into the robot installation hole; And a strain absorbing unit coupled to the bottom portion and the substrate handling robot, the strain absorbing unit cushioningly absorbing the deformation of the bottom portion to prevent the deformation of the bottom portion from being transmitted to the substrate handling robot. Achieved by a deposition apparatus.

Here, the deformation absorption unit, the upper coupling portion coupled to one side of the substrate handling robot; A lower coupling part coupled to one side of the bottom part; And a bellows connecting the upper coupling portion and the lower coupling portion to absorb and deform the bottom portion while elastically contracting and extending along the vertical direction.

The transfer module chamber may include a first side plate portion standing up at an end of the bottom portion; An upper plate disposed parallel to the bottom at an upper end of the first side plate; And a second side plate portion disposed side by side with the first side plate portion at an end of the upper plate portion.

The substrate handling robot, the robot shaft is provided to be inserted into the robot installation hole to pass through the robot installation hole; A robot body disposed in an upper region of a bottom portion of the transfer module chamber; And an extension flange extending radially outward in a region between the robot shaft and the robot body.

The upper coupling portion may be disposed on an upper surface of the extension flange and coupled to the extension flange, and the lower coupling portion may be disposed on an upper surface of the bottom portion and coupled to the bottom portion.

O-rings may be interposed between the upper coupling portion and the extension flange and between the lower coupling portion and the bottom portion.

One end may further include a robot support part coupled to the support frame to support the substrate handling robot.

The robot support portion, the upper horizontal portion coupled to one side of the substrate handling robot; A lower horizontal portion coupled to one side of the support frame; And a vertical portion connecting the upper horizontal portion and the lower horizontal portion.

A gap may be formed between the bottom portion and the support frame to compensate for an assembly tolerance of the transfer module chamber with respect to the support frame.

The gap may be provided to be recessed upward from the bottom of the bottom portion.

The first side plate portion may be formed relatively thinner than the bottom portion and the top plate portion, and at least one reinforcing rib may be further provided between the bottom portion, the first side plate portion, and the top plate portion.

The strain absorbing unit may be made of a metal material.

The deformation absorption unit, the upper coupling portion coupled to one side of the substrate handling robot; A connection part coupled to the bottom part; A unit body coupled with the connection part at the end of the connection part; A lower coupling part coupled to one side of the unit body; And a leaf spring that connects the upper coupling portion and the lower coupling portion to absorb and deform the bottom portion while elastically contracting and extending along the vertical direction.

According to the present invention, the substrate may be prevented from changing the position of the substrate handling robot as the bottom portion of the transfer module chamber is deformed by an external pressure change or an external force such as vibration, thereby preventing the substrate from being loaded into the load lock chamber or the process module chamber. To the correct position.

In order to fully understand the present invention, the operational advantages of the present invention, and the objects achieved by the practice of the present invention, reference should be made to the accompanying drawings which illustrate preferred embodiments of the present invention and the contents described in the accompanying drawings.

Hereinafter, the present invention will be described in detail by explaining preferred embodiments of the present invention with reference to the accompanying drawings. Like reference numerals in the drawings denote like elements.

For reference, the substrate to be described below refers to a flat panel display (FPD) including a liquid crystal display (LCD) substrate, a plasma display panel (PDP) substrate, an organic light emitting diodes (OLED) substrate, and the like. For the convenience of description, these will be referred to as substrates without being divided.

2 is a schematic configuration diagram of a chemical vapor deposition apparatus according to an embodiment of the present invention, Figure 3 is a plan view of the transfer module chamber shown in Figure 1, Figure 4 is an external perspective view of the transfer module chamber region.

As shown in these figures, the chemical vapor deposition apparatus according to the present embodiment includes a plurality of process module chambers 200 (PROCESS MODULE CHAMBER) in which a substantial chemical vapor deposition process is performed on a substrate, and a corresponding process module chamber 200. LOADLOCK CHAMBER (100, LOADLOCK CHAMBER) for creating an environment in which the substrate can enter the process module chamber 200 before the substrate is entered into the process module, and connects the process module chamber 200 and the load lock chamber 100 A transfer module chamber 300 is provided.

The process module chamber 200 performs a chemical vapor deposition process on a substrate in an environment of high temperature and low pressure. Although not shown, the process module chamber 200 is a place where a predetermined thickness of reactive gas ions emitted from an electrode is deposited on a surface of a substrate placed on a susceptor by a predetermined thickness. to be.

In the present embodiment, since five process module chambers 200 are provided based on one load lock chamber 100, the productivity may be improved. However, since the scope of the present invention is not limited thereto, there may be more than five or at least five process module chambers.

In order to proceed with the deposition process of the substrate through the process module chamber 200, the substrate handling robot 400 transfers the substrate to be processed into the corresponding process module chamber 200, wherein the substrate in the atmospheric state is directly heated at high temperature and low pressure. Since there is a difficulty in entering the process module chamber 200, it is necessary to create the same environment as the process module chamber 200 before transferring the substrate to the process module chamber 200. To this end, the load lock chamber 100 is provided.

When the load lock chamber 100 receives a substrate, which is a target of a chemical vapor deposition process, from the outside by a transfer robot (not shown), the load lock chamber 100 creates an internal environment at a temperature and pressure substantially the same as that of the process module chamber 200. Play a role.

As such, the substrate in the load lock chamber 100 having the substantially same environment as the process module chamber 200 is drawn out by the substrate handling robot 400 provided in the transfer module chamber 300 so as to correspond to the process module chamber 200. After the transfer, the deposition process is carried out. On the contrary, the substrate in which the chemical vapor deposition process is completed in the process module chamber 200 is taken out by the substrate handling robot 400 and taken out by the transfer robot (not shown) while maintaining substantially the same temperature and pressure as the outside. do.

As such, the load lock chamber 100 may be configured to be used in the environment or exterior of the process module chamber 200 before the substrate is drawn from the outside into the process module chamber 200 or before the substrate is drawn out from the process module chamber 200. It serves to receive the substrate in substantially the same state as the environment. Although not shown in detail, the load lock chamber 100 according to the present embodiment includes a three-stage unit chamber (not shown) in which a substrate is accommodated along a height direction.

The transfer module chamber 300 is a chamber connecting the process module chamber 200 and the load lock chamber 100. The transfer module chamber 300 is a huge structure having a hexagonal structure in the plane projection as shown in FIG. That is, the transfer module chamber 300 is provided as a huge structure because a so-called 8th generation substrate having a width / length of about 2 meters in and out of it must be transferred by the substrate handling robot 400.

As shown in FIGS. 2 and 3, the transfer module chamber 300 is provided on the support frame 310. Of course, the structure in which the transfer module chamber 300 is mounted on the support frame 310 is applied to both the load lock chamber 100 and the process module chamber 200 in addition to the transfer module chamber 300.

The safety guard 320 is provided on the outer surface of the transfer module chamber 300. Safety guard 320 may maintain the safety of the operator during the upper operation of the transfer module chamber 300.

An upper opening / closing plate 330 is formed on an upper surface of the transfer module chamber 300 to form an access path of the substrate handling robot 400. Since the opening and closing of the upper opening and closing plate 330 is impossible by manpower, a crane connection part 331 is provided in the central region of the upper opening and closing plate 330 to which the rope of the crane is connected.

A pair of main doors for opening and closing a hatch (not shown) for the worker's access to the inside of the transfer module chamber 300 even without opening the huge top opening plate 330 around the upper opening plate 330. 335, a maintenance door is provided.

In addition, the transfer module chamber 300 further includes a substrate breakage detection sensor 340 that detects a breakage of the substrate introduced into the transfer module chamber 300. As shown in FIG. 3, the substrate breakage detection sensor 340 is detachably coupled to the corner region of the transfer module chamber 300. Detect whether is broken. The substrate breakage sensor 340 may be applied as a laser sensor that detects a breakage of a substrate based on a speed difference of reflected light that is reached after irradiating light toward the substrate, but is not necessarily the case.

5 is a cross-sectional view of an area where the substrate handling robot is located in the transfer module chamber, FIG. 6 is an enlarged perspective view of main parts of FIG. 5, and FIGS. 7 to 10 are cross-sectional views illustrating a process of assembling the substrate handling robot step by step.

As shown in these drawings, the transfer module chamber 300 transfers the substrate to be deposited from the load lock chamber 100 to the process module chamber 200 or transfers the substrate on which the deposition process is completed to the process module chamber. A substrate handling robot 400 is provided to transfer the load lock chamber 100 from the load lock chamber 100.

In the present embodiment, as shown in FIG. 2, since five process module chambers 200 are provided for one load lock chamber 100, the substrate handling robot 400 may rotate and move forward and backward at a corresponding position. Applied to robot with articulated arm.

Meanwhile, as described above, in assembling the substrate handling robot 400 to the inside of the transfer module chamber 300, the bottom portion 350 of the transfer module chamber 300 is conventionally assembled. If the assembly is intact, the position of the substrate handling robot 400 is changed according to the deformation of the bottom 350 of the transfer module chamber 300, so that the substrate is loaded in the load lock chamber 100 or the process module chamber 200. It will be difficult to transport it into position. This is because the interior of the transfer module chamber 300 is maintained in a vacuum state during the deposition process, so that the bottom 350 of the transfer module chamber 300 is deformed due to the relative pressure difference with the external atmospheric pressure (mainly A of FIG. 10). Direction) can be generated. In this embodiment, in order to solve such a conventional problem, the assembly position and the surrounding structure of the substrate handling robot 400 are improved.

5 to 10, in the chemical vapor deposition apparatus of the present embodiment, the substrate handling robot 400 is assembled in the bottom 350 region of the transfer module chamber 300, but the bottom portion (as in the prior art) It is not assembled as it is 350).

Referring to the transfer module chamber 300 in order to explain in more detail the assembly position of the substrate handling robot 400, the transfer module chamber 300 is a first side plate portion 351 standing up at the end of the bottom portion 350 ), A top plate portion 352 disposed in parallel with the bottom portion 350 at the upper end of the first side plate portion 351, and a second side plate portion 351 disposed side by side with the first side plate portion 351 at the end of the top plate portion 352. And a side plate portion 353.

The bottom part 350, the first side plate part 351, the top plate part 352, and the second side plate part 353 are all made of a metal material having the required rigidity. Since the transfer module chamber 300 is a large structure, the bottom part 350, the first side plate part 351, the top plate part 352, and the second side plate part 353 are difficult to be integrally manufactured. The first side plate part 351, the upper plate part 352, and the second side plate part 353 are separately manufactured and then welded to each other.

In this case, the thickness of the first side plate part 351 is thinner than that of the bottom part 350, the first side plate part 351, and the second side plate part 353. Therefore, a reinforcing rib 354 is provided between the bottom part 350, the first side plate part 351, and the top plate part 352 to reinforce the strength of the thin first side plate part 351. However, since the scope of the present invention is not limited thereto, the thicknesses of the bottom part 350, the first side plate part 351, the top plate part 352, and the second side plate part 353 may all be the same and may be reinforced. The rib 354 may be excluded in construction.

When the bottom part 350, the first side plate part 351, the top plate part 352, and the second side plate part 353 are assembled to form the transfer module chamber 300, the upper surface of the bottom part 350, the first side plate part 351, and the second side plate part 353 is formed in a substantially box structure. In this state, the transfer module chamber 300 is seated on the support frame 310, and then the bottom 350 and the support frame 310 are bolted to each other. At this time, the coupling portion to be bolted in the bottom 350 and the support frame 310, when the coupling portion of about 8 or more are not lifted precisely between each other, the bottom 350 and the support frame 310 It is difficult to get a firm bonding force.

Since this is a phenomenon due to the normal assembly tolerance, in order to solve this, in the present embodiment, the assembly tolerance of the bottom portion 350 to the support frame 310 is compensated between the bottom portion 350 and the support frame 310. The clearance gap G (refer FIG. 7) is further formed.

The gap G may be intermittently provided along the circumferential direction of the bottom 350, and the gap G may compensate for the assembly tolerance of the bottom 350 with respect to the support frame 310. will be. In order to form the gap G, the upper surface of the support frame 310 may be recessed downward, or the bottom surface of the bottom 350 may be recessed upward. In the present embodiment, the latter method is applied. Of course, since the scope of the present invention is not limited thereto, it is not necessary to form the gap G.

On the other hand, in the transfer module chamber 300 of this structure, the substrate handling robot 400, as shown in Figure 5, a portion of the robot installation hole formed in the bottom portion 350 region of the transfer module chamber 300 ( In the state inserted in the 350a), an upper region is disposed in the transfer module chamber 300.

The substrate handling robot 400 includes a robot shaft 410 provided to be inserted into the robot installation hole 350a in a form passing through the robot installation hole 350a and the bottom portion 350 of the transfer module chamber 300. The robot body 420 is disposed in the upper region of the robot shaft 410 and the extension flange 430 extending radially outward in the region between the robot body 420 is provided.

The robot shaft 410 has a hollow cylinder structure to connect various control devices or connecting lines to the robot body 420 from the outside of the transfer module chamber 300. The extension flange 430 is provided for coupling with the deformation absorbing unit 500.

As described above, the substrate handling robot 400 is assembled to the area of the bottom 350 of the transfer module chamber 300 in such a manner that the robot shaft 410 passes through the robot installation hole 350a. Once assembled and installed, there is bound to be a certain gap between the substrate handling robot 400 and the bottom 350. If the gap cannot be shielded, it is difficult because the inside of the transfer module chamber 300 cannot be maintained in a vacuum during the process.

Thus, in the present embodiment, the deformation absorbing unit 500 is provided on the substrate handling robot 400 and the bottom portion 350, and the deformation absorbing unit 500 includes the substrate handling robot 400 and the bottom portion 350. In addition to the function of shielding the gap therebetween, the deformation of the bottom 350 is in charge of absorbing the deformation of the bottom 350 to prevent the transfer to the substrate handling robot 400.

Since the deformation absorbing unit 500 is substantially responsible for two functions at the corresponding position, the structure and the bottom portion 350 to shield the gap between the substrate handling robot 400 and the bottom portion 350 It is possible to provide an effect far superior to some of the prior art techniques that each individually applied a structure to prevent deformation from being transferred to the substrate handling robot 400. That is, because of the simpler and simpler structure than the related art, not only can the assembly and maintenance work be facilitated, but there is an additional advantage of reducing the cost.

Here, the deformation refers to a phenomenon in which the bottom portion 350 of the transfer module chamber 300 rises while being deformed in the A direction due to a relative pressure difference with the external atmospheric pressure, as shown in FIG. 10. The bottom portion 350 of the transfer module chamber 300 is caused to rise in the direction A of FIG. 10 by an external force such as external vibration.

As described above, the deformation absorbing unit 500 applied to the present embodiment has a function for shielding a gap between the substrate handling robot 400 and the bottom portion 350, and the deformation of the bottom portion 350 handles the substrate. It is responsible for the function to block the transfer to the robot 400, but in the following for the function of the deformation absorbing unit 500 for preventing the deformation of the bottom portion 350 is transmitted to the substrate handling robot 400 The explanation will be focused on.

The deformation absorbing unit 500 includes an upper coupling portion 510 coupled to the extension flange 430 of the substrate handling robot 400, a lower coupling portion 520 coupled to the bottom portion 350, and upper and lower portions thereof. It is provided with a bellows 530 connecting the coupling parts 510 and 520 and elastically contracting and extending along the vertical direction to absorb deformation to the bottom part 350.

As described above, the deformation absorbing unit 500 is also responsible for shielding the gap between the substrate handling robot 400 and the bottom portion 350, the upper coupling portion 510 and the extension flange 430 O-ring for maintaining airtightness is further interposed between the region and the region between the lower coupling portion 520 and the bottom portion 350. Although one O-ring is shown in the figure, a plurality of O-rings may be used.

In the deformation absorbing unit 500 having such a configuration, the upper coupling part 510 is disposed on the upper surface of the extension flange 430 and bolted to the extension flange 430, and the lower coupling part 520 is the bottom part 350. It is disposed on the upper surface of the) and is bolted to the bottom 350 to connect the substrate handling robot 400 and the bottom 350. Accordingly, when deformation occurs in the bottom portion 350 in the direction of A of FIG. 10 due to pressure difference or vibration, and the bottom portion 350 rises, the bellows 530 of the pleat structure deforms the bottom portion 350. As it is elastically compressed, the amount of deformation of the bottom portion 350 is absorbed, and as a result, the deformation of the bottom portion 350 may be prevented from being transferred to the substrate handling robot 400. Of course, after the vacuum inside the transfer module chamber 300 is released and the inside of the transfer module chamber 300 is converted to an atmospheric state, the bottom portion 350 is lowered to the original state, and the bellows 530 is also the bottom portion. It is restored to its original state by being extended by the falling distance of 350. As such, even if deformation occurs in the bottom portion 350 due to a pressure difference or vibration, the position of the substrate handling robot 400 may be arbitrarily changed as the deformation absorbing unit 500 having the bellows 530 absorbs it. You will be able to stop it.

In this embodiment, the deformation absorbing unit 500 is made of a metal material, that is, stainless steel. Therefore, even if the bellows 530 is frequently operated in the vertical direction, the durability can be ensured. However, since the scope of the present invention is not limited thereto, the strain absorbing unit 500, particularly the bellows 530, may be made of rubber. However, if the bellows 530 is made of a rubber material, it would be desirable to be made of high-strength synthetic rubber that does not easily break or tear apart from a simple rubber material.

On the other hand, in the present embodiment, the robot support unit 600 is further provided as a means for firmly supporting the substrate handling robot 400. Since the substrate handling robot 400 cannot be directly coupled to the support frame 310 due to the structure of the substrate handling robot 400, the robot support part 600 is provided.

The robot support unit 600 is disposed on the lower surface of the extension flange 430 of the substrate handling robot 400 and is disposed on the upper horizontal portion 610 that is bolted to the extension flange 430 and the upper surface of the support frame 310. A lower horizontal portion 620 is bolted to the support frame 310 and a vertical portion 630 for interconnecting the upper and lower horizontal portions 610 and 620.

The cross-sectional structure of the robot support unit 600 has a substantially Korean letter 'c' shape, and a little space is formed between the vertical portion 630 and the robot shaft 410 of the substrate handling robot 400.

The process of assembling the substrate handling robot 400 and its operation by such a configuration will be described with reference to FIGS. 7 to 10 as follows.

First, as shown in FIG. 7, a box approximately having an upper surface opened by assembling the bottom portion 350, the first side plate portion 351, the top plate portion 352, and the second side plate portion 353. The transfer module chamber 300 formed as a structure is mounted on the support frame 310. Then, the coupling between the bottom portion 350 and the support frame 310 is bolted.

Next, as shown in FIG. 8, the lower horizontal part 620 of the robot support part 600 is disposed on the upper surface of the support frame 310, and the lower horizontal part 620 and the support frame 310 are bolted to each other. .

Then, as shown in Figure 9, the substrate handling robot 400 is assembled. That is, after opening the upper opening and closing plate 330 to make the interior of the transfer module chamber 300 to the atmospheric pressure state, the substrate handling robot 400 is introduced into the transfer module chamber 300. Subsequently, in a state in which the robot shaft 410 of the substrate handling robot 400 passes through the robot installation hole 350a of the bottom 350, the extension flange 430 of the substrate handling robot 400 is the robot support part 600. After the upper horizontal portion 610 of the) to be disposed on the extension flange 430 and the upper horizontal portion 610 is bolted to each other. At this time, the position and height of the substrate handling robot 400 meets the required conditions.

Then, as shown in FIG. 10, the deformation absorbing unit 500 is finally assembled. That is, the upper coupling part 510 of the deformation absorption unit 500 is disposed on the upper surface of the extension flange 430 to be bolted to the extension flange 430, and then the lower coupling part 520 of the deformation absorption unit 500. Is disposed on the top surface of the bottom portion 350 and bolted to the bottom portion 350 to complete the assembly.

When the assembly of the substrate handling robot 400 is completed, the inside of the transfer module chamber 300 is vacuum-formed and then a chemical vapor deposition process is performed.

As such, the inside of the transfer module chamber 300 is maintained in a vacuum state during the deposition process. In this case, the bottom portion 350 of the transfer module chamber 300 is in a direction A of FIG. 10 due to a relative pressure difference with an external atmospheric pressure. Deformation may occur.

If the deformation occurs in the bottom portion 350 in the direction of FIG. 10A, the bellows 530 of the pleat structure is elastically compressed as much as the deformation of the bottom portion 350, and thus the bottom portion 350 is elastically compressed. By absorbing the deformation amount, it is possible to prevent the deformation of the bottom portion 350 from being transferred to the substrate handling robot 400.

Therefore, as in the prior art, the position of the substrate handling robot 400 is not changed arbitrarily in the initial assembly state. As such, since the position of the substrate handling robot 400 is not changed, the substrate may be transferred to the correct position of the load lock chamber 100 or the process module chamber 200.

On the other hand, if the deposition process is stopped or the interior of the transfer module chamber 300 is converted to an atmospheric pressure state for the maintenance of the transfer module chamber 300, the bottom portion 350 is lowered to its original state, even in this case bellows As the 530 is extended by the falling distance of the bottom portion 350 and restored to its original state, the position of the substrate handling robot 400 may be prevented from being changed.

As such, according to the present exemplary embodiment, the substrate handling robot 400 may be modified as the bottom portion 350 of the transfer module chamber 300 is deformed by an external pressure change or an external force such as vibration. It is possible to transfer the substrate to the correct position of the load lock chamber 100 or the process module chamber 200 to prevent the position of the change.

11 is a cross-sectional view of a region in which a substrate handling robot is located in a chemical vapor deposition apparatus according to another embodiment of the present invention.

Referring to this figure, the strain absorbing unit 500a of the present embodiment has the same function as the strain absorbing unit 500 of the above-described embodiment, but is provided in a different structure. That is, the deformation absorbing unit 500a of the present embodiment includes an upper coupling part 510a coupled to the extension flange 430 of the substrate handling robot 400, a connection part 350b coupled to the bottom 350, and The unit body 350c coupled to the connecting portion 350b at the end of the connecting portion 350b, the lower coupling portion 520a coupled to the unit body 350c, the upper coupling portion 510a and the lower coupling portion 520a. And a leaf spring 530a that absorbs the deformation (see A direction in FIG. 11) of the bottom portion 350 while elastically contracting and extending along the vertical direction.

In the above-described embodiment, the upper coupling portion 510 of the deformation absorbing unit 500 is disposed on the upper surface of the extension flange 430 and coupled with the extension flange 430. However, in the present embodiment, the upper coupling portion 510a ) Is disposed on the bottom surface of the extension flange 430 and is coupled to the extension flange 430. Accordingly, the upper portion of the robot support part 600a has a structure that is coupled to the upper coupling part 510. Of course, even with such a structure, there is no problem in providing the effect of the present invention.

By the configuration as shown in FIG. 11, when the deformation of the bottom portion 350 occurs so that the bottom portion 350 rises in the A direction, the connection portion 350b and the unit body 350c together with the bottom portion 350 are formed. As the leaf spring 530a is contracted, the plate spring 530a absorbs the overall deformation of the bottom 350, the connection 350b, and the unit body 350c. As a result, the position of the substrate handling robot 400 is changed. It will be able to stop.

As described above, the present invention is not limited to the described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the present invention, which will be apparent to those skilled in the art. Therefore, such modifications or variations will have to be belong to the claims of the present invention.

1 is a schematic configuration diagram of a chemical vapor deposition apparatus according to the prior art.

2 is a schematic structural diagram of a chemical vapor deposition apparatus according to an embodiment of the present invention.

3 is a plan view of the transfer module chamber shown in FIG. 1.

4 is an external perspective view of the transfer module chamber region.

5 is a cross-sectional view of the region where the substrate handling robot is located in the transfer module chamber.

6 is an enlarged perspective view of main parts of FIG. 5.

7 to 10 are cross-sectional views showing the assembly process of the substrate handling robot step by step.

11 is a cross-sectional view of a region in which a substrate handling robot is located in a chemical vapor deposition apparatus according to another embodiment of the present invention.

* Explanation of symbols for the main parts of the drawings

100: load lock chamber 200: process module chamber

300: transfer module chamber 310: support frame

320: safety guard 330: upper opening and closing plate

340: substrate breakage detection sensor 350: bottom

400: substrate handling robot 500,500a: deformation absorption unit

600,600a: Robot support

Claims (13)

A transfer module chamber connecting a load lock chamber and a process module chamber, wherein a robot installation hole is formed in a central area of the bottom portion; A support frame supporting the transfer module chamber from below; A substrate handling robot configured to transfer a substrate to the load lock chamber and the process module chamber by arranging an upper portion of the upper portion of the transfer module chamber while a portion is inserted into the robot installation hole; A deformation absorbing unit coupled to the bottom part and the substrate handling robot, the deformation absorbing unit buffering the deformation of the bottom part to prevent the deformation of the bottom part from being transmitted to the substrate handling robot; And And a robot support having one end coupled to the support frame to support the substrate handling robot. The method of claim 1, The deformation absorption unit, An upper coupling part coupled to one side of the substrate handling robot; A lower coupling part coupled to one side of the bottom part; And And a bellows connecting the upper coupling portion and the lower coupling portion to absorb elastic deformation and contraction along the vertical direction. The method of claim 2, The transfer module chamber, A first side plate portion standing up at an end of the bottom portion; An upper plate disposed parallel to the bottom at an upper end of the first side plate; And And a second side plate portion disposed in parallel with the first side plate portion at an end portion of the upper plate portion. The method of claim 3, The substrate handling robot, A robot shaft provided to be inserted into the robot installation hole in a form passing through the robot installation hole; A robot body disposed in an upper region of a bottom portion of the transfer module chamber; And Chemical vapor deposition apparatus comprising an extension flange extending radially outward in the region between the robot axis and the robot body. The method of claim 4, wherein The upper coupling portion is disposed on the upper surface of the extension flange is coupled to the extension flange, The lower coupling portion is disposed on an upper surface of the bottom portion is a chemical vapor deposition apparatus, characterized in that coupled to the bottom portion. The method of claim 5, O-ring is disposed in the region between the upper coupling portion and the extension flange, and the region between the lower coupling portion and the bottom portion. delete The method of claim 1, The robot support unit, An upper horizontal portion coupled to one side of the substrate handling robot; A lower horizontal portion coupled to one side of the support frame; And And a vertical portion connecting the upper horizontal portion and the lower horizontal portion. The method of claim 1, And a gap formed between the bottom portion and the support frame to compensate an assembly tolerance of the transfer module chamber with respect to the support frame. 10. The method of claim 9, And the gap is provided to be recessed upwardly from the bottom of the bottom portion. The method of claim 3, The first side plate portion is formed relatively thinner than the bottom portion and the top plate portion, At least one reinforcing rib is further provided between the bottom portion, the first side plate portion and the top plate portion. The method of claim 1, The strain absorbing unit is a chemical vapor deposition apparatus, characterized in that made of a metal material. The method of claim 1, The deformation absorption unit, An upper coupling part coupled to one side of the substrate handling robot; A connection part coupled to the bottom part; A unit body coupled with the connection part at the end of the connection part; A lower coupling part coupled to one side of the unit body; And And a leaf spring that connects the upper coupling portion and the lower coupling portion to absorb and deform the bottom portion while elastically contracting and extending along the vertical direction.

Images