CN205802285U - Pit cover device, transfer chamber device and for promoting the device of lid - Google Patents
Pit cover device, transfer chamber device and for promoting the device of lid Download PDFInfo
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- CN205802285U CN205802285U CN201520914718.1U CN201520914718U CN205802285U CN 205802285 U CN205802285 U CN 205802285U CN 201520914718 U CN201520914718 U CN 201520914718U CN 205802285 U CN205802285 U CN 205802285U
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- 238000012546 transfer Methods 0.000 title claims abstract description 48
- 230000001737 promoting effect Effects 0.000 title claims abstract description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 239000004411 aluminium Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 2
- 230000004899 motility Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 235000013351 cheese Nutrition 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
This utility model relates to a kind of Pit cover device, transfer chamber device and for promoting the device of lid, it is provided that Pit cover device.Described Pit cover device may include that lid；One or more arms, the one or more arm is coupled to described lid；And one or more gear-box, the one or more gear-box is coupled to the one or more arm by one or more first axles.Motor is coupled to the one or more gear-box also by one or more second axles.Also disclose transfer chamber device and for promoting the device of lid.
Description
Technical field
Embodiment of the disclosure the transfer chamber relating generally to utilize in the system for process substrate.More specifically, embodiment as herein described relates to transmission cavity chamber cap and the actuator being associated with described transmission cavity chamber cap.
Background technology
Organic Light Emitting Diode (OLED) is for manufacturing for showing the television screen of information, computer monitor, mobile phone etc..Typical OLED can include all organic material layer between two electrodes, these layers all by formed have individually can energy supply pixel matrix display panel in the way of be deposited on substrate.OLED is normally located between two face glass, and seals the two face glass edge to encapsulate OLED wherein.
Along with the market acceptance to plate technique, it is that flat faced display manufacturer develops the new system adapting to larger sized glass substrate that the demand of bigger display, the yield of increase and lower manufacturing cost has been ordered about equipment manufacturers.It addition, with efficiently and there is cost-benefit mode safeguard that the ability of various system unit can help to improve the cost being associated with this kind equipment of operation.But, owing to have employed this type of main equipment to process large-area substrates, therefore, this type of system access and maintenance becomes time-consuming and difficult.Such as, in order to remove the path that the lid of transfer chamber is cleaned with offer and safeguards, it is necessary to crane (crane).The necessity of crane is the extra cost for constructing the motility that manufacturing facility is had, and usually limit the motility that constructable manufacturing facility is had.It addition, the size of the increase of equipment may hinder the operation of crane.
Therefore, there is a need in the art for lid and the actuator of the improvement for transfer chamber.
Utility model content
The purpose of this utility model is to provide a kind of Pit cover device, transfer chamber device and for promoting the device of lid, and it can solve above mentioned all technological deficiencies.
In one embodiment, it is provided that Pit cover device.Described Pit cover device may include that lid；One or more arms, the one or more arm is coupled to described lid；And one or more gear-box, the one or more gear-box is coupled to the one or more arm by one or more first axles.Motor is coupled to the one or more gear-box also by one or more second axles.
It is preferred that described lid is rectangle individual dome-like structures.More it is preferred that described lid is coupled with one or more corner brace member, and the one or more corner brace member is configured to be structurally reinforced described individual dome-like structures；Or, described lid comprises aluminium.
It is preferred that the one or more arm is coupled to described lid by one or more supports.
It is preferred that the one or more first axle includes that bearing assembly, described bearing assembly are configured to allow for the one or more arm and rotate relative to the one or more first axle.
It is preferred that the one or more gear-box includes multiple gear, the plurality of gear arrangement becomes changes rotatory force between the one or more second axle and the one or more the first axle.
It is preferred that described device farther includes: one or more pin components, the one or more pin component is arranged through the one or more arm.
It is preferred that described device farther includes: indicator pin support, described indicator pin support is coupled at the periphery of described lid.
In another embodiment, it is provided that transfer chamber device.Described transfer chamber device may include that chamber body, described chamber body define volume wherein；And lid, lid couples described chamber body rotationally.One or more brace member can be coupled to described chamber body by neighbouring lid, and one or more arm may be coupled to lid and described chamber body.One or more gear-boxes can be coupled to the one or more arm by one or more first axles, and motor can be coupled to the one or more gear-box by one or more second axles.
It is preferred that lid is the rectangle individual dome-like structures comprising aluminium.
It is preferred that the one or more arm is coupled to described lid by one or more first supports.More it is preferred that the one or more arm is coupled to described chamber body by one or more second supports.Also want it is preferred that the one or more arm is from the one or more the second support, extend to the one or more first support by least one in the one or more brace member.
It is preferred that described device farther includes: sensor, described sensor is coupled to described chamber body.More it is preferred that described device farther includes: indicator pin, described indicator pin is coupled at the periphery of lid, and described indicator pin is configured to dock and contact described sensor with described sensor.
It is preferred that the one or more gear-box includes multiple gear, the plurality of gear arrangement becomes changes rotatory force between the one or more second axle and the one or more the first axle.
It is preferred that lid is configured to turn to deviate from described primary importance the second position of 150 ° from the primary importance contacted with described chamber body.More it is preferred that the rotary shaft of the one or more the first axis limit lid.
In another embodiment, it is provided that for promoting the device of lid.Described device can include being coupled to multiple first support and multiple arms of multiple second support.Multiple first axles can be coupled to the plurality of arm by the plurality of second support, and multiple gear-box may be coupled to the plurality of first axle.One or more second axles may be coupled to the plurality of gear-box, and motor may be coupled to the one or more second axle.
Accompanying drawing explanation
Therefore, in order to the mode of the features described above structure of the disclosure is understood in detail, the more specifically description to the disclosure summarized briefly above can be obtained by referring to embodiment, some in embodiment shown in appended accompanying drawing.It should be noted, however, that appended accompanying drawing only illustrates exemplary embodiment, and therefore should not be considered as limiting the scope of the disclosure, because the disclosure can allow other Equivalent embodiments.
Fig. 1 illustrates the schematic plan view of the transfer chamber in processing system.
Fig. 2 illustrates the plane graph of transfer chamber.
Fig. 3 illustrates the side view of the transfer chamber of Fig. 2.
Fig. 4 illustrates the partial side elevation view of transmission cavity chamber cap and actuator.
Fig. 5 illustrates the axonometric chart of the inside of the transmission cavity chamber cap of Fig. 4.
Fig. 6 illustrates the side view of indicator pin and sensor.
In order to make it easy to understand, in the conceived case, employ identical reference to specify the common identical element of each figure.The element and the feature that contemplate an embodiment can be beneficially incorporated other embodiments, and without being further discussed below.
Detailed description of the invention
Embodiment of the disclosure and relate to transfer chamber, described transfer chamber has lid and actuator.Described lid can be rotatably coupled to described transfer chamber, and described lid can be opened and closed to allow to pass in and out the inside of described transfer chamber by described actuator.Described actuator generally comprises support (bracket), and arm is coupled to described lid and described chamber body by described support.Multiple axles and gear-box can be coupled between described arm and motor.The rotatable described axle of described motor is to open and close described lid.Also disclose the sensor for determining lid position.
Fig. 1 illustrates the schematic plan view of the transfer chamber 102 in processing system 100.Processing system 100 is generally configured to for manufacturing OLED on display-type substrate.Transfer chamber 102 can be centrally positioned in processing system 100, and multiple process chamber 108 may be coupled to transfer chamber 102.Load lock chamber 104 may be coupled to transfer chamber 102, and load lock chamber 104 can be configured to be operatively coupled to factor interface 106.
Load lock chamber 104 may be coupled to vacuum generating device (not shown), and generates pressure environment as the environmental classes maintained interior with transfer chamber 102.In operation, substrate can be sent to load lock chamber 104 from factor interface 106, and be transferred into subsequently in transfer chamber 102.Mechanical arm in transfer chamber 102 can be travelled to and fro between and be coupled to one or more process chambers 108 of transfer chamber 102 to transmit substrate.In one embodiment, transfer chamber 102 can be octagonal.Although illustrating that five process chambers 108, it is contemplated that greater or lesser number of process chamber 108 may be coupled to transfer chamber 102.In certain embodiments, mask chamber (not shown) may be coupled to transfer chamber 102.
Fig. 2 illustrates the plane graph of transfer chamber 102.Transfer chamber 102 includes chamber body 204, and described chamber body 204 limits the volume being located therein.Lid 206 can couple chamber body 204 rotationally.Lid 206 can be mainly rectangular shape, it is, however, contemplated that other shapes can be utilized.Lid 206 can be at least partly cheese (illustrating in greater detail with reference to Fig. 5), and angle brace (gusset) component 210 may be coupled to dome-shaped part to improve the structural intergrity of lid 206.In one embodiment, lid 206 can be manufactured by aluminium, it is, however, contemplated that be possible with other materials, such as, and rustless steel.In general, the material selected for lid 206 and the manufacture of chamber body 204 can be identical material.
One or more struts (brace) component 208 also can couple chamber body 204.Brace member 208 can be arranged by neighbouring lid 206 linearly.In one embodiment, brace member 208 may be provided at the either side of lid 206.Such as, brace member 208 can be set adjacent to the long side of the lid 206 of rectangular shape.Brace member 208 can be configured for improving the structural intergrity of chamber body 204, especially true during the opening and closing of lid 206.In one embodiment, brace member 208 can be formed by aluminium, it is, however, contemplated that be possible with other suitable materials.
Actuator 202 can be coupled between chamber body 204 and lid 206.Actuator 202 generally comprises one or more first support 214, one or more arm 212, one or more first axle 220,222, one or more gear-box 216, one or more second axle 224 and motor 218.One or more first supports 214 may be coupled to cover 206.First support 214 can be coupled to cover 206 by multiple fastening members (such as, screw rod or bolt etc.).First support 214 may also be coupled to one or more arm 212.Arm 212 can be fastened to the first support 214 by any suitable device (such as, by welding etc.).Arm 212 can extend to one or more second support 406 from the first support 214, will be more fully described the one or more second support 406 with reference to Fig. 4.Arm 212 can be rotatably coupled to one or more first axle 220,222.First axle 220,222 can extend through arm 212, and arm 212 can rotate relative to the one or more first axle 220,222.In one embodiment, the first axle 220,222 can dock with bearing, and these Bearing configuration become to allow the first axle 220,222 and arm 212 thus to rotate around the centrage of the first axle 220,222.
First axle 220,222 may also be coupled to one or more gear-box 216.Gear-box 216 may be coupled in chamber body 204 and/or strut 208.Gear-box 216 can accommodate multiple gear, and when rotating these gears, these gears apply rotatory force on the first axle 220,222.This gear-box may also be coupled to one or more second axle 224.Second axle 224 may be coupled to motor 218, and this motor 218 is configured to rotate the second axle 224.In operation, motor 218 can generate rotatory force on the second axle 224.Multiple gears that the rotatory force of the second axle 224 accommodates in can be switched to gear-box 216.Rotatory force can be transformed on the first axle 220,222 by these gears further.Rotatory force can be transformed into arm 212 by the first axle 220,222 subsequently, depends on desired operation, and this can make lid 206 open or close.
Fig. 3 illustrates the side view of the transfer chamber 102 shown in Fig. 2.Lid 206 is illustrated at the position closed.The domed shape of lid 206 is shown more clearly that the most in figure 3.By actuator 202, lid 206 in the close position can be opened to the open position shown in Fig. 4.
Fig. 4 illustrates lid 206 and the partial side elevation view of actuator 202, and its middle cover 206 is in open position.Actuator 202 can be configured to from the position (figure 3 illustrates) closed, lid 206 is moved to open position.In one embodiment, the lid 206 of the open position angle between the position of Guan Bi rotates about 100 ° and about 180 °, such as, about 150 ° will can be in.Lid 206 can rotate around the axle limited by one or more first axles 220,222.The ability of the position that lid 206 rotates into the position exceeding the Guan Bi being perpendicular to this lid can be provided the cleaning of the improvement carried out by facility crane.Therefore, when covering 206 and being in open position, manufacturing facility crane can move freely through around facility.
One or more second support 406 mentioned above may be coupled to chamber body 204 and/or brace member 208.First axle 220,222 can extend across the second support 406 so that arm 212 may be coupled to the first axle 220,222.In one embodiment, the second support 406 can include stop dog component 404.Stop dog component 404 may be coupled to the second support 406, and can have and be configured at least one of contact arm 212 and cut sth. askew or the edge of chamfering.In one embodiment, stop dog component 404 is located so that arm 212 contacts this stop dog component 404 when covering 206 and being in open position.
Pin component 402 may be coupled to arm 212.Pin component 402 can extend through the second support 406, and can be configured to, when covering 206 and being in open position, be locked in the appropriate position by arm 212.In one embodiment, pin component 402 can be by spring-loaded so that when covering 206 and being in open position, and pin component 402 can engage the hole (not shown) formed in the second support 406.Pin component 402 can extend through the hole of the second support, and is locked in the appropriate position by arm 212.Pin component 402 can be optionally made to depart from, in order to allow actuator 202 that lid 206 is back to the position closed.
Indicator pin support 408 may be coupled to cover 206.Indicator pin support 408 can by various coupling devices (such as, by screw rod, bolt/nut and welding etc.) be fastened to cover 206 peripheral at.Indicator pin support 408 can extend beyond the periphery of lid 206 so that indicator pin 608 (seeing Fig. 6) can be with engagement transducer assembly 602.
Fig. 5 illustrates the axonometric chart of the inside of lid 206.As previously mentioned, lid 206 can include the dome-shaped part that can be limited by the inner surface 502 of lid 206.In general, during the transmission and process of substrate, transfer chamber is maintained under vacuo.Therefore, lid 206 allows for structurally tolerating condition of high vacuum degree.Multiple truss (truss) component 504 can be along inner surface 502 across the inside of lid 206.Trussmember 504 can extend between the long side of the lid 206 of rectangular shape, and trussmember 504 may be coupled to inner surface 502 and contacts with this inner surface 502.In one embodiment, trussmember 504 is solderable is connected to inner surface 502.One or more holes 506 may be formed in each trussmember in trussmember 504.The weight of lid 206 can be reduced in hole 506, and this can provide and be operated the opening and closing of the improvement of lid 206 by actuator 202.
Fig. 6 illustrates indicator pin support 408 and the side view of sensor cluster 602.As previously mentioned, indicator pin support 408 is coupled to cover 206, and extends beyond the periphery of lid 206.Joint (joint) component 606 may be coupled to indicator pin support 408, and indicator pin 608 can extend from joint member 606.In one embodiment, joint member 606 can accommodate the spring (not shown) being coupled to indicator pin 608.
Module component 604 may be coupled to chamber body 204, and sensor cluster 602 may be coupled to module component 604.Module component can be configured to alignment sensor assembly 602 with receiver-indicator pin 608.Sensor cluster 602 can include sensor 610, such as, proximity sensor, and this sensor is configured to the sensing instruction indicator pin 608 tolerance relative to the position of lid 206.As shown in Figure 6, lid 206 is positioned at the position of Guan Bi, and indicator pin 608 is disposed entirely within sensor 610.When indicator pin 608 engagement transducer 610, signal can send to transfer chamber control device.This signal can provide and cover 206 instructions being correctly positioned to carry out vacuumizing.When being promoted lid 206 by actuator 202, indicator pin 608 can move apart sensor 610.It addition, lid 206 also can be detected by sensor 610 from the amount of the position slightly displacement of Guan Bi.Therefore, indicating cover 206 can be in the signal of the desired location for vacuumizing and is supplied to transfer chamber and controls device by sensor cluster 602.
Sum it up, this transfer chamber actuator can allow to open and close transmission cavity chamber cap in an efficient way.Can open and close and cover to allow the maintenance to transfer chamber.Lid can be opened to the position allowing to more efficiently use crane.Therefore, the chamber downtime time can reduce, and this contributes to the improvement of the yield to the processing system wherein utilizing transfer chamber.
Although foregoing is for embodiment of the disclosure, but also can design other and the further embodiment elemental range without departing from the disclosure of the disclosure, and the scope of the present disclosure resides in the claims hereinafter appended.
Claims (20)
1. a Pit cover device, it is characterised in that described Pit cover device includes:
Lid；
One or more arms, the one or more arm is coupled to described lid；
One or more gear-boxes, the one or more gear-box is coupled to the one or more arm by one or more first axles；And
Motor, described motor is coupled to the one or more gear-box by one or more second axles.
Pit cover device the most according to claim 1, it is characterised in that described lid is rectangle individual dome-like structures.
Pit cover device the most according to claim 2, it is characterised in that described lid is coupled with one or more corner brace member, the one or more corner brace member is configured to be structurally reinforced described individual dome-like structures.
Pit cover device the most according to claim 2, it is characterised in that described lid comprises aluminium.
Device the most according to claim 1, it is characterised in that the one or more arm is coupled to described lid by one or more supports.
Pit cover device the most according to claim 1, it is characterised in that the one or more first axle includes that bearing assembly, described bearing assembly are configured to allow for the one or more arm and rotate relative to the one or more first axle.
Pit cover device the most according to claim 1, it is characterised in that the one or more gear-box includes multiple gear, the plurality of gear arrangement becomes changes rotatory force between the one or more second axle and the one or more the first axle.
Pit cover device the most according to claim 1, it is characterised in that farther include:
One or more pin components, the one or more pin component is arranged through the one or more arm.
Pit cover device the most according to claim 1, it is characterised in that farther include:
Indicator pin support, described indicator pin support is coupled at the periphery of described lid.
10. a transfer chamber device, it is characterised in that described transfer chamber device includes:
Chamber body, described chamber body defines volume wherein；
Lid, lid is rotatably coupled to described chamber body；
One or more brace member, the neighbouring lid of the one or more brace member is coupled to described chamber body；
One or more arms, the one or more arm is coupled to lid and described chamber body；
One or more gear-boxes, the one or more gear-box is coupled to the one or more arm by one or more first axles；And
Motor, described motor is coupled to the one or more gear-box by one or more second axles.
11. transfer chamber devices according to claim 10, it is characterised in that lid is the rectangle individual dome-like structures comprising aluminium.
12. transfer chamber devices according to claim 10, it is characterised in that the one or more arm is coupled to described lid by one or more first supports.
13. transfer chamber devices according to claim 12, it is characterised in that the one or more arm is coupled to described chamber body by one or more second supports.
14. transfer chamber devices according to claim 13, it is characterised in that the one or more arm, from the one or more the second support, extends to the one or more first support by least one in the one or more brace member.
15. transfer chamber devices according to claim 10, it is characterised in that farther include:
Sensor, described sensor is coupled to described chamber body.
16. transfer chamber devices according to claim 15, it is characterised in that farther include:
Indicator pin, described indicator pin is coupled at the periphery of lid, and described indicator pin is configured to dock and contact described sensor with described sensor.
17. transfer chamber devices according to claim 10, it is characterised in that the one or more gear-box includes multiple gear, the plurality of gear arrangement becomes changes rotatory force between the one or more second axle and the one or more the first axle.
18. transfer chamber devices according to claim 10, it is characterised in that lid is configured to turn to deviate from described primary importance the second position of 150 ° from the primary importance contacted with described chamber body.
19. transfer chamber devices according to claim 18, it is characterised in that the rotary shaft of the one or more the first axis limit lid.
20. 1 kinds for promoting the device of lid, it is characterised in that described device includes:
Multiple arms, the plurality of arm is coupled to multiple first support and multiple second support；
Multiple first axles, the plurality of first axle is coupled to the plurality of arm by the plurality of second support；
Multiple gear-boxes, the plurality of gear-box is coupled to the plurality of first axle；
One or more second axles, the one or more second axle is coupled to the plurality of gear-box；And
Motor, described motor is coupled to the one or more second axle, and wherein, described motor is configured to rotate the one or more second axle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520914718.1U CN205802285U (en) | 2015-11-17 | 2015-11-17 | Pit cover device, transfer chamber device and for promoting the device of lid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520914718.1U CN205802285U (en) | 2015-11-17 | 2015-11-17 | Pit cover device, transfer chamber device and for promoting the device of lid |
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| Publication Number | Publication Date |
|---|---|
| CN205802285U true CN205802285U (en) | 2016-12-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520914718.1U Active CN205802285U (en) | 2015-11-17 | 2015-11-17 | Pit cover device, transfer chamber device and for promoting the device of lid |
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| Country | Link |
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| CN (1) | CN205802285U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112410760A (en) * | 2020-10-26 | 2021-02-26 | 北京北方华创微电子装备有限公司 | Process chamber in semiconductor process equipment and semiconductor process equipment |
-
2015
- 2015-11-17 CN CN201520914718.1U patent/CN205802285U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112410760A (en) * | 2020-10-26 | 2021-02-26 | 北京北方华创微电子装备有限公司 | Process chamber in semiconductor process equipment and semiconductor process equipment |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |