KR20160001858U - Transfer chamber lid door actuators - Google Patents

Abstract

Embodiments of the present disclosure relate to a transfer chamber having a lid and an actuator assembly. The lid can be rotatably coupled to the transfer chamber and the actuator assembly can open and close the lid to allow access to the interior of the transfer chamber. The actuator assembly generally includes a cover and brackets coupling the arms to the chamber body. The plurality of shafts and gearboxes may be coupled between the arms and the motor. The motor may rotate the shafts to open and close the lid. A sensor for determining the cover position is also disclosed.

Description

TRANSFER CHAMBER LID DOOR ACTUATORS [0002]

[0001] Embodiments of the present disclosure generally relate to a transfer chamber utilized in a system for processing substrates. More specifically, the embodiments described herein relate to a transfer chamber lid and associated actuators.

Organic light emitting diodes (OLEDs) are used in the manufacture of television screens, computer monitors, mobile phones, etc. for displaying information. A typical OLED can include layers of organic material positioned between two electrodes, all of which are deposited on a substrate in a manner that forms a matrix display panel having individually energizable pixels. The OLED is typically positioned between two glass panels, and the edges of the glass panels are sealed to encapsulate the OLED inside.

[0003] With regard to the acceptance of the market for flat panel technology, the demand for larger displays, increased production and lower manufacturing costs have led equipment manufacturers to increase the size of glass substrates Have developed new systems to accommodate the In addition, the ability to efficiently and cost-effectively maintain various system components can help improve the costs associated with operating such equipment. However, due to the adoption of such large equipment for processing large area substrates, the access and maintenance of such systems is time consuming and difficult. For example, a crane is required to remove the cover of the transfer chamber to provide cleaning and maintenance access. The need for a crane often limits the flexibility with which a manufacturing facility can be constructed and is an additional cost for such flexibility. In addition, the increased size of the equipment can interfere with the operation of the crane.

Accordingly, what is needed in the art are improved lids and actuator assemblies for transfer chambers.

[0005] In one embodiment, a chamber lid apparatus is provided. The chamber lid apparatus includes a lid body, one or more arms coupled to the lid body, and one or more gears coupled to one or more arms by one or more first shafts, Boxes. The motor may also be coupled to one or more gearboxes by one or more second shafts.

[0006] In another embodiment, a transfer chamber device is provided. The transfer chamber device may include a chamber body defining a volume therein, and a cover rotatably coupled to the chamber body. One or more of the brace members may be coupled to the chamber body adjacent the lid and one or more of the arms may be coupled to the lid and the chamber body. One or more gearboxes may be coupled to one or more of the arms by one or more first shafts and the motor may be coupled to one or more of the second shafts by one or more of the second shafts, Lt; RTI ID = 0.0 > gearboxes < / RTI >

[0007] In another embodiment, an apparatus for lifting a lid is provided. The apparatus may include a plurality of first brackets and a plurality of arms coupled to the plurality of second brackets. The plurality of first shafts may be coupled to the plurality of arms via the plurality of second brackets, and the plurality of gear boxes may be coupled to the plurality of first shafts. One or more of the second shafts may be coupled to the plurality of gearboxes, and the motor may be coupled to one or more second shafts.

[0008] In the manner in which the recited features of the disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the accompanying drawings, ≪ / RTI > It should be noted, however, that the appended drawings illustrate only typical embodiments and are not to be considered as limiting the scope of the disclosure, as this disclosure may permit other equally effective embodiments.
[0009] FIG. 1 illustrates a schematic plan view of a transfer chamber of a processing system.
[0010] Figure 2 illustrates a top view of a transfer chamber.
[0011] FIG. 3 illustrates a side view of the transfer chamber of FIG. 2.
[0012] FIG. 4 illustrates a partial side view of a transfer chamber lid and actuator assembly.
[0013] FIG. 5 illustrates an interior perspective view of the transfer chamber lid of FIG. 4;
[0014] FIG. 6 illustrates a side view of an indicator pin and sensor.
In order to facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that the elements and features of one embodiment may be advantageously incorporated into other embodiments without further recitation.

[0016] Embodiments of the disclosure relate to a transfer chamber having a lid and an actuator assembly. The lid can be rotatably coupled to the transfer chamber and the actuator assembly can open and close the lid to allow access to the interior of the transfer chamber. The actuator assembly generally includes a cover and brackets coupling the arms to the chamber body. The plurality of shafts and gearboxes may be coupled between the arms and the motor. The motor may rotate the shafts to open and close the lid. A sensor for determining the cover position is also disclosed.

[0017] FIG. 1 illustrates a schematic plan view of a transfer chamber 102 of a processing system 100. The processing system 100 may generally be configured to fabricate OLED devices on substrates of the display type. The transfer chamber 102 may be centrally located within the processing system 100 and a plurality of processing chambers 108 may be coupled to the transfer chamber 102. The load lock chamber 104 may also be coupled to the transfer chamber 102 and the load lock chamber 104 may be configured to be operably coupled to the factory interface 106 .

[0018] The load lock chamber 104 can be coupled to a vacuum generating device (not shown) and creates a pressure environment similar to the environment that is maintained within the transfer chamber 102. In operation, substrates may be transferred from the factory interface 106 to the load lock chamber 104 and then to the transfer chamber 102. The robots in the transfer chamber 102 can transfer substrates to and from one or more processing chambers 108 coupled to the transfer chamber 102. In one embodiment, the transfer chamber 102 may be octagonal shaped. It is contemplated that more or fewer processing chambers 108 may be coupled to the transfer chamber 102, although five processing chambers 108 are shown. In certain embodiments, mask chambers (not shown) may also be coupled to the transfer chamber 102.

[0019] FIG. 2 illustrates a top view of the transfer chamber 102. The transfer chamber 102 includes a chamber body 204 defining a volume therein. The lid 206 may be rotatably coupled to the chamber body 204. It is contemplated that the lid 206 may be primarily rectangular in shape, although other shapes may be utilized. At least a portion of the lid 206 may be in the form of a dome (shown in more detail in connection with FIG. 5), and a gusset member 206 may be provided to improve the structural integrity of the lid 206. [ 210 may be coupled to the dome portion. In one embodiment, the cover 206 may be made of an aluminum material, but it is contemplated that other materials such as stainless steel may also be utilized. In general, the materials selected for the manufacture of the chamber body 204 and the cover 206 may be the same material.

[0020] One or more of the brace members 208 may also be coupled to the chamber body 204. The brace members 208 may be arranged linearly adjacent the cover 206. [ In one embodiment, the brace member 208 may be disposed on either side of the lid 206. For example, the brace members 208 may be disposed adjacent the long sides of the rectangular shaped lid 206. The brace members 208 may be configured to improve the structural integrity of the chamber body 204, particularly during opening and closing of the lid 206. In one embodiment, it is contemplated that the brace members 208 may be formed of an aluminum material, although other suitable materials may also be utilized.

[0021] The actuator assembly 202 may be coupled between the chamber body 204 and the lid 206. The actuator assembly 202 generally includes one or more first brackets 214, one or more arms 212, one or more first shafts 220, 222, More than one gearbox 216, one or more second shafts 224, and a motor 218. One or more of the first brackets 214 may be coupled to the lid 206. The first brackets 214 may be a plurality of fastening members, such as screws or bolts, or the like. The first brackets 214 may also be coupled to one or more of the arms 212. The arms 212 can be fastened to the first brackets 214 by any suitable device, such as by welding or the like. The arms 212 may extend from the first brackets 214 to one or more second brackets 406 as will be described in more detail with respect to FIG. The arms 212 may be rotatably coupled to one or more of the first shafts 220, 222. The first shafts 220 and 222 may extend through the arms 212 and the arms 212 may rotate relative to one or more first shafts 220 and 222. In one embodiment, the first shafts 220 and 222 include arms 212 that are centered about the rotation of the first shafts 220 and 222 and thus the centerlines of the first shafts 220 and 222, Lt; RTI ID = 0.0 > a < / RTI >

[0022] The first shafts 220, 222 may also be coupled to one or more gearboxes 216. The gearboxes 216 may be coupled to one of the braces 208 and / or to the chamber body 204. The gear boxes 216, when rotated, may house a plurality of gears that transmit rotational forces to the first shafts 220, 222. The gearboxes may also be coupled to one or more second shafts 224. The second shafts 224 may be coupled to a motor 218 configured to rotate the second shafts 224. In operation, the motor 218 may generate rotational forces for the second shafts 224. The rotational force of the second shafts 224 may be translated to a plurality of gears housed in the gearbox 216. [ The gears can further transmit the rotational force to the first shafts 220, The first shafts 220, 222 can then transmit rotational forces to the arms 212 which cause the cover 206 to open or close, depending on the required operation.

[0023] FIG. 3 illustrates a side view of the transfer chamber 102 illustrated in FIG. The lid 206 is shown in the closed position. The dome-shaped configuration of the lid 206 is also illustrated more clearly in Fig. The cover 206 of the closed position can be opened by the actuator assembly 202 in the open position illustrated in Fig.

[0024] FIG. 4 illustrates a partial side view of lid 206 and actuator assembly 202 with lid 206 in the open position. The actuator assembly 202 may be configured to move the lid 206 from the closed position (shown in Fig. 3) to the open position. In one embodiment, the cover 206 of the open position can rotate from about 100 degrees to about 180 degrees, e.g., about 150 degrees from the closed position. The cover 206 may rotate about an axis defined by one or more first shafts 220, 222. The ability to rotate the cover 206 beyond the position normal to the closed position of the cover provides improved clearance from the installation cranes. Thus, the manufacturing facility cranes are free to move around the facility when the lid 206 is in the open position.

[0025] One or more of the second brackets 406 referenced above may be coupled to the chamber body 204 and / or the brace member 208. The first shafts 220 and 222 may extend through the second brackets 406 such that the arms 212 can be coupled to the first shafts 220 and 222. In one embodiment, the second brackets 406 may include a stop member 404. The stop member 404 may be coupled to the second brackets 406 and may have at least one beveled or chamfered edge configured to contact the arms 212. [ In one embodiment, the stop member 404 is positioned such that the arms 212 contact the stop member 404 when the lid 206 is in the open position.

[0026] A pin member 402 may also be coupled to the arms 212. The pin member 402 may extend through the second brackets 406 and may be configured to lock the arms 212 in place when the lid 206 is in the open position . In one embodiment, the pin member 402 is configured such that when the lid 206 is in the open position, the pin member 402 engages the hole (not shown) formed in the second brackets 406 Spring loaded < / RTI > The pin member 402 can extend through the holes of the second brackets and secure the arms 212 in place. The pin members 402 may optionally be disengaged to allow the actuator assembly 202 to return the lid 206 to the closed position.

[0027] Indicator pin bracket 408 may also be coupled to lid 206. The indicator pin bracket 408 may be fastened to the perimeter of the cover 206 by various coupling devices, such as by screws, bolts / nuts, and welding. The indicator pin bracket 408 may extend beyond the periphery of the cover 206 so that the indicator pin 608 (see FIG. 6) can engage the sensor assembly 602.

[0028] FIG. 5 illustrates a perspective view of the interior of the lid 206. FIG. The cover 206 may include a dome-shaped portion that may be defined by the inner surface 502 of the lid 206. As shown in FIG. Generally, the transfer chamber 102 is held under vacuum during transfer and processing of the substrates. In this way, the lid 206 must be structurally capable of withstanding a high vacuum. A plurality of truss members 504 may span the interior of the cover 206 along the inner surface 502. The truss members 504 may extend between the long sides of the rectangular shaped lid 206 and the truss member 504 may be coupled to the inner surface 502 to contact the inner surface 502. In one embodiment, the truss members 504 can be welded to the inner surface 502. One or more holes 506 may be formed in each of the truss members 504. The holes 506 may reduce the weight of the lid 206 and may provide improved opening and closing of the lid 206 by the actuator assembly 202.

[0029] FIG. 6 illustrates a side view of the indicator pin bracket 408 and sensor assembly 602. As previously mentioned, the indicator pin bracket 408 couples to the cover 206 and extends beyond the periphery of the cover 206. A joint member 606 may be coupled to the indicator pin bracket 408 and an indicator pin 608 may extend from the mating member 606. [ In one embodiment, the engagement member 606 may receive a spring (not shown) coupled to the indicator pin 608.

A block member 604 may be coupled to the chamber body 204 and a sensor assembly 602 may be coupled to the blocking member 604. The blocking member may be configured to position the sensor assembly 602 to receive the indicator pin 608. The sensor assembly 602 may include a sensor 610 such as a proximity sensor configured to sense a metric indicative of the position of the indicator pin 608 relative to the lid 206. As illustrated in FIG. 6, the cover 206 is located in the closed position, and the indicator pin 608 is completely disposed within the sensor 610. When the indicator pin 608 engages the sensor 610, a signal can be transmitted to the transfer chamber controller. The signal may provide an indication that the lid 206 has been properly positioned to initiate a vacuum operation. When the lid 206 is lifted by the actuator assembly 202, the indicator pin 608 can move away from the sensor 610. Also, the amount by which the lid 206 is slightly displaced from the closed position can be detected by the sensor 610. Thereby, the sensor assembly 602 can provide a signal to the transfer chamber control device indicating that the lid 206 is in the desired position for vacuum operation.

[0031] In summary, the transfer chamber actuator assembly may enable opening and closing of the transfer chamber lid in an efficient manner. The lid can be opened and closed to allow maintenance access to the transfer chamber. The lid can be opened to a position that allows more effective use of the crane. Thereby, the chamber idle time can be reduced, which can contribute to an improvement in the throughput of the processing system in which the transfer chamber is utilized.

While the foregoing is directed to embodiments of the disclosure, other and further embodiments of the disclosure can be devised without departing from the basic scope thereof, and the scope of the disclosure is to be determined by the following claims .

100 processing system
102 chamber
104 load lock chamber
106 Factory Interface
108 processing chamber
202 actuator assembly
204 chamber body
206 Cover
208 Brace member
210 gusset members
212 arms
214 first brackets
216 Gearbox
218 Motor
220 first shafts
222 first shafts
224 second shafts
402 pin member
404 stop member
406 second brackets
408 Indicator pin bracket
502 inner surface
504 truss member
506 holes
602 sensor assembly
604 blocking member
606 coupling member
608 Indicator Pins
610 sensor

Claims (20)

A chamber lid apparatus comprising:
A cover body;
One or more arms coupled to the lid body;
One or more gearboxes coupled to said one or more arms by one or more first shafts; And
A motor coupled to said one or more gearboxes by one or more second shafts,
Chamber cover device. The method according to claim 1,
The lid body is a dome-shaped structure having a rectangular shape,
Chamber cover device. 3. The method of claim 2,
One or more gusset members are coupled to the lid body and configured to structurally reinforce the dome-
Chamber cover device. 3. The method of claim 2,
Wherein the cover body comprises an aluminum material,
Chamber cover device. The method according to claim 1,
One or more brackets coupling the one or more arms to the lid body,
Chamber cover device. The method according to claim 1,
Wherein the one or more first shafts include a bearing assembly configured to allow rotation of the one or more arms relative to the one or more first shafts.
Chamber cover device. The method according to claim 1,
Wherein the one or more gearboxes comprise a plurality of gears configured to transmit a rotational force between the one or more first shafts and the one or more second shafts.
Chamber cover device. The method according to claim 1,
Further comprising one or more pin members disposed through said one or more arms,
Chamber cover device. The method according to claim 1,
Further comprising an indicator pin bracket coupled to a perimeter of the lid body,
Chamber cover device. As a transfer chamber device,
A chamber body defining a volume therein;
A cover rotatably coupled to the chamber body;
One or more brace members coupled to the chamber body adjacent the lid;
One or more arms coupled to the lid and the chamber body;
One or more gearboxes coupled to said one or more arms by one or more first shafts; And
A motor coupled to said one or more gearboxes by one or more second shafts,
Transfer chamber device. 11. The method of claim 10,
Wherein the cover is a rectangular dome-shaped structure comprising an aluminum material,
Transfer chamber device. 11. The method of claim 10,
One or more first brackets couple the one or more arms to the cover,
Transfer chamber device. 13. The method of claim 12,
One or more second brackets coupling the one or more arms to the chamber body,
Transfer chamber device. 14. The method of claim 13,
Said one or more arms extending from said one or more second brackets to said one or more first brackets over at least one of said one or more brace members,
Transfer chamber device. 11. The method of claim 10,
Further comprising a sensor coupled to the chamber body,
Transfer chamber device. 16. The method of claim 15,
Further comprising an indicator pin coupled to the periphery of the lid body, wherein the indicator pin is configured to interface with and contact the sensor,
Transfer chamber device. 11. The method of claim 10,
Wherein the one or more gearboxes comprise a plurality of gears configured to transmit a rotational force between the one or more first shafts and the one or more second shafts.
Transfer chamber device. 11. The method of claim 10,
Wherein the lid is configured to rotate from a first position in contact with the chamber body to a second position that is 150 degrees from the first position,
Transfer chamber device. 19. The method of claim 18,
Said one or more first shafts defining a rotation axis of said cover,
Transfer chamber device. CLAIMS 1. An apparatus for lifting a lid,
A plurality of arms coupled to the plurality of first brackets and the plurality of second brackets;
A plurality of first shafts coupled to the plurality of arms through the plurality of second brackets;
A plurality of gearboxes coupled to the plurality of first shafts;
One or more second shafts coupled to the plurality of gearboxes; And
A motor coupled to the one or more second shafts,
Wherein the motor is configured to rotate the one or more second shafts,
A device for lifting a cover.

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