JP6999444B2 - How to calculate the correction value for industrial robots - Google Patents

Description

The present invention relates to a correction value calculation method for an industrial robot that calculates a correction value for correcting the operation of the industrial robot.

Conventionally, an industrial robot that conveys a glass substrate is known (see, for example, Patent Document 1). The industrial robot described in Patent Document 1 is a horizontal articulated robot incorporated in a manufacturing system of an organic EL (organic electroluminescence) display, and has a hand on which a glass substrate is mounted and a hand on the tip side. It includes an arm that is rotatably connected and a main body that is rotatably connected to the base end side of the arm.

The arm includes a first arm portion whose base end side is rotatably connected to the main body portion, and a second arm portion whose base end side is rotatably connected to the tip end side of the first arm portion. The hand includes a hand base that is rotatably connected to the tip end side of the second arm portion, and a hand fork that is fixed to the hand base and on which a glass substrate is mounted. Further, the industrial robot described in Patent Document 1 includes a motor for rotating the first arm portion with respect to the main body portion and a motor for rotating the second arm portion with respect to the first arm portion. , A motor for rotating the hand base with respect to the second arm portion is provided.

Japanese Unexamined Patent Publication No. 2015-139854

When the industrial robot described in Patent Document 1 is installed in a manufacturing system such as an organic EL display, teaching work of the industrial robot is generally performed in order to create an operation program of the industrial robot. Further, for example, when the industrial robot installed in the manufacturing system is replaced or the motor of the industrial robot is replaced, the coordinates of the teaching position taught in the teaching work of the industrial robot before the replacement are The robot coordinate system of the industrial robot after replacement shifts. Therefore, even when the industrial robot is replaced or the motor of the industrial robot is replaced, the teaching work of the industrial robot is generally performed again.

On the other hand, if the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange is corrected, it is not necessary to perform the complicated teaching work again. Therefore, the inventor of the present application calculates a correction value for correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange, and the deviation. I am considering correcting. When calculating the correction value for correcting the deviation, it is preferable that the correction value can be easily calculated.

Therefore, the subject of the present invention is to relatively easily obtain a correction value for correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange. The purpose of the present invention is to provide a method for calculating a correction value of an industrial robot that can be calculated.

In order to solve the above problems, the present invention is a method for calculating a correction value of an industrial robot for calculating a correction value for correcting the operation of the industrial robot, wherein the industrial robot has a main body and the above. A first arm portion whose base end side is rotatably connected to a main body portion, a second arm portion whose base end side is rotatably connected to the tip end side of the first arm portion, and a second arm portion. The base end side is rotatably connected to the tip end side, and the hand has a hand fork on which the object to be transported is mounted. When one of the two movably connected members is one member and the other is the other member, the stop position when the other member is moved so as to stop at the reference position of the other member with respect to the one member. The value of the encoder in the above and the value of the encoder when the other member is moved from the stop position to the reference position to the position where the other member is positioned by the positioning jig. The industry in which the first arm portion, the second arm portion, and the hand are driven by a motor under the conditions reflecting the reference value and the reference position specifying step for specifying the reference value of the encoder corresponding to the reference position. After the robot operation step of setting the robot to a temporary reference posture and the robot operation process, the industrial robot is operated to move the hand fork equipped with the detection panel to the delivery position of the object to be transported. It has a correction value calculation step of calculating a correction value when driving the first arm portion by a motor based on the amount of deviation between the reference position of the detection panel and the stop position of the detection panel at the delivery position. Then, the hand fork is repeatedly moved from the reference posture to the delivery position and the movement from the delivery position to the reference posture, and the correction value calculation step is performed a plurality of times to determine the correction value. It is characterized by.

In the correction value calculation method of the industrial robot of the present invention, in the reference position specifying step, for the first arm portion, the second arm portion, and the hand, the other member rotatably connected to one member is moved to the reference position. After specifying the reference value of the encoder corresponding to the reference position of the other member based on the value of the encoder at the stop position when it is moved and the value of the encoder that moves the other member from the stop position to the reference position, In the robot operation process, the industrial robot is set as a temporary reference posture under conditions that reflect the reference value, and in the correction value calculation process, the industrial robot is operated and a detection panel is mounted at the delivery position of the object to be transported. Move the hand fork. Next, the correction value when the first arm portion is driven by the motor is calculated based on the amount of deviation between the reference position of the detection panel and the stop position of the detection panel at the delivery position. Therefore, even if the complicated and time-consuming teaching work is not actually performed, the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange is corrected. The correction value for this can be calculated relatively easily. Further, since the correction value calculation process is performed a plurality of times, the accuracy of the correction value can be improved.

In the present invention, in any of the plurality of correction value calculation steps, when the hand fork is moved from the reference posture to the delivery position, the first arm portion, the second arm portion, and the said An embodiment in which the first arm portion, the second arm portion, and the hand perform the same rotation operation when the hand performs the same rotation operation and moves from the delivery position to the reference posture. Can be adopted. According to this aspect, the influence of backlash of the motor and the reduction mechanism is less likely to reach the correction value.

In the present invention, among the plurality of correction value calculation steps, in the correction value calculation step this time, the correction value obtained in the previous correction value calculation step is reflected, and the arm portion is driven by a motor to perform the correction. A mode of updating the value can be adopted. According to such an aspect, the accuracy of the correction value can be improved.

In the present invention, in the correction value calculation step, it is possible to adopt an embodiment in which the first arm portion, the second arm portion, and the hand perform the same rotational operation as when transporting the transportable object. can.

In the present invention, the hand fork is provided with a plurality of chambers in which the object to be transported is delivered, and the hand fork is moved to a delivery position of the object to be conveyed in any of the plurality of chambers in the correction value calculation step. It is possible to adopt the mode of causing.

In the present invention, the plurality of chambers include a loader chamber in which the transport object is carried in from the outside, an unloader chamber in which the transport target is carried out to the outside, and a process for the transport target. Is included, and as the correction value calculation step, the hand fork is placed at the delivery position of the transfer object in the loader chamber or at the delivery position of the transfer object in the unloader chamber. It is possible to employ an embodiment in which the first correction value calculation step of moving is repeated, and the second correction value calculation step of moving the hand fork to the delivery position of the transfer object in the process chamber is repeated.

In the present invention. In the correction value calculation step, an aspect of detecting the deviation amount based on the image pickup result of the detection panel by the camera can be adopted.

In the present invention, as the reference position specifying step, the first reference position specifying step in which the two members are the first arm portion and the second arm portion, and the two members are the second arm portion and the hand. It is possible to adopt the mode of performing the second reference position specifying step. In the present invention, after the reference position specifying step, after the reference position specifying step, and before the correction value calculation step, the hand base is stopped at the reference position with respect to the second arm portion by a positioning jig. , It is possible to adopt an embodiment in which a hand fork positioning step of positioning the hand fork is performed on the hand.

In the correction value calculation method of the industrial robot of the present invention, in the reference position specifying step, for the first arm portion, the second arm portion, and the hand, the other member rotatably connected to one member is moved to the reference position. After specifying the reference value of the encoder corresponding to the reference position of the other member based on the value of the encoder at the stop position when it is moved and the value of the encoder that moves the other member from the stop position to the reference position, In the robot operation process, the industrial robot is set as a temporary reference posture under conditions that reflect the reference value, and in the correction value calculation process, the industrial robot is operated to move the industrial robot to the delivery position of the object to be transported in the chamber, and the detection panel. Move the hand fork equipped with. Next, the correction value when the first arm portion is driven by the motor is calculated based on the amount of deviation between the reference position of the detection panel and the stop position of the detection panel at the delivery position. Therefore, even if the complicated and time-consuming teaching work is not actually performed, the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange is corrected. The correction value for this can be calculated relatively easily. Further, since the correction value calculation process is performed a plurality of times, the accuracy of the correction value can be improved.

It is a figure of the industrial robot which the correction value is calculated by the correction value calculation method of the industrial robot which concerns on embodiment of this invention, (A) is a plan view, (B) is a side view. FIG. 3 is a plan view showing a state in which the industrial robot shown in FIG. 1 is incorporated in a manufacturing system for an organic EL display. It is a block diagram for demonstrating the structure of the industrial robot shown in FIG. It is explanatory drawing which shows the movement of the industrial robot at the time of carrying out and carrying out a substrate to the chamber shown in FIG. It is explanatory drawing which shows the movement of the industrial robot at the time of carrying a substrate into the process chamber shown in FIG. It is explanatory drawing which shows the movement of the industrial robot at the time of carrying a substrate into the process chamber shown in FIG. It is explanatory drawing which shows the movement of the industrial robot at the time of carrying a substrate into the process chamber shown in FIG. It is explanatory drawing which shows the movement of the industrial robot at the time of carrying a substrate into the process chamber shown in FIG. 1 is a view showing a state in which a first positioning jig, a second positioning jig, and a third positioning jig are attached to the industrial robot shown in FIG. 1, in which FIG. 1A is a plan view and FIG. 1B is a side view. .. (A) is an enlarged view of part E of FIG. 9 (B), (B) is a figure showing a first positioning jig and the like from the FF direction of (A), and (C) is a figure. It is an enlarged view of the G part of (A). (A) is an enlarged view of the H portion of FIG. 9 (B), (B) is a view showing a second positioning jig and the like from the JJ direction of (A), and (C) is a view showing the second positioning jig and the like. It is an enlarged view of the K part of (A). (A) is an enlarged view of the L part of FIG. 9 (A), (B) is an enlarged view of the M part of FIG. 9 (B), and (C) is the NN of (B). It is a figure which shows the 3rd positioning jig and the like from the direction, (D) is an enlarged view of the P part of (B). It is explanatory drawing of the state which the detection panel used in the correction value calculation process which calculates the correction value of the 1st arm part shown in FIG. 1 is mounted on a hand fork. It is a figure for demonstrating the operation of the robot in the correction value calculation process which calculates the correction value of the 1st arm part shown in FIG. It is explanatory drawing which shows the field of view of the camera in the correction value calculation process which calculates the correction value of the 1st arm part shown in FIG.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Structure of industrial robot)
FIG. 1 is a diagram of an industrial robot 1 in which a correction value is calculated by the correction value calculation method of the industrial robot according to the embodiment of the present invention, (A) is a plan view, and (B) is a side view. be. FIG. 2 is a plan view showing a state in which the industrial robot 1 shown in FIG. 1 is incorporated in the organic EL display manufacturing system 3. FIG. 3 is a block diagram for explaining the configuration of the industrial robot 1 shown in FIG. In FIGS. 1B and 2, the support portions provided on the hand forks 18 and 19 are not shown.

The industrial robot 1 (hereinafter referred to as “robot 1”) shown in FIG. 1 is for transporting a glass substrate 2 for an organic EL display (hereinafter referred to as “board 2”) which is an object to be transported. It is a robot. As shown in FIG. 2, the robot 1 is a horizontal articulated robot incorporated and used in the organic EL display manufacturing system 3. The manufacturing system 3 includes a transfer chamber 4 (hereinafter referred to as “chamber 4”) arranged at the center, and a plurality of chambers 5 to 7 arranged so as to surround the chamber 4.

The chamber 5 is a process chamber for performing a predetermined process on the substrate 2. In this embodiment, a plurality of chambers 5 are provided. In this embodiment, two process chambers 51 and 52 are provided as the chamber 5, and two process chambers 53 and 54 provided on the opposite sides of the process chambers 51 and 52 with respect to the transfer chamber 4 are provided. Further, the chamber 6 is, for example, a supply chamber (loader chamber) in which the substrate 2 supplied to the manufacturing system 3 is housed, and the chamber 7 is, for example, a board 2 discharged from the manufacturing system 3. It is a chamber for discharging (chamber for unloading). The inside of chambers 4 to 7 is evacuated. A part of the robot 1 is arranged inside the chamber 4. When the hand forks 18 and 19 described later that constitute the robot 1 enter the chambers 5 to 7, the robot 1 conveys the substrate 2 between the plurality of chambers 5 to 7.

As shown in FIG. 1, in the robot 1, the hand 8 on which the substrate 2 is mounted, the arm 9 to which the hand 8 is rotatably connected to the tip side, and the base end side of the arm 9 are rotatably connected to each other. It is provided with a main body portion 10. The hand 8 and the arm 9 are arranged on the upper side of the main body portion 10. The main body 10 includes an elevating mechanism for elevating and lowering the arm 9, and a case body 13 in which the elevating mechanism is housed. The case body 13 is formed in a substantially bottomed cylindrical shape. A flange 14 formed in a disk shape is fixed to the upper end of the case body 13.

As described above, a part of the robot 1 is arranged inside the chamber 4. Specifically, a portion of the robot 1 above the lower end surface of the flange 14 is arranged inside the chamber 4. That is, the portion of the robot 1 above the lower end surface of the flange 14 is arranged in the vacuum region VR, and the hand 8 and the arm 9 are arranged in the vacuum chamber (in vacuum). On the other hand, the portion of the robot 1 below the lower end surface of the flange 14 is arranged in the atmospheric region AR (in the atmosphere).

The arm 9 includes a first arm portion 15 and a second arm portion 16 that are rotatably connected to each other. The arm 9 of this embodiment is composed of two arm portions, a first arm portion 15 and a second arm portion 16. The base end side of the first arm portion 15 is rotatably connected to the main body portion 10. The base end side of the second arm portion 16 is rotatably connected to the tip end side of the first arm portion 15. A hand 8 is rotatably connected to the tip end side of the second arm portion 16. Further, the first arm portion 15 is provided with a counterweight 28 on the side opposite to the extending direction of the first arm portion 15.

The second arm portion 16 is arranged above the first arm portion 15. Further, the hand 8 is arranged above the second arm portion 16. The distance between the rotation center of the first arm portion 15 with respect to the main body portion 10 (first rotation center C1) and the rotation center of the second arm portion 16 with respect to the first arm portion 15 (second rotation center C2) is It is equal to the distance between the rotation center of the second arm portion 16 with respect to the first arm portion 15 (second rotation center C2) and the rotation center of the hand 8 with respect to the second arm portion 16 (third rotation center C3). ing.

The hand 8 includes a hand base 17 rotatably connected to the tip end side of the second arm portion 16 and hand forks 18 and 19 on which the substrate 2 is mounted. The hand 8 of this embodiment includes two hand forks 18 and two hand forks 19. The hand forks 18 and 19 are formed in a straight line. The hand fork 18 and the hand fork 19 are formed in the same shape. The two hand forks 18 are arranged in parallel with each other at a predetermined distance. The hand fork 18 extends in one horizontal direction from the hand base 17. The two hand forks 19 are arranged in parallel with each other at a predetermined distance. The hand fork 19 extends from the hand base 17 in the direction opposite to the hand fork 18.

The hand forks 18 and 19 are fixed to the hand base 17. Specifically, the hand forks 18 and 19 are fixed to the hand base 17 by fixing screws. The hand forks 18 and 19 are formed with insertion holes through which fixing screws are inserted. This insertion hole is an elongated hole whose longitudinal direction is orthogonal to the longitudinal direction of the hand forks 18 and 19, and the hand forks 18 and 19 with respect to the hand base 17 in the direction orthogonal to the longitudinal direction of the hand forks 18 and 19. It is possible to adjust the fixed position of.

In this embodiment, one substrate 2 is mounted on two hand forks 18. Further, one substrate 2 is mounted on two hand forks 19. A positioning member for positioning the board 2 to be mounted is attached to the upper surface of the hand fork 18. A positioning member for positioning the board 2 to be mounted is also attached to the upper surface of the hand fork 19.

In the present embodiment, the two hand forks 18 have a plurality of first support portions 181 protruding in a direction away from each other and two first support portions located at both ends of the plurality of first support portions 181. A plurality of second support portions 182 projecting from each of the portions 181 in opposite directions are provided. Positioning members 183 and 184 for positioning the substrate 2 are provided at the respective tip portions of the plurality of first support portions 181 and the respective tip portions of the plurality of second support portions 182. The hand fork 19 has a similar structure, but the first support portion, the second support portion, and the like are not shown.

Further, the robot 1 includes a motor 21 for rotating the first arm portion 15 with respect to the main body portion 10, and a motor 22 for rotating the second arm portion 16 with respect to the first arm portion 15. A motor 23 for rotating the hand base 17 with respect to the second arm portion 16, an encoder 24 for detecting the rotation amount of the motor 21, an encoder 25 for detecting the rotation amount of the motor 22, and a motor. It is provided with an encoder 26 for detecting the amount of rotation of the 23 (see FIG. 3).

The encoder 24 is attached to the motor 21. The encoder 25 is attached to the motor 22, and the encoder 26 is attached to the motor 23. The motor 21 and the encoder 24 are arranged, for example, inside the main body 10. Further, the motors 22 and 23 and the encoders 25 and 26 are arranged inside the first arm portion 15, for example. The motors 21 to 23 are electrically connected to the control unit 27 of the robot 1. Encoders 24 to 26 are also electrically connected to the control unit 27. The motor 21 of this embodiment is a first motor, the motor 22 is a second motor, and the motor 23 is a third motor. Further, the encoder 24 is the first encoder, the encoder 25 is the second encoder, and the encoder 26 is the third encoder.

Further, the robot 1 includes an origin sensor 31 for detecting the origin position of the first arm portion 15 in the rotation direction of the first arm portion 15 with respect to the main body portion 10, and a second arm portion 16 with respect to the first arm portion 15. The origin sensor 32 for detecting the origin position of the second arm portion 16 in the rotation direction and the origin sensor 33 for detecting the origin position of the hand base 17 in the rotation direction of the hand base 17 with respect to the second arm portion 16. And have. The origin sensor 31 of this embodiment is a first origin sensor, the origin sensor 32 is a second origin sensor, and the origin sensor 33 is a third origin sensor.

The origin sensors 31 to 33 are, for example, proximity sensors. Alternatively, the origin sensors 31 to 33 are, for example, optical sensors having a light emitting element and a light receiving element. The origin sensors 31 to 33 are electrically connected to the control unit 27. In the joint portion that is the connecting portion between the main body portion 10 and the first arm portion 15, the origin sensor 31 is fixed to either the main body portion 10 or the first arm portion 15, and the main body portion 10 and the first arm portion 15 are fixed. A detection member detected by the origin sensor 31 when the first arm portion 15 is at the origin position is fixed to any one of the two.

Similarly, in the joint portion that is the connecting portion between the first arm portion 15 and the second arm portion 16, the origin sensor 32 is fixed to either the first arm portion 15 or the second arm portion 16 and is first. A detection member detected by the origin sensor 32 when the second arm portion 16 is at the origin position is fixed to either the arm portion 15 or the second arm portion 16. Further, in the joint portion which is the connecting portion between the second arm portion 16 and the hand base portion 17, the origin sensor 33 is the second.
A detection member fixed to either the arm portion 16 or the hand base 17 and detected by the origin sensor 33 on either the second arm portion 16 or the hand base 17 when the hand base 17 is in the origin position. Is fixed.

(Approximate operation of industrial robots)
FIG. 4 is an explanatory diagram showing the movement of the industrial robot 1 when the substrate 2 is carried in and out of the chamber 5 and the chamber 6 shown in FIG. FIG. 5 is an explanatory diagram showing the movement of the industrial robot 1 when the substrate 2 is carried into the process chamber 51 shown in FIG. 2. FIG. 6 is an explanatory diagram showing the movement of the industrial robot 1 when the substrate 2 is carried into the process chamber 5 shown in FIG. 1. FIG. 7 is an explanatory diagram showing the movement of the industrial robot 1 when the substrate 2 is carried into the process chamber 53 shown in FIG. 1. FIG. 8 is an explanatory diagram showing the movement of the industrial robot 1 when the substrate 2 is carried into the process chamber 54 shown in FIG. 1. In FIGS. 4 to 8, the support portions provided on the hand forks 18 and 19 are not shown.

The robot 1 drives the motors 21, 22, and 23 to transfer the substrate 2 between the chambers 5, 6, and 7. For example, as shown in FIG. 4, the robot 1 carries out the substrate 2 from the chamber 6 while carrying the substrate 2 into the chamber 7. More specifically, as shown in FIG. 4A, the robot 1 extends the arm 9 and receives the substrate 2 in the chamber 6 in a state where the hand fork 18 is parallel to the left-right direction. Further, as shown in FIG. 4B, the arm 9 is retracted until the first arm portion 15 and the second arm portion 16 overlap in the vertical direction, and the substrate 2 is carried out from the chamber 6. Further, the robot 1 rotates the hand 8 by 180 °, then extends the arm 9, and carries the substrate 2 into the chamber 7 as shown in FIG. 5 (C). When the substrate 2 is carried out from the chamber 6 and the substrate 2 is carried into the chamber 7, when viewed from the vertical direction, the third rotation center C3 of the hand 8 with respect to the second arm portion 16 is the first rotation center C1. It moves linearly on a virtual line parallel to the left-right direction that passes through. That is, when the substrate 2 is carried out from the chamber 6 and when the substrate 2 is carried into the chamber 7, the hand 8 moves linearly to the right when viewed from the vertical direction. As described above, in each of the chambers 6 and 7, when the hand 8 moves linearly toward the inside of the chambers 6 and 7, the first rotation center C1 is located on the extension line of the movement locus of the hand 8. There is one chamber.

As shown in FIG. 5, the robot 1 carries the substrate 2 into the process chamber 51. At this time, the robot 1 first drives the motors 21, 22, and 23 from the state in which the arm 9 is contracted as shown in FIG. 5 (A), and the hand fork as shown in FIG. 5 (B). The third rotation center C3 and the center of the process chamber 51 in the left-right direction substantially coincide with each other so that the substrate 2 is arranged on the rear end side of the hand 8 while the 18 is parallel to the front-rear direction. The hand 8, the first arm portion 15, and the second arm portion 16 are rotated so as to do so. After that, the robot 1 extends the arm 9 and carries the substrate 2 into the process chamber 51 as shown in FIG. 5 (C). At this time, when viewed from the vertical direction, the third rotation center C3 linearly moves on a virtual line parallel to the front-rear direction passing through the center of the process chamber 51 in the left-right direction.

As shown in FIG. 6, the robot 1 carries the substrate 2 into the process chamber 52. At this time, the robot 1 first drives the motors 21, 22, and 23 from the state in which the arm 9 is contracted as shown in FIG. 6 (A), and the hand fork as shown in FIG. 6 (B). The third rotation center C3 and the center of the process chamber 52 in the left-right direction are substantially aligned with each other so that the substrate 2 is arranged on the rear end side of the hand 8 while the 18 is parallel to the front-rear direction. The hand 8, the first arm portion 15, and the second arm portion 16 are rotated so as to do so. After that, the robot 1 extends the arm 9 and carries the substrate 2 into the process chamber 52 as shown in FIG. 6C. At this time, when viewed from the vertical direction, the third rotation center C3 linearly moves on a virtual line parallel to the front-rear direction passing through the center of the process chamber 52 in the left-right direction.

In the present embodiment, the process chambers 51 and 52 are first located at positions shifted laterally from the extension line of the movement locus of the hand 8 when the hand 8 moves linearly toward the inside of the chambers 51 and 52. The rotation center C1 is located, and as shown in FIG. 6B, the second rotation center C2 is on the side of the hand 8 in the traveling direction from the first rotation center C1 and the third rotation center C3 (process). It is a second chamber that passes through a process located on the chamber 51 side or the process chamber 52 side).

As shown in FIG. 7, the robot 1 carries the substrate 2 into the process chamber 53. At this time, the robot 1 first drives the motors 21, 22, and 23 from the state in which the arm 9 is contracted as shown in FIG. 7 (A), and the hand fork as shown in FIG. 7 (B). The third rotation center C3 and the center of the process chamber 53 in the left-right direction substantially coincide with each other so that the substrate 2 is arranged on the front end side of the hand 8 while the 18 is parallel to the front-rear direction. As such, the hand 8, the first arm portion 15, and the second arm portion 16 are rotated. After that, the robot 1 extends the arm 9 and carries the substrate 2 into the process chamber 53 as shown in FIG. 7 (C). At this time, when viewed from the vertical direction, the third rotation center C3 linearly moves on a virtual line parallel to the front-rear direction passing through the center of the process chamber 53 in the left-right direction.

As shown in FIG. 8, the robot 1 carries the substrate 2 into the process chamber 54. At this time, the robot 1 first drives the motors 21, 22, and 23 from the state in which the arm 9 is contracted as shown in FIG. 8 (A), and the hand fork as shown in FIG. 8 (B). The third rotation center C3 and the center of the process chamber 54 in the left-right direction substantially coincide with each other so that the substrate 2 is arranged on the front end side of the hand 8 while the 18 is parallel to the front-rear direction. As such, the hand 8, the first arm portion 15, and the second arm portion 16 are rotated. After that, the robot 1 extends the arm 9 and carries the substrate 2 into the chamber 54 as shown in FIG. 8C. At this time, when viewed from the vertical direction, the third rotation center C3 linearly moves on a virtual line parallel to the front-rear direction passing through the center of the process chamber 54 in the left-right direction.

In the present embodiment, the process chambers 53 and 54 are first located at positions shifted laterally from the extension line of the movement locus of the hand 8 when the hand 8 moves linearly into the chambers 51 and 52. The rotation center C1 is located, and the second rotation center C2 does not pass through the process of being positioned in front of the first rotation center C1 and the third rotation center C3, and the third rotation center C3 is always the first. The third chamber is located on the side of the hand 8 in the traveling direction (process chamber 53 side or process chamber 54 side) from the two rotation centers C2.

The same operation is performed when the substrate 2 is conveyed by the hand fork 19. Further, when the substrate 2 is carried out from the chamber 5, the operation opposite to the above description is performed.

(Calculation method of correction value for industrial robots)
9A and 9B are views in a state where the positioning jigs 36 to 38 are attached to the robot 1 shown in FIG. 1, in which FIG. 9A is a plan view and FIG. 9B is a side view. 10 (A) is an enlarged view of part E of FIG. 9 (B), and FIG. 10 (B) is a view showing a positioning jig 36 and the like from the FF direction of FIG. 10 (A). 10 (C) is an enlarged view of a part G of FIG. 10 (A). 11 (A) is an enlarged view of the H portion of FIG. 9 (B), and FIG. 11 (B) is a view showing a positioning jig 37 and the like from the JJ direction of FIG. 11 (A). 11 (C) is an enlarged view of the K portion of FIG. 11 (A). 12 (A) is an enlarged view of the L portion of FIG. 9 (A), FIG. 12 (B) is an enlarged view of the M portion of FIG. 9 (B), and FIG. 12 (C) is a diagram. 12 (B) is a diagram showing a positioning jig 38 and the like from the NN direction, and FIG. 12 (D) is an enlarged view of a P portion of FIG. 12 (B).

When the robot 1 is installed in the manufacturing system 3, the teaching work of the robot 1 is performed in order to create an operation program of the robot 1. Further, for example, when the robot 1 installed in the manufacturing system 3 is replaced, the robot coordinate system of the replaced robot 1 shifts from the coordinates of the teaching position taught in the teaching work of the robot 1 before the replacement. , It becomes necessary to perform the teaching work of the robot 1 again.

On the other hand, if the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange is corrected, it is not necessary to perform the complicated teaching work again. In this embodiment, when the robot 1 installed in the manufacturing system 3 is replaced, the teaching work of the robot 1 before the replacement is taught so that the complicated teaching work does not have to be performed again after the robot 1 is replaced. A correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position is calculated. That is, when one of the two rotatably connected members of the first arm portion 15, the second arm portion 16, and the hand 8 is used as one member and the other is used as the other member, the other member with respect to the one member. The value of the encoder at the stop position when the other member is moved to stop at the reference position of, and when the other member is moved from the stop position to the reference position to the position where the other member is positioned by the positioning jig. A reference position specifying step for specifying the reference value of the encoder corresponding to the reference position of the other member is performed based on the value of the encoder, and then a correction value for correcting the operation of the robot 1 after replacement is calculated. .. Hereinafter, a method of calculating this correction value will be described.

In the following description, the rotation of the hand base 17 with respect to the second arm portion 16 is set to a predetermined reference position of the second arm portion 16 in the rotation direction of the second arm portion 16 with respect to the first arm portion 15. The predetermined reference position of the hand base 17 in the direction is set as the second reference position, and the predetermined reference position of the hand fork 18 in the direction orthogonal to the longitudinal direction of the hand fork 18 with respect to the hand base 17 is set as the third reference position. A predetermined reference position of the first arm portion 15 in the rotation direction of the first arm portion 15 with respect to the reference position is set as a fourth reference position.

In this embodiment, when the second arm portion 16 is in the first reference position, the first arm portion 15 and the second arm portion 16 overlap each other in the vertical direction as shown in FIG. Specifically, when the second arm portion 16 is in the first reference position, the longitudinal direction of the first arm portion 15 and the longitudinal direction of the second arm portion 16 coincide with each other when viewed from above and below. The first arm portion 15 and the second arm portion 16 overlap each other in the vertical direction. Further, in the present embodiment, the origin position of the second arm portion 16 and the first reference position in the rotation direction of the second arm portion 16 with respect to the first arm portion 15 coincide with each other.

Further, when the hand base portion 17 is in the second reference position, the second arm portion 16 and the hand fork 18 overlap each other in the vertical direction as shown in FIG. Specifically, when the hand base 17 is in the second reference position, the second arm portion is aligned with the longitudinal direction of the second arm portion 16 and the longitudinal direction of the hand fork 18 when viewed from above and below. The 16 and the hand fork 18 overlap each other in the vertical direction. Further, in the present embodiment, the position where the hand base portion 17 is rotated by 90 ° from the origin position of the hand base portion 17 in the rotation direction of the hand base portion 17 with respect to the second arm portion 16 is the second reference position.

The fourth reference position may coincide with the origin position of the first arm portion 15 in the rotation direction of the first arm portion 15 with respect to the main body portion 10, or the rotation of the first arm portion 15 with respect to the main body portion 10. The position where the first arm portion 15 is rotated by a predetermined angle from the origin position of the first arm portion 15 in the moving direction may be the fourth reference position.

Further, in the present embodiment, a positioning jig 36 for positioning the second arm portion 16 at the first reference position, a positioning jig 37 for positioning the hand base 17 at the second reference position, and a third reference position. A positioning jig 38 for positioning the hand fork 18 is used. The positioning jig 36 of this embodiment is a first positioning jig, the positioning jig 37 is a second positioning jig, and the positioning jig 38 is a third positioning jig. The positioning jig 38 is also used when positioning the hand fork 19 at a predetermined reference position of the hand fork 19 with respect to the hand base 17 in a direction orthogonal to the longitudinal direction of the hand fork 19.

As shown in FIG. 10, the positioning jig 36 includes a fixing member 41 fixed to the first arm portion 15 and a pin 42. The fixing member 41 is fixed to the side surface of the base end of the first arm portion 15. The fixing member 41 is formed with a through hole 41a into which the pin 42 is inserted. Further, an insertion hole 16a into which the pin 42 is inserted is formed on the side surface of the tip of the second arm portion 16. When the pin 42 inserted into the through hole 41a of the fixing member 41 is inserted into the insertion hole 16a, the second arm portion 16 is precisely positioned at the first reference position. The fixing member 41 of the present embodiment is the first fixing member, the pin 42 is the first pin, the insertion hole 16a is the first insertion hole, and the through hole 41a is the first through hole.

As shown in FIG. 11, the positioning jig 37 includes fixing members 43 and 44 fixed to the first arm portion 15, and pins 45. The fixing member 43 is fixed to the side surface of the base end of the first arm portion 15. The fixing member 44 is fixed to the side surface of the fixing member 43. The fixing member 43 is formed with a groove portion for preventing interference with the fixing member 41. The bottom surface of the fixing member 44 is in contact with the tip surface of a screw 46 for adjusting the vertical position of the fixing member 44 with respect to the fixing member 43. The screw 46 is screwed into the screw holding member 47 fixed to the lower end surface of the fixing member 43.

The fixing member 44 is formed with a through hole 44a into which the pin 45 is inserted. Further, an insertion hole 17a into which the pin 45 is inserted is formed on the side surface of the hand base 17. When the pin 45 inserted into the through hole 44a of the fixing member 44 is inserted into the insertion hole 17a, the hand base 17 is precisely positioned at the second reference position. The fixing members 43 and 44 of the present embodiment are second fixing members, the pin 45 is a second pin, the insertion hole 17a is a second insertion hole, and the through hole 44a is a second through hole.

As shown in FIG. 12, the positioning jig 38 includes fixing members 48 and 49 fixed to the two hand forks 18 and pins 50. The fixing member 48 is fixed to the upper surface of the two hand forks 18. The fixing member 49 is fixed to the lower surface of the fixing member 48. The fixing member 49 is formed with a through hole 49a into which the pin 50 is inserted. Further, an insertion hole 16b into which the pin 50 is inserted is formed on the side surface of the base end of the second arm portion 16. When the pin 50 inserted into the through hole 49a of the fixing member 49 is inserted into the insertion hole 16b, the two hand forks 18 are precisely positioned at the third reference position. The fixing members 48 and 49 of this embodiment are the third fixing member, the pin 50 is the third pin, the insertion hole 16b is the third insertion hole, and the through hole 49a is the third through hole.

For example, when the robot 1 installed in the manufacturing system 3 is replaced, first, the second arm portion 16 is rotated to the first reference position (origin position) based on the detection result of the origin sensor 32. That is, the second arm portion 16 is rotated and stopped based on the detection result of the origin sensor 32 so that the second arm portion 16 stops at the first reference position.

Further, the hand base 17 is rotated to the second reference position (position rotated by 90 ° from the origin position) based on the detection result of the origin sensor 33 and the detection result of the encoder 26. For example, after rotating the hand base 17 to the origin position based on the detection result of the origin sensor 33, the hand base 17 is rotated from the origin position to the second reference position based on the detection result of the encoder 26. That is, the hand base 17 is rotated and stopped based on the detection result of the origin sensor 33 and the detection result of the encoder 26 so that the hand base 17 stops at the second reference position.

After that, the fixing members 41, 43, 44 are fixed to the first arm portion 15, and the fixing members 48, 49 are fixed to the two hand forks 18. Strictly speaking, the second arm portion 16 rotated to the first reference position based on the detection result of the origin sensor 32 is slightly deviated from the first reference position. Similarly, strictly speaking, the hand base 17 rotated to the second reference position based on the detection result of the origin sensor 33 and the detection result of the encoder 26 is slightly deviated from the second reference position.

After that, the second arm portion 16 is rotated with respect to the first arm portion 15 until the pin 42 inserted into the through hole 41a of the fixing member 41 fits into the insertion hole 16a, and the pin 42 is inserted into the insertion hole 16a. , The second arm portion 16 is strictly positioned at the first reference position. Further, the amount of rotation of the motor 22 at that time is detected by the encoder 25, and the control unit 27 specifies the first reference position of the second arm unit 16 by using the detection result of the encoder 25.

That is, the first stop, which is the stop position of the second arm portion 16 when the second arm portion 16 is stopped based on the detection result of the origin sensor 32 so that the second arm portion 16 stops at the first reference position. The detection result of the encoder 25 when the second arm portion 16 is rotated from the position to the position where the second arm portion 16 is positioned at the first reference position by the positioning jig 36, and the second at the first stop position. The first reference position is specified based on the value of the encoder 25 when the arm portion 16 is stopped (first reference position specifying step).

After that, with the second arm portion 16 arranged at the first reference position specified in the first reference position specifying step, the position where the pin 45 inserted into the through hole 44a of the fixing member 44 fits into the insertion hole 17a. The hand base 17 is rotated with respect to the second arm portion 16 to insert the pin 45 into the insertion hole 17a, and the hand base 17 is strictly positioned at the second reference position. Further, the amount of rotation of the motor 23 at that time is detected by the encoder 26, and the control unit 27 identifies the second reference position of the hand base 17 by using the detection result of the encoder 26.

That is, with the detection result of the origin sensor 33 so that the hand base 17 stops at the second reference position while the second arm portion 16 is arranged at the first reference position specified in the first reference position specifying step. The hand base 17 is rotated from the second stop position, which is the stop position of the hand base 17 when the hand base 17 is stopped based on the detection result of the encoder 26, to the position where the hand base 17 is positioned by the positioning jig 37. The second reference position is specified based on the detection result of the encoder 26 when the encoder 26 is moved and the value of the encoder 26 when the hand base 17 is stopped at the second stop position (second reference position specifying step). ..

After that, the second arm portion 16 is arranged at the first reference position specified in the first reference position specifying step, and the hand base 17 is arranged at the second reference position specified in the second reference position specifying step. In this state, two hand forks 18 are inserted with respect to the hand base 17 in a direction orthogonal to the longitudinal direction of the hand fork 18 until the pin 50 inserted into the through hole 49a of the fixing member 49 fits into the insertion hole 16b. The pin 50 is inserted into the insertion hole 16b by moving the pin 50, and the two hand forks 18 are positioned at the third reference position.

That is, the second arm portion 16 is arranged at the first reference position specified in the first reference position specifying step, and the hand base 17 is arranged at the second reference position specified in the second reference position specifying step. In this state, the two hand forks 18 are positioned by the positioning jig 38 (hand fork positioning step). The positioned hand fork 18 is fixed to the hand base 17 by a screw.

After that, at least the positioning jigs 37 and 38 are removed, and the hand base 17 is rotated by 180 ° with respect to the second arm portion 16. In this state, the fixing members 48 and 49 are fixed to the two hand forks 19. Further, the two hand forks 19 are moved with respect to the hand base 17 in a direction orthogonal to the longitudinal direction of the hand fork 19 until the pin 50 inserted into the through hole 49a of the fixing member 49 fits into the insertion hole 16b. The pin 50 is inserted into the insertion hole 16b, and the two hand forks 19 are positioned at predetermined reference positions. The positioned hand fork 19 is fixed to the hand base 17 by a screw.

(First correction value calculation step in chamber 6 (first chamber))
13 is an explanatory view of a state in which the detection panel 40 used in the correction value calculation step for calculating the correction value of the first arm portion 15 shown in FIG. 1 is mounted on the hand fork 18, and FIG. 13A is a plan view. (B) is a cross-sectional view. FIG. 14 is a diagram for explaining the operation of the robot 1 in the correction value calculation process for calculating the correction value of the first arm unit 15 shown in FIG. FIG. 15 is an explanatory diagram showing a field of view of the camera and the like in the correction value calculation process for calculating the correction value of the first arm unit 15 shown in FIG.

In this embodiment, it is explanatory drawing of the correction value calculation process which calculates the correction value of the 1st arm part 15 used for a robot 1. In this embodiment, when the correction value calculation step is performed after the first reference position specifying step and the second reference position specifying step, the detection panel 40 is mounted on the two hand forks 18 as shown in FIG. (Panel mounting process).

The detection panel 40 is a light-shielding panel used when calculating a correction value. In the present embodiment, since the object to be conveyed is the rectangular substrate 2, the detection panel 40 connects the two diagonal corners 2a and 2b when the substrate 2 is mounted on the hand fork 18. It is an extending plate-shaped member. More specifically, the detection panel 40 has a first portion 81 extending linearly along the hand fork 18, and a corner 2a from the first portion 81 when the substrate 2 is mounted on the hand fork 18. The second portion 82 extending diagonally to the corresponding position and the third portion 83 diagonally extending from the first portion 81 to the position corresponding to the corner 2b when the substrate 2 is mounted on the hand fork 18. I have.

Further, the detection panel 40 is mounted on the two hand forks 18 in a state of being positioned on the upper surface of the hand fork 18. Specifically, when performing the correction value calculation step, in the hand fork 18, the positioning member 29 is fixed to each of the plurality of convex receiving portions 185 for receiving the substrate 2 from below by screws or the like. The positioning member 29 is formed with a positioning protrusion 290 that fits into the positioning hole 84 of the detection panel 40, and the detection panel 40 is positioned by the positioning protrusion 290.

In this state, the rectangular first detected portion 821 and the second detected portion 831 formed at the ends of the second portion 82 and the third portion 83 of the detection panel 40 mount the substrate 2 on the hand fork 18. It overlaps with the edges of the corners 2a and 2b of the substrate 2 at the time of the detection.

Next, based on the detection result of the origin sensor 31 so that the first arm portion 15 stops at the fourth reference position, or based on the detection result of the origin sensor 31 and the detection result of the encoder 24, the first arm portion 15 The motor 21 is driven and controlled with reference to the third stop position, which is the stop position of the first arm portion 15 when the robot is stopped, and the motor is controlled with reference to the first reference position specified in the first reference position specifying step. 22 is driven and controlled, and the motor 23 is driven and controlled with reference to the second reference position specified in the second reference position specifying step to bring the robot 1 into a temporary reference posture (robot operation step).

That is, the motor 21 is driven and controlled based on the third stop position, the motor 22 is driven and controlled based on the first reference position specified in the first reference position specifying step, and the motor 22 is driven and controlled in the second reference position specifying step. The motor 23 is driven and controlled with reference to the specified second reference position to operate the robot 1 to a temporary home position. In this embodiment, for example, the first arm portion 15 stops at the third stop position, the second arm portion 16 stops at the first reference position, and the hand base portion 17 rotates 90 ° from the second reference position. The stopped state is the temporary home position (temporary reference posture) of the robot 1. Such a home position is the state shown in FIG. 4 (B).

If the origin position of the first arm portion 15 and the fourth reference position in the rotation direction of the first arm portion 15 with respect to the main body portion 10 coincide with each other, the fourth reference position is used in the robot operation process. The first arm portion 15 is rotated and stopped based on the detection result of the origin sensor 31 so that the 1 arm portion 15 is stopped. Further, when the position where the first arm portion 15 is rotated by a predetermined angle from the origin position of the first arm portion 15 in the rotation direction of the first arm portion 15 with respect to the main body portion 10 is the fourth reference position. In the robot operation process, the first arm portion 15 is rotated and stopped based on the detection result of the origin sensor 31 and the detection result of the encoder 24 so that the first arm portion 15 stops at the fourth reference position. Strictly speaking, the third stop position is slightly deviated from the fourth reference position. Further, the positioning jigs 36 and 38 have been removed before the robot operation process.

After that, the robot 1 is operated to move the hand fork 18 to the delivery position of the substrate 2 (hand movement step). For example, as shown in FIG. 14A, the hand fork 18 is moved to the delivery position of the substrate 2 in the chamber 6. Specifically, from the state shown in FIG. 4 (B), the operation shown by the arrow 6a in FIG. 4 is performed, and as shown in FIG. 4 (A), the arm 9 is extended to form the substrate 2 in the chamber 6. Move the hand fork 18 to the delivery position.

Here, as shown in FIG. 15, a reference member with a reference mark indicating a fifth reference position and a camera are arranged in the chamber 6. In this embodiment, the positions of the two detected parts (first detected part 821 and the second detected part 831) of the detection panel 40 are compared with the reference mark. Therefore, in the chamber 6, the light-shielding first member 86 with the first reference mark 860, the light-shielding second member 87 with the second reference mark 870, the first reference mark 860, and the light-shielding first member 86. A first camera 88 in which the first detected unit 821 is in the field of view 88a and a second camera 89 in which the second reference mark 870 and the second detected unit 831 are in the field of view 89a are provided.

In the present embodiment, the first member 86 and the second member 87 are light-shielding plate-shaped members and are fixed to the inner wall or the like of the chamber 6. Further, the first reference mark 860 and the second reference mark 870 are holes penetrating the first member 86 and the second member 87, respectively. In the present embodiment, in the first member 86 and the second member 87, the portion where the first reference mark 860 and the second reference mark 870 are formed is a thin plate.

The first reference mark 860 and the second reference mark 870 indicate the fifth reference position by two. Specifically, when the robot 1 before replacement, in which the detection panel 40 is mounted on the hand fork 18, is operated, the hand fork 18 is moved to the delivery position of the substrate 2 in the chamber 6 and stopped. The positional relationship between the first reference mark 860 and the first detected unit 821 in the image pickup result of the first camera 88, and the position of the second reference mark 870 and the second detected unit 831 in the image pickup result of the second camera 89. The relationship is set as the fifth reference position in the rotation direction of the first arm portion 15 with respect to the main body portion 10. Here, in the image pickup result of the first camera 88, the amount of deviation when the first reference mark 860 and the first detected portion 821 are deviated from a predetermined positional relationship, and in the image pickup result of the second camera 89, the second The rotation direction and rotation angle of the first arm unit 15 corresponding to the deviation amount when the reference mark 870 and the second detected unit 831 are displaced from the predetermined positional relationship correspond to the detection values of the encoder 24. It is stored in the control unit 27 as the set value.

Therefore, in the correction value calculation step, the first reference mark 860 and the first detected portion 821 have a predetermined positional relationship in the image pickup result of the first camera 88, and the second reference mark 870 is found in the image pickup result of the second camera 89. Control based on the detection value of the encoder 24 corresponding to the amount of deviation without rotating the first arm portion 15 with respect to the main body portion 10 until the second detected portion 831 has a predetermined positional relationship. Unit 27 can calculate the correction value.

That is, as shown in FIG. 14A, when the hand fork 18 is moved to the delivery position of the substrate 2 in the chamber 6, the first reference mark 860 and the first cover in the image pickup result of the first camera 88. It is assumed that the detection unit 821 is deviated from the predetermined positional relationship, and the second reference mark 870 and the second detected unit 831 are deviated from the predetermined positional relationship in the image pickup result of the second camera 89. In this case, in the correction value calculation step, as shown in FIG. 14 (B), the first reference mark 860 and the first detected unit 821 have a predetermined positional relationship, and the second reference mark 870 and the second detected unit are detected. The value of the encoder 24 when the motor 21 is driven to rotate the first arm portion 15 with respect to the main body portion 10 can be calculated as a correction value until the motor 21 has a predetermined positional relationship with the 831.

After that, the motor 21 is driven and controlled by reflecting the correction value calculated in the correction value calculation step, and the motor 22 is driven and controlled with reference to the first reference position specified in the first reference position specifying step. 2 The motor 23 is driven and controlled with reference to the second reference position specified in the reference position specifying step, and the robot 1 is returned to the temporary home position. Specifically, from the state shown in FIG. 4A, the operation shown by the arrow 6b in FIG. 4 is performed, and as shown in FIG. 4B, the position is returned to the temporary home position.

Then, the robot 1 is operated again to move the hand fork 18 to the delivery position of the substrate 2. Then, again, based on the image pickup result of the first camera 88 and the image pickup result of the second camera 89, the positional relationship between the first reference mark 860 and the first detected portion 821, and the second reference mark 870 and the second. After calculating a new correction value based on the positional relationship with the detected unit 831, the new correction value (this correction value) is reflected, and the motors 21, 22, and 23 are driven and controlled in the same manner as the previous time. Return the robot 1 to the temporary home position. Therefore, the correction value will be updated sequentially.

By repeating this operation, the latest correction value or deviation amount (deviation amount between the first reference mark 860 and the first detected unit 821, and the deviation amount between the second reference mark 870 and the second detected unit 831). However, when the value becomes equal to or less than the preset threshold value, the correction value is determined, the motor 21 is driven and controlled by reflecting the determined correction value, and the first reference position specified in the first reference position specifying step is performed. The motor 22 is driven and controlled with reference to, and the motor 23 is driven and controlled with reference to the second reference position specified in the second reference position specifying process, and the position where the robot 1 is returned is regarded as the regular home position. do.

In any of the steps, when the above operation is repeated, the outbound route for moving the hand fork 18 from the temporary home position to the delivery position of the substrate 2 in the chamber 6 and the delivery position of the substrate 2 in the chamber 6 are performed. On the return route from the state where the hand fork 18 is located to the temporary home position, the robot 1 performs the same operation with respect to the first arm portion 15, the second arm portion 16, and the hand 8 as shown in FIG. Make a dynamic movement. Therefore, when the correction value calculation process is performed, the influence of the backlash of the motor and the deceleration mechanism that decelerates the rotation of the motor and transmits it to the arm and the like is unlikely to reach the correction value.

In this embodiment, the first reference mark 860 and the first detected portion 821 are displaced from the predetermined positional relationship in the image pickup result of the first camera 88, and the second reference mark 870 is in the image pickup result of the second camera 89. When the second arm portion 831 and the second detected portion 831 deviate from a predetermined positional relationship, the value of the encoder 24 corresponding to the deviating amount is used as the correction value without rotating the first arm portion 15 with respect to the main body portion 10. Calculated. However, after detecting the direction of deviation from the image pickup result of the first camera 88 and the image pickup result of the second camera 89, the first arm portion 15 is displaced with respect to the main body portion 10 as shown in FIG. 14 (B). The correction value may be calculated based on the detection amount of the encoder 24 at that time. In either case, the correction value calculation step may be performed in the chamber 7.

(Second correction value calculation step in process chamber 51 (second chamber))
In this embodiment, after the correction value calculation step is performed in the chamber 6, the same correction value calculation step is also performed in the process chamber 51. Therefore, the process chamber 51 also has the first member 86 with the first reference mark 860, the second member 87 with the second reference mark 870, the first reference mark 860, and the first reference mark 860, as in the chamber 6. 1 A first camera 88 in which the detected unit 821 is in the field of view and a second camera 89 in which the second reference mark 870 and the second detected unit 831 are in the field of view are provided.

Therefore, substantially the same as the correction value calculation step in the chamber 6, as shown in FIG. 5 (A), the process chamber is passed from the state where the robot 1 is located at the home position to the state shown in FIG. 5 (B). The hand fork 18 is moved to the delivery position of the substrate 2 in the 51, and the correction value in the chamber 51 is calculated.

After that, the motor 21 is driven and controlled by reflecting the correction value in the process chamber 51 calculated in the correction value calculation step, and the motor 22 is driven with reference to the first reference position specified in the first reference position specifying step. In addition to controlling, the motor 23 is driven and controlled with reference to the second reference position specified in the second reference position specifying step, and the robot 1 is passed through the state shown in FIG. 5 (B) to be passed through the state shown in FIG. 5 (A). ) Return to the temporary home position.

Then, the robot 1 is operated again to move the hand fork 18 to the delivery position of the substrate 2 in the process chamber 51, a new correction value is calculated, and then the new correction value (this correction value) is reflected. Then, the robot 1 is returned to the temporary home position. This operation is repeated, and when the latest correction value or the like becomes equal to or less than a preset threshold value, the correction value is determined.

In any of the steps, when the above operation is repeated, the outbound route for moving the hand fork 18 from the temporary home position to the delivery position of the substrate 2 in the process chamber 51, and the substrate 2 in the process chamber 51 On the return route from the state where the hand fork 18 is located at the delivery position to the temporary home position, the robot 1 performs the same operation as shown in FIG. 5 with respect to the first arm portion 15, the second arm portion 16, and the hand 8. The rotation operation of is performed. Therefore, when the correction value calculation process is performed, the influence of the backlash of the motor or the reduction mechanism that decelerates the rotation of the motor and transmits it to the arm or the like is unlikely to reach the correction value.

(Third correction value calculation step in process chamber 53 (third chamber))
In this embodiment, after the correction value calculation step in the chamber 6 and the correction value calculation step in the process chamber 51 are performed, the same correction value calculation step is also performed in the process chamber 53. Therefore, the process chamber 53 also has the first member 86 with the first reference mark 860, the second member 87 with the second reference mark 870, the first reference mark 860, and the first reference mark 860, as in the chamber 6. 1 A first camera 88 in which the detected unit 821 is in the field of view and a second camera 89 in which the second reference mark 870 and the second detected unit 831 are in the field of view are provided.

Therefore, substantially the same as the correction value calculation step in the chamber 6, as shown in FIG. 7 (A), the process chamber is passed from the state where the robot 1 is located at the home position to the state shown in FIG. 7 (B). The hand fork 18 is moved to the delivery position of the substrate 2 in the 53, and the correction value in the chamber 51 is calculated.

After that, the motor 21 is driven and controlled by reflecting the correction value in the process chamber 53 calculated in the correction value calculation step, and the motor 22 is driven with reference to the first reference position specified in the first reference position specifying step. In addition to controlling, the motor 23 is driven and controlled with reference to the second reference position specified in the second reference position specifying step, and the robot 1 is passed through the state shown in FIG. 7 (B) to be passed through the state shown in FIG. 7 (A). ) Return to the temporary home position.

Then, the robot 1 is operated again to move the hand fork 18 to the delivery position of the substrate 2 in the process chamber 53, a new correction value is calculated, and then the new correction value (this correction value) is reflected. Then, the robot 1 is returned to the temporary home position. This operation is repeated, and when the latest correction value or the like becomes equal to or less than a preset threshold value, the correction value is determined.

In any of the steps, when the above operation is repeated, the outbound route for moving the hand fork 18 from the temporary home position to the delivery position of the substrate 2 in the process chamber 53, and the substrate 2 in the process chamber 53. On the return route from the state where the hand fork 18 is located at the delivery position to the temporary home position, the robot 1 performs the same operation as shown in FIG. 7 with respect to the first arm portion 15, the second arm portion 16, and the hand 8. The rotation operation of is performed. Therefore, when the correction value calculation process is performed, the influence of the backlash of the motor or the reduction mechanism that decelerates the rotation of the motor and transmits it to the arm or the like is unlikely to reach the correction value.

(Adjustment of hand fork 19)
In this embodiment, after the correction value calculation step in the hand fork 18, the hand base 17 is rotated by 180 ° and the detection panel 40 is replaced on the two hand forks 19, and then the inside of the chamber 6 is formed. The hand fork 19 is moved to the delivery position of the substrate 2. At this time, the first reference mark 860 and the first detected portion 821 deviate from the predetermined positional relationship in the image pickup result of the first camera 88, and the second reference mark 870 and the second reference mark 870 and the second reference mark 870 in the image pickup result of the second camera 89. When the detected unit 831 deviates from the predetermined positional relationship, the first reference mark 860 and the first detected unit 821 have a predetermined positional relationship, and the second reference mark 870 and the second detected unit 831 The positioning jig 38 is used to adjust the fixing position of the hand fork 19 to the hand base 17 in the direction orthogonal to the longitudinal direction of the hand fork 19 so that

(Main effect of this form)
As described above, in the present embodiment, the positioning jig 36 is used in the first reference position specifying step at the reference position of the second arm portion 16 in the rotation direction of the second arm portion 16 with respect to the first arm portion 15. A certain first reference position is specified, and in the second reference position specifying step, the positioning jig 37 is used to determine the second reference position, which is the reference position of the hand base 17 in the rotation direction of the hand base 17 with respect to the second arm portion 16. In the hand fork positioning process, the hand fork 18 is positioned at the third reference position, which is the reference position of the hand fork 18 in the direction orthogonal to the longitudinal direction of the hand fork 18 with respect to the hand base 17. There is.

Further, in the present embodiment, in the subsequent robot operation process, the motor 22 is driven and controlled with reference to the first reference position specified in the first reference position specifying step, and the second reference position is specified in the second reference position specifying step. 2 The motor 23 is driven and controlled with reference to the reference position to set the robot 1 in a temporary reference posture, and then the hand fork 18 is moved to the chamber 6, the process chamber 51, and the process chamber 53 in the hand moving process. A correction value calculation process is performed to calculate a correction value for controlling the motor 21. That is, in this embodiment, the hand fork 18 is moved to the chamber 6, the process chamber 51, and the process chamber 53 in a state where the second arm portion 16, the hand base 17, and the hand fork 18 are aligned with the predetermined reference positions, and the correction is performed. A value calculation step is performed to calculate a correction value for controlling the motor 21 that drives the first arm portion 15.

Further, in the present embodiment, when the robot 1 before replacement in which the detection panel 40 is mounted on the hand fork 18 is operated to move the hand fork 18 to the chamber 6, the process chamber 51, and the process chamber 53, In the rotation direction of the first arm portion 15 with respect to the main body portion 10, the position corresponding to the first detected portion 821 and the second detected portion 831 of the detection panel 40 is the fifth reference position. Therefore, in the present embodiment, by calculating the correction value for controlling the motor 21 in the correction value calculation step, the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange. It becomes possible to calculate a correction value for correcting the deviation of the robot coordinate system.

That is, in this embodiment, it is based on the amount of deviation between the fifth reference position and the first detected portion 821 and the second detected portion 831 of the detection panel 40 in the rotation direction of the first arm portion 15 with respect to the main body portion 10. By calculating the correction value, it is possible to calculate the correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange. become. Therefore, in the present embodiment, it is relatively easy to calculate the correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange. It will be possible.

Further, in the present embodiment, since the correction value calculation step is performed in each of the chamber 6, the process chamber 51, and the process chamber 53, the accuracy of the correction value can be improved.

Further, in the present embodiment, in the correction value calculation step, a reference mark (first reference mark) composed of holes formed in the light-shielding detection panel 40 and the light-shielding members (first member 86 and second member 87). Since 860 and the second reference mark 870) are used, it is suitable for imaging with a camera (first camera 88 and second camera 89). Further, by using the image pickup result by the cameras (first camera 88 and second camera 89), the detection panel 40 for the fifth reference position can be obtained without rotating the first arm portion 15 with respect to the main body portion 10. It becomes possible to obtain the amount of deviation. Further, by using the image pickup result by the cameras (first camera 88 and second camera 89), the first arm with respect to the main body 10 without rotating the first arm 15 with respect to the main body 10. The amount of movement of the encoder 24 when the unit 15 is rotated can be obtained, and the amount of movement can be calculated as a correction value.

Further, in the correction value calculation step, the operation of moving the hand fork 18 to the chamber 6, the process chamber 51, and the process chamber 53 and the operation of returning from the chamber 6, the process chamber 51, and the process chamber 53 to the temporary home position are performed. When it is repeated, the robot 1 causes the first arm portion 15, the second arm portion 16, and the hand 8 to perform the same rotation motion as the motion shown in FIG. Therefore, when the correction value calculation process is performed, the influence of the backlash of the motor and the deceleration mechanism that decelerates the rotation of the motor and transmits it to the arm and the like is unlikely to reach the correction value.

(Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but the present invention is not limited thereto, and various modifications can be carried out without changing the gist of the present invention. For example, in the above embodiment, the position of the detection panel 40 is observed with a camera in the correction value calculation step, but a sensor or the like may be used. In that case, a substrate having the same shape and size as the substrate 2 may be used as the detection panel 40.

In the above-described embodiment, the position where the second arm portion 16 is rotated by a predetermined angle from the origin position of the second arm portion 16 in the rotation direction of the second arm portion 16 with respect to the first arm portion 15 is the first reference position. May be. In this case, based on the detection result of the origin sensor 32 and the detection result of the encoder 25 so that the second arm portion 16 stops at the first reference position when the robot 1 installed in the manufacturing system 3 is replaced. The second arm portion 16 is rotated and stopped.

Further, in the above-described embodiment, the origin position of the hand base 17 in the rotation direction of the hand base 17 with respect to the second arm 16 may coincide with the second reference position. In this case, when the robot 1 installed in the manufacturing system 3 is replaced, the hand base 17 is rotated based on the detection result of the origin sensor 33 so that the hand base 17 stops at the second reference position. Stop it. Further, in the above-described embodiment, the panel mounting process may be performed after the robot operation process.

In the above-described embodiment, the first reference position specifying process, the second reference position specifying process, and the hand fork positioning process are performed on the robot 1 installed in the manufacturing system 3, but the robot 1 is installed in the manufacturing system 3. The first reference position specifying step, the second reference position specifying step, and the hand fork positioning step may be performed on the previous robot 1. For example, in the assembly factory of the robot 1, the first reference position specifying step, the second reference position specifying step, and the hand fork positioning step may be performed on the robot 1.

Further, when transporting the robot 1 from the assembly plant to the manufacturing system 3, the manufacturing system is manufactured from the assembly plant with the hand forks 18 and 19 removed so that the long hand forks 18 and 19 do not interfere with the transport. When transporting the robot 1 to 3, the first reference position specifying process and the second reference position specifying step are performed on the robot 1 in the assembly factory, and the robot 1 is installed in the manufacturing system 3. On the other hand, the hand fork positioning step may be performed.

In the above-described embodiment, the fixing member 41 may be fixed to the second arm portion 16. In this case, an insertion hole as a first insertion hole into which the pin 42 is inserted is formed on the side surface of the base end of the first arm portion 15. Further, in the above-described form, the fixing member 44 may be fixed to the hand base 17. In this case, an insertion hole as a second insertion hole into which the pin 45 is inserted is formed on the side surface of the base end of the first arm portion 15. Further, in the above-described embodiment, the fixing members 48 and 49 may be fixed to the second arm portion 16. In this case, the two hand forks 18 are formed with insertion holes as third insertion holes into which the pins 50 are inserted.

In the above-described embodiment, the hand 8 does not have to include the hand fork 19. Further, in the above-described embodiment, the object to be conveyed by the robot 1 is the substrate 2 for the organic EL display, but the object to be conveyed by the robot 1 may be a glass substrate for the liquid crystal display. However, it may be a semiconductor wafer or the like. Further, in the above-described embodiment, the robot 1 may be arranged in a space having an atmospheric pressure.

1 ... Robot (industrial robot), 2 ... Substrate (object to be transported), 5, 6, 7 ... Chamber, 8 ... Hand, 9 ... Arm, 10 ... Main body, 15 ... 1st Arm part, 16 ... 2nd arm part, 17 ... hand base, 18 ... hand fork, 21 ... motor (1st motor), 22 ... motor (2nd motor), 23 ... motor (3rd) Motor), 24 ... Encoder (1st encoder), 25 ... Encoder (2nd encoder), 26 ... Encoder (3rd encoder), 31 ... Origin sensor (1st origin sensor), 32 ... Origin sensor (2nd origin sensor), 33 ... Origin sensor (3rd origin sensor), 36 ... Positioning jig (1st positioning jig), 37 ... Positioning jig (2nd positioning jig), 38 ... Positioning jig (third positioning jig), 80 ... detection panel, 86 ... first member, 87 ... first member, 88 ... first camera, 89 ... second camera, 860 ... first 1 reference mark, 870 ... 2nd reference mark, C1 ... 1st rotation center, C2 ... 2nd rotation center, C3 ... 3rd rotation center

Claims (9)

It is a correction value calculation method for an industrial robot that calculates a correction value for correcting the operation of an industrial robot.
The industrial robot has a main body portion, a first arm portion whose base end side is rotatably connected to the main body portion, and a first arm portion whose base end side is rotatably connected to the tip end side of the first arm portion. It has a two-arm portion and a hand having a hand fork whose base end side is rotatably connected to the tip end side of the second arm portion and on which an object to be transported is mounted.
When one of the two rotatably connected members of the first arm portion, the second arm portion, and the hand is one member and the other is the other member, the other member with respect to the one member. The value of the encoder at the stop position when the other member is moved so as to stop at the reference position of, and the position where the other member is positioned from the stop position to the reference position by the positioning jig. A reference position specifying step for specifying a reference value of the encoder corresponding to the reference position of the other member based on the value of the encoder when the encoder is moved.
A robot operation process in which the first arm portion, the second arm portion, and the hand are driven by a motor to bring the industrial robot into a temporary reference posture under conditions reflecting the reference value.
After the robot operation step, the industrial robot is operated to move the hand fork equipped with the detection panel to the delivery position of the object to be transported, and the reference position of the detection panel and the detection at the delivery position. A correction value calculation process for calculating a correction value when driving the first arm portion of the motor based on the amount of deviation from the stop position of the panel, and a correction value calculation step.
Have,
The hand fork is repeatedly moved from the reference posture to the delivery position and from the delivery position to the reference posture, and the correction value calculation step is performed a plurality of times to determine the correction value. How to calculate the correction value of the industrial robot. In any of the plurality of correction value calculation steps, when the hand fork is moved from the reference posture to the delivery position, the first arm portion, the second arm portion, and the hand are the same. The claim is characterized in that the first arm portion, the second arm portion, and the hand perform the same rotational operation when the first arm portion, the second arm portion, and the hand perform the same rotational operation when moving from the delivery position to the reference posture. Item 1. The method for calculating a correction value for an industrial robot according to Item 1. Of the plurality of correction value calculation steps, in the correction value calculation step this time, the correction value is updated by driving the arm portion with a motor to reflect the correction value obtained in the previous correction value calculation step. The correction value calculation method for an industrial robot according to claim 2, wherein the correction value is calculated. Claims 1 to 3 are characterized in that, in the correction value calculation step, the first arm portion, the second arm portion, and the hand perform the same rotational operation as when transporting the transport object. The method for calculating the correction value of the industrial robot according to any one of the above items. It has a plurality of chambers for delivering and delivering the object to be transported, and has a plurality of chambers.
The industrial use according to any one of claims 1 to 4, wherein the hand fork is moved to a delivery position of the object to be transported to any one of the plurality of chambers in the correction value calculation step. How to calculate the correction value of the robot. The plurality of chambers include a loader chamber in which the object to be transported is carried in from the outside, an unloader chamber in which the object to be transported is carried out to the outside, and a process for processing the object to be transported. Chamber included,
As the correction value calculation step, a first correction value calculation step of moving the hand fork to the delivery position of the transfer object in the loader chamber or the delivery position of the transfer object in the unloader chamber is performed. The correction value calculation of the industrial robot according to claim 5, wherein the second correction value calculation step of moving the hand fork to the delivery position of the transportation object in the process chamber is repeated. Method. In the correction value calculation step, the method for calculating the correction value of the industrial robot according to any one of claims 1 to 6 for detecting the deviation amount based on the image pickup result of the detection panel by the camera. As the reference position specifying step, a first reference position specifying step in which the two members are the first arm portion and the second arm portion, and a second in which the two members are the second arm portion and the hand. The correction value calculation method for an industrial robot according to any one of claims 1 to 7, wherein the reference position specifying step is performed. After the reference position specifying step and before the correction value calculation step, the hand fork is positioned on the hand by a positioning jig with the hand base stopped at the reference position with respect to the second arm portion. The correction value calculation method for an industrial robot according to any one of claims 1 to 8, wherein the positioning step is performed.

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