CN110153994A

CN110153994A - The amendment value calculating method of industrial robot

Info

Publication number: CN110153994A
Application number: CN201910115019.3A
Authority: CN
Inventors: 矢泽隆之; 尾辻淳; 瀧泽典彦
Original assignee: Nidec Sankyo Corp
Current assignee: Nidec Sankyo Corp
Priority date: 2018-02-16
Filing date: 2019-02-14
Publication date: 2019-08-23
Anticipated expiration: 2039-02-14
Also published as: KR20190099140A; KR102205638B1; JP6999444B2; JP2019141931A; CN110153994B

Abstract

The present invention provides a kind of amendment value calculating method of industrial robot that can relatively easily calculate correction value, which is used to correct offset of the robot coordinate system of the industrial robot after replacement relative to the coordinate of the teaching position of teaching in the teaching operation of the industrial robot before replacement.It in the amendment value calculating method of industrial robot, is determined in process in base position, for the first arm, the second arm and hand, the result of base position is moved to based on the enabled another component for being rotationally linked to a component to determine a reference value of encoder.In correction value calculation process, so that the hand fork (18) for being mounted with detection panel (80) is moved to the delivery position in room (6), correction value when the first arm of motor drive is calculated according to the offset of the stop position of base position and detection panel at delivery position.Repeat correction value calculation process, but the first arm, the second arm and hand carry out identical rotational action at this time.

Description

The amendment value calculating method of industrial robot

Technical field

The present invention relates to the amendments calculated for correcting the industrial robot of the correction value of the movement of industrial robot Value calculating method.

Background technique

At present it is known that there is the industrial robot of moving glass substrate (for example, referring to patent document 1).1 institute of patent document The industrial robot of record is loaded into the more passes of level used in the manufacture system of organic EL (organic field luminescence) display Robot is saved, has and loads the hand of glass substrate, the front end side rotationally arm of connector and the rotationally base of link arm The body part of end side.

Arm has that base end side is rotationally linked to the first arm of body part and base end side is rotationally linked to first Second arm of the front end side of arm.Hand has the hand base portion for the front end side for being rotationally linked to the second arm and is fixed on hand Base portion and the hand fork for loading glass substrate.In addition, industrial robot documented by patent document 1 has for making the first arm Motor that portion is rotated relative to body part, the motor for rotating the second arm relative to the first arm, for making hand The motor that base portion is rotated relative to the second arm.

Existing technical literature

Patent document

Patent document 1: Japanese Unexamined Patent Publication 2015-139854 bulletin

Summary of the invention

The technical problems to be solved by the invention

When industrial robot documented by patent document 1 to be set to the manufacture system of organic el display etc., it is The operation program of industrial robot is generated, the teaching operation of industrial robot is usually carried out.In addition, for example, when replacement When the industrial robot in manufacture system being set or replacing the motor of industrial robot, the industrial machine after replacement Seat of the robot coordinate system of device people relative to the teaching position of teaching in the teaching operation of the industrial robot before replacement Mark generates offset.Therefore, even if the case where having replaced industrial robot or having replaced the motor of industrial robot Under, the teaching operation of industrial robot is generally also carried out again.

On the other hand, if the robot coordinate system of the industrial robot after amendment replacement is relative to the work before replacement The offset of the coordinate of the teaching position of teaching in the teaching operation of industry robot does not need then to carry out cumbersome teaching work again Industry.Therefore, the present application person is inquiring into the method for calculating correction value to correct offset, after correction value is for correcting replacement Teaching of the robot coordinate system of industrial robot relative to teaching in the teaching operation of the industrial robot before replacement The offset of the coordinate of position.When calculating the correction value for correcting offset, it is generally desirable to, correction value can be readily calculated.

Therefore, technical problem of the invention is, provides a kind of industrial machine that can relatively easily calculate correction value The amendment value calculating method of device people, the correction value be used for correct replace after industrial robot robot coordinate system relative to The offset of the coordinate of the teaching position of teaching in the teaching operation of industrial robot before replacement.

Technical solution used by solving the problems, such as

In order to solve the above technical problem, the present invention provides a kind of amendment value calculating methods of industrial robot, calculate For correcting the correction value of the movement of industrial robot, which is characterized in that the industrial robot has body part, cardinal extremity The first arm, the base end side that side is linked to the body part with being able to rotate are linked to the front end side of first arm with being able to rotate The second arm, base end side be linked to being able to rotate second arm front end side and have load handling object hand fork Hand, the amendment value calculating method of the industrial robot includes base position and determines process, when by first arm, A side in second arm and the hand, in two components linking with being able to rotate is set as a component, and another party is set as When another component, based on keeping another component mobile and it made to stop at base of another component relative to a component The value of the encoder of rest position when level is set makes another component be moved to another portion from the stop position The value of encoder when part is positioned at the position of the base position by positioning fixture, it is determining with another component The a reference value of the corresponding encoder in the base position；Robot motion process, to reflect the condition of a reference value First arm described in motor drive, second arm and the hand, are set as interim benchmark for the industrial robot Posture；Correction value calculation process makes the industrial machine human action after the robot motion process, makes to be mounted with spy The hand fork of survey panel is moved to the delivery position of the handling object, based on the detection at the delivery position With the offset of the stop position of the base position and detection panel of panel, the first arm described in motor drive is calculated When correction value, repeat movement of the hand fork from the benchmark posture to the delivery position, from the delivery position Movement to the benchmark posture carries out the repeatedly correction value calculation process, determines the correction value.

It in the amendment value calculating method of industrial robot of the invention, is determined in process in base position, for One arm, the second arm and hand stop when being moved to base position based on the enabled another component for being rotationally linked to a component The value of the encoder at the stop bit place of setting and make another component be moved to from stop position base position encoder value, it is determining with it is another The a reference value of the corresponding encoder in the base position of one component in robot motion process, is reflecting a reference value later Under the conditions of, industrial robot is set as interim benchmark posture, in correction value calculation process, keeps industrial robot dynamic Make, the hand fork for being mounted with detection panel is made to be moved to the delivery position of handling object.Then, based on the spy at delivery position Survey the offset of the stop position of the base position and detection panel with panel, repairing when calculating the first arm of motor drive Positive value.Therefore, it even if actually without overly complex and time consuming teaching operation, also can relatively easily calculate for repairing The robot coordinate system of industrial robot after positive replacement is relative in the teaching operation of the industrial robot before replacement The correction value of the offset of the coordinate of the teaching position of teaching.In addition, due to carrying out multiple correction value calculation process, so can mention The precision of high correction value.

It in the present invention, can be in the following way: in any process of the multiple correction value calculation process, in institute Hand fork is stated from the benchmark posture to when delivery position movement, first arm, second arm and the hand are equal Identical rotational action is carried out, when mobile to the benchmark posture from the delivery position, first arm, described second Arm and the hand carry out identical rotational action.According to which, influence of the sideshake of motor or deceleration mechanism etc. is no Easily involve correction value.

It in the present invention, can be in the following way: this correction value in the multiple correction value calculation process In calculation process, the correction value that reflection is obtained by the correction value calculation process of last time, arm described in motor drive, with Update the correction value.According to which, the precision of correction value can be improved.

It in the present invention, can be in the following way: first arm, described in the correction value calculation process Second arm and the hand identical rotational action when carrying out with the carrying handling object.

It in the present invention, can be in the following way: there are the multiple rooms for the handover for carrying out the handling object, in institute When stating correction value calculation process, the hand fork is made to be moved to the handover position of the multiple indoor any handling object It sets.

In the present invention, can be in the following way: the multiple room includes to carry out the handling object from outside The loading moved in room carries out the handling object to the external unloading moved out room, carry out to the handling object The process chamber of processing repeats to load the hand fork with indoor described to described as the correction value calculation process First amendment of the delivery position of handling object or the delivery position movement for unloading the indoor handling object It is worth calculation process, also, repeats to move the hand fork to the delivery position of the indoor handling object of processing The second dynamic correction value calculation process.

It in the present invention, can be in the following way: in the correction value calculation process, the institute based on camera shooting The shooting result for stating detection panel detects the offset.

It in the present invention, can be in the following way: determining process as the base position, carry out described two components It is that the first base position of first arm and second arm determines process and described two components are second arms Portion and the second base position of the hand determine process.It in the present invention, can be in the following way: true in the base position After determining process, before the correction value calculation process, hand base portion is made to stop at base position relative to second arm Under state, the hand fork positioning process being located in hand fork Suo Shu on hand is carried out by positioning fixture.

Invention effect

It in the amendment value calculating method of industrial robot of the invention, is determined in process in base position, for One arm, the second arm and hand stop when being moved to base position based on the enabled another component for being rotationally linked to a component The value of the encoder at the stop bit place of setting and make another component be moved to from stop position base position encoder value, it is determining with it is another The a reference value of the corresponding encoder in the base position of one component in robot motion process, is reflecting a reference value later Under the conditions of, industrial robot is set as interim benchmark posture, in correction value calculation process, keeps industrial robot dynamic Make, the hand fork for being mounted with detection panel is made to be moved to the delivery position of indoor handling object.Then, it is based on delivery position The offset of the stop position of the base position and detection panel of the detection panel at place, calculates the first arm of motor drive When correction value.Therefore, even if also can relatively easily be calculated actually without overly complex and time consuming teaching operation For correcting teaching of the robot coordinate system of the industrial robot after replacing relative to the industrial robot before replacement The correction value of the offset of the coordinate of the teaching position of teaching in operation.In addition, because carrying out multiple correction value calculation process, It can be improved the precision of correction value.

Detailed description of the invention

Fig. 1 is that the amendment value calculating method of the industrial robot of embodiment through the invention calculates the industry of correction value With the figure of robot, (A) is top view, and (B) is side view.

Fig. 2 is to indicate bowing the state of the manufacture system of industrial robot shown in FIG. 1 loading organic el display View.

Fig. 3 is the block diagram for illustrating the structure of industrial robot shown in FIG. 1.

Fig. 4 is the movement for indicating industrial robot when moving in substrate to room shown in Fig. 2 and moving out substrate from room Explanatory diagram.

Fig. 5 is the explanatory diagram for indicating the movement of industrial robot when moving in substrate to process chamber shown in Fig. 2.

Fig. 6 is the explanatory diagram for indicating the movement of industrial robot when moving in substrate to process chamber shown in Fig. 2.

Fig. 7 is the explanatory diagram for indicating the movement of industrial robot when moving in substrate to process chamber shown in Fig. 2.

Fig. 8 is the explanatory diagram for indicating the movement of industrial robot when moving in substrate to process chamber shown in Fig. 2.

Fig. 9 is that the first positioning fixture, the second positioning fixture and third positioning fixture are installed in industrial machine shown in FIG. 1 The figure of state on device people, (A) are top views, and (B) is side view.

(A) of Figure 10 is the enlarged drawing in the portion E of Fig. 9 (B), and (B) is to indicate the first positioning fixture from the direction F-F of (A) Deng figure, (C) is the enlarged drawing in the portion G of (A).

(A) of Figure 11 is the enlarged drawing in the portion H of Fig. 9 (B), and (B) is to indicate the second positioning fixture from the direction J-J of (A) Deng figure, (C) is the enlarged drawing in the portion K of (A).

(A) of Figure 12 is the enlarged drawing in the portion L of Fig. 9 (A), and (B) is the enlarged drawing in the portion M of Fig. 9 (B), (C) be from (B) the direction N-N indicates the figure of third positioning fixture etc., and (D) is the enlarged drawing in the portion P of (B).

Figure 13 is by detection face used in the correction value calculation process for the correction value for calculating the first arm shown in FIG. 1 Plate is loaded into the explanatory diagram of the state on hand fork.

Figure 14 is the robot in the correction value calculation process for illustrating to calculate the correction value of the first arm shown in FIG. 1 Movement figure.

Figure 15 is the view for indicating to calculate the camera in the correction value calculation process of the correction value of the first arm shown in FIG. 1 The explanatory diagram of open country etc..

Description of symbols

1 robot (industrial robot), 2 substrates (handling object), Room 5,6,7,8 hands, 9 arms, 10 body parts, 15 first arms, 16 second arms, 17 hand base portions, 18 hand forks, 21 motor (the first motor), 22 motor (the second motor), 23 motor (third motor), 24 encoders (the first encoder), 25 encoders (second encoder), 26 encoders (third encoder), 31 origin sensors (the first origin sensor), 32 origin sensors (the second origin sensor), 33 origins Sensor (third origin sensor), 36 positioning fixtures (the first positioning fixture), 37 positioning fixtures (the second locating clip Tool), 38 positioning fixtures (third positioning fixture), 80 detection use panels, 86 first components, 87 second Part, 88 first cameras, 89 second cameras, 860 first reference marks, 870 second reference marks, The first center of rotation of C1, the second center of rotation of C2, C3 third center of rotation.

Specific embodiment

Hereinafter, the embodiments of the present invention will be described with reference to the drawings.

(structure of industrial robot)

Fig. 1 is the amendment value calculating method of the industrial robot of embodiment through the invention to calculate the work of correction value The figure of industry robot 1, (A) are top views, and (B) is side view.Fig. 2 is to indicate that industrial robot 1 shown in FIG. 1 is loaded into The top view of the state of the manufacture system 3 of organic el display.Fig. 3 is the knot for illustrating industrial robot 1 shown in FIG. 1 The block diagram of structure.In addition, omitting the diagram for being set to the supporting part of hand fork 18,19 in Fig. 1 (B) and Fig. 2.

Industrial robot 1 (hereinafter referred to as " robot 1 " shown in FIG. 1.) it is for carrying as handling object The glass substrate 2 (hereinafter referred to as " substrate 2 " of organic el display.) robot.As shown in Fig. 2, the robot 1 is loaded into The manufacture system 3 of organic el display is come the horizontal articulated robot that uses.Manufacture system 3 has the transmission at the center of being configured at Room 4 (hereinafter referred to as " room 4 ".) and multiple rooms 5~7 for being configured in a manner of embracing chamber 4.

Room 5 is for carrying out the defined process chamber handled to substrate 2.In this mode, multiple rooms 5 are equipped with.In we In formula, set there are two process chamber 51,52 and relative to transfer chamber 4 at two with process chamber 51,52 opposite sides as room 5 Manage room 53,54.In addition, room 6 e.g. accommodates the room (loading room) for application for the substrate 2 supplied to manufacture system 3, room 7 E.g. accommodate the room (unloading room) of the discharge for the substrate 2 being discharged from manufacture system 3.The inside of room 4~7 is vacuum.Machine Inside of a part configuration of device people 1 in room 4.The hand fork 18,19 being described later on by constituting robot 1 enters room 5~7 In, the handling substrate 2 between multiple rooms 5~7 of robot 1.

As shown in Figure 1, robot 1 have load the hand 8 of substrate 2, front end side rotationally the arm 9 of connector 8, can be rotated The body part 10 of the base end side of ground link arm 9.Hand 8 and arm 9 are configured at the upside of body part 10.Body part 10 has and makes 9 liters of arm The elevating mechanism of drop and the shell 13 of receiving elevating mechanism.Shell 13 is shaped generally as bottomed cylindrical.In the upper end of shell 13 It is fixed with the flange 14 for being formed as discoid.

As described above, a part of robot 1 is configured at the inside of room 4.Specifically, the ratio flange 14 of robot 1 The upper part in lower end surface is configured at the inside of room 4.That is, robot 1, more upper than the lower end surface of flange 14 part matches It is placed in vacuum area VR, hand 8 and arm 9 are configured in vacuum chamber (in vacuum).On the other hand, robot 1, it is than flange 14 The part of lower end surface on the lower is configured in atmosphere zone AR (in atmosphere).

Arm 9 has the first arm 15 and the second arm 16 mutually rotatably linked.The arm 9 of the method is by the first arm 15 and 16 two arms of the second arm constitute.The base end side of first arm 15 is rotationally linked to body part 10.In the first arm The front end side in portion 15 rotationally links the base end side of the second arm 16.It is rotationally linked in the front end side of the second arm 16 Hand 8.In addition, being equipped with counterweight 28 with the extending direction opposite side of the first arm 15 in the first arm 15.

Second arm 16 is configured at the position more upper than the first arm 15.It is leaned in addition, hand 8 is configured at than the second arm 16 The position of upside.First arm 15 is opposite relative to the center of rotation (the first center of rotation C1) of body part 10 and the second arm 16 Turn in the distance of the center of rotation (the second center of rotation C2) of the first arm 15 and the second arm 16 relative to the first arm 15 The dynamic distance phase of center (the second center of rotation C2) and hand 8 relative to the center of rotation (third center of rotation C3) of the second arm 16 Deng.

Hand 8 have the front end side for being rotationally linked to the second arm 16 hand base portion 17 and load substrate 2 hand fork 18, 19.The hand 8 of the method has two hand forks 18 and two hand forks 19.Hand fork 18,19 is formed as linear.Hand fork 18 and hand fork 19 Be formed as same shape.Two hand forks 18 are to be spaced from each other the state configured in parallel of specified interval.Hand fork 18 from hand base portion 17 to One direction of horizontal direction extends.Two hand forks 19 are to be spaced from each other the state configured in parallel of specified interval.Hand fork 19 is from hand base Portion 17 extends to 18 opposite direction of hand fork.

Hand fork 18,19 is fixed on hand base portion 17.Specifically, hand fork 18,19 is fixed on hand base by fixed screw Portion 17.The insertion hole of the fixed screw of insert is formed on hand fork 18,19.The insertion hole is with the length with hand fork 18,19 The orthogonal direction of edge direction is the long hole of longitudinal direction, adjustable on the direction orthogonal with the longitudinal direction of hand fork 18,19 Fixation position of the hand fork 18,19 relative to hand base portion 17.

In this mode, a substrate 2 is loaded on two hand forks 18.In addition, a substrate 2 is loaded into two hand forks 19 On.The positioning element for being positioned to the substrate 2 loaded is installed in the upper surface of hand fork 18.In the upper table of hand fork 19 Face is also equipped with the positioning element for being positioned to the substrate 2 loaded.

In this mode, on two hand forks 18 be equipped with to direction multiple first supporting parts 181 outstanding being separated from each other, Two the first supporting parts 181 from multiple first supporting parts 181, positioned at both ends are outstanding multiple to mutual opposite direction respectively Second supporting part 182.In the respective front end of multiple first supporting parts 181 and the respective front end of multiple second supporting parts 182 Portion, equipped with the positioning element 183,184 for being positioned to substrate 2.In addition, hand fork 19 also has same construction, but save Omit the diagram of the first supporting part and second supporting part etc..

In addition, robot 1 has motor 21 for rotating the first arm 15 relative to body part 10, for making Motor 22 that two arms 16 are rotated relative to the first arm 15, the motor for rotating hand base portion 17 relative to the second arm 16 23, the encoder 25 of the rotation amount for detecting the encoder 24 of the rotation amount of motor 21, for detecting motor 22, be used for Detect the encoder 26 of the rotation amount of motor 23 (referring to Fig. 3).

Encoder 24 is installed on motor 21.Encoder 25 is installed on motor 22, and encoder 26 is installed on motor 23. Motor 21 and encoder 24 are for example configured at the inside of body part 10.In addition, motor 22,23 and encoder 25,26 are for example It is configured at the inside of the first arm 15.Motor 21~23 is electrically connected with the control unit 27 of robot 1.Encoder 24~26 also with Control unit 27 is electrically connected.The motor 21 of the method is the first motor, and motor 22 is the second motor, and motor 23 is Three-motor.In addition, encoder 24 is the first encoder, encoder 25 is second encoder, and encoder 26 is third encoder.

Moreover, robot 1 has for detecting the first arm 15 relative to the first arm in the rotation direction of body part 10 The origin sensor 31 of the origin position in portion 15, for detecting in rotation direction of second arm 16 relative to the first arm 15 The origin sensor 32 of the origin position of second arm 16, for detecting rotation direction of the hand base portion 17 relative to the second arm 16 On hand base portion 17 origin position origin sensor 33.The origin sensor 31 of the method is the first origin sensor, former Point sensor 32 is the second origin sensor, and origin sensor 33 is third origin sensor.

Origin sensor 31~33 is, for example, proximity sensor.Alternatively, origin sensor 31~33 is, for example, to have to shine The optical sensor of element and light receiving element.Origin sensor 31~33 is electrically connected with control unit 27.In body part 10 and Linking part, that is, joint portion of one arm 15, origin sensor 31 either are fixed in body part 10 and the first arm 15, Any another party in body part 10 and the first arm 15, is fixed with and is sensed when the first arm 15 is in origin position by origin The exploring block that device 31 detects.

Equally, in linking part, that is, joint portion of the first arm 15 and the second arm 16, origin sensor 32 is fixed on first Either in arm 15 and the second arm 16, any another party in the first arm 15 and the second arm 16 is fixed with Second arm 16 is in the exploring block detected when origin position by origin sensor 32.In addition, in the second arm 16 and hand base Linking part, that is, the joint portion in portion 17, origin sensor 33 either are fixed in the second arm 16 and hand base portion 17, second Any another party in arm 16 and hand base portion 17 is fixed with and is visited when hand base portion 17 is in origin position by origin sensor 33 The exploring block of survey.

(movement for summarizing industrial robot)

Fig. 4 is indicate industrial robot 1 when moving out and move in substrate 2 relative to room 5 shown in Fig. 2 and room 6 dynamic The explanatory diagram of work.Fig. 5 is the explanation for indicating the movement of the industrial robot 1 when moving in substrate 2 to process chamber 51 shown in Fig. 2 Figure.Fig. 6 is the explanatory diagram for indicating the movement of the industrial robot 1 when moving in substrate 2 to process chamber 5 shown in FIG. 1.Fig. 7 is Indicate the explanatory diagram of the movement of the industrial robot 1 when moving in substrate 2 to process chamber 53 shown in FIG. 1.Fig. 8 is indicated to figure The explanatory diagram of the movement of industrial robot 1 when process chamber 54 shown in 1 moves in substrate 2.In addition, being omitted in Fig. 4~Fig. 8 Set on the diagram of the supporting part of hand fork 18,19.

1 drive motor 21,22,23 of robot, in the handling substrate 2 of room 5,6,7.For example, as shown in figure 4, robot 1 Substrate 2 is moved out from room 6, and substrate 2 is moved in into room 7.More specifically, as shown in Fig. 4 (A), robot 1 hand fork 18 be in In the state that left and right directions is parallel, arm 9 is stretched out to receive substrate 2 in room 6.In addition, as shown in Fig. 4 (B), retractor arm 9, until Until first arm 15 and the second arm 16 are overlapped in the up-down direction, substrate 2 is moved out from room 6.In addition, robot 1 makes hand 8 After 180 ° of rotation, arm 9 is stretched out, as shown in Fig. 5 (C), moves in substrate 2 to room 7.It is removed when moving out substrate 2 from room 6 and to room 7 When entering substrate 2, when from up and down direction, third center of rotation C3 of the hand 8 relative to the second arm 16 is passing through first turn Linear movement in the dummy line parallel with left and right directions of dynamic center C1.That is, being moved in when moving out substrate 2 from room 6 and to room 7 When substrate 2, when from up and down direction, 8 right direction linear movement of hand.In this way, room 6,7 is in hand 8 towards in room 6,7 When linear movement, the first center of rotation C1 is located at the first Room on the extended line of the motion track of hand 8.

As shown in figure 5, substrate 2 is moved in process chamber 51 by robot 1.At this point, such as Fig. 5 (A) is shown first for robot 1, from The state for being withdrawn arm 9, which plays drive motor 21,22,23, makes hand 8, the first arm 15 and the second arm 16 as shown in Fig. 5 (B) Rotation, so that hand fork 18 is parallel with front-rear direction and substrate 2 is configured at the rear end side of hand 8, and in the lateral direction, so that the The center of process chamber 51 on three rotating centers C3 and left and right directions is substantially uniform.Then, arm 9 is stretched out by robot 1, such as Fig. 5 (C) It is shown, substrate 2 is moved in process chamber 51.At this point, third center of rotation C3 is passing through left and right directions when from up and down direction On process chamber 51 center the dummy line parallel with front-rear direction on linear movement.

As shown in fig. 6, substrate 2 is moved in process chamber 52 by robot 1.At this point, such as Fig. 6 (A) is shown first for robot 1, from The state for being withdrawn arm 9, which plays drive motor 21,22,23, makes hand 8, the first arm 15 and the second arm 16 as shown in Fig. 6 (B) Rotation, so that hand fork 18 is parallel with front-rear direction and substrate 2 is configured to the rear end side of hand 8, and in the lateral direction, so that The center of process chamber 52 on third center of rotation C3 and left and right directions is substantially uniform.Then, arm 9 is stretched out by robot 1, such as Fig. 6 (C) shown in, substrate 2 is moved in process chamber 52.At this point, third center of rotation C3 is passing through left and right when from up and down direction Linear movement in the dummy line parallel with front-rear direction at the center of the process chamber 52 on direction.

In this mode, process chamber 51,52 is the second Room by following procedure, that is, in hand 8 towards in room 51,52 When linear movement, the first center of rotation C1 is located at from the position that the extended line of the motion track of hand 8 is deviated to side, and such as Fig. 6 (B) shown in, the second center of rotation C2 is located at the direction of travel side than the first center of rotation C1 and third center of rotation C3 armrest 8 The process of the position of (52 side of 51 side of process chamber or process chamber).

As shown in fig. 7, substrate 2 is moved in process chamber 53 by robot 1.At this point, such as Fig. 7 (A) is shown first for robot 1, from The state for being withdrawn arm 9, which plays drive motor 21,22,23, makes hand 8, the first arm 15 and the second arm 16 as shown in Fig. 7 (B) Rotation, so that hand fork 18 is parallel with front-rear direction and substrate 2 is configured to the front end side of hand 8, and in the lateral direction, so that The center of process chamber 53 on third center of rotation C3 and left and right directions is substantially uniform.Then, arm 9 is stretched out by robot 1, such as Fig. 7 (C) shown in, substrate 2 is moved in process chamber 53.At this point, third center of rotation C3 is passing through left and right when from up and down direction The center of process chamber 53 on direction is parallel to linear movement in dummy line in the front-back direction.

As shown in figure 8, substrate 2 is moved in process chamber 54 by robot 1.At this point, such as Fig. 8 (A) is shown first for robot 1, from The state for being withdrawn arm 9, which plays drive motor 21,22,23, makes hand 8, the first arm 15 and the second arm 16 as shown in Fig. 8 (B) Rotation, so that hand fork 18 is parallel with front-rear direction and substrate 2 is configured to the front end side of hand 8, and makes in the lateral direction The center of process chamber 54 on third center of rotation C3 and left and right directions is substantially uniform.Then, arm 9 is stretched out by robot 1, such as Fig. 8 (C) shown in, substrate 2 is moved in room 54.At this point, third center of rotation C3 is passing through left and right directions when from up and down direction On process chamber 54 center the dummy line parallel with front-rear direction on linear movement.

In this mode, process chamber 53,54 is that third center of rotation C3 is always located in than the second center of rotation C2 armrest 8 Direction of travel side (54 side of 53 side of process chamber or process chamber) position and third room without following procedure, that is, in 8 court of hand Into room 51,52 when linear movement, the first center of rotation C1 is located at from the position that the extended line of the motion track of hand 8 is deviated to side It sets, and the second center of rotation C2 is located at the process of the position than the first center of rotation C1 and third center of rotation C3 on the front.

In addition, also similarly being acted by the case where 19 handling substrate 2 of hand fork.In addition, when moving out substrate 2 from room 5, Carry out the movement opposite with above-mentioned explanation.

(calculation method of the correction value of industrial robot)

Fig. 9 is the figure for the state that positioning fixture 36~38 is mounted in robot 1 shown in FIG. 1, and (A) is top view, (B) It is side view.Figure 10 (A) is the enlarged drawing in the portion E of Fig. 9 (B), and Figure 10 (B) is to indicate locating clip from the direction F-F of Figure 10 (A) The figure of tool 36 etc., Figure 10 (C) is the enlarged drawing in the portion G of Figure 10 (A).Figure 11 (A) is the enlarged drawing in the portion H of Fig. 9 (B), Figure 11 (B) It is the figure that positioning fixture 37 etc. is indicated from the direction J-J of Figure 11 (A), Figure 11 (C) is the enlarged drawing in the portion K of Figure 11 (A).Figure 12 It (A) is the enlarged drawing in the portion L of Fig. 9 (A), Figure 12 (B) is the enlarged drawing in the portion M of Fig. 9 (B), and Figure 12 (C) is the N- from Figure 12 (B) The direction N indicates the figure of positioning fixture 38 etc., and Figure 12 (D) is the enlarged drawing in the portion P of Figure 12 (B).

When robot 1 is set to manufacture system 3, in order to generate the operation program of robot 1, robot 1 is carried out Teaching operation.In addition, for example, the robot of the robot 1 after replacement is sat when replacement is set to the robot 1 of manufacture system 3 Coordinate shift of the mark system relative to the teaching position of teaching in the teaching operation of the robot 1 before replacement, therefore, it is necessary to again Carry out the teaching operation of robot 1.

On the other hand, if having modified the robot coordinate system of the robot 1 after replacement relative to the robot 1 before replacement The offset of the coordinate of the teaching position of teaching in teaching operation, then without carrying out cumbersome teaching operation again.In we In formula, when replacement is set to the robot 1 of manufacture system 3, the robot coordinate for correcting the robot 1 after replacing is calculated It is the correction value relative to the offset of the coordinate of the teaching position of teaching in the teaching operation of the robot 1 before replacement, so that It may not necessarily carry out cumbersome teaching operation again after having replaced robot 1.That is, by the first arm 15, the second arm 16 and hand 8 in, the side in two components rotationally linking be set as a component, when another party is set as another component, base The encoder of stop position when keeping another component mobile to stop at base position of another component relative to a component Coding when being worth and make another component to be moved to the position that another component positioned by positioning fixture to base position from stop position The value of device, the base position for being determined a reference value of above-mentioned encoder corresponding with the base position of another component determine work Then sequence calculates the correction value of the movement for correcting the robot 1 after replacing.Hereinafter, illustrating the calculating side of the correction value Method.

In the following description, by the second arm 16 relative to the second arm 16 in the rotation direction of the first arm 15 Defined base position is set as the first base position, by hand base portion 17 relative to the hand base portion in the rotation direction of the second arm 16 17 defined base position is set as the second base position, the side orthogonal with longitudinal direction by hand fork 18 relative to hand base portion 17 The defined base position of upward hand fork 18 is set as third base position, the rotation by the first arm 15 relative to body part 10 The defined base position of the first arm 15 on direction is set as the 4th base position.

In this mode, when the second arm 16 is in the first base position, as shown in figure 9, the first arm 15 and second Arm 16 is overlapped in the up-down direction.Specifically, when the second arm 16 is in the first base position, the first arm 15 and When two arms 16 from up and down direction with from carrying out, the longitudinal direction one of the longitudinal direction of the first arm 15 and the second arm 16 The mode of cause is overlapped in the up-down direction.In addition, in this mode, rotation direction of second arm 16 relative to the first arm 15 On the second arm 16 origin position and the first base position it is consistent.

In addition, when hand base portion 17 is in the second base position, as shown in figure 9, the second arm 16 and hand fork 18 are upper and lower It is overlapped on direction.Specifically, when hand base portion 17 is in the second base position, the second arm 16 and hand fork 18 are from upper and lower When direction is observed, the consistent mode of longitudinal direction of the longitudinal direction and hand fork 18 of the second arm 16 is overlapped in above-below direction.Separately Outside, in this mode, the origin of the hand base portion 17 in rotation direction of the hand base portion 17 from hand base portion 17 relative to the second arm 16 The position that position has rotated 90 ° is the second base position.

In addition, the 4th base position can be with the first arm 15 relative to the first arm in the rotation direction of body part 10 15 origin position is consistent, and is also possible in rotation direction of first arm 15 from the first arm 15 relative to body part 10 The origin position of the first arm 15 have rotated the position of predetermined angular as the 4th base position.

In addition, in this mode, using the positioning fixture 36 for the second arm 16 to be located in the first base position, use In hand base portion 17 to be located in the positioning fixture 37 of the second base position, is used to hand fork 18 being located in determining for third base position Position fixture 38.The positioning fixture 36 of the method is the first positioning fixture, and positioning fixture 37 is the second positioning fixture, positioning fixture 38 It is third positioning fixture.In addition, hand fork 19 is also being located in the direction orthogonal with the longitudinal direction of hand fork 19 by positioning fixture 38 On defined base position of the hand fork 19 relative to hand base portion 17 when use.

As shown in Figure 10, positioning fixture 36 has the fixation member 41 and pin 42 for being fixed on the first arm 15.Fixation member 41 are fixed on the side of the cardinal extremity of the first arm 15.The through hole 41a of insertion pin 42 is formed in fixation member 41.In addition, The insertion hole 16a of insertion pin 42 is formed in the side of the front end of the second arm 16.When the through hole of fixation member 41 will be inserted into When the insertion insertion hole 16a of pin 42 of 41a, the second arm 16 is strictly positioned at the first base position.The fixed part of the method Part 41 is the first fixation member, and pin 42 is the first pin, and insertion hole 16a is the first insertion hole, and through hole 41a is the first through hole.

As shown in figure 11, positioning fixture 37 has the fixation member 43,44 and pin 45 for being fixed on the first arm 15.Fixed part Part 43 is fixed on the side of the cardinal extremity of the first arm 15.Fixation member 44 is fixed on the side of fixation member 43.In fixation member The groove portion for preventing itself and the interference of fixation member 41 is formed on 43.For adjusting fixation member 44 relative to fixation member The front end face of the screw 46 of the position of 43 up and down direction is contacted with the bottom surface of fixation member 44.Screw 46 and it is fixed on fixed part The screw holding member 47 of the lower end surface of part 43 screws togather.

The through hole 44a of insertion pin 45 is formed in fixation member 44.In addition, being formed in the side of hand base portion 17 slotting Enter the insertion hole 17a of pin 45.When the pin 45 of the through hole 44a of insertion fixation member 44 is inserted into insertion hole 17a, hand base portion 17 Strictly it is positioned at the second base position.The fixation member 43,44 of the method is the second fixation member, and pin 45 is the second pin, Being inserted into hole 17a is the second insertion hole, and through hole 44a is the second through hole.

As shown in figure 12, positioning fixture 38 has the fixation member 48,49 being fixed on two hand forks 18 and pin 50.It is fixed Component 48 is fixed on the upper surface of two hand forks 18.Fixation member 49 is fixed on the lower surface of fixation member 48.In fixation member The through hole 49a of insertion pin 50 is formed on 49.In addition, being formed with inserting for insertion pin 50 in the side of the cardinal extremity of the second arm 16 Enter hole 16b.When the pin 50 of the through hole 49a of insertion fixation member 49 is inserted into insertion hole 16b, two hand forks 18 are by strictly It is positioned at third base position.The fixation member 48,49 of the method is third fixation member, and pin 50 is third pin, is inserted into hole 16b It is third insertion hole, through hole 49a is third through hole.

For example, when replacing the robot 1 being arranged in manufacture system 3, firstly, the detection result based on origin sensor 32 The second arm 16 is set to turn to the first base position (origin position).Detection result namely based on origin sensor 32 makes second Arm 16 rotates and stops, so that the second arm 16 stops at the first base position.

In addition, the detection result of detection result and encoder 26 based on origin sensor 33 makes hand base portion 17 turn to Two base positions (have rotated 90 ° of position from origin position).For example, making hand base in the detection result based on origin sensor 33 After portion 17 turns to origin position, the detection result based on encoder 26 makes hand base portion 17 turn to the second benchmark from origin position Position.Hand base portion 17 is rotated namely based on the detection result of origin sensor 33 and the detection result of encoder 26 and is stopped, with Hand base portion 17 is set to stop at the second base position.

Then, fixation member 41,43,44 is fixed on the first arm 15, fixation member 48,49 is fixed on two hand forks 18.In addition, strictly speaking, the detection result based on origin sensor 32 turns to the second arm 16 of the first base position slightly Deviate the first base position.Equally, strictly speaking, the detection result of detection result and encoder 26 based on origin sensor 33 The hand base portion 17 of the second base position is turned to slightly offset from the second base position.

Then, the second arm 16 is made to turn to the pin of the through hole 41a of insertion fixation member 41 relative to the first arm 15 42 are embedded into the position of insertion hole 16a, and pin 42 is inserted into insertion hole 16a, the second arm 16 is strictly located in the first benchmark Position.In addition, the amount of spin of the motor 22 with the detection of encoder 25 at this time, control unit 27 use the detection knot of encoder 25 Fruit determines the first base position of the second arm 16.

Encoder 25 when stopping at the first stop position namely based on the detection result and the second arm 16 of encoder 25 Value, determines the first base position (the first base position determines process), the detection result of the encoder 25 is to make the second arm 16 stop the second arm 16 so that the second arm 16 stops in the first base position from the detection result based on origin sensor 32 The first stop position of stop position of the second arm 16 when only turns to the second arm 16 and is located in by positioning fixture 36 The result when position of the first base position.

Then, it is configured in the second arm 16 and determines the first base position determined in process in the first base position Under state, make hand base portion 17 relative to the second arm 16 turn to insertion fixation member 44 through hole 44a pin 45 insertion insert Pin 45 is inserted into insertion hole 17a, hand base portion 17 is strictly located in the second base position by the position for entering hole 17a.In addition, By the amount of spin of the motor 23 of the detection of encoder 26 at this time, control unit 27 determines hand base using the detection result of encoder 26 Second base position in portion 17.

The shape of the first base position determined in process is determined in the first base position that is, being configured in the second arm 16 Under state, based on coding when hand base portion 17 being made to rotate from the second stop position the position that base portion 17 in one's hands positioned by positioning fixture 37 The value of encoder 26 when the detection result and hand base portion 17 of device 26 stop at the second stop position, determines the second base position (the second base position determines process), wherein the second stop position be in order to make hand base portion 17 stop at the second base position and The detection result of detection result and encoder 26 based on origin sensor 33 makes stopping for the hand base portion 17 when the stopping of hand base portion 17 Stop bit is set.

Then, it is configured in the second arm 16 and determines the first base position determined in process in the first base position, And hand base portion 17 is configured in the state that the second base position determines the second base position determined in process, makes two hands Fork 18 is moved to the perforation for being inserted into fixation member 49 relative to hand base portion 17 to the direction orthogonal with the longitudinal direction of hand fork 18 The position of the insertion insertion of the pin 50 hole 16b of hole 49a, is inserted into insertion hole 16b for pin 50, two hand forks 18 is located in third benchmark Position.

The first base position determined in process and hand base are determined in the first base position that is, being configured in the second arm 16 Portion 17 is configured in the state that the second base position determines the second base position determined in process, will by positioning fixture 38 Two hand forks 18 position (hand fork positioning process).The hand fork 18 positioned is screwed in hand base portion 17.

Then, positioning fixture 37,38 is at least removed, meanwhile, so that hand base portion 17 is rotated 180 ° relative to the second arm 16.? Under the state, fixation member 48,49 is fixed on two hand forks 19.In addition, make two hand forks 19 relative to hand base portion 17 to The direction orthogonal with the longitudinal direction of hand fork 19 is mobile, inserts until being inserted into the insertion of pin 50 of through hole 49a of fixation member 49 Pin 50 is inserted into insertion hole 16b, two hand forks 19 is located in defined base position by the position for entering hole 16b.It is positioned Hand fork 19 is screwed in hand base portion 17.

(the first correction value calculation process in room 6 (the first Room))

Figure 13 is to detect to use used in the correction value calculation process for the correction value that will calculate the first arm 15 shown in FIG. 1 Panel 80 is loaded into the explanatory diagram of the state on hand fork 18, and (A) is top view, and (B) is cross-sectional view.Figure 14 is for illustrating to calculate The figure of the movement of robot 1 in the correction value calculation process of the correction value of first arm 15 shown in FIG. 1.Figure 15 is to indicate to count Calculate the explanatory diagram in visual field of camera in the correction value calculation process of the correction value of the first arm 15 shown in FIG. 1 etc..

It in this mode, is that the correction value calculation process of the correction value for calculating first arm 15 for robot 1 is said Bright figure.In this mode, correction value calculating is carried out after the first base position determines that process and the second base position determine process When process, as shown in figure 13, detection panel 80 is loaded on two hand forks 18 (panel loading process).

Detection is the panel of light-proofness used when calculating correction value with panel 80.In this mode, handling object is The substrate 2 of quadrangle, therefore, detection panel 80 are when substrate 2 being loaded into hand fork 18 to link positioned at two diagonal angles The plate-shaped member that the mode of 2a, 2b extend.More specifically, detection panel 80 has first extended linearly along hand fork 18 Part 81 extends obliquely to be equivalent to the position of the angle 2a when substrate 2 to be loaded on hand fork 18 from first part 81 Second part 82, the position for obliquely running out to be equivalent to the angle 2b when substrate 2 to be loaded on hand fork 18 from first part 81 The Part III 83 set.

In addition, detection panel 80 is loaded on two hand forks 18 with being positioned in the state of the upper surface of hand fork 18.Tool For body, when being modified value calculation process, on hand fork 18, positioning element 29 is fixed on by screw etc. for from below In each for accepting the carrier 185 of multiple convexs of substrate 2.Insertion detection panel 80 is formed on positioning element 29 Location hole 84 positioning protrusion 290, detection panel 80 positioned by positioning protrusion 290.

In this state, it is formed in the of the rectangle of the second part 82 of detection panel 80 and the end of Part III 83 The edge of one detected portion 821 and the second detected portion 831 and angle 2a, 2b of the substrate 2 when substrate 2 is loaded on hand fork 18 Overlapping.

Then, in order to make the first arm 15 stop at the 4th base position, detection result based on origin sensor 31 or The detection result of detection result and encoder 24 based on origin sensor 31, so that the first arm when the first arm 15 stops On the basis of 15 stop position, that is, third stop position, drive control motor 21, to be determined in process in the first base position On the basis of the first determining base position, drive control motor 22, meanwhile, it is determined with being determined in process in the second base position The second base position on the basis of, robot 1 is set as interim benchmark posture (robot motion by drive control motor 23 Process).

That is, on the basis of third stop position, drive control motor 21, to be determined in process really in the first base position On the basis of the first fixed base position, drive control motor 22, meanwhile, to determine determination in process in the second base position On the basis of second base position, drive control motor 23 makes the movement of robot 1 to interim original position.In this mode, example Such as, the first arm 15 stops at third stop position, and the second arm 16 stops at the first base position, hand base portion 17 stop at from The state that second base position has rotated 90 ° of position becomes the interim original position (interim benchmark posture) of robot 1.The original Position is state shown in Fig. 4 (B).

In addition, the origin position of the first arm 15 in rotation direction of first arm 15 relative to body part 10 and Under four base position unanimous circumstances, in robot motion process, the detection result based on origin sensor 31 makes the first arm Portion 15 rotates and stops, so that the first arm 15 stops at the 4th base position.In addition, in the first arm 15 from the first arm 15 The position that origin position relative to the first arm 15 in the rotation direction of body part 10 has rotated predetermined angular reaches the 4th In the case where base position, in robot motion process, the spy of detection result and encoder 24 based on origin sensor 31 Surveying result rotates the first arm 15 and stops, so that the first arm 15 stops at the 4th base position.In addition, third stop position It sets strictly speaking slightly offset from the 4th base position.In addition, until positioning fixture 36,38 is split before robot motion process Under.

Then, robot 1 is acted, hand fork 18 is made to be moved to the delivery position (hand mobile process) of substrate 2.For example, such as Shown in Figure 14 (A), the delivery position for the substrate 2 for being moved to hand fork 18 in room 6.Specifically, the state shown in Fig. 4 (B) It rises and acted shown in arrow 6a in Fig. 4, as shown in Fig. 4 (A), stretch out arm 9, the substrate 2 for being moved to hand fork 18 in room 6 Delivery position.

Here, as shown in figure 15, the reference portion configured with the reference mark for being labelled with the 5th base position of expression in room 6 Part and camera.In this mode, by two detected portions of detection panel 80, (the first detected portion 821 and second is tested Survey portion 831) position compared with reference mark.Therefore, the shading for being labelled with the first reference mark 860 is equipped in room 6 The first component 86 of property, the second component 87 of light-proofness with the second reference mark 870, for the first reference mark 860 and One detected portion 821 enter the first camera 88 in the 88a of the visual field, for the second reference mark 870 and the second detected portion 831 into Enter the second camera 89 in the 89a of the visual field.

In this mode, the first component 86 and second component 87 are the plate-shaped members of light-proofness, are fixed in the inner wall of room 6 Deng on.In addition, the first reference mark 860 and the second reference mark 870 are the perforation first component 86 and second component 87 respectively Hole.In this mode, the formation of the first component 86 and second component 87 has the first reference mark 860 and the second reference mark 870 Part be thin plate.

First reference mark 860 and the second reference mark 870 are two, indicate the 5th base position.Specifically, making hand Robot 1 before being mounted with the replacement of detection panel 80 on fork 18 acts, the friendship for the substrate 2 for being moved to hand fork 18 in room 6 When connecing position and stopping, by the first reference mark 860 and first detected portion 821 in the shooting result of the first camera 88 It closes the position of the second reference mark 870 and the second detected portion 831 in the shooting result of positional relationship and second camera 89 System is set as the first arm 15 relative to the 5th base position in the rotation direction of body part 10.Here, with the first camera 88 Shooting result in the first reference mark 860 and the first detected portion 821 deviate as defined in positional relationship when offset and the In the shooting result of two cameras 89 second reference mark 870 and the second detected portion 831 deviate as defined in positional relationship when The rotation direction and rotational angle of corresponding first arm 15 of offset are by as value corresponding with the detected value in encoder 24 It is stored in control unit 27.

Therefore, in correction value calculation process, until 860 He of the first reference mark in the shooting result of the first camera 88 First detected portion 821 becomes defined positional relationship, the second reference mark 870 and the in the shooting result of second camera 89 Two detected portions 831 are defined positional relationship, rotate the first arm 15 relative to body part 10, and control unit 27 also can Detected value based on encoder 24 corresponding with offset calculates correction value.

That is, as shown in Figure 14 (A), in the delivery position for the substrate 2 for being moved to hand fork 18 in room 6, in the first camera shooting In first 88 shooting result, the first reference mark 860 and the first detected portion 821 deviate defined positional relationship, and second In the shooting result of camera 89, the second reference mark 870 and the second detected portion 831 deviate defined positional relationship.At this In the case of, in correction value calculation process, as shown in Figure 14 (B), calculating drive motor 21 makes the first arm 15 relative to this Body portion 10 rotate when encoder 24 value and as correction value, until the first reference mark 860 and the first detected portion 821 become defined positional relationship, and the second reference mark 870 and the second detected portion 831 become defined positional relationship.

Then, it is reflected in calculated correction value and drive control motor 21 in correction value calculation process, first On the basis of base position determines the first base position determined in process, drive control motor 22, meanwhile, in the second benchmark Position determines that the second base position determined in process is benchmark drive control motor 23, and robot 1 is made to return to interim original Position.Specifically, returning and facing as shown in Fig. 4 (B) from carrying out acting shown in arrow 6b in Fig. 4 state shown in Fig. 4 (A) When original position.

Moreover, again acting robot 1, hand fork 18 is made to be moved to the delivery position of substrate 2.Moreover, being again based on The shooting result of one camera 88 and the shooting result of second camera 89, and it is tested based on the first reference mark 860 and first The positional relationship of the positional relationship in survey portion 821 and the second reference mark 870 and the second detected portion 831 calculates new amendment Value, later, reflects new correction value (this correction value), drive control motor 21,22,23, made machine in the same manner as last time Device people 1 returns to interim original position.Therefore, correction value is successively updated.

Repeat the movement, (the first reference mark 860 and first is detected in newest correction value or offset The offset of the offset in portion 821 and the second reference mark 870 and the second detected portion 831) it is preset threshold value or less At the time of, it determines correction value, reflects identified correction value, drive control motor 21, to determine work in the first base position The first base position determined in sequence is benchmark drive control motor 22, meanwhile, to be determined in process in the second base position The second determining base position is benchmark drive control motor 23, and the position for returning to robot 1 is set as normal original position.

When repeating above-mentioned movement, in any process, make base of the hand fork 18 from interim original position into room 6 The outlet and return to interim original from the state that hand fork 18 is located at the delivery position of the substrate 2 in room 6 that the delivery position of plate 2 moves In the circuit of position, carry out robot 1 relative to the first arm 15, the second arm 16 and hand 8 identical as movement shown in Fig. 4 Rotational action.Therefore, when being modified value calculation process, motor or the rotation of motor is slowed down and is transmitted to arm etc. The influence of sideshake of deceleration mechanism be not easy to feed through to correction value.

In addition, in this mode, first reference mark 860 and first is detected in the shooting result of the first camera 88 Portion 821 deviates defined positional relationship, and second reference mark 870 and second is detected in the shooting result of second camera 89 In the case that portion 831 deviates defined positional relationship, rotate the first arm 15 relative to body part 10, calculating and offset The value of corresponding encoder 24 and as correction value.But it is taken the photograph according to the shooting result of the first camera 88 and second As first 89 shooting result detect the direction of offset after, as shown in Figure 14 (B), the first arm 15 can also be made relative to ontology Portion 10 is rotated in a manner of eliminating offset, and the detection limit based on encoder 24 at this time calculates correction value.No matter in any case, Above-mentioned correction value calculation process can carry out in room 7.

(the second correction value calculation process in process chamber 51 (second Room))

In this mode, it after having carried out the correction value calculation process in room 6, is also similarly corrected in process chamber 51 It is worth calculation process.Therefore, same as room 6, it also is provided with being labelled with the first component of the first reference mark 860 in process chamber 51 86, it is labelled with the second component 87 of the second reference mark 870, enters view for the first reference mark 860 and the first detected portion 821 The first camera 88 in open country enters second camera in the visual field for the second reference mark 870 and the second detected portion 831 89。

Therefore, roughly the same with the correction value calculation process in room 6, as shown in Fig. 5 (A), make hand fork 18 from 1, robot The delivery position of the substrate 2 in process chamber 51, counting chamber 51 are moved to via state shown in Fig. 5 (B) in state in situ In correction value.

Then, the correction value being reflected in the process chamber 51 calculated in correction value calculation process, drive control motor 21, Using the first base position determine in process determine the first base position as benchmark drive control motor 22, meanwhile, with Second base position determine in process determine the second base position be benchmark drive control motor 23, make robot 1 via State shown in Fig. 5 (B) returns to original position interim shown in Fig. 5 (A).

Moreover, again acting robot 1, the delivery position for the substrate 2 for being moved to hand fork 18 in process chamber 51 is calculated New correction value reflects new correction value (this correction value), robot 1 is made to return to interim original position later.Repeat The movement determines correction value at the time of newest correction value etc. becomes preset threshold value or less.

When repeating above-mentioned movement, in any process, make hand fork 18 from interim in situ to process chamber 51 In substrate 2 the mobile outlet and the delivery position for being located at the substrate 2 in process chamber 51 from hand fork 18 of delivery position state It returns in interim circuit in situ, carries out robot 1 and Fig. 5 institute relative to the first arm 15, the second arm 16 and hand 8 The identical rotational action of the movement shown.Therefore, when being modified value calculation process, motor or the rotation deceleration by motor And the influence of the sideshake to the deceleration mechanism of the transmitting such as arm is not easy to feed through to correction value.

(the third correction value calculation process in process chamber 53 (third room))

In this mode, the correction value calculation process in correction value calculation process and process chamber 51 in room 6 is being carried out Afterwards, same correction value calculation process is also carried out in process chamber 53.Therefore, identical as room 6, it also is provided with marking in process chamber 53 The first component 86 of the first reference mark 860, the second component 87 for being labelled with the second reference mark 870 are infused, for the first benchmark Label 860 and the first detected portion 821 enter the first camera 88 in the visual field, tested for the second reference mark 870 and second Survey portion 831 enters the second camera 89 in the visual field.

Therefore, roughly the same with the correction value calculation process in room 6, as shown in Fig. 7 (A), make hand fork 18 from 1, robot The delivery position of substrate 2 in state in situ via from state shown in Fig. 7 (B) to process chamber 53 is mobile, counting chamber Correction value in 53.

Then, the correction value being reflected in the process chamber 53 calculated in correction value calculation process, drive control motor 21, Using the first base position determine in process determine the first base position as benchmark drive control motor 22, meanwhile, with Second base position determine in process determine the second base position be benchmark drive control motor 23, make robot 1 via State shown in Fig. 7 (B) returns to original position interim shown in Fig. 7 (A).

Moreover, again acting robot 1, the delivery position for the substrate 2 for being moved to hand fork 18 in process chamber 53 is calculated New correction value reflects new correction value (this correction value), robot 1 is made to return to interim original position later.Repeat The movement determines correction value at the time of newest correction value etc. becomes preset threshold value or less.

When repeating above-mentioned movement, in any process, make hand fork 18 from interim in situ to process chamber 53 In substrate 2 the mobile outlet and the delivery position for being located at the substrate 2 in process chamber 53 from hand fork 18 of delivery position state It returns in interim circuit in situ, carries out robot 1 and Fig. 7 institute relative to the first arm 15, the second arm 16 and hand 8 The identical rotational action of the movement shown.Therefore, when being modified value calculation process, motor or the rotation deceleration by motor And the influence of the sideshake to the deceleration mechanism of the transmitting such as arm is not easy to feed through to correction value.

(adjusting of hand fork 19)

In addition, in this mode, after the correction value calculation process in hand fork 18, making hand base portion 17 rotate 180 °, together When, detection panel 80 is changed and is downloaded on two hand forks 19, later, the handover position for the substrate 2 for being moved to hand fork 19 in room 6 It sets.At this point, as defined in first reference mark 860 and the first detected portion 821 deviate in the shooting result of the first camera 88 Positional relationship, and as defined in second reference mark 870 and the second detected portion 831 deviate in the shooting result of second camera 89 In the case where positional relationship, the hand fork 19 on the direction orthogonal with the longitudinal direction of hand fork 19 is adjusted to hand using positioning fixture 38 The fixed fixation position of base portion 17, so that the first reference mark 860 and the first detected portion 821 become defined positional relationship, And second reference mark 870 and the second detected portion 831 become defined positional relationship.

(main effect of the method)

As mentioned above, in this mode, it is determined in process in the first base position and determines the using positioning fixture 36 One base position, first base position are the second arms 16 in rotation direction of second arm 16 relative to the first arm 15 Base position, the second base position determine in process using positioning fixture 37 determine the second base position, second benchmark Position is base position of the hand base portion 17 relative to the hand base portion 17 in the rotation direction of the second arm 16, in hand fork positioning process In, hand fork 18 is located in by third base position by positioning fixture 38, the third base position be hand fork 18 with hand fork 18 The orthogonal direction of longitudinal direction on base position relative to hand base portion 17.

In addition, in this mode, in robot motion process later, to be determined in process really in the first base position The first fixed base position is benchmark drive control motor 22, meanwhile, to determine determination in process in the second base position Second base position is benchmark drive control motor 23, after robot 1 to be set as to interim benchmark posture, in hand mobile process In so that hand fork 18 is moved to room 6, process chamber 51 and process chamber 53, be modified value calculation process, calculate for controlling motor 21 correction value.That is, in this mode, the second arm 16, hand base portion 17 and hand fork 18 is made to be directed at defined base position Under state, hand fork 18 is made to be moved to room 6, process chamber 51 and process chamber 53, be modified value calculation process, calculated and driven for controlling The correction value of the motor 21 of dynamic first arm 15.

In addition, in this mode, the robot 1 before the replacement for being loaded on detection panel 80 on hand fork 18 acts, When keeping hand fork 18 mobile to room 6, process chamber 51 and process chamber 53, in rotation direction of first arm 15 relative to body part 10 On, position corresponding with the first detected portion 821 of detection panel 80 and the second detected portion 831 becomes the 5th benchmark position It sets.Therefore, in this mode, in correction value calculation process, by calculating the correction value for controlling motor 21, Neng Gouji Calculate robot coordinate system's showing in teaching operation relative to the robot 1 before replacement for correcting the robot 1 after replacing Teach the correction value of the offset of the coordinate of teaching position.

That is, in this mode, passing through the first detected portion 821 and based on the 5th base position and detection panel 80 Two detected portions 831, the first arm 15 calculate correction value, Neng Gouji relative to the offset in the rotation direction of body part 10 Calculate robot coordinate system's showing in teaching operation relative to the robot 1 before replacement for correcting the robot 1 after replacing Teach the correction value of the offset of the coordinate of teaching position.Therefore, in this mode, can relatively easily calculate for correcting more Teaching position of the robot coordinate system of robot 1 after changing relative to the teaching in teaching operation of the robot 1 before replacement Coordinate offset correction value.

In addition, in this mode, because value calculating is modified in room 6, process chamber 51 and each room of process chamber 53 respectively Process, so can be improved the precision of correction value.

In addition, in this mode, in correction value calculation process, using light-proofness detection panel 80 and be formed in screening The reference mark (the first reference mark 860 and that are made of hole on the component (first component 86 and second component 87) of photosensitiveness Two reference marks 870), therefore, it is suitable for the shooting of camera (the first camera 88 and second camera 89).In addition, if Using the shooting result of camera (the first camera 88 and second camera 89), even if not making then the first arm 15 relative to this Body portion 10 rotates, and can also find out offset of the detection panel 80 relative to the 5th base position.In addition, if utilizing camera shooting The shooting result of head (the first camera 88 and second camera 89), even if not making then the first arm 15 relative to 10 turns of body part It is dynamic, the actuating quantity of the encoder 24 when rotating the first arm 15 relative to body part 10 can be also obtained, it is dynamic that this can be calculated Work amount and as correction value.

In addition, repeating to move hand fork 18 to room 6, process chamber 51 and process chamber 53 in correction value calculation process Dynamic movement and when returning to interim movement in situ from room 6, process chamber 51 and process chamber 53, robot 1 make the first arm 15, Second arm 16 and hand 8 carry out the identical rotational action with movement shown in Fig. 4.Therefore, when being modified value calculation process, Motor is not easy the rotation deceleration and the influence of the sideshake to the deceleration mechanism of the transmitting such as arm of motor to feed through to correction value.

(other embodiment)

Above-mentioned mode is an example of best mode of the invention, but not limited to this, do not changing ancestor of the invention Various modifications implementation can be carried out in the range of purport.For example, in the above-described embodiment, in correction value calculation process, with taking the photograph As the position of head observation detection panel 80, but sensor also can be used etc..In this case, as detection panel 80, Shape and the size substrate equal with substrate 2 can be used.

In above-mentioned mode, in rotation direction of second arm 16 from the second arm 16 relative to the first arm 15 second The position that the origin position of arm 16 has rotated predetermined angular can also be used as the first base position.In this case, when replacement is set When being placed in the robot 1 of manufacture system 3, the detection result of detection result and encoder 25 based on origin sensor 32 makes second Arm 16 rotates and stops, so that the second arm 16 stops at the first base position.

In addition, hand base portion 17 is relative to the hand base portion 17 in the rotation direction of the second arm 16 in above-mentioned mode Origin position and the second base position can also be consistent.In this case, when replacement is set to the robot 1 of manufacture system 3, Hand base portion 17 can be made to rotate based on the detection result of origin sensor 33 and stopped, so that hand base portion 17 stops at the second benchmark Position.In addition, can also carry out panel after robot motion process in above-mentioned mode and load process.

In above-mentioned mode, for be set to manufacture system 3 robot 1 carry out the first base position determine process, Second base position determines process and hand fork positioning process, but can also be for the robot 1 that is set to before manufacture system 3 It carries out the first base position and determines that process, the second base position determine process and hand fork positioning process.For example, in robot 1 Maquila in, can also to robot 1 carry out the first base position determine process, the second base position determine process and Hand fork positioning process.

In addition, when robot is transported to manufacture system 3 from maquila, in order not to make the longer hand fork 18 of length, 19 become the obstacle carried, and robot 1 is transported to manufacture system 3 from maquila in the state of having removed hand fork 18,19 In the case where, the first base position can also be carried out to robot 1 in maquila and determine that process and the second base position determine Process carries out hand fork positioning process to the robot 1 after being set in manufacture system 3.

In above-mentioned mode, fixation member 41 can also be fixed on the second arm 16.In this case, in the first arm 15 Cardinal extremity side be formed with insertion pin 42 as first insertion hole insertion hole.In addition, in above-mentioned mode, fixed part Part 44 can also be fixed on hand base portion 17.In this case, being formed with the work of insertion pin 45 in the side of the cardinal extremity of the first arm 15 For the insertion hole in the second insertion hole.In turn, in above-mentioned mode, fixation member 48,49 can also be fixed on the second arm 16. In this case, being formed with the insertion hole as third insertion hole of insertion pin 50 on two hand forks 18.

In above-mentioned mode, hand 8 may not possess hand fork 19.In addition, being removed in above-mentioned mode by robot 1 The handling object of fortune is the substrate 2 of organic el display, but is also possible to liquid crystal by the handling object that robot 1 is carried The glass substrate of display is also possible to semiconductor crystal wafer etc..In addition, robot 1 can also configure in above-mentioned mode In the space in atmospheric pressure.

Claims

1. a kind of amendment value calculating method of industrial robot calculates the amendment for correcting the movement of industrial robot Value, which is characterized in that

The first arm, the cardinal extremity that there is the industrial robot body part, base end side to be linked to the body part with being able to rotate The second arm, the base end side that side is linked to the front end side of first arm with being able to rotate are linked to second arm with being able to rotate The front end side in portion and the hand with the hand fork for loading handling object,

The amendment value calculating method of the industrial robot includes

Base position determines process, as will in first arm, second arm and the hand, with being able to rotate link two A side in a component is set as a component, when another party is set as another component, based on keeping another component mobile and make it The value of the encoder of rest position when stopping at base position of another component relative to a component, make it is described Another component is moved to the position that another component is positioned at by positioning fixture the base position from the stop position When the encoder value, determine a reference value of corresponding with the base position of another component encoder；

Robot motion process, to reflect the first arm described in the condition motor drive of a reference value, second arm The industrial robot is set as interim benchmark posture by portion and the hand；

Correction value calculation process makes the industrial machine human action after the robot motion process, makes to be mounted with detection It is moved to the delivery position of the handling object with the hand fork of panel, is used based on the detection at the delivery position The offset of the stop position of the base position of panel and the detection panel, when calculating the first arm described in motor drive Correction value,

Repeat movement of the hand fork from the benchmark posture to the delivery position, from the delivery position to the base The movement of quasi- posture carries out the repeatedly correction value calculation process, determines the correction value.

2. the amendment value calculating method of industrial robot according to claim 1, which is characterized in that

In any process of the multiple correction value calculation process, in the hand fork from the benchmark posture to the handover When position is mobile, first arm, second arm and the hand carry out identical rotational action, from the handover When position is mobile to the benchmark posture, it is dynamic that first arm, second arm and the hand carry out identical rotation Make.

3. the amendment value calculating method of industrial robot according to claim 2, which is characterized in that

In this correction value calculation process in the multiple correction value calculation process, reflect the correction value for passing through last time The correction value that calculation process obtains, arm described in motor drive, to update the correction value.

4. the amendment value calculating method of industrial robot described in any one of claim 1 to 3, which is characterized in that

In the correction value calculation process, first arm, second arm and the hand remove with described in carrying Transport identical rotational action when object.

5. the amendment value calculating method of industrial robot according to any one of claims 1 to 4, which is characterized in that

Multiple rooms with the handover for carrying out the handling object,

In the correction value calculation process, the hand fork is made to be moved to the multiple indoor any handling object Delivery position.

6. the amendment value calculating method of industrial robot according to claim 5, which is characterized in that

The multiple room include carry out the handling object from the external loading moved in room, carry out the handling object To it is external the unloading moved out room, process chamber that the handling object is handled,

As the correction value calculation process, repeat to make the hand fork to the indoor handling object of the loading Delivery position or it is described unload the indoor handling object delivery position move the first correction value calculation process, Also, repeat the second amendment for keeping the hand fork mobile to the delivery position of the indoor handling object of processing It is worth calculation process.

7. the amendment value calculating method of industrial robot described according to claim 1~any one of 6, which is characterized in that

In the correction value calculation process, the shooting result of the detection panel based on camera shooting, described in detection Offset.

8. the amendment value calculating method of industrial robot according to any one of claims 1 to 7, which is characterized in that

Process is determined as the base position, carries out described two components are first arm and second arm One base position determines process and described two components are that the second base position of second arm and the hand determines process.

9. the amendment value calculating method of industrial robot described according to claim 1~any one of 8, which is characterized in that

After the base position determines process, before the correction value calculation process, stop at hand base portion relative to described In the state of the base position of second arm, carry out for hand fork being located in the hand fork positioning work on hand by positioning fixture Sequence.