KR20190099140A - Method of calculating correction value of industrial robot - Google Patents

Abstract

The present invention provides a method for calculating a correction value of an industrial robot, capable of relatively easily calculating the correction value to correct dislocation of a coordinate system of an industrial robot after exchanging the coordinates of a teaching position taught in a teaching work of the industrial robot before the exchange. The method for calculating the correction value of an industrial robot predetermines a reference value of an encoder based on the result of moving a member on one side, which is connected to a member on the other side to rotate, to a reference position, about a first arm unit (15), a second arm unit (16), and a hand (8) in a reference position determining process. In a correction value calculating process, a hand fork (18) having a detecting panel (80) is moved to a transfer position in a chamber (6). Also, in the correction value calculating process, the correction value when driving the first arm unit (15) by a motor is calculated based on a dislocation rate of a stopping position of the detecting panel (80) and the reference position in the transfer position. The correction value calculating process is repeated, and the first arm unit (15), second arm unit (16), and hand (8) perform the same rotation motion.

Description

Calculation method of industrial robot correction value {METHOD OF CALCULATING CORRECTION VALUE OF INDUSTRIAL ROBOT}

The present invention relates to a method for calculating a correction value of an industrial robot for calculating a correction value for correcting the operation of the industrial robot.

Conventionally, the industrial robot which conveys a glass substrate is known (for example, refer patent document 1). The industrial robot described in Patent Literature 1 is a horizontal articulated robot used in a manufacturing system for an organic EL (organic electroluminescent) display, and is connected to the hand on which the glass substrate is mounted so that the hand is rotatable on the tip end side. And a main body portion to which the base end side of the arm is rotatably connected.

The arm includes a first arm portion whose proximal end is rotatably connected to the main body, and a second arm portion whose proximal end is rotatably connected to the distal end of the first arm. The hand is provided with the hand base part rotatably connected to the front-end | tip part side of a 2nd arm part, and the hand fork to which the glass substrate is mounted while being fixed to the hand base part. Further, the industrial robot described in Patent Document 1 includes a motor for rotating the first arm portion with respect to the main body portion, a motor for rotating the second arm portion with respect to the first arm portion, and a hand base portion with respect to the second arm portion. For the motor.

Japanese Patent Publication No. 2015-139854

When the industrial robot of patent document 1 is installed in manufacturing systems, such as an organic electroluminescent display, in order to create the operation program of an industrial robot, the teaching operation of an industrial robot is generally performed. For example, when an industrial robot installed in a manufacturing system is replaced or a motor of an industrial robot is exchanged, the robot coordinate system of the industrial robot after replacement is performed with respect to the coordinates of the teaching position taught in the teaching operation of the industrial robot before replacement. Disagree Therefore, even when the industrial robot is replaced or the motor of the industrial robot is replaced, the teaching work of the industrial robot is generally performed again.

On the other hand, if the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the industrial robot's teaching work before the replacement is corrected, it becomes unnecessary to perform complicated teaching work again. Therefore, the inventor of the present application considers correcting the deviation by calculating a correction value for correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinate of the teaching position taught in the teaching operation of the industrial robot before replacement. . When calculating the correction value for correcting a deviation, it is preferable that the correction value can be easily calculated.

Therefore, the subject of this invention is the industrial robot which can calculate the correction value for correcting the shift | offset | difference of the robot coordinate system of the industrial robot after the exchange with respect to the coordinate of the teaching position taught in the industrial robot's teaching work before replacement | replacement relatively easily. The present invention provides a method for calculating a correction value.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, this invention is a correction value calculation method of the industrial robot which calculates the correction value for correcting the operation | movement of an industrial robot, The said industrial robot rotates a main-body part and the base end side to the said main-body part. The first arm portion that is connected to the first arm portion, the second arm portion that is connected to the distal end side of the first arm portion so as to be rotatable, and the proximal end side are rotatably connected to the distal end side of the second arm portion, and the conveyed object is Said hand having a hand having a fork mounted thereon and said one of said first arm portion, said second arm portion and said hand, said one member being said to be one member and said other The value of the encoder at the stop position when the other member is moved to stop at the reference position of the other member with respect to the member, and the other member on the stop The reference value of the encoder corresponding to the reference position of the other member is specified based on the value of the encoder when the other member moves from the value to the reference position to the position where the other member is positioned by the positioning jig. A reference position specifying step, a robot operating step of driving the first arm part, the second arm part, and the hand by a motor to make the industrial robot a virtual reference posture under conditions in which the reference value is reflected; and the robot operating step Thereafter, the industrial robot is operated to move the hand fork equipped with the detection panel to the delivery position of the object to be conveyed, and the reference position of the detection panel and the stop position of the detection panel at the delivery position. And a correction value calculating step of calculating a correction value for driving the first arm part based on the amount of misalignment of the motor. And the movement of the hand fork from the reference posture to the delivery position and the movement from the delivery position to the reference posture are repeated, and the correction value calculation step is performed a plurality of times to determine the correction value. It is done.

In the method for calculating the correction value of the industrial robot of the present invention, in the reference position specifying step, the first arm portion, the second arm portion, and the hand stop when moving the other member connected to one member to be able to rotate to the reference position. After specifying the reference value of the encoder corresponding to the reference position of the other member based on the value of the encoder at the position and the value of the encoder which moved the other member from the stop position to the reference position, in the robot operation step, the reference value is determined. Under the condition of reflecting the above, the industrial robot is assumed to be a virtual reference posture, and in the correction value calculation step, the industrial robot is operated to move the hand fork equipped with the detection panel to the transfer position of the object to be conveyed. Next, the correction value at the time of driving a motor with a 1st arm part is calculated based on the shift amount of the reference position of the detection panel in a transmission position, and the stop position of the detection panel. Therefore, a correction value for correcting misalignment of the robot coordinate system of the industrial robot after the replacement with respect to the coordinates of the teaching position taught in the industrial robot's teaching before replacement is relatively easy, even without complicated and laborious teaching work. Can be calculated. In addition, since the correction value calculating step is performed a plurality of times, the accuracy of the correction value can be increased.

In the present invention, in any of the plurality of correction value calculation steps, the first arm portion, the second arm portion, and the hand are rotated at the same time during the movement of the hand fork from the reference posture to the delivery position. An operation in which the first arm portion, the second arm portion, and the hand perform the same rotation operation when the operation is performed and moves from the transmission position to the reference posture can be adopted. According to this aspect, the influence of the backlash of the motor and the deceleration mechanism or the like hardly reaches the correction value.

In the present invention, in the plurality of correction value calculation steps, in the current correction value calculation step, the arm is motor-driven to update the correction value by reflecting the correction value obtained in the previous correction value calculation step. It can be adopted. According to this aspect, the precision of a correction value can be raised.

In this invention, in the said correction value calculation process, the said 1st arm part, the said 2nd arm part, and the said hand can employ | adopt the aspect which performs the same rotation operation as the conveyance object.

In this invention, it has a some chamber in which the said conveyance object is delivered, and the aspect which moves the said hand fork to the delivery position of any said conveyance object in the said some chamber at the time of the said correction value calculation process can be employ | adopted. have.

In the present invention, the plurality of chambers are subjected to a loader chamber in which the carrying object is carried in from the outside, an unloader chamber in which the carrying object is carried out to the outside, and processing for the carrying object. A process chamber is included, The correction value calculation process WHEREIN: The 1st which moves the said hand fork to the delivery position of the said conveyance object in the said loader object, or the delivery position of the said conveyance object in the said unloader chamber. While repeating a correction value calculation process, the aspect which repeats and performs the 2nd correction value calculation process which moves the said hand fork to the delivery position of the said conveyance object in the said process chamber can be employ | adopted.

In this invention, the aspect which detects the said shift | offset | difference amount can be employ | adopted on the said correction value calculation process based on the imaging result of the said detection panel by a camera.

In the present invention, as the reference position specifying step, a first reference position specifying step in which the two members are the first arm portion and the second arm portion, and a second reference position in which the two members are the second arm portion and the hand. The aspect which performs a specific process can be employ | adopted. In the present invention, after the reference position specifying step, before the correction value calculating step, the hand fork is positioned on the hand by a positioning jig in a state where the hand base is stopped at the reference position with respect to the second arm. The aspect which performs the hand fork positioning process to determine can be employ | adopted.

In the method for calculating the correction value of the industrial robot of the present invention, in the reference position specifying step, the first arm portion, the second arm portion, and the hand stop when moving the other member connected to one member to be able to rotate to the reference position. After specifying the reference value of the encoder corresponding to the reference position of the other member based on the value of the encoder at the position and the value of the encoder which moved the other member from the stop position to the reference position, in the robot operation step, the reference value is determined. Under the condition of reflecting the above, the industrial robot is assumed to be a virtual reference posture, and in the correction value calculation step, the industrial robot is operated to move the hand fork equipped with the detection panel to the transfer position of the object to be transported in the chamber. Next, the correction value at the time of driving a motor with a 1st arm part is calculated based on the shift amount of the reference position of the detection panel in a transmission position, and the stop position of the detection panel. Therefore, a correction value for correcting misalignment of the robot coordinate system of the industrial robot after the replacement with respect to the coordinates of the teaching position taught in the industrial robot's teaching before replacement is relatively easy, even without complicated and laborious teaching work. Can be calculated. In addition, since the correction value calculating step is performed a plurality of times, the accuracy of the correction value can be increased.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure of the industrial robot by which the correction value is calculated by the correction value calculation method of the industrial robot which concerns on embodiment of this invention, (A) is a top view, (B) is a side view.
FIG. 2 is a plan view showing a state in which the industrial robot shown in FIG. 1 is incorporated in a manufacturing system of an organic EL display.
FIG. 3 is a block diagram for explaining the configuration of the industrial robot shown in FIG. 1.
FIG. 4 is an explanatory diagram showing the movement of the industrial robot when carrying out and carrying out a substrate with respect to the chamber shown in FIG. 2.
FIG. 5: is explanatory drawing which shows the movement of the industrial robot at the time of carrying in a board | substrate to the process chamber shown in FIG.
FIG. 6 is an explanatory diagram showing the movement of the industrial robot when the substrate is loaded into the process chamber shown in FIG. 2.
FIG. 7: is explanatory drawing which shows the movement of the industrial robot at the time of carrying in a board | substrate with respect to the process chamber shown in FIG.
FIG. 8: is explanatory drawing which shows the movement of the industrial robot at the time of carrying in a board | substrate to the process chamber shown in FIG.
FIG. 9 is a view in which the first positioning jig, the second positioning jig, and the third positioning jig are installed in the industrial robot shown in FIG. 1, (A) is a plan view, and (B) is a side view.
FIG. 10A is an enlarged view of an E portion in FIG. 9B, (B) is a diagram illustrating a first positioning jig and the like from the FF direction of (A), and (C) is ( It is an enlarged view of G section of A).
FIG. 11A is an enlarged view of an H portion in FIG. 9B, (B) is a diagram illustrating a second positioning jig and the like from the JJ direction of (A), and (C) is ( It is an enlarged view of K part of A).
FIG. 12A is an enlarged view of the L portion of FIG. 9A, (B) is an enlarged view of the M portion of FIG. 9B, and (C) is the NN direction of (B). It is a figure which shows a 3rd positioning jig | tool, etc., (D) is an enlarged view of the P part of (B).
FIG. 13: is explanatory drawing of the state which mounted the detection panel used in the correction value calculation process which calculates the correction value of the 1st arm part shown in FIG.
FIG. 14 is a diagram for explaining the operation of the robot in the correction value calculating step of calculating the correction value of the first arm portion shown in FIG. 1.
FIG. 15: is explanatory drawing which shows the visual field of the camera, etc. in the correction value calculation process which calculates the correction value of the 1st dark part shown in FIG.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described, referring drawings.

(Configuration of Industrial Robot)

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure of the industrial robot 1 by which the correction value is calculated by the correction value calculation method of the industrial robot which concerns on embodiment of this invention, (A) is a top view, (B) is a side view. FIG. 2 is a plan view showing a state where the industrial robot 1 shown in FIG. 1 is incorporated in the manufacturing system 3 of the organic EL display. FIG. 3 is a block diagram for explaining the configuration of the industrial robot 1 shown in FIG. 1. In addition, in FIG.1 (B) and FIG. 2, illustration of the support part provided in the hand fork 18 and 19 was abbreviate | omitted.

The industrial robot 1 (henceforth "robot 1") shown in FIG. 1 is the glass substrate 2 for organic electroluminescent displays (henceforth "substrate 2") which is a conveyance object. It is a robot for conveying. This robot 1 is a horizontal articulated robot used in the manufacturing system 3 of organic electroluminescent display, as shown in FIG. The manufacturing system 3 is provided with the transfer chamber 4 (henceforth "chamber 4") arrange | positioned at the center, and the some chamber 5-7 arrange | positioned so that the chamber 4 may be enclosed. Doing.

The chamber 5 is a process chamber for performing a predetermined process on the substrate 2. In this embodiment, the chamber 5 is provided in plurality. In this embodiment, two process chambers 51 and 52 are provided as the chamber 5 and two process chambers 53 and 54 provided on the side opposite to the process chambers 51 and 52 with respect to the transfer chamber 4. In addition, the chamber 6 is a supply chamber (loader chamber) in which the board | substrate 2 supplied to the manufacturing system 3 is accommodated, for example, and the chamber 7 is the manufacturing system 3, for example. A discharge chamber (unloader chamber) in which the substrate 2 discharged from the housing is accommodated. The interior of the chambers 4 to 7 is a vacuum. A part of the robot 1 is arrange | positioned inside the chamber 4. The hand fork 18 and 19 which comprise the robot 1 mentioned later enter into the chambers 5-7, and the robot 1 conveys the board | substrate 2 between the some chambers 5-7. do.

As shown in FIG. 1, the robot 1 includes a hand 8 on which the substrate 2 is mounted, an arm 9 on which the hand 8 is pivotally connected to the distal end side, and an arm 9. The base end side is provided with the main-body part 10 connected so that rotation is possible. The hand 8 and the arm 9 are disposed above the main body 10. The main body part 10 is equipped with the lifting mechanism which raises and lowers the arm 9, and the case body 13 in which the lifting mechanism is accommodated. The case body 13 is formed in the substantially cylindrical shape with a bottom. On the upper end of the case body 13, a flange 14 formed in a disc shape is fixed.

As described above, a part of the robot 1 is disposed inside the chamber 4. Specifically, the upper part of the robot 1 than the lower end surface of the flange 14 is arrange | positioned inside the chamber 4. That is, the part of the robot 1 above the lower end surface of the flange 14 is arrange | positioned in the vacuum area VR, and the hand 8 and the arm 9 are in the vacuum chamber (in vacuum). It is arranged. On the other hand, the part below the lower end surface of the flange 14 of the robot 1 is arrange | positioned in the standby area AR (in air | atmosphere).

The arm 9 is provided with the 1st arm part 15 and the 2nd arm part 16 mutually rotatably connected. The arm 9 of this embodiment is comprised by two arm parts, the 1st arm part 15 and the 2nd arm part 16. As shown in FIG. The proximal end of the first arm 15 is rotatably connected to the main body 10. The proximal end of the second arm 16 is rotatably connected to the distal end of the first arm 15. The hand 8 is rotatably connected to the tip end side of the second arm 16. Moreover, the counterweight 28 is provided in the 1st arm part 15 on the opposite side to the extension direction of the 1st arm part 15. As shown in FIG.

The second arm portion 16 is disposed above the first arm portion 15. In addition, the hand 8 is disposed above the second arm 16. Rotation center of the first arm 15 with respect to the main body 10 (first rotation center C1) and rotation center of the second arm 16 with respect to the first arm 15 (second rotation center C2). The distance of)) is the rotational center of the second arm 16 with respect to the first arm 15 (second rotational center C2) and the rotational center of the hand 8 with respect to the second arm 16 (third). It is equivalent to the distance of the rotation center C3).

The hand 8 is provided with the hand base part 17 connected to the front end side of the 2nd arm part 16 so that rotation is possible, and the hand forks 18 and 19 on which the board | substrate 2 is mounted. The hand 8 of this embodiment is provided with two hand forks 18 and two hand forks 19. The hand forks 18 and 19 are formed linearly. The hand fork 18 and the hand fork 19 are formed in the same shape. The two hand forks 18 are arranged in parallel with each other at predetermined intervals. The hand fork 18 extends from the hand base 17 in one direction in the horizontal direction. The two hand forks 19 are arranged in parallel with each other at a predetermined interval. The hand fork 19 extends in the reverse direction from the hand base 17 to the hand fork 18.

The hand forks 18 and 19 are fixed to the hand base 17. Specifically, the hand forks 18 and 19 are fixed to the hand base part 17 with the screw for fixing. In the hand forks 18 and 19, insertion through holes through which fixing screws are inserted are formed. This insertion through hole is a long hole which makes the direction orthogonal to the long side direction of the hand forks 18 and 19 a long side direction, and is a hand in the direction orthogonal to the long side direction of the hand forks 18 and 19. It is possible to adjust the fixing positions of the hand forks 18 and 19 with respect to the base 17.

In this embodiment, one substrate 2 is mounted on two hand forks 18. In addition, one substrate 2 is mounted on two hand forks 19. On the upper surface of the hand fork 18, a positioning member for positioning the substrate 2 to be mounted is provided. The positioning member for positioning the board | substrate 2 to be mounted is also provided in the upper surface of the hand fork 19. As shown in FIG.

In this embodiment, the two hand forks 18 include a plurality of first support portions 181 protruding in a direction away from each other, and two first support portions located at both ends of the plurality of first support portions 181. A plurality of second supporting portions 182 protruding from each of 181 in opposite directions are provided. Positioning members 183 and 184 for positioning the substrate 2 are provided at the respective leading ends of the plurality of first supporting portions 181 and the respective leading ends of the plurality of second supporting portions 182. In addition, although the hand fork 19 has the same structure, illustration of a 1st support part, a 2nd support part, etc. was abbreviate | omitted.

The robot 1 also includes a motor 21 for rotating the first arm 15 with respect to the main body 10 and a motor for rotating the second arm 16 with respect to the first arm 15. (22), a motor (23) for rotating the hand base portion (17) with respect to the second arm portion (16), an encoder (24) for detecting the amount of rotation of the motor (21), and a motor (22). The encoder 25 for detecting the rotation amount of the motor and the encoder 26 for detecting the rotation amount of the motor 23 are provided (see FIG. 3).

The encoder 24 is provided in the motor 21. The encoder 25 is provided in the motor 22, and the encoder 26 is provided in the motor 23. The motor 21 and the encoder 24 are arrange | positioned inside the main-body part 10, for example. In addition, the motors 22 and 23 and the encoders 25 and 26 are disposed inside the first arm 15, for example. The motors 21 to 23 are electrically connected to the control unit 27 of the robot 1. The encoders 24 to 26 are also electrically connected to the control unit 27. The motor 21 of this form is a 1st motor, the motor 22 is a 2nd motor, and the motor 23 is a 3rd motor. In addition, encoder 24 is a first encoder, encoder 25 is a second encoder, and encoder 26 is a third encoder.

The robot 1 further includes an origin sensor 31 for detecting the home position of the first arm 15 in the rotational direction of the first arm 15 with respect to the main body 10, and the first arm. Home sensor 32 for detecting the home position of the second arm 16 in the rotational direction of the second arm 16 with respect to 15 and the hand base 17 for the second arm 16. Is provided with an origin sensor 33 for detecting the origin position of the hand base portion 17 in the rotational direction. The home sensor 31 of this embodiment is a first home sensor, the home sensor 32 is a second home sensor, and the home sensor 33 is a third home sensor.

The home sensors 31 to 33 are proximity sensors, for example. Or the origin sensors 31-33 are optical sensors which have a light emitting element and a light receiving element, for example. The origin sensors 31 to 33 are electrically connected to the control unit 27. In the joint part which is a connection part of the main-body part 10 and the 1st arm part 15, the origin sensor 31 is fixed to either one of the main-body part 10 and the 1st arm part 15, and the main-body part 10 And a detection member which is detected by the origin sensor 31 when the first arm portion 15 is at the origin position, is fixed to any one of the first arm portions 15.

Similarly, in the joint part which is the connection part of the 1st arm part 15 and the 2nd arm part 16, the origin sensor 32 is fixed to either one of the 1st arm part 15 and the 2nd arm part 16, and The detection member detected by the origin sensor 32 is fixed to any one of the 1st arm part 15 and the 2nd arm part 16 when the 2nd arm part 16 is in an origin position. Moreover, in the joint part which is the connection part of the 2nd arm part 16 and the hand base part 17, the origin sensor 33 is fixed to either one of the 2nd arm part 16 and the hand base part 17, and The detection member detected by the origin sensor 33 is fixed to any one of the 2 arm part 16 and the hand base part 17 when the hand base part 17 is in an origin position.

(Schematic movement of industrial robot)

FIG. 4: is explanatory drawing which shows the movement of the industrial robot 1 at the time of carrying out and carrying in the board | substrate 2 with respect to the chamber 5 and the chamber 6 shown in FIG. FIG. 5: is explanatory drawing which shows the movement of the industrial robot 1 at the time of carrying in the board | substrate 2 to the process chamber 51 shown in FIG. FIG. 6: is explanatory drawing which shows the movement of the industrial robot 1 at the time of carrying in the board | substrate 2 to the process chamber 5 shown in FIG. FIG. 7: is explanatory drawing which shows the movement of the industrial robot 1 at the time of carrying in the board | substrate 2 to the process chamber 53 shown in FIG. FIG. 8: is explanatory drawing which shows the movement of the industrial robot 1 at the time of carrying in the board | substrate 2 to the process chamber 54 shown in FIG. 4-8, illustration of the support part provided in the hand fork 18 and 19 was abbreviate | omitted.

The robot 1 drives the motors 21, 22, 23 to transport the substrate 2 between the chambers 5, 6, 7. For example, as shown in FIG. 4, the robot 1 carries out the board | substrate 2 from the chamber 6, and carries in the board | substrate 2 to the chamber 7. As shown in FIG. More specifically, as shown in FIG. 4A, the robot 1 extends the arm 9 in the chamber 6 in a state where the hand fork 18 is parallel to the left and right directions. The board | substrate 2 is received. In addition, as shown in FIG. 4B, the substrate 2 is lifted from the chamber 6 by closing the arm 9 until the first arm portion 15 and the second arm portion 16 overlap in the vertical direction. Take it out. Moreover, the robot 1 rotates the hand 8 180 degrees, extends the arm 9, and carries the board | substrate 2 into the chamber 7 as shown to FIG. 5 (C). The third pivotal center of the hand 8 relative to the second arm 16 when viewed from the up and down direction when carrying out the substrate 2 from the chamber 6 and when carrying the substrate 2 into the chamber 7. C3 linearly moves on the virtual line parallel to the left-right direction passing through the 1st rotation center C1. That is, when carrying out the board | substrate 2 from the chamber 6, and carrying in the board | substrate 2 to the chamber 7, when looking from the up-down direction, the hand 8 moves linearly to the right direction. In this way, in the chambers 6 and 7, the first pivotal center C1 is positioned on the extension line of the movement trajectory of the hand 8 when the hand 8 moves linearly toward the chambers 6 and 7. It is a 1st chamber.

As shown in FIG. 5, the robot 1 carries the substrate 2 into the process chamber 51. At this time, the robot 1 first drives the motors 21, 22, and 23 from the state in which the arm 9 is closed, as shown in Fig. 5A, to Fig. 5B. As shown, the hand fork 18 is parallel to the front-rear direction, and the board | substrate 2 is arrange | positioned at the rear end side of the hand 8, In addition, in the left-right direction, the 3rd rotation center C3 and the left-right direction The hand 8, the first arm 15, and the second arm 16 are rotated so that the center of the process chamber 51 in the direction approximately coincides. Thereafter, the robot 1 extends the arm 9 and carries the substrate 2 into the process chamber 51 as shown in FIG. 5C. At this time, when viewed from the up-down direction, the third rotational center C3 moves linearly on an imaginary line parallel to the front-back direction passing through the center of the process chamber 51 in the left-right direction.

As shown in FIG. 6, the robot 1 carries the substrate 2 into the process chamber 52. At this time, the robot 1 first drives the motors 21, 22, and 23 from the state in which the arm 9 is closed, as shown in Fig. 6A, to Fig. 6B. As shown, the hand fork 18 is parallel to the front-rear direction, and the board | substrate 2 is arrange | positioned at the rear end side of the hand 8, In addition, in the left-right direction, the 3rd rotation center C3 and the left-right direction The hand 8, the first arm 15, and the second arm 16 are rotated so that the center of the process chamber 52 in the direction approximately coincides. Thereafter, the robot 1 extends the arm 9 to carry the substrate 2 into the process chamber 52 as shown in FIG. 6C. At this time, when viewed from the up-down direction, the third rotational center C3 moves linearly on an imaginary line parallel to the front-rear direction passing through the center of the process chamber 52 in the left-right direction.

In this embodiment, both of the process chambers 51 and 52 are arranged at positions first shifted laterally from an extension line of the movement trajectory of the hand 8 when the hand 8 moves linearly toward the chambers 51 and 52. The rotational center C1 is located and as shown in FIG. 6B, the second rotational center C2 is located at the lower side of the hand 8 than the first rotational center C1 and the third rotational center C3. It is the 2nd chamber which passes the process located in the advancing direction side (process chamber 51 side or process chamber 52 side).

As shown in FIG. 7, the robot 1 carries the substrate 2 into the process chamber 53. At this time, the robot 1 first drives the motors 21, 22, and 23 from the state in which the arm 9 is closed, as shown in Fig. 7A, to Fig. 7B. As shown, the hand fork 18 is parallel to the front-rear direction, and the board | substrate 2 is arrange | positioned at the front-end part side of the hand 8, Moreover, in the left-right direction, 3rd rotation center C3 and the left-right direction The hand 8, the first arm 15, and the second arm 16 are rotated so that the centers of the process chambers 53 in FIG. Thereafter, the robot 1 extends the arm 9 and carries the substrate 2 into the process chamber 53 as shown in FIG. 7C. At this time, when viewed from the up-down direction, the third rotational center C3 moves linearly on an imaginary line parallel to the front-rear direction passing through the center of the process chamber 53 in the left-right direction.

As shown in FIG. 8, the robot 1 carries the substrate 2 into the process chamber 54. At this time, the robot 1 first drives the motors 21, 22, and 23 from the state in which the arm 9 is closed, as shown in FIG. 8 (A), to FIG. 8 (B). As shown, the hand fork 18 is parallel to the front-rear direction, and the board | substrate 2 is arrange | positioned at the front-end part side of the hand 8, Moreover, in the left-right direction, 3rd rotation center C3 and the left-right direction The hand 8, the first arm 15, and the second arm 16 are rotated so that the centers of the process chambers 54 in FIG. Thereafter, the robot 1 extends the arm 9 and carries the substrate 2 into the chamber 54 as shown in FIG. 8C. At this time, when viewed from the up-down direction, the third rotational center C3 linearly moves on an imaginary line parallel to the front-rear direction passing through the center of the process chamber 54 in the left-right direction.

In this embodiment, both of the process chambers 53 and 54 have a first position at a position shifted laterally from an extension line of the movement trajectory of the hand 8 when the hand 8 moves linearly toward the chambers 51 and 52. The rotational center C1 is located, and the third rotational center C3 does not pass through a process in which the second rotational center C2 is located ahead of the first rotational center C1 and the third rotational center C3. Is always the third chamber located on the traveling direction side (process chamber 53 side or process chamber 54 side) of the hand 8 than the second rotation center C2.

The same operation is also performed when the substrate 2 is conveyed by the hand fork 19. In addition, when carrying out the board | substrate 2 from the chamber 5, operation | movement opposite to the above description is performed.

(Calculation method of correction value of industrial robot)

FIG. 9: is a figure in which the positioning jig 36-38 was provided in the robot 1 shown in FIG. 1, (A) is a top view, (B) is a side view. FIG. 10A is an enlarged view of an E portion in FIG. 9B, and FIG. 10B is a view showing the positioning jig 36 and the like from the FF direction in FIG. 10A. FIG. 10C is an enlarged view of a portion G of FIG. 10A. FIG. 11A is an enlarged view of an H portion in FIG. 9B, and FIG. 11B is a view showing the positioning jig 37 and the like from the JJ direction in FIG. 11A. FIG. 11C is an enlarged view of a portion K of FIG. 11A. FIG. 12A is an enlarged view of the L portion of FIG. 9A, FIG. 12B is an enlarged view of the M portion of FIG. 9B, and FIG. 12C is It is a figure which shows the positioning jig 38 etc. from the NN direction of FIG. 12B, and FIG. 12D is an enlarged view of the P part of FIG.

When the robot 1 is installed in the manufacturing system 3, the teaching operation of the robot 1 is performed in order to create an operation program of the robot 1. For example, when the robot 1 installed in the manufacturing system 3 is exchanged, the robot coordinate system of the robot 1 after the exchange is shifted with respect to the coordinates of the teaching position taught in the teaching operation of the robot 1 before the exchange. For this reason, it is necessary to perform the teaching work of the robot 1 again.

On the other hand, if the misalignment of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching operation of the robot 1 before the replacement is corrected, it becomes unnecessary to perform the complicated teaching operation again. In this embodiment, when the robot 1 installed in the manufacturing system 3 is replaced so that it is not necessary to perform the complicated teaching work again after replacing the robot 1, the teaching work of the robot 1 before replacement is performed. A correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position is calculated. That is, when one of the two members connected to the rotation among the 1st arm part 15, the 2nd arm part 16, and the hand 8 is called one member, and the other is called the other member, The value of the encoder at the stop position when the other member is moved to stop at the reference position of the other member, and the position where the other member is positioned by the positioning jig from the stop position to the reference position of the other member. A reference position specifying step of specifying a reference value of the encoder corresponding to the reference position of the other member based on the encoder value when moved to, and then correcting for correcting the operation of the robot 1 after replacement. Calculate the value. Hereinafter, the calculation method of this correction value is demonstrated.

In the following description, the predetermined reference position of the second arm portion 16 in the rotational direction of the second arm portion 16 with respect to the first arm portion 15 is referred to as the first reference position, and the second arm portion 16 The predetermined reference position of the hand base 17 in the rotational direction of the hand base 17 relative to the second base position is referred to as the long side direction of the hand fork 18 with respect to the hand base 17. The predetermined reference position of the hand fork 18 in the direction orthogonal to the third reference position is referred to as the first arm 15 in the rotational direction of the first arm 15 relative to the main body 10. The predetermined reference position of is referred to as a fourth reference position.

In this embodiment, when the 2nd arm part 16 is in a 1st reference position, as shown in FIG. 9, the 1st arm part 15 and the 2nd arm part 16 overlap in an up-down direction. Specifically, when the second arm part 16 is in the first reference position, the long side direction of the first arm part 15 and the long side direction of the second arm part 16 coincide with each other when viewed from the vertical direction. The 1st arm part 15 and the 2nd arm part 16 overlap in the up-down direction. In addition, in this form, the origin position of the 2nd arm part 16 and the 1st reference position in the rotation direction of the 2nd arm part 16 with respect to the 1st arm part 15 correspond.

In addition, when the hand base part 17 is in a 2nd reference position, as shown in FIG. 9, the 2nd arm part 16 and the hand fork 18 overlap in an up-down direction. Specifically, when the hand base portion 17 is in the second reference position, the second side so that the long side direction of the second arm portion 16 and the long side direction of the hand fork 18 coincide with each other when viewed from the vertical direction. The arm part 16 and the hand fork 18 overlap in an up-down direction. In addition, in this form, the position where the hand base part 17 rotated 90 degrees from the origin position of the hand base part 17 in the rotation direction of the hand base part 17 with respect to the 2nd arm part 16 is a 1st position. 2 is the reference position.

In addition, the 4th reference position may correspond with the origin position of the 1st arm part 15 in the rotation direction of the 1st arm part 15 with respect to the main body part 10, and The position where the 1st arm part 15 rotated predetermined angle from the origin position of the 1st arm part 15 in the rotation direction of the 1st arm part 15 may be set as 4th reference position.

Moreover, in this form, the positioning jig 36 for positioning the 2nd arm part 16 in a 1st reference position, and the positioning jig (for positioning the hand base part 17 in a 2nd reference position) 37 and a positioning jig 38 for positioning the hand fork 18 at the third reference position is used. The positioning jig 36 of this embodiment is a first positioning jig, the positioning jig 37 is a second positioning jig, and the positioning jig 38 is a third positioning jig. Moreover, the positioning jig 38 has the hand fork 19 in the predetermined reference position of the hand fork 19 with respect to the hand base 17 in the direction orthogonal to the long side direction of the hand fork 19. It is also used for positioning.

As shown in FIG. 10, the positioning jig 36 includes a fixing member 41 fixed to the first arm 15 and a pin 42. The fixing member 41 is fixed to the side surface of the base end of the first arm 15. In the fixing member 41, a through hole 41a into which the pin 42 is inserted is formed. Moreover, the insertion hole 16a into which the pin 42 is inserted is formed in the front end side surface of the 2nd arm part 16. As shown in FIG. When the pin 42 inserted into the through hole 41a of the fixing member 41 is inserted into the insertion hole 16a, the second arm portion 16 is precisely positioned at the first reference position. The fixing member 41 of this embodiment is a first fixing member, the pin 42 is a first pin, the insertion hole 16a is a first insertion hole, and the through hole 41a is a first through hole.

As shown in FIG. 11, the positioning jig 37 is equipped with the fixing member 43 and 44 fixed to the 1st arm part 15, and the pin 45. As shown in FIG. The fixing member 43 is fixed to the side surface of the base end of the first arm 15. The fixing member 44 is fixed to the side surface of the fixing member 43. The fixing member 43 is provided with a groove portion for preventing interference with the fixing member 41. The bottom surface of the fixing member 44 is in contact with the distal end surface of the screw 46 for adjusting the vertical position of the fixing member 44 with respect to the fixing member 43. The screw 46 is screwed to the screw holding member 47 fixed to the lower end surface of the fixing member 43.

In the fixing member 44, a through hole 44a into which the pin 45 is inserted is formed. Moreover, the insertion hole 17a in which the pin 45 is inserted is formed in the side surface of the hand base part 17. As shown in FIG. When the pin 45 inserted into the through hole 44a of the fixing member 44 is inserted into the insertion hole 17a, the hand base 17 is precisely positioned at the second reference position. The fixing members 43 and 44 of this form are a 2nd fixing member, the pin 45 is a 2nd pin, the insertion hole 17a is a 2nd insertion hole, and the through hole 44a is a 2nd through hole. .

As shown in FIG. 12, the positioning jig 38 is provided with the fixing members 48 and 49 fixed to the two hand forks 18, and the pin 50. As shown in FIG. The fixing member 48 is fixed to the upper surfaces of the two hand forks 18. The fixing member 49 is fixed to the lower surface of the fixing member 48. In the fixing member 49, a through hole 49a into which the pin 50 is inserted is formed. Moreover, the insertion hole 16b in which the pin 50 is inserted is formed in the side surface of the base end part of the 2nd arm part 16. As shown in FIG. When the pin 50 inserted into the through hole 49a of the fixing member 49 is inserted into the insertion hole 16b, the two hand forks 18 are precisely positioned at the third reference position. The fixing members 48 and 49 of this embodiment are the third fixing members, the pin 50 is the third pin, the insertion hole 16b is the third insertion hole, and the through hole 49a is the third through hole. .

For example, when the robot 1 installed in the manufacturing system 3 is replaced, first, the second arm 16 is rotated to the first reference position (origin position) based on the detection result of the origin sensor 32. Let's do it. That is, based on the detection result of the origin sensor 32, the 2nd arm part 16 is rotated and stopped so that the 2nd arm part 16 may stop at a 1st reference position.

Further, based on the detection result of the origin sensor 33 and the detection result of the encoder 26, the hand base 17 is rotated to the second reference position (the position rotated by 90 ° from the origin position). For example, after rotating the hand base 17 to the home position based on the detection result of the home sensor 33, the hand base 17 is removed from the home position based on the detection result of the encoder 26. 2 Rotate to the reference position. That is, the hand base 17 is rotated and stopped based on the detection result of the origin sensor 33 and the encoder 26 so that the hand base 17 stops at the second reference position.

Thereafter, the fixing members 41, 43, 44 are fixed to the first arm 15, and the fixing members 48, 49 are fixed to the two hand forks 18. In addition, the 2nd arm part 16 which rotated to the 1st reference position based on the detection result of the origin sensor 32 is strictly shifted | deviated slightly from the 1st reference position. Similarly, the hand base part 17 which rotated to the 2nd reference position based on the detection result of the origin sensor 33 and the detection result of the encoder 26 is strictly shifted | deviated slightly from the 2nd reference position.

After that, the second arm 16 is rotated with respect to the first arm 15 to the position where the pin 42 inserted into the through hole 41a of the fixing member 41 is fitted into the insertion hole 16a. The pin 42 is inserted into the hole 16a and the second arm 16 is precisely positioned at the first reference position. In addition, the rotation amount of the motor 22 at that time is detected by the encoder 25, and the control unit 27 specifies the first reference position of the second arm unit 16 using the detection result of the encoder 25. do.

That is, the 1st which is the stop position of the 2nd arm part 16 when the 2nd arm part 16 is stopped based on the detection result of the origin sensor 32 so that the 2nd arm part 16 may stop in a 1st reference position. The detection result of the encoder 25 at the time of rotating the 2nd arm part 16 from the stop position to the position where the 2nd arm part 16 is positioned by the positioning jig 36 to a 1st reference position, and The first reference position is specified based on the value of the encoder 25 when the second arm 16 is stopped at the first stop position (first reference position specifying step).

Thereafter, the pin 45 inserted into the through hole 44a of the fixing member 44 is inserted while the second arm 16 is disposed at the first reference position specified in the first reference position specifying step. The hand base part 17 is inserted in the insertion hole 17a by rotating the hand base part 17 with respect to the 2nd arm part 16 to the position which fits into the hole 17a, and the hand base part 17 in a 2nd reference position. )). Moreover, the rotation amount of the motor 23 at that time is detected by the encoder 26, and the control part 27 specifies the 2nd reference position of the hand base part 17 using the detection result by the encoder 26. do.

That is, in the state in which the 2nd arm part 16 is arrange | positioned in the 1st reference position specified in the 1st reference position specification process, the origin sensor 33 is detected so that the hand base part 17 may stop in a 2nd reference position. Based on the result and the detection result of the encoder 26, the hand base portion is determined by the positioning jig 37 from the second stop position which is the stop position of the hand base portion 17 when the hand base portion 17 is stopped. The detection result of the encoder 26 when the hand base part 17 was rotated to the position where 17 is positioned, and the encoder 26 when the hand base part 17 is stopped in the 2nd stop position. A second reference position is specified based on the value of (second reference position specifying process).

Thereafter, the second arm portion 16 is disposed at the first reference position specified in the first reference position specifying process, and the hand base portion 17 is placed at the second reference position specified in the second reference position specifying process. In the state arranged, in the direction orthogonal to the long side direction of the hand fork 18 to the position where the pin 50 inserted in the through-hole 49a of the fixing member 49 fits in the insertion hole 16b. The two hand forks 18 are moved relative to the hand base 17 to insert the pin 50 into the insertion hole 16b, and the two hand forks 18 are positioned at the third reference position.

That is, the second arm 16 is disposed at the first reference position specified in the first reference position specifying process, and the hand base 17 is disposed at the second reference position specified in the second reference position specifying process. In this state, the two hand forks 18 are positioned by the positioning jig 38 (hand fork positioning process). The positioned hand fork 18 is fixed to the hand base 17 by screws.

Thereafter, at least the positioning jigs 37 and 38 are separated, and the hand base 17 is rotated 180 degrees with respect to the second arm 16. In this state, the fixing members 48 and 49 are fixed to the two hand forks 19. Moreover, the hand base part (in the direction orthogonal to the long side direction of the hand fork 19 to the position which the pin 50 inserted in the through-hole 49a of the fixing member 49 fits in the insertion hole 16b) is carried out. The two hand forks 19 are moved with respect to 17, the pin 50 is inserted into the insertion hole 16b, and the two hand forks 19 are positioned at a predetermined reference position. The positioned hand fork 19 is fixed to the hand base 17 by a screw.

(First Compensation Value Calculation Process in Chamber 6 (First Chamber))

FIG. 13: is explanatory drawing of the state which mounted the detection panel 40 used in the correction value calculation process which calculates the correction value of the 1st arm part 15 shown in FIG. 1 in the hand fork 18, (A ) Is a plan view, (B) is a sectional view. FIG. 14: is a figure for demonstrating operation | movement of the robot 1 in the correction value calculation process of calculating the correction value of the 1st arm part 15 shown in FIG. FIG. 15: is explanatory drawing which shows the visual field of a camera, etc. in the correction value calculation process which calculates the correction value of the 1st arm part 15 shown in FIG.

In this embodiment, it is explanatory drawing of the correction value calculation process which calculates the correction value of the 1st arm part 15 used for the robot 1. In this embodiment, when performing a correction value calculation process after a 1st reference position specification process and a 2nd reference position specification process, as shown in FIG. 13, the detection panel 40 is mounted in the two hand forks 18. FIG. (Panel mounting process).

The detection panel 40 is a light shielding panel used when calculating a correction value. In this embodiment, since the object to be conveyed is a rectangular substrate 2, the detection panel 40 has two angles 2a positioned diagonally when the substrate 2 is mounted on the hand fork 18. 2b) is a plate-like member that extends to connect. More specifically, the detection panel 40 has a substrate (from the first portion 81 and the first portion 81, which exists to extend linearly along the hand fork 18, to the hand fork 18). The board | substrate 2 was mounted in the hand fork 18 from the 2nd part 82 and the 1st part 81 which exist so that it may extend diagonally to the position corresponded to the angle 2a when 2) is mounted. The 3rd part 83 which exists so that it may extend at an angle to the position corresponded to the angle 2b of the time is provided.

In addition, the detection panel 40 is mounted on the two hand forks 18 in a state positioned on the upper surface of the hand fork 18. Specifically, when performing the correction value calculating step, in the hand fork 18, the positioning member 29 is attached to each of the plurality of convex accommodating portions 185 for receiving the substrate 2 from below. It is fixed. The positioning member 29 is provided with a positioning protrusion 290 fitted into the positioning hole 84 of the detecting panel 40, and the detecting panel 40 is disposed on the positioning protrusion 290. Position is determined by.

In this state, the rectangular first to-be-detected part 821 and the second to-be-detected part 831 formed in the end of the 2nd part 82 and the 3rd part 83 of the detection panel 40 are the board | substrate 2 ) Overlaps the edges of the angles 2a and 2b of the substrate 2 when mounted on the hand fork 18.

Next, based on the detection result of the origin sensor 31 or the detection result of the encoder 24 and the detection result of the encoder 24 so that the first arm 15 stops at the fourth reference position, 1 Drive control of the motor 21 based on the 3rd stop position which is the stop position of the 1st arm part 15 when the arm part 15 was stopped, and the 1st reference position specified in the 1st reference position specification process While driving control of the motor 22 on the basis of the reference, and driving control of the motor 23 on the basis of the second reference position specified in the second reference position specifying process, the robot 1 is a virtual reference posture (Robot operation process).

That is, driving control of the motor 21 is performed on the basis of the third stop position, drive control of the motor 22 on the basis of the first reference position specified in the first reference position specifying process, and the second reference. The motor 23 is driven and controlled based on the second reference position specified in the position specifying process, thereby operating the robot 1 to the virtual home position. In this embodiment, for example, the first arm 15 stops at the third stop position, the second arm 16 stops at the first reference position, and the hand base 17 is 90 from the second reference position. The state stopped at the rotated position becomes the virtual home position (virtual reference posture) of the robot 1. The latched home position is a state shown in FIG. 4B.

In addition, when the origin position of the 1st arm part 15 and the 4th reference | standard position in the rotation direction of the 1st arm part 15 with respect to the main-body part 10 correspond, it is a 4th robot operation process. The first arm 15 is rotated and stopped based on the detection result of the origin sensor 31 so that the first arm 15 stops at the reference position. Moreover, the position where the 1st arm part 15 rotated predetermined angle from the origin position of the 1st arm part 15 in the rotation direction of the 1st arm part 15 with respect to the main body part 10 turns into a 4th reference position. If there is, in the robot operation process, the first arm 15 is based on the detection result of the origin sensor 31 and the encoder 24 so that the first arm 15 stops at the fourth reference position. Rotate to stop. In addition, the 3rd stop position is strictly shifted | deviated slightly from the 4th reference position. In addition, until the robot operation process, the positioning jig 36 and 38 are isolate | separated.

Thereafter, the robot 1 is operated to move the hand fork 18 to the transfer position of the substrate 2 (hand movement step). For example, as shown in FIG. 14A, the hand fork 18 is moved to the transfer position of the substrate 2 in the chamber 6. Specifically, from the state shown in FIG. 4B, the operation shown by the arrow 6a in FIG. 4 is performed, and as shown in FIG. 4A, the arm 9 is extended to form the chamber 6. The hand fork 18 is moved to the delivery position of the substrate 2 within.

Here, in the chamber 6, as shown in FIG. 15, the reference member with the reference mark which shows a 5th reference position, and a camera are arrange | positioned. In this embodiment, the positions of the two detected parts (the first detected part 821 and the second detected part 831) on the detecting panel 40 are compared with the reference marks. For this reason, in the chamber 6, the light-shielding 1st member 86 to which the 1st reference mark 860 was attached, the light-shielding 2nd member 87 to which the 2nd reference mark 870 was attached, The first camera 88 and the second reference mark 870 and the second detected part 831 enter the first reference mark 860 and the first detected part 821 into the field of view 88a. An incoming second camera 89 is provided.

In this embodiment, the first member 86 and the second member 87 are light-shielding plate members and are fixed to the inner wall of the chamber 6 or the like. In addition, the 1st reference mark 860 and the 2nd reference mark 870 are the hole which penetrates the 1st member 86 and the 2nd member 87, respectively. In this embodiment, the part in which the 1st reference mark 860 and the 2nd reference mark 870 were formed of the 1st member 86 and the 2nd member 87 is a thin plate.

The first reference mark 860 and the second reference mark 870 represent the fifth reference position in two. Specifically, the hand fork 18 is moved to the transfer position of the substrate 2 in the chamber 6 by operating the robot 1 before the exchange in which the detection panel 40 is mounted on the hand fork 18. In the imaging result of the 1st camera 88, the 2nd reference | standard in the positional relationship of the 1st reference mark 860 and the 1st to-be-detected part 821, and the imaging result of the 2nd camera 89 when it is made to stop it, is made. The positional relationship of the mark 870 and the 2nd to-be-detected part 831 is made into the 5th reference position in the rotation direction of the 1st arm part 15 with respect to the main-body part 10. As shown in FIG. Here, in the imaging result of the 1st camera 88, the shift amount and the imaging of the 2nd camera 89 when the 1st reference mark 860 and the 1st to-be-detected part 821 deviate from a predetermined positional relationship. In the result, the rotation direction and the rotation angle of the first arm portion 15 corresponding to the amount of misalignment when the second reference mark 870 and the second detected portion 831 are shifted from a predetermined positional relationship are determined by the encoder 24. Is stored in the control unit 27 as a value corresponding to the detected value.

Therefore, in the correction value calculation process, in the imaging result of the 1st camera 88, the 1st reference mark 860 and the 1st to-be-detected part 821 become predetermined position relationship, and the imaging of the 2nd camera 89 is carried out. In the result, the second reference mark 870 and the second to-be-detected portion 831 correspond to the amount of misalignment even if the first arm 15 is not rotated with respect to the main body portion 10 until it becomes a predetermined positional relationship. The controller 27 may calculate the correction value based on the detected value in the encoder 24.

That is, as shown to FIG. 14A, when the hand fork 18 is moved to the delivery position of the board | substrate 2 in the chamber 6, the 1st reference | standard in the imaging result of the 1st camera 88 is shown. The mark 860 and the first to-be-detected part 821 are shifted from a predetermined positional relationship, and the second reference mark 870 and the second to-be-detected part 831 are predetermined in the imaging result of the second camera 89. Let's say there was a deviation from the positional relationship of. In this case, in the correction value calculating step, as shown in FIG. 14B, the first reference mark 860 and the first detected part 821 become a predetermined positional relationship, and the second reference mark 870 ) And the value of the encoder 24 when the first arm portion 15 is rotated with respect to the main body portion 10 by driving the motor 21 until the second detected portion 831 has a predetermined positional relationship. Can be calculated as a correction value.

Thereafter, driving control of the motor 21 is performed by reflecting the correction value calculated in the correction value calculating step, and the drive control of the motor 22 is performed based on the first reference position specified in the first reference position specifying step; At the same time, the drive of the motor 23 is controlled based on the second reference position specified in the second reference position specifying process, and the robot 1 is returned to the virtual home position. Specifically, from the state shown in FIG. 4A, the operation shown by the arrow 6b in FIG. 4 is performed, and as shown in FIG. 4B, it returns to a virtual home position.

Then, the robot 1 is operated to move the hand fork 18 to the transfer position of the substrate 2. And again, based on the imaging result of the 1st camera 88 and the imaging result of the 2nd camera 89, the positional relationship of the 1st reference mark 860 and the 1st to-be-detected part 821, and a 2nd reference mark After calculating a new correction value based on the positional relationship between the 870 and the second to-be-detected portion 831, the new correction value (current correction value) is reflected and the motors 21, 22, 23 are operated as in the previous time. Drive control to return the robot 1 to the virtual home position. Therefore, the correction values are sequentially updated.

By repeating these operations, the latest correction value or amount of deviation (deviation amount between the first reference mark 860 and the first detected part 821 and the second reference mark 870 and the second detected part 831) At the time when the amount of misalignment is lower than or equal to the preset threshold, the correction value is determined, and the drive 21 is controlled by driving the motor 21 by reflecting the determined correction value, and the first specified in the first reference position specifying step. The motor 22 is controlled to be driven based on the reference position, and the motor 23 is controlled to be driven based on the second reference position specified in the second reference position specifying process, thereby restoring the robot 1. Let position be the regular home position.

When the above operation is repeatedly performed, in any process, the path for moving the hand fork 18 from the virtual home position to the transfer position of the substrate 2 in the chamber 6 and the substrate 2 in the chamber 6 are provided. In the return path returning to the virtual home position from the state where the hand fork 18 is located at the delivery position of the robot, the robot 1 is connected to the first arm 15, the second arm 16, and the hand 8. On the contrary, the same rotation operation as that shown in FIG. 4 is performed. Therefore, when the correction value calculation step is performed, the influence of the backlash of the deceleration mechanism transmitted to the arm or the like by decelerating the rotation of the motor is unlikely to affect the correction value.

In addition, in this form, in the imaging result of the 1st camera 88, the 1st reference mark 860 and the 1st to-be-detected part 821 deviate from a predetermined positional relationship, and the imaging of the 2nd camera 89 is carried out. In a result, when the 2nd reference mark 870 and the 2nd detected part 831 displace | deviate from a predetermined positional relationship, the 1st arm part 15 is not rotated with respect to the main-body part 10, and it respond | corresponds to a shift amount. The value of the encoder 24 to be calculated was calculated as a correction value. However, after detecting the direction of the shift from the imaging result of the first camera 88 and the imaging result of the second camera 89, as shown in FIG. 14B, the first arm 15 is moved to the main body. The correction value may be calculated on the basis of the detected amount of the encoder 24 at that time by turning the deviation with respect to (10). In any case, the correction value calculating step may be performed in the chamber 7.

(2nd correction value calculation process in the process chamber 51 (2nd chamber))

In this embodiment, after performing the correction value calculation process in the chamber 6, the correction value calculation process is performed also in the process chamber 51 similarly. Therefore, in the process chamber 51, like the chamber 6, the 1st member 86 to which the 1st reference mark 860 was attached, the 2nd member 87 to which the 2nd reference mark 870 was attached, The first camera 88 through which the first reference mark 860 and the first detected part 821 enter the field of view, and the second camera through which the second reference mark 870 and the second detected part 831 enter the field of view ( 89).

Therefore, as in the correction value calculating step in the chamber 6, as shown in FIG. 5A, the state shown in FIG. 5B is shown from the state where the robot 1 is located at the home position. By way of this, the hand fork 18 is moved to the transfer position of the substrate 2 in the process chamber 51 to calculate the correction value in the chamber 51.

Thereafter, the motor 21 is driven and controlled by reflecting the correction value in the process chamber 51 calculated in the correction value calculating step, and the motor (with reference to the first reference position specified in the first reference position specifying step) Drive control of the motor 23 on the basis of the second reference position specified in the second reference position specifying step, and the robot 1 shown in FIG. It returns to the virtual home position shown in FIG.5 (A) via a via.

Then, the robot 1 is operated again to move the hand fork 18 to the transfer position of the substrate 2 in the process chamber 51, calculate a new correction value, and then add a new correction value (current correction). Value), the robot 1 is returned to the virtual home position. This operation is repeated to determine the correction value when the latest correction value or the like falls below a preset threshold.

When the above operation is repeatedly performed, in any process, a path for moving the hand fork 18 from the virtual home position to the transfer position of the substrate 2 in the process chamber 51 and the substrate in the process chamber 51 ( In the return path returning to the virtual home position from the state where the hand fork 18 is located at the delivery position of 2), the robot 1 is the first arm 15, the second arm 16, and the hand 8. ), The same rotation operation as that shown in FIG. 5 is performed. Therefore, when the correction value calculation step is performed, the influence of the backlash of the deceleration mechanism transmitted to the arm or the like by decelerating the rotation of the motor is unlikely to affect the correction value.

(Third Correction Value Calculation Process in Process Chamber 53 (Third Chamber))

In this embodiment, after the correction value calculating process in the chamber 6 and the correction value calculating process in the process chamber 51 are performed, the correction value calculating process is similarly performed in the process chamber 53. Therefore, in the process chamber 53, similarly to the chamber 6, the first member 86 to which the first reference mark 860 is attached, the second member 87 to which the second reference mark 870 is attached, The first camera 88 through which the first reference mark 860 and the first detected part 821 enter the field of view, and the second camera through which the second reference mark 870 and the second detected part 831 enter the field of view ( 89).

Therefore, as in the correction value calculating step in the chamber 6, as shown in FIG. 7A, the state shown in FIG. 7B is shown from the state where the robot 1 is located at the home position. By way of this, the hand fork 18 is moved to the transfer position of the substrate 2 in the process chamber 53 to calculate the correction value in the chamber 51.

Thereafter, the motor 21 is driven to be controlled by reflecting the correction value in the process chamber 53 calculated in the correction value calculating step, and the motor (with reference to the first reference position specified in the first reference position specifying step) Drive control of the motor 23 on the basis of the second reference position specified in the second reference position specifying step, and the robot 1 shown in FIG. It returns to the virtual home position shown in FIG.7 (A) via a via.

Then, the robot 1 is operated again to move the hand fork 18 to the transfer position of the substrate 2 in the process chamber 53, calculate a new correction value, and then add a new correction value (current correction). Value), the robot 1 is returned to the virtual home position. This operation is repeated to determine the correction value when the latest correction value or the like falls below a preset threshold.

When the above operation is repeatedly performed, in any process, a path for moving the hand fork 18 from the virtual home position to the transfer position of the substrate 2 in the process chamber 53 and the substrate in the process chamber 53 ( In the return path returning to the virtual home position from the state where the hand fork 18 is located at the delivery position of 2), the robot 1 is the first arm 15, the second arm 16, and the hand 8. ), The same rotation operation as that shown in FIG. 7 is performed. Therefore, when the correction value calculation step is performed, the influence of the backlash of the deceleration mechanism transmitted to the arm or the like by decelerating the rotation of the motor is unlikely to affect the correction value.

(Adjustment of the hand fork 19)

In addition, in this embodiment, after the correction value calculation process by the hand fork 18, the hand base part 17 is rotated 180 degrees, and the detection panel 40 is replaced by two hand forks 19, and The hand fork 19 is moved to the transfer position of the substrate 2 in the chamber 6. At this time, in the imaging result of the 1st camera 88, the 1st reference mark 860 and the 1st to-be-detected part 821 shift | deviate from a predetermined positional relationship, In addition, in the imaging result of the 2nd camera 89, 1st When the 2 reference marks 870 and the second detected portion 831 are shifted from the predetermined positional relationship, the first reference mark 860 and the first detected portion 821 become the predetermined positional relationship, and the second Hand base part in the direction orthogonal to the long side direction of the hand fork 19 using the positioning jig 38 so that the reference mark 870 and the 2nd detected part 831 may become a predetermined positional relationship. Adjust the fixed position of the hand fork 19 relative to (17).

(Main effect of this form)

As described above, in the present embodiment, the second arm portion in the rotational direction of the second arm portion 16 with respect to the first arm portion 15 using the positioning jig 36 in the first reference position specifying step. The 1st reference position which is the reference position of (16) is specified, and the rotation direction of the hand base part 17 with respect to the 2nd arm part 16 using the positioning jig 37 in a 2nd reference position specification process. 2nd reference position which is the reference position of the hand base part 17 in the specification, and the hand fork 18 with respect to the hand base part 17 by the positioning jig 38 in a hand fork positioning process. The hand fork 18 is positioned at a third reference position which is a reference position of the hand fork 18 in the direction orthogonal to the long side direction of.

In addition, in this embodiment, in the subsequent robot operation process, the motor 22 is driven to be controlled based on the first reference position specified in the first reference position specifying step, and is specified in the second reference position specifying step. The motor 23 is driven and controlled on the basis of the second reference position, and the robot 1 is put into a virtual reference posture. It moves to 51 and the process chamber 53, the correction value calculation process is performed, and the correction value for controlling the motor 21 is calculated. That is, in this embodiment, the hand fork 18 is the chamber 6 and the process chamber 51 in the state which set the 2nd arm part 16, the hand base part 17, and the hand fork 18 to the predetermined reference position. ) And the correction value calculating step is performed to move to the process chamber 53 to calculate a correction value for controlling the motor 21 driving the first arm 15.

In addition, in this embodiment, the robot 1 before replacement | exchange in which the detection panel 40 was mounted in the hand fork 18 is operated, and the hand fork is carried out to the chamber 6, the process chamber 51, and the process chamber 53. FIG. When 18 is moved, in the rotational direction of the first arm 15 with respect to the main body 10, the first detected portion 821 and the second detected portion 831 of the panel 40 for detection are provided. The corresponding position is the fifth reference position. Therefore, in this embodiment, in the correction value calculation step, by calculating the correction value for controlling the motor 21, the robot after the exchange with respect to the coordinates of the teaching position taught in the teaching operation of the robot 1 before replacement ( It is possible to calculate a correction value for correcting the deviation of the robot coordinate system of 1).

That is, in this embodiment, the 1st arm part 15 of the 1st to-be-detected part 821 and the 2nd to-be-detected part 831 of the 5th reference position and the detection panel 40 rotate with respect to the main-body part 10. FIG. By calculating a correction value based on the amount of deviation in the direction, a correction value for correcting the deviation of the robot coordinate system of the robot 1 after replacement with respect to the coordinates of the teaching position taught in the teaching operation of the robot 1 before replacement. It is possible to calculate. Therefore, in this embodiment, the correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching operation of the robot 1 before the exchange can be relatively easily calculated. .

Moreover, in this embodiment, since the correction value calculation process is performed in each of the chamber 6, the process chamber 51, and the process chamber 53, the precision of the correction value can be improved.

Moreover, in this form, in the correction value calculation process, the reference mark containing the hole formed in the light-shielding detection panel 40 and the light-shielding member (the 1st member 86 and the 2nd member 87). Since the first reference mark 860 and the second reference mark 870 are used, they are suitable for imaging by the cameras (the first camera 88 and the second camera 89). In addition, if the imaging results by the cameras (the first camera 88 and the second camera 89) are used, the first arm portion 15 may not be rotated with respect to the main body portion 10. The shift amount of the detection panel 40 can be calculated. In addition, if the imaging results by the cameras (the first camera 88 and the second camera 89) are used, the main body 10 may be rotated even if the first arm 15 is not rotated with respect to the main body 10. In contrast, the operation amount of the encoder 24 when the first arm 15 is rotated can be obtained, and this operation amount can be calculated as a correction value.

Further, in the correction value calculating step, the operation of moving the hand fork 18 to the chamber 6, the process chamber 51, and the process chamber 53, and the chamber 6, the process chamber 51, and the process chamber When repeatedly performing the operation of returning from the 53 to the virtual home position, the robot 1 performs the operations shown in FIG. 4 with respect to the first arm 15, the second arm 16, and the hand 8. It is made to perform the same rotation operation as. Therefore, when the correction value calculation step is performed, the influence of the backlash of the deceleration mechanism transmitted to the arm or the like by decelerating the rotation of the motor is unlikely to affect the correction value.

(Other embodiment)

Although the form mentioned above is an example of the suitable form of this invention, it is not limited to this, A various deformation | transformation is possible in the range which does not change the summary of this invention. For example, in the said embodiment, although the position of the detection panel 40 was observed with the camera in the correction value calculation process, you may use a sensor etc. In that case, you may use the board | substrate whose shape and size are the same as the board | substrate 2 as the panel 40 for a detection.

In the above-mentioned form, the position where the 2nd arm part 16 rotated predetermined angle from the origin position of the 2nd arm part 16 in the rotation direction of the 2nd arm part 16 with respect to the 1st arm part 15 is made into the 1st arm part. It may be set to one reference position. In this case, when the robot 1 installed in the manufacturing system 3 is replaced, the detection result of the origin sensor 32 and the detection result of the encoder 25 so that the second arm 16 stops at the first reference position. On the basis of this, the second arm 16 is rotated to stop.

Moreover, in the form mentioned above, the origin position of the hand base part 17 and the 2nd reference position in the rotation direction of the hand base part 17 with respect to the 2nd arm part 16 may correspond. In this case, when the robot 1 installed in the manufacturing system 3 is replaced, the hand base part 17 is based on the detection result of the origin sensor 33 so that the hand base part 17 stops at a 2nd reference position. To stop. In the above-described aspect, the panel mounting step may be performed after the robot operation step.

In the above-mentioned aspect, although the 1st reference position specification process, the 2nd reference position specification process, and the hand fork positioning process are performed with respect to the robot 1 installed in the manufacturing system 3, it is provided in the manufacturing system 3 You may perform the 1st reference position specification process, the 2nd reference position specification process, and the hand fork positioning process with respect to the previous robot 1. For example, in the assembly plant of the robot 1, the robot 1 may be subjected to a first reference position specifying step, a second reference position specifying step, and a hand fork positioning step.

In addition, when conveying the robot 1 from an assembly plant to the manufacturing system 3, in the state which removed the hand fork 18, 19 so that long hand forks 18 and 19 may not interfere with conveyance. In the case of conveying the robot 1 from the assembly plant to the manufacturing system 3, in the assembly plant, the first reference position specifying step and the second reference position specifying step are performed on the robot 1 to produce the manufacturing system. You may perform the hand fork positioning process with respect to the robot 1 after installed in (3).

In the above-described form, the fixing member 41 may be fixed to the second arm portion 16. In this case, the insertion hole as a 1st insertion hole into which the pin 42 is inserted is formed in the side surface of the base end part of the 1st arm part 15. As shown in FIG. In addition, in the form mentioned above, the fixing member 44 may be fixed to the hand base 17. In this case, the insertion hole as a 2nd insertion hole into which the pin 45 is inserted is formed in the side surface of the base end part of the 1st arm part 15. As shown in FIG. In addition, in the form mentioned above, the fixing members 48 and 49 may be fixed to the 2nd arm part 16. As shown in FIG. In this case, the insertion holes as the third insertion holes into which the pins 50 are inserted are formed in the two hand forks 18.

In the form mentioned above, the hand 8 does not need to be provided with the hand fork 19. In addition, in the above-mentioned aspect, the object to be conveyed by the robot 1 is the organic EL display substrate 2, but the object to be conveyed by the robot 1 may be a glass substrate for liquid crystal display, or a semiconductor wafer. Etc. may be sufficient. Moreover, in the form mentioned above, the robot 1 may be arrange | positioned in the space which becomes atmospheric pressure.

1: Robot (Industrial Robot)
2: substrate (return object)
5, 6, 7: chamber
8: hand
9: cancer
10: main body
15: first dark
16: second arm
17: Hand Foundation
18: hand fork
21: motor (first motor)
22: motor (second motor)
23: motor (third motor)
24: encoder (first encoder)
25: encoder (second encoder)
26: encoder (third encoder)
31: origin sensor (first origin sensor)
32: home sensor (second home sensor)
33: home sensor (third home sensor)
36: positioning jig (first positioning jig)
37: positioning jig (second positioning jig)
38: positioning jig (third positioning jig)
80: detection panel
86: first member
87: second member
88: first camera
89: second camera
860: first reference mark
870: second reference mark
C1: 1st rotation center
C2: 2nd center of rotation
C3: 3rd center of rotation

Claims (9)

It is a method of calculating the correction value of an industrial robot that calculates a correction value for correcting the operation of the industrial robot.
The industrial robot includes a main body portion, a first arm portion whose proximal end side is rotatably connected to the main body portion, a second arm portion rotatably connected to the proximal end side on the distal end side of the first arm portion, and the second arm portion. The proximal end side is rotatably connected to the distal end side of the arm, and has a hand having a hand fork on which the conveying object is mounted,
The reference position of the said other member with respect to the said one member, when one of the two members rotatably connected among the said 1st arm part, the said 2nd arm part, and the said hand is called the one member, and the other is the other member. The value of the encoder at the stop position when the other member is moved to stop at, and from the stop position to the position at which the other member is positioned by the positioning jig at the reference position. A reference position specifying step of specifying a reference value of the encoder corresponding to the reference position of the other member based on the value of the encoder when moved;
A robot operation step of driving the first arm part, the second arm part, and the hand to a virtual reference posture under conditions in which the reference value is reflected;
After the robot operation step, the industrial robot is operated to move the hand fork equipped with the detection panel to the delivery position of the object to be conveyed, and the reference position of the detection panel and the detection position at the delivery position. A correction value calculating step of calculating a correction value when the motor drives the first arm based on the amount of displacement of the panel stop position;
With
The movement of the hand fork from the reference posture to the transfer position and the movement from the transfer position to the reference posture are repeated, and the correction value calculating step is performed a plurality of times to determine the correction value. Method of calculating correction value of industrial robot. The method of claim 1,
In any of the plurality of correction value calculation steps, when the hand fork moves from the reference posture to the delivery position, the first arm part, the second arm part, and the hand perform the same rotational operation, And the first arm portion, the second arm portion, and the hand perform the same rotational motion when moving from the transfer position to the reference position. The method of claim 2,
In the correction value calculating step of the plurality of correction values, the current correction value calculation step reflects the correction value obtained in the previous correction value calculation step, and drives the arm unit to update the correction value. How to calculate the correction value. The method according to any one of claims 1 to 3,
In the correction value calculating step, the first arm portion, the second arm portion, and the hand perform the same rotation operation as when the conveying object is conveyed, wherein the correction value calculating method for the industrial robot is characterized in that it is. The method according to any one of claims 1 to 4,
It has a several chamber in which the said conveyance object delivery is performed,
And a method of calculating a correction value of the industrial robot, wherein the hand fork is moved to a transfer position of any of the conveyed objects in the plurality of chambers during the correction value calculation step. The method of claim 5,
The plurality of chambers include a loader chamber in which the carrying object is carried out from the outside, an unloader chamber in which the carrying object is carried out to the outside, and a process chamber in which the processing of the carrying object is performed. ,
As said correction value calculation process, the 1st correction value calculation process which moves the said hand fork to the delivery position of the said conveyance object in the said loader object or the delivery position of the said conveyance object in the said unloader chamber is repeated. And a second correction value calculating step of moving the hand fork to the delivery position of the object to be conveyed in the process chamber, and repeatedly performing the correction value calculation method for the industrial robot. The method according to any one of claims 1 to 6,
The correction value calculation method of the industrial robot which detects the said shift amount based on the imaging result of the said detection panel by a camera in the said correction value calculation process. The method according to any one of claims 1 to 7,
The reference position specifying step, wherein the two members perform a first reference position specifying step of being the first arm portion and the second arm portion, and the two members performing a second reference position specifying step of the second arm portion and the hand. A method for calculating a correction value of an industrial robot. The method according to any one of claims 1 to 8,
A hand fork position for positioning the hand fork to the hand by a positioning jig after the reference position specifying step stops the hand base at the reference position with respect to the second arm before the correction value calculating step. A correction value calculation method for an industrial robot, characterized by performing a determination step.

Images