KR102210025B1 - Method for adjusting industrial robot - Google Patents

Abstract

[Task] Provide an adjustment method of an industrial robot capable of accurately aligning a second arm portion to a predetermined reference position, accurately aligning the hand base portion to a predetermined reference position, and accurately aligning the hand fork to a predetermined reference position. .
[Solution means] In this industrial robot adjustment method, in the first reference position specifying step, the reference position of the second arm 16 in the rotation direction of the second arm 16 relative to the first arm 15 The first reference position is specified using the positioning jig 36, and in the second reference position specifying step, the hand base portion in the rotation direction of the hand base portion 17 relative to the second arm portion 16 The second reference position, which is the reference position of (17), is specified using the positioning jig 37, and in the hand fork positioning step, in the direction of the long side of the hand fork 18 with respect to the hand base 17 The hand fork 18 is positioned by a positioning jig 38 at a third reference position, which is a reference position of the hand fork 18 in an orthogonal direction.

Description

How to control an industrial robot{METHOD FOR ADJUSTING INDUSTRIAL ROBOT}

The present invention relates to a method for adjusting an industrial robot that transports a transport object.

Conventionally, an industrial robot that transports a glass substrate is known (see, for example, Patent Document 1). The industrial robot described in Patent Document 1 is a horizontal articulated robot built in and used in an organic EL (organic electroluminescence) display manufacturing system, and a hand on which a glass substrate is mounted, and a hand rotatably connected to the distal end side And a body portion to which the arm to be formed and a base end side of the arm are rotatably connected.

The arm includes a first arm portion whose base end side is rotatably connected to the body portion, and a second arm portion whose base end side is rotatably connected to the front end side of the first arm portion. The hand includes a hand base portion rotatably connected to the distal end side of the second arm portion, and a hand fork to which a glass substrate is mounted while being fixed to the hand base portion. In addition, the industrial robot described in Patent Document 1 has a motor for rotating the first arm portion with respect to the main body portion, a motor for rotating the second arm portion with respect to the first arm portion, and rotating the hand base portion with respect to the second arm portion. It is equipped with a motor for.

Japanese Patent Publication No. 2015-139854

When the industrial robot described in Patent Document 1 is installed in a manufacturing system such as an organic EL display, in order to create an operation program for the industrial robot, generally, the teaching work of the industrial robot is performed. In addition, for example, when the industrial robot installed in the manufacturing system is exchanged or the motor of the industrial robot is exchanged, the robot coordinate system of the industrial robot after the exchange is changed to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange. It deviates. Therefore, even when the industrial robot is replaced or the motor of the industrial robot is replaced, the teaching work of the industrial robot is generally performed again.

On the other hand, by correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange, there is no need to perform the complicated teaching work again. Therefore, the inventor of the present application is considering calculating a correction value for correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange, and correcting the deviation. . When calculating the correction value for correcting the deviation, it is preferable that the correction value can be easily calculated.

In order to calculate the correction value easily, the inventor of the present application accurately aligns the second arm with a predetermined reference position of the second arm in the rotation direction of the second arm with respect to the first arm, and The hand base is accurately aligned with the predetermined reference position of the hand base in the rotational direction of the hand base, and at a predetermined reference position of the hand fork in a direction orthogonal to the direction of the long side of the hand fork relative to the hand base. After correctly aligning the hand fork, the industrial robot is made to perform a predetermined motion, and the amount of displacement of the industrial robot in the rotation direction of the first arm with respect to the main body is determined. It is being studied to calculate a correction value based only on the amount of deviation in the case.

Therefore, an object of the present invention is to accurately align the second arm with a predetermined reference position of the second arm in the rotation direction of the second arm with respect to the first arm, and to the rotation direction of the hand base with respect to the second arm. Accurately aligning the hand base portion to a predetermined reference position of the hand base portion, and accurately aligning the hand fork to a predetermined reference position of the hand fork in a direction orthogonal to the direction of the long side of the hand fork relative to the hand base portion. It is possible to provide a method of adjusting industrial robots.

In order to solve the above problems, the present invention is a method for adjusting an industrial robot, wherein the industrial robot includes a body portion, a first arm portion which is rotatably connected to the body portion, and a base end portion on the front end side of the first arm portion. An arm having a second arm part that is rotatably connected to the side, a hand base part that is rotatably connected to the front end side of the second arm part, and a hand fork that extends in one direction in a horizontal direction from the hand base part and mounts the object to be conveyed. A hand having a, a first motor for rotating the first arm with respect to the main body, a second motor for rotating the second arm with respect to the first arm, and a second motor for rotating the hand base with respect to the second arm. 3 motor, a first encoder for detecting the rotation amount of the first motor, a second encoder for detecting the rotation amount of the second motor, a third encoder for detecting the rotation amount of the third motor, and the main body A first origin sensor for detecting the origin of the first arm in the rotation direction of the first arm with respect to the part, and the origin of the second arm in the rotation direction of the second arm with respect to the first arm. And a third origin sensor for detecting an origin position of the hand base portion in a rotation direction of the hand base portion with respect to the second arm portion, and in a rotation direction of the second arm portion with respect to the first arm portion. The predetermined reference position of the second arm in the first reference position, the predetermined reference position of the hand base in the direction of rotation of the hand base with respect to the second arm is referred to as the second reference position, and Assuming that the predetermined reference position of the hand fork in the direction orthogonal to the direction of the long side of the hand fork is the third reference position, the method of adjusting the industrial robot is the second origin so that the second arm part stops at the first reference position. The first reference position from the first stop position, which is the stop position of the second arm when the second arm is stopped based on the detection result of the sensor or the detection result of the second home sensor and the detection result of the second encoder The second arm is positioned by the first positioning jig for positioning the second arm. The first reference position is specified based on the detection result of the second encoder when the second arm is rotated to the position to be positioned and the value of the second encoder when the second arm is stopped at the first stop position. After the first reference position specifying process and the first reference position specifying process, while the second arm is disposed at the first reference position specified in the first reference position specifying process, the hand base is stopped at the second reference position. The second reference from the second stop position, which is the stop position of the hand base when the hand base is stopped based on the detection result of the third origin sensor or the detection result of the third origin sensor and the detection result of the third encoder. The detection result of the third encoder when the hand base is rotated to the position where the hand base is positioned by the second positioning jig to position the hand base and the hand base is stopped at the second stop position. The second reference position specifying process for specifying the second reference position based on the value of the third encoder at the time, and after the second reference position specifying process, the second arm at the first reference position specified in the first reference position specifying process Is disposed, and the hand base part is disposed at the second reference position specified in the second reference position specifying process, the hand fork by a third positioning jig for positioning the hand fork at the third reference position It characterized in that it comprises a hand fork positioning step for positioning.

In the adjustment method of the industrial robot of the present invention, in the first reference position specifying step, the second arm is positioned at a first reference position, which is a reference position of the second arm in the rotation direction of the second arm with respect to the first arm. The first reference position is specified using the first positioning jig for determining. Therefore, in the present invention, it becomes possible to match the second arm portion to the first reference position specified with high precision using the first positioning jig. That is, in the present invention, it becomes possible to accurately align the second arm portion with the first reference position.

In addition, in the present invention, in the second reference position specifying step, a second position is determined for positioning the hand base at a second reference position, which is a reference position of the hand base part in the rotation direction of the hand base part with respect to the second arm. The second reference position is specified using a jig. Therefore, in the present invention, it becomes possible to match the hand base portion to the second reference position specified with high precision using the second positioning jig. That is, in the present invention, it becomes possible to accurately align the hand base portion to the second reference position.

Further, in the present invention, in the hand fork positioning step, for positioning the hand fork at a third reference position, which is a reference position of the hand fork in a direction orthogonal to the direction of the long side of the hand fork relative to the hand base. The hand fork is positioned at the third reference position using a third positioning jig. Therefore, in the present invention, it becomes possible to accurately align the hand fork to the third reference position.

In the present invention, for example, when the second arm portion is in the first reference position, the first arm portion and the second arm portion overlap in the vertical direction, and when the hand base portion is in the second reference position, the second arm portion and the hand fork Overlap in the vertical direction.

In the present invention, the first positioning jig includes, for example, a first fixing member fixed to one of the first arm and the second arm, and a first insertion formed on the other of the first arm and the second arm. It includes a hole and a first pin inserted into a first through hole formed in the first fixing member. In this case, with a relatively simple configuration, it becomes possible to position the second arm at the first reference position.

In the present invention, the second positioning jig includes, for example, a second fixing member fixed to one of the first arm and the hand base, and a second insertion formed on the other of the first arm and the hand base. It includes a hole and a second pin inserted into a second through hole formed in the second fixing member. In this case, with a relatively simple configuration, it becomes possible to position the hand base portion at the second reference position.

In the present invention, the hand is provided with two hand forks, and the third positioning jig is, for example, a third fixing member fixed to either of the two hand forks and the second arm, and two hand forks. And a third insertion hole formed on the other side of the second arm portion and a third pin inserted into a third through hole formed in the third fixing member. In this case, with a relatively simple configuration, it becomes possible to position the two hand forks at the third reference position.

In the present invention, for example, the hand includes two second hand forks extending in a direction opposite to the hand fork from the hand base, and the adjustment method of the industrial robot includes the hand base part 180 after the hand fork positioning step. ° Two second hand forks at predetermined reference positions of the second hand fork in a direction orthogonal to the direction of the long side of the second hand fork relative to the hand base by a third positioning jig while rotating. And a second hand fork positioning step for positioning. In this case, it becomes possible to position the hand fork and position the second hand fork using a common third positioning jig.

As described above, in the method of adjusting the industrial robot of the present invention, the second arm portion is accurately aligned with a predetermined reference position of the second arm portion in the rotation direction of the second arm portion with respect to the first arm portion. Accurately aligning the hand base portion with a predetermined reference position of the hand base portion in the rotation direction of the hand base portion, and a predetermined reference position of the hand fork in a direction orthogonal to the direction of the long side of the hand fork relative to the hand base portion It becomes possible to accurately fit the hand fork on.

1 is a diagram of an industrial robot that is adjusted by an industrial robot adjustment method according to an embodiment of the present invention, (A) is a plan view, and (B) is a side view.
FIG. 2 is a plan view showing a state in which the industrial robot shown in FIG. 1 is incorporated in a manufacturing system for an organic EL display.
3 is a block diagram for explaining the configuration of the industrial robot shown in FIG. 1.
FIG. 4 is a diagram of a state in which a first positioning jig, a second positioning jig, and a third positioning jig are installed in the industrial robot shown in FIG. 1, (A) is a plan view, and (B) is a side view.
FIG. 5(A) is an enlarged view of part E of FIG. 4(B), (B) is a view showing a first positioning jig and the like from the FF direction of (A), and (C) is, ( It is an enlarged view of part G of A).
6(A) is an enlarged view of a portion H of FIG. 4(B), (B) is a view showing a second positioning jig and the like from the JJ direction in (A), and (C) is, ( It is an enlarged view of part K of A).
FIG. 7(A) is an enlarged view of part L of FIG. 4(A), (B) is an enlarged view of part M of FIG. 4(B), and (C) is an NN direction of (B) It is a figure which shows the 3rd positioning jig etc. from, (D) is an enlarged view of the P part of (B).
FIG. 8 is a diagram for explaining the operation of the industrial robot in a correction value calculation step of calculating a correction value of the industrial robot shown in FIG. 1.
9 is a diagram for explaining the operation of the industrial robot in a correction value calculation step according to another embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Composition of industrial robot)

1 is a diagram of an industrial robot 1 adjusted by a method for adjusting an industrial robot according to an embodiment of the present invention, (A) is a plan view and (B) is a side view. FIG. 2 is a plan view showing a state in which the industrial robot 1 shown in FIG. 1 is incorporated in the manufacturing system 3 of an organic EL display. 3 is a block diagram for explaining the configuration of the industrial robot 1 shown in FIG. 1.

The industrial robot 1 (hereinafter referred to as "robot 1") of this embodiment conveys the glass substrate 2 for an organic EL display (hereinafter referred to as "substrate 2") as a conveyance object. It is a robot to do. As shown in FIG. 2, this robot 1 is a horizontal articulated robot built in and used in the manufacturing system 3 of an organic EL display. The manufacturing system 3 includes a transfer chamber 4 (hereinafter referred to as "chamber 4") disposed at the center, and a plurality of chambers 5 to 7 disposed to surround the chamber 4 Are doing.

The chamber 5 is a process chamber for performing a predetermined process on the substrate 2. Further, the chamber 6 is a supply chamber (loader) in which the substrate 2 supplied to the manufacturing system 3 is accommodated, and the chamber 7 is, for example, from the manufacturing system 3 It is a discharge chamber (unloader) in which the discharged substrate 2 is accommodated. The interior of the chambers 4 to 7 is vacuum. Inside the chamber 4, a part of the robot 1 is arranged. The hand forks 18 and 19, which will be described later, constituting the robot 1 enter the chambers 5 to 7, so that the robot 1 transfers the substrate 2 between the plurality of chambers 5 to 7 do.

As shown in Fig. 1, the robot 1 includes a hand 8 on which the substrate 2 is mounted, an arm 9 to which the hand 8 is rotatably connected to the distal end side, and the arm 9 The base end side is provided with a body portion 10 that is connected to be rotatable. The hand 8 and the arm 9 are disposed above the main body 10. The main body 10 includes a lifting mechanism for lifting the arm 9 and a case body 13 in which the lifting mechanism is accommodated. The case body 13 is formed in a substantially bottomed cylindrical shape. A flange 14 formed in a disk shape is fixed to the upper end of the case body 13.

As described above, a part of the robot 1 is disposed inside the chamber 4. Specifically, a portion of the robot 1 above the lower end surface of the flange 14 is disposed inside the chamber 4. That is, a portion of the robot 1 above the lower end surface of the flange 14 is disposed in the vacuum region VR, and the hand 8 and the arm 9 are in the vacuum chamber (during vacuum). It is placed. On the other hand, a portion of the robot 1 lower than the lower end surface of the flange 14 is disposed in the waiting area AR (in the atmosphere).

The arm 9 is provided with a first arm portion 15 and a second arm portion 16 that are rotatably connected to each other. The arm 9 of this embodiment is constituted by two arm portions, the first arm portion 15 and the second arm portion 16. The base end side of the first arm 15 is connected to the main body 10 so as to be rotatable. To the front end side of the first arm 15, the base end side of the second arm 16 is rotatably connected. The hand 8 is connected to the front end side of the second arm 16 so as to be rotatable.

The second arm portion 16 is disposed above the first arm portion 15. In addition, the hand 8 is disposed above the second arm 16. The distance between the center of rotation of the first arm 15 with respect to the main body 10 and the center of rotation of the second arm 16 with respect to the first arm 15 is the second arm 16 with respect to the first arm 15 ) Is equal to the distance between the center of rotation of the hand 8 and the center of rotation of the hand 8 with respect to the second arm 16.

The hand 8 is provided with a hand base 17 rotatably connected to the distal end side of the second arm 16 and hand forks 18 and 19 on which the substrate 2 is mounted. The hand 8 of this embodiment is provided with two hand forks 18 and two hand forks 19. The hand forks 18 and 19 are formed in a straight line. The hand fork 18 and the hand fork 19 are formed in the same shape. The two hand forks 18 are arranged in parallel with each other having a predetermined distance. The hand fork 18 extends from the hand base 17 in one direction in the horizontal direction. The two hand forks 19 are arranged in parallel with each other having a predetermined distance. The hand fork 19 extends from the hand base 17 in a direction opposite to the hand fork 18. The hand fork 19 of this embodiment is a second hand fork.

The hand forks 18 and 19 are fixed to the hand base 17. Specifically, the hand forks 18 and 19 are fixed to the hand base portion 17 with a fixing screw. The hand forks 18 and 19 are provided with insertion holes through which fixing screws are inserted. This insertion hole is a long hole in which a direction orthogonal to the long side direction of the hand forks 18, 19 is a long side direction, and in a direction orthogonal to the long side direction of the hand forks 18, 19, the hand It is possible to adjust the fixing positions of the hand forks 18 and 19 relative to the base 17.

In this embodiment, one substrate 2 is mounted on two hand forks 18. In addition, one substrate 2 is mounted on two hand forks 19. On the upper surface of the hand fork 18, a positioning member for positioning the substrate 2 to be mounted is provided. A positioning member for positioning the substrate 2 to be mounted is also provided on the upper surface of the hand fork 19.

In addition, the robot 1 includes a motor 21 for rotating the first arm 15 with respect to the main body 10 and a motor 21 for rotating the second arm 16 with respect to the first arm 15 (22), a motor 23 for rotating the hand base 17 with respect to the second arm 16, an encoder 24 for detecting the amount of rotation of the motor 21, and a motor 22 An encoder 25 for detecting the amount of rotation of the motor 23 and an encoder 26 for detecting the amount of rotation of the motor 23 are provided (see Fig. 3).

The encoder 24 is attached to the motor 21. The encoder 25 is installed in the motor 22, and the encoder 26 is installed in the motor 23. The motor 21 and the encoder 24 are arranged inside the main body 10, for example. Further, the motors 22 and 23 and the encoders 25 and 26 are arranged inside the first arm 15, for example. The motors 21 to 23 are electrically connected to the control unit 27 of the robot 1. The encoders 24 to 26 are also electrically connected to the control unit 27. The motor 21 of this embodiment is a first motor, the motor 22 is a second motor, and the motor 23 is a third motor. Further, encoder 24 is a first encoder, encoder 25 is a second encoder, and encoder 26 is a third encoder.

In addition, the robot 1 includes an origin sensor 31 for detecting the origin position of the first arm 15 in the rotation direction of the first arm 15 with respect to the main body 10, and the first arm. The origin sensor 32 for detecting the position of the origin of the second arm 16 in the rotation direction of the second arm 16 relative to (15), and the hand base portion 17 for the second arm 16 ) Is provided with an origin sensor 33 for detecting the origin position of the hand base 17 in the rotation direction of ). The origin sensor 31 of this embodiment is a first origin sensor, the origin sensor 32 is a second origin sensor, and the origin sensor 33 is a third origin sensor.

The origin sensors 31 to 33 are proximity sensors, for example. Alternatively, the origin sensors 31 to 33 are optical sensors having a light emitting element and a light receiving element, for example. The origin sensors 31 to 33 are electrically connected to the control unit 27. In the joint portion that is a connection portion between the body portion 10 and the first arm portion 15, the origin sensor 31 is fixed to either of the body portion 10 and the first arm portion 15, and the body portion 10 And to any other of the first arm 15, a detection member that is detected by the origin sensor 31 when the first arm 15 is in the origin position is fixed.

Similarly, in the joint part which is the connection part of the 1st arm part 15 and the 2nd arm part 16, the origin sensor 32 is fixed to either of the 1st arm part 15 and the 2nd arm part 16, and To either the other of the first arm 15 and the second arm 16, a detection member detected by the origin sensor 32 when the second arm 16 is at the origin position is fixed. In addition, in the joint portion, which is a connection portion between the second arm portion 16 and the hand base portion 17, the origin sensor 33 is fixed to either of the second arm portion 16 and the hand base portion 17, and 2 A detection member that is detected by the origin sensor 33 when the hand base 17 is in the origin position is fixed to the other of the arm 16 and the hand base 17.

(Calculation method of correction value for industrial robot)

FIG. 4 is a diagram of a state in which positioning jigs 36 to 38 are installed in the robot 1 shown in FIG. 1, (A) is a plan view, and (B) is a side view. FIG. 5A is an enlarged view of part E in FIG. 4B, and FIG. 5B is a view showing the positioning jig 36 and the like from the FF direction in FIG. 5A. , FIG. 5C is an enlarged view of a portion G in FIG. 5A. FIG. 6(A) is an enlarged view of part H of FIG. 4(B), and FIG. 6(B) is a view showing the positioning jig 37 and the like from the direction JJ of FIG. 6(A). , FIG. 6(C) is an enlarged view of part K of FIG. 6(A). FIG. 7A is an enlarged view of a portion L of FIG. 4A, FIG. 7B is an enlarged view of a portion M of FIG. 4B, and FIG. 7C is, It is a figure which shows the positioning jig 38 etc. from the NN direction of FIG. 7(B), and FIG. 7(D) is an enlarged view of the P part of FIG. 7(B). FIG. 8 is a diagram for explaining the operation of the robot 1 in a correction value calculation step of calculating a correction value of the robot 1 shown in FIG. 1.

When the robot 1 is installed in the manufacturing system 3, in order to create an operation program for the robot 1, the teaching work of the robot 1 is performed. In addition, for example, when the robot 1 installed in the manufacturing system 3 is replaced, the robot coordinate system of the robot 1 after the exchange is shifted from the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange. Therefore, it is necessary to perform the teaching work of the robot 1 again.

On the other hand, by correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange, there is no need to perform the complicated teaching work again. In this embodiment, if the robot 1 installed in the manufacturing system 3 is replaced so that it is not necessary to perform the cumbersome teaching work again after replacing the robot 1, the teaching work of the robot 1 before the replacement A correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange of the coordinates of the teaching position is calculated. That is, a correction value for correcting the operation of the robot 1 after replacement is calculated. Hereinafter, a method of calculating this correction value will be described.

In the following description, the predetermined reference position of the second arm portion 16 in the rotation direction of the second arm portion 16 with respect to the first arm portion 15 is referred to as a first reference position, and the second arm portion 16 The predetermined reference position of the hand base 17 in the rotation direction of the hand base 17 is referred to as the second reference position, and the direction of the long side of the hand fork 18 with respect to the hand base 17 The predetermined reference position of the hand fork 18 in the direction orthogonal to the third reference position is referred to as the third reference position, and the first arm portion 15 in the rotation direction of the first arm portion 15 with respect to the body portion 10 The predetermined reference position of is referred to as the fourth reference position.

In this embodiment, when the second arm portion 16 is at the first reference position, as shown in FIG. 4, the first arm portion 15 and the second arm portion 16 overlap in the vertical direction. Specifically, when the second arm portion 16 is in the first reference position, the second arm portion 16 may correspond to the long side direction of the first arm portion 15 and the long side direction of the second arm portion 16 when viewed from the vertical direction. The first arm 15 and the second arm 16 overlap in the vertical direction. In addition, in this embodiment, the origin position of the 2nd arm part 16 and the 1st reference position in the rotation direction of the 2nd arm part 16 with respect to the 1st arm part 15 correspond.

Moreover, when the hand base part 17 is in the 2nd reference position, as shown in FIG. 4, the 2nd arm part 16 and the hand fork 18 overlap in the vertical direction. Specifically, when the hand base portion 17 is in the second reference position, the second arm portion 16 and the long side direction of the hand fork 18 coincide with each other when viewed from the vertical direction. The arm 16 and the hand fork 18 overlap in the vertical direction. Further, in this embodiment, the position in which the hand base 17 is rotated 90° from the origin position of the hand base 17 in the rotation direction of the hand base 17 with respect to the second arm 16 is determined. 2 It is the standard position.

In addition, the fourth reference position may coincide with the origin position of the first arm 15 in the rotation direction of the first arm 15 with respect to the main body 10, The position in which the first arm 15 rotates by a predetermined angle from the origin position of the first arm 15 in the rotation direction of the first arm 15 may be the fourth reference position.

In addition, in this embodiment, a positioning jig 36 for positioning the second arm 16 at the first reference position, and a positioning jig for positioning the hand base 17 at the second reference position ( 37) and a positioning jig 38 for positioning the hand fork 18 at the third reference position. The positioning jig 36 of this form is a first positioning jig, the positioning jig 37 is a second positioning jig, and the positioning jig 38 is a third positioning jig. In addition, the positioning jig 38 is a hand fork 19 at a predetermined reference position of the hand fork 19 with respect to the hand base 17 in a direction orthogonal to the long side direction of the hand fork 19. It is also used to determine the location.

As shown in FIG. 5, the positioning jig 36 includes a fixing member 41 fixed to the first arm 15 and a pin 42. The fixing member 41 is fixed to the side surface of the base end portion of the first arm 15. A through hole 41a into which the pin 42 is inserted is formed in the fixing member 41. Further, an insertion hole 16a into which the pin 42 is inserted is formed on the side surface of the tip end of the second arm 16. When the pin 42 inserted in the through hole 41a of the fixing member 41 is inserted into the insertion hole 16a, the second arm 16 is strictly positioned at the first reference position. The fixing member 41 of this embodiment is a first fixing member, the pin 42 is a first pin, the insertion hole 16a is a first insertion hole, and the through hole 41a is a first through hole.

As shown in FIG. 6, the positioning jig 37 includes the fixing members 43 and 44 fixed to the first arm 15 and a pin 45. The fixing member 43 is fixed to the side surface of the base end of the first arm 15. The fixing member 44 is fixed to the side surface of the fixing member 43. The fixing member 43 is formed with a groove for preventing interference with the fixing member 41. A tip end surface of a screw 46 for adjusting the vertical position of the fixing member 44 relative to the fixing member 43 is in contact with the bottom surface of the fixing member 44. The screw 46 is screwed to the screw holding member 47 fixed to the lower end surface of the fixing member 43.

A through hole 44a into which the pin 45 is inserted is formed in the fixing member 44. Further, an insertion hole 17a into which the pin 45 is inserted is formed on the side of the hand base 17. When the pin 45 inserted in the through hole 44a of the fixing member 44 is inserted into the insertion hole 17a, the hand base 17 is strictly positioned at the second reference position. The fixing members 43 and 44 of this form are a second fixing member, the pin 45 is a second pin, the insertion hole 17a is a second insertion hole, and the through hole 44a is a second through hole. .

As shown in FIG. 7, the positioning jig 38 includes fixing members 48 and 49 fixed to the two hand forks 18 and a pin 50. The fixing member 48 is fixed to the upper surfaces of the two hand forks 18. The fixing member 49 is fixed to the lower surface of the fixing member 48. A through hole 49a into which the pin 50 is inserted is formed in the fixing member 49. Further, an insertion hole 16b into which the pin 50 is inserted is formed on the side surface of the base end of the second arm 16. When the pin 50 inserted into the through hole 49a of the fixing member 49 is inserted into the insertion hole 16b, the two hand forks 18 are strictly positioned at the third reference position. The fixing members 48 and 49 of this form are a third fixing member, the pin 50 is a third pin, the insertion hole 16b is a third insertion hole, and the through hole 49a is a third through hole. .

For example, when the robot 1 installed in the manufacturing system 3 is replaced, the robot 1 is adjusted first. Specifically, first, the second arm 16 is rotated to the first reference position (origin position) based on the detection result of the origin sensor 32. That is, the second arm 16 is rotated and stopped based on the detection result of the origin sensor 32 so that the second arm 16 stops at the first reference position.

Further, based on the detection result of the origin sensor 33 and the detection result of the encoder 26, the hand base 17 is rotated to a second reference position (position rotated by 90° from the origin position). For example, after rotating the hand base part 17 to the home position based on the detection result of the home sensor 33, the hand base part 17 is removed from the home position based on the detection result of the encoder 26. 2 Rotate to the reference position. That is, based on the detection result of the origin sensor 33 and the detection result of the encoder 26 so that the hand base 17 stops at the second reference position, the hand base 17 is rotated and stopped.

After that, the fixing members 41, 43, 44 are fixed to the first arm 15, and the fixing members 48, 49 are fixed to the two hand forks 18. Further, based on the detection result of the origin sensor 32, the second arm 16 rotated to the first reference position is strictly slightly shifted from the first reference position. Similarly, based on the detection result of the origin sensor 33 and the detection result of the encoder 26, the hand base portion 17 rotated to the second reference position is strictly slightly shifted from the second reference position.

Thereafter, the second arm 16 is rotated with respect to the first arm 15 until the pin 42 inserted into the through hole 41a of the fixing member 41 is inserted into the insertion hole 16a and inserted. The pin 42 is inserted into the hole 16a, and the second arm 16 is precisely positioned at the first reference position. Further, the amount of rotation of the motor 22 at that time is detected by the encoder 25, and the control unit 27 uses the detection result by the encoder 25 to specify the first reference position of the second arm 16. do.

That is, the first, which is the stop position of the second arm 16 when the second arm 16 is stopped based on the detection result of the origin sensor 32 so that the second arm 16 stops at the first reference position. The detection result of the encoder 25 when the second arm 16 is rotated from the stop position to the position where the second arm 16 is positioned at the first reference position by the positioning jig 36, and the 1 A first reference position is specified based on the value of the encoder 25 when the second arm 16 is stopped at the stop position (first reference position specifying process).

After that, the pin 45 inserted into the through hole 44a of the fixing member 44 is inserted while the second arm 16 is disposed at the first reference position specified in the first reference position specifying process. Insert the pin 45 into the insertion hole 17a by rotating the hand base 17 with respect to the second arm 16 to the position where it fits into the hole 17a, and insert the pin 45 into the second reference position. ) Are strictly positioned. Further, the rotation amount of the motor 23 at that time is detected by the encoder 26, and the control unit 27 uses the detection result by the encoder 26 to specify the second reference position of the hand base 17. do.

That is, in a state in which the second arm 16 is arranged at the first reference position specified in the first reference position specifying process, the origin sensor 33 detects the hand base 17 to stop at the second reference position. Based on the result and the detection result of the encoder 26, from the second stop position, which is the stop position of the hand base 17 when the hand base 17 is stopped, the hand base part by the positioning jig 37 The detection result of the encoder 26 when the hand base 17 is rotated to the position where (17) is positioned, and the encoder 26 when the hand base 17 is stopped at the second stop position. A second reference position is specified based on the value of (second reference position specifying process).

Thereafter, the second arm portion 16 is disposed at the first reference position specified in the first reference position specifying process, and the hand base portion 17 is placed at the second reference position specified in the second reference position specifying process. In the arranged state, the pin 50 inserted into the through hole 49a of the fixing member 49 is inserted in the insertion hole 16b in a direction orthogonal to the long side direction of the hand fork 18. The two hand forks 18 are moved relative to the hand base 17 to insert the pin 50 into the insertion hole 16b, and the two hand forks 18 are positioned at the third reference position.

That is, the second arm portion 16 is disposed at the first reference position specified in the first reference position specifying process, and the hand base portion 17 is disposed at the second reference position specified in the second reference position specifying process. In this state, the two hand forks 18 are positioned by the positioning jig 38 (hand fork positioning process). The positioned hand fork 18 is fixed to the hand base 17 by screws.

After that, at least the positioning jigs 37 and 38 are separated, and the hand base 17 is rotated 180° with respect to the second arm 16. In this state, the fixing members 48 and 49 are fixed to the two hand forks 19. Further, until the pin 50 inserted into the through hole 49a of the fixing member 49 is fitted into the insertion hole 16b, the hand base portion (in a direction orthogonal to the direction of the long side of the hand fork 19) ( The two hand forks 19 are moved relative to 17) to insert the pin 50 into the insertion hole 16b, and the two hand forks 19 are positioned at a predetermined reference position.

That is, the hand in a direction perpendicular to the direction of the long side of the hand fork 19 with respect to the hand base 17 by the positioning jig 38 while rotating the hand base 17 by 180°. The two hand forks 19 are positioned at predetermined reference positions of the forks 19 (second hand fork positioning process). The positioned hand fork 19 is fixed to the hand base 17 by screws. Further, when the second hand fork positioning process is finished, the preliminary adjustment of the robot 1 is ended.

After that, the detection panels 52 (see Fig. 8) are mounted on the two hand forks 18 (panel mounting process). The detection panel 52 is a panel used when calculating a correction value in a correction value calculation step described later, and is formed in a rectangular flat plate shape, for example. The detection panel 52 is mounted on the two hand forks 18 in a state positioned by a positioning member provided on the upper surface of the hand fork 18.

Then, based on the detection result of the origin sensor 31 or the detection result of the origin sensor 31 and the detection result of the encoder 24 so that the first arm 15 stops at the fourth reference position, the first The motor 21 is driven and controlled based on the third stop position, which is the stop position of the first arm 15 when the arm 15 is stopped, and the first reference position specified in the first reference position specifying process is set. In addition to driving and controlling the motor 22 as a reference, the motor 23 is driven and controlled based on the second reference position specified in the second reference position specifying process, thereby bringing the robot 1 to a virtual reference posture. Do (robot operation process).

That is, the motor 21 is driven and controlled based on the third stop position, and the motor 22 is driven and controlled based on the first reference position specified in the first reference position specifying process, and the second reference The motor 23 is driven and controlled based on the second reference position specified in the position specifying process, and the robot 1 is operated to the virtual operation start position. In this form, for example, the first arm 15 stops at the third stop position, the second arm portion 16 stops at the first reference position, and the hand base 17 is 90 from the second reference position. The state in which the robot 1 is stopped at the rotated position becomes the virtual operation start position of the robot 1. Further, in this embodiment, the operation start position of the robot 1 and the home position of the robot 1 are matched. However, the operation start position of the robot 1 and the home position of the robot 1 may be shifted.

In addition, when the origin position of the first arm part 15 in the rotation direction of the first arm part 15 with respect to the body part 10 and the fourth reference position coincide, in the robot operation step, the fourth The first arm 15 is rotated and stopped based on the detection result of the origin sensor 31 so that the first arm 15 stops at the reference position. In addition, the position at which the first arm 15 rotates by a predetermined angle from the origin position of the first arm 15 in the rotation direction of the first arm 15 with respect to the main body 10 becomes the fourth reference position. If there is, in the robot operation process, the first arm 15 is based on the detection result of the origin sensor 31 and the detection result of the encoder 24 so that the first arm 15 stops at the fourth reference position. To stop by rotating. In addition, the 3rd stop position is slightly shifted from the 4th reference position strictly. In addition, the positioning jig 36 and 38 are separated before the robot operation process.

After that, the robot 1 is operated to move the hand fork 18 to the transfer position of the substrate 2 (hand movement process). For example, as shown in FIG. 8A, the hand fork 18 is moved to the delivery position of the substrate 2 in the chamber 6. Specifically, the arm 9 is extended and the hand fork 18 is moved to the transfer position of the substrate 2 in the chamber 6. After that, the motor 21 is based on the amount of shift in the rotation direction of the first arm 15 with respect to the main body 10 between the fifth reference position, which is a predetermined reference position, and the edge of the detection panel 52. Calculate a correction value for controlling) (correction value calculation process).

Specifically, when the robot 1 before replacement, in which the detection panel 52 is mounted on the hand fork 18, is operated and the hand fork 18 is moved to the transfer position of the substrate 2, the main body 10 The position at which the edge of the detection panel 52 is disposed in the rotation direction of the first arm 15 relative to) is the fifth reference position. In addition, one sensor 53 is disposed at the fifth reference position. The sensor 53 is, for example, an optical sensor having a light-emitting element and a light-receiving element or a proximity sensor. The sensor 53 is installed inside the chamber 6.

In the correction value calculation process, until the edge of the detection panel 52 is detected by the sensor 53 (that is, in the rotation direction of the first arm 15 with respect to the main body 10, the fifth reference position) The control unit 27 calculates a correction value based on the detection result of the encoder 24 when the first arm 15 is rotated (until the edges of the detection panel 52 and the detection panel 52 coincide).

For example, as shown in Fig. 8A, when the hand fork 18 is moved to the delivery position of the substrate 2 in the chamber 6, the sensor 53 disposed at the fifth reference position and When the edge of the detection panel 52 is shifted in the rotation direction of the first arm 15 with respect to the main body 10, in the correction value calculation step, as shown in FIG. 8B , The first arm 15 is rotated until the edge of the detection panel 52 is detected by the sensor 53. Further, a correction value is calculated based on the detection result of the encoder 24 at that time. Further, the edge of the detection panel 52 is detected by the sensor 53 when the on/off of the sensor 53 is switched.

Thereafter, the motor 21 is driven and controlled by reflecting the correction value calculated in the correction value calculation process, and the motor 22 is driven and controlled based on the first reference position specified in the first reference position specifying process. Together, the motor 23 is driven and controlled based on the second reference position specified in the second reference position specifying process, thereby returning the robot 1 to the normal operation start position.

Further, in this embodiment, after that, the hand base 17 is rotated 180° and the detection panel 52 is replaced on the two hand forks 19, and the substrate 2 in the chamber 6 Move the hand fork 19 to the delivery position of. At this time, when the edge of the detection panel 52 mounted on the hand fork 19 is not detected by the sensor 53, the edge of the detection panel 52 mounted on the hand fork 19 is the sensor 53 ), using the positioning jig 38 to adjust the fixed position of the hand fork 19 with respect to the hand base 17 in a direction orthogonal to the long side direction of the hand fork 19 .

(Main effect of this form)

As described above, in this embodiment, in the first reference position specifying step, the first, which is the reference position of the second arm 16 in the rotation direction of the second arm 16 relative to the first arm 15 The first reference position is specified using a positioning jig 36 for positioning the second arm 16 at the reference position. Therefore, in this embodiment, it becomes possible to match the 2nd arm part 16 to the 1st reference position specified with high precision using the positioning jig 36. That is, in this embodiment, it becomes possible to accurately align the second arm 16 with the first reference position.

In this embodiment, in the second reference position specifying step, in the second reference position, which is the reference position of the hand base 17 in the rotation direction of the hand base 17 with respect to the second arm 16 The second reference position is specified using a positioning jig 37 for positioning the hand base 17. Therefore, in this embodiment, it becomes possible to match the hand base portion 17 to the second reference position specified with high precision using the positioning jig 37. That is, in this embodiment, it becomes possible to accurately align the hand base portion 17 to the second reference position.

In this embodiment, in the hand fork positioning step, the third reference is the reference position of the hand fork 18 in a direction orthogonal to the long side direction of the hand fork 18 with respect to the hand base 17 The hand fork 18 is positioned at the third reference position by a positioning jig 38 for positioning the hand fork 18 at the position. Therefore, in this embodiment, the hand fork 18 can be accurately aligned with the third reference position.

Further, in this embodiment, it becomes possible to accurately align the second arm portion 16 with the first reference position after the first reference position specifying step, and further, the hand base portion 17 at the second reference position after the second reference position specifying step. ) Can be accurately aligned, and the hand fork 18 can be accurately aligned with the third reference position in the hand fork positioning process, so that the second arm 16 is accurately aligned with the first reference position, and , After accurately aligning the hand base portion 17 to the second reference position and accurately aligning the hand fork 18 to the third reference position, in the robot operation process, the robot 1 is set to a virtual reference posture. Then, in the hand movement process, it becomes possible to move the hand fork 18 to the transfer position of the substrate 2.

In addition, in this embodiment, in the subsequent correction value calculation process, the deviation of the 5th reference position and the edge of the detection panel 52 in the rotation direction of the 1st arm part 15 with respect to the body part 10 Based on the quantity, a correction value for controlling the motor 21 is calculated, but in this embodiment, the robot 1 before replacement, in which the detection panel 52 is mounted on the hand fork 18, is operated and the substrate 2 When the hand fork 18 is moved to the delivery position of ), the position where the edge of the detection panel 52 is disposed in the rotation direction of the first arm 15 with respect to the body 10 is the fifth reference position Therefore, in the correction value calculation step, by calculating a correction value for controlling the motor 21, the robot 1 after replacement with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before replacement It becomes possible to calculate a correction value for correcting the deviation of the robot coordinate system of.

That is, in this embodiment, the correction value is calculated based on the amount of shift in the rotation direction of the first arm 15 with respect to the main body 10 between the fifth reference position and the edge of the detection panel 52 , It becomes possible to calculate a correction value for correcting the deviation of the robot coordinate system of the robot 1 after exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange. That is, it becomes possible to calculate a correction value based only on the amount of displacement of the robot 1 in the rotation direction of the first arm 15 with respect to the main body 10. Therefore, in this embodiment, it becomes possible to relatively easily calculate a correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange. .

Further, in this embodiment, in the correction value calculation step, the amount of the shift in the rotation direction of the first arm 15 with respect to the main body 10 between the fifth reference position and the edge of the detection panel 52 Since it is sufficient to calculate the correction value based on it, it becomes possible to calculate the correction value using one sensor 53. Further, in the present embodiment, in the second hand fork positioning step, the hand base 17 is rotated 180°, and the two hand forks 19 are positioned at predetermined reference positions by the positioning jig 38. Since is positioned, it becomes possible to position the hand fork 18 and position the hand fork 19 using the common positioning jig 38.

(Modification 1 of the correction value calculation process)

In the above-described form, one camera is used instead of the sensor 53, and the rotation direction of the first arm 15 relative to the main body 10 at the fifth reference position and the edge of the detection panel 52 You may obtain the amount of deviation in. In this case, for example, a predetermined marking is formed at a location corresponding to the fifth reference position inside the chamber 6, and the position of the marking photographed by the camera and the amount of displacement of the edge of the detection panel 52 By obtaining, the amount of shift between the fifth reference position and the edge of the detection panel 52 is obtained. In addition, for example, the coordinates of the fifth reference position are stored in advance in the control unit 27, and based on the coordinates of the edge of the detection panel 52 photographed with the camera and the coordinates of the fifth reference position, the fifth reference position And the amount of deviation of the edge of the panel 52 for detection is obtained.

In this case, even if the first arm 15 is not rotated with respect to the main body 10, it is possible to obtain the amount of shift between the fifth reference position and the edge of the detection panel 52. In addition, in this case, for example, using a camera, after obtaining the amount of deviation between the fifth reference position and the edge of the detection panel 52, the first arm portion ( A correction value is calculated based on the detection result of the encoder 24 when 15) is rotated.

In addition, even in this case, if the correction value is calculated based on the amount of shift in the rotation direction of the first arm 15 with respect to the main body 10 between the fifth reference position and the edge of the detection panel 52 Therefore, it becomes possible to calculate a correction value using one camera. Also, by using an optical line sensor instead of a camera, the amount of shift in the rotation direction of the first arm 15 with respect to the main body 10 may be obtained between the fifth reference position and the edge of the detection panel 52. do. Even in this case, even if the first arm 15 is not rotated with respect to the main body 10, it is possible to obtain the amount of shift between the fifth reference position and the edge of the detection panel 52.

(Variant 2 of the correction value calculation process)

9 is a diagram for explaining the operation of the robot 1 in the correction value calculation step according to another embodiment of the present invention.

In the above-described form, in the correction value calculation step, the sensor 53 is used to determine the fifth reference position and the edge of the detection panel 52 in the rotation direction of the first arm 15 with respect to the main body 10. Is rotating the first arm 15 to the same position, but in the rotation direction of the first arm 15 with respect to the main body 10, the fifth reference position and the edge of the detection panel 52 coincide. Using a fourth positioning jig for positioning the detection panel 52 (the detection panel 52 mounted on the hand fork 18) at the position, the first arm portion 15 relative to the body portion 10 ), the first arm 15 may be rotated to a position where the fifth reference position and the edge of the detection panel 52 coincide with each other.

In this case, the fourth positioning jig includes, for example, a pin 55 and a pin holding member 56 in which an insertion hole 56a into which the pin 55 is inserted is formed. The pin holding member 56 is provided inside the chamber 6. A through hole 52a into which the pin 55 is inserted is formed in the detection panel 52. When the pin 55 inserted into the through hole 52a of the detection panel 52 is inserted into the insertion hole 56a of the pin holding member 56, the first arm 15 with respect to the main body 10 In the rotation direction of, the detection panel 52 mounted on the hand fork 18 is positioned at a position where the fifth reference position and the edge of the detection panel 52 coincide.

In this case, in the correction value calculation process, correction based on the detection result of the encoder 24 when the first arm 15 is rotated to the position where the detection panel 52 is positioned by the fourth positioning jig. Calculate the value. For example, as shown in Fig. 9A, when the hand fork 18 is moved to the delivery position of the substrate 2 in the chamber 6, the insertion hole 56a of the pin holding member 56 ) And the through-hole 52a of the detection panel 52 are shifted in the rotational direction of the first arm 15 with respect to the main body 10, in the correction value calculation step, ( As shown in B), the first arm 15 is rotated to a position at which the detection panel 52 is positioned by the fourth positioning jig. Further, a correction value is calculated based on the detection result of the encoder 24 at that time.

(Other embodiment)

Although the above-described form is an example of a preferred form of the present invention, it is not limited thereto, and various modifications can be made without changing the gist of the present invention.

In the above-described form, the position at which the second arm 16 rotates by a predetermined angle from the origin position of the second arm 16 in the rotation direction of the second arm 16 relative to the first arm 15 1 It may be the reference position. In this case, when the robot 1 installed in the manufacturing system 3 is replaced, the detection result of the origin sensor 32 and the detection result of the encoder 25 so that the second arm 16 stops at the first reference position. The second arm 16 is rotated based on and stopped.

In addition, in the above-described form, the origin position of the hand base part 17 in the rotation direction of the hand base part 17 with respect to the second arm part 16 and the second reference position may match. In this case, when the robot 1 installed in the manufacturing system 3 is replaced, the hand base 17 based on the detection result of the origin sensor 33 so that the hand base 17 stops at the second reference position. ) To stop. In addition, in the above-described aspect, the panel mounting step may be performed after the robot operation step.

In the above-described form, the first reference position specifying step, the second reference position specifying step, and the hand fork positioning step are performed with respect to the robot 1 installed in the manufacturing system 3, but installed in the manufacturing system 3 With respect to the previous robot 1, a first reference position specifying step, a second reference position specifying step, and a hand fork positioning step may be performed. For example, in the assembly factory of the robot 1, the robot 1 may be subjected to a first reference position specifying step, a second reference position specifying step, and a hand fork positioning step.

In addition, when transporting the robot 1 from the assembly plant to the manufacturing system 3, the hand forks 18 and 19 are separated so that the long hand forks 18 and 19 do not interfere with the transport. , When transporting the robot 1 from the assembly plant to the manufacturing system 3, in the assembly plant, a first reference position specifying step and a second reference position specifying step are performed with respect to the robot 1, and the manufacturing system The hand fork positioning process may be performed with respect to the robot 1 installed in (3).

In the above-described form, the fixing member 41 may be fixed to the second arm 16. In this case, an insertion hole as a first insertion hole into which the pin 42 is inserted is formed on the side surface of the base end of the first arm 15. In addition, in the above-described aspect, the fixing member 44 may be fixed to the hand base portion 17. In this case, an insertion hole as a second insertion hole into which the pin 45 is inserted is formed on a side surface of the base end portion of the first arm 15. In addition, in the above-described form, the fixing members 48 and 49 may be fixed to the second arm 16. In this case, an insertion hole as a third insertion hole into which the pin 50 is inserted is formed in the two hand forks 18.

In the above-described form, the hand 8 does not have to be provided with the hand fork 19. In addition, in the above-described form, the object to be transported by the robot 1 is the substrate for organic EL display 2, but the object to be transported by the robot 1 may be a glass substrate for a liquid crystal display, or a semiconductor wafer. It may be back. In addition, in the above-described form, the robot 1 may be disposed in a space at atmospheric pressure.

1: Robot (industrial robot)
2: Substrate (object to be transported)
8: hand
9: cancer
10: main body
15: first arm
16: second arm part
16a: insertion hole (first insertion hole)
16b: insertion hole (third insertion hole)
17: hand base
17a: insertion hole (second insertion hole)
18: hand fork
19: hand fork (second hand fork)
21: motor (first motor)
22: motor (second motor)
23: motor (third motor)
24: encoder (first encoder)
25: encoder (second encoder)
26: encoder (third encoder)
31: origin sensor (first origin sensor)
32: origin sensor (second origin sensor)
33: origin sensor (third origin sensor)
36: positioning jig (first positioning jig)
37: positioning jig (2nd positioning jig)
38: positioning jig (third positioning jig)
41: fixing member (first fixing member)
41a: through hole (first through hole)
42: pin (first pin)
43, 44: fixing member (second fixing member)
44a: through hole (second through hole)
45: pin (second pin)
48, 49: fixing member (third fixing member)
49a: through hole (third through hole)
50: pin (third pin)

Claims (8)

It is the adjustment method of industrial robot,
The industrial robot includes an arm having a body part, a first arm part rotatably connected to the base end side to the main body part, and a second arm part rotatably connected to the proximal end side of the first arm part, and the A hand having a hand base part rotatably connected to the distal end side of the second arm part and a hand fork on which a conveyance object is mounted while extending in one direction in a horizontal direction from the hand base part, and the first arm part A first motor for rotating the motor, a second motor for rotating the second arm with respect to the first arm, a third motor for rotating the hand base with respect to the second arm, and the first motor A first encoder for detecting the amount of rotation of the second motor, a second encoder for detecting the amount of rotation of the second motor, a third encoder for detecting the amount of rotation of the third motor, and the A first origin sensor for detecting the origin position of the first arm in the rotation direction of the first arm, and the origin position of the second arm in the rotation direction of the second arm with respect to the first arm. A second origin sensor for detecting, and a third origin sensor for detecting an origin position of the hand base part in a rotation direction of the hand base part with respect to the second arm part,
A predetermined reference position of the second arm portion in the rotation direction of the second arm portion with respect to the first arm portion is referred to as a first reference position, and the hand in the rotation direction of the hand base portion with respect to the second arm portion Assuming that a predetermined reference position of the base portion is referred to as a second reference position, and a predetermined reference position of the hand fork in a direction orthogonal to the direction of the long side of the hand fork relative to the hand base is a third reference position,
The method of adjusting the industrial robot,
Stop the second arm based on the detection result of the second origin sensor or the detection result of the second origin sensor and the detection result of the second encoder so that the second arm part stops at the first reference position From the first stop position, which is the stop position of the second arm part when it is set, to the position where the second arm part is positioned by a first positioning jig for positioning the second arm part at the first reference position. The first reference position is specified based on the detection result of the second encoder when the second arm is rotated and the value of the second encoder when the second arm is stopped at the first stop position. The first reference position specifying process,
After the first reference position specifying process, in a state in which the second arm is disposed at the first reference position specified in the first reference position specifying process, the hand base is stopped at the second reference position. 3 From a second stop position, which is a stop position of the hand base part when the hand base part is stopped based on the detection result of the origin sensor or based on the detection result of the third origin sensor and the detection result of the third encoder, A detection result of the third encoder when the hand base is rotated to a position where the hand base is positioned by a second positioning jig for positioning the hand base at the second reference position, and the second A second reference position specifying step of specifying the second reference position based on the value of the third encoder when the hand base unit is stopped at the stop position,
After the second reference position specifying process, the second arm is disposed at the first reference position specified in the first reference position specifying process, and the second reference position specified in the second reference position specifying process And a hand fork positioning step of positioning the hand fork by a third positioning jig for positioning the hand fork at the third reference position in a state in which the hand base is disposed How to adjust the industrial robot. The method of claim 1,
When the second arm part is in the first reference position, the first arm part and the second arm part overlap in the vertical direction,
When the hand base portion is in the second reference position, the second arm portion and the hand fork overlap in the vertical direction. The method of claim 2,
The first positioning jig includes a first fixing member fixed to one of the first arm and the second arm, a first insertion hole formed on the other of the first arm and the second arm, and the A method of adjusting an industrial robot, comprising: a first pin inserted into a first through hole formed in the first fixing member. The method according to claim 2 or 3,
The second positioning jig includes a second fixing member fixed to one of the first arm and the hand base, a second insertion hole formed on the other of the first arm and the hand base, and the A method of adjusting an industrial robot, comprising: a second pin inserted into a second through hole formed in the second fixing member. The method according to claim 2 or 3,
The hand has two hand forks,
The third positioning jig includes a third fixing member fixed to one of the two hand forks and the second arm portion, and a third insertion hole formed on the other of the two hand forks and the second arm portion And a third pin inserted into a third through hole formed in the third fixing member. The method of claim 5,
The hand includes two second hand forks extending in a direction opposite to the hand fork from the hand base,
The adjustment method of the industrial robot includes, after the hand fork positioning step, rotating the hand base part 180° and using the third positioning jig, the long side direction of the second hand fork relative to the hand base part And a second hand fork positioning step of positioning the two second hand forks at a predetermined reference position of the second hand fork in a direction orthogonal to. The method of claim 4,
The hand has two hand forks,
The third positioning jig includes a third fixing member fixed to one of the two hand forks and the second arm portion, and a third insertion hole formed on the other of the two hand forks and the second arm portion And a third pin inserted into a third through hole formed in the third fixing member. The method of claim 7,
The hand includes two second hand forks extending in a direction opposite to the hand fork from the hand base,
The adjustment method of the industrial robot includes, after the hand fork positioning step, rotating the hand base part 180° and using the third positioning jig, the long side direction of the second hand fork relative to the hand base part And a second hand fork positioning step of positioning the two second hand forks at a predetermined reference position of the second hand fork in a direction orthogonal to.

Images