KR102213545B1 - Method of calculating correcting value of industrial robot - Google Patents

Abstract

[Task] A method of calculating a correction value for an industrial robot that can relatively easily calculate a correction value for correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange. to provide.
[Solution means] In the method of calculating the correction value of the industrial robot, in the reference position specifying step, the first arm 15, the second arm 16 and the hand 8 are rotatably connected to one member. A reference value of the encoder is specified based on the result of moving the member to the reference position. In the correction value calculation process, the hand fork 18 equipped with the light-shielding detection panel 40 is moved to the delivery position of the object to be conveyed in the chamber 6, and the detection panel at the delivery position ( The amount of shift between the reference position of 40) and the stop position of the detection panel 40 is detected based on the imaging result by the camera, and a correction value when the first arm 15 is driven by a motor is calculated.

Description

How to calculate the correction value of industrial robot {METHOD OF CALCULATING CORRECTING VALUE OF INDUSTRIAL ROBOT}

The present invention relates to a method for calculating a correction value for an industrial robot for calculating a correction value for correcting the motion of the industrial robot.

Conventionally, an industrial robot that transports a glass substrate is known (see, for example, Patent Document 1). The industrial robot described in Patent Document 1 is a horizontal articulated robot built in and used in an organic EL (organic electroluminescence) display manufacturing system, and a hand on which a glass substrate is mounted, and a hand rotatably connected to the distal end side And a body portion to which the arm to be formed and a base end side of the arm are rotatably connected.

The arm includes a first arm portion whose base end side is rotatably connected to the body portion, and a second arm portion whose base end side is rotatably connected to the front end side of the first arm portion. The hand includes a hand base portion rotatably connected to the distal end side of the second arm portion, and a hand fork to which a glass substrate is mounted while being fixed to the hand base portion. In addition, the industrial robot described in Patent Document 1 has a motor for rotating the first arm portion with respect to the main body portion, a motor for rotating the second arm portion with respect to the first arm portion, and rotating the hand base portion with respect to the second arm portion. It is equipped with a motor for.

Japanese Patent Publication No. 2015-139854

When the industrial robot described in Patent Document 1 is installed in a manufacturing system such as an organic EL display, in order to create an operation program for the industrial robot, generally, the teaching work of the industrial robot is performed. In addition, for example, when the industrial robot installed in the manufacturing system is exchanged or the motor of the industrial robot is exchanged, the robot coordinate system of the industrial robot after the exchange is changed to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange. It deviates. Therefore, even when the industrial robot is replaced or the motor of the industrial robot is replaced, the teaching work of the industrial robot is generally performed again.

On the other hand, by correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange, there is no need to perform the complicated teaching work again. Therefore, the inventor of the present application is considering calculating a correction value for correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange, and correcting the deviation. . When calculating the correction value for correcting the deviation, it is preferable that the correction value can be easily calculated.

Therefore, an object of the present invention is to provide an industrial robot capable of relatively easily calculating a correction value for correcting the deviation of the robot coordinate system of the industrial robot after exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange It is to provide a method of calculating the correction value.

In order to solve the above problems, the present invention is a method for calculating a correction value for an industrial robot for calculating a correction value for correcting the motion of the industrial robot, wherein the industrial robot includes a main body and a base end side of the main body rotated. The first arm is connected to the possible, the second arm is rotatably connected to the distal end of the first arm, and the proximal end is rotatably connected to the distal end of the second arm. One of the first arm, the second arm, and the hand, which has a hand having a mounted hand fork, and one of the two members rotatably connected to each other is referred to as one member and the other member is referred to as the other member. The value of the encoder at the stop position when the other member is moved so as to stop at the reference position of the other member relative to the member, and the other member is moved from the stop position to the reference position. A reference position specifying process for specifying a reference value of the encoder corresponding to the reference position of the other member based on the value of the encoder when it is moved to the position determined by the positioning jig, and reflecting the reference value Under the conditions, the first arm, the second arm, and the hand are motor-driven to set the industrial robot to a virtual reference posture, and after the robot operation process, the industrial robot is operated to The hand fork on which the light-shielding detection panel is mounted is moved to the delivery position of, and the reference position of the detection panel at the delivery position when the detection panel is imaged by a camera and the detection use It is characterized by including a correction value calculation step of calculating a correction value when the first arm is driven by a motor based on the amount of shift in the stop position of the panel.

In the method for calculating the correction value of the industrial robot of the present invention, in the reference position specifying step, the first arm, the second arm, and the hand are stopped when the other member rotatably connected to one member is moved to the reference position. Based on the value of the encoder at the position and the value of the encoder moving the other member from the stop position to the reference position, the reference value of the encoder corresponding to the reference position of the other member is specified, and then in the robot operation process, the reference value The industrial robot is set as a virtual reference posture under the condition reflecting the value, and in the correction value calculation process, the industrial robot is operated and a hand fork equipped with a light-shielding detection panel is placed as the transfer position of the object to be conveyed in the chamber. Move. Next, based on the amount of deviation between the reference position of the detection panel and the stop position of the detection panel at the transmission position when the detection panel is imaged by the camera, a correction value when driving the first arm is calculated. do. Therefore, even without actually performing a complicated and laborious teaching work, it is relatively easy to relatively easily correct the deviation of the robot coordinate system of the industrial robot after the exchange to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange. Can be calculated. In addition, since the imaging result of the detection panel in the camera is used, the amount of shift can be detected from the imaging result without motor-driving the first arm, so that the correction value when motor-driving the first arm is easily Can be calculated.

In the present invention, an aspect in which a light-shielding member provided with a reference mark indicating a reference position of the detection panel is disposed at the transmission position can be adopted.

In the present invention, the reference mark may adopt an aspect including a hole penetrating the member.

In the present invention, the conveyance object is a rectangular substrate, and the detection panel includes a first detection portion and a first detection unit overlapping each of two angles positioned diagonally to the substrate when the substrate is mounted on the hand fork. 2 It is possible to adopt a mode in which a first camera is provided with a detection target and a second camera is used as the camera, the first detection part entering the field of view and the second detection part entering the field of view.

In the present invention, as the member, a light-shielding first member that enters the reference mark into the field of view of the first camera and a light-shielding second member that enters the reference mark into the field of view of the second camera are transferred to the transmission position. It is possible to adopt an aspect arranged in the.

In the present invention, it is possible to adopt an aspect of having a plurality of chambers in which the transfer object is transferred, and in the step of calculating the correction value, moving the hand fork to a transfer position of the transfer object in the plurality of chambers. have.

In the present invention, in the plurality of chambers, a loader chamber in which the object to be conveyed is carried from outside, an unloader chamber in which the object to be conveyed is carried out to the outside, and a processing for the object to be conveyed A process chamber is included, and as the correction value calculation step, the hand fork is moved to a delivery position of the transport object in the loader chamber or to a delivery position of the transport object in the unloader chamber. An aspect of performing a correction value calculating step and a second correction value calculating step of moving the hand fork to a delivery position of the conveyed object in the process chamber can be adopted.

In the present invention, as the reference position specifying process, a first reference position specifying process in which the two members are the first arm and the second arm, and a second reference position in which the two members are the second arm and the hand An aspect of performing a specific process can be adopted. In the present invention, after the reference position specifying step, before the correction value calculation step, in a state where the hand base part is stopped at the reference position with respect to the second arm part, the hand fork is positioned on the hand by a positioning jig. An aspect in which the hand fork positioning step to be determined is performed can be adopted.

In the method for calculating the correction value of the industrial robot of the present invention, in the reference position specifying step, the first arm, the second arm, and the hand are stopped when the other member rotatably connected to one member is moved to the reference position. Based on the value of the encoder at the position and the value of the encoder moving the other member from the stop position to the reference position, the reference value of the encoder corresponding to the reference position of the other member is specified, and then in the robot operation process, the reference value The industrial robot is set as a virtual reference posture under the condition reflecting the value, and in the correction value calculation process, the industrial robot is operated and a hand fork equipped with a light-shielding detection panel is placed as the transfer position of the object to be conveyed in the chamber. Move. Next, based on the amount of deviation between the reference position of the detection panel and the stop position of the detection panel at the transmission position when the detection panel is imaged by the camera, a correction value when driving the first arm part is calculated. Calculate. Therefore, even without actually performing a complicated and laborious teaching work, it is relatively easy to relatively easily correct the deviation of the robot coordinate system of the industrial robot after the exchange to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange. Can be calculated. In addition, since the imaging result of the detection panel in the camera is used, the amount of shift can be detected from the imaging result without motor-driving the first arm, so that the correction value when the first arm is motor-driven can be easily adjusted. Can be calculated.

1 is a diagram of an industrial robot in which a correction value is calculated by a method of calculating a correction value for an industrial robot according to an embodiment of the present invention, (A) is a plan view and (B) is a side view.
FIG. 2 is a plan view showing a state in which the industrial robot shown in FIG. 1 is incorporated in a manufacturing system for an organic EL display.
3 is a block diagram for explaining the configuration of the industrial robot shown in FIG. 1.
FIG. 4 is an explanatory diagram showing the movement of the industrial robot when carrying out and carrying in a substrate to the chamber shown in FIG. 2.
FIG. 5 is an explanatory view showing the movement of the industrial robot when carrying a substrate into the process chamber shown in FIG. 2.
FIG. 6 is an explanatory view showing the movement of the industrial robot when carrying a substrate into the process chamber shown in FIG. 2.
FIG. 7 is an explanatory diagram showing the movement of the industrial robot when carrying a substrate into the process chamber shown in FIG. 2.
FIG. 8 is an explanatory diagram showing the movement of the industrial robot when carrying a substrate into the process chamber shown in FIG. 2.
FIG. 9 is a diagram of a state in which a first positioning jig, a second positioning jig, and a third positioning jig are installed in the industrial robot shown in FIG. 1, (A) is a plan view, and (B) is a side view.
FIG. 10(A) is an enlarged view of part E of FIG. 9(B), (B) is a view showing a first positioning jig and the like from the FF direction of (A), and (C) is, ( It is an enlarged view of part G of A).
FIG. 11(A) is an enlarged view of a portion H of FIG. 9(B), (B) is a view showing a second positioning jig and the like from the JJ direction of (A), and (C) is, ( It is an enlarged view of part K of A).
FIG. 12(A) is an enlarged view of part L of FIG. 9(A), (B) is an enlarged view of part M of FIG. 9(B), and (C) is an NN direction of (B) It is a figure which shows the 3rd positioning jig etc. from, (D) is an enlarged view of the P part of (B).
FIG. 13 is an explanatory view of a state in which the detection panel used in the correction value calculation step of calculating the correction value of the first arm shown in FIG. 1 is mounted on the hand fork.
FIG. 14 is a diagram for explaining the operation of the robot in a correction value calculation step of calculating a correction value of the first arm shown in FIG. 1.
FIG. 15 is an explanatory diagram showing a field of view of a camera in a correction value calculation step of calculating a correction value of the first dark portion shown in FIG. 1.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Composition of industrial robot)

1 is a diagram of an industrial robot 1 in which a correction value is calculated by a method of calculating a correction value for an industrial robot according to an embodiment of the present invention, where (A) is a plan view and (B) is a side view. FIG. 2 is a plan view showing a state in which the industrial robot 1 shown in FIG. 1 is incorporated in the manufacturing system 3 of an organic EL display. 3 is a block diagram for explaining the configuration of the industrial robot 1 shown in FIG. 1. In addition, in FIG. 1(B) and FIG. 2, illustration of the support part provided on the hand forks 18 and 19 is omitted.

The industrial robot 1 (hereinafter referred to as "robot 1") shown in FIG. 1 refers to the glass substrate 2 for organic EL displays (hereinafter referred to as "substrate 2") as a conveyance object. It is a robot for transport. As shown in FIG. 2, this robot 1 is a horizontal articulated robot built in and used in the manufacturing system 3 of an organic EL display. The manufacturing system 3 includes a transfer chamber 4 (hereinafter referred to as "chamber 4") disposed at the center, and a plurality of chambers 5 to 7 disposed to surround the chamber 4 Are doing.

The chamber 5 is a process chamber for performing a predetermined process on the substrate 2. In this embodiment, a plurality of chambers 5 are provided. In this embodiment, two process chambers 51 and 52 are provided as chambers 5 and two process chambers 53 and 54 provided on the opposite side of the transfer chamber 4 to the process chambers 51 and 52 are provided. Further, the chamber 6 is, for example, a supply chamber (loader chamber) in which the substrate 2 supplied to the manufacturing system 3 is accommodated, and the chamber 7 is, for example, a manufacturing system 3 It is a discharge chamber (unloader chamber) in which the substrate 2 discharged from) is accommodated. The interior of the chambers 4 to 7 is vacuum. Inside the chamber 4, a part of the robot 1 is arranged. The hand forks 18, 19, which will be described later that constitute the robot 1, enter the chambers 5 to 7, so that the robot 1 transports the substrate 2 between the plurality of chambers 5 to 7 do.

As shown in Fig. 1, the robot 1 includes a hand 8 on which the substrate 2 is mounted, an arm 9 to which the hand 8 is rotatably connected to the distal end side, and the arm 9 The base end side is provided with a body portion 10 that is connected to be rotatable. The hand 8 and the arm 9 are disposed above the main body 10. The main body 10 includes a lifting mechanism for lifting the arm 9 and a case body 13 in which the lifting mechanism is accommodated. The case body 13 is formed in a substantially bottomed cylindrical shape. A flange 14 formed in a disk shape is fixed to the upper end of the case body 13.

As described above, a part of the robot 1 is disposed inside the chamber 4. Specifically, a portion of the robot 1 above the lower end surface of the flange 14 is disposed inside the chamber 4. That is, a portion of the robot 1 above the lower end surface of the flange 14 is disposed in the vacuum region VR, and the hand 8 and the arm 9 are in the vacuum chamber (during vacuum). It is placed. On the other hand, a portion of the robot 1 lower than the lower end surface of the flange 14 is disposed in the waiting area AR (in the atmosphere).

The arm 9 is provided with a first arm portion 15 and a second arm portion 16 that are rotatably connected to each other. The arm 9 of this embodiment is constituted by two arm portions, the first arm portion 15 and the second arm portion 16. The base end side of the first arm 15 is connected to the main body 10 so as to be rotatable. To the front end side of the first arm 15, the base end side of the second arm 16 is rotatably connected. The hand 8 is connected to the front end side of the second arm 16 so as to be rotatable. Further, in the first arm 15, a counter weight 28 is provided on the side opposite to the extending direction of the first arm 15.

The second arm portion 16 is disposed above the first arm portion 15. In addition, the hand 8 is disposed above the second arm 16. The center of rotation of the first arm 15 with respect to the main body 10 (first rotation center C1) and the center of rotation of the second arm 16 with respect to the first arm 15 (the second rotation center C2 )) is the rotation center of the second arm 16 relative to the first arm 15 (the second rotation center C2) and the rotation center of the hand 8 relative to the second arm 16 (third It is equal to the distance of the center of rotation (C3).

The hand 8 is provided with a hand base 17 rotatably connected to the distal end side of the second arm 16 and hand forks 18 and 19 on which the substrate 2 is mounted. The hand 8 of this embodiment is provided with two hand forks 18 and two hand forks 19. The hand forks 18 and 19 are formed in a straight line. The hand fork 18 and the hand fork 19 are formed in the same shape. The two hand forks 18 are arranged in parallel with each other having a predetermined distance. The hand fork 18 extends from the hand base 17 in one direction in the horizontal direction. The two hand forks 19 are arranged in parallel with each other having a predetermined distance. The hand fork 19 extends from the hand base 17 in a direction opposite to the hand fork 18.

The hand forks 18 and 19 are fixed to the hand base 17. Specifically, the hand forks 18 and 19 are fixed to the hand base portion 17 with a fixing screw. The hand forks 18 and 19 are provided with insertion holes through which fixing screws are inserted. This insertion hole is a long hole in which a direction orthogonal to the long side direction of the hand forks 18, 19 is a long side direction, and in a direction orthogonal to the long side direction of the hand forks 18, 19, the hand It is possible to adjust the fixing positions of the hand forks 18 and 19 relative to the base 17.

In this embodiment, one substrate 2 is mounted on two hand forks 18. In addition, one substrate 2 is mounted on two hand forks 19. On the upper surface of the hand fork 18, a positioning member for positioning the substrate 2 to be mounted is provided. A positioning member for positioning the substrate 2 to be mounted is also provided on the upper surface of the hand fork 19.

In this embodiment, the two hand forks 18 include a plurality of first support portions 181 protruding in a direction spaced apart from each other, and two first support portions positioned at both ends of the plurality of first support portions 181 A plurality of second support portions 182 protruding in opposite directions from each of the 181 are provided. Positioning members 183 and 184 for positioning the substrate 2 are provided at respective distal ends of the plurality of first support portions 181 and respective distal ends of the plurality of second support portions 182. In addition, although the hand fork 19 has the same structure, the illustration of a 1st support part, a 2nd support part, etc. is omitted.

In addition, the robot 1 includes a motor 21 for rotating the first arm 15 with respect to the main body 10 and a motor 21 for rotating the second arm 16 with respect to the first arm 15 (22), a motor 23 for rotating the hand base 17 with respect to the second arm 16, an encoder 24 for detecting the amount of rotation of the motor 21, and a motor 22 An encoder 25 for detecting the amount of rotation of the motor 23 and an encoder 26 for detecting the amount of rotation of the motor 23 are provided (see Fig. 3).

The encoder 24 is attached to the motor 21. The encoder 25 is installed in the motor 22, and the encoder 26 is installed in the motor 23. The motor 21 and the encoder 24 are arranged inside the main body 10, for example. Further, the motors 22 and 23 and the encoders 25 and 26 are arranged inside the first arm 15, for example. The motors 21 to 23 are electrically connected to the control unit 27 of the robot 1. The encoders 24 to 26 are also electrically connected to the control unit 27. The motor 21 of this embodiment is a first motor, the motor 22 is a second motor, and the motor 23 is a third motor. Further, encoder 24 is a first encoder, encoder 25 is a second encoder, and encoder 26 is a third encoder.

In addition, the robot 1 includes an origin sensor 31 for detecting the origin position of the first arm 15 in the rotation direction of the first arm 15 with respect to the main body 10, and the first arm. The origin sensor 32 for detecting the position of the origin of the second arm 16 in the rotation direction of the second arm 16 relative to (15), and the hand base portion 17 for the second arm 16 ) Is provided with an origin sensor 33 for detecting the origin position of the hand base 17 in the rotation direction of ). The origin sensor 31 of this embodiment is a first origin sensor, the origin sensor 32 is a second origin sensor, and the origin sensor 33 is a third origin sensor.

The origin sensors 31 to 33 are proximity sensors, for example. Alternatively, the origin sensors 31 to 33 are optical sensors having a light emitting element and a light receiving element, for example. The origin sensors 31 to 33 are electrically connected to the control unit 27. In the joint portion that is a connection portion between the body portion 10 and the first arm portion 15, the origin sensor 31 is fixed to either of the body portion 10 and the first arm portion 15, and the body portion 10 And a detection member detected by the origin sensor 31 when the first arm 15 is at the origin position is fixed to the other of the first arm 15.

Similarly, in the joint part which is the connection part of the 1st arm part 15 and the 2nd arm part 16, the origin sensor 32 is fixed to either of the 1st arm part 15 and the 2nd arm part 16, and A detection member that is detected by the origin sensor 32 when the second arm 16 is at the origin position is fixed to the other of the first arm 15 and the second arm 16. In addition, in the joint portion, which is a connection portion between the second arm portion 16 and the hand base portion 17, the origin sensor 33 is fixed to either of the second arm portion 16 and the hand base portion 17, and 2 A detection member that is detected by the origin sensor 33 when the hand base 17 is in the origin position is fixed to the other of the arm 16 and the hand base 17.

(Schematic operation of industrial robot)

FIG. 4 is an explanatory view showing the movement of the industrial robot 1 when the substrate 2 is carried out and carried in the chamber 5 and the chamber 6 shown in FIG. 2. FIG. 5 is an explanatory diagram showing the movement of the industrial robot 1 when carrying the substrate 2 into the process chamber 51 shown in FIG. 2. 6 is an explanatory view showing the movement of the industrial robot 1 when carrying the substrate 2 into the process chamber 5 shown in FIG. 1. 7 is an explanatory view showing the movement of the industrial robot 1 when carrying the substrate 2 into the process chamber 53 shown in FIG. 1. FIG. 8 is an explanatory diagram showing the movement of the industrial robot 1 when carrying the substrate 2 into the process chamber 54 shown in FIG. 1. In addition, in FIGS. 4 to 8, illustration of the support provided on the hand forks 18 and 19 is omitted.

The robot 1 drives the motors 21, 22, and 23 to transport the substrate 2 between the chambers 5, 6, and 7. For example, as shown in FIG. 4, the robot 1 carries the substrate 2 out of the chamber 6 and carries the substrate 2 into the chamber 7. More specifically, the robot 1 extends the arm 9 in the chamber 6 with the hand fork 18 parallel to the left and right directions, as shown in FIG. 4A. The substrate 2 is received. In addition, as shown in FIG. 4B, the arm 9 is closed until the first arm 15 and the second arm 16 overlap in the vertical direction, and the substrate 2 is removed from the chamber 6. Take it out. Further, after rotating the hand 8 by 180°, the robot 1 extends the arm 9 to carry the substrate 2 into the chamber 7 as shown in Fig. 5C. When carrying out the substrate 2 from the chamber 6 and when carrying the substrate 2 into the chamber 7, when viewed from the vertical direction, the center of the third rotation of the hand 8 with respect to the second arm 16 (C3) linearly moves on an imaginary line parallel to the left-right direction passing through the first rotation center C1. That is, when carrying out the substrate 2 from the chamber 6 and carrying the substrate 2 into the chamber 7, when viewed from the vertical direction, the hand 8 moves linearly in the right direction. As such, in the chambers 6 and 7, the first rotation center C1 is located on the extension line of the movement trajectory of the hand 8 when the hand 8 moves linearly toward the chamber 6 and 7 This is the first chamber.

As shown in FIG. 5, the robot 1 carries the substrate 2 into the process chamber 51. In this case, the robot 1 first drives the motors 21, 22 and 23 from the state in which the arm 9 is closed, as shown in Fig. 5A, As shown, the hand fork 18 is parallel to the front-rear direction and the substrate 2 is disposed on the rear end side of the hand 8, and in the left and right direction, the third rotation center C3 is left and right. The hand 8, the first arm 15 and the second arm 16 are rotated so that the center of the process chamber 51 in the direction is substantially coincident. After that, the robot 1 extends the arm 9 and causes the substrate 2 to be carried into the process chamber 51 as shown in FIG. 5C. At this time, when viewed from the vertical direction, the third rotation center C3 linearly moves on an imaginary line parallel to the front-rear direction passing through the center of the process chamber 51 in the left-right direction.

As shown in FIG. 6, the robot 1 carries the substrate 2 into the process chamber 52. In this case, the robot 1 first drives the motors 21, 22, 23 from the state in which the arm 9 is closed, as shown in Fig. 6A, As shown, the hand fork 18 is parallel to the front-rear direction and the substrate 2 is disposed on the rear end side of the hand 8, and in the left and right direction, the third rotation center C3 is left and right. The hand 8, the first arm 15 and the second arm 16 are rotated so that the center of the process chamber 52 in the direction is substantially coincident. After that, the robot 1 extends the arm 9 and causes the substrate 2 to be carried into the process chamber 52 as shown in FIG. 6C. At this time, when viewed from the vertical direction, the third rotation center C3 moves linearly on an imaginary line parallel to the front-rear direction passing through the center of the process chamber 52 in the left-right direction.

In this form, the process chambers 51 and 52 are all first at a position that is laterally shifted from the extension line of the movement trajectory of the hand 8 when the hand 8 moves linearly toward the inside of the chambers 51 and 52. The rotation center C1 is located, and as shown in Fig. 6B, the second rotation center C2 is more of the hand 8 than the first rotation center C1 and the third rotation center C3. It is a second chamber that passes through a process located on the side in the progress direction (the process chamber 51 side or the process chamber 52 side).

As shown in FIG. 7, the robot 1 carries the substrate 2 into the process chamber 53. In this case, the robot 1 first drives the motors 21, 22, 23 from the state in which the arm 9 is closed, as shown in Fig. 7(A), As shown, the hand fork 18 is parallel to the front-rear direction and the substrate 2 is disposed on the front end side of the hand 8, and in the left-right direction, the third rotation center C3 and the left-right direction The hand 8, the first arm 15, and the second arm 16 are rotated so that the center of the process chamber 53 is substantially aligned. After that, the robot 1 extends the arm 9 and causes the substrate 2 to be carried into the process chamber 53 as shown in FIG. 7C. At this time, when viewed from the vertical direction, the third rotation center C3 moves linearly on an imaginary line parallel to the front-rear direction passing through the center of the process chamber 53 in the left-right direction.

As shown in FIG. 8, the robot 1 carries the substrate 2 into the process chamber 54. In this case, the robot 1 first drives the motors 21, 22, 23 from the state in which the arm 9 is closed, as shown in Fig. 8A, As shown, the hand fork 18 is parallel to the front-rear direction and the substrate 2 is disposed on the front end side of the hand 8, and in the left-right direction, the third rotation center C3 and the left-right direction The hand 8, the first arm portion 15, and the second arm portion 16 are rotated so that the center of the process chamber 54 is substantially aligned. After that, the robot 1 extends the arm 9 and causes the substrate 2 to be carried into the chamber 54 as shown in FIG. 8C. At this time, when viewed from the vertical direction, the third rotation center C3 moves linearly on an imaginary line parallel to the front-rear direction passing through the center of the process chamber 54 in the left-right direction.

In this form, the process chambers 53 and 54 are all at a position that is shifted laterally from the extension line of the movement trajectory of the hand 8 when the hand 8 moves linearly toward the inside of the chambers 51 and 52. The rotation center C1 is located, and the second rotation center C2 does not pass through the process of being located in front of the first rotation center C1 and the third rotation center C3, and the third rotation center C3 ) Is a third chamber that is always located on the side in the traveling direction of the hand 8 (process chamber 53 side or process chamber 54 side) than the second rotation center C2.

In addition, the same operation is performed when the substrate 2 is transported by the hand fork 19. Further, when carrying out the substrate 2 from the chamber 5, an operation opposite to that described above is performed.

(Calculation method of correction value for industrial robot)

FIG. 9 is a diagram of a state in which positioning jigs 36 to 38 are installed in the robot 1 shown in FIG. 1, (A) is a plan view and (B) is a side view. FIG. 10A is an enlarged view of part E in FIG. 9B, and FIG. 10B is a view showing the positioning jig 36 and the like from the FF direction in FIG. 10A. , FIG. 10C is an enlarged view of portion G of FIG. 10A. FIG. 11(A) is an enlarged view of a portion H of FIG. 9(B), and FIG. 11(B) is a view showing the positioning jig 37 and the like from the direction JJ of FIG. 11(A). , FIG. 11(C) is an enlarged view of part K of FIG. 11(A). FIG. 12(A) is an enlarged view of the L part of FIG. 9(A), FIG. 12(B) is an enlarged view of the M part of FIG. 9(B), and FIG. 12(C), It is a figure which shows the positioning jig 38 etc. from the NN direction of FIG. 12(B), and FIG. 12(D) is an enlarged view of the P part of FIG. 12(B).

When the robot 1 is installed in the manufacturing system 3, in order to create an operation program for the robot 1, the teaching work of the robot 1 is performed. In addition, for example, when the robot 1 installed in the manufacturing system 3 is replaced, the robot coordinate system of the robot 1 after the exchange is shifted from the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange. Therefore, it is necessary to perform the teaching work of the robot 1 again.

On the other hand, by correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange, there is no need to perform the complicated teaching work again. In this embodiment, if the robot 1 installed in the manufacturing system 3 is replaced so that it is not necessary to perform the cumbersome teaching work again after replacing the robot 1, the teaching work of the robot 1 before the replacement A correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange of the coordinates of the teaching position is calculated. That is, when one of the two members rotatably connected among the first arm 15, the second arm 16 and the hand 8 is referred to as one member and the other is referred to as the other member, the The value of the encoder at the stop position when the other member is moved to stop at the reference position of the other member, and the position at which the other member is positioned by the positioning jig from the stop position to the reference position. Based on the encoder value when moved to, a reference position specifying process that specifies the reference value of the encoder corresponding to the reference position of the other member is performed, and thereafter, correction to correct the operation of the robot 1 after replacement Calculate the value. Hereinafter, a method of calculating this correction value will be described.

In the following description, the predetermined reference position of the second arm portion 16 in the rotation direction of the second arm portion 16 with respect to the first arm portion 15 is referred to as a first reference position, and the second arm portion 16 The predetermined reference position of the hand base 17 in the rotation direction of the hand base 17 is referred to as the second reference position, and the direction of the long side of the hand fork 18 with respect to the hand base 17 The predetermined reference position of the hand fork 18 in the direction orthogonal to the third reference position is referred to as the third reference position, and the first arm portion 15 in the rotation direction of the first arm portion 15 with respect to the body portion 10 The predetermined reference position of is referred to as the fourth reference position.

In this embodiment, when the second arm portion 16 is at the first reference position, as shown in FIG. 9, the first arm portion 15 and the second arm portion 16 overlap in the vertical direction. Specifically, when the second arm portion 16 is in the first reference position, the second arm portion 16 may correspond to the long side direction of the first arm portion 15 and the long side direction of the second arm portion 16 when viewed from the vertical direction. The first arm 15 and the second arm 16 overlap in the vertical direction. In addition, in this embodiment, the origin position of the 2nd arm part 16 and the 1st reference position in the rotation direction of the 2nd arm part 16 with respect to the 1st arm part 15 correspond.

In addition, when the hand base part 17 is in the 2nd reference position, as shown in FIG. 9, the 2nd arm part 16 and the hand fork 18 overlap in the vertical direction. Specifically, when the hand base portion 17 is in the second reference position, the second arm portion 16 and the long side direction of the hand fork 18 coincide when viewed from the vertical direction. The arm 16 and the hand fork 18 overlap in the vertical direction. Further, in this embodiment, the position in which the hand base 17 is rotated 90° from the origin position of the hand base 17 in the rotation direction of the hand base 17 with respect to the second arm 16 is determined. 2 It is the standard position.

In addition, the fourth reference position may coincide with the origin position of the first arm 15 in the rotation direction of the first arm 15 with respect to the main body 10, The position in which the first arm 15 rotates by a predetermined angle from the origin position of the first arm 15 in the rotation direction of the first arm 15 may be the fourth reference position.

In addition, in this embodiment, a positioning jig 36 for positioning the second arm 16 at the first reference position, and a positioning jig for positioning the hand base 17 at the second reference position ( 37) and a positioning jig 38 for positioning the hand fork 18 at the third reference position. The positioning jig 36 of this form is a first positioning jig, the positioning jig 37 is a second positioning jig, and the positioning jig 38 is a third positioning jig. In addition, the positioning jig 38 is a hand fork 19 at a predetermined reference position of the hand fork 19 with respect to the hand base 17 in a direction orthogonal to the long side direction of the hand fork 19. It is also used to determine the location.

As shown in FIG. 10, the positioning jig 36 includes a fixing member 41 fixed to the first arm 15 and a pin 42. The fixing member 41 is fixed to the side surface of the base end portion of the first arm 15. A through hole 41a into which the pin 42 is inserted is formed in the fixing member 41. Further, an insertion hole 16a into which the pin 42 is inserted is formed on the side surface of the tip end of the second arm 16. When the pin 42 inserted in the through hole 41a of the fixing member 41 is inserted into the insertion hole 16a, the second arm 16 is strictly positioned at the first reference position. The fixing member 41 of this embodiment is a first fixing member, the pin 42 is a first pin, the insertion hole 16a is a first insertion hole, and the through hole 41a is a first through hole.

As shown in FIG. 11, the positioning jig 37 includes fixing members 43 and 44 fixed to the first arm 15 and a pin 45. The fixing member 43 is fixed to the side surface of the base end of the first arm 15. The fixing member 44 is fixed to the side surface of the fixing member 43. The fixing member 43 is formed with a groove for preventing interference with the fixing member 41. A tip end surface of a screw 46 for adjusting the vertical position of the fixing member 44 relative to the fixing member 43 is in contact with the bottom surface of the fixing member 44. The screw 46 is screwed to the screw holding member 47 fixed to the lower end surface of the fixing member 43.

A through hole 44a into which the pin 45 is inserted is formed in the fixing member 44. Further, an insertion hole 17a into which the pin 45 is inserted is formed on the side of the hand base 17. When the pin 45 inserted in the through hole 44a of the fixing member 44 is inserted into the insertion hole 17a, the hand base 17 is strictly positioned at the second reference position. The fixing members 43 and 44 of this form are a second fixing member, the pin 45 is a second pin, the insertion hole 17a is a second insertion hole, and the through hole 44a is a second through hole. .

As shown in FIG. 12, the positioning jig 38 is provided with the fixing members 48, 49 fixed to the two hand forks 18, and the pin 50. The fixing member 48 is fixed to the upper surfaces of the two hand forks 18. The fixing member 49 is fixed to the lower surface of the fixing member 48. A through hole 49a into which the pin 50 is inserted is formed in the fixing member 49. Further, an insertion hole 16b into which the pin 50 is inserted is formed on the side surface of the base end of the second arm 16. When the pin 50 inserted into the through hole 49a of the fixing member 49 is inserted into the insertion hole 16b, the two hand forks 18 are strictly positioned at the third reference position. The fixing members 48 and 49 of this form are a third fixing member, the pin 50 is a third pin, the insertion hole 16b is a third insertion hole, and the through hole 49a is a third through hole. .

For example, when the robot 1 installed in the manufacturing system 3 is replaced, first, the second arm 16 is rotated to the first reference position (origin position) based on the detection result of the origin sensor 32 Let it. That is, the second arm 16 is rotated and stopped based on the detection result of the origin sensor 32 so that the second arm 16 stops at the first reference position.

Further, based on the detection result of the origin sensor 33 and the detection result of the encoder 26, the hand base 17 is rotated to a second reference position (position rotated by 90 degrees from the origin position). For example, after rotating the hand base part 17 to the home position based on the detection result of the home sensor 33, the hand base part 17 is removed from the home position based on the detection result of the encoder 26. 2 Rotate to the reference position. That is, based on the detection result of the origin sensor 33 and the detection result of the encoder 26 so that the hand base 17 stops at the second reference position, the hand base 17 is rotated and stopped.

After that, the fixing members 41, 43, 44 are fixed to the first arm 15, and the fixing members 48, 49 are fixed to the two hand forks 18. In addition, the second arm 16 rotated to the first reference position based on the detection result of the origin sensor 32 is slightly shifted from the first reference position strictly. Similarly, the hand base portion 17 rotated to the second reference position based on the detection result of the origin sensor 33 and the detection result of the encoder 26 is slightly shifted from the second reference position strictly.

Thereafter, the second arm 16 is rotated with respect to the first arm 15 until the pin 42 inserted into the through hole 41a of the fixing member 41 is inserted into the insertion hole 16a and inserted. The pin 42 is inserted into the hole 16a, and the second arm 16 is precisely positioned at the first reference position. Further, the amount of rotation of the motor 22 at that time is detected by the encoder 25, and the control unit 27 uses the detection result by the encoder 25 to specify the first reference position of the second arm 16. do.

That is, the first, which is the stop position of the second arm 16 when the second arm 16 is stopped based on the detection result of the origin sensor 32 so that the second arm 16 stops at the first reference position. The detection result of the encoder 25 when the second arm 16 is rotated from the stop position to the position where the second arm 16 is positioned at the first reference position by the positioning jig 36, and the 1 A first reference position is specified based on the value of the encoder 25 when the second arm 16 is stopped at the stop position (first reference position specifying process).

After that, the pin 45 inserted into the through hole 44a of the fixing member 44 is inserted while the second arm 16 is disposed at the first reference position specified in the first reference position specifying process. Insert the pin 45 into the insertion hole 17a by rotating the hand base 17 with respect to the second arm 16 to the position where it fits into the hole 17a, and insert the pin 45 into the second reference position. ) Are strictly positioned. Further, the rotation amount of the motor 23 at that time is detected by the encoder 26, and the control unit 27 uses the detection result by the encoder 26 to specify the second reference position of the hand base 17. do.

That is, in a state in which the second arm 16 is arranged at the first reference position specified in the first reference position specifying process, the origin sensor 33 detects the hand base 17 to stop at the second reference position. Based on the result and the detection result of the encoder 26, from the second stop position, which is the stop position of the hand base 17 when the hand base 17 is stopped, the hand base part by the positioning jig 37 The detection result of the encoder 26 when the hand base 17 is rotated to the position where (17) is positioned, and the encoder 26 when the hand base 17 is stopped at the second stop position. A second reference position is specified based on the value of (second reference position specifying process).

Thereafter, the second arm portion 16 is disposed at the first reference position specified in the first reference position specifying process, and the hand base portion 17 is placed at the second reference position specified in the second reference position specifying process. In the arranged state, the pin 50 inserted into the through hole 49a of the fixing member 49 is inserted in the insertion hole 16b in a direction orthogonal to the long side direction of the hand fork 18. The two hand forks 18 are moved relative to the hand base 17 to insert the pin 50 into the insertion hole 16b, and the two hand forks 18 are positioned at the third reference position.

That is, the second arm portion 16 is disposed at the first reference position specified in the first reference position specifying process, and the hand base portion 17 is disposed at the second reference position specified in the second reference position specifying process. In this state, the two hand forks 18 are positioned by the positioning jig 38 (hand fork positioning process). The positioned hand fork 18 is fixed to the hand base 17 by screws.

After that, at least the positioning jigs 37 and 38 are separated, and the hand base 17 is rotated 180° with respect to the second arm 16. In this state, the fixing members 48 and 49 are fixed to the two hand forks 19. Further, until the pin 50 inserted into the through hole 49a of the fixing member 49 is fitted into the insertion hole 16b, the hand base portion (in a direction perpendicular to the direction of the long side of the hand fork 19) ( The two hand forks 19 are moved relative to 17) to insert the pin 50 into the insertion hole 16b, and the two hand forks 19 are positioned at a predetermined reference position. The positioned hand fork 19 is fixed to the hand base 17 by screws.

(Process of calculating the first correction value in the chamber 6 (first chamber))

FIG. 13 is an explanatory diagram of a state in which the detection panel 40 used in the correction value calculation step of calculating the correction value of the first arm 15 shown in FIG. 1 is mounted on the hand fork 18, (A ) Is a plan view and (B) is a cross-sectional view. 14 is a diagram for explaining the operation of the robot 1 in a correction value calculation step of calculating a correction value of the first arm 15 shown in FIG. 1. FIG. 15 is an explanatory view showing the field of view of the camera in the correction value calculation step of calculating the correction value of the first dark portion 15 shown in FIG. 1.

In this embodiment, it is an explanatory diagram of the correction value calculation process of calculating the correction value of the 1st arm part 15 used for the robot 1. In this embodiment, when performing the correction value calculation step after the first reference position specifying step and the second reference position specifying step, as shown in Fig. 13, the detection panel 40 is mounted on the two hand forks 18. Do (Panel mounting process).

The detection panel 40 is a light-shielding panel used when calculating a correction value. In this embodiment, since the object to be conveyed is a rectangular substrate 2, the detection panel 40 has two angles 2a, which are located diagonally when the substrate 2 is mounted on the hand fork 18. It is a plate-like member which exists to extend to connect 2b). More specifically, the detection panel 40 includes a first portion 81 present so as to extend linearly along the hand fork 18, and from the first portion 81, the substrate ( 2) The substrate 2 was mounted on the hand fork 18 from the second portion 82 and the first portion 81, which existed so as to extend obliquely to a position corresponding to the angle 2a when mounted. A third portion 83 is provided so as to extend obliquely to a position corresponding to the angle 2b at the time.

Further, the detection panel 40 is mounted on the two hand forks 18 in a state positioned on the upper surface of the hand fork 18. Specifically, when performing the correction value calculation process, in the hand fork 18, a positioning member 29 is attached to each of the plurality of convex receiving portions 185 for receiving the substrate 2 from below. It is fixed. The positioning member 29 has a positioning protrusion 290 that fits into the positioning hole 84 of the detection panel 40, and the detection panel 40 is formed on the positioning protrusion 290. Position is determined by

In this state, the rectangular first detected portion 821 and the second detected portion 831 formed at the ends of the second portion 82 and the third portion 83 of the detection panel 40 are the substrate 2 ) Is overlaid on the edges of each 2a, 2b of the substrate 2 when mounted on the hand fork 18.

Next, based on the detection result of the origin sensor 31, or the detection result of the origin sensor 31 and the detection result of the encoder 24 so that the first arm 15 stops at the fourth reference position, The motor 21 is driven and controlled based on the third stop position, which is the stop position of the first arm 15 when the first arm 15 is stopped, and the first reference specified in the first reference position specifying process In addition to driving and controlling the motor 22 based on the position, the motor 23 is driven and controlled based on the second reference position specified in the second reference position specifying process, so that the robot 1 is a virtual reference. Make it your posture (robot motion process).

That is, the motor 21 is driven and controlled based on the third stop position, and the motor 22 is driven and controlled based on the first reference position specified in the first reference position specifying process, and the second reference The motor 23 is driven and controlled based on the second reference position specified in the position specifying process, and the robot 1 is operated to the virtual home position. In this form, for example, the first arm portion 15 stops at the third stop position, the second arm portion 16 stops at the first reference position, and the hand base portion 17 is 90 from the second reference position. ° The state in which the robot 1 is stopped at the rotated position is the virtual home position (virtual reference posture). Such a home position is a state shown in Fig. 4B.

In addition, when the origin position of the first arm part 15 in the rotation direction of the first arm part 15 with respect to the body part 10 and the fourth reference position coincide, in the robot operation step, the fourth The first arm 15 is rotated and stopped based on the detection result of the origin sensor 31 so that the first arm 15 stops at the reference position. In addition, the position at which the first arm 15 rotates by a predetermined angle from the origin position of the first arm 15 in the rotation direction of the first arm 15 with respect to the main body 10 becomes the fourth reference position. If there is, in the robot operation process, the first arm 15 is based on the detection result of the origin sensor 31 and the detection result of the encoder 24 so that the first arm 15 stops at the fourth reference position. To stop by rotating. In addition, the 3rd stop position is slightly shifted from the 4th reference position strictly. In addition, the positioning jig 36 and 38 are separated before the robot operation process.

After that, the robot 1 is operated to move the hand fork 18 to the transfer position of the substrate 2 (hand movement process). For example, as shown in FIG. 14A, the hand fork 18 is moved to the delivery position of the substrate 2 in the chamber 6. Specifically, from the state shown in FIG. 4(B), the operation indicated by the arrow 6a in FIG. 4 is performed, and as shown in FIG. 4(A), the arm 9 is extended and the chamber 6 Move the hand fork 18 to the transfer position of the substrate 2 inside.

Here, in the chamber 6, as shown in FIG. 15, a reference member to which a reference mark indicating a fifth reference position is attached and a camera are disposed. In this embodiment, the positions of the two detection targets (the first detection target 821 and the second detection target 831) on the detection panel 40 are compared with the reference mark. Therefore, in the chamber 6, the light-shielding first member 86 to which the first reference mark 860 is attached, the light-shielding second member 87 to which the second reference mark 870 is attached, and The first camera 88 in which the 1 reference mark 860 and the first detected part 821 enter the field of view 88a, and the second reference mark 870 and the second detected part 831 are in the field of view 89a. An incoming second camera 89 is provided.

In this embodiment, the first member 86 and the second member 87 are plate-shaped members having light-shielding properties, and are fixed to the inner wall of the chamber 6 or the like. In addition, the first reference mark 860 and the second reference mark 870 are holes penetrating the first member 86 and the second member 87, respectively. In this embodiment, the first member 86 and the second member 87 are formed of a thin plate in portions in which the first reference mark 860 and the second reference mark 870 are formed.

Two of the first reference mark 860 and the second reference mark 870 indicate the fifth reference position. Specifically, by operating the robot 1 before replacement, in which the detection panel 40 is mounted on the hand fork 18, the hand fork 18 is moved to the transfer position of the substrate 2 in the chamber 6 When stopped, the positional relationship between the first reference mark 860 and the first detection unit 821 in the image pickup result by the first camera 88 and the second criterion in the image pickup result by the second camera 89 The positional relationship between the mark 870 and the second detected portion 831 is set as the fifth reference position in the rotation direction of the first arm 15 with respect to the body 10. Here, in the imaging result of the first camera 88, the amount of shift when the first reference mark 860 and the first detected portion 821 are shifted from a predetermined positional relationship, and the imaging of the second camera 89 In the result, the rotation direction and rotation angle of the first arm 15 corresponding to the amount of shift when the second reference mark 870 and the second detected portion 831 are shifted from a predetermined positional relationship are determined by the encoder 24 It is stored in the control unit 27 as a value corresponding to the detected value in ).

Therefore, in the correction value calculation process, the first reference mark 860 and the first detected part 821 have a predetermined positional relationship in the image pickup result of the first camera 88, and the second camera 89 captures the image. In the result, even if the first arm 15 is not rotated with respect to the main body 10 until the second reference mark 870 and the second detected part 831 reach a predetermined positional relationship, it corresponds to the amount of displacement. The control unit 27 may calculate a correction value based on the detected value of the encoder 24.

That is, as shown in Fig. 14A, when the hand fork 18 is moved to the transfer position of the substrate 2 in the chamber 6, the first criterion in the imaging result of the first camera 88 The mark 860 and the first detected part 821 deviate from a predetermined positional relationship, and the second reference mark 870 and the second detected part 831 are determined in the imaging result of the second camera 89 Let's say it was deviated from the positional relationship of. In this case, in the correction value calculation process, as shown in Fig. 14B, the first reference mark 860 and the first detected portion 821 have a predetermined positional relationship, and the second reference mark 870 The value of the encoder 24 when the first arm 15 is rotated with respect to the main body 10 by driving the motor 21 until the) and the second detected part 831 reach a predetermined positional relationship. Can be calculated as a correction value.

Thereafter, the motor 21 is driven and controlled by reflecting the correction value calculated in the correction value calculation process, and the motor 22 is driven and controlled based on the first reference position specified in the first reference position specifying process. Together, the motor 23 is driven and controlled based on the second reference position specified in the second reference position specifying process to return the robot 1 to the virtual home position. Specifically, from the state shown in Fig. 4A, the operation indicated by the arrow 6b in Fig. 4 is performed, and as shown in Fig. 4B, the operation is returned to the virtual home position.

Then, the robot 1 is operated again to move the hand fork 18 to the transfer position of the substrate 2. And, again, based on the imaging result of the first camera 88 and the imaging result of the second camera 89, the positional relationship between the first reference mark 860 and the first detection part 821 and the second reference mark After calculating a new correction value based on the positional relationship between 870 and the second detected portion 831, the new correction value (this time correction value) is reflected, and the motors 21, 22, 23 are similar to the previous time. By driving control, the robot 1 is returned to the virtual home position. Therefore, the correction values are sequentially updated.

By repeating such an operation, the latest correction value or the amount of misalignment (the amount of misalignment between the first reference mark 860 and the first detection unit 821 and the second reference mark 870 and the second detection unit 831) When the amount of shift of () becomes less than or equal to a preset threshold, the correction value is determined, the determined correction value is reflected to drive and control the motor 21, and the first reference position specified in the step In addition to driving and controlling the motor 22 based on the reference position, the motor 23 is driven and controlled based on the second reference position specified in the second reference position specifying process, thereby returning the robot 1. Make the position the regular home position.

When performing the above operation repeatedly, in any step, the forward path for moving the hand fork 18 from the virtual home position to the transfer position of the substrate 2 in the chamber 6 and the substrate 2 in the chamber 6 On the way back to the virtual home position from the state in which the hand fork 18 is positioned at the delivery position of the robot 1, the robot 1 is placed on the first arm 15, the second arm 16, and the hand 8 On the other hand, the same rotation operation as the operation shown in Fig. 4 is performed. Therefore, when performing the correction value calculation step, the influence of the backlash of the motor or the deceleration mechanism transmitted to the arm by decelerating the rotation of the motor is difficult to exert on the correction value.

In addition, in this embodiment, in the imaging result of the first camera 88, the first reference mark 860 and the first detected part 821 are shifted from a predetermined positional relationship, and the second camera 89 is also imaged. In the result, when the second reference mark 870 and the second detected part 831 are deviated from a predetermined positional relationship, the first arm 15 is not rotated with respect to the main body 10, and the amount of displacement is counteracted. The value of the encoder 24 to be performed was calculated as a correction value. However, after detecting the direction of the shift from the imaging result of the first camera 88 and the imaging result of the second camera 89, as shown in Fig. 14B, the first arm 15 is attached to the main body. With respect to (10), it may be rotated so as to eliminate the shift, and a correction value may be calculated based on the detected amount of the encoder 24 at that time. In either case, the correction value calculation process may be performed in the chamber 7.

(Process chamber 51 (second chamber) calculating the second correction value)

In this embodiment, after performing the correction value calculating process in the chamber 6, the correction value calculating process is similarly performed in the process chamber 51 as well. Accordingly, in the process chamber 51 as well as in the chamber 6, the first member 86 to which the first reference mark 860 is attached, the second member 87 to which the second reference mark 870 is attached, The first camera 88 in which the first reference mark 860 and the first detected part 821 enter the field of view, and the second camera 88 that the second reference mark 870 and the second detected part 831 enter the field of view ( 89) is provided.

Therefore, roughly the same as the process of calculating the correction value in the chamber 6, as shown in Fig. 5A, the state shown in Fig. 5B is changed from the state in which the robot 1 is located in the home position. Via the passage, the hand fork 18 is moved to the transfer position of the substrate 2 in the process chamber 51, and a correction value in the chamber 51 is calculated.

Thereafter, the motor 21 is driven and controlled by reflecting the correction value in the process chamber 51 calculated in the correction value calculation process, and the motor () based on the first reference position specified in the first reference position specifying process ( 22) is driven and controlled, the motor 23 is driven and controlled based on the second reference position specified in the second reference position specifying process, and the robot 1 is shown in FIG. 5B. By passing through, it is returned to the virtual home position shown in Fig. 5A.

Then, by operating the robot 1 again, the hand fork 18 is moved to the transfer position of the substrate 2 in the process chamber 51, a new correction value is calculated, and a new correction value (this time correction Value) to return the robot 1 to the virtual home position. Such an operation is repeatedly performed, and the correction value is determined when the latest correction value or the like becomes equal to or less than a preset threshold.

When performing the above operation repeatedly, in any process, the forward path for moving the hand fork 18 from the virtual home position to the transfer position of the substrate 2 in the process chamber 51 and the substrate in the process chamber 51 ( In the return way from the state in which the hand fork 18 is located at the delivery position of 2) to the virtual home position, the robot 1 is the first arm part 15, the second arm part 16, and the hand 8 ), the same rotation operation as the operation shown in Fig. 5 is performed. Therefore, when performing the correction value calculation step, the influence of the backlash of the motor or the deceleration mechanism transmitted to the arm by decelerating the rotation of the motor is difficult to exert on the correction value.

(3rd correction value calculation process in process chamber 53 (third chamber))

In this embodiment, after the correction value calculation process in the chamber 6 and the correction value calculation process in the process chamber 51 are performed, similarly, the correction value calculation process is also performed in the process chamber 53. Accordingly, in the process chamber 53 as well as in the chamber 6, the first member 86 to which the first reference mark 860 is attached, the second member 87 to which the second reference mark 870 is attached, The first camera 88 in which the first reference mark 860 and the first detected part 821 enter the field of view, and the second camera 88 that the second reference mark 870 and the second detected part 831 enter the field of view ( 89) is provided.

Therefore, roughly the same as in the process of calculating the correction value in the chamber 6, as shown in Fig. 7A, the state shown in Fig. 7B is changed from the state in which the robot 1 is located in the home position. Via the passage, the hand fork 18 is moved to the transfer position of the substrate 2 in the process chamber 53, and a correction value in the chamber 51 is calculated.

Thereafter, the motor 21 is driven and controlled by reflecting the correction value in the process chamber 53 calculated in the correction value calculation process, and the motor () based on the first reference position specified in the first reference position specifying process ( 22) is driven and controlled, the motor 23 is driven and controlled based on the second reference position specified in the second reference position specifying process, and the robot 1 is shown in Fig. 7B. Via the passage, it is returned to the virtual home position shown in Fig. 7A.

Then, again, the robot 1 is operated to move the hand fork 18 to the transfer position of the substrate 2 in the process chamber 53, a new correction value is calculated, and a new correction value (this time correction Value) to return the robot 1 to the virtual home position. Such an operation is repeatedly performed, and a correction value is determined when the latest correction value or the like becomes equal to or less than a preset threshold.

When repeating the above operation, in any step, the forward path for moving the hand fork 18 from the virtual home position to the transfer position of the substrate 2 in the process chamber 53 and the substrate in the process chamber 53 ( In the return way from the state in which the hand fork 18 is located at the delivery position of 2) to the virtual home position, the robot 1 is the first arm part 15, the second arm part 16, and the hand 8 ), the same rotation operation as the operation shown in Fig. 7 is performed. Therefore, when performing the correction value calculation step, the influence of the backlash of the motor or the deceleration mechanism transmitted to the arm by decelerating the rotation of the motor is difficult to exert on the correction value.

(Adjustment of the hand fork (19))

In this embodiment, after the correction value calculation process in the hand fork 18, the hand base 17 is rotated 180° and the detection panel 40 is replaced on the two hand forks 19 , Move the hand fork 19 to the transfer position of the substrate 2 in the chamber 6. At this time, in the imaging result of the first camera 88, the first reference mark 860 and the first detected part 821 are shifted from a predetermined positional relationship, and the second camera 89 is 2 When the reference mark 870 and the second detected part 831 deviate from a predetermined positional relationship, the first reference mark 860 and the first detected part 821 become a predetermined positional relationship, and the second The hand base in a direction perpendicular to the direction of the long side of the hand fork 19 using a positioning jig 38 so that the reference mark 870 and the second detected portion 831 have a predetermined positional relationship. Adjust the fixed position of the hand fork 19 relative to (17).

(Main effect of this form)

As described above, in this embodiment, the positioning jig 36 is used in the first reference position specifying step, and the second arm portion in the rotation direction of the second arm portion 16 relative to the first arm portion 15 The first reference position, which is the reference position of (16), is specified, and the rotation direction of the hand base portion 17 relative to the second arm portion 16 using the positioning jig 37 in the second reference position specifying step The hand fork 18 relative to the hand base 17 by a positioning jig 38 in the hand fork positioning step by specifying a second reference position that is the reference position of the hand base 17 in the The hand fork 18 is positioned at a third reference position that is a reference position of the hand fork 18 in a direction orthogonal to the direction of the long side of.

In addition, in this embodiment, in the subsequent robot operation process, the motor 22 is driven and controlled based on the first reference position specified in the first reference position specifying process, and specified in the second reference position specifying process. Based on the set second reference position, the motor 23 is driven and controlled to set the robot 1 to a virtual reference posture, and then, in the hand movement process, the hand fork 18 is placed in the chamber 6 and the process chamber. It moves to 51 and the process chamber 53, and performs a correction value calculation process, and calculates a correction value for controlling the motor 21. That is, in this embodiment, the hand fork 18 is placed in the chamber 6 and the process chamber 51 in a state in which the second arm 16, the hand base 17, and the hand fork 18 are aligned to a predetermined reference position. ) And the process chamber 53 to perform a correction value calculation step to calculate a correction value for controlling the motor 21 that drives the first arm 15.

Further, in this embodiment, by operating the robot 1 before replacement, in which the detection panel 40 is mounted on the hand fork 18, the hand fork is made to the chamber 6, the process chamber 51, and the process chamber 53. When (18) is moved, in the rotational direction of the first arm 15 with respect to the main body 10, the first detected part 821 and the second detected part 831 of the detection panel 40 The corresponding position is the fifth reference position. Therefore, in the present embodiment, by calculating a correction value for controlling the motor 21 in the correction value calculation step, the robot after exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange ( It becomes possible to calculate a correction value for correcting the deviation of the robot coordinate system in 1).

That is, in this embodiment, the rotation of the first arm 15 with respect to the main body 10 of the fifth reference position and the first detection part 821 and the second detection part 831 of the detection panel 40 A correction value for correcting the deviation of the robot coordinate system of the robot 1 after exchange with the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange by calculating a correction value based on the amount of deviation in the direction. It becomes possible to calculate Therefore, in this embodiment, it becomes possible to relatively easily calculate a correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange. .

Moreover, in this embodiment, since the correction value calculation process is performed in each of the chamber 6, the process chamber 51, and the process chamber 53, the accuracy of the correction value can be improved.

In addition, in this embodiment, in the correction value calculation process, the reference mark including the hole formed in the light-shielding detection panel 40 and the light-shielding member (the first member 86 and the second member 87) Since (the first reference mark 860 and the second reference mark 870) are used, it is suitable for imaging with a camera (the first camera 88 and the second camera 89). In addition, by using the imaging result by the camera (the first camera 88 and the second camera 89), even if the first arm 15 is not rotated with respect to the main body 10, the fifth reference position It becomes possible to obtain the amount of displacement of the detection panel 40. In addition, by using the imaging result by the camera (the first camera 88 and the second camera 89), even if the first arm 15 is not rotated with respect to the main body 10, the main body 10 On the other hand, the operation amount of the encoder 24 when the first arm 15 is rotated can be obtained, and such an operation amount can be calculated as a correction value.

In addition, in the correction value calculation process, the operation of moving the hand fork 18 to the chamber 6, the process chamber 51, and the process chamber 53, and the chamber 6, the process chamber 51, and the process chamber. When repeatedly performing the operation of returning to the virtual home position from 53, the robot 1 moves the first arm 15, the second arm 16 and the hand 8 as shown in FIG. 4 Perform the same rotational motion as. Therefore, when performing the correction value calculation step, the influence of the backlash of the motor or the deceleration mechanism transmitted to the arm by decelerating the rotation of the motor is difficult to exert on the correction value.

(Other embodiment)

Although the above-described form is an example of a preferred form of the present invention, it is not limited thereto, and various modifications can be made without changing the gist of the present invention.

In the above-described form, the position at which the second arm 16 rotates by a predetermined angle from the origin position of the second arm 16 in the rotation direction of the second arm 16 relative to the first arm 15 1 It may be the reference position. In this case, when the robot 1 installed in the manufacturing system 3 is replaced, the detection result of the origin sensor 32 and the detection result of the encoder 25 so that the second arm 16 stops at the first reference position. The second arm 16 is rotated based on and stopped.

In addition, in the above-described form, the origin position of the hand base part 17 in the rotation direction of the hand base part 17 with respect to the second arm part 16 and the second reference position may match. In this case, when the robot 1 installed in the manufacturing system 3 is replaced, the hand base 17 based on the detection result of the origin sensor 33 so that the hand base 17 stops at the second reference position. ) To stop. In addition, in the above-described aspect, the panel mounting step may be performed after the robot operation step.

In the above-described form, the first reference position specifying step, the second reference position specifying step, and the hand fork positioning step are performed with respect to the robot 1 installed in the manufacturing system 3, but installed in the manufacturing system 3 With respect to the previous robot 1, a first reference position specifying step, a second reference position specifying step, and a hand fork positioning step may be performed. For example, in the assembly factory of the robot 1, the robot 1 may be subjected to a first reference position specifying step, a second reference position specifying step, and a hand fork positioning step.

In addition, when transporting the robot 1 from the assembly plant to the manufacturing system 3, the hand forks 18 and 19 are separated so that the long hand forks 18 and 19 do not interfere with the transport. , When transporting the robot 1 from the assembly plant to the manufacturing system 3, in the assembly plant, a first reference position specifying step and a second reference position specifying step are performed with respect to the robot 1, and the manufacturing system The hand fork positioning process may be performed with respect to the robot 1 installed in (3).

In the above-described form, the fixing member 41 may be fixed to the second arm 16. In this case, an insertion hole as a first insertion hole into which the pin 42 is inserted is formed on the side surface of the base end of the first arm 15. In addition, in the above-described aspect, the fixing member 44 may be fixed to the hand base portion 17. In this case, an insertion hole as a second insertion hole into which the pin 45 is inserted is formed on the side surface of the base end of the first arm 15. In addition, in the above-described aspect, the fixing members 48 and 49 may be fixed to the second arm 16. In this case, an insertion hole as a third insertion hole into which the pin 50 is inserted is formed in the two hand forks 18.

In the above-described form, the hand 8 does not have to be provided with the hand fork 19. In addition, in the above-described form, the object to be transported by the robot 1 is the substrate for organic EL display 2, but the object to be transported by the robot 1 may be a glass substrate for a liquid crystal display, or a semiconductor wafer. It may be a back. In addition, in the form described above, the robot 1 may be disposed in a space at atmospheric pressure.

1: Robot (industrial robot)
2: Substrate (object to be transported)
5, 6, 7: chamber
8: hand
9: cancer
10: main body
15: first arm
16: second arm part
17: hand base
18: hand fork
21: motor (first motor)
22: motor (second motor)
23: motor (third motor)
24: encoder (first encoder)
25: encoder (second encoder)
26: encoder (third encoder)
31: origin sensor (first origin sensor)
32: origin sensor (second origin sensor)
33: origin sensor (third origin sensor)
36: positioning jig (first positioning jig)
37: positioning jig (2nd positioning jig)
38: positioning jig (third positioning jig)
80: detection panel
86: first member
87: second member
88: first camera
89: second camera
860: first reference mark
870: second reference mark
C1: center of the first rotation
C2: 2nd rotation center
C3: 3rd rotation center

Claims (12)

It is a method of calculating a correction value for an industrial robot that calculates a correction value for correcting the motion of an industrial robot
The industrial robot includes: a body portion, a first arm portion rotatably connected to a base end side of the body portion, a second arm portion rotatably connected to a front end portion of the first arm portion, and the second A hand having a hand base portion to which the base end side is rotatably connected to the distal end side of the arm portion and a hand fork on which the object to be conveyed is mounted
When one of the two members rotatably connected among the first arm, the second arm and the hand is referred to as one member and the other is the other member, the reference position of the other member with respect to the one member When the other member is moved to stop at, the first value of the encoder at the stop position of the other member, and the other member is moved from the stop position to a position determined by a positioning jig. A reference position specifying step of specifying a reference value of the encoder corresponding to the reference position of the other member, based on the second value of the encoder when set,
A robot operation step of driving the first arm, the second arm, and the hand into a virtual reference posture by driving the first arm, the second arm, and the hand under the condition reflecting the reference value;
After the robot operation process, the industrial robot is operated to move the hand fork equipped with a light-shielding detection panel to a delivery position of the transport object, and the transfer when the detection panel is imaged by a camera. A correction value calculation step of calculating a correction value when the first arm portion is driven by a motor based on a shift amount between a reference position of the detection panel in a position and a stop position of the detection panel,
A method for calculating a correction value of an industrial robot, characterized in that it has a. The method of claim 1,
A method for calculating a correction value for an industrial robot, characterized in that a light-shielding member having a reference mark indicating a reference position of the detection panel is disposed at the transfer position. The method of claim 2,
The reference mark, a method of calculating a correction value for an industrial robot, characterized in that it includes a hole through the member. The method according to claim 2 or 3,
The transport object is a rectangular substrate,
The detection panel includes a first detection portion and a second detection portion overlapping each of two angles positioned diagonally of the substrate when the substrate is mounted on the hand fork,
As the camera, a first camera that enters the field of view by the first detected part and a second camera that enters the field of view by the second detected part. The method of claim 4,
As the member, a first light-shielding member that enters the reference mark into the field of view of the first camera and a second light-shielding member that enters the reference mark into the field of view of the second camera are disposed at the transmission position. How to calculate the correction value for industrial robots. The method of claim 4,
It has a plurality of chambers in which the transport object is delivered,
During the correction value calculation process, the hand fork is moved to a delivery position of the transport object in the plurality of chambers. The method of claim 6,
The plurality of chambers include a loader chamber in which the conveyance object is carried in from the outside, an unloader chamber in which the conveyance object is carried out to the outside, and a process chamber in which processing of the conveyance object is performed. ,
As the correction value calculation step, a first correction value calculation step of moving the hand fork to a delivery position of the transport object in the loader chamber or to a delivery position of the transport object in the unloader chamber; A method for calculating a correction value for an industrial robot, characterized by performing a second correction value calculation step of moving the hand fork to a delivery position of the object to be conveyed in the process chamber. The method of claim 4,
As the reference position specifying process, performing a first reference position specifying process in which the two members are the first arm and the second arm, and a second reference position specifying process in which the two members are the second arm and the hand A method of calculating a correction value for an industrial robot, characterized in that. The method of claim 4,
After the reference position specifying step, a hand fork positioning step of positioning the hand fork on the hand is performed by a positioning jig while the hand base part is stopped at a reference position with respect to the second arm part. How to calculate the correction value of the industrial robot. The method of claim 1,
The movement of the hand fork from the reference posture to the transfer position and movement from the transfer position to the reference posture are repeatedly performed, and the correction value calculation process is performed a plurality of times to determine the correction value. How to calculate the correction value of the industrial robot. The method of claim 2,
It has a chamber through which the object to be conveyed is transferred,
The method of calculating a correction value for an industrial robot, wherein the light-shielding member having the reference mark is fixed to the chamber. The method of claim 1,
The main body part is referred to as the one member, and the first arm part is referred to as the other member to perform the reference position specifying step,
The first arm part is referred to as the one member, and the second arm part is referred to as the other member to perform the reference position specifying step,
The method for calculating a correction value for an industrial robot, wherein the second arm is referred to as the one member and the hand is referred to as the other member, and the reference position specifying step is performed.

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