JP2010162611A - Relative teaching method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a relative teaching method for a conveyance robot capable of conducting quick relative teaching with high reliability. <P>SOLUTION: When a conveyance operation is taught to the conveyance robot 1 for conveying a substrate S among a plurality of processing chambers L, P1 and P3 provided in a turning direction by turning and stretching a robot hand 13 while carrying the substrate in the same plane, coordinate data serving as reference when stretching for any one of the processing chambers is taught, and coordinate data serving as reference when stretching for the other processing chambers is taught based on the former coordinate data. When the coordinate data for one processing chamber is taught, its stretching orbit data is obtained. If stretching strokes of the conveyance robot differ between one processing chamber and the other processing chamber when the coordinate data for the other processing chambers is taught, the position of the robot hand is corrected from the stretching orbit data. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a transfer robot that rotates and expands and contracts in the same plane with a substrate to be processed supported by a robot hand, and transfers the substrate between a plurality of processing chambers arranged along the turning direction. The present invention also relates to a relative teaching method for a transfer robot that teaches the transfer operation.

  Conventionally, as a device for performing various processes such as a film forming process and an etching process by sputtering or CVD on a substrate, as shown in FIG. 1, a central transfer chamber T in which a transfer robot 1 is arranged is surrounded. The load lock chamber L of the substrate S and the plurality of processing chambers P1 to P3 are arranged (along the turning direction of the transfer robot 1), and the substrate S put into the load lock chamber L by the transfer robot 1 is disposed in each processing chamber. A processing apparatus (so-called cluster tool apparatus) configured to transfer a substrate S to P1 to P3 or between the processing chambers P1 to P5 is known.

  The transfer robot 1 includes a robot arm 11 and a driving unit 12 that drives the robot arm 11 so that the robot arm 11 can swing and extend on the same plane. A robot hand 13 that holds a substrate S is attached to the tip of the robot arm 11. It has been. Then, at the position where the robot hand 13 lifts up directly from the substrate stage Ps in any one of the processing chambers or directly above the substrate stage Ps (hereinafter referred to as “substrate delivery position”), the substrate S Then, the robot hand 13 is contracted, swiveled, and extended to transport the substrate S to another substrate delivery position in the processing chamber for delivery of the substrate. The robot arm 11 itself can be configured to be movable up and down.

  In such a transfer robot, all the transfer operations are determined in advance by a program, and teaching is performed in order to teach the operation position and order (transfer operation) of the transfer robot to this program. Here, for example, such teaching needs to be performed every time the robot hand 13 or the robot arm 11 is replaced for maintenance after the transport robot is assembled to the processing apparatus, and the teaching work is extremely troublesome. This becomes more pronounced as the number of processing chambers increases.

  In order to solve the above problem, if a position shift occurs in the transfer operation of the transfer robot, re-teaching is performed at one transfer position, and the error turning movement amount and error at the transfer position are determined from the movement amount and stored contents at that time. The amount of expansion / contraction movement is calculated, and from the structure of the substrate transfer robot and the cause of the positional deviation, the error turning movement amount and the error expansion / contraction movement amount are converted at other transfer positions, and the stored contents indicating the position of each transfer location are stored. Correction (so-called relative teaching method) is known from Patent Document 1, for example.

  By the way, in the above transfer robot, for example, when the robot arm is extended and contracted due to the influence of tilting or the like generated when the robot arm is assembled to the rotating shaft of the driving means, the substrate on the robot hand is the same. It does not move along the line, but actually moves while swinging left and right (turning direction) (so-called yawing of the transfer robot). For this reason, in the relative teaching method described in Patent Document 1, if the expansion and contraction strokes from the turning position of the robot arm to the substrate delivery position in the processing chamber to be taught are not constant with each other, positional deviation in the turning direction occurs and is high. The relative teaching cannot be performed quickly with reliability.

JP 2007-27378 A

  This invention makes it the subject to provide the relative teaching method of the conveyance robot which can perform a relative teaching rapidly with high reliability in view of the above point.

  In order to solve the above-mentioned problem, the relative teaching method of the transfer robot of the present invention should be processed by the robot hand of the transfer robot provided with the robot arm having the robot hand at the tip and the driving means for driving the robot arm. When the robot arm is swung and expanded and contracted in at least the same plane with the substrate supported, and the substrate is transported between a plurality of processing chambers arranged along the swivel direction, the transport operation is taught. A relative teaching method for a transfer robot that teaches coordinate data used as a reference when an expansion / contraction operation is performed with respect to any one of the processing chambers, and when the expansion / contraction operation is performed with respect to another processing chamber based on the coordinate data. Teaching the coordinate data used as a reference to the robot before the coordinate data in the one processing chamber is taught. If the expansion / contraction stroke of the robot arm to the one processing chamber and the other processing chamber is different from each other when the coordinate data in the other processing chamber is taught and the coordinate data in the other processing chamber is taught, The position of the robot hand is corrected.

  According to the present invention, the expansion and contraction trajectory data when the transfer robot performs expansion and contraction is acquired in advance, and when the relative teaching is performed on the other processing chamber based on the coordinate data for one processing chamber, the expansion and contraction trajectory is obtained. The position of the robot hand is corrected from the data. As a result, even when the expansion and contraction strokes to the substrate delivery position in each processing chamber are not constant, the transfer robot can be quickly and reliably taught its operation without causing any misalignment in the turning direction. A transfer robot with excellent performance can be provided. Note that the processing chamber includes a load lock chamber.

  In the present invention, the index portion provided to project outward from the robot hand is projected from the optical sensor along the expansion / contraction direction of the transfer robot, and the expansion / contraction trajectory data is obtained from the detection result of the optical sensor. A configuration to be used may be adopted.

  On the other hand, a configuration is adopted in which the index unit provided at a predetermined position of the robot hand is projected from the optical sensor in a direction orthogonal to the expansion / contraction direction of the transfer robot, and the expansion / contraction trajectory data is obtained from the detection result of the optical sensor. May be. Here, for example, when the index portion is constituted by a through hole formed at a predetermined position of the robot hand and this through hole is detected, either a transmission type or a reflection type can be used as the optical sensor. . On the other hand, for example, when the index portion is constituted by a reflecting plate having a predetermined area attached to a predetermined position on one side of the robot hand and this reflecting plate is detected, a reflection type optical sensor may be used.

  Further, in the present invention, before teaching the coordinate data serving as a reference to the one processing chamber, a predetermined portion of the robot arm is detected by a detecting means provided within a range in which the robot arm expands and contracts. When acquiring coordinate data and teaching coordinate data in another processing chamber, a predetermined part of the robot arm is detected by other detection means provided within the range in which the robot arm expands and contracts, and the detected coordinates If the position of the robot arm is corrected from the data, more accurate teaching can be realized for each processing chamber.

  By the way, as a transfer robot for a so-called cluster tool in which a plurality of processing chambers are connected, in order to improve throughput or the like, it is linked by appropriately controlling the rotation direction and the rotation angle of two concentrically arranged rotating shafts. In addition, an apparatus provided with two robot arms that rotate or extend / contract is also used, and an apparatus that can simultaneously transfer substrates to two processing chambers is also known.

  For such a transfer robot, it is desirable that the relative teaching as described above can be performed in consideration of workability. In particular, the position when the robot hand extends between the robot arms is turned. If the substrate is transferred by one robot hand in one of the processing chambers and the substrate is transferred by the other robot hand, the substrate will rotate. Deviation in direction or expansion / contraction direction occurs.

  For this reason, the transfer robot is provided with a plurality of robot arms that rotate or extend and retract in conjunction with each other by controlling the rotation direction and rotation angle of a plurality of rotation shafts arranged concentrically, Prior to teaching reference coordinate data to one processing chamber, the same predetermined portion of each robot arm is detected by the same detection means provided within the range in which each robot arm turns or expands and contracts. If the coordinate data at that time do not match each other, either one robot arm is used as a reference, and correction is made according to the difference in the coordinate data of the other, or obtained from two robot arms. It is preferable to correct the coordinate data so that they match each other. Accordingly, it is possible to prevent the substrate from being displaced in the turning direction and the expansion / contraction direction in each processing chamber, and to quickly teach the operation to the transfer robot with high reliability.

  Further, if the predetermined portion of the robot arm is at least two index portions provided in the robot hand, for example, an optical device provided so that the detection means projects light from a direction orthogonal to the extending / contracting direction of the transport robot. In the case of a sensor, coordinate data may be acquired without being affected by errors due to the inclination of the optical axis.

  On the other hand, when each of the robot arms is configured to be movable up and down, the coordinates are detected without being affected by the error due to the inclination of the optical axis by performing detection by the same detection means at a predetermined same height position. Data may be acquired.

(A) And (b) is the top view and sectional view which show typically the processing apparatus which comprises a conveyance robot. FIG. 5 is a schematic plan view illustrating conveyance of a substrate from a load lock chamber to a processing chamber. The typical top view explaining yawing of a conveyance robot. (A) And (b) is a figure explaining the structure for acquiring expansion / contraction starting data. The figure explaining the position correction at the time of relative teaching. The figure explaining the other structure for acquiring expansion / contraction starting data. The figure explaining the position shift of the robot arm which concerns on a modification.

  Hereinafter, an embodiment in which the relative teaching method for a transfer robot of the present invention is applied to the processing apparatus shown in FIG. 1 will be described with reference to the drawings. A transfer robot 1 having a known structure is provided in the transfer chamber T of the processing apparatus. Although not shown, the transfer robot 1 has two motors that rotate the robot arm 11 and a control unit that controls the operation of the motors. The rotation shafts 12a and 12b of the motors are arranged concentrically. Yes. A robot arm 11 is connected to each of the rotating shafts 12a and 12b through a link mechanism, and a robot hand 13 is attached to the tip of the robot arm 11 via a gear box G. Then, the robot arm 11 is expanded and / or rotated by appropriately controlling the rotation angle and the rotation direction of the rotation shafts 12a and 12b of each motor by control means (not shown).

Since the robot arm 11 and the robot hand 13 may be heated to a high temperature in the process performed in the processing chambers P1 to P3, the robot arm 11 and the robot hand 13 may be made of a heat-resistant material such as an Al alloy, Al ₂ O ₃ , or Si0. ₂ and SiC. The robot hand 13 includes a base end portion 13a connected to the robot arm 11 and a pair of finger portions 13b branched from the base end portion 13a into a forked shape and extending forward (see FIG. 2). ). Although not shown in the drawings, the base end portion 13a and the distal end portions of both finger portions 13b are provided with seating surfaces on which the outer peripheral portion of the lower surface of the substrate S can be positioned and seated at three locations in the circumferential direction. However, the lower surface other than the outer peripheral portion is supported so as to float from the robot hand 13.

  The transfer chamber T is provided with detection means 2 for detecting the presence or absence of the substrate S in the vicinity of the connection location with the processing chambers P1 to P3. As the detection means 2, for example, an optical sensor having a known structure such as a laser sensor or an LED fiber sensor, or a visual sensor such as a CCD camera can be used. For example, the detection means 2 is the rotation center of the motor of the transport robot 1. A light projector 21 and a light receiver 22 are arranged so as to project and receive light perpendicular to a line RP connecting a center Pc of a substrate stage Ps described later (see FIG. 1B).

  A load lock chamber L and processing chambers P1 to P3 are connected to the outer surface of the transfer chamber T via a gate valve V. Each of the processing chambers P1 to P3 is configured such that various processes such as a film forming process or an etching process by a sputtering method or a CVD method can be performed on the substrate S. In each of the processing chambers P1 to P3, a stage Ps is arranged so that the substrate can be held when performing a predetermined process. Here, the volume of each of the processing chambers P1 to P3 is appropriately set according to the processing performed in the interior thereof. In such a case, the expansion / contraction stroke L1 from the turnable position to the substrate delivery position as described later, L2 is different for each processing chamber. The number of processing chambers and load lock chambers provided in the transfer chamber T is not limited to the above.

  Then, with the substrate S supported by the robot hand 13, the robot arm 11 is expanded and contracted or turned to transfer the substrate S between the load lock chamber L and the processing chambers P 1 to P 3. The transfer operation of the transfer robot 1 will be described by taking as an example a case where the substrate S is transferred from the load lock chamber L to the first processing chamber P1. As shown by a two-dot chain line in FIG. From the state where the tip of the finger portion 13b is directed to the load lock chamber L (the swivelable position), the robot arm 11 is extended to move the robot hand 13 to the substrate delivery position in the load lock chamber L. The substrate S is received. Thereafter, the robot arm 11 is contracted to return to the origin position. In the present embodiment, the pivotable position where the tip of the finger portion 13b is directed to the load lock chamber L is defined as the origin position.

  Next, the robot arm 11 is pivoted from the origin position to a position where the tip of the finger portion 13b is directed to the first processing chamber P1, and the robot arm 11 is extended to move the robot to the substrate delivery position of the first processing chamber P1. The hand 13 is moved. At this time, it is confirmed by the detection means 2 whether or not the substrate S is accurately supported by the robot hand 13, and after delivering the substrate S, it is contracted and returned to the turnable position.

  The operation of the transfer robot 1 is programmed in advance in the control means, and the transfer robot 1 is assembled to the processing device in order to teach the transfer robot 1 the coordinate data of the origin position which is the reference of the transfer operation. When the robot arm 11 or the robot hand 13 is replaced for maintenance or maintenance, the transfer robot 1 is taught, and the coordinate data at the turnable position and the substrate delivery position is stored in the control means. Hereinafter, the relative teaching of the transfer robot 1 will be described.

  First, the coordinate data of the origin position for one processing chamber, that is, the load lock chamber L is taught, and the coordinate data of the substrate delivery position is taught based on this origin position. At this time, when the transfer robot 1 expands and contracts from the standby position, the transfer robot 1 is taught without relying on the operator's visual recognition by using the crossing of the detection means 2.

  That is, when the substrate S is held at an appropriate position by the robot hand 13, the substrate S is positioned on the center line passing through the center Sa of the substrate S, and a plan view in which a predetermined portion of the robot arm is formed on the base end portion 13 a of the robot hand 13. A circular through hole 14 is formed. Here, the opening diameter of the through-hole 14 is appropriately set according to the optical sensor used as the detecting means 2. For example, when a laser sensor is used, the change in the light diameter when the laser beam is projected is changed. Since it is small, the hole diameter of the through hole 14 may be set larger than the light diameter of the laser. When the through hole 14 is detected by the detection means 2, the robot hand 13 is appropriately positioned on a line RP connecting the rotation center 12c of the motor rotation shafts 12a and 12b and the center Pc of the substrate stage Ps. Thus, it is determined that the transport robot 1 has been accurately positioned at the origin position which is the reference for the operation when turning or expanding / contracting.

  That is, the robot arm 11 is extended by rotating the rotary shafts 12a and 12b from the origin position, which is the pivotable position of the transfer robot 1 whose tip is directed to the load lock chamber L, and the through hole 14 is detected by the detecting means. The position detected by 2 is searched. Initially, since the light from the projector 21 is not shielded by the robot hand 13, the signal of the detection means 2 is in the ON state. When the robot arm 11 is further extended and the light from the projector 21 is shielded by the proximal end portion 13a of the robot hand 13, the signal of the detection means 2 is turned off. In this state, the rotary shafts 12a and 12b are rotated to turn and / or expand / contract the robot hand 13 to search for a position where the signal of the detection means 2 is turned on.

  When the through-hole 14 is detected when the signal of the detection means 2 is turned on, the robot arm 11 is scanned and moved in the expansion / contraction direction and the left-right direction thereof. At this time, the signal of the detection means 2 is switched between ON and OFF, and the center coordinates of the through hole 14 are specified from the switching cycle. When the center coordinates of the through hole 14 are specified in this way, the robot hand 13 is positioned on the center line RP. When the robot arm 11 is contracted from this state and returned to the turnable position, the origin position is specified. Then, the coordinate data at this time is taught to the control means, and the amount of movement of the center of the substrate S from the origin position determined from the design value of the apparatus to the substrate delivery position, that is, the substrate delivery from the expansion / contraction stroke L1 with respect to the load lock chamber L. Calculate and teach position coordinate data.

  Next, when the teaching for the load lock chamber L is completed, the coordinate data of the other processing chambers P1 to P3 is automatically calculated from the coordinate data for the load lock chamber L by the control means. That is, since the turnable position in each of the processing chambers P1 to P3 and the expansion / contraction strokes L1 and L2 from the turnable position to the substrate delivery position are determined from the design values of the apparatus, these values are input to the control means in advance. As a result, the coordinate data of other rooms is automatically calculated. Thereby, relative teaching is completed.

  When teaching the turnable position in each of the processing chambers P1 to P3, the transfer robot 1 is actually turned based on the coordinate data calculated from the design value of the apparatus, and the robot hand is detected by the detection means 2 in the same manner as described above. The through-hole 14 formed in the above may be detected, and coordinate data to be taught may be corrected from the detection result at this time. Thereby, teaching with higher accuracy may be realized.

  By the way, in the transfer robot 1, for example, when the robot arm is actually expanded or contracted due to the influence of the warp or inclination generated when the robot arm 11 is assembled to the rotary shafts 12 a and 12 b of the driving means, for example. In addition, the robot hand 13 and, as a result, the substrate S moves to the left and right in the turning direction as indicated by the one-dot chain line in FIG. For this reason, as shown in FIG. 3, even when the expansion / contraction strokes L1 and L2 with respect to each processing chamber are not constant with each other, it is necessary to prevent positional displacement in the turning direction during relative teaching.

  Therefore, when the coordinate data in one processing chamber (the load lock chamber in this embodiment) is taught, the expansion / contraction trajectory data of the transfer robot 1 is acquired, and in the relative teaching, the robot hand 13 and by extension from the expansion / contraction trajectory data. The position of the substrate S was corrected. Below, acquisition of expansion-contraction track data is demonstrated.

  Referring to FIG. 4, the robot hand 13 is provided with an index portion M1 at the center position of the substrate S when the substrate S is supported. The indicator part M1 is constituted by a cylindrical member standing on a support plate MP laid between, for example, the finger parts 13b (see FIG. 4A). Further, the light projector 31 and the light receiver 32 are respectively disposed in the transfer chamber T and the load lock chamber L so that light can be projected along the line RP. The detection means to detect is comprised.

  Then, the robot arm 11 is extended in a state where the robot arm 11 is positioned at a turnable position with respect to the load lock chamber L. At this time, while the robot arm 11 is linearly moved, the light from the light projector 31 is blocked by the indicator M1, and the signal from the light receiver 32 is in an OFF state, and either the left or right as the robot arm 11 extends. Is shifted to, the signal from the light receiver 32 is turned on.

  At this time, the extending operation of the robot arm 11 is stopped, the robot arm 11 is turned at that position, and a search is made as to which of the left and right directions is shifted. When the signal from the light receiver 32 is turned on, the turning operation of the robot arm 11 is stopped and the extending operation is restarted. In this way, while determining whether the signal of the detection means 2 is switched ON or OFF, it is extended to the substrate delivery position, and the relationship between the average value of the signal switching and the turning angle at that time is stored continuously. Telescopic trajectory data for telescopic motion can be acquired continuously. Thereby, the deviation | shift amount of the turning direction in arbitrary strokes L1 and L2 is acquired, and the correction amount in arbitrary strokes can be calculated by the control means. When the coordinate data of the substrate delivery position is calculated and taught from the design value of the apparatus as described above, it is preferable that the correction is made at the time when the expansion and contraction trajectory data is acquired.

  Next, in the case of relative teaching, if the expansion / contraction stroke L1 is constant in the other processing chambers P1 to P3, coordinate data is taught as described above. On the other hand, if the expansion / contraction strokes L1 and L2 are different, a correction amount is calculated from the expansion / contraction stroke L2 in the processing chambers P1 to P3 and the measured expansion / contraction start data, and seating amount data is taught based on this (see FIG. 5).

  As described above, according to the above-described embodiment, when the expansion / contraction trajectory data is acquired in advance and the relative teaching is performed with respect to the other processing chambers based on the coordinate data for one processing chamber, the robot hand 13 is obtained from the expansion / contraction trajectory data. Then, in order to correct the position of the substrate S, even if the expansion / contraction strokes L1 and L2 are different for each processing chamber, the transfer robot 1 operates quickly with high reliability without causing displacement in the turning direction. It is possible to provide a transfer robot with excellent productivity.

  In the above-described embodiment, the configuration in which the trajectory data is continuously acquired has been described. However, the present invention is not limited to this, and as illustrated in FIG. Optical sensors 31 and 32 having a known structure, such as a laser sensor or LED fiber sensor, are arranged on either one of P3 on a telescopic track with a predetermined interval, and an index portion (see FIG. (Not shown), orbital data at a specific expansion / contraction stroke may be intermittently acquired by each of the optical sensors 31 and 32, and correction may be performed based on this value. As shown in FIG. 6, when the transmission type is used as the indicator, for example, it can be constituted by a through-hole formed at a predetermined position of the robot hand 13, and on the other hand, when the reflection type is used, In addition to the hole, for example, it may be configured by a reflector having a predetermined area attached to a predetermined position on one side of the robot hand.

  Moreover, although the said embodiment demonstrated as an example what used the cylindrical member as the parameter | index part M1 at the time of acquiring expansion / contraction starting data, the light from a light source was interrupted | blocked or light from a light projector in a specific direction If it can reflect, it will not be limited to this. In addition, although a transmission type sensor has been described as an example, a reflection type sensor can also be used. In this case, a reflecting plate may be provided on the outer surface of the indicator portion.

  Furthermore, in the above-described embodiment, the example of correcting the swing in the turning direction of the robot arm has been described as an example, but the present invention is not limited to this. For example, the index portion M1 may have a conical shape, and when the expansion / contraction start data is acquired, vertical drooping or rising may also be detected. If the transfer robot is equipped with a lifting mechanism that moves the robot arm up and down, the height is adjusted at the board delivery position by the lifting mechanism, or a spacer is interposed at the attachment position of the robot hand to the robot arm. You may adjust the height. Accordingly, the transfer robot 1 may be extended to correct the drooping or rising when the robot hand reaches the substrate delivery position.

  Moreover, in the said embodiment, the case where the robot arm 11 can be expanded and contracted and / or swiveled by appropriately controlling the rotation angle and the rotation direction of the rotation shafts 12a and 12b of the concentrically arranged motor is taken as an example. Although described, the present invention can also be applied to other articulated robots. In this case, when the robot hand can be moved horizontally in a direction orthogonal to the expansion / contraction direction, a line connecting the rotation center of the drive source arranged in the transfer chamber T and the center Pc of the substrate stage Ps in each chamber. It is also possible to form two indicator portions at equal intervals on both sides in the direction perpendicular to the direction and teach.

  Furthermore, in the above-described embodiment, the example in which one robot arm 11 is attached to the rotation shafts 12a and 12b of the motor has been described as an example, but the present invention is not limited to this. For example, the present invention can be applied to a transfer robot in which two robot arms 11a and 11b are attached to the rotation shafts 12a and 12b of the motor in order to improve the throughput of the substrate processing.

  Here, as shown in FIG. 7, in such a transfer robot 100, the positions of both robot hands 130a and 130b are shifted from each other in the turning direction and / or the expansion / contraction direction at the origin position due to errors during assembly. There may be. In such a case, if one of the robot arms 110a or 110b is used as a reference and the relative teaching including the origin position of the other robot arm is performed based on the coordinate data of the origin position of the robot arm, the load lock chamber In the case where the substrate is delivered by one robot hand 130a or 130b in L or the processing chambers P5 and P6, and the case where the substrate is delivered by the other robot hand 130b or 130a, the substrate W is swung in the direction of rotation or stretched. There is a risk that the direction will shift.

  In other words, a case where the positions of the robot hands 130a and 130b at the origin position are shifted back and forth in the expansion / contraction direction will be described as an example. The substrate W is moved by the robot hands 130a and 130b to the same processing chamber, for example, the substrate stage Ps of P6. In response to the displacement, the stop position (substrate delivery position) when the stretching operation is performed with the same expansion / contraction stroke also deviates before and after the expansion / contraction direction.

  For this reason, if the coordinate data at the origin position is acquired for each robot arm 110a, 110b using the detection means 2 in the same manner as described above, and the coordinate data at that time does not match each other, one robot arm (for example, 110a) Is used as a reference to correct the origin position of the other robot arm 110b by appropriately controlling the rotation direction and rotation angle of the rotary shafts 12a and 12b from the detected coordinate data difference. Then, relative teaching is performed on each processing chamber in the same procedure as described above. Accordingly, it is possible to prevent the substrate W from being displaced in the turning direction and the expansion / contraction direction in each processing chamber, and to quickly teach the operation to the transfer robot 100 with high reliability. It should be noted that even when a deviation in the turning direction occurs between the robot arms 110a and 110b, the same procedure as described above is used for correction. Further, the coordinate data obtained from the two robot arms may be corrected so as to coincide with each other.

  Further, in the transfer robot 100, since the robot arms 110a and 110b cannot be mounted substantially in the same horizontal plane, the robot arms 110a and 110b are mounted while being shifted in the vertical direction of the rotary shafts 12a and 12b (see FIG. 7). ), And a configuration in which driving means is provided so that the rotary shafts 12a and 12b move up and down integrally is employed.

  In such a case, when the predetermined position of each robot arm 110a, 110b is detected by the detection means 2 and teaching of the origin position is performed, if the optical axis is tilted, an error occurs according to the tilt. . For this reason, it is preferable to acquire the coordinate data by detecting at least two predetermined portions (which may be the above-described index portion) provided on the robot hand.

  On the other hand, when each robot arm is configured to be movable up and down, detection by the same detection means may be performed at a predetermined same height position.

DESCRIPTION OF SYMBOLS 1 Transfer robot 11 Robot arm 12a, 12b Rotation axis (drive means)
13 robot hand 31 projector 32 light receiver L load lock chambers P1 to P3 processing chamber T transfer chamber M1 indicator MP support plate S substrate

Claims (7)

A robot arm having a robot hand at the tip and a substrate to be processed by the robot hand of a transfer robot provided with a driving means for driving the robot arm, with the robot arm being supported at least on the same plane, and swiveling and extending / contracting And a relative teaching method of a transfer robot that teaches the transfer operation when transferring the substrate between a plurality of processing chambers arranged along the turning direction,
Teach coordinate data to be used as a reference when expanding / contracting to any one of the processing chambers, and teaching coordinate data to be used as a reference when expanding / contracting to other processing chambers based on this coordinate data In
Before teaching the coordinate data in the one processing chamber, obtain the expansion and contraction trajectory data of the robot arm,
When teaching the coordinate data in the other processing chamber, if the expansion / contraction strokes of the robot arm to the one processing chamber and the other processing chamber are different from each other, the position of the robot hand is corrected from the expansion / contraction trajectory data. A relative teaching method for a transfer robot.   Projecting from the optical sensor along the direction of expansion and contraction of the transfer robot to the index portion provided to project outward from the robot hand, and acquiring the expansion and contraction trajectory data from the detection result of the optical sensor, The relative teaching method for a transfer robot according to claim 1.   The indicator unit provided at a predetermined position of the robot hand is projected from an optical sensor in a direction orthogonal to the expansion / contraction direction of the transfer robot, and the expansion / contraction trajectory data is obtained from the detection result of the optical sensor. The relative teaching method of the transfer robot according to claim 1.   Before teaching the reference coordinate data to the one processing chamber, a predetermined part of the robot arm is detected by a detecting means provided within a range in which the robot arm expands and contracts to acquire the coordinate data at that time. When teaching coordinate data in another processing chamber, a predetermined portion of the robot arm is detected by other detection means provided within a range where the robot arm expands and contracts, and the position of the robot arm is determined from the detected coordinate data. The relative teaching method for a transfer robot according to claim 1, wherein correction is performed.   The transfer robot includes a plurality of robot arms that rotate or extend and retract in conjunction with each other by controlling a rotation direction and a rotation angle of a plurality of rotation shafts arranged concentrically. Prior to teaching the reference coordinate data to the room, the same predetermined means of each robot arm is detected and compared by the same detection means provided within the range in which each robot arm turns or expands and contracts. If the coordinate data at that time does not match each other, either one robot arm is used as a reference and correction is made according to the difference in the coordinate data of the other, or the coordinate data obtained from the two robot arms is 5. The method of relative teaching of a transfer robot according to claim 1, wherein correction is performed so as to match each other.   6. The relative teaching method for a transfer robot according to claim 5, wherein the predetermined part of the robot arm is at least two index parts provided on the robot hand. 7. The method of relative teaching of a transfer robot according to claim 5, wherein when the robot arms are configured to be movable up and down, detection is performed by the same detection means at a predetermined same height position. .

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