JP2019141920A - Correction method for industrial robot - Google Patents

Abstract

To provide a correction method for an industrial robot in which a second arm part can be exactly fitted to a predetermined reference position, a hand base part can be exactly fitted to a predetermined position and a hand fork can be exactly fitted to a predetermined reference position.SOLUTION: In the correction method for an industrial robot, in a first reference position specifying step, a first reference position, a reference position of a second arm part 16 in a turning direction of the second arm part 16 with respect to a first arm part 15 is specified using a positioning jig 36; in a second reference position specifying step, a second reference position, a reference position of a hand base part 17 in a turning direction of the hand base part 17 with respect to the second arm part 16 is specified using a positioning jig 37; and in a hand fork positioning step, a hand fork 18 is positioned in a third reference position, a reference position of a hand fork 18 in a direction orthogonal to a longitudinal direction of the hand fork 18 with respect to the hand base part 17 using a positioning jig 38.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a method for adjusting an industrial robot that transports a transport object.

  Conventionally, an industrial robot that transports a glass substrate is known (for example, see Patent Document 1). The industrial robot described in Patent Document 1 is a horizontal articulated robot that is used by being incorporated in an organic EL (organic electroluminescence) display manufacturing system, and a hand on which a glass substrate is mounted and a hand on the tip side. The arm connected so that rotation is possible, and the main-body part to which the base end side of an arm is connected so that rotation is possible.

  The arm includes a first arm portion whose base end side is rotatably connected to the main body portion, and a second arm portion whose base end side is rotatably connected to the distal end side of the first arm portion. The hand includes a hand base that is rotatably connected to the distal end side of the second arm part, and a hand fork that is fixed to the hand base and on which a glass substrate is mounted. Moreover, the industrial robot described in Patent Document 1 includes a motor for rotating the first arm portion with respect to the main body portion, and a motor for rotating the second arm portion with respect to the first arm portion. And a motor for rotating the hand base relative to the second arm.

JP-A-2015-139854

  When the industrial robot described in Patent Document 1 is installed in a manufacturing system such as an organic EL display, teaching work for the industrial robot is generally performed in order to create an operation program for the industrial robot. For example, when the industrial robot installed in the manufacturing system is replaced or the motor of the industrial robot is replaced, for the coordinates of the teaching position taught in the teaching operation of the industrial robot before the replacement, The robot coordinate system of the industrial robot after replacement is shifted. Therefore, even when the industrial robot is replaced or when the motor of the industrial robot is replaced, the teaching operation for the industrial robot is generally performed again.

  On the other hand, if the shift of the robot coordinate system of the industrial robot after replacement with respect to the coordinate of the teaching position taught in the teaching operation of the industrial robot before replacement is corrected, it is not necessary to perform the complicated teaching operation again. Therefore, the inventor of the present application calculates a correction value for correcting the deviation of the robot coordinate system of the industrial robot after replacement with respect to the coordinate of the teaching position taught in the teaching work of the industrial robot before replacement. It is considered to correct. When calculating the correction value for correcting the deviation, it is preferable that the correction value can be easily calculated.

  In order to easily calculate the correction value, the inventor of the present application accurately aligns the second arm part with a predetermined reference position of the second arm part in the rotation direction of the second arm part with respect to the first arm part, and The hand base is accurately aligned with a predetermined reference position of the hand base in the rotation direction of the hand base relative to the second arm, and the hand is positioned at a predetermined reference position of the hand fork in a direction perpendicular to the longitudinal direction of the hand fork with respect to the hand base. After aligning the forks accurately, the industrial robot is caused to perform a predetermined operation, and the amount of displacement of the industrial robot in the rotation direction of the first arm portion with respect to the main body portion is obtained, whereby the first arm portion with respect to the main body portion is obtained. It is considered to calculate a correction value based only on the amount of deviation in the rotation direction.

  Accordingly, an object of the present invention is to accurately align the second arm portion with a predetermined reference position of the second arm portion in the rotation direction of the second arm portion with respect to the first arm portion, and to adjust the hand base portion relative to the second arm portion. Accurately aligning the hand base with a predetermined reference position of the hand base in the rotation direction, and accurately aligning the hand fork with a predetermined reference position of the hand fork in a direction perpendicular to the longitudinal direction of the hand fork with respect to the hand base An object of the present invention is to provide a method for adjusting an industrial robot that can be used.

  In order to solve the above-described problems, the present invention provides an industrial robot adjustment method, wherein the industrial robot includes a main body, a first arm portion whose base end side is rotatably connected to the main body portion, and a first arm portion. An arm having a second arm portion pivotally connected to the distal end side of the one arm portion, a hand base portion pivotally connected to the distal end side of the second arm portion, and a horizontal direction from the hand base portion Extending in one direction and having a hand fork on which the object to be transported is mounted, a first motor for rotating the first arm part with respect to the main body part, and a second with respect to the first arm part A second motor for rotating the arm portion, a third motor for rotating the hand base relative to the second arm portion, a first encoder for detecting the amount of rotation of the first motor, 2nd encoder to detect the rotation amount of 2 motors A third encoder for detecting the rotation amount of the third motor, a first origin sensor for detecting the origin position of the first arm part in the rotation direction of the first arm part with respect to the main body part, A second origin sensor for detecting the origin position of the second arm part in the rotational direction of the second arm part relative to the one arm part, and an origin position of the hand base in the rotational direction of the hand base relative to the second arm part And a third reference point position of the second arm part in the rotation direction of the second arm part relative to the first arm part as a first reference position, and the rotation of the hand base relative to the second arm part. A predetermined reference position of the hand base in the moving direction is defined as a second reference position, and a predetermined reference position of the hand fork in a direction perpendicular to the longitudinal direction of the hand fork relative to the hand base is defined as a third reference position. Assuming the quasi-position, the industrial robot adjustment method is based on the detection result of the second origin sensor or the detection result of the second origin sensor and the second encoder so that the second arm unit stops at the first reference position. A first positioning jig for positioning the second arm portion from the first stop position, which is the stop position of the second arm portion when the second arm portion is stopped based on the detection result, to the first reference position. The detection result of the second encoder when the second arm portion is rotated to the position where the second arm portion is positioned, and the second encoder when the second arm portion is stopped at the first stop position. A first reference position specifying step for specifying the first reference position based on the value, and after the first reference position specifying step, the second arm portion is arranged at the first reference position specified in the first reference position specifying step. 2nd reference position The hand base is stopped when the hand base is stopped based on the detection result of the third origin sensor or based on the detection result of the third origin sensor and the detection result of the third encoder so that the hand base stops at the position. The detection result of the third encoder when the hand base is rotated from the second stop position, which is the position, to the position where the hand base is positioned by the second positioning jig for positioning the hand base at the second reference position And a second reference position specifying step for specifying the second reference position based on the value of the third encoder when the hand base is stopped at the second stop position, and after the second reference position specifying step, In a state where the second arm portion is disposed at the first reference position identified in the reference position identifying step, and the hand base is disposed at the second reference position identified in the second reference position identifying step. Characterized in that it comprises a hand fork positioning step of positioning the hand fork by the third positioning jig for positioning the hand fork reference position.

  In the industrial robot adjustment method of the present invention, in the first reference position specifying step, the second arm is positioned at the first reference position which is the reference position of the second arm part in the rotation direction of the second arm part with respect to the first arm part. The first reference position is specified using a first positioning jig for positioning the part. Therefore, in the present invention, it is possible to match the second arm portion to the first reference position specified with high accuracy using the first positioning jig. That is, in the present invention, the second arm portion can be accurately adjusted to the first reference position.

  Further, in the present invention, in the second reference position specifying step, the second positioning jig for positioning the hand base at the second reference position that is the reference position of the hand base in the rotation direction of the hand base with respect to the second arm. Is used to specify the second reference position. Therefore, in the present invention, it is possible to match the hand base to the second reference position specified with high accuracy using the second positioning jig. That is, according to the present invention, the hand base can be accurately adjusted to the second reference position.

  Furthermore, in the present invention, in the hand fork positioning step, a third positioning jig for positioning the hand fork at a third reference position that is a reference position of the hand fork in a direction orthogonal to the longitudinal direction of the hand fork with respect to the hand base is provided. It is used to position the hand fork at the third reference position. Therefore, in the present invention, the hand fork can be accurately adjusted to the third reference position.

  In the present invention, for example, when the second arm portion is at the first reference position, the first arm portion and the second arm portion overlap in the vertical direction, and when the hand base portion is at the second reference position, the second arm portion. And the hand fork overlap in the vertical direction.

  In the present invention, the first positioning jig is, for example, a first fixing member that is fixed to one of the first arm part and the second arm part, and one of the first arm part and the second arm part. A first pin inserted into the first insertion hole formed and the first through hole formed in the first fixing member is provided. In this case, the second arm portion can be positioned at the first reference position with a relatively simple configuration.

  In the present invention, the second positioning jig is formed on, for example, the second fixing member fixed to one of the first arm portion and the hand base, and the other one of the first arm portion and the hand base. 2 and a second pin inserted into the second through hole formed in the second fixing member. In this case, the hand base can be positioned at the second reference position with a relatively simple configuration.

  In the present invention, the hand includes two hand forks, and the third positioning jig includes, for example, a third fixing member fixed to one of the two hand forks and the second arm portion, and two And a third pin inserted in a third insertion hole formed in the other one of the hand fork and the second arm portion and a third through hole formed in the third fixing member. In this case, it is possible to position the two hand forks at the third reference position with a relatively simple configuration.

  In the present invention, for example, the hand includes two second hand forks extending from the hand base in the opposite direction to the hand fork, and the industrial robot adjustment method is such that the hand base is rotated 180 ° after the hand fork positioning step. And second hand fork positioning for positioning the two second hand forks at a predetermined reference position of the second hand fork in a direction orthogonal to the longitudinal direction of the second hand fork with respect to the hand base by the third positioning jig. It has a process. In this case, the hand fork and the second hand fork can be positioned using the common third positioning jig.

  As described above, in the industrial robot adjustment method of the present invention, the second arm unit is accurately aligned with the predetermined reference position of the second arm unit in the rotation direction of the second arm unit with respect to the first arm unit. Precisely aligning the hand base with a predetermined reference position of the hand base in the rotation direction of the hand base relative to the second arm, and a predetermined reference position of the hand fork in a direction perpendicular to the longitudinal direction of the hand fork with respect to the hand base It becomes possible to match the hand fork accurately.

It is a figure of the industrial robot adjusted with the adjustment method of the industrial robot concerning embodiment of this invention, (A) is a top view, (B) is a side view. It is a top view which shows the state in which the industrial robot shown in FIG. 1 was integrated in the manufacturing system of an organic EL display. It is a block diagram for demonstrating the structure of the industrial robot shown in FIG. It is a figure of the state in which the 1st positioning jig, the 2nd positioning jig, and the 3rd positioning jig were attached to the industrial robot shown in FIG. 1, (A) is a top view, (B) is a side view. . (A) is an enlarged view of the E part of FIG. 4 (B), (B) is a figure which shows a 1st positioning jig etc. from the FF direction of (A), (C) is It is an enlarged view of the G section of (A). (A) is an enlarged view of the H portion of FIG. 4 (B), (B) is a diagram showing the second positioning jig and the like from the JJ direction of (A), and (C) is It is an enlarged view of the K section of (A). (A) is an enlarged view of the L part of FIG. 4 (A), (B) is an enlarged view of the M part of FIG. 4 (B), and (C) is an NN of (B). It is a figure which shows a 3rd positioning jig etc. from a direction, (D) is an enlarged view of the P section of (B). It is a figure for demonstrating operation | movement of the industrial robot in the correction value calculation process which calculates the correction value of the industrial robot shown in FIG. It is a figure for demonstrating operation | movement of the industrial robot in the correction value calculation process concerning other embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Composition of industrial robot)
1A and 1B are views of an industrial robot 1 adjusted by the industrial robot adjusting method according to the embodiment of the present invention. FIG. 1A is a plan view and FIG. 1B is a side view. FIG. 2 is a plan view showing a state in which the industrial robot 1 shown in FIG. 1 is incorporated in the organic EL display manufacturing system 3. FIG. 3 is a block diagram for explaining the configuration of the industrial robot 1 shown in FIG.

  An industrial robot 1 (hereinafter referred to as “robot 1”) of this embodiment is a robot for transporting a glass substrate 2 for organic EL display (hereinafter referred to as “substrate 2”), which is an object to be transported. It is. As shown in FIG. 2, the robot 1 is a horizontal articulated robot used by being incorporated in an organic EL display manufacturing system 3. The manufacturing system 3 includes a transfer chamber 4 (hereinafter referred to as “chamber 4”) disposed in the center, and a plurality of chambers 5 to 7 disposed so as to surround the chamber 4.

  The chamber 5 is a process chamber for performing a predetermined process on the substrate 2. The chamber 6 is, for example, a supply chamber (loader) in which the substrate 2 supplied to the manufacturing system 3 is accommodated. The chamber 7 accommodates, for example, the substrate 2 discharged from the manufacturing system 3. This is a discharge chamber (unloader). The insides of the chambers 4 to 7 are in a vacuum. A part of the robot 1 is disposed inside the chamber 4. The robot 1 conveys the substrate 2 between the plurality of chambers 5 to 7 by the later-described hand forks 18 and 19 constituting the robot 1 entering the chambers 5 to 7.

  As shown in FIG. 1, the robot 1 includes a hand 8 on which a substrate 2 is mounted, an arm 9 to which the hand 8 is pivotably connected to the distal end side, and a base end side of the arm 9 that is pivotally connected. Main body 10. The hand 8 and the arm 9 are disposed on the upper side of the main body 10. The main body 10 includes an elevating mechanism that elevates and lowers the arm 9 and a case body 13 that accommodates the elevating mechanism. The case body 13 is formed in a substantially bottomed cylindrical shape. A flange 14 formed in a disc shape is fixed to the upper end of the case body 13.

  As described above, a part of the robot 1 is disposed inside the chamber 4. Specifically, a portion of the robot 1 above the lower end surface of the flange 14 is disposed inside the chamber 4. That is, the part above the lower end surface of the flange 14 of the robot 1 is disposed in the vacuum region VR, and the hand 8 and the arm 9 are disposed in the vacuum chamber (in vacuum). On the other hand, a portion of the robot 1 below the lower end surface of the flange 14 is disposed in the atmospheric region AR (in the atmosphere).

  The arm 9 includes a first arm portion 15 and a second arm portion 16 that are rotatably connected to each other. The arm 9 of this embodiment is configured by two arm parts, a first arm part 15 and a second arm part 16. A proximal end side of the first arm portion 15 is rotatably connected to the main body portion 10. The proximal end side of the second arm portion 16 is rotatably connected to the distal end side of the first arm portion 15. A hand 8 is rotatably connected to the distal end side of the second arm portion 16.

  The second arm portion 16 is disposed above the first arm portion 15. Further, the hand 8 is disposed above the second arm portion 16. The distance between the rotation center of the first arm portion 15 relative to the main body portion 10 and the rotation center of the second arm portion 16 relative to the first arm portion 15 is the rotation center of the second arm portion 16 relative to the first arm portion 15. This is equal to the distance from the center of rotation of the hand 8 with respect to the second arm portion 16.

  The hand 8 includes a hand base portion 17 that is rotatably connected to the distal end side of the second arm portion 16, and hand forks 18 and 19 on which the substrate 2 is mounted. The hand 8 of this embodiment includes two hand forks 18 and two hand forks 19. The hand forks 18 and 19 are formed in a straight line. The hand fork 18 and the hand fork 19 are formed in the same shape. The two hand forks 18 are arranged in parallel with a predetermined distance from each other. The hand fork 18 extends from the hand base 17 in one horizontal direction. The two hand forks 19 are arranged in parallel with a predetermined distance from each other. The hand fork 19 extends from the hand base 17 in the opposite direction to the hand fork 18. The hand fork 19 of this embodiment is a second hand fork.

  The hand forks 18 and 19 are fixed to the hand base 17. Specifically, the hand forks 18 and 19 are fixed to the hand base 17 with fixing screws. The hand forks 18 and 19 are formed with insertion holes through which fixing screws are inserted. This insertion hole is a long hole whose longitudinal direction is the direction orthogonal to the longitudinal direction of the hand forks 18, 19. In the direction orthogonal to the longitudinal direction of the hand forks 18, 19, the hand forks 18, 19 with respect to the hand base 17 are provided. It is possible to adjust the fixed position.

  In this embodiment, one substrate 2 is mounted on two hand forks 18. One substrate 2 is mounted on two hand forks 19. A positioning member for positioning the substrate 2 to be mounted is attached to the upper surface of the hand fork 18. A positioning member for positioning the substrate 2 to be mounted is also attached to the upper surface of the hand fork 19.

  The robot 1 includes a motor 21 for rotating the first arm unit 15 with respect to the main body unit 10, a motor 22 for rotating the second arm unit 16 with respect to the first arm unit 15, and A motor 23 for rotating the hand base portion 17 with respect to the second arm portion 16, an encoder 24 for detecting the rotation amount of the motor 21, an encoder 25 for detecting the rotation amount of the motor 22, and a motor And an encoder 26 for detecting the amount of rotation 23 (see FIG. 3).

  The encoder 24 is attached to the motor 21. The encoder 25 is attached to the motor 22, and the encoder 26 is attached to the motor 23. For example, the motor 21 and the encoder 24 are arranged inside the main body 10. Further, the motors 22 and 23 and the encoders 25 and 26 are disposed, for example, inside the first arm unit 15. The motors 21 to 23 are electrically connected to the control unit 27 of the robot 1. The encoders 24 to 26 are also electrically connected to the control unit 27. The motor 21 of this embodiment is a first motor, the motor 22 is a second motor, and the motor 23 is a third motor. The encoder 24 is a first encoder, the encoder 25 is a second encoder, and the encoder 26 is a third encoder.

  Further, the robot 1 includes an origin sensor 31 for detecting the origin position of the first arm unit 15 in the rotation direction of the first arm unit 15 with respect to the main body unit 10, and the second arm unit 16 with respect to the first arm unit 15. An origin sensor 32 for detecting the origin position of the second arm portion 16 in the rotation direction, and an origin sensor 33 for detecting the origin position of the hand base portion 17 in the rotation direction of the hand base portion 17 with respect to the second arm portion 16. And. The origin sensor 31 of this embodiment is a first origin sensor, the origin sensor 32 is a second origin sensor, and the origin sensor 33 is a third origin sensor.

  The origin sensors 31 to 33 are proximity sensors, for example. Or the origin sensors 31-33 are optical sensors which have a light emitting element and a light receiving element, for example. The origin sensors 31 to 33 are electrically connected to the control unit 27. In the joint part that is a connection part between the main body part 10 and the first arm part 15, the origin sensor 31 is fixed to one of the main body part 10 and the first arm part 15. A detection member that is detected by the origin sensor 31 when the first arm portion 15 is at the origin position is fixed to one of the other.

  Similarly, in the joint part that is a connection part between the first arm part 15 and the second arm part 16, the origin sensor 32 is fixed to one of the first arm part 15 and the second arm part 16, and the first sensor A detection member that is detected by the origin sensor 32 when the second arm section 16 is at the origin position is fixed to the other of the arm section 15 and the second arm 16. In addition, in the joint portion that is a connection portion between the second arm portion 16 and the hand base portion 17, the origin sensor 33 is fixed to one of the second arm portion 16 and the hand base portion 17, and the second arm portion 16 and the hand portion. A detection member that is detected by the origin sensor 33 when the hand base 17 is at the origin position is fixed to the other of the base parts 17.

(Calculation method for industrial robot correction values)
4A and 4B are diagrams illustrating a state in which the positioning jigs 36 to 38 are attached to the robot 1 illustrated in FIG. 1, and FIG. 4A is a plan view and FIG. FIG. 5 (A) is an enlarged view of an E portion of FIG. 4 (B), and FIG. 5 (B) is a diagram showing the positioning jig 36 and the like from the FF direction of FIG. 5 (A). FIG. 5C is an enlarged view of a G portion in FIG. 6 (A) is an enlarged view of a portion H in FIG. 4 (B), and FIG. 6 (B) is a diagram showing the positioning jig 37 and the like from the JJ direction in FIG. 6 (A). FIG. 6C is an enlarged view of a portion K in FIG. 7A is an enlarged view of the L portion in FIG. 4A, FIG. 7B is an enlarged view of the M portion in FIG. 4B, and FIG. 7 (B) is a view showing the positioning jig 38 and the like from the NN direction of FIG. 7 (B), and FIG. 7 (D) is an enlarged view of a P portion of FIG. 7 (B). FIG. 8 is a diagram for explaining the operation of the robot 1 in the correction value calculation step of calculating the correction value of the robot 1 shown in FIG.

  When the robot 1 is installed in the manufacturing system 3, in order to create an operation program for the robot 1, a teaching operation for the robot 1 is performed. Further, for example, when the robot 1 installed in the manufacturing system 3 is replaced, the robot coordinate system of the robot 1 after replacement is shifted from the coordinates of the teaching position taught in the teaching work of the robot 1 before replacement. Therefore, it is necessary to perform the teaching operation of the robot 1 again.

  On the other hand, if the displacement of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange is corrected, it is not necessary to perform the complicated teaching work again. In this embodiment, when the robot 1 installed in the manufacturing system 3 is replaced so that the complicated teaching work does not have to be performed again after the robot 1 is replaced, the teaching work of the robot 1 before the replacement is taught. The correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinate of the taught position is calculated. That is, a correction value for correcting the operation of the robot 1 after replacement is calculated. Hereinafter, a method for calculating the correction value will be described.

  In the following description, a predetermined reference position of the second arm unit 16 in the rotation direction of the second arm unit 16 with respect to the first arm unit 15 is defined as a first reference position, and the hand base unit 17 is rotated with respect to the second arm unit 16. The predetermined reference position of the hand base 17 in the direction is set as the second reference position, and the predetermined reference position of the hand fork 18 in the direction perpendicular to the longitudinal direction of the hand fork 18 with respect to the hand base 17 is set as the third reference position. A predetermined reference position of the first arm portion 15 in the rotation direction of the first arm portion 15 with respect to is defined as a fourth reference position.

  In this embodiment, when the second arm portion 16 is in the first reference position, the first arm portion 15 and the second arm portion 16 overlap in the vertical direction as shown in FIG. Specifically, when the second arm portion 16 is in the first reference position, the longitudinal direction of the first arm portion 15 and the longitudinal direction of the second arm portion 16 coincide with each other when viewed from the vertical direction. The 1st arm part 15 and the 2nd arm part 16 have overlapped in the up-down direction. Further, in this embodiment, the origin position of the second arm portion 16 and the first reference position in the rotation direction of the second arm portion 16 with respect to the first arm portion 15 coincide with each other.

  Further, when the hand base portion 17 is at the second reference position, the second arm portion 16 and the hand fork 18 overlap in the vertical direction as shown in FIG. Specifically, when the hand base portion 17 is at the second reference position, the second arm portion is arranged such that the longitudinal direction of the second arm portion 16 and the longitudinal direction of the hand fork 18 coincide with each other when viewed from the vertical direction. 16 and the hand fork 18 are overlapped in the vertical direction. In the present embodiment, the second reference position is a position where the hand base 17 is rotated 90 ° from the origin position of the hand base 17 in the rotation direction of the hand base 17 with respect to the second arm portion 16.

  Note that the fourth reference position may coincide with the origin position of the first arm portion 15 in the rotation direction of the first arm portion 15 with respect to the main body portion 10, or the rotation of the first arm portion 15 with respect to the main body portion 10. The position where the first arm portion 15 is rotated by a predetermined angle from the origin position of the first arm portion 15 in the moving direction may be the fourth reference position.

  In this embodiment, a positioning jig 36 for positioning the second arm portion 16 at the first reference position, a positioning jig 37 for positioning the hand base portion 17 at the second reference position, and a third reference position A positioning jig 38 for positioning the hand fork 18 is used. The positioning jig 36 of this embodiment is a first positioning jig, the positioning jig 37 is a second positioning jig, and the positioning jig 38 is a third positioning jig. The positioning jig 38 is also used when positioning the hand fork 19 at a predetermined reference position of the hand fork 19 with respect to the hand base 17 in a direction orthogonal to the longitudinal direction of the hand fork 19.

  As shown in FIG. 5, the positioning jig 36 includes a fixing member 41 that is fixed to the first arm portion 15 and a pin 42. The fixing member 41 is fixed to the side surface of the base end of the first arm portion 15. The fixing member 41 is formed with a through hole 41a into which the pin 42 is inserted. Further, an insertion hole 16 a into which the pin 42 is inserted is formed on the side surface at the tip of the second arm portion 16. When the pin 42 inserted into the through hole 41a of the fixing member 41 is inserted into the insertion hole 16a, the second arm portion 16 is strictly positioned at the first reference position. The fixing member 41 of this embodiment is a first fixing member, the pin 42 is a first pin, the insertion hole 16a is a first insertion hole, and the through hole 41a is a first through hole.

  As shown in FIG. 6, the positioning jig 37 includes fixing members 43 and 44 that are fixed to the first arm portion 15 and a pin 45. The fixing member 43 is fixed to the side surface of the base end of the first arm portion 15. The fixing member 44 is fixed to the side surface of the fixing member 43. The fixing member 43 is formed with a groove for preventing interference with the fixing member 41. The tip surface of the screw 46 for adjusting the vertical position of the fixing member 44 with respect to the fixing member 43 is in contact with the bottom surface of the fixing member 44. The screw 46 is screwed into a screw holding member 47 that is fixed to the lower end surface of the fixing member 43.

  The fixing member 44 is formed with a through hole 44a into which the pin 45 is inserted. Further, an insertion hole 17 a into which the pin 45 is inserted is formed on the side surface of the hand base portion 17. When the pin 45 inserted into the through hole 44a of the fixing member 44 is inserted into the insertion hole 17a, the hand base 17 is strictly positioned at the second reference position. The fixing members 43 and 44 of this embodiment are second fixing members, the pin 45 is a second pin, the insertion hole 17a is a second insertion hole, and the through hole 44a is a second through hole.

  As shown in FIG. 7, the positioning jig 38 includes fixing members 48 and 49 fixed to the two hand forks 18 and a pin 50. The fixing member 48 is fixed to the upper surfaces of the two hand forks 18. The fixing member 49 is fixed to the lower surface of the fixing member 48. The fixing member 49 is formed with a through hole 49a into which the pin 50 is inserted. Further, an insertion hole 16 b into which the pin 50 is inserted is formed on the side surface of the base end of the second arm portion 16. When the pin 50 inserted into the through hole 49a of the fixing member 49 is inserted into the insertion hole 16b, the two hand forks 18 are strictly positioned at the third reference position. In this embodiment, the fixing members 48 and 49 are third fixing members, the pin 50 is a third pin, the insertion hole 16b is a third insertion hole, and the through hole 49a is a third through hole.

  For example, when the robot 1 installed in the manufacturing system 3 is replaced, the robot 1 is first adjusted. Specifically, first, the second arm portion 16 is rotated to the first reference position (origin position) based on the detection result of the origin sensor 32. That is, the second arm portion 16 is rotated and stopped based on the detection result of the origin sensor 32 so that the second arm portion 16 stops at the first reference position.

  Further, based on the detection result of the origin sensor 33 and the detection result of the encoder 26, the hand base 17 is rotated to the second reference position (a position rotated by 90 ° from the origin position). For example, after the hand base 17 is rotated to the origin position based on the detection result of the origin sensor 33, the hand base 17 is rotated from the origin position to the second reference position based on the detection result of the encoder 26. That is, the hand base 17 is rotated and stopped based on the detection result of the origin sensor 33 and the detection result of the encoder 26 so that the hand base 17 stops at the second reference position.

  Thereafter, the fixing members 41, 43, 44 are fixed to the first arm portion 15, and the fixing members 48, 49 are fixed to the two hand forks 18. Strictly speaking, the second arm portion 16 rotated to the first reference position based on the detection result of the origin sensor 32 is slightly deviated from the first reference position. Similarly, the hand base 17 rotated to the second reference position based on the detection result of the origin sensor 33 and the detection result of the encoder 26 is slightly deviated from the second reference position.

  Thereafter, the second arm portion 16 is rotated with respect to the first arm portion 15 until the pin 42 inserted into the through hole 41a of the fixing member 41 fits into the insertion hole 16a, and the pin 42 is inserted into the insertion hole 16a. The second arm portion 16 is strictly positioned at the first reference position. Further, the amount of rotation of the motor 22 at that time is detected by the encoder 25, and the control unit 27 specifies the first reference position of the second arm unit 16 using the detection result of the encoder 25.

  That is, the first stop that is the stop position of the second arm portion 16 when the second arm portion 16 is stopped based on the detection result of the origin sensor 32 so that the second arm portion 16 stops at the first reference position. The detection result of the encoder 25 when the second arm portion 16 is rotated from the position to the position where the second arm portion 16 is positioned at the first reference position by the positioning jig 36, and the second stop position is the second stop position. The first reference position is specified based on the value of the encoder 25 when the arm portion 16 is stopped (first reference position specifying step).

  Thereafter, the position where the pin 45 inserted into the through hole 44a of the fixing member 44 fits into the insertion hole 17a in a state where the second arm portion 16 is disposed at the first reference position specified in the first reference position specifying step. The hand base 17 is rotated with respect to the second arm 16 until the pin 45 is inserted into the insertion hole 17a, and the hand base 17 is strictly positioned at the second reference position. Further, the amount of rotation of the motor 23 at that time is detected by the encoder 26, and the control unit 27 specifies the second reference position of the hand base 17 using the detection result of the encoder 26.

  That is, the detection result of the origin sensor 33 so that the hand base 17 stops at the second reference position in a state where the second arm unit 16 is arranged at the first reference position specified in the first reference position specifying step. Based on the detection result of the encoder 26, the hand base 17 is rotated from the second stop position, which is the stop position of the hand base 17 when the hand base 17 is stopped, to the position where the hand base 17 is positioned by the positioning jig 37. The second reference position is specified based on the detection result of the encoder 26 when moved and the value of the encoder 26 when the hand base 17 is stopped at the second stop position (second reference position specifying step). .

  Thereafter, the second arm portion 16 is disposed at the first reference position identified in the first reference position identifying step, and the hand base portion 17 is disposed at the second reference position identified in the second reference position identifying step. The two hand forks 18 in the direction perpendicular to the longitudinal direction of the hand forks 18 until the pin 50 inserted into the through hole 49a of the fixing member 49 fits into the insertion hole 16b. The pin 50 is inserted into the insertion hole 16b and the two hand forks 18 are positioned at the third reference position.

  That is, the second arm portion 16 is arranged at the first reference position specified in the first reference position specifying step, and the hand base portion 17 is arranged at the second reference position specified in the second reference position specifying step. In this state, the two hand forks 18 are positioned by the positioning jig 38 (hand fork positioning step). The positioned hand fork 18 is fixed to the hand base 17 by screws.

  Thereafter, at least the positioning jigs 37 and 38 are removed, and the hand base portion 17 is rotated 180 ° with respect to the second arm portion 16. In this state, the fixing members 48 and 49 are fixed to the two hand forks 19. Further, the two hand forks 19 are moved relative to the hand base 17 in a direction perpendicular to the longitudinal direction of the hand forks 19 until the pin 50 inserted into the through hole 49a of the fixing member 49 fits into the insertion hole 16b. Then, the pin 50 is inserted into the insertion hole 16b, and the two hand forks 19 are positioned at a predetermined reference position.

  That is, the hand base 17 is rotated by 180 °, and the two hand forks 19 are placed at a predetermined reference position of the hand fork 19 in a direction perpendicular to the longitudinal direction of the hand fork 19 with respect to the hand base 17 by the positioning jig 38. Positioning is performed (second hand fork positioning step). The positioned hand fork 19 is fixed to the hand base 17 with screws. Further, when the second hand fork positioning step is finished, the advance adjustment of the robot 1 is finished.

  Thereafter, the detection panel 52 (see FIG. 8) is mounted on the two hand forks 18 (panel mounting step). The detection panel 52 is a panel used when calculating a correction value in a correction value calculation process described later, and is formed in, for example, a rectangular flat plate shape. The detection panel 52 is mounted on the two hand forks 18 while being positioned by a positioning member attached to the upper surface of the hand fork 18.

  Thereafter, the first arm unit 15 is stopped based on the detection result of the origin sensor 31 or based on the detection result of the origin sensor 31 and the detection result of the encoder 24 so that the first arm unit 15 stops at the fourth reference position. The motor 21 is driven and controlled based on the third stop position, which is the stop position of the first arm portion 15 at that time, and the motor 22 is driven based on the first reference position specified in the first reference position specifying step. In addition to the control, the motor 23 is driven and controlled with reference to the second reference position specified in the second reference position specifying step, and the robot 1 is put into a temporary reference posture (robot operation step).

  That is, the motor 21 is driven and controlled based on the third stop position, the motor 22 is driven and controlled based on the first reference position specified in the first reference position specifying step, and in the second reference position specifying step. The motor 23 is driven and controlled based on the specified second reference position, and the robot 1 is moved to the temporary operation start position. In this embodiment, for example, the first arm 15 stops at the third stop position, the second arm portion 16 stops at the first reference position, and the hand base portion 17 stops at a position rotated 90 ° from the second reference position. This is the temporary operation start position of the robot 1. Further, in this embodiment, the operation start position of the robot 1 and the home position of the robot 1 match. However, the operation start position of the robot 1 and the home position of the robot 1 may be shifted.

  When the origin position of the first arm portion 15 in the rotation direction of the first arm portion 15 with respect to the main body portion 10 coincides with the fourth reference position, the fourth reference position in the robot operation step is changed to the fourth reference position. Based on the detection result of the origin sensor 31, the first arm portion 15 is rotated and stopped so that the one arm portion 15 stops. Further, when the position where the first arm unit 15 is rotated by a predetermined angle from the origin position of the first arm unit 15 in the rotation direction of the first arm unit 15 with respect to the main body unit 10 is the fourth reference position, In the robot operation process, the first arm unit 15 is rotated and stopped based on the detection result of the origin sensor 31 and the detection result of the encoder 24 so that the first arm unit 15 stops at the fourth reference position. Strictly speaking, the third stop position is slightly deviated from the fourth reference position. Further, the positioning jigs 36 and 38 are removed before the robot operation process.

  Thereafter, the robot 1 is operated to move the hand fork 18 to the delivery position of the substrate 2 (hand moving step). For example, as shown in FIG. 8A, the hand fork 18 is moved to the delivery position of the substrate 2 in the chamber 6. Specifically, the arm 9 is extended and the hand fork 18 is moved to the delivery position of the substrate 2 in the chamber 6. Thereafter, a correction value for controlling the motor 21 based on the amount of deviation between the fifth reference position, which is a predetermined reference position, and the edge of the detection panel 52 in the rotation direction of the first arm portion 15 with respect to the main body portion 10. Is calculated (correction value calculation step).

  Specifically, when the robot 1 before replacement in which the detection panel 52 is mounted on the hand fork 18 is operated to move the hand fork 18 to the delivery position of the substrate 2, the first arm portion with respect to the main body 10. The position where the edge of the detection panel 52 is arranged in the 15 rotation directions is the fifth reference position. One sensor 53 is arranged at the fifth reference position. The sensor 53 is, for example, an optical sensor having a light emitting element and a light receiving element, or a proximity sensor. The sensor 53 is installed inside the chamber 6.

  In the correction value calculation step, the fifth reference position and the edge of the detection panel 52 are detected until the edge of the detection panel 52 is detected by the sensor 53 (that is, in the rotation direction of the first arm portion 15 with respect to the main body portion 10). The control unit 27 calculates a correction value based on the detection result of the encoder 24 when the first arm unit 15 is rotated.

  For example, as shown in FIG. 8A, when the hand fork 18 is moved to the delivery position of the substrate 2 in the chamber 6, the edges of the sensor 53 and the detection panel 52 arranged at the fifth reference position. Is shifted in the rotation direction of the first arm portion 15 with respect to the main body portion 10, in the correction value calculating step, as shown in FIG. The first arm portion 15 is rotated until it is detected. Further, the correction value is calculated based on the detection result of the encoder 24 at that time. Note that the edge of the detection panel 52 is detected by the sensor 53 when the sensor 53 is switched on and off.

  Thereafter, the motor 21 is driven and controlled by reflecting the correction value calculated in the correction value calculating step, and the motor 22 is driven and controlled based on the first reference position specified in the first reference position specifying step. The motor 23 is driven and controlled based on the second reference position specified in the 2 reference position specifying step, and the robot 1 is returned to the normal operation start position.

  In this embodiment, after that, the hand base 17 is rotated 180 ° and the detection panel 52 is placed on the two hand forks 19, and then the hand fork 19 is placed at the delivery position of the substrate 2 in the chamber 6. Move. At this time, if the sensor 53 does not detect the edge of the detection panel 52 mounted on the hand fork 19, positioning is performed so that the sensor 53 detects the edge of the detection panel 52 mounted on the hand fork 19. The jig 38 is used to adjust the position at which the hand fork 19 is fixed to the hand base 17 in the direction orthogonal to the longitudinal direction of the hand fork 19.

(Main effects of this form)
As described above, in this embodiment, in the first reference position specifying step, the first reference position that is the reference position of the second arm portion 16 in the rotation direction of the second arm portion 16 with respect to the first arm portion 15 is set to the first reference position. The first reference position is specified by using a positioning jig 36 for positioning the two arm portions 16. Therefore, in this embodiment, it is possible to match the second arm portion 16 to the first reference position specified with high accuracy using the positioning jig 36. That is, in the present embodiment, the second arm portion 16 can be accurately adjusted to the first reference position.

  Further, in this embodiment, in the second reference position specifying step, positioning for positioning the hand base 17 at the second reference position, which is the reference position of the hand base 17 in the rotation direction of the hand base 17 with respect to the second arm portion 16. The second reference position is specified using the jig 37. Therefore, in this embodiment, it is possible to match the hand base 17 to the second reference position specified with high accuracy using the positioning jig 37. That is, in this embodiment, the hand base 17 can be accurately adjusted to the second reference position.

  Furthermore, in this embodiment, in the hand fork positioning step, a positioning jig for positioning the hand fork 18 at the third reference position, which is the reference position of the hand fork 18 in the direction orthogonal to the longitudinal direction of the hand fork 18 with respect to the hand base 17. The tool 38 positions the hand fork 18 at the third reference position. Therefore, in this embodiment, the hand fork 18 can be accurately adjusted to the third reference position.

  In this embodiment, the second arm portion 16 can be accurately aligned with the first reference position after the first reference position specifying step, and the hand base portion 17 is set at the second reference position after the second reference position specifying step. And the hand fork 18 can be accurately adjusted to the third reference position in the hand fork positioning step, so that the second arm portion 16 can be accurately adjusted to the first reference position, and After accurately aligning the hand base 17 with the second reference position and accurately aligning the hand fork 18 with the third reference position, in the robot operation process, the robot 1 is set to a temporary reference posture, and then in the hand movement process. The hand fork 18 can be moved to the delivery position of the substrate 2.

  Further, in the present embodiment, in the subsequent correction value calculation step, the motor 21 is controlled based on the amount of deviation between the fifth reference position and the edge of the detection panel 52 in the rotation direction of the first arm portion 15 with respect to the main body portion 10. Although the correction value for control is calculated, in this embodiment, the robot 1 before replacement in which the detection panel 52 is mounted on the hand fork 18 is operated to move the hand fork 18 to the delivery position of the substrate 2. Since the position where the edge of the detection panel 52 is arranged in the rotation direction of the first arm portion 15 with respect to the main body portion 10 is the fifth reference position, the motor 21 is controlled in the correction value calculation step. By calculating a correction value for performing the correction, the deviation of the robot coordinate system of the robot 1 after replacement is corrected with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before replacement. It is possible to calculate a correction value of the order.

  That is, in this embodiment, the correction value is calculated based on the amount of deviation between the fifth reference position and the edge of the detection panel 52 in the rotation direction of the first arm unit 15 with respect to the main body unit 10, so that It becomes possible to calculate a correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1. That is, the correction value can be calculated based only on the displacement amount of the robot 1 in the rotation direction of the first arm portion 15 with respect to the main body portion 10. Therefore, in this embodiment, it is possible to relatively easily calculate a correction value for correcting the deviation of the robot coordinate system of the robot 1 after replacement with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before replacement. It becomes possible.

  In the present embodiment, in the correction value calculation step, the correction value is calculated based on the amount of deviation between the fifth reference position and the edge of the detection panel 52 in the rotation direction of the first arm portion 15 with respect to the main body portion 10. Therefore, the correction value can be calculated using one sensor 53. In this embodiment, in the second hand fork positioning step, the hand base 17 is rotated by 180 °, and the two hand forks 19 are positioned at a predetermined reference position by the positioning jig 38. Using the positioning jig 38, the hand fork 18 and the hand fork 19 can be positioned.

(Modification 1 of correction value calculation process)
In the embodiment described above, instead of the sensor 53, the amount of deviation in the rotation direction of the first arm portion 15 relative to the main body portion 10 between the fifth reference position and the edge of the detection panel 52 is determined using one camera. You may ask. In this case, for example, a predetermined marking is formed at a location corresponding to the fifth reference position inside the chamber 6, and the amount of deviation between the marking position photographed by the camera and the edge of the detection panel 52 is determined. By obtaining, the amount of deviation between the fifth reference position and the edge of the detection panel 52 is obtained. Further, for example, the coordinates of the fifth reference position are stored in the control unit 27 in advance, and based on the coordinates of the edge of the detection panel 52 photographed by the camera and the coordinates of the fifth reference position, And the edge of the detection panel 52 are obtained.

  In this case, the shift amount between the fifth reference position and the edge of the detection panel 52 can be obtained without rotating the first arm portion 15 with respect to the main body portion 10. In this case, for example, the amount of deviation between the fifth reference position and the edge of the detection panel 52 is obtained by using a camera, and then the first arm portion with respect to the main body 10 is obtained by the obtained amount of deviation. A correction value is calculated based on the detection result of the encoder 24 when the 15 is rotated.

  Even in this case, the correction value may be calculated based on the amount of deviation between the fifth reference position and the edge of the detection panel 52 in the rotation direction of the first arm portion 15 with respect to the main body portion 10. It becomes possible to calculate a correction value using one camera. Alternatively, an optical line sensor may be used instead of the camera to determine the amount of shift in the rotational direction of the first arm portion 15 relative to the main body portion 10 between the fifth reference position and the edge of the detection panel 52. good. Even in this case, the shift amount between the fifth reference position and the edge of the detection panel 52 can be obtained without rotating the first arm portion 15 with respect to the main body portion 10.

(Modification 2 of the correction value calculation step)
FIG. 9 is a diagram for explaining the operation of the robot 1 in the correction value calculation step according to another embodiment of the present invention.

  In the embodiment described above, in the correction value calculation step, the sensor 53 is used to first position the fifth reference position and the edge of the detection panel 52 coincide with each other in the rotation direction of the first arm portion 15 with respect to the main body portion 10. Although the arm portion 15 is rotated, the detection panel 52 (hand fork 18) is located at a position where the fifth reference position and the edge of the detection panel 52 coincide with each other in the rotation direction of the first arm portion 15 with respect to the main body portion 10. The fifth reference position and the edge of the detection panel 52 in the rotation direction of the first arm portion 15 with respect to the main body portion 10 are determined using a fourth positioning jig for positioning the detection panel 52) mounted on the main body portion 10. You may rotate the 1st arm part 15 to the position which corresponds.

  In this case, the fourth positioning jig includes, for example, a pin 55 and a pin holding member 56 in which an insertion hole 56a into which the pin 55 is inserted is formed. The pin holding member 56 is installed inside the chamber 6. The detection panel 52 is formed with a through hole 52a into which the pin 55 is inserted. When the pin 55 inserted into the through hole 52 a of the detection panel 52 is inserted into the insertion hole 56 a of the pin holding member 56, the fifth reference position and the detection are detected in the rotation direction of the first arm portion 15 with respect to the main body portion 10. The detection panel 52 mounted on the hand fork 18 is positioned at a position where the edge of the panel 52 matches.

  In the correction value calculation step in this case, the correction value is calculated based on the detection result of the encoder 24 when the first arm portion 15 is rotated to the position where the detection panel 52 is positioned by the fourth positioning jig. . For example, as shown in FIG. 9A, when the hand fork 18 is moved to the delivery position of the substrate 2 in the chamber 6, the insertion hole 56 a of the pin holding member 56 and the through hole 52 a of the detection panel 52. Is shifted in the rotation direction of the first arm portion 15 with respect to the main body portion 10, in the correction value calculation step, as shown in FIG. 9B, the detection panel 52 is detected by the fourth positioning jig. The first arm portion 15 is rotated to the position where the is positioned. Further, the correction value is calculated based on the detection result of the encoder 24 at that time.

(Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.

  In the embodiment described above, the position where the second arm portion 16 is rotated by a predetermined angle from the origin position of the second arm portion 16 in the rotation direction of the second arm portion 16 with respect to the first arm portion 15 is the first reference position. May be. In this case, when the robot 1 installed in the manufacturing system 3 is replaced, based on the detection result of the origin sensor 32 and the detection result of the encoder 25 so that the second arm unit 16 stops at the first reference position. Then, the second arm portion 16 is rotated and stopped.

  In the embodiment described above, the origin position of the hand base portion 17 in the rotation direction of the hand base portion 17 with respect to the second arm portion 16 may coincide with the second reference position. In this case, when the robot 1 installed in the manufacturing system 3 is replaced, the hand base 17 is rotated based on the detection result of the origin sensor 33 so that the hand base 17 stops at the second reference position. Stop. In the above-described embodiment, a panel mounting process may be performed after the robot operation process.

  In the embodiment described above, the first reference position specifying process, the second reference position specifying process, and the hand fork positioning process are performed on the robot 1 installed in the manufacturing system 3. A first reference position specifying step, a second reference position specifying step, and a hand fork positioning step may be performed on the previous robot 1. For example, a first reference position specifying step, a second reference position specifying step, and a hand fork positioning step may be performed on the robot 1 in the assembly factory of the robot 1.

  In addition, when the robot 1 is transported from the assembly plant to the manufacturing system 3, the manufacturing system from the assembly plant with the hand forks 18 and 19 removed so that the long hand forks 18 and 19 do not hinder the transport. When the robot 1 is transported to 3, the assembly factory performs a first reference position specifying process and a second reference position specifying process on the robot 1, and the robot 1 after being installed in the manufacturing system 3 On the other hand, a hand fork positioning step may be performed.

  In the embodiment described above, the fixing member 41 may be fixed to the second arm portion 16. In this case, an insertion hole as a first insertion hole into which the pin 42 is inserted is formed on the side surface of the proximal end of the first arm portion 15. Further, in the embodiment described above, the fixing member 44 may be fixed to the hand base portion 17. In this case, an insertion hole as a second insertion hole into which the pin 45 is inserted is formed on the side surface of the base end of the first arm portion 15. Further, in the embodiment described above, the fixing members 48 and 49 may be fixed to the second arm portion 16. In this case, insertion holes are formed in the two hand forks 18 as third insertion holes into which the pins 50 are inserted.

  In the embodiment described above, the hand 8 may not include the hand fork 19. Further, in the above-described embodiment, the transport object to be transported by the robot 1 is the organic EL display substrate 2, but the transport object to be transported by the robot 1 may be a glass substrate for a liquid crystal display. However, it may be a semiconductor wafer or the like. Moreover, in the form mentioned above, the robot 1 may be arrange | positioned in the space which is atmospheric pressure.

1 Robot (industrial robot)
2 Substrate (object to be transported)
8 Hand 9 Arm 10 Body 15 First Arm 16 Second Arm 16a Insertion Hole (First Insertion Hole)
16b Insertion hole (third insertion hole)
17 Hand base 17a Insertion hole (second insertion hole)
18 hand fork 19 hand fork (second hand fork)
21 Motor (first motor)
22 Motor (second motor)
23 Motor (third motor)
24 Encoder (first encoder)
25 Encoder (second encoder)
26 Encoder (third encoder)
31 Origin sensor (first origin sensor)
32 Origin sensor (second origin sensor)
33 Origin sensor (third origin sensor)
36 Positioning jig (first positioning jig)
37 Positioning jig (second positioning jig)
38 Positioning jig (third positioning jig)
41 fixing member (first fixing member)
41a Through hole (first through hole)
42 pin (1st pin)
43, 44 fixing member (second fixing member)
44a Through hole (second through hole)
45 pin (2nd pin)
48, 49 Fixing member (third fixing member)
49a Through hole (3rd through hole)
50 pins (3rd pin)

Claims (6)

An adjustment method for an industrial robot,
The industrial robot includes a main body part, a first arm part whose base end side is rotatably connected to the main body part, and a second end whose base end side is rotatably connected to a distal end side of the first arm part. An arm having an arm portion, a hand base portion rotatably connected to the distal end side of the second arm portion, and a hand fork extending in one direction in the horizontal direction from the hand base portion and carrying a conveyance object. A hand having: a first motor for rotating the first arm part relative to the main body part; a second motor for rotating the second arm part relative to the first arm part; A third motor for rotating the hand base relative to the second arm, a first encoder for detecting a rotation amount of the first motor, and a rotation amount of the second motor; The second encoder and the third module A third encoder for detecting the rotation amount of the first arm portion, a first origin sensor for detecting the origin position of the first arm portion in the rotation direction of the first arm portion relative to the main body portion, and the first A second origin sensor for detecting an origin position of the second arm portion in a rotation direction of the second arm portion with respect to the arm portion; and a hand base portion in the rotation direction of the hand base portion with respect to the second arm portion. A third origin sensor for detecting the origin position,
A predetermined reference position of the second arm part in the rotation direction of the second arm part with respect to the first arm part is defined as a first reference position, and the hand base part in the rotation direction of the hand base with respect to the second arm part A predetermined reference position of the hand fork in a direction perpendicular to the longitudinal direction of the hand fork with respect to the hand base as a third reference position.
The method for adjusting the industrial robot is as follows:
Based on the detection result of the second origin sensor so that the second arm unit stops at the first reference position, or based on the detection result of the second origin sensor and the detection result of the second encoder. The first positioning jig for positioning the second arm portion at the first reference position from the first stop position, which is the stop position of the second arm portion when the two arm portions are stopped, is used as the second position. The detection result of the second encoder when the second arm portion is rotated to the position where the arm portion is positioned, and the second when the second arm portion is stopped at the first stop position. A first reference position specifying step of specifying the first reference position based on an encoder value;
After the first reference position specifying step, the hand base is stopped at the second reference position in a state where the second arm portion is arranged at the first reference position specified in the first reference position specifying step. The stop position of the hand base when the hand base is stopped based on the detection result of the third origin sensor or based on the detection result of the third origin sensor and the detection result of the third encoder. The third position when the hand base is rotated from the second stop position to the position where the hand base is positioned by the second positioning jig for positioning the hand base at the second reference position. A second reference position that identifies the second reference position based on the detection result of the encoder and the value of the third encoder when the hand base is stopped at the second stop position And a constant process,
After the second reference position specifying step, the second arm portion is disposed at the first reference position specified in the first reference position specifying step, and the second reference position specifying step specifies the first reference position. A hand fork positioning step of positioning the hand fork with a third positioning jig for positioning the hand fork at the third reference position in a state where the hand base is disposed at the second reference position. A method for adjusting an industrial robot as a feature. When the second arm portion is in the first reference position, the first arm portion and the second arm portion overlap in the vertical direction,
2. The method for adjusting an industrial robot according to claim 1, wherein when the hand base is in the second reference position, the second arm and the hand fork overlap each other in the vertical direction.   The first positioning jig is formed on the other one of the first arm part and the second arm part, and the first fixing member fixed to one of the first arm part and the second arm part. The method for adjusting an industrial robot according to claim 2, further comprising a first pin inserted into a first insertion hole to be inserted into a first through hole formed in the first fixing member.   The second positioning jig includes a second fixing member fixed to one of the first arm and the hand base, and a second formed on the other of the first arm and the hand base. 4. The method for adjusting an industrial robot according to claim 2, further comprising a second pin inserted into the insertion hole and a second through hole formed in the second fixing member. The hand includes two hand forks,
The third positioning jig includes a third fixing member fixed to one of the two hand forks and the second arm portion, and the other of the two hand forks and the second arm portion. 5. The industrial use according to claim 2, further comprising a third insertion hole formed in the third insertion hole and a third pin inserted into a third through hole formed in the third fixing member. How to adjust the robot. The hand includes two second hand forks extending from the hand base in a direction opposite to the hand fork,
In the industrial robot adjustment method, after the hand fork positioning step, the hand base is rotated by 180 °, and the third positioning jig is used to rotate the hand base in a direction perpendicular to the longitudinal direction of the second hand fork. 6. The method for adjusting an industrial robot according to claim 5, further comprising a second hand fork positioning step of positioning the two second hand forks at a predetermined reference position of the second hand fork.

Images