JP7074494B2 - How to calculate the correction value for industrial robots - Google Patents

Description

The present invention relates to a correction value calculation method for an industrial robot that calculates a correction value for correcting the operation of the industrial robot.

Conventionally, an industrial robot that conveys a glass substrate is known (see, for example, Patent Document 1). The industrial robot described in Patent Document 1 is a horizontal articulated robot incorporated in a manufacturing system of an organic EL (organic electroluminescence) display, and has a hand on which a glass substrate is mounted and a hand on the tip side. It includes an arm that is rotatably connected and a main body that is rotatably connected to the base end side of the arm.

The arm includes a first arm portion whose base end side is rotatably connected to the main body portion, and a second arm portion whose base end side is rotatably connected to the tip end side of the first arm portion. The hand includes a hand base that is rotatably connected to the tip end side of the second arm portion, and a hand fork that is fixed to the hand base and on which a glass substrate is mounted. Further, the industrial robot described in Patent Document 1 includes a motor for rotating the first arm portion with respect to the main body portion and a motor for rotating the second arm portion with respect to the first arm portion. , A motor for rotating the hand base with respect to the second arm portion is provided.

Japanese Unexamined Patent Publication No. 2015-139854

When the industrial robot described in Patent Document 1 is installed in a manufacturing system such as an organic EL display, teaching work of the industrial robot is generally performed in order to create an operation program of the industrial robot. Further, for example, when the industrial robot installed in the manufacturing system is replaced or the motor of the industrial robot is replaced, the coordinates of the teaching position taught in the teaching work of the industrial robot before the replacement are The robot coordinate system of the industrial robot after replacement shifts. Therefore, even when the industrial robot is replaced or the motor of the industrial robot is replaced, the teaching work of the industrial robot is generally performed again.

On the other hand, if the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange is corrected, it is not necessary to perform the complicated teaching work again. Therefore, the inventor of the present application calculates a correction value for correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange, and the deviation. I am considering correcting. When calculating the correction value for correcting the deviation, it is preferable that the correction value can be easily calculated.

Therefore, the subject of the present invention is to relatively easily obtain a correction value for correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange. The purpose of the present invention is to provide a method for calculating a correction value of an industrial robot that can be calculated.

In order to solve the above problems, the correction value calculation method for an industrial robot of the present invention is a correction value calculation method for an industrial robot that calculates a correction value for correcting the operation of the industrial robot, and is for industrial use. The robot has a main body portion, a first arm portion whose base end side is rotatably connected to the main body portion, and a second arm portion whose base end side is rotatably connected to the tip end side of the first arm portion. A hand having an arm, a hand base rotatably connected to the tip end side of the second arm portion, a hand fork extending in one direction in the horizontal direction from the hand base, and a hand fork on which a transport object is mounted, and a main body portion. On the other hand, the first motor for rotating the first arm portion, the second motor for rotating the second arm portion with respect to the first arm portion, and the hand base with respect to the second arm portion are rotated. A third motor for moving, a first encoder for detecting the rotation amount of the first motor, a second encoder for detecting the rotation amount of the second motor, and a rotation amount of the third motor are detected. A third encoder for this purpose, a first origin sensor for detecting the origin position of the first arm portion in the rotation direction of the first arm portion with respect to the main body portion, and a rotation direction of the second arm portion with respect to the first arm portion. A second origin sensor for detecting the origin position of the second arm portion in the above, and a third origin sensor for detecting the origin position of the hand base in the rotation direction of the hand base with respect to the second arm portion. The predetermined reference position of the second arm portion in the rotation direction of the second arm portion with respect to the first arm portion is set as the first reference position, and the predetermined reference position of the hand base portion in the rotation direction of the hand base portion with respect to the second arm portion is set as the first reference position. 2 Reference positions, a predetermined reference position of the hand fork in a direction orthogonal to the longitudinal direction of the hand fork with respect to the hand base as a third reference position, and a predetermined position of the first arm portion in the rotation direction of the first arm portion with respect to the main body portion. Assuming that the reference position of is the fourth reference position, the correction value calculation method of the industrial robot is based on the detection result of the second origin sensor or the second origin sensor so that the second arm portion stops at the first reference position. Positioning the second arm portion from the first stop position, which is the stop position of the second arm portion when the second arm portion is stopped, to the first reference position based on the detection result of The detection result of the second encoder when the second arm portion is rotated to the position where the second arm portion is positioned by the first positioning jig for the robot, and the second arm portion stops at the first stop position. Second when After the first reference position specifying step of specifying the first reference position based on the value of the encoder and the first reference position specifying step, the second arm portion is placed at the first reference position specified in the first reference position specifying step. In the placed state, the hand base is based on the detection result of the third origin sensor or the detection result of the third origin sensor and the detection result of the third encoder so that the hand base stops at the second reference position. Rotate the hand base from the second stop position, which is the stop position of the hand base when stopped, to the position where the hand base is positioned by the second positioning jig for positioning the hand base at the second reference position. A second reference position specifying step for specifying a second reference position based on the detection result of the third encoder when the hand base is stopped and the value of the third encoder when the hand base is stopped at the second stop position. After the second reference position specifying step, the second arm portion is arranged at the first reference position specified in the first reference position specifying step, and the hand base portion is placed at the second reference position specified in the second reference position specifying step. Is placed, it is attached to the upper surface of the hand fork after the hand fork positioning step of positioning the hand fork by the third positioning jig for positioning the hand fork at the third reference position and the hand fork positioning step. The panel mounting process of mounting the detection panel on the hand fork so that the detection panel is positioned with respect to the hand fork by the positioning member, and the first at the fourth reference position after the hand fork positioning process or the panel mounting process. The first arm portion when the first arm portion is stopped based on the detection result of the first origin sensor or the detection result of the first origin sensor and the detection result of the first encoder so that the arm portion is stopped. The first motor is driven and controlled based on the third stop position, which is the stop position of the above, and the second motor is driven and controlled based on the first reference position specified in the first reference position specifying step. A robot operation process in which the third motor is driven and controlled with reference to the second reference position specified in the reference position specifying process to make the industrial robot a temporary reference posture, and an industrial robot is operated after the robot operation process. A panel for detecting in the rotation direction of the first arm portion with respect to the fifth reference position, which is a predetermined reference position, and the main body portion , and the hand movement step of moving the hand fork to the delivery position of the object to be conveyed. Amount of deviation from the edge of the first arm in the rotation direction with respect to the main body It is characterized by including a correction value calculation step for calculating a correction value for controlling the first motor based on the above.

In the correction value calculation method of the industrial robot of the present invention, in the first reference position specifying step, the first reference position, which is the reference position of the second arm portion in the rotation direction of the second arm portion with respect to the first arm portion, is the first. 1 Specify using a positioning jig, and in the second reference position specifying step, use the second positioning jig to determine the second reference position, which is the reference position of the hand base in the rotation direction of the hand base with respect to the second arm portion. In the specified hand fork positioning step, the hand fork is positioned by the third positioning jig at the third reference position which is the reference position of the hand fork in the direction orthogonal to the longitudinal direction of the hand fork with respect to the hand base. Further, in the present invention, in the subsequent robot operation process, the second motor is driven and controlled with reference to the first reference position specified in the first reference position specifying step, and is specified in the second reference position specifying step. After the industrial robot is set to a temporary reference posture by driving and controlling the third motor with reference to the second reference position, the hand fork is moved to the delivery position of the object to be conveyed in the hand moving process.

Further, in the present invention, in the subsequent correction value calculation step, the first motor is provided based on the amount of deviation between the predetermined fifth reference position and the edge of the detection panel in the rotation direction of the first arm portion with respect to the main body portion. The correction value for control is calculated. That is, in the present invention, after moving the hand fork to the delivery position of the object to be conveyed in a state where the second arm portion, the hand base portion and the hand fork are aligned with the predetermined reference positions, the fifth reference position and the detection panel are used. The correction value for controlling the first motor is calculated based on the amount of deviation from the edge in the rotation direction of the first arm portion with respect to the main body portion.

Therefore, in the present invention, when the hand fork of the industrial robot before replacement moves to the delivery position of the object to be transported, the edge of the detection panel mounted on the hand fork of the industrial robot before replacement is arranged. If the predetermined position is set as the fifth reference position, the correction value for controlling the first motor is calculated, and the industry after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange. It becomes possible to calculate a correction value for correcting the deviation of the robot coordinate system of the industrial robot.

That is, in the present invention, the correction value is calculated based on the amount of deviation between the fifth reference position and the edge of the detection panel in the rotation direction of the first arm portion with respect to the main body portion, so that the industrial robot before replacement is used. It is possible to calculate a correction value for correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of. Therefore, in the present invention, it is relatively easy to calculate a correction value for correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange. Will be possible.

In the present invention, in the correction value calculation step, for example, the first encoder when the first arm portion is rotated until the edge of the detection panel is detected by one sensor arranged at the fifth reference position. The correction value is calculated based on the detection result. In this case, it becomes possible to calculate the correction value using a relatively inexpensive sensor. In the present invention, in the correction value calculation step, the correction value may be calculated based on the amount of deviation between the fifth reference position and the edge of the detection panel in the rotation direction of the first arm portion with respect to the main body portion. It is possible to calculate the correction value using one sensor.

Further, in the correction value calculation step in the present invention, for example, using one camera, the amount of deviation between the fifth reference position and the edge of the detection panel in the rotation direction of the first arm portion with respect to the main body portion is determined. You may ask. In the present invention, in the correction value calculation step, the correction value may be calculated based on the amount of deviation between the fifth reference position and the edge of the detection panel in the rotation direction of the first arm portion with respect to the main body portion. It is possible to calculate the correction value using multiple cameras.

Further, in the present invention, in the correction value calculation step, for example, in order to position the detection panel at a position where the fifth reference position and the edge of the detection panel coincide with each other in the rotation direction of the first arm portion with respect to the main body portion. The correction value may be calculated based on the detection result of the first encoder when the first arm portion is rotated to the position where the detection panel is positioned by the fourth positioning jig.

In the present invention, for example, when the second arm portion is in the first reference position, the first arm portion and the second arm portion overlap in the vertical direction, and when the hand base portion is in the second reference position, the second arm portion And the hand fork overlap in the vertical direction.

In the present invention, the first positioning jig is, for example, attached to a first fixing member fixed to either one of the first arm portion and the second arm portion and to either one of the first arm portion and the second arm portion. It includes a first pin to be inserted into a first insertion hole formed and a first through hole formed in the first fixing member. In this case, the second arm portion can be positioned at the first reference position with a relatively simple configuration.

In the present invention, the second positioning jig is formed on, for example, a second fixing member fixed to either one of the first arm portion and the hand base portion and a second fixing member formed on either one of the first arm portion and the hand base portion. It is provided with a second pin to be inserted into the two insertion holes and the second through hole formed in the second fixing member. In this case, the hand base can be positioned at the second reference position with a relatively simple configuration.

In the present invention, the hand includes two hand forks, and the third positioning jig includes, for example, a third fixing member fixed to one of the two hand forks and the second arm portion, and two. It is provided with a third pin to be inserted into a third insertion hole formed in one of the hand fork and the second arm portion and a third through hole formed in the third fixing member. In this case, the two hand forks can be positioned at the third reference position with a relatively simple configuration.

As described above, in the correction value calculation method for the industrial robot of the present invention, the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange is corrected. It becomes possible to calculate the correction value for this purpose relatively easily.

It is a figure of the industrial robot which the correction value is calculated by the correction value calculation method of the industrial robot which concerns on embodiment of this invention, (A) is a plan view, (B) is a side view. FIG. 3 is a plan view showing a state in which the industrial robot shown in FIG. 1 is incorporated in a manufacturing system for an organic EL display. It is a block diagram for demonstrating the structure of the industrial robot shown in FIG. 1 is a view showing a state in which a first positioning jig, a second positioning jig, and a third positioning jig are attached to the industrial robot shown in FIG. 1, in which FIG. 1A is a plan view and FIG. 1B is a side view. .. (A) is an enlarged view of part E of FIG. 4 (B), (B) is a figure showing a first positioning jig and the like from the FF direction of (A), and (C) is a figure. It is an enlarged view of the G part of (A). (A) is an enlarged view of the H portion of FIG. 4 (B), (B) is a view showing a second positioning jig and the like from the JJ direction of (A), and (C) is a view of FIG. It is an enlarged view of the K part of (A). (A) is an enlarged view of the L part of FIG. 4 (A), (B) is an enlarged view of the M part of FIG. 4 (B), and (C) is the NN of (B). It is a figure which shows the 3rd positioning jig and the like from the direction, (D) is an enlarged view of the P part of (B). It is a figure for demonstrating the operation of the industrial robot in the correction value calculation process which calculates the correction value of the industrial robot shown in FIG. It is a figure for demonstrating the operation of the industrial robot in the correction value calculation process which concerns on other embodiment of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Structure of industrial robot)
FIG. 1 is a diagram of an industrial robot 1 in which a correction value is calculated by the correction value calculation method of the industrial robot according to the embodiment of the present invention, (A) is a plan view, and (B) is a side view. be. FIG. 2 is a plan view showing a state in which the industrial robot 1 shown in FIG. 1 is incorporated in the organic EL display manufacturing system 3. FIG. 3 is a block diagram for explaining the configuration of the industrial robot 1 shown in FIG.

The industrial robot 1 (hereinafter referred to as “robot 1”) of the present embodiment is a robot for transporting a glass substrate 2 (hereinafter referred to as “board 2”) for an organic EL display which is a transport target. Is. As shown in FIG. 2, the robot 1 is a horizontal articulated robot incorporated and used in the organic EL display manufacturing system 3. The manufacturing system 3 includes a transfer chamber 4 (hereinafter referred to as “chamber 4”) arranged at the center, and a plurality of chambers 5 to 7 arranged so as to surround the chamber 4.

The chamber 5 is a process chamber for performing a predetermined process on the substrate 2. Further, the chamber 6 is, for example, a supply chamber (loader) in which the substrate 2 supplied to the manufacturing system 3 is housed, and the chamber 7 is, for example, the board 2 discharged from the manufacturing system 3. It is a discharge chamber (unloader). The inside of chambers 4 to 7 is evacuated. A part of the robot 1 is arranged inside the chamber 4. When the hand forks 18 and 19 described later that constitute the robot 1 enter the chambers 5 to 7, the robot 1 conveys the substrate 2 between the plurality of chambers 5 to 7.

As shown in FIG. 1, in the robot 1, the hand 8 on which the substrate 2 is mounted, the arm 9 to which the hand 8 is rotatably connected to the tip side, and the base end side of the arm 9 are rotatably connected to each other. It is provided with a main body portion 10. The hand 8 and the arm 9 are arranged on the upper side of the main body portion 10. The main body 10 includes an elevating mechanism for elevating and lowering the arm 9, and a case body 13 in which the elevating mechanism is housed. The case body 13 is formed in a substantially bottomed cylindrical shape. A flange 14 formed in a disk shape is fixed to the upper end of the case body 13.

As described above, a part of the robot 1 is arranged inside the chamber 4. Specifically, a portion of the robot 1 above the lower end surface of the flange 14 is arranged inside the chamber 4. That is, the portion of the robot 1 above the lower end surface of the flange 14 is arranged in the vacuum region VR, and the hand 8 and the arm 9 are arranged in the vacuum chamber (in vacuum). On the other hand, the portion of the robot 1 below the lower end surface of the flange 14 is arranged in the atmospheric region AR (in the atmosphere).

The arm 9 includes a first arm portion 15 and a second arm portion 16 that are rotatably connected to each other. The arm 9 of this embodiment is composed of two arm portions, a first arm portion 15 and a second arm portion 16. The base end side of the first arm portion 15 is rotatably connected to the main body portion 10. The base end side of the second arm portion 16 is rotatably connected to the tip end side of the first arm portion 15. A hand 8 is rotatably connected to the tip end side of the second arm portion 16.

The second arm portion 16 is arranged above the first arm portion 15. Further, the hand 8 is arranged above the second arm portion 16. The distance between the rotation center of the first arm portion 15 with respect to the main body portion 10 and the rotation center of the second arm portion 16 with respect to the first arm portion 15 is the rotation center of the second arm portion 16 with respect to the first arm portion 15. It is equal to the distance from the rotation center of the hand 8 with respect to the second arm portion 16.

The hand 8 includes a hand base 17 rotatably connected to the tip end side of the second arm portion 16 and hand forks 18 and 19 on which the substrate 2 is mounted. The hand 8 of this embodiment includes two hand forks 18 and two hand forks 19. The hand forks 18 and 19 are formed in a straight line. The hand fork 18 and the hand fork 19 are formed in the same shape. The two hand forks 18 are arranged in parallel with each other at a predetermined distance. The hand fork 18 extends in one horizontal direction from the hand base 17. The two hand forks 19 are arranged in parallel with each other at a predetermined distance. The hand fork 19 extends from the hand base 17 in the direction opposite to the hand fork 18.

The hand forks 18 and 19 are fixed to the hand base 17. Specifically, the hand forks 18 and 19 are fixed to the hand base 17 by fixing screws. The hand forks 18 and 19 are formed with insertion holes through which fixing screws are inserted. This insertion hole is an elongated hole whose longitudinal direction is orthogonal to the longitudinal direction of the hand forks 18 and 19, and the hand forks 18 and 19 with respect to the hand base 17 in the direction orthogonal to the longitudinal direction of the hand forks 18 and 19. It is possible to adjust the fixed position of.

In this embodiment, one substrate 2 is mounted on two hand forks 18. Further, one substrate 2 is mounted on two hand forks 19. A positioning member for positioning the board 2 to be mounted is attached to the upper surface of the hand fork 18. A positioning member for positioning the board 2 to be mounted is also attached to the upper surface of the hand fork 19.

Further, the robot 1 includes a motor 21 for rotating the first arm portion 15 with respect to the main body portion 10, and a motor 22 for rotating the second arm portion 16 with respect to the first arm portion 15. A motor 23 for rotating the hand base 17 with respect to the second arm portion 16, an encoder 24 for detecting the rotation amount of the motor 21, an encoder 25 for detecting the rotation amount of the motor 22, and a motor. It is provided with an encoder 26 for detecting the amount of rotation of the 23 (see FIG. 3).

The encoder 24 is attached to the motor 21. The encoder 25 is attached to the motor 22, and the encoder 26 is attached to the motor 23. The motor 21 and the encoder 24 are arranged, for example, inside the main body 10. Further, the motors 22 and 23 and the encoders 25 and 26 are arranged inside the first arm portion 15, for example. The motors 21 to 23 are electrically connected to the control unit 27 of the robot 1. Encoders 24 to 26 are also electrically connected to the control unit 27. The motor 21 of this embodiment is a first motor, the motor 22 is a second motor, and the motor 23 is a third motor. Further, the encoder 24 is the first encoder, the encoder 25 is the second encoder, and the encoder 26 is the third encoder.

Further, the robot 1 includes an origin sensor 31 for detecting the origin position of the first arm portion 15 in the rotation direction of the first arm portion 15 with respect to the main body portion 10, and a second arm portion 16 with respect to the first arm portion 15. The origin sensor 32 for detecting the origin position of the second arm portion 16 in the rotation direction and the origin sensor 33 for detecting the origin position of the hand base 17 in the rotation direction of the hand base 17 with respect to the second arm portion 16. And have. The origin sensor 31 of this embodiment is a first origin sensor, the origin sensor 32 is a second origin sensor, and the origin sensor 33 is a third origin sensor.

The origin sensors 31 to 33 are, for example, proximity sensors. Alternatively, the origin sensors 31 to 33 are, for example, optical sensors having a light emitting element and a light receiving element. The origin sensors 31 to 33 are electrically connected to the control unit 27. In the joint portion that is the connecting portion between the main body portion 10 and the first arm portion 15, the origin sensor 31 is fixed to either the main body portion 10 or the first arm portion 15, and the main body portion 10 and the first arm portion 15 are fixed. A detection member detected by the origin sensor 31 when the first arm portion 15 is in the origin position is fixed to either one or the other.

Similarly, in the joint portion that is the connecting portion between the first arm portion 15 and the second arm portion 16, the origin sensor 32 is fixed to either the first arm portion 15 or the second arm portion 16 and is first. A detection member detected by the origin sensor 32 when the second arm portion 16 is at the origin position is fixed to either the arm portion 15 or the second arm portion 16. Further, in the joint portion which is the connecting portion between the second arm portion 16 and the hand base portion 17, the origin sensor 33 is fixed to either the second arm portion 16 or the hand base portion 17, and the second arm portion 16 and the hand are fixed. A detection member detected by the origin sensor 33 when the hand base 17 is in the origin position is fixed to any other of the bases 17.

(Calculation method of correction value for industrial robot)
4A and 4B are views in a state where the positioning jigs 36 to 38 are attached to the robot 1 shown in FIG. 1, in which FIG. 4A is a plan view and FIG. 4B is a side view. 5 (A) is an enlarged view of part E of FIG. 4 (B), and FIG. 5 (B) is a view showing a positioning jig 36 and the like from the FF direction of FIG. 5 (A). 5 (C) is an enlarged view of a part G of FIG. 5 (A). 6 (A) is an enlarged view of the H portion of FIG. 4 (B), and FIG. 6 (B) is a view showing a positioning jig 37 and the like from the JJ direction of FIG. 6 (A). FIG. 6C is an enlarged view of a portion K in FIG. 6A. 7 (A) is an enlarged view of the L portion of FIG. 4 (A), FIG. 7 (B) is an enlarged view of the M portion of FIG. 4 (B), and FIG. 7 (C) is a diagram. 7 (B) is a diagram showing a positioning jig 38 and the like from the NN direction, and FIG. 7 (D) is an enlarged view of a P portion of FIG. 7 (B). FIG. 8 is a diagram for explaining the operation of the robot 1 in the correction value calculation process for calculating the correction value of the robot 1 shown in FIG.

When the robot 1 is installed in the manufacturing system 3, the teaching work of the robot 1 is performed in order to create an operation program of the robot 1. Further, for example, when the robot 1 installed in the manufacturing system 3 is replaced, the robot coordinate system of the replaced robot 1 shifts from the coordinates of the teaching position taught in the teaching work of the robot 1 before the replacement. , It becomes necessary to perform the teaching work of the robot 1 again.

On the other hand, if the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange is corrected, it is not necessary to perform the complicated teaching work again. In this embodiment, when the robot 1 installed in the manufacturing system 3 is replaced, the teaching work of the robot 1 before the replacement is taught so that the complicated teaching work does not have to be performed again after the robot 1 is replaced. A correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position is calculated. That is, a correction value for correcting the operation of the robot 1 after replacement is calculated. Hereinafter, a method of calculating this correction value will be described.

In the following description, the rotation of the hand base 17 with respect to the second arm portion 16 is set to a predetermined reference position of the second arm portion 16 in the rotation direction of the second arm portion 16 with respect to the first arm portion 15. The predetermined reference position of the hand base 17 in the direction is set as the second reference position, and the predetermined reference position of the hand fork 18 in the direction orthogonal to the longitudinal direction of the hand fork 18 with respect to the hand base 17 is set as the third reference position. A predetermined reference position of the first arm portion 15 in the rotation direction of the first arm portion 15 with respect to the reference position is set as a fourth reference position.

In this embodiment, when the second arm portion 16 is in the first reference position, the first arm portion 15 and the second arm portion 16 overlap each other in the vertical direction as shown in FIG. Specifically, when the second arm portion 16 is in the first reference position, the longitudinal direction of the first arm portion 15 and the longitudinal direction of the second arm portion 16 coincide with each other when viewed from above and below. The first arm portion 15 and the second arm portion 16 overlap each other in the vertical direction. Further, in the present embodiment, the origin position of the second arm portion 16 and the first reference position in the rotation direction of the second arm portion 16 with respect to the first arm portion 15 coincide with each other.

Further, when the hand base portion 17 is in the second reference position, the second arm portion 16 and the hand fork 18 overlap each other in the vertical direction as shown in FIG. Specifically, when the hand base 17 is in the second reference position, the second arm portion is aligned so that the longitudinal direction of the second arm portion 16 and the longitudinal direction of the hand fork 18 are aligned when viewed from above and below. The 16 and the hand fork 18 overlap each other in the vertical direction. Further, in the present embodiment, the position where the hand base portion 17 is rotated by 90 ° from the origin position of the hand base portion 17 in the rotation direction of the hand base portion 17 with respect to the second arm portion 16 is the second reference position.

The fourth reference position may coincide with the origin position of the first arm portion 15 in the rotation direction of the first arm portion 15 with respect to the main body portion 10, or the rotation of the first arm portion 15 with respect to the main body portion 10. The position where the first arm portion 15 is rotated by a predetermined angle from the origin position of the first arm portion 15 in the moving direction may be the fourth reference position.

Further, in the present embodiment, a positioning jig 36 for positioning the second arm portion 16 at the first reference position, a positioning jig 37 for positioning the hand base 17 at the second reference position, and a third reference position. A positioning jig 38 for positioning the hand fork 18 is used. The positioning jig 36 of this embodiment is a first positioning jig, the positioning jig 37 is a second positioning jig, and the positioning jig 38 is a third positioning jig. The positioning jig 38 is also used when positioning the hand fork 19 at a predetermined reference position of the hand fork 19 with respect to the hand base 17 in a direction orthogonal to the longitudinal direction of the hand fork 19.

As shown in FIG. 5, the positioning jig 36 includes a fixing member 41 fixed to the first arm portion 15 and a pin 42. The fixing member 41 is fixed to the side surface of the base end of the first arm portion 15. The fixing member 41 is formed with a through hole 41a into which the pin 42 is inserted. Further, an insertion hole 16a into which the pin 42 is inserted is formed on the side surface of the tip of the second arm portion 16. When the pin 42 inserted into the through hole 41a of the fixing member 41 is inserted into the insertion hole 16a, the second arm portion 16 is precisely positioned at the first reference position. The fixing member 41 of the present embodiment is the first fixing member, the pin 42 is the first pin, the insertion hole 16a is the first insertion hole, and the through hole 41a is the first through hole.

As shown in FIG. 6, the positioning jig 37 includes fixing members 43 and 44 fixed to the first arm portion 15, and pins 45. The fixing member 43 is fixed to the side surface of the base end of the first arm portion 15. The fixing member 44 is fixed to the side surface of the fixing member 43. The fixing member 43 is formed with a groove portion for preventing interference with the fixing member 41. The bottom surface of the fixing member 44 is in contact with the tip surface of a screw 46 for adjusting the vertical position of the fixing member 44 with respect to the fixing member 43. The screw 46 is screwed into the screw holding member 47 fixed to the lower end surface of the fixing member 43.

The fixing member 44 is formed with a through hole 44a into which the pin 45 is inserted. Further, an insertion hole 17a into which the pin 45 is inserted is formed on the side surface of the hand base 17. When the pin 45 inserted into the through hole 44a of the fixing member 44 is inserted into the insertion hole 17a, the hand base 17 is precisely positioned at the second reference position. The fixing members 43 and 44 of the present embodiment are second fixing members, the pin 45 is a second pin, the insertion hole 17a is a second insertion hole, and the through hole 44a is a second through hole.

As shown in FIG. 7, the positioning jig 38 includes fixing members 48 and 49 fixed to the two hand forks 18 and pins 50. The fixing member 48 is fixed to the upper surface of the two hand forks 18. The fixing member 49 is fixed to the lower surface of the fixing member 48. The fixing member 49 is formed with a through hole 49a into which the pin 50 is inserted. Further, an insertion hole 16b into which the pin 50 is inserted is formed on the side surface of the base end of the second arm portion 16. When the pin 50 inserted into the through hole 49a of the fixing member 49 is inserted into the insertion hole 16b, the two hand forks 18 are precisely positioned at the third reference position. The fixing members 48 and 49 of this embodiment are the third fixing member, the pin 50 is the third pin, the insertion hole 16b is the third insertion hole, and the through hole 49a is the third through hole.

For example, when the robot 1 installed in the manufacturing system 3 is replaced, first, the second arm portion 16 is rotated to the first reference position (origin position) based on the detection result of the origin sensor 32. That is, the second arm portion 16 is rotated and stopped based on the detection result of the origin sensor 32 so that the second arm portion 16 stops at the first reference position.

Further, the hand base 17 is rotated to the second reference position (position rotated by 90 ° from the origin position) based on the detection result of the origin sensor 33 and the detection result of the encoder 26. For example, after rotating the hand base 17 to the origin position based on the detection result of the origin sensor 33, the hand base 17 is rotated from the origin position to the second reference position based on the detection result of the encoder 26. That is, the hand base 17 is rotated and stopped based on the detection result of the origin sensor 33 and the detection result of the encoder 26 so that the hand base 17 stops at the second reference position.

After that, the fixing members 41, 43, 44 are fixed to the first arm portion 15, and the fixing members 48, 49 are fixed to the two hand forks 18. Strictly speaking, the second arm portion 16 rotated to the first reference position based on the detection result of the origin sensor 32 is slightly deviated from the first reference position. Similarly, the hand base 17 rotated to the second reference position based on the detection result of the origin sensor 33 and the detection result of the encoder 26 is, strictly speaking, slightly deviated from the second reference position.

After that, the second arm portion 16 is rotated with respect to the first arm portion 15 until the pin 42 inserted into the through hole 41a of the fixing member 41 fits into the insertion hole 16a, and the pin 42 is inserted into the insertion hole 16a. , The second arm portion 16 is strictly positioned at the first reference position. Further, the amount of rotation of the motor 22 at that time is detected by the encoder 25, and the control unit 27 specifies the first reference position of the second arm unit 16 by using the detection result of the encoder 25.

That is, the first stop, which is the stop position of the second arm portion 16 when the second arm portion 16 is stopped based on the detection result of the origin sensor 32 so that the second arm portion 16 stops at the first reference position. The detection result of the encoder 25 when the second arm portion 16 is rotated from the position to the position where the second arm portion 16 is positioned at the first reference position by the positioning jig 36, and the second at the first stop position. The first reference position is specified based on the value of the encoder 25 when the arm portion 16 is stopped (first reference position specifying step).

After that, with the second arm portion 16 arranged at the first reference position specified in the first reference position specifying step, the position where the pin 45 inserted into the through hole 44a of the fixing member 44 fits into the insertion hole 17a. The hand base 17 is rotated with respect to the second arm portion 16 to insert the pin 45 into the insertion hole 17a, and the hand base 17 is strictly positioned at the second reference position. Further, the amount of rotation of the motor 23 at that time is detected by the encoder 26, and the control unit 27 identifies the second reference position of the hand base 17 by using the detection result of the encoder 26.

That is, with the detection result of the origin sensor 33 so that the hand base 17 stops at the second reference position while the second arm portion 16 is arranged at the first reference position specified in the first reference position specifying step. The hand base 17 is rotated from the second stop position, which is the stop position of the hand base 17 when the hand base 17 is stopped based on the detection result of the encoder 26, to the position where the hand base 17 is positioned by the positioning jig 37. The second reference position is specified based on the detection result of the encoder 26 when the encoder 26 is moved and the value of the encoder 26 when the hand base 17 is stopped at the second stop position (second reference position specifying step). ..

After that, the second arm portion 16 is arranged at the first reference position specified in the first reference position specifying step, and the hand base 17 is arranged at the second reference position specified in the second reference position specifying step. In this state, two hand forks 18 are inserted with respect to the hand base 17 in a direction orthogonal to the longitudinal direction of the hand fork 18 until the pin 50 inserted into the through hole 49a of the fixing member 49 fits into the insertion hole 16b. The pin 50 is inserted into the insertion hole 16b by moving the pin 50, and the two hand forks 18 are positioned at the third reference position.

That is, the second arm portion 16 is arranged at the first reference position specified in the first reference position specifying step, and the hand base 17 is arranged at the second reference position specified in the second reference position specifying step. In this state, the two hand forks 18 are positioned by the positioning jig 38 (hand fork positioning step). The positioned hand fork 18 is fixed to the hand base 17 by a screw.

After that, at least the positioning jigs 37 and 38 are removed, and the hand base 17 is rotated by 180 ° with respect to the second arm portion 16. In this state, the fixing members 48 and 49 are fixed to the two hand forks 19. Further, the two hand forks 19 are moved with respect to the hand base 17 in a direction orthogonal to the longitudinal direction of the hand fork 19 until the pin 50 inserted into the through hole 49a of the fixing member 49 fits into the insertion hole 16b. The pin 50 is inserted into the insertion hole 16b, and the two hand forks 19 are positioned at predetermined reference positions. The positioned hand fork 19 is fixed to the hand base 17 by a screw.

After that, the detection panel 52 (see FIG. 8) is mounted on the two hand forks 18 (panel mounting process). The detection panel 52 is a panel used when calculating a correction value in the correction value calculation step described later, and is formed in a rectangular flat plate shape, for example. The detection panel 52 is mounted on the two hand forks 18 in a state of being positioned by a positioning member attached to the upper surface of the hand fork 18.

After that, the first arm portion 15 is stopped based on the detection result of the origin sensor 31 or based on the detection result of the origin sensor 31 and the detection result of the encoder 24 so that the first arm portion 15 stops at the fourth reference position. The motor 21 is driven and controlled with reference to the third stop position, which is the stop position of the first arm portion 15 at the time, and the motor 22 is driven with reference to the first reference position specified in the first reference position specifying step. In addition to controlling, the motor 23 is driven and controlled with reference to the second reference position specified in the second reference position specifying step to set the robot 1 in a temporary reference posture (robot operation step).

That is, the motor 21 is driven and controlled based on the third stop position, the motor 22 is driven and controlled based on the first reference position specified in the first reference position specifying step, and the motor 22 is driven and controlled in the second reference position specifying step. The motor 23 is driven and controlled with reference to the specified second reference position to operate the robot 1 to a temporary operation start position. In this embodiment, for example, the first arm 15 stops at the third stop position, the second arm portion 16 stops at the first reference position, and the hand base 17 stops at a position rotated by 90 ° from the second reference position. This state is the temporary operation start position of the robot 1. Further, in this embodiment, the operation start position of the robot 1 and the home position of the robot 1 coincide with each other. However, the operation start position of the robot 1 and the home position of the robot 1 may be different from each other.

If the origin position of the first arm portion 15 and the fourth reference position in the rotation direction of the first arm portion 15 with respect to the main body portion 10 match, the fourth reference position is used in the robot operation process. The first arm portion 15 is rotated and stopped based on the detection result of the origin sensor 31 so that the 1 arm portion 15 is stopped. Further, when the position where the first arm portion 15 is rotated by a predetermined angle from the origin position of the first arm portion 15 in the rotation direction of the first arm portion 15 with respect to the main body portion 10 is the fourth reference position. In the robot operation process, the first arm portion 15 is rotated and stopped based on the detection result of the origin sensor 31 and the detection result of the encoder 24 so that the first arm portion 15 stops at the fourth reference position. Strictly speaking, the third stop position is slightly deviated from the fourth reference position. Further, the positioning jigs 36 and 38 have been removed before the robot operation process.

After that, the robot 1 is operated to move the hand fork 18 to the delivery position of the substrate 2 (hand movement step). For example, as shown in FIG. 8A, the hand fork 18 is moved to the delivery position of the substrate 2 in the chamber 6. Specifically, the arm 9 is extended to move the hand fork 18 to the delivery position of the substrate 2 in the chamber 6. After that, a correction value for controlling the motor 21 based on the amount of deviation between the fifth reference position, which is a predetermined reference position, and the edge of the detection panel 52 in the rotation direction of the first arm portion 15 with respect to the main body portion 10. Is calculated (correction value calculation process).

Specifically, when the robot 1 before replacement in which the detection panel 52 is mounted on the hand fork 18 is operated to move the hand fork 18 to the delivery position of the substrate 2, the first arm portion with respect to the main body portion 10 The position where the edge of the detection panel 52 is arranged in the rotation direction of 15 is the fifth reference position. Further, one sensor 53 is arranged at the fifth reference position. The sensor 53 is, for example, an optical sensor having a light emitting element and a light receiving element, or a proximity sensor. The sensor 53 is installed inside the chamber 6.

In the correction value calculation step, until the sensor 53 detects the edge of the detection panel 52 (that is, in the rotation direction of the first arm portion 15 with respect to the main body portion 10, the fifth reference position and the edge of the detection panel 52 The control unit 27 calculates the correction value based on the detection result of the encoder 24 when the first arm unit 15 is rotated.

For example, as shown in FIG. 8A, when the hand fork 18 is moved to the delivery position of the substrate 2 in the chamber 6, the edge of the sensor 53 and the detection panel 52 arranged at the fifth reference position. However, when the first arm portion 15 is deviated from the main body portion 10 in the rotation direction, the edge of the detection panel 52 is removed by the sensor 53 in the correction value calculation step as shown in FIG. 8 (B). The first arm portion 15 is rotated until it is detected. Further, the correction value is calculated based on the detection result of the encoder 24 at that time. The edge of the detection panel 52 is detected by the sensor 53 when the sensor 53 is switched on and off.

After that, the motor 21 is driven and controlled by reflecting the correction value calculated in the correction value calculation step, and the motor 22 is driven and controlled with reference to the first reference position specified in the first reference position specifying step. 2 The motor 23 is driven and controlled with reference to the second reference position specified in the reference position specifying step, and the robot 1 is returned to the normal operation start position.

In this embodiment, after that, the hand base 17 is rotated by 180 °, the detection panel 52 is replaced with the two hand forks 19, and then the hand fork 19 is placed at the delivery position of the substrate 2 in the chamber 6. Move it. At this time, if the edge of the detection panel 52 mounted on the hand fork 19 is not detected by the sensor 53, the positioning is such that the edge of the detection panel 52 mounted on the hand fork 19 is detected by the sensor 53. The jig 38 is used to adjust the fixing position of the hand fork 19 to the hand base 17 in the direction orthogonal to the longitudinal direction of the hand fork 19.

(Main effect of this form)
As described above, in the present embodiment, the positioning jig 36 is used in the first reference position specifying step at the reference position of the second arm portion 16 in the rotation direction of the second arm portion 16 with respect to the first arm portion 15. A certain first reference position is specified, and in the second reference position specifying step, the positioning jig 37 is used to use the second reference position, which is the reference position of the hand base 17 in the rotation direction of the hand base 17 with respect to the second arm portion 16. In the hand fork positioning process, the hand fork 18 is positioned at the third reference position, which is the reference position of the hand fork 18 in the direction orthogonal to the longitudinal direction of the hand fork 18 with respect to the hand base 17. There is. Further, in the present embodiment, in the subsequent robot operation process, the motor 22 is driven and controlled with reference to the first reference position specified in the first reference position specifying step, and the second reference position is specified in the second reference position specifying step. 2 The motor 23 is driven and controlled with reference to the reference position to set the robot 1 in a temporary reference posture, and then the hand fork 18 is moved to the delivery position of the substrate 2 in the hand moving step.

Further, in the present embodiment, in the subsequent correction value calculation step, the motor 21 is set based on the amount of deviation between the fifth reference position and the edge of the detection panel 52 in the rotation direction of the first arm portion 15 with respect to the main body portion 10. The correction value for control is calculated. That is, in this embodiment, the hand fork 18 is moved to the delivery position of the substrate 2 with the second arm portion 16, the hand base portion 17, and the hand fork 18 aligned with the predetermined reference positions, and then detected as the fifth reference position. A correction value for controlling the motor 21 is calculated based on the amount of deviation of the first arm portion 15 with respect to the edge of the panel 52 in the rotation direction with respect to the main body portion 10.

Further, in the present embodiment, when the robot 1 before replacement in which the detection panel 52 is mounted on the hand fork 18 is operated to move the hand fork 18 to the delivery position of the substrate 2, the first arm with respect to the main body portion 10 The position where the edge of the detection panel 52 is arranged in the rotation direction of the portion 15 is the fifth reference position. Therefore, in the present embodiment, by calculating the correction value for controlling the motor 21 in the correction value calculation step, the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange. It becomes possible to calculate a correction value for correcting the deviation of the robot coordinate system.

That is, in this embodiment, the correction value is calculated based on the amount of deviation between the fifth reference position and the edge of the detection panel 52 in the rotation direction of the first arm portion 15 with respect to the main body portion 10, so that the correction value is calculated before the replacement. It is possible to calculate a correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1. Therefore, in the present embodiment, it is relatively easy to calculate the correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange. It will be possible.

Further, in the present embodiment, in the correction value calculation step, the correction value is calculated based on the amount of deviation between the fifth reference position and the edge of the detection panel 52 in the rotation direction of the first arm portion 15 with respect to the main body portion 10. Therefore, it is possible to calculate the correction value using one sensor 53. Further, in the present embodiment, since the correction value can be calculated by using the sensor 53 which is an optical sensor or the proximity sensor, it is possible to calculate the correction value by using a relatively inexpensive sensor 53. become.

(Modification example 1 of the correction value calculation process)
In the above-described embodiment, one camera is used instead of the sensor 53 to determine the amount of deviation between the fifth reference position and the edge of the detection panel 52 in the rotation direction of the first arm portion 15 with respect to the main body portion 10. You may ask. In this case, for example, a predetermined marking is formed at a position corresponding to the fifth reference position inside the chamber 6, and the amount of deviation between the position of the marking photographed by the camera and the edge of the detection panel 52 is determined. By obtaining it, the amount of deviation between the fifth reference position and the edge of the detection panel 52 is obtained. Further, for example, the coordinates of the fifth reference position are stored in advance in the control unit 27, and the fifth reference position is based on the coordinates of the edge of the detection panel 52 taken by the camera and the coordinates of the fifth reference position. And the amount of deviation from the edge of the detection panel 52 are obtained.

In this case, it is possible to obtain the amount of deviation between the fifth reference position and the edge of the detection panel 52 without rotating the first arm portion 15 with respect to the main body portion 10. Further, in this case, for example, after finding the amount of deviation between the fifth reference position and the edge of the detection panel 52 using a camera, the first arm portion with respect to the main body portion 10 by the obtained deviation amount. The correction value is calculated based on the detection result of the encoder 24 when the 15 is rotated.

Even in this case, the correction value may be calculated based on the amount of deviation between the fifth reference position and the edge of the detection panel 52 in the rotation direction of the first arm portion 15 with respect to the main body portion 10. It is possible to calculate the correction value using one camera. Further, instead of the camera, an optical line sensor may be used to obtain the amount of deviation between the fifth reference position and the edge of the detection panel 52 in the rotation direction of the first arm portion 15 with respect to the main body portion 10. good. Even in this case, it is possible to obtain the amount of deviation between the fifth reference position and the edge of the detection panel 52 without rotating the first arm portion 15 with respect to the main body portion 10.

(Modification example 2 of the correction value calculation process)
FIG. 9 is a diagram for explaining the operation of the robot 1 in the correction value calculation step according to another embodiment of the present invention.

In the above-described embodiment, in the correction value calculation step, the sensor 53 is used to first reach a position where the fifth reference position and the edge of the detection panel 52 coincide with each other in the rotation direction of the first arm portion 15 with respect to the main body portion 10. Although the arm portion 15 is rotated, the detection panel 52 (hand fork 18) is located at a position where the fifth reference position and the edge of the detection panel 52 coincide with each other in the rotation direction of the first arm portion 15 with respect to the main body portion 10. The fifth reference position and the edge of the detection panel 52 are aligned with each other in the rotation direction of the first arm portion 15 with respect to the main body portion 10 by using the fourth positioning jig for positioning the detection panel 52) mounted on the main body portion 10. The first arm portion 15 may be rotated to a matching position.

In this case, the fourth positioning jig includes, for example, a pin 55 and a pin holding member 56 in which an insertion hole 56a into which the pin 55 is inserted is formed. The pin holding member 56 is installed inside the chamber 6. The detection panel 52 is formed with a through hole 52a into which the pin 55 is inserted. When the pin 55 inserted into the through hole 52a of the detection panel 52 is inserted into the insertion hole 56a of the pin holding member 56, it is detected as the fifth reference position in the rotation direction of the first arm portion 15 with respect to the main body portion 10. The detection panel 52 mounted on the hand fork 18 is positioned at a position that coincides with the edge of the panel 52.

In the correction value calculation step in this case, the correction value is calculated based on the detection result of the encoder 24 when the first arm portion 15 is rotated to the position where the detection panel 52 is positioned by the fourth positioning jig. .. For example, as shown in FIG. 9A, when the hand fork 18 is moved to the delivery position of the substrate 2 in the chamber 6, the insertion hole 56a of the pin holding member 56 and the through hole 52a of the detection panel 52 are used. When is deviated in the rotation direction of the first arm portion 15 with respect to the main body portion 10, in the correction value calculation step, as shown in FIG. 9B, the detection panel 52 is used by the fourth positioning jig. The first arm portion 15 is rotated to the position where is positioned. Further, the correction value is calculated based on the detection result of the encoder 24 at that time.

(Other embodiments)
The above-mentioned embodiment is an example of a preferred embodiment of the present invention, but the present invention is not limited thereto, and various modifications can be carried out without changing the gist of the present invention.

In the above-described embodiment, when the robot 1 before replacement in which the detection panel 52 is mounted on the hand fork 18 is operated to move the hand fork 18 to the delivery position of the substrate 2, the first arm portion with respect to the main body portion 10 The fifth reference position may be two positions, one is the position where one edge of the detection panel 52 is arranged in the rotation direction of 15, and the other is the position where the other edge of the detection panel 52 is arranged. In this case, the sensor 53 is arranged at each of the two fifth reference positions.

In the above-described embodiment, the position where the second arm portion 16 is rotated by a predetermined angle from the origin position of the second arm portion 16 in the rotation direction of the second arm portion 16 with respect to the first arm portion 15 is the first reference position. May be. In this case, based on the detection result of the origin sensor 32 and the detection result of the encoder 25 so that the second arm portion 16 stops at the first reference position when the robot 1 installed in the manufacturing system 3 is replaced. The second arm portion 16 is rotated and stopped.

Further, in the above-described embodiment, the origin position of the hand base 17 in the rotation direction of the hand base 17 with respect to the second arm 16 may coincide with the second reference position. In this case, when the robot 1 installed in the manufacturing system 3 is replaced, the hand base 17 is rotated based on the detection result of the origin sensor 33 so that the hand base 17 stops at the second reference position. Stop it. Further, in the above-described embodiment, the panel mounting process may be performed after the robot operation process.

In the above-described embodiment, the first reference position specifying step, the second reference position specifying step, and the hand fork positioning step are performed on the robot 1 installed in the manufacturing system 3, but the robot 1 is installed in the manufacturing system 3. The first reference position specifying step, the second reference position specifying step, and the hand fork positioning step may be performed on the previous robot 1. For example, in the assembly factory of the robot 1, the first reference position specifying step, the second reference position specifying step, and the hand fork positioning step may be performed on the robot 1.

Further, when transporting the robot 1 from the assembly plant to the manufacturing system 3, the manufacturing system is manufactured from the assembly plant with the hand forks 18 and 19 removed so that the long hand forks 18 and 19 do not interfere with the transport. When transporting the robot 1 to 3, the first reference position specifying step and the second reference position specifying step are performed on the robot 1 in the assembly factory, and the robot 1 is installed in the manufacturing system 3. On the other hand, the hand fork positioning step may be performed.

In the above-described embodiment, the fixing member 41 may be fixed to the second arm portion 16. In this case, an insertion hole as a first insertion hole into which the pin 42 is inserted is formed on the side surface of the base end of the first arm portion 15. Further, in the above-described form, the fixing member 44 may be fixed to the hand base 17. In this case, an insertion hole as a second insertion hole into which the pin 45 is inserted is formed on the side surface of the base end of the first arm portion 15. Further, in the above-described embodiment, the fixing members 48 and 49 may be fixed to the second arm portion 16. In this case, the two hand forks 18 are formed with insertion holes as third insertion holes into which the pins 50 are inserted.

In the above-described embodiment, the hand 8 does not have to include the hand fork 19. Further, in the above-described embodiment, the object to be conveyed by the robot 1 is the substrate 2 for the organic EL display, but the object to be conveyed by the robot 1 may be a glass substrate for the liquid crystal display. However, it may be a semiconductor wafer or the like. Further, in the above-described embodiment, the robot 1 may be arranged in a space having an atmospheric pressure.

1 Robot (industrial robot)
2 Substrate (object to be transported)
8 Hand 9 Arm 10 Main body 15 1st arm 16 2nd arm 16a Insertion hole (1st insertion hole)
16b Insertion hole (third insertion hole)
17 Hand base 17a Insertion hole (second insertion hole)
18 Hand fork 21 Motor (1st motor)
22 motor (second motor)
23 motor (third motor)
24 Encoder (1st encoder)
25 encoder (second encoder)
26 Encoder (3rd encoder)
31 Origin sensor (1st origin sensor)
32 Origin sensor (second origin sensor)
33 Origin sensor (3rd origin sensor)
36 Positioning jig (first positioning jig)
37 Positioning jig (second positioning jig)
38 Positioning jig (third positioning jig)
41 Fixing member (first fixing member)
41a through hole (first through hole)
42 pin (1st pin)
43, 44 Fixing member (second fixing member)
44a through hole (second through hole)
45 pin (2nd pin)
48, 49 fixing member (third fixing member)
49a through hole (third through hole)
50 pin (3rd pin)
52 Detection panel 53 Sensor 55 pin (part of 4th positioning jig)
56 Pin holding member (part of the 4th positioning jig)

Claims (8)

It is a correction value calculation method for an industrial robot that calculates a correction value for correcting the operation of an industrial robot.
The industrial robot has a main body portion, a first arm portion rotatably connected to the main body portion on the proximal end side, and a second arm portion rotatably connected to the distal end side of the first arm portion. An arm having an arm portion, a hand base rotatably connected to the tip end side of the second arm portion, and a hand fork extending in one direction in the horizontal direction from the hand base portion and on which an object to be transported is mounted. A hand, a first motor for rotating the first arm portion with respect to the main body portion, and a second motor for rotating the second arm portion with respect to the first arm portion. A third motor for rotating the hand base with respect to the second arm portion, a first encoder for detecting the rotation amount of the first motor, and a rotation amount of the second motor. 2nd encoder, a 3rd encoder for detecting the rotation amount of the 3rd motor, and a 3rd encoder for detecting the origin position of the 1st arm portion in the rotation direction of the 1st arm portion with respect to the main body portion. The first origin sensor, the second origin sensor for detecting the origin position of the second arm portion in the rotation direction of the second arm portion with respect to the first arm portion, and the hand base portion with respect to the second arm portion. A third origin sensor for detecting the origin position of the hand base in the rotation direction of the hand is provided.
A predetermined reference position of the second arm portion in the rotation direction of the second arm portion with respect to the first arm portion is set as the first reference position, and the hand base portion in the rotation direction of the hand base portion with respect to the second arm portion. The predetermined reference position of the hand fork is set as the second reference position, the predetermined reference position of the hand fork in the direction orthogonal to the longitudinal direction of the hand fork with respect to the hand base is set as the third reference position, and the first arm with respect to the main body portion. Assuming that the predetermined reference position of the first arm portion in the rotation direction of the portion is the fourth reference position,
The method for calculating the correction value of the industrial robot is as follows.
The first is based on the detection result of the second origin sensor or based on the detection result of the second origin sensor and the detection result of the second encoder so that the second arm portion stops at the first reference position. The second by the first positioning jig for positioning the second arm portion from the first stop position, which is the stop position of the second arm portion when the two arm portions are stopped, to the first reference position. The detection result of the second encoder when the second arm portion is rotated to the position where the arm portion is positioned, and the second arm portion when the second arm portion is stopped at the first stop position. The first reference position specifying step for specifying the first reference position based on the encoder value, and
After the first reference position specifying step, the hand base is stopped at the second reference position while the second arm portion is arranged at the first reference position specified in the first reference position specifying step. The stop position of the hand base when the hand base is stopped based on the detection result of the third origin sensor or based on the detection result of the third origin sensor and the detection result of the third encoder. The third when the hand base is rotated from the second stop position to the position where the hand base is positioned by the second positioning jig for positioning the hand base at the second reference position. A second reference position specifying step for specifying the second reference position based on the detection result of the encoder and the value of the third encoder when the hand base is stopped at the second stop position.
After the second reference position specifying step, the second arm portion is arranged at the first reference position specified in the first reference position specifying step, and the second arm portion is specified in the second reference position specifying step. 2. A hand fork positioning step of positioning the hand fork with a third positioning jig for positioning the hand fork at the third reference position while the hand base is arranged at the reference position.
After the hand fork positioning step, a panel mounting step of mounting the detection panel on the hand fork so that the detection panel is positioned with respect to the hand fork by a positioning member attached to the upper surface of the hand fork .
After the hand fork positioning step or the panel mounting step, based on the detection result of the first origin sensor or with the detection result of the first origin sensor so that the first arm portion stops at the fourth reference position. Based on the detection result of the first encoder, the first motor is driven and controlled with reference to the third stop position, which is the stop position of the first arm portion when the first arm portion is stopped. The second motor is driven and controlled with reference to the first reference position specified in the first reference position specifying step, and the second reference position specified in the second reference position specifying step is used as a reference. A robot operation process in which the third motor is driven and controlled to make the industrial robot a temporary reference posture, and
After the robot operation step, a hand movement step of operating the industrial robot to move the hand fork to the delivery position of the object to be transported, and a hand movement step.
After the hand moving step, the first arm portion with respect to the main body portion of the fifth reference position, which is a predetermined reference position, and the edge of the detection panel in the rotation direction of the first arm portion with respect to the main body portion. A method for calculating a correction value of an industrial robot, which comprises a correction value calculation step of calculating a correction value for controlling the first motor based on a deviation amount in a rotation direction. In the correction value calculation step, the detection of the first encoder when the first arm portion is rotated until the edge of the detection panel is detected by one sensor arranged at the fifth reference position. The method for calculating a correction value of an industrial robot according to claim 1, wherein the correction value is calculated based on the result. In the correction value calculation step, one camera is used to obtain the amount of deviation between the fifth reference position and the edge of the detection panel in the rotation direction of the first arm portion with respect to the main body portion. The correction value calculation method for an industrial robot according to claim 1. In the correction value calculation step, a fourth for positioning the detection panel at a position where the fifth reference position and the edge of the detection panel coincide with each other in the rotation direction of the first arm portion with respect to the main body portion. Claim 1 is characterized in that the correction value is calculated based on the detection result of the first encoder when the first arm portion is rotated to a position where the detection panel is positioned by a positioning jig. The method for calculating the correction value of the described industrial robot. When the second arm portion is in the first reference position, the first arm portion and the second arm portion overlap each other in the vertical direction.
The industrial robot according to any one of claims 1 to 4, wherein the second arm portion and the hand fork overlap each other in the vertical direction when the hand base portion is in the second reference position. Correction value calculation method. The first positioning jig is formed on either one of the first arm portion and the second arm portion and a first fixing member fixed to one of the first arm portion and the second arm portion. The correction value calculation method for an industrial robot according to claim 5, further comprising a first pin to be inserted into a first insertion hole to be inserted and a first through hole formed in the first fixing member. The second positioning jig is formed on a second fixing member fixed to either one of the first arm portion and the hand base portion and a second fixing member formed on either one of the first arm portion and the hand base portion. The correction value calculation method for an industrial robot according to claim 5 or 6, further comprising a second pin to be inserted into an insertion hole and a second through hole formed in the second fixing member. The hand comprises two said hand forks.
The third positioning jig includes a third fixing member fixed to one of the two hand forks and the second arm portion, and the other of the two hand forks and the second arm portion. The industrial use according to any one of claims 5 to 7, further comprising a third pin to be inserted into a third insertion hole formed in the third insertion hole and a third through hole formed in the third fixing member. How to calculate the correction value of the robot.

Images