JP7094115B2 - How to calculate the correction value for industrial robots - Google Patents

Description

The present invention relates to a correction value calculation method for an industrial robot that calculates a correction value for correcting the operation of the industrial robot.

Conventionally, an industrial robot that conveys a glass substrate is known (see, for example, Patent Document 1). The industrial robot described in Patent Document 1 is a horizontal articulated robot incorporated in a manufacturing system of an organic EL (organic electroluminescence) display, and has a hand on which a glass substrate is mounted and a hand on the tip side. It includes an arm that is rotatably connected and a main body that is rotatably connected to the base end side of the arm.

The arm includes a first arm portion whose base end side is rotatably connected to the main body portion, and a second arm portion whose base end side is rotatably connected to the tip end side of the first arm portion. The hand includes a hand base that is rotatably connected to the tip end side of the second arm portion, and a hand fork that is fixed to the hand base and on which a glass substrate is mounted. Further, the industrial robot described in Patent Document 1 includes a motor for rotating the first arm portion with respect to the main body portion and a motor for rotating the second arm portion with respect to the first arm portion. , A motor for rotating the hand base with respect to the second arm portion is provided.

Japanese Unexamined Patent Publication No. 2015-139854

When the industrial robot described in Patent Document 1 is installed in a manufacturing system such as an organic EL display, teaching work of the industrial robot is generally performed in order to create an operation program of the industrial robot. Further, for example, when the industrial robot installed in the manufacturing system is replaced or the motor of the industrial robot is replaced, the coordinates of the teaching position taught in the teaching work of the industrial robot before the replacement are The robot coordinate system of the industrial robot after replacement shifts.

Therefore, even when the industrial robot is replaced or the motor of the industrial robot is replaced, the teaching work of the industrial robot is generally performed again. However, when the industrial robot is replaced or the motor of the industrial robot is replaced and the teaching work of the industrial robot is performed again, the manufacturing system is stopped due to the replacement of the industrial robot or the like. It takes time to restart.

Therefore, an object of the present invention is to correct an industrial robot that makes it possible to eliminate the need for re-teaching work of the industrial robot when the industrial robot is replaced or the motor of the industrial robot is replaced. The purpose is to provide a value calculation method.

In order to solve the above problems, the correction value calculation method for an industrial robot of the present invention is a correction value calculation method for an industrial robot that calculates a correction value for correcting the operation of the industrial robot, and is for industrial use. The robot has a main body portion, a first arm portion rotatably connected to the main body portion on the proximal end side, and a second arm portion rotatably connected to the distal end side of the first arm portion on the proximal end side. A hand having an arm, a hand base rotatably connected to the tip end side of the second arm portion, a hand fork extending in one direction in the horizontal direction from the hand base, and a hand fork on which a transport object is mounted, and a main body portion. On the other hand, the first motor for rotating the first arm portion, the second motor for rotating the second arm portion with respect to the first arm portion, and the hand base with respect to the second arm portion are rotated. The third motor for moving, the first encoder for detecting the rotation amount of the first motor, the second encoder for detecting the rotation amount of the second motor, and the rotation amount of the third motor are detected. The method of calculating the correction value of the industrial robot is to mount the detection jig on the hand fork and to operate the industrial robot to make it a predetermined reference posture. After the process, the jig mounting process, and the robot operation process, the hand fork is moved to the delivery position of the object to be transported by operating the industrial robot, and the hand fork is placed at the delivery position after the hand movement process. The first camera and the second camera are arranged so as to be offset from each other in at least one of the longitudinal direction of the hand fork and the direction orthogonal to the longitudinal direction of the hand fork. In the coordinate identification step of specifying the coordinates of the first corner portion arranged in the above and the coordinates of the second corner portion formed in the detection jig and arranged in the field of view of the second camera, and in the coordinate identification process. A correction value of the first encoder for controlling the first motor and a correction value of the second encoder for controlling the second motor based on the specified coordinates of the first corner portion and the coordinates of the second corner portion. In the jig mounting process, the detection jig is positioned by a positioning member attached to the upper surface of the hand fork. It is characterized by being mounted on a hand fork in the state of being mounted.

In the correction value calculation method for the industrial robot of the present invention, in the hand moving process, the industrial robot in a predetermined reference posture is operated to move the hand fork to the delivery position of the object to be transported, and after the hand moving process. In the coordinate specifying step of the above, the first camera and the second camera arranged in a state of being deviated from at least one of the longitudinal direction of the hand fork arranged at the delivery position and the direction orthogonal to the longitudinal direction of the hand fork. The coordinates of the first corner portion of the detection jig arranged in the field of view of one camera and the coordinates of the second corner portion of the detection jig arranged in the field of view of the second camera are specified. Further, in the present invention, in the correction value calculation step, the first arm portion is rotated with respect to the main body portion based on the coordinates of the first corner portion and the coordinates of the second corner portion specified in the coordinate specifying step. The correction value of the first encoder for controlling the first motor, the correction value of the second encoder for controlling the second motor that rotates the second arm portion with respect to the first arm portion, and the second arm. The correction value of the third encoder for controlling the third motor that rotates the hand base with respect to the portion is calculated.

Therefore, in the present invention, before the replacement, when the hand fork of the industrial robot before the replacement before the replacement of the industrial robot or the motor of the industrial robot is moved to the delivery position of the object to be transported, before the replacement. The coordinates of the first corner and the coordinates of the second corner of the detection jig mounted on the hand fork of the industrial robot are stored in advance, and in the correction value calculation process, the industrial robot before replacement is used. Based on the coordinates of the first corner and the second corner of the detection jig mounted on the hand fork, and the coordinates of the first corner and the coordinates of the second corner specified in the coordinate identification process. By calculating the correction value, even if the industrial robot is replaced or the motor of the industrial robot is replaced, the industrial robot before replacement is based on the correction value calculated in the correction value calculation process. It becomes possible to correct the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work.

Further, in the present invention, the re-teaching work of the industrial robot can be performed by correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange. It becomes possible to make it unnecessary. That is, in the present invention, it becomes possible to eliminate the need for re-teaching work of the industrial robot when the industrial robot is replaced or the motor of the industrial robot is replaced.

In the present invention, it is preferable that the first camera and the second camera are arranged in a state of being displaced in the longitudinal direction of the hand fork arranged at the delivery position and in the direction orthogonal to the longitudinal direction of the hand fork. With this configuration, the coordinates can be specified as compared with the case where the first camera and the second camera are displaced only in the longitudinal direction of the hand fork or in the direction orthogonal to the longitudinal direction of the hand fork. The correction value can be calculated accurately in the correction value calculation step based on the coordinates of the first corner portion and the coordinates of the second corner portion specified in the step.

In the present invention, a first reference mark arranged in the field of view of the first camera and photographed by the first camera and a second reference mark arranged in the field of view of the second camera and photographed by the second camera are provided. Is preferable. With such a configuration, for example, when the first camera or the second camera is replaced, or when the positions of the first camera or the second camera are displaced for some reason, the positions of the first camera or the second camera are adjusted. It is possible to accurately specify the coordinates of the first corner with reference to the first reference mark, and to accurately specify the coordinates of the second corner with reference to the second reference mark. It will be possible to do.

In the present invention, it is preferable that the first camera, the second camera, the first reference mark, and the second reference mark are also used for confirming the position of the object to be conveyed mounted on the hand fork arranged at the delivery position. .. With this configuration, it is not necessary to separately provide a camera or a reference mark for confirming the position of the object to be transported mounted on the hand fork arranged at the delivery position.

In the present invention, the industrial robot is used by being incorporated in a processing system having a plurality of processing units for performing a predetermined processing on the transportation object, and is used as a transportation object which constitutes a part of the processing system. The transport object is transported between the supply unit and the discharge unit of the transport object that constitutes a part of the processing system, and the plurality of processing units, and the first camera and the second camera are inside the supply unit or the discharge unit. It is preferable that it is installed in. In general, a relatively large number of devices are installed inside the processing unit for performing predetermined processing on the object to be transported, whereas many devices are installed inside the supply unit and the discharge unit. do not have. Therefore, with such a configuration, it becomes easier to install the first camera and the second camera as compared with the case where the first camera and the second camera are installed inside the processing unit.

In the present invention, it is preferable that the first camera and the second camera are installed inside the supply unit. With this configuration, the correction value is calculated based on the coordinates of the first corner and the coordinates of the second corner specified in the supply unit, and the industry before replacement is calculated based on the calculated correction value. The deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot is corrected. Therefore, even if the industrial robot is replaced or the motor of the industrial robot is replaced, the transported object supplied to the processing system can be accurately mounted on the hand fork in the supply unit. As a result, even after the industrial robot has been replaced or the motor of the industrial robot has been replaced, it is possible to accurately transport the object to be transported to the processing unit.

Further, in order to solve the above problems, the correction value calculation method for an industrial robot of the present invention is a correction value calculation method for an industrial robot that calculates a correction value for correcting the operation of the industrial robot. The industrial robot has a main body, a first arm part whose base end side is rotatably connected to the main body part, and a second arm part whose base end side is rotatably connected to the tip end side of the first arm part. A hand having an arm, a hand base rotatably connected to the tip end side of the second arm portion, and a hand fork extending in one direction in the horizontal direction from the hand base and on which an object to be transported is mounted, and a main body. A first motor for rotating the first arm portion with respect to the portion, a second motor for rotating the second arm portion with respect to the first arm portion, and a hand base portion with respect to the second arm portion. The third motor for rotating the robot, the first encoder for detecting the rotation amount of the first motor, the second encoder for detecting the rotation amount of the second motor, and the rotation amount of the third motor. A third encoder for detection is provided, and the correction value calculation method for the industrial robot is a jig mounting process in which the detection jig is mounted on the hand fork and a predetermined reference posture by operating the industrial robot. After the robot operation process, the jig mounting process, and the robot operation process, the industrial robot is operated to move the hand fork to the delivery position of the object to be transported, and after the hand movement process, the hand fork is placed at the delivery position. The industrial robot until the edge of the detection jig is detected by each of the three sensors arranged so as to be offset from each other in at least one of the longitudinal direction of the hand fork and the direction orthogonal to the longitudinal direction of the hand fork. And to the coordinates of the industrial robot that specifies the coordinates of the industrial robot when the edge of the detection jig is detected by each of the three sensors, and the coordinates of the industrial robot specified in the coordinate identification process Based on this, the correction value of the first encoder for controlling the first motor, the correction value of the second encoder for controlling the second motor, and the correction value of the third encoder for controlling the third motor are calculated. A correction value calculation step is provided, and in the jig mounting step, the detection jig is mounted on the hand fork in a state of being positioned by a positioning member mounted on the upper surface of the hand fork.

In the correction value calculation method of the industrial robot of the present invention, in the hand moving process, the industrial robot in a predetermined reference posture is operated to move the hand fork to the delivery position of the object to be transported, and after the hand moving process. For detection by each of the three sensors arranged so as to be offset from each other in at least one of the longitudinal direction of the hand fork arranged at the delivery position and the direction orthogonal to the longitudinal direction of the hand fork in the coordinate identification process of The industrial robot is operated until the edge of the jig is detected, and the coordinates of the industrial robot when the edge of the detection jig is detected by each of the three sensors are specified. Further, in the present invention, in the correction value calculation step, the first motor for rotating the first arm portion with respect to the main body portion is controlled based on the coordinates of the industrial robot specified in the coordinate specifying step. The correction value of one encoder, the correction value of the second encoder for controlling the second motor that rotates the second arm portion with respect to the first arm portion, and the rotation of the hand base with respect to the second arm portion. The correction value of the third encoder for controlling the third motor to be operated is calculated.

Therefore, in the present invention, the sensor has three edges of the detection jig mounted on the hand fork of the industrial robot before the replacement before the industrial robot is replaced or the motor of the industrial robot is replaced. The coordinates of the industrial robot when it is detected by each of the above are stored in advance, and in the correction value calculation process, the edge of the detection jig mounted on the hand fork of the industrial robot before replacement is a sensor with three edges. By calculating the correction value based on the coordinates of the industrial robot when it is detected by each of the above and the coordinates of the industrial robot specified in the coordinate identification process, the industrial robot can be replaced or the industrial robot can be replaced. Even if the motor is replaced, the robot of the industrial robot after replacement with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before replacement based on the correction value calculated in the correction value calculation process. It becomes possible to correct the deviation of the coordinate system.

Further, in the present invention, the re-teaching work of the industrial robot can be performed by correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the industrial robot before the exchange. It becomes possible to make it unnecessary. That is, in the present invention, it becomes possible to eliminate the need for re-teaching work of the industrial robot when the industrial robot is replaced or the motor of the industrial robot is replaced.

In the present invention, for example, the industrial robot has a first origin sensor for detecting the origin position of the first arm portion in the rotation direction of the first arm portion with respect to the main body portion, and a second arm portion with respect to the first arm portion. A second origin sensor for detecting the origin position of the second arm portion in the rotation direction of, and a third origin sensor for detecting the origin position of the hand base in the rotation direction of the hand base with respect to the second arm portion. In the robot operation process, the first motor is driven and controlled based on the detection result of the first origin sensor or the detection result of the first origin sensor and the detection result of the first encoder to control the drive of the second origin sensor. The second motor is driven and controlled based on the detection result or based on the detection result of the second origin sensor and the detection result of the second encoder, and the detection of the third origin sensor or based on the detection result of the third origin sensor. The third motor is driven and controlled based on the result and the detection result of the third encoder, and the industrial robot is set to the reference posture.

As described above, if the correction value is calculated by the correction value calculation method of the industrial robot of the present invention, the industrial robot can be regenerated when the industrial robot is replaced or the motor of the industrial robot is replaced. It becomes possible to eliminate the need for teaching work.

It is a figure of the industrial robot which the correction value is calculated by the correction value calculation method of the industrial robot which concerns on embodiment of this invention, (A) is a plan view, (B) is a side view. FIG. 3 is a plan view showing a state in which the industrial robot shown in FIG. 1 is incorporated in a manufacturing system for an organic EL display. It is a block diagram for demonstrating the structure of the industrial robot shown in FIG. It is an enlarged view for demonstrating the internal structure of the supply part shown in FIG. It is a figure for demonstrating the correction value calculation method of the industrial robot which concerns on other embodiment of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Structure of industrial robot)
FIG. 1 is a diagram of an industrial robot 1 in which a correction value is calculated by the correction value calculation method of the industrial robot according to the embodiment of the present invention, (A) is a plan view, and (B) is a side view. be. FIG. 2 is a plan view showing a state in which the industrial robot 1 shown in FIG. 1 is incorporated in the organic EL display manufacturing system 3. FIG. 3 is a block diagram for explaining the configuration of the industrial robot 1 shown in FIG.

The industrial robot 1 (hereinafter referred to as “robot 1”) of the present embodiment is a robot for transporting a glass substrate 2 (hereinafter referred to as “board 2”) for an organic EL display which is a transport target. Is. The substrate 2 is formed in the shape of a rectangular flat plate. As shown in FIG. 2, the robot 1 is a horizontal articulated robot incorporated and used in the organic EL display manufacturing system 3. The manufacturing system 3 includes a transfer chamber 4 (hereinafter referred to as “chamber 4”) arranged at the center, and a plurality of chambers 5 to 7 arranged so as to surround the chamber 4.

The chamber 5 is a process chamber for performing a predetermined process on the substrate 2. Further, the chamber 6 is a supply chamber (loader) in which the substrate 2 supplied to the manufacturing system 3 is housed, and the chamber 7 is a discharge chamber in which the board 2 discharged from the manufacturing system 3 is housed. (Unloader). The inside of chambers 4 to 7 is evacuated. A part of the robot 1 is arranged inside the chamber 4. When the hand forks 18 and 19 described later that constitute the robot 1 enter the chambers 5 to 7, the robot 1 conveys the substrate 2 between the plurality of chambers 5 to 7.

The chamber 5 of the present embodiment is a processing unit for performing a predetermined processing on the substrate 2. Further, the manufacturing system 3 of the present embodiment is a processing system including a plurality of processing units. Further, the chamber 6 of the present embodiment is a supply unit of the substrate 2 which constitutes a part of the manufacturing system 3 which is a processing system, and the chamber 7 is a substrate 2 which constitutes a part of the manufacturing system 3 which is a processing system. It is a discharge part.

As shown in FIG. 1, in the robot 1, the hand 8 on which the substrate 2 is mounted, the arm 9 to which the hand 8 is rotatably connected to the tip side, and the base end side of the arm 9 are rotatably connected to each other. It is provided with a main body portion 10. The hand 8 and the arm 9 are arranged on the upper side of the main body portion 10. The main body 10 includes an elevating mechanism for elevating and lowering the arm 9, and a case body 13 in which the elevating mechanism is housed. The case body 13 is formed in a substantially bottomed cylindrical shape. A flange 14 formed in a disk shape is fixed to the upper end of the case body 13.

As described above, a part of the robot 1 is arranged inside the chamber 4. Specifically, a portion of the robot 1 above the lower end surface of the flange 14 is arranged inside the chamber 4. That is, the portion of the robot 1 above the lower end surface of the flange 14 is arranged in the vacuum region VR, and the hand 8 and the arm 9 are arranged in the vacuum chamber (in vacuum). On the other hand, the portion of the robot 1 below the lower end surface of the flange 14 is arranged in the atmospheric region AR (in the atmosphere).

The arm 9 includes a first arm portion 15 and a second arm portion 16 that are rotatably connected to each other. The arm 9 of this embodiment is composed of two arm portions, a first arm portion 15 and a second arm portion 16. The base end side of the first arm portion 15 is rotatably connected to the main body portion 10. The base end side of the second arm portion 16 is rotatably connected to the tip end side of the first arm portion 15. A hand 8 is rotatably connected to the tip end side of the second arm portion 16.

The second arm portion 16 is arranged above the first arm portion 15. Further, the hand 8 is arranged above the second arm portion 16. The distance between the rotation center of the first arm portion 15 with respect to the main body portion 10 and the rotation center of the second arm portion 16 with respect to the first arm portion 15 is the rotation center of the second arm portion 16 with respect to the first arm portion 15. It is equal to the distance from the rotation center of the hand 8 with respect to the second arm portion 16.

The hand 8 includes a hand base 17 rotatably connected to the tip end side of the second arm portion 16 and hand forks 18 and 19 on which the substrate 2 is mounted. The hand 8 of this embodiment includes two hand forks 18 and two hand forks 19. The hand forks 18 and 19 are formed in a straight line. The hand fork 18 and the hand fork 19 are formed in the same shape. The two hand forks 18 are arranged in parallel with each other at a predetermined distance. The hand fork 18 extends in one horizontal direction from the hand base 17. The two hand forks 19 are arranged in parallel with each other at a predetermined distance. The hand fork 19 extends from the hand base 17 in the direction opposite to the hand fork 18.

The hand forks 18 and 19 are fixed to the hand base 17. Specifically, the hand forks 18 and 19 are fixed to the hand base 17 by fixing screws. The hand forks 18 and 19 are formed with insertion holes through which fixing screws are inserted. This insertion hole is an elongated hole whose longitudinal direction is orthogonal to the longitudinal direction of the hand forks 18 and 19, and the hand forks 18 and 19 with respect to the hand base 17 in the direction orthogonal to the longitudinal direction of the hand forks 18 and 19. It is possible to adjust the fixed position of.

In this embodiment, one substrate 2 is mounted on two hand forks 18. Further, one substrate 2 is mounted on two hand forks 19. A positioning member for positioning the board 2 to be mounted is attached to the upper surface of the hand fork 18. A positioning member for positioning the board 2 to be mounted is also attached to the upper surface of the hand fork 19.

Further, the robot 1 includes a motor 21 for rotating the first arm portion 15 with respect to the main body portion 10, and a motor 22 for rotating the second arm portion 16 with respect to the first arm portion 15. A motor 23 for rotating the hand base 17 with respect to the second arm portion 16, an encoder 24 for detecting the rotation amount of the motor 21, an encoder 25 for detecting the rotation amount of the motor 22, and a motor. It is provided with an encoder 26 for detecting the amount of rotation of the 23 (see FIG. 3).

The encoder 24 is attached to the motor 21. The encoder 25 is attached to the motor 22, and the encoder 26 is attached to the motor 23. The motor 21 and the encoder 24 are arranged, for example, inside the main body 10. Further, the motors 22 and 23 and the encoders 25 and 26 are arranged inside the first arm portion 15, for example. The motors 21 to 23 are electrically connected to the control unit 27 of the robot 1. Encoders 24 to 26 are also electrically connected to the control unit 27. The motor 21 of this embodiment is a first motor, the motor 22 is a second motor, and the motor 23 is a third motor. Further, the encoder 24 is the first encoder, the encoder 25 is the second encoder, and the encoder 26 is the third encoder.

Further, the robot 1 includes an origin sensor 31 for detecting the origin position of the first arm portion 15 in the rotation direction of the first arm portion 15 with respect to the main body portion 10, and a second arm portion 16 with respect to the first arm portion 15. The origin sensor 32 for detecting the origin position of the second arm portion 16 in the rotation direction and the origin sensor 33 for detecting the origin position of the hand base 17 in the rotation direction of the hand base 17 with respect to the second arm portion 16. And have. The origin sensor 31 of this embodiment is a first origin sensor, the origin sensor 32 is a second origin sensor, and the origin sensor 33 is a third origin sensor.

The origin sensors 31 to 33 are, for example, proximity sensors. Alternatively, the origin sensors 31 to 33 are, for example, optical sensors having a light emitting element and a light receiving element. The origin sensors 31 to 33 are electrically connected to the control unit 27. In the joint portion that is the connecting portion between the main body portion 10 and the first arm portion 15, the origin sensor 31 is fixed to either the main body portion 10 or the first arm portion 15, and the main body portion 10 and the first arm portion 15 are fixed. A detection member detected by the origin sensor 31 when the first arm portion 15 is in the origin position is fixed to either one or the other.

Similarly, in the joint portion that is the connecting portion between the first arm portion 15 and the second arm portion 16, the origin sensor 32 is fixed to either the first arm portion 15 or the second arm portion 16 and is first. A detection member detected by the origin sensor 32 when the second arm portion 16 is at the origin position is fixed to either the arm portion 15 or the second arm portion 16. Further, in the joint portion which is the connecting portion between the second arm portion 16 and the hand base portion 17, the origin sensor 33 is fixed to either the second arm portion 16 or the hand base portion 17, and the second arm portion 16 and the hand are fixed. A detection member detected by the origin sensor 33 when the hand base 17 is in the origin position is fixed to any other of the bases 17.

In this embodiment, when the second arm portion 16 is in the origin position, the first arm is aligned with the longitudinal direction of the first arm portion 15 and the longitudinal direction of the second arm portion 16 when viewed from above and below. The portion 15 and the second arm portion 16 overlap each other in the vertical direction. Further, when the hand base 17 is at the origin position, the longitudinal direction of the second arm portion 16 and the longitudinal directions of the hand forks 18 and 19 are orthogonal to each other when viewed from the vertical direction.

(Calculation method of correction value for industrial robot)
FIG. 4 is an enlarged view for explaining the internal configuration of the chamber 6 shown in FIG.

When the robot 1 is installed in the manufacturing system 3, the teaching work of the robot 1 is performed in order to create an operation program of the robot 1. Further, for example, when the robot 1 installed in the manufacturing system 3 is replaced or the motors 21 to 23 of the robot 1 are replaced, the coordinates of the teaching position taught in the teaching work of the robot 1 before the replacement are obtained. Since the robot coordinate system of the robot 1 after the replacement shifts, it becomes necessary to perform the teaching work of the robot 1 again.

On the other hand, if the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange is corrected, it is not necessary to perform the complicated teaching work again. In this embodiment, the robot 1 installed in the manufacturing system 3 is replaced or the motor is replaced so that the complicated teaching work does not have to be performed again after the robot 1 is replaced or the motors 21 to 23 are replaced. When 21 to 23 are exchanged, a correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange is calculated. That is, a correction value for correcting the operation of the robot 1 after replacement is calculated. Hereinafter, a method of calculating this correction value will be described.

When calculating the correction value for correcting the operation of the robot 1, the detection jig 35 is mounted on the hand fork 18. The detection jig 35 is formed in the shape of a rectangular flat plate. The detection jig 35 of this embodiment is formed in the same shape as the substrate 2. The detection jig 35 is mounted on the two hand forks 18 in a state of being positioned by a positioning member attached to the upper surface of the hand fork 18. That is, the detection jig 35 is mounted on the hand fork 18 at the same location as the substrate 2 in the same direction as the substrate 2. The detection jig 35 may be mounted on the hand fork 19.

Further, when calculating the correction value for correcting the operation of the robot 1, the two cameras 36 and 37 are used. The cameras 36 and 37 are installed inside the chamber 6. Further, the cameras 36 and 37 are arranged in the longitudinal direction of the hand forks 18 and 19 and the hand forks 18 and 19 arranged at the delivery position of the substrate 2 in the chamber 6 (the position where the hand fork 18 is arranged in FIG. 2). They are arranged so as to be offset in the direction orthogonal to the longitudinal direction of the. The cameras 36 and 37 are installed above the hand forks 18 and 19 arranged at the delivery position.

Assuming that the two corners arranged on one diagonal of the detection jig 35 formed in the shape of a rectangular flat plate are the corners 35a and 35b (see FIG. 4), the camera 36 is located at the delivery position. The corner portion 35a of the detection jig 35 mounted on the arranged hand fork 18 is installed so as to be arranged in the field of view of the camera 36, and the camera 37 is mounted on the hand fork 18 arranged at the delivery position. The corner portion 35b of the detection jig 35 is installed so as to be arranged in the field of view of the camera 37.

That is, the detection jig 35 has a corner portion 35a arranged in the field of view of the camera 36 and a corner portion 35b arranged in the field of view of the camera 37 when the hand fork 18 is arranged at the delivery position. Four corners including and are formed. The camera 36 of this embodiment is a first camera, and the camera 37 is a second camera. Further, the corner portion 35a of the present embodiment is the first corner portion, and the corner portion 35b is the second corner portion.

Further, two reference marks 38 and 39 (see FIG. 4) are provided inside the chamber 6. The reference marks 38 and 39 are, for example, through holes formed in the reference mark forming member (not shown). The reference mark forming member is installed below the hand forks 18 and 19 arranged at the delivery position, and the reference marks 38 and 39 are arranged below the hand forks 18 and 19. The reference mark 38 is arranged in the field of view of the camera 36 and is photographed by the camera 36. The reference mark 39 is arranged in the field of view of the camera 37 and is photographed by the camera 37.

When viewed from the vertical direction, the reference mark 38 is arranged at a position deviated from the corner portion 35a of the detection jig 35 mounted on the hand fork 18 arranged at the delivery position. Further, when viewed from the vertical direction, the reference mark 39 is arranged at a position deviated from the corner portion 35b of the detection jig 35 mounted on the hand fork 18 arranged at the delivery position. The reference mark 38 of the present embodiment is the first reference mark, and the reference mark 39 is the second reference mark.

For example, when the robot 1 installed in the manufacturing system 3 is replaced, the detection jig 35 is mounted on the two hand forks 18 (jig mounting process). The detection jig 35 is mounted on the two hand forks 18 in a state of being positioned by a positioning member attached to the upper surface of the hand fork 18. Further, the robot 1 is operated to bring the robot 1 into a predetermined reference posture (robot operation process).

In the robot operation process, the motor 21 is driven and controlled based on the detection result of the origin sensor 31 or based on the detection result of the origin sensor 31 and the detection result of the encoder 24, and based on the detection result of the origin sensor 32 or the origin sensor. The motor 22 is driven and controlled based on the detection result of 32 and the detection result of the encoder 25, and the motor 23 is based on the detection result of the origin sensor 33 or the detection result of the origin sensor 33 and the detection result of the encoder 26. Is driven and controlled to set the robot 1 in the reference posture. Specifically, in the robot operation process, the motors 21 to 23 are driven and controlled to operate the robot 1 to a temporary operation start position.

After that (that is, after the jig mounting process and the robot operation process), the robot 1 is operated to move the hand fork 18 to the delivery position of the substrate 2 (hand movement process). Specifically, the arm 9 is extended to move the hand fork 18 to the delivery position (the position shown by the solid line in FIG. 4) of the substrate 2 in the chamber 6.

After that, the coordinates of the corner portions 35a and 35b of the detection jig 35 are specified by the cameras 36 and 37 (coordinate specifying step). That is, the camera 36 specifies the coordinates of the corner portion 35a of the detection jig 35, and the camera 37 specifies the coordinates of the corner portion 35b of the detection jig 35. In this embodiment, the coordinates of the corner portion 35a are specified with reference to the coordinates of the reference mark 38. Further, the coordinates of the corner portion 35b are specified with reference to the coordinates of the reference mark 39.

In this embodiment, when the robot 1 before replacement, in which the detection jig 35 is mounted on the hand fork 18, is operated to move the hand fork 18 to the delivery position of the substrate 2 in the chamber 6 (FIG. 4). The coordinates of the corner portion 35a and the coordinates of the corner portion 35b of the detection jig 35 of the two-dot chain line) are specified and stored in advance. When the coordinates of the corners 35a and 35b are specified in the robot 1 before the exchange, the coordinates of the corners 35a are specified with reference to the coordinates of the reference mark 38, and the coordinates of the corners 35b are specified with reference to the coordinates of the reference mark 39. The coordinates of are specified.

After that, based on the coordinates of the corner portion 35a and the coordinates of the corner portion 35b specified in the coordinate specifying step, the correction value of the encoder 24 for controlling the motor 21 and the correction value of the encoder 25 for controlling the motor 22 And the correction value of the encoder 26 for controlling the motor 23 is calculated (correction value calculation step).

Specifically, in the correction value calculation step, first, a line segment connecting the corner portion 35a and the corner portion 35b specified based on the coordinates of the corner portion 35a specified in the coordinate specifying step and the coordinates of the corner portion 35b. A line segment connecting the corner portion 35a and the corner portion 35b specified based on the coordinates of the midpoint, the coordinates of the corner portion 35a previously specified and stored in the robot 1 before the exchange, and the coordinates of the corner portion 35b. Based on the deviation from the coordinates of the midpoint, the deviation in the horizontal direction (XY direction) between the coordinate system of the robot 1 before the exchange and the coordinate system of the robot 1 after the exchange is obtained.

Further, the straight line connecting the corner portion 35a and the corner portion 35b specified based on the coordinates of the corner portion 35a and the coordinates of the corner portion 35b specified in the coordinate specifying step is specified in advance in the robot 1 before the exchange. Exchanged with the coordinate system of the robot 1 before exchange based on the angle formed by the straight line connecting the corner 35a and the corner 35b specified based on the stored coordinates of the corner 35a and the coordinates of the corner 35b. The deviation of the rotation direction (θ direction) with the vertical direction as the axial direction of rotation from the later coordinate system of the robot 1 is obtained.

Further, in the correction value calculation step, a predetermined calculation is performed based on the deviation in the XY direction and the θ direction (the deviation in the XYθ direction) between the coordinate system of the robot 1 before the exchange and the coordinate system of the robot 1 after the exchange, and the encoder is used. The correction values of 24 to 26 are calculated. After that, the motors 21 to 23 are driven and controlled to reflect the correction value calculated in the correction value calculation step, and the robot 1 is returned to the normal operation start position.

In this embodiment, the operation start position of the robot 1 and the home position of the robot 1 are the same, but the operation start position of the robot 1 and the home position of the robot 1 may be different from each other. Further, in the present embodiment, when the robot 1 operates to the operation start position and is in a predetermined reference posture, the first arm portion 15, the second arm portion 16 and the hand base portion 17 are at the origin position. Further, in the present embodiment, the cameras 36, 37 and the reference marks 38, 39 are also used for confirming the position of the substrate 2 mounted on the hand forks 18 and 19 arranged at the delivery position of the chamber 6.

(Main effect of this form)
As described above, in the present embodiment, in the coordinate specifying step after the hand moving step, the coordinates of the corner portions 35a and 35b of the detection jig 35 are specified by the cameras 36 and 37. Further, in the present embodiment, in the correction value calculation step, the coordinates of the corner portions 35a and 35b specified in the coordinate specifying step and the coordinates of the corner portions 35a and 35b previously specified and stored in the robot 1 before the exchange are used. Based on this, the deviation in the XYθ direction between the coordinate system of the robot 1 before the exchange and the coordinate system of the robot 1 after the exchange is obtained, and a predetermined calculation is performed based on the obtained deviation in the XYθ direction to correct the encoders 24 to 26. The value is being calculated.

Therefore, in the present embodiment, even if the robot 1 is replaced or the motors 21 to 23 of the robot 1 are replaced, the teaching work of the robot 1 before the replacement is performed based on the correction value calculated in the correction value calculation step. It is possible to correct the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in. Further, in the present embodiment, the robot 1 is replaced or the motors 21 to be replaced by correcting the deviation of the robot coordinate system of the robot 1 after the replacement with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the replacement. Even if the 23 is replaced, the re-teaching work of the robot 1 can be eliminated.

In this embodiment, the camera 36 and the camera 37 are arranged so as to be offset in the longitudinal direction of the hand fork 18 arranged at the delivery position and in the direction orthogonal to the longitudinal direction of the hand fork 18. Therefore, in this embodiment, the coordinates are specified as compared with the case where the camera 36 and the camera 37 are displaced only in the longitudinal direction of the hand fork 18 or in the direction orthogonal to the longitudinal direction of the hand fork 18. Based on the coordinates of the corners 35a and 35b specified in the process, all the deviations in the X, Y, and θ directions between the coordinate system of the robot 1 before the exchange and the coordinate system of the robot 1 after the exchange are accurately corrected. It becomes possible to ask. Therefore, in the present embodiment, the correction value can be calculated accurately in the correction value calculation process.

In this embodiment, the reference marks 38 and 39 are provided inside the chamber 6, the coordinates of the corner portion 35a are specified with reference to the coordinates of the reference mark 38, and the corner portions 35b are specified with reference to the coordinates of the reference mark 39. The coordinates of are specified. Therefore, in the present embodiment, for example, when the cameras 36, 37 are replaced, or when the positions of the cameras 36, 37 are displaced for some reason, the reference mark 38 does not need to adjust the positions of the cameras 36, 37. It becomes possible to accurately specify the coordinates of the corner portion 35a with reference to, and it becomes possible to accurately specify the coordinates of the corner portion 35b with reference to the reference mark 39.

In this embodiment, the cameras 36, 37 and the reference marks 38, 39 are also used to confirm the position of the substrate 2 mounted on the hand forks 18 and 19 arranged at the delivery position of the chamber 6. Therefore, in the present embodiment, it is not necessary to separately provide the chamber 6 with a camera or a reference mark for confirming the position of the substrate 2 mounted on the hand forks 18 and 19 arranged at the delivery position of the chamber 6. Therefore, in this embodiment, it is possible to simplify the configuration of the chamber 6.

In this embodiment, the cameras 36 and 37 are installed inside a chamber 6 which is a supply chamber. While a relatively large number of devices are installed inside the chamber 5 which is a process chamber, there are not many devices installed inside the chamber 6 which is a supply chamber. Therefore, in this embodiment, it becomes easier to install the cameras 36 and 37 as compared with the case where the cameras 36 and 37 are installed inside the chamber 5.

Further, in the present embodiment, the cameras 36 and 37 are installed inside the chamber 6, and the correction value is calculated based on the coordinates of the corner portions 35a and 35b specified in the chamber 6, and the calculated correction value is calculated. Based on the above, the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange is corrected. Therefore, in the present embodiment, even if the robot 1 is replaced or the motors 21 to 23 are replaced, the substrate 2 supplied to the manufacturing system 3 can be accurately mounted on the hand forks 18 and 19 in the chamber 6. It will be possible. Therefore, in the present embodiment, the substrate 2 can be accurately conveyed to the chamber 5 even after the robot 1 is replaced or the motors 21 to 23 are replaced.

(Modification example of correction value calculation method)
FIG. 5 is a diagram for explaining a correction value calculation method for the robot 1 according to another embodiment of the present invention.

In the above-described embodiment, three sensors 41 to 43 may be arranged inside the chamber 6 instead of the cameras 36 and 37. Sensors 41 to 43 are, for example, proximity sensors or optical sensors. The sensors 41 to 43 are displaced from each other in at least one of the longitudinal direction of the hand forks 18 and 19 arranged at the delivery position of the substrate 2 in the chamber 6 and the direction orthogonal to the longitudinal direction of the hand forks 18 and 19. It is arranged in the state. For example, the sensors 41 to 43 are arranged so as to be offset from each other in the longitudinal direction of the hand forks 18 and 19 arranged at the delivery position of the substrate 2 in the chamber 6 and in the direction orthogonal to the longitudinal direction of the hand forks 18 and 19. Has been done. In this case, the reference marks 38 and 39 are unnecessary.

The sensor 41 is arranged at a position where one edge (end face) in the lateral direction of the detection jig 35 formed in the shape of a rectangular flat plate can be detected, and the sensor 42 is arranged in the lateral direction of the detection jig 35. The other edge (end face) of the is arranged at a position where it can be detected. Further, the sensor 41 is arranged on one end side (base end side of the hand forks 18 and 19) of the detection jig 35 in the longitudinal direction, and the sensor 42 is arranged on the other end side (hand) of the detection jig 35 in the longitudinal direction. It is arranged on the tip side of the forks 18 and 19). The sensor 43 is an edge (end face) in the longitudinal direction of the detection jig 35, and is arranged at a position where the edge of the detection jig 35 arranged on the tip side of the hand forks 18 and 19 can be detected. ..

In this modification, in the coordinate identification process after the hand movement process, the robot 1 is operated until the edge of the detection jig 35 is detected by each of the three sensors 41 to 43, and the three sensors 41 to 43 are operated. The coordinates of the robot 1 when the edge of the detection jig 35 is detected by each of the 43 are specified.

For example, when the hand fork 18 moves to the position shown in FIG. 5A in the hand moving step, the edge of the detection jig 35 is detected by the sensor 41 in the coordinate specifying step as shown in FIG. 5B. The robot 1 is operated until the robot 1 is operated, and the coordinates of the robot 1 when the edge of the detection jig 35 is detected by the sensor 41 are specified. Further, in the coordinate specifying step, as shown in FIG. 5C, the robot 1 is operated until the edge of the detection jig 35 is detected by the sensor 42, and the edge of the detection jig 35 is removed by the sensor 42. The coordinates of the robot 1 at the time of detection are specified, and as shown in FIG. 5D, the robot 1 is operated until the edge of the detection jig 35 is detected by the sensor 43, and the detection is performed by the sensor 43. The coordinates of the robot 1 when the edge of the jig 35 is detected are specified.

Further, in the subsequent correction value calculation step, the correction values of the encoders 24 to 25 are calculated based on the coordinates of the robot 1 specified in the coordinate specifying step. In this modification, the coordinates of the robot 1 when the edge of the detection jig 35 mounted on the hand fork 18 of the robot 1 before replacement is detected by each of the three sensors 41 to 43 are specified in advance. It is remembered. In the correction value calculation step, the coordinates of the robot 1 before the exchange and the coordinate system of the robot 1 before the exchange are obtained based on the coordinates of the robot 1 specified in the coordinate specifying step and the coordinates of the robot 1 previously specified and stored in the robot 1 before the exchange. The deviation in the XYθ direction from the coordinate system of the robot 1 after the exchange is obtained. Further, in the correction value calculation step, the correction values of the encoders 24 to 26 are calculated by performing a predetermined calculation based on the deviation in the XYθ direction between the coordinate system of the robot 1 before the replacement and the coordinate system of the robot 1 after the replacement. ..

In this modification, in the correction value calculation step, the robot before replacement is based on the coordinates of the robot 1 specified in the coordinate specifying step and the coordinates of the robot 1 previously specified and stored in the robot 1 before replacement. The deviation in the XYθ direction between the coordinate system of 1 and the coordinate system of the robot 1 after the exchange is obtained, and a predetermined calculation is performed based on the obtained deviation in the XYθ direction to calculate the correction values of the encoders 24 to 26. ..

Therefore, even in this modification, even if the robot 1 is replaced or the motors 21 to 23 of the robot 1 are replaced, as in the above-described embodiment, the correction value calculated in the correction value calculation step is used as the basis for the correction value. It is possible to correct the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange. Further, by correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching work of the robot 1 before the exchange, the robot 1 is exchanged or the motors 21 to 23 are exchanged. Even if this happens, the re-teaching work of the robot 1 can be eliminated. Further, in this modification, since the sensors 41 to 43, which are cheaper than the cameras 36 and 37, are used, the correction value can be calculated at low cost.

When the calculation of the correction value of the robot 1 is completed and the substrate 2 is actually delivered in the chamber 6, the sensors 41 to 43 include the hand forks 18, 19 and the substrate 2, and the sensors 41 to 43. Is arranged in the chamber 6 at a position deviated from the delivery position of the substrate 2 in the vertical direction so as not to interfere with each other.

(Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but the present invention is not limited thereto, and various modifications can be carried out without changing the gist of the present invention.

In the above-described embodiment, the cameras 36 and 37 may be arranged in a state of being displaced only in the longitudinal direction of the hand forks 18 and 19 arranged at the delivery position of the substrate 2 in the chamber 6. In this case, as shown in FIG. 4, assuming that the two corners of the detection jig 35 excluding the corners 35a and 35b are the corners 35c and 35d, respectively, the camera 36 has the corners 35a. Is installed so as to be arranged in the field of view of the camera 36, and the camera 37 is installed so that the corner portion 35c is arranged in the field of view of the camera 37. Alternatively, the camera 36 is installed so that the corner portion 35d is arranged in the field of view of the camera 36, and the camera 37 is installed so that the corner portion 35b is arranged in the field of view of the camera 37.

Further, the cameras 36 and 37 may be arranged in a state of being displaced only in a direction orthogonal to the longitudinal direction of the hand forks 18 and 19 arranged at the delivery position of the substrate 2 in the chamber 6. In this case, the camera 36 is installed so that the corner portion 35a is arranged in the field of view of the camera 36, and the camera 37 is installed so that the corner portion 35d is arranged in the field of view of the camera 37. .. Alternatively, the camera 36 is installed so that the corner portion 35c is arranged in the field of view of the camera 36, and the camera 37 is installed so that the corner portion 35b is arranged in the field of view of the camera 37.

In the above-described embodiment, the cameras 36 and 37 may be installed inside the chamber 7. Even in this case, since there are not many devices installed inside the chamber 7, which is a discharge chamber, the cameras 36, compared to the case where the cameras 36, 37 are installed inside the chamber 5. It becomes easy to install 37.

Further, in the above-described embodiment, the cameras 36 and 37 may be arranged inside the chamber 5. However, in this case, it becomes difficult to arrange the cameras 36 and 37. Further, in consideration of the stability of the temperature environment and the like when performing a predetermined process on the substrate 2 in the chamber 5, the delivery position of the substrate 2 in the chamber 5 is generally in the chambers 6 and 7. It is also deeper than the delivery position of the substrate 2. Therefore, when the hand forks 18 and 19 move to the delivery position of the substrate 2 in the chamber 5, the hand forks 18 and 19 move to the delivery position of the substrate 2 in the chambers 6 and 7. , The arm 9 is in an extended state. Therefore, when the cameras 36 and 37 are arranged inside the chamber 5, it becomes difficult to accurately obtain the deviation of the hand forks 18 and 19 in the longitudinal direction in the correction value calculation step.

In the above-described embodiment, the robot 1 does not have to include the origin sensors 31 to 33. In this case, the first arm portion 15, the second arm portion 16 and the hand base portion 17 may be aligned with the origin position by using a predetermined jig. Further, in this case, in the robot operation process, the motors 21 to 23 are driven and controlled based on the detection results of the encoders 24 to 26, and the robot 1 is set to the reference posture.

In the above-described form, the reference marks 38 and 39 do not have to be through holes. For example, the reference marks 38 and 39 may be protrusions formed on the reference mark forming member. Further, in the above-described embodiment, the reference marks 38 and 39 may not be provided inside the chamber 6. In this case, for example, the coordinates of the corner portions 35a and 35b are specified with reference to the origin position stored inside the cameras 36 and 37.

In the above-described form, the detection jig 35 may be formed in a flat plate shape other than a rectangle. Further, in the above-described embodiment, the hand 8 does not have to include the hand fork 19. Further, in the above-described embodiment, the object to be conveyed by the robot 1 is the substrate 2 for the organic EL display, but the object to be conveyed by the robot 1 may be a glass substrate for the liquid crystal display. However, it may be a semiconductor wafer or the like. That is, the robot 1 may be incorporated in a manufacturing system other than the manufacturing system 3 of the organic EL display, or may be incorporated in a predetermined processing system other than the manufacturing system. Further, in the above-described embodiment, the robot 1 may be arranged in a space having an atmospheric pressure.

1 Robot (industrial robot)
2 Substrate (object to be transported)
3 Manufacturing system (processing system)
5 Chamber (processing unit)
6 Chamber (supply unit)
7 Chamber (discharge part)
8 Hand 9 Arm 10 Main body 15 1st arm 16 2nd arm 17 Hand base 18 Hand fork 21 Motor (1st motor)
22 motor (second motor)
23 motor (third motor)
24 Encoder (1st encoder)
25 encoder (second encoder)
26 Encoder (3rd encoder)
31 Origin sensor (1st origin sensor)
32 Origin sensor (second origin sensor)
33 Origin sensor (3rd origin sensor)
35 Detection jig 35a Corner (first corner)
35b corner (second corner)
36 camera (first camera)
37 camera (second camera)
38 Standard mark (1st standard mark)
39 Standard mark (2nd standard mark)
41-43 sensor

Claims (8)

It is a correction value calculation method for an industrial robot that calculates a correction value for correcting the operation of an industrial robot.
The industrial robot has a main body portion, a first arm portion rotatably connected to the main body portion on the proximal end side, and a second arm portion rotatably connected to the distal end side of the first arm portion. An arm having an arm portion, a hand base rotatably connected to the tip end side of the second arm portion, and a hand fork extending in one direction in the horizontal direction from the hand base and on which an object to be transported is mounted. A hand, a first motor for rotating the first arm portion with respect to the main body portion, and a second motor for rotating the second arm portion with respect to the first arm portion. A third motor for rotating the hand base with respect to the second arm portion, a first encoder for detecting the rotation amount of the first motor, and a rotation amount of the second motor. The second encoder and the third encoder for detecting the rotation amount of the third motor are provided.
The method for calculating the correction value of the industrial robot is as follows.
The jig mounting process for mounting the detection jig on the hand fork,
A robot operation process in which the industrial robot is operated to bring it into a predetermined reference posture, and
After the jig mounting process and the robot operating process, a hand moving step of operating the industrial robot to move the hand fork to the delivery position of the object to be transported,
After the hand moving step, the first camera and the second camera are arranged so as to be offset in at least one of the longitudinal direction of the hand fork arranged at the delivery position and the direction orthogonal to the longitudinal direction of the hand fork. The coordinates of the first corner portion formed in the detection jig and arranged in the field of view of the first camera, and the coordinates of the first corner portion formed in the detection jig and arranged in the field of view of the second camera. A coordinate specification process that specifies the coordinates of the second corner to be performed, and
Based on the coordinates of the first corner portion and the coordinates of the second corner portion specified in the coordinate specifying step, the correction value of the first encoder for controlling the first motor, the second motor. A correction value calculation step for calculating a correction value of the second encoder for control and a correction value of the third encoder for controlling the third motor is provided.
In the jig mounting process, the detection jig is mounted on the hand fork in a state of being positioned by a positioning member mounted on the upper surface of the hand fork, and is a correction value of an industrial robot. Calculation method. The first camera and the second camera are characterized in that they are arranged in a state of being displaced in the longitudinal direction of the hand fork arranged at the delivery position and in the direction orthogonal to the longitudinal direction of the hand fork. The method for calculating a correction value for an industrial robot according to claim 1. A first reference mark arranged in the field of view of the first camera and photographed by the first camera and a second reference mark arranged in the field of view of the second camera and photographed by the second camera are provided. The method for calculating a correction value of an industrial robot according to claim 1 or 2, wherein the robot is characterized by the above. The first camera, the second camera, the first reference mark, and the second reference mark are also used for confirming the position of the object to be transported mounted on the hand fork arranged at the delivery position. The correction value calculation method for an industrial robot according to claim 3, wherein the correction value is calculated. The industrial robot is used by being incorporated in a processing system having a plurality of processing units for performing a predetermined processing on the transportation object, and the transportation object constituting a part of the processing system. The transport object is transported between the supply unit of the above, the discharge unit of the transport object constituting a part of the processing system, and the plurality of processing units.
The correction value calculation method for an industrial robot according to any one of claims 1 to 4, wherein the first camera and the second camera are installed inside the supply unit or the discharge unit. The correction value calculation method for an industrial robot according to claim 5, wherein the first camera and the second camera are installed inside the supply unit. It is a correction value calculation method for an industrial robot that calculates a correction value for correcting the operation of an industrial robot.
The industrial robot has a main body portion, a first arm portion rotatably connected to the main body portion on the proximal end side, and a second arm portion rotatably connected to the distal end side of the first arm portion. An arm having an arm portion, a hand base rotatably connected to the tip end side of the second arm portion, and a hand fork extending in one direction in the horizontal direction from the hand base and on which an object to be transported is mounted. A hand, a first motor for rotating the first arm portion with respect to the main body portion, and a second motor for rotating the second arm portion with respect to the first arm portion. A third motor for rotating the hand base with respect to the second arm portion, a first encoder for detecting the rotation amount of the first motor, and a rotation amount of the second motor. The second encoder and the third encoder for detecting the rotation amount of the third motor are provided.
The method for calculating the correction value of the industrial robot is as follows.
The jig mounting process for mounting the detection jig on the hand fork,
A robot operation process in which the industrial robot is operated to bring it into a predetermined reference posture, and
After the jig mounting process and the robot operating process, a hand moving step of operating the industrial robot to move the hand fork to the delivery position of the object to be transported,
After the hand moving step, each of the three sensors arranged so as to be offset from each other in at least one of the longitudinal direction of the hand fork arranged at the delivery position and the direction orthogonal to the longitudinal direction of the hand fork. The industrial robot is operated until the edge of the detection jig is detected by the sensor, and the coordinates of the industrial robot when the edge of the detection jig is detected by each of the three sensors are set. The process of specifying the coordinates to be specified and the process of specifying the coordinates
Correction value of the first encoder for controlling the first motor and correction of the second encoder for controlling the second motor based on the coordinates of the industrial robot specified in the coordinate specifying step. A correction value calculation step for calculating a value and a correction value of the third encoder for controlling the third motor is provided.
In the jig mounting process, the detection jig is mounted on the hand fork in a state of being positioned by a positioning member mounted on the upper surface of the hand fork, and is a correction value of an industrial robot. Calculation method. The industrial robot has a first origin sensor for detecting the origin position of the first arm portion in the rotation direction of the first arm portion with respect to the main body portion, and the second arm portion with respect to the first arm portion. A second origin sensor for detecting the origin position of the second arm portion in the rotation direction of the second arm portion, and a first for detecting the origin position of the hand base portion in the rotation direction of the hand base portion with respect to the second arm portion. Equipped with 3 origin sensors
In the robot operation step, the first motor is driven and controlled based on the detection result of the first origin sensor or based on the detection result of the first origin sensor and the detection result of the first encoder, and the second. The second motor is driven and controlled based on the detection result of the origin sensor or based on the detection result of the second origin sensor and the detection result of the second encoder, and based on the detection result of the third origin sensor. Alternatively, according to claim 1, the third motor is driven and controlled based on the detection result of the third origin sensor and the detection result of the third encoder to bring the industrial robot into the reference posture. The method for calculating the correction of the industrial robot according to any one of 7.

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