KR20190099123A - Method for adjusting industrial robot - Google Patents

Abstract

Provided is a method for adjusting an industrial robot, capable of adjusting a second arm part accurately to a predetermined reference position, adjusting a band base part accurately to a predetermined reference position and adjusting a hand fork accurately to a predetermined reference position. The method for adjusting an industrial robot includes: a first reference position specification process for specifying a first reference position, which is a reference position of a second arm part (16) in a rotating direction of the second arm part (16) with respect to a first arm part (15), by using a position determination jig (36); a second reference position specification process for specifying a second reference position, which is a reference position of a hand base part (17) in a rotating direction of the hand base part (17) with respect to the second arm part (16), by using a position determination jig (37); and a hand fork position determination process for determining the position of a hand fork (18) with a position determination jig (38) on a third reference position which is a reference position of the hand fork (18) in a direction orthogonal to a long side direction of the hand fork (18) with respect to the hand base part (17).

Description

How to adjust industrial robots {METHOD FOR ADJUSTING INDUSTRIAL ROBOT}

This invention relates to the adjustment method of the industrial robot which conveys a conveyance object.

Conventionally, the industrial robot which conveys a glass substrate is known (for example, refer patent document 1). The industrial robot described in Patent Literature 1 is a horizontal articulated robot used in a manufacturing system for an organic EL (organic electroluminescent) display, and is connected to the hand on which the glass substrate is mounted so that the hand is rotatable on the tip end side. And a main body portion to which the base end side of the arm is rotatably connected.

The arm includes a first arm portion whose proximal end is rotatably connected to the main body, and a second arm portion whose proximal end is rotatably connected to the distal end of the first arm. The hand is provided with the hand base part rotatably connected to the front-end | tip part side of a 2nd arm part, and the hand fork to which the glass substrate is mounted while being fixed to the hand base part. Further, the industrial robot described in Patent Document 1 includes a motor for rotating the first arm portion with respect to the main body portion, a motor for rotating the second arm portion with respect to the first arm portion, and a hand base portion with respect to the second arm portion. For the motor.

Japanese Patent Publication No. 2015-139854

When the industrial robot of patent document 1 is installed in manufacturing systems, such as an organic electroluminescent display, in order to create the operation program of an industrial robot, the teaching operation of an industrial robot is generally performed. For example, when an industrial robot installed in a manufacturing system is replaced or a motor of an industrial robot is exchanged, the robot coordinate system of the industrial robot after replacement is performed with respect to the coordinates of the teaching position taught in the teaching operation of the industrial robot before replacement. Disagree Therefore, even when the industrial robot is replaced or the motor of the industrial robot is replaced, the teaching work of the industrial robot is generally performed again.

On the other hand, if the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinates of the teaching position taught in the industrial robot's teaching work before the replacement is corrected, it becomes unnecessary to perform complicated teaching work again. Therefore, the inventor of the present application considers correcting the deviation by calculating a correction value for correcting the deviation of the robot coordinate system of the industrial robot after the exchange with respect to the coordinate of the teaching position taught in the teaching operation of the industrial robot before replacement. . When calculating the correction value for correcting a deviation, it is preferable that the correction value can be easily calculated.

In order to easily calculate the correction value, the inventor of the present invention accurately aligns the second arm portion to a predetermined reference position of the second arm portion in the rotational direction of the second arm portion with respect to the first arm portion, and further, At the predetermined reference position of the hand fork in the direction orthogonal to the long side direction of the hand fork, with the hand base accurately aligned to the predetermined reference position of the hand base in the rotational direction of the hand base. After the hand fork is correctly aligned, the industrial robot is subjected to a predetermined operation, and the displacement amount of the industrial robot in the rotational direction of the first arm portion relative to the main body portion is determined so that the rotational direction of the first arm portion relative to the main body portion is determined. The calculation of a correction value based only on the amount of misalignment in this case is examined.

Therefore, the subject of this invention is to align the 2nd arm part exactly to the predetermined reference position of the 2nd arm part in the rotational direction of the 2nd arm part with respect to a 1st arm part, and to the rotational direction of the hand base part with respect to a 2nd arm part. To correctly align the hand base to a predetermined reference position of the hand base in the hand base, and to accurately align the hand fork to the predetermined reference position of the hand fork in a direction orthogonal to the long side direction of the hand fork relative to the hand base. It is possible to provide a method of adjusting the industrial robot.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, this invention is the adjustment method of an industrial robot, The industrial robot is a base end part in the front end part side of the main arm part and the 1st arm part and the 1st arm part to which the base end side is rotatably connected to a main body part. A hand fork on which a conveying object is mounted while extending in one direction in a horizontal direction from an arm having a second arm portion, the side of which is rotatably connected, and a hand base portion and a hand base portion rotatably connected to the tip end side of the second arm portion. And a first motor for rotating the first arm with respect to the main body, a second motor for rotating the second arm with respect to the first arm, and a hand for rotating the hand base with respect to the second arm. A third motor, a first encoder for detecting a rotation amount of the first motor, a second encoder for detecting a rotation amount of the second motor, a third encoder for detecting a rotation amount of the third motor, a main body part Detecting the home position of the first arm in the rotational direction of the first arm with respect to the first home sensor and the home position of the second arm in the rotational direction of the second arm with respect to the first arm. And a second origin sensor for detecting the home position of the hand base part in the rotational direction of the hand base part with respect to the second arm part, and in a rotational direction of the second arm part with respect to the first arm part. The predetermined reference position of the second arm portion of the first base position is referred to as the first reference position, and the predetermined reference position of the hand base portion in the rotational direction of the hand base portion relative to the second arm portion is referred to as the second reference position. When the predetermined reference position of the hand fork in the direction orthogonal to the long side direction of the hand fork is the third reference position, the adjustment method of the industrial robot includes the second circle so that the second arm stops at the first reference position. From a 1st stop position which is the stop position of a 2nd arm part when a 2nd arm part is stopped based on the detection result of a point sensor, or based on the detection result of a 2nd origin sensor, and the detection result of a 2nd encoder. Detection result of the second encoder when the second arm is rotated to the position where the second arm is positioned by the first positioning jig for positioning the second arm at the position, and the second arm at the first stop position. The first reference position specifying step of specifying the first reference position based on the value of the second encoder when is stopped, and the first reference position specified in the first reference position specifying step after the first reference position specifying step. On the basis of the detection result of the third origin sensor or the detection result of the third encoder and the third encoder to cause the hand base to stop at the second reference position. The hand base is rotated from the second stop position, which is the stop position of the hand base when the base is stopped, to the position where the hand base is positioned by the second positioning jig for positioning the hand base at the second reference position. A second reference position specifying step of specifying a second reference position based on the detection result of the third encoder at the time and the value of the third encoder when the hand base is stopped at the second stop position, and the second reference position After the specific process, in a state where the second arm portion is disposed at the first reference position specified in the first reference position specifying process, and the hand base is disposed at the second reference position specified in the second reference position specifying process, And a hand fork positioning process of positioning the hand fork by a third positioning jig for positioning the hand fork at a third reference position. The.

In the adjustment method of the industrial robot of this invention, in a 1st reference position specification process, a 2nd arm part is located in the 1st reference position which is a reference position of the 2nd arm part in the rotational direction of the 2nd arm part with respect to a 1st arm part. The first reference position is specified using the first positioning jig for determining. Therefore, in this invention, it becomes possible to match a 2nd arm part to the 1st reference position specified with high precision using a 1st positioning jig. That is, in this invention, it becomes possible to match a 2nd arm part exactly to a 1st reference position.

Moreover, in this invention, in a 2nd reference position specification process, 2nd position determination for positioning a hand base part in the 2nd reference position which is a reference position of the hand base part in the rotation direction of the hand base part with respect to a 2nd arm part. The second reference position is specified using the jig. Therefore, in this invention, it becomes possible to match a hand base part to the 2nd reference position specified with high precision using a 2nd positioning jig. That is, in this invention, it becomes possible to match a hand base part correctly with a 2nd reference position.

Moreover, in this invention, in a hand fork positioning process, for positioning a hand fork to the 3rd reference position which is a reference position of the hand fork in the direction orthogonal to the long side direction of the hand fork with respect to a hand base part, The hand fork is positioned at the third reference position using the third positioning jig. Therefore, in this invention, it becomes possible to exactly match a hand fork to a 3rd reference position.

In the present invention, for example, when the second arm portion is in the first reference position, when the first arm portion and the second arm portion overlap in the vertical direction, and when the hand base portion is in the second reference position, the second arm portion and the hand fork Overlap in the vertical direction.

In the present invention, the first positioning jig includes, for example, a first fixing member fixed to either one of the first arm portion and the second arm portion, and a first insertion formed on any one of the first arm portion and the second arm portion. A first pin is inserted into the hole and the first through hole formed in the first fixing member. In this case, it becomes possible to position a 2nd arm part in a 1st reference position with a comparatively simple structure.

In the present invention, the second positioning jig includes, for example, a second fixing member fixed to either one of the first arm part and the hand base part, and the second insertion member formed on any one of the first arm part and the hand base part. A second pin is inserted into the hole and the second through hole formed in the second fixing member. In this case, it becomes possible to position the hand base part in a 2nd reference position with a comparatively simple structure.

In the present invention, the hand includes two hand forks, and the third positioning jig includes, for example, a third fixing member fixed to either one of the two hand forks and the second arm portion, and the two hand forks. And a third pin inserted into the third insertion hole formed in the other of the second arm portions and the third through hole formed in the third fixing member. In this case, it becomes possible to position two hand forks in a 3rd reference position with a comparatively simple structure.

In the present invention, for example, the hand includes two second hand forks extending in the opposite direction from the hand base to the hand fork, and the adjustment method of the industrial robot includes a hand base 180 after the hand fork positioning process. With the rotation, two second hand forks at a predetermined reference position of the second hand fork in the direction orthogonal to the long side direction of the second hand fork with respect to the hand base by the third positioning jig. And a second hand fork positioning process for positioning the position. In this case, it becomes possible to perform positioning of the hand fork and positioning of the second hand fork using a common third positioning jig.

As described above, in the adjustment method of the industrial robot of the present invention, the second arm part is accurately aligned to a predetermined reference position of the second arm part in the rotational direction of the second arm part relative to the first arm part. Aligning a hand base part exactly with the predetermined reference position of the hand base part in the rotation direction of a hand base part, and the predetermined reference position of the hand fork in the direction orthogonal to the long side direction of the hand fork with respect to the hand base part. It becomes possible to fit the hand fork exactly.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure of the industrial robot adjusted by the adjustment method of the industrial robot which concerns on embodiment of this invention, (A) is a top view, (B) is a side view.
FIG. 2 is a plan view showing a state in which the industrial robot shown in FIG. 1 is incorporated in a manufacturing system of an organic EL display.
FIG. 3 is a block diagram for explaining the configuration of the industrial robot shown in FIG. 1.
FIG. 4 is a view in which the first positioning jig, the second positioning jig, and the third positioning jig are installed in the industrial robot shown in FIG. 1, (A) is a plan view, and (B) is a side view.
FIG. 5A is an enlarged view of an E portion in FIG. 4B, (B) is a diagram illustrating a first positioning jig and the like from the FF direction of (A), and (C) is ( It is an enlarged view of G section of A).
FIG. 6A is an enlarged view of an H portion in FIG. 4B, (B) is a diagram illustrating a second positioning jig and the like from the JJ direction of (A), and (C) is ( It is an enlarged view of K part of A).
FIG. 7A is an enlarged view of the L portion of FIG. 4A, (B) is an enlarged view of the M portion of FIG. 4B, and (C) is the NN direction of (B). It is a figure which shows a 3rd positioning jig | tool, etc., (D) is an enlarged view of the P part of (B).
FIG. 8 is a view for explaining the operation of the industrial robot in the correction value calculating step of calculating the correction value of the industrial robot shown in FIG. 1.
It is a figure for demonstrating operation | movement of the industrial robot in the correction value calculation process which concerns on other embodiment of this invention.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described, referring drawings.

(Configuration of Industrial Robot)

1: is a figure of the industrial robot 1 adjusted by the industrial robot adjustment method which concerns on embodiment of this invention, (A) is a top view, (B) is a side view. FIG. 2 is a plan view showing a state where the industrial robot 1 shown in FIG. 1 is incorporated in the manufacturing system 3 of the organic EL display. FIG. 3 is a block diagram for explaining the configuration of the industrial robot 1 shown in FIG. 1.

The industrial robot 1 (henceforth "robot 1") of this form conveys the glass substrate 2 for organic electroluminescent displays (henceforth "substrate 2") which is a conveyance object. It is a robot. This robot 1 is a horizontal articulated robot used in the manufacturing system 3 of organic electroluminescent display, as shown in FIG. The manufacturing system 3 is provided with the transfer chamber 4 (henceforth "chamber 4") arrange | positioned at the center, and the some chamber 5-7 arrange | positioned so that the chamber 4 may be enclosed. Doing.

The chamber 5 is a process chamber for performing a predetermined process on the substrate 2. In addition, the chamber 6 is a chamber (loader) for supply in which the board | substrate 2 supplied to the manufacturing system 3 is accommodated, for example, and the chamber 7 is, for example, from the manufacturing system 3. A discharge chamber (unloader) in which the discharged substrate 2 is accommodated. The interior of the chambers 4 to 7 is a vacuum. A part of the robot 1 is arrange | positioned inside the chamber 4. The hand fork 18 and 19 which comprise the robot 1 mentioned later enter into the chambers 5-7, and the robot 1 conveys the board | substrate 2 between the some chambers 5-7. do.

As shown in FIG. 1, the robot 1 includes a hand 8 on which the substrate 2 is mounted, an arm 9 on which the hand 8 is pivotally connected to the distal end side, and an arm 9. The base end side is provided with the main-body part 10 connected so that rotation is possible. The hand 8 and the arm 9 are disposed above the main body 10. The main body part 10 is equipped with the lifting mechanism which raises and lowers the arm 9, and the case body 13 in which the lifting mechanism is accommodated. The case body 13 is formed in the substantially cylindrical shape with a bottom. The flange 14 formed in disk shape is being fixed to the upper end part of the case body 13. As shown in FIG.

As described above, a part of the robot 1 is disposed inside the chamber 4. Specifically, the upper part of the robot 1 than the lower end surface of the flange 14 is arrange | positioned inside the chamber 4. That is, the part of the robot 1 above the lower end surface of the flange 14 is arrange | positioned in the vacuum area VR, and the hand 8 and the arm 9 are in the vacuum chamber (in vacuum). It is arranged. On the other hand, the part below the lower end surface of the flange 14 of the robot 1 is arrange | positioned in the standby area AR (in air | atmosphere).

The arm 9 is provided with the 1st arm part 15 and the 2nd arm part 16 mutually rotatably connected. The arm 9 of this embodiment is comprised by two arm parts, the 1st arm part 15 and the 2nd arm part 16. As shown in FIG. The proximal end of the first arm 15 is rotatably connected to the main body 10. The proximal end of the second arm 16 is rotatably connected to the distal end of the first arm 15. The hand 8 is rotatably connected to the tip end side of the second arm 16.

The second arm portion 16 is disposed above the first arm portion 15. In addition, the hand 8 is disposed above the second arm 16. The distance between the center of rotation of the first arm 15 with respect to the main body 10 and the center of rotation of the second arm 16 with respect to the first arm 15 is the second arm 16 with respect to the first arm 15. ) Is equal to the distance between the center of rotation of the center of rotation and the center of rotation of the hand 8 with respect to the second arm 16.

The hand 8 is provided with the hand base part 17 connected to the front end side of the 2nd arm part 16 so that rotation is possible, and the hand forks 18 and 19 on which the board | substrate 2 is mounted. The hand 8 of this embodiment is provided with two hand forks 18 and two hand forks 19. The hand forks 18 and 19 are formed linearly. The hand fork 18 and the hand fork 19 are formed in the same shape. The two hand forks 18 are arranged in parallel with each other at predetermined intervals. The hand fork 18 extends from the hand base 17 in one direction in the horizontal direction. The two hand forks 19 are arranged in parallel with each other at a predetermined interval. The hand fork 19 extends in the reverse direction from the hand base 17 to the hand fork 18. The hand fork 19 of this form is a 2nd hand fork.

The hand forks 18 and 19 are fixed to the hand base 17. Specifically, the hand forks 18 and 19 are fixed to the hand base part 17 with the screw for fixing. In the hand forks 18 and 19, insertion through holes through which fixing screws are inserted are formed. This insertion through hole is a long hole which makes the direction orthogonal to the long side direction of the hand forks 18 and 19 a long side direction, and is a hand in the direction orthogonal to the long side direction of the hand forks 18 and 19. It is possible to adjust the fixing positions of the hand forks 18 and 19 with respect to the base 17.

In this embodiment, one substrate 2 is mounted on two hand forks 18. In addition, one substrate 2 is mounted on two hand forks 19. On the upper surface of the hand fork 18, a positioning member for positioning the substrate 2 to be mounted is provided. The positioning member for positioning the board | substrate 2 to be mounted is also provided in the upper surface of the hand fork 19. As shown in FIG.

The robot 1 also includes a motor 21 for rotating the first arm 15 with respect to the main body 10 and a motor for rotating the second arm 16 with respect to the first arm 15. (22), a motor (23) for rotating the hand base portion (17) with respect to the second arm portion (16), an encoder (24) for detecting the amount of rotation of the motor (21), and a motor (22). The encoder 25 for detecting the rotation amount of the motor and the encoder 26 for detecting the rotation amount of the motor 23 are provided (see FIG. 3).

The encoder 24 is provided in the motor 21. The encoder 25 is provided in the motor 22, and the encoder 26 is provided in the motor 23. The motor 21 and the encoder 24 are arrange | positioned inside the main-body part 10, for example. In addition, the motors 22 and 23 and the encoders 25 and 26 are disposed inside the first arm 15, for example. The motors 21 to 23 are electrically connected to the control unit 27 of the robot 1. The encoders 24 to 26 are also electrically connected to the control unit 27. The motor 21 of this form is a 1st motor, the motor 22 is a 2nd motor, and the motor 23 is a 3rd motor. In addition, encoder 24 is a first encoder, encoder 25 is a second encoder, and encoder 26 is a third encoder.

The robot 1 further includes an origin sensor 31 for detecting the home position of the first arm 15 in the rotational direction of the first arm 15 with respect to the main body 10, and the first arm. Home sensor 32 for detecting the home position of the second arm 16 in the rotational direction of the second arm 16 with respect to 15 and the hand base 17 for the second arm 16. Is provided with an origin sensor 33 for detecting the origin position of the hand base portion 17 in the rotational direction. The home sensor 31 of this embodiment is a first home sensor, the home sensor 32 is a second home sensor, and the home sensor 33 is a third home sensor.

The home sensors 31 to 33 are proximity sensors, for example. Or the origin sensors 31-33 are optical sensors which have a light emitting element and a light receiving element, for example. The origin sensors 31 to 33 are electrically connected to the control unit 27. In the joint part which is a connection part of the main-body part 10 and the 1st arm part 15, the origin sensor 31 is fixed to either one of the main-body part 10 and the 1st arm part 15, and the main-body part 10 And the detection member detected by the origin sensor 31 when the first arm portion 15 is at the origin position is fixed to any one of the first arms 15.

Similarly, in the joint part which is the connection part of the 1st arm part 15 and the 2nd arm part 16, the origin sensor 32 is fixed to either one of the 1st arm part 15 and the 2nd arm part 16, and The detection member detected by the origin sensor 32 is fixed to any one of the 1st arm part 15 and the 2nd arm 16 when the 2nd arm part 16 is in an origin position. Moreover, in the joint part which is the connection part of the 2nd arm part 16 and the hand base part 17, the origin sensor 33 is fixed to either one of the 2nd arm part 16 and the hand base part 17, and The detection member detected by the origin sensor 33 is fixed to any one of the 2 arm part 16 and the hand base part 17 when the hand base part 17 is in an origin position.

(Calculation method of correction value of industrial robot)

FIG. 4 is a view in which the positioning jigs 36 to 38 are installed in the robot 1 shown in FIG. 1, (A) is a plan view, and (B) is a side view. FIG. 5A is an enlarged view of an E portion in FIG. 4B, and FIG. 5B is a view showing the positioning jig 36 and the like from the FF direction in FIG. 5A. 5C is an enlarged view of a portion G of FIG. 5A. FIG. 6A is an enlarged view of the H portion in FIG. 4B, and FIG. 6B is a view showing the positioning jig 37 and the like from the JJ direction in FIG. 6A. 6C is an enlarged view of the K portion of FIG. 6A. FIG. 7A is an enlarged view of the L portion of FIG. 4A, FIG. 7B is an enlarged view of the M portion of FIG. 4B, and FIG. 7C is It is a figure which shows the positioning jig 38 etc. from the NN direction of FIG. 7B, and FIG. 7D is an enlarged view of the P part of FIG. FIG. 8: is a figure for demonstrating operation | movement of the robot 1 in the correction value calculation process which calculates the correction value of the robot 1 shown in FIG.

When the robot 1 is installed in the manufacturing system 3, the teaching operation of the robot 1 is performed in order to create an operation program of the robot 1. For example, when the robot 1 installed in the manufacturing system 3 is exchanged, the robot coordinate system of the robot 1 after the exchange is shifted with respect to the coordinates of the teaching position taught in the teaching operation of the robot 1 before the exchange. For this reason, it is necessary to perform the teaching work of the robot 1 again.

On the other hand, if the misalignment of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching operation of the robot 1 before the replacement is corrected, it becomes unnecessary to perform the complicated teaching operation again. In this embodiment, when the robot 1 installed in the manufacturing system 3 is replaced so that it is not necessary to perform the complicated teaching work again after replacing the robot 1, the teaching work of the robot 1 before replacement is performed. A correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position is calculated. That is, a correction value for correcting the operation of the robot 1 after replacement is calculated. Hereinafter, the calculation method of this correction value is demonstrated.

In the following description, the predetermined reference position of the second arm portion 16 in the rotational direction of the second arm portion 16 with respect to the first arm portion 15 is referred to as the first reference position, and the second arm portion 16 The predetermined reference position of the hand base 17 in the rotational direction of the hand base 17 relative to the second base position is referred to as the long side direction of the hand fork 18 with respect to the hand base 17. The predetermined reference position of the hand fork 18 in the direction orthogonal to the third reference position is referred to as the first arm 15 in the rotational direction of the first arm 15 relative to the main body 10. The predetermined reference position of is referred to as a fourth reference position.

In this embodiment, when the 2nd arm part 16 is in a 1st reference position, as shown in FIG. 4, the 1st arm part 15 and the 2nd arm part 16 overlap in an up-down direction. Specifically, when the second arm portion 16 is in the first reference position, the long side direction of the first arm portion 15 and the long side direction of the second arm portion 16 coincide with each other when viewed from the vertical direction. The 1st arm part 15 and the 2nd arm part 16 overlap in the up-down direction. In addition, in this form, the origin position of the 2nd arm part 16 and the 1st reference position in the rotation direction of the 2nd arm part 16 with respect to the 1st arm part 15 correspond.

In addition, when the hand base part 17 is in a 2nd reference position, as shown in FIG. 4, the 2nd arm part 16 and the hand fork 18 overlap in an up-down direction. Specifically, when the hand base part 17 is in a 2nd reference position, when it sees from the up-down direction, the 2nd so that the long side direction of the 2nd arm part 16 and the long side direction of the hand fork 18 may correspond, The arm part 16 and the hand fork 18 overlap in an up-down direction. In addition, in this form, the position where the hand base part 17 rotated 90 degrees from the origin position of the hand base part 17 in the rotation direction of the hand base part 17 with respect to the 2nd arm part 16 is a 1st position. 2 is the reference position.

In addition, the 4th reference position may correspond with the origin position of the 1st arm part 15 in the rotation direction of the 1st arm part 15 with respect to the main body part 10, and The position where the 1st arm part 15 rotated predetermined angle from the origin position of the 1st arm part 15 in the rotation direction of the 1st arm part 15 may be set as 4th reference position.

Moreover, in this form, the positioning jig 36 for positioning the 2nd arm part 16 in a 1st reference position, and the positioning jig (for positioning the hand base part 17 in a 2nd reference position) 37 and a positioning jig 38 for positioning the hand fork 18 at the third reference position is used. The positioning jig 36 of this embodiment is a first positioning jig, the positioning jig 37 is a second positioning jig, and the positioning jig 38 is a third positioning jig. Moreover, the positioning jig 38 has the hand fork 19 in the predetermined reference position of the hand fork 19 with respect to the hand base 17 in the direction orthogonal to the long side direction of the hand fork 19. It is also used for positioning.

As shown in FIG. 5, the positioning jig 36 includes a fixing member 41 fixed to the first arm 15 and a pin 42. The fixing member 41 is fixed to the side surface of the base end of the first arm 15. In the fixing member 41, a through hole 41a into which the pin 42 is inserted is formed. Moreover, the insertion hole 16a in which the pin 42 is inserted is formed in the side surface of the front-end | tip of the 2nd arm part 16. As shown in FIG. When the pin 42 inserted into the through hole 41a of the fixing member 41 is inserted into the insertion hole 16a, the second arm portion 16 is precisely positioned at the first reference position. The fixing member 41 of this embodiment is a first fixing member, the pin 42 is a first pin, the insertion hole 16a is a first insertion hole, and the through hole 41a is a first through hole.

As shown in FIG. 6, the positioning jig 37 includes fixing members 43 and 44 fixed to the first arm 15, and a pin 45. The fixing member 43 is fixed to the side surface of the base end of the first arm 15. The fixing member 44 is fixed to the side surface of the fixing member 43. The fixing member 43 is provided with a groove portion for preventing interference with the fixing member 41. The bottom surface of the fixing member 44 is in contact with the distal end surface of the screw 46 for adjusting the vertical position of the fixing member 44 with respect to the fixing member 43. The screw 46 is screwed to the screw holding member 47 fixed to the lower end surface of the fixing member 43.

In the fixing member 44, a through hole 44a into which the pin 45 is inserted is formed. Moreover, the insertion hole 17a in which the pin 45 is inserted is formed in the side surface of the hand base part 17. As shown in FIG. When the pin 45 inserted into the through hole 44a of the fixing member 44 is inserted into the insertion hole 17a, the hand base 17 is precisely positioned at the second reference position. The fixing members 43 and 44 of this form are a 2nd fixing member, the pin 45 is a 2nd pin, the insertion hole 17a is a 2nd insertion hole, and the through hole 44a is a 2nd through hole. .

As shown in FIG. 7, the positioning jig 38 is provided with the fixing members 48 and 49 and the pin 50 which are fixed to the two hand forks 18. As shown in FIG. The fixing member 48 is fixed to the upper surfaces of the two hand forks 18. The fixing member 49 is fixed to the lower surface of the fixing member 48. In the fixing member 49, a through hole 49a into which the pin 50 is inserted is formed. Moreover, the insertion hole 16b in which the pin 50 is inserted is formed in the side surface of the base end part of the 2nd arm part 16. As shown in FIG. When the pin 50 inserted into the through hole 49a of the fixing member 49 is inserted into the insertion hole 16b, the two hand forks 18 are precisely positioned at the third reference position. The fixing members 48 and 49 of this embodiment are the third fixing members, the pin 50 is the third pin, the insertion hole 16b is the third insertion hole, and the through hole 49a is the third through hole. .

For example, when the robot 1 installed in the manufacturing system 3 is replaced, first, the robot 1 is adjusted. Specifically, first, the second arm 16 is rotated to the first reference position (origin position) based on the detection result of the origin sensor 32. That is, based on the detection result of the origin sensor 32, the 2nd arm part 16 is rotated and stopped so that the 2nd arm part 16 may stop at a 1st reference position.

Further, based on the detection result of the origin sensor 33 and the detection result of the encoder 26, the hand base 17 is rotated to the second reference position (the position rotated by 90 ° from the origin position). For example, after rotating the hand base 17 to the home position based on the detection result of the home sensor 33, the hand base 17 is removed from the home position based on the detection result of the encoder 26. 2 Rotate to the reference position. That is, the hand base 17 is rotated and stopped based on the detection result of the origin sensor 33 and the encoder 26 so that the hand base 17 stops at the second reference position.

Thereafter, the fixing members 41, 43, 44 are fixed to the first arm 15, and the fixing members 48, 49 are fixed to the two hand forks 18. In addition, the 2nd arm part 16 which rotated to the 1st reference position based on the detection result of the origin sensor 32 is strictly shifted | deviated slightly from the 1st reference position. Similarly, the hand base part 17 which rotated to the 2nd reference position based on the detection result of the origin sensor 33 and the detection result of the encoder 26 is slightly shift | deviated from the 2nd reference position strictly.

After that, the second arm 16 is rotated with respect to the first arm 15 to the position where the pin 42 inserted into the through hole 41a of the fixing member 41 is fitted into the insertion hole 16a. The pin 42 is inserted into the hole 16a and the second arm 16 is precisely positioned at the first reference position. In addition, the rotation amount of the motor 22 at that time is detected by the encoder 25, and the control unit 27 specifies the first reference position of the second arm unit 16 using the detection result of the encoder 25. do.

That is, the 1st which is the stop position of the 2nd arm part 16 when the 2nd arm part 16 is stopped based on the detection result of the origin sensor 32 so that the 2nd arm part 16 may stop in a 1st reference position. The detection result of the encoder 25 at the time of rotating the 2nd arm part 16 from the stop position to the position where the 2nd arm part 16 is positioned by the positioning jig 36 to a 1st reference position, and The first reference position is specified based on the value of the encoder 25 when the second arm 16 is stopped at the first stop position (first reference position specifying step).

Thereafter, the pin 45 inserted into the through hole 44a of the fixing member 44 is inserted while the second arm 16 is disposed at the first reference position specified in the first reference position specifying step. The hand base part 17 is inserted in the insertion hole 17a by rotating the hand base part 17 with respect to the 2nd arm part 16 to the position which fits into the hole 17a, and the hand base part 17 in a 2nd reference position. )). Moreover, the rotation amount of the motor 23 at that time is detected by the encoder 26, and the control part 27 specifies the 2nd reference position of the hand base part 17 using the detection result by the encoder 26. do.

That is, in the state in which the 2nd arm part 16 is arrange | positioned in the 1st reference position specified in the 1st reference position specification process, the origin sensor 33 is detected so that the hand base part 17 may stop in a 2nd reference position. Based on the result and the detection result of the encoder 26, the hand base portion is determined by the positioning jig 37 from the second stop position which is the stop position of the hand base portion 17 when the hand base portion 17 is stopped. The detection result of the encoder 26 when the hand base part 17 was rotated to the position where 17 is positioned, and the encoder 26 when the hand base part 17 is stopped in the 2nd stop position. A second reference position is specified based on the value of (second reference position specifying process).

Thereafter, the second arm portion 16 is disposed at the first reference position specified in the first reference position specifying process, and the hand base portion 17 is placed at the second reference position specified in the second reference position specifying process. In the state arranged, in the direction orthogonal to the long side direction of the hand fork 18 to the position where the pin 50 inserted in the through-hole 49a of the fixing member 49 fits in the insertion hole 16b. The two hand forks 18 are moved relative to the hand base 17 to insert the pin 50 into the insertion hole 16b, and the two hand forks 18 are positioned at the third reference position.

That is, the second arm 16 is disposed at the first reference position specified in the first reference position specifying process, and the hand base 17 is disposed at the second reference position specified in the second reference position specifying process. In this state, the two hand forks 18 are positioned by the positioning jig 38 (hand fork positioning process). The positioned hand fork 18 is fixed to the hand base 17 by screws.

Thereafter, at least the positioning jigs 37 and 38 are separated, and the hand base 17 is rotated 180 degrees with respect to the second arm 16. In this state, the fixing members 48 and 49 are fixed to the two hand forks 19. Moreover, the hand base part (in the direction orthogonal to the long side direction of the hand fork 19 to the position which the pin 50 inserted in the through-hole 49a of the fixing member 49 fits in the insertion hole 16b) is carried out. The two hand forks 19 are moved with respect to 17, the pin 50 is inserted into the insertion hole 16b, and the two hand forks 19 are positioned at a predetermined reference position.

That is, the hand base part 17 is rotated 180 degrees and the positioning jig 38 makes the hand in the direction orthogonal to the long side direction of the hand fork 19 with respect to the hand base part 17. The two hand forks 19 are positioned at the predetermined reference positions of the forks 19 (second hand fork positioning process). The positioned hand fork 19 is fixed to the hand base 17 by a screw. Moreover, when the 2nd hand fork positioning process is complete | finished, the preconditioning of the robot 1 is complete | finished.

Thereafter, the detection panel 52 (see FIG. 8) is mounted on the two hand forks 18 (panel mounting step). The detection panel 52 is a panel used when calculating the correction value in the correction value calculating step described later, and is formed in a rectangular flat plate shape, for example. The detection panel 52 is mounted on the two hand forks 18 in a state of being positioned by the positioning member provided on the upper surface of the hand fork 18.

Thereafter, the first arm 15 stops at the fourth reference position based on the detection result of the origin sensor 31 or the detection result of the origin sensor 31 and the detection result of the encoder 24. The motor 21 is driven and controlled on the basis of the third stop position, which is the stop position of the first arm portion 15 when the arm portion 15 is stopped, and the first reference position specified in the first reference position specifying step is determined. Drive control of the motor 22 on the basis of the reference, drive control of the motor 23 on the basis of the second reference position specified in the second reference position specifying process, the robot 1 to the virtual reference attitude (Robot operation process).

That is, driving control of the motor 21 is performed on the basis of the third stop position, drive control of the motor 22 on the basis of the first reference position specified in the first reference position specifying process, and the second reference. The motor 23 is driven and controlled based on the second reference position specified in the position specifying process, and the robot 1 is operated to the virtual operation start position. In this embodiment, for example, the first arm 15 stops at the third stop position, the second arm portion 16 stops at the first reference position, and the hand base 17 moves 90 degrees from the second reference position. The state stopped at the rotated position is the virtual operation start position of the robot 1. In addition, in this form, the operation start position of the robot 1 and the home position of the robot 1 correspond. However, the operation start position of the robot 1 and the home position of the robot 1 may be shifted.

In addition, when the origin position of the 1st arm part 15 and the 4th reference | standard position in the rotation direction of the 1st arm part 15 with respect to the main-body part 10 correspond, it is a 4th robot operation process. The first arm 15 is rotated and stopped based on the detection result of the origin sensor 31 so that the first arm 15 stops at the reference position. Moreover, the position where the 1st arm part 15 rotated predetermined angle from the origin position of the 1st arm part 15 in the rotation direction of the 1st arm part 15 with respect to the main body part 10 turns into a 4th reference position. If there is, in the robot operation process, the first arm 15 is based on the detection result of the origin sensor 31 and the encoder 24 so that the first arm 15 stops at the fourth reference position. Rotate to stop. In addition, the 3rd stop position is strictly shifted | deviated slightly from the 4th reference position. In addition, until the robot operation process, the positioning jig 36 and 38 are isolate | separated.

Thereafter, the robot 1 is operated to move the hand fork 18 to the transfer position of the substrate 2 (hand movement step). For example, as shown in FIG. 8A, the hand fork 18 is moved to the transfer position of the substrate 2 in the chamber 6. Specifically, the arm 9 is extended and the hand fork 18 is moved to the transfer position of the substrate 2 in the chamber 6. Then, the motor 21 is based on the shift amount of the 5th reference position which is a predetermined reference position, and the edge of the detection panel 52 in the rotation direction of the 1st arm part 15 with respect to the main-body part 10. ) Is calculated (correction value calculating step).

Specifically, when the hand fork 18 is moved to the transfer position of the board | substrate 2 by operating the robot 1 before the exchange in which the detection panel 52 was mounted in the hand fork 18, the main-body part 10 The position where the edge of the detection panel 52 is arrange | positioned in the rotation direction of the 1st arm part 15 with respect to) is set as a 5th reference position. In addition, one sensor 53 is disposed at the fifth reference position. The sensor 53 is, for example, an optical sensor having a light emitting element and a light receiving element or a proximity sensor. The sensor 53 is provided inside the chamber 6.

In the correction value calculating step, the fifth reference position in the rotational direction of the first arm 15 with respect to the main body 10 is detected until the edge of the detection panel 52 is detected by the sensor 53. The control unit 27 calculates a correction value based on the detection result of the encoder 24 when the first arm unit 15 is rotated until the edges of the detection panel 52 coincide with each other.

For example, as shown to FIG. 8A, when the hand fork 18 is moved to the delivery position of the board | substrate 2 in the chamber 6, the sensor 53 arrange | positioned at a 5th reference position, and When the edge of the detection panel 52 is shift | deviated in the rotation direction of the 1st arm part 15 with respect to the main-body part 10, as shown in FIG. 8B in a correction value calculation process. The first arm 15 is rotated until the edge of the detection panel 52 is detected by the sensor 53. Further, a correction value is calculated based on the detection result of the encoder 24 at that time. In addition, the edge of the detection panel 52 is detected by the sensor 53 when the on / off of the sensor 53 is switched.

Thereafter, driving control of the motor 21 is performed by reflecting the correction value calculated in the correction value calculating step, and the drive control of the motor 22 is performed based on the first reference position specified in the first reference position specifying step; At the same time, drive control of the motor 23 is performed on the basis of the second reference position specified in the second reference position specifying step, and the robot 1 is returned to the normal operation start position.

In addition, in this embodiment, after rotating the hand base part 17 by 180 degrees, the detection panel 52 is replaced with two hand forks 19, and then the board | substrate 2 in the chamber 6 is carried out. Move the hand fork 19 to the delivery position of. At this time, when the edge of the detection panel 52 mounted on the hand fork 19 is not detected by the sensor 53, the edge of the detection panel 52 mounted on the hand fork 19 is the sensor 53. ), The fixed position of the hand fork 19 relative to the hand base 17 in the direction orthogonal to the long side direction of the hand fork 19 is adjusted using the positioning jig 38. .

(Main effect of this form)

As described above, in this embodiment, in the first reference position specifying step, the first position is the reference position of the second arm portion 16 in the rotational direction of the second arm portion 16 with respect to the first arm portion 15. The 1st reference position is specified using the positioning jig 36 for positioning the 2nd arm part 16 in a reference position. Therefore, in this embodiment, it becomes possible to match the 2nd arm part 16 to the 1st reference position specified with high precision using the positioning jig 36. As shown in FIG. That is, in this form, it becomes possible to match the 2nd arm part 16 exactly to a 1st reference position.

Moreover, in this form, in the 2nd reference position specification process, it is located in the 2nd reference position which is the reference position of the hand base part 17 in the rotational direction of the hand base part 17 with respect to the 2nd arm part 16. In addition, in FIG. The second reference position is specified using the positioning jig 37 for positioning the hand base 17. Therefore, in this embodiment, it becomes possible to match the hand base part 17 to the 2nd reference position specified with high precision using the positioning jig 37. As shown in FIG. That is, in this form, it becomes possible to match the hand base part 17 correctly to a 2nd reference position.

In addition, in this embodiment, in the hand fork positioning process, the third reference is the reference position of the hand fork 18 in the direction orthogonal to the long side direction of the hand fork 18 with respect to the hand base 17. The hand fork 18 is positioned at the third reference position by the positioning jig 38 for positioning the hand fork 18 at the position. Therefore, in this embodiment, the hand fork 18 can be correctly matched to a 3rd reference position.

In addition, in this embodiment, it becomes possible to exactly match the 2nd arm part 16 to a 1st reference position after a 1st reference position specification process, and also the hand base part 17 to a 2nd reference position after a 2nd reference position specification process. In addition to this, the hand fork 18 can be precisely aligned with the third reference position in the hand fork positioning process, and the second arm 16 is precisely aligned with the first reference position. After accurately fitting the hand base 17 to the second reference position and accurately fitting the hand fork 18 to the third reference position, the robot 1 is assumed to be a virtual reference posture in the robot operation step. Then, in the hand movement step, it becomes possible to move the hand fork 18 to the transfer position of the substrate 2.

In addition, in this form, in the subsequent correction value calculation process, the shift | offset | difference in the rotation direction of the 1st arm part 15 with respect to the main-body part 10 of the 5th reference position and the edge of the detection panel 52 is carried out. Although a correction value for controlling the motor 21 is calculated based on the quantity, in this embodiment, the robot 1 before replacement in which the detection panel 52 is mounted on the hand fork 18 is operated to operate the substrate 2. When the hand fork 18 is moved to the transfer position at the position of (), the position where the edge of the detecting panel 52 is arranged in the rotational direction of the first arm 15 with respect to the main body 10 is the fifth reference position. Since the correction value for controlling the motor 21 is calculated in the correction value calculating step, the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching operation of the robot 1 before the replacement. It is now possible to calculate the correction value for correcting the deviation of the robot coordinate system. All.

In other words, in this embodiment, the correction value is calculated based on the amount of deviation in the rotational direction of the first arm 15 with respect to the main body 10 of the fifth reference position and the edge of the detection panel 52. It is possible to calculate a correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching operation of the robot 1 before the replacement. That is, it becomes possible to calculate a correction value based only on the shift amount of the robot 1 in the rotation direction of the 1st arm part 15 with respect to the main-body part 10. FIG. Therefore, in this embodiment, the correction value for correcting the deviation of the robot coordinate system of the robot 1 after the exchange with respect to the coordinates of the teaching position taught in the teaching operation of the robot 1 before the exchange can be relatively easily calculated. .

Moreover, in this form, in the correction value calculation process, in the shift amount in the rotation direction of the 1st arm part 15 with respect to the main-body part 10 of the 5th reference position and the edge of the detection panel 52. Since it is only necessary to calculate the correction value on the basis, it becomes possible to calculate the correction value using one sensor 53. In addition, in this form, in the 2nd hand fork positioning process, the hand base part 17 is rotated 180 degrees, and the two hand forks 19 are predetermined by the positioning jig 38 at a predetermined reference position. Since positioning is performed, the positioning of the hand fork 18 and the positioning of the hand fork 19 can be performed using the common positioning jig 38.

(Modification 1 of the correction value calculating step)

In the above-described aspect, the rotation direction of the first arm 15 relative to the main body 10 of the fifth reference position and the edge of the panel 52 for detection is used by using one camera instead of the sensor 53. You may obtain the amount of deviation in the. In this case, for example, a predetermined marking is formed at a location corresponding to the fifth internal reference position of the chamber 6, and the deviation amount between the position of the marking taken by the camera and the edge of the detection panel 52 is adjusted. By calculating | required, the deviation amount of the 5th reference position and the edge of the detection panel 52 is calculated | required. In addition, for example, the coordinates of the fifth reference position are stored in advance in the control unit 27, and are based on the edge coordinates of the detection panel 52 captured by the camera and the coordinates of the fifth reference position. And the deviation amount of the edge of the detection panel 52 is calculated | required.

In this case, even if the 1st arm part 15 is not rotated with respect to the main-body part 10, the shift amount of the 5th reference position and the edge of the detection panel 52 can be calculated | required. In this case, for example, a camera is used to determine the deviation amount between the fifth reference position and the edge of the detection panel 52, and then the first arm portion (1) is compared with the body portion 10 by the calculated deviation amount. The correction value is calculated based on the detection result of the encoder 24 when rotating 15).

Moreover, even in this case, if a correction value is calculated based on the shift amount in the rotation direction of the 1st arm part 15 with respect to the main-body part 10 of the 5th reference position and the edge of the detection panel 52, Therefore, the correction value can be calculated using one camera. Moreover, even if an optical line sensor is used instead of a camera, the shift amount in the rotational direction of the 1st arm part 15 with respect to the main-body part 10 of the 5th reference position and the edge of the detection panel 52 is calculated | required. do. Even in this case, the shift amount between the fifth reference position and the edge of the detection panel 52 can be obtained without rotating the first arm 15 with respect to the main body 10.

(Modification 2 of the correction value calculation step)

9 is a view for explaining the operation of the robot 1 in the correction value calculating step according to another embodiment of the present invention.

In the above-mentioned form, in the correction value calculation process, the 5th reference position and the edge of the detection panel 52 in the rotation direction of the 1st arm part 15 with respect to the main-body part 10 using the sensor 53 are used. Although the 1st arm part 15 is rotated to the position which coincides, the 5th reference position and the edge of the detection panel 52 match in the rotational direction of the 1st arm part 15 with respect to the main body part 10. First arm 15 relative to body portion 10 using a fourth positioning jig for positioning the detection panel 52 (detection panel 52 mounted on hand fork 18) at the position. You may rotate the 1st arm part 15 to the position which the 5th reference position and the edge of the detection panel 52 correspond to in the rotation direction of (circle).

In this case, the 4th positioning jig is equipped with the pin holding member 56 by which the pin 55 and the insertion hole 56a into which the pin 55 is inserted are formed, for example. The pin holding member 56 is provided inside the chamber 6. The detection panel 52 is formed with a through hole 52a into which the pin 55 is inserted. When the pin 55 inserted into the through hole 52a of the detecting panel 52 is inserted into the insertion hole 56a of the pin holding member 56, the first arm 15 with respect to the body portion 10 is provided. In the rotation direction of, the detection panel 52 mounted on the hand fork 18 is positioned at a position where the fifth reference position and the edge of the detection panel 52 coincide.

In the correction value calculation step in this case, the correction is performed based on the detection result of the encoder 24 when the first arm 15 is rotated to the position where the panel 52 for detection is positioned by the fourth positioning jig. Calculate the value. For example, as shown in FIG. 9A, when the hand fork 18 is moved to the transfer position of the substrate 2 in the chamber 6, the insertion hole 56a of the pin holding member 56 is moved. ) And the through-hole 52a of the detection panel 52 are shifted in the rotational direction of the first arm 15 with respect to the main body 10, in the correction value calculating step, As shown in B), the 1st arm part 15 is rotated to the position where the detection panel 52 is positioned by a 4th positioning jig. Further, a correction value is calculated based on the detection result of the encoder 24 at that time.

(Other embodiment)

Although the form mentioned above is an example of the suitable form of this invention, it is not limited to this, A various deformation | transformation is possible in the range which does not change the summary of this invention.

In the above-mentioned form, the position where the 2nd arm part 16 rotated predetermined angle from the origin position of the 2nd arm part 16 in the rotation direction of the 2nd arm part 16 with respect to the 1st arm part 15 is made into the 1st arm part. It may be set to one reference position. In this case, when the robot 1 installed in the manufacturing system 3 is replaced, the detection result of the origin sensor 32 and the detection result of the encoder 25 so that the second arm 16 stops at the first reference position. On the basis of this, the second arm 16 is rotated to stop.

Moreover, in the form mentioned above, the origin position of the hand base part 17 and the 2nd reference position in the rotation direction of the hand base part 17 with respect to the 2nd arm part 16 may correspond. In this case, when the robot 1 installed in the manufacturing system 3 is replaced, the hand base part 17 is based on the detection result of the origin sensor 33 so that the hand base part 17 stops at a 2nd reference position. To stop. In the above-described aspect, the panel mounting step may be performed after the robot operation step.

In the above-mentioned aspect, although the 1st reference position specification process, the 2nd reference position specification process, and the hand fork positioning process are performed with respect to the robot 1 installed in the manufacturing system 3, it is provided in the manufacturing system 3 You may perform the 1st reference position specification process, the 2nd reference position specification process, and the hand fork positioning process with respect to the previous robot 1. For example, in the assembly plant of the robot 1, the robot 1 may be subjected to a first reference position specifying step, a second reference position specifying step, and a hand fork positioning step.

Moreover, when conveying the robot 1 from an assembly plant to the manufacturing system 3, in the state which removed the hand forks 18 and 19 so that long hand forks 18 and 19 may not interfere with conveyance. In the case of conveying the robot 1 from the assembly plant to the manufacturing system 3, in the assembly plant, the first reference position specifying step and the second reference position specifying step are performed on the robot 1 to produce the manufacturing system. You may perform the hand fork positioning process with respect to the robot 1 after installed in (3).

In the above-described form, the fixing member 41 may be fixed to the second arm portion 16. In this case, the insertion hole as a 1st insertion hole into which the pin 42 is inserted is formed in the side surface of the base end part of the 1st arm part 15. As shown in FIG. In addition, in the form mentioned above, the fixing member 44 may be fixed to the hand base 17. In this case, the insertion hole as a 2nd insertion hole into which the pin 45 is inserted is formed in the side surface of the base end part of the 1st arm part 15. As shown in FIG. In addition, in the form mentioned above, the fixing members 48 and 49 may be fixed to the 2nd arm part 16. As shown in FIG. In this case, the insertion holes as the third insertion holes into which the pins 50 are inserted are formed in the two hand forks 18.

In the form mentioned above, the hand 8 does not need to be provided with the hand fork 19. In addition, in the above-mentioned aspect, although the conveyed object conveyed by the robot 1 is the organic electroluminescent display board | substrate 2, the conveyed object conveyed by the robot 1 may be a liquid crystal display glass substrate, and a semiconductor wafer Or the like. Moreover, in the form mentioned above, the robot 1 may be arrange | positioned in the space which becomes atmospheric pressure.

1: Robot (Industrial Robot)
2: substrate (return object)
8: hand
9: cancer
10: main body
15: first dark
16: second arm
16a: insertion hole (first insertion hole)
16b: insertion hole (third insertion hole)
17: Hand Foundation
17a: insertion hole (second insertion hole)
18: hand fork
19: hand fork (second hand fork)
21: motor (first motor)
22: motor (second motor)
23: motor (third motor)
24: encoder (first encoder)
25: encoder (second encoder)
26: encoder (third encoder)
31: origin sensor (first origin sensor)
32: home sensor (second home sensor)
33: home sensor (third home sensor)
36: positioning jig (first positioning jig)
37: positioning jig (second positioning jig)
38: positioning jig (third positioning jig)
41: fixing member (first fixing member)
41a: through hole (first through hole)
42: pin (first pin)
43, 44: fixing member (second fixing member)
44a: through hole (second through hole)
45: pin (second pin)
48, 49: fixing member (third fixing member)
49a: through hole (third through hole)
50: pin (third pin)

Claims (8)

How to adjust the industrial robot,
The industrial robot includes an arm having a main body portion, a first arm portion on which a proximal end side is rotatably connected to the main body, and a second arm portion on which a proximal end is rotatably connected to a distal end side of the first arm portion; A hand having a hand base portion rotatably connected to the distal end side of the second arm portion and a hand fork extending from the hand base portion in one direction in the horizontal direction and on which a conveying object is mounted; and the first arm portion with respect to the main body portion. A first motor for rotating the motor, a second motor for rotating the second arm with respect to the first arm, a third motor for rotating the hand base with respect to the second arm, and the first motor. A first encoder for detecting an amount of rotation of the second encoder, a second encoder for detecting an amount of rotation of the second motor, a third encoder for detecting an amount of rotation of the third motor, and A first origin sensor for detecting an origin position of the first arm part in a rotational direction of the first arm part relative to the body part, and the second arm part in a rotational direction of the second arm part relative to the first arm part; A second home sensor for detecting the home position of the second home sensor; and a third home sensor for detecting the home position of the hand base in the rotational direction of the hand base with respect to the second arm;
The predetermined reference position of the second arm portion in the rotational direction of the second arm portion relative to the first arm portion is called a first reference position, and the hand in the rotational direction of the hand base portion relative to the second arm portion. If the predetermined reference position of the base portion is a second reference position, and the predetermined reference position of the hand fork in the direction orthogonal to the long side direction of the hand fork relative to the hand base portion is a third reference position,
The adjustment method of the industrial robot,
Stop the second arm part based on a detection result of the second origin sensor or based on a detection result of the second origin sensor and a detection result of the second encoder such that the second arm part stops at the first reference position. From the first stop position which is the stop position of the said 2nd arm part at the time of making it into a position to the position where the said 2nd arm part is positioned by the 1st positioning jig for positioning the said 2nd arm part to the said 1st reference position. The first reference position is specified based on a detection result of the second encoder when the second arm is rotated and a value of the second encoder when the second arm is stopped at the first stop position. A first reference position specifying process,
The first base position stops at the second reference position in the state where the second arm portion is disposed at the first reference position specified in the first reference position specifying process; From the second stop position which is the stop position of the hand base part when the hand base part is stopped based on the detection result of the three origin sensors or based on the detection result of the third origin sensor and the detection result of the third encoder, A detection result of the third encoder when the hand base is rotated to a position where the hand base is positioned by a second positioning jig for positioning the hand base at the second reference position, and the second A second device specifying the second reference position based on the value of the third encoder when the hand base is at a stop position; Position specifying step and,
After the second reference position specifying process, the second arm portion is disposed at the first reference position specified in the first reference position specifying process, and further, the second reference position specified in the second reference position specifying process. And a hand fork positioning process of positioning the hand fork by a third positioning jig for positioning the hand fork at the third reference position in a state where the hand base is arranged at. Adjustment method of industrial robot. The method of claim 1,
When the second arm portion is in the first reference position, the first arm portion and the second arm portion overlap in the vertical direction,
And the second arm portion and the hand fork overlap each other in the vertical direction when the hand base portion is in the second reference position. The method of claim 2,
The first positioning jig includes a first fixing member fixed to either one of the first arm portion and the second arm portion, a first insertion hole formed in any one of the first arm portion and the second arm portion, and the And a first pin inserted into a first through hole formed in the first fixing member. The method according to claim 2 or 3,
The second positioning jig includes a second fixing member fixed to either one of the first arm portion and the hand base portion, a second insertion hole formed in any one of the first arm portion and the hand base portion, and the And a second pin inserted into a second through hole formed in the second fixing member. The method according to claim 2 or 3,
The hand has two said hand forks,
The third positioning jig includes a third fixing member fixed to either one of the two hand forks and the second arm, and a third insertion hole formed in any one of the two hand forks and the second arm. And a third pin inserted into a third through hole formed in the third fixing member. The method of claim 5,
The hand has two second hand forks extending from the hand base in the opposite direction to the hand fork,
In the adjustment method of an industrial robot, after the said hand fork positioning process, the said hand base part rotates 180 degrees, and the 3rd positioning jig makes the long side direction of the said 2nd hand fork with respect to the hand base part. And a second hand fork positioning step of positioning the two second hand forks at a predetermined reference position of the second hand fork in a direction orthogonal to. The method of claim 4, wherein
The hand has two said hand forks,
The third positioning jig includes a third fixing member fixed to either one of the two hand forks and the second arm, and a third insertion hole formed in any one of the two hand forks and the second arm. And a third pin inserted into a third through hole formed in the third fixing member. The method of claim 7, wherein
The hand has two second hand forks extending from the hand base in the opposite direction to the hand fork,
In the adjustment method of an industrial robot, after the said hand fork positioning process, the said hand base part rotates 180 degrees, and the 3rd positioning jig makes the long side direction of the said 2nd hand fork with respect to the hand base part. And a second hand fork positioning step of positioning the two second hand forks at a predetermined reference position of the second hand fork in a direction orthogonal to.

Images