JP2005051188A - Carrying-process layout method, composite-function robot, and clamping type aligner device having completely hermetic structure - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a wafer carrying process unit wherein the carrying work of a robot and the notch alignment work of an aligner device can be processed concurrently. <P>SOLUTION: The wafer carrying process unit comprises a step for providing an aligner device in the center of a robot, steps for making a wafer movable up and down and making the wafer reversible between robot fingers and the aligner device, a step for making possible the swing of the robot fingers, a step for making possible concurrently the carrying work of the robot and the notch alignment work of the aligner device, and further a step for eliminating the mutual interference between the robot and the aligner device, and a step for preventing notches from hiding themselves even when the positions of chuck levers overlap with those of the notches. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

Detailed Description of the Invention

  The present invention eliminates the notch (POSTCHION) alignment position (POSITION) and the transfer operation to that position in the conventional semiconductor wafer transfer process, and can also transfer the transfer process and the notch alignment work in parallel. And a multi-function robot equipped with a notch alignment function and a clamp type aligner device with a completely sealed structure.

  In the wafer transfer process, there is a set of equipment in the clean chamber (CHAMBER) because the process needs to maintain a high clean environment, and these transfer processes are distributed as a unit. It is what has been.

  The configuration of the wafer transfer unit includes a cassette in which unprocessed wafers are stacked, a cassette for storing processed wafers, a corresponding port (PORT) for various customer devices, a notch aligning device, and a transfer robot. It has been done.

  In addition, a series of wafer transfer operations in the wafer transfer unit are handled by a robot, and a notch is provided on the outer periphery of the wafer, and the notch is used as a position reference in the angle direction in the wafer posture. The angle position of the notch needs to be matched with a predetermined angle position required by the processing apparatus, and the work is handled by the aligner apparatus.

  Also, in the movement movement of the robot, the predetermined position in the movement of the arm in the straight direction is generally provided at the position M2 after the movement in the reverse direction shown in FIG. 12 (a, b, c) is completed. The position is fixed. Further, the predetermined positions in the turn and the vertical direction are determined according to the work procedure or situation, and are not fixed.

  In the robot, the predetermined position is determined based on the amount of movement given by the program based on the predetermined position when moving to each position. This will be described below based on FIG.

The robot moves in the forward direction from the predetermined position to the pre-processing wafer cassette position, takes out the wafer from the cassette, moves backward, and returns to the predetermined position. Then, from the predetermined position, it moves to the next predetermined position in the turning and up / down direction, moves forward from there to the aligner device position, passes the wafer to the aligner device, moves backward from the same position and returns to the predetermined position. The system waits until the notch alignment is completed, moves forward again to the aligner position, receives the notched wafer from the aligner, moves backward from the same position again, and returns to the predetermined position.
Further, from the predetermined position to the next predetermined position in the turn and up and down direction, move forward from there to the device port of the customer, transfer the wafer to the same device, move backward from the same position and return to the predetermined position. The system waits for completion of the work of the customer apparatus, moves forward to the customer apparatus port again to receive the processed wafer, moves backward from the same position again, and returns to the predetermined position.
It moves from the predetermined position to the next predetermined position in the swiveling and up and down directions, moves forward from there to the processed wafer storage cassette position, stores the processed wafer in the cassette, and moves backward from the same position. Return to the predetermined position.

  The series of operations described above are repeated in the transport process. In this operation, the predetermined position in the turn and the vertical direction changes one after the other, whereas the predetermined position in the straight direction movement, that is, the arm moves in the reverse direction. The position after finishing is unchanged.

  In the above, the structure constituting the transfer robot is composed of the fuselage lined Z axis, the first arm, the second arm, the third arm, the finger, and the claw, and each component part is connected or fixed by the joint lined axis and pin. It is a thing.

  In addition, the function has a function of moving more than holding and releasing the wafer in the linear movement, the turning movement and the vertical movement in the horizontal direction, and is mainly for the purpose of carrying the wafer.

  Also, in the wafer holding and releasing function, the structure is composed of a fixed finger and a movable finger each having two claws, and the operation is such that both claws are positioned in the opposite direction centering on the wafer. The wafer is held or released by a moving function of moving away from or approaching the wafer.

  In the holding operation, when the holding point between the outer peripheral surface of the wafer and the four claws is determined in the holding operation, a preload is applied. The structure for applying the preload includes a bifurcated tip. In the fixed finger or movable finger having a claw, either finger is made elastic by the material or structure, and the claw feed amount in the holding operation is sent by adding the preload movement amount to the holding movement amount. Since the four holding points with the claw are determined on the outer periphery of the wafer, and preloading continues from there, the two claws at the forefront act on the inside of the wafer, where the claw on the elastic finger The finger of the elastic structure spreads from the tip of the forked part while sliding along the outer periphery, and the force to return to the original shape works from that state, and that force is used for preloading It is intended to use in the above process, in which fine particles are generated from the friction due to slip.

  In the above section 0004, the structure constituting the aligner device is composed of a fuselage lined Z axis, a rotating shaft, a chuck lever and a claw, and each component part is connected or fixed by three lined levers and pins. is there.

  In the opening / closing structure of the chuck, a lever having a predetermined radius with respect to the center point of the aligner is provided with three levers at three positions obtained by dividing the circumference into three equal parts. The opening and closing movement of the chuck is obtained by swinging up and down toward the center point, and the structure is difficult to frictionlessly seal with a magnetic fluid seal or metal bellows, and requires a work space in the vertical direction To do.

  In addition, it has a function of moving in the vertical direction and in the rotational direction, and is mainly intended for wafer notch alignment.

  Wafers are transferred between the robot and the aligner by opening the chuck and entering a standby state at a predetermined height where the aligner does not interfere with the robot fingers.

  The robot then carries in the wafer while holding the wafer with the fingernail and enters a standby state, where the aligner closes the chuck and holds the wafer, and then the robot releases the wafer from the fingernail, and the robot moves from the robot to the aligner. Finish the wafer delivery.

  Further, in the above-described wafer transfer state, the mutual positional relationship between the aligner chuck lever and the robot finger is a position where the aligner interferes with each other when the aligner performs the notch alignment by the rotational motion. When it returns to the position, it enters a standby state.

  The aligner then enters a rotational motion after ensuring the detection distance (predetermined distance from the sensor head to the wafer surface) of the notch alignment sensor provided at the bottom, and after confirming the notch position, the deviation between the confirmation position and the predetermined position After correcting the angle, the wafer is transferred to the robot.

  In the above aligner, the position where the notch detection sensor is arranged is located below the chuck lever from the wafer. Therefore, the detection distance of the notch detection sensor is to avoid interference with the chuck lever. Therefore, the detection distance of the sensor is more than necessary.

  The notch detection sensor uses an optical sensor due to various characteristics such as responsiveness, accuracy, cleanliness, etc., and the optical sensor reflects and bounces because the degree of light focusing becomes weaker as the distance from the detection object increases. A weakening phenomenon of luminous intensity occurs, which causes a decrease in detection sensitivity and a decrease in response and accuracy of the sensor, which adversely affects high speed and accuracy in notch detection work.

  In addition, when the notch position and the lever position overlap, in the sensor, the notch is hidden behind the lever and the notch detection cannot be performed, and the wafer is once changed again and then the notch detection operation is performed again. .

Furthermore, in terms of cleanliness, the three levers have a structure that swings in the vertical direction, and since the structure is difficult to frictionlessly seal in the lever support portion, the structure is hermetically sealed. Absent.
Further, since the rotation and vertical movement of the chuck are combined with one structure, it is difficult to seal, and therefore, the sealing is not performed.

Problems to be solved by the invention

  In the conventional transfer unit process, the position of the robot and aligner device has a layout separated into two locations, so a transfer operation is required between the two positions, and there is a problem in streamlining and space saving in the process layout. was there.

  In the conventional transfer unit process, the transfer and notch alignment operations on a single wafer cannot be processed in parallel because the two work areas are separated, and one of the robot and aligner is in operation while one is in standby mode. In other words, there is a problem of work inefficiency in the process layout.

  In the conventional robot and aligner, when the wafer is transferred, the robot is forced to return to a predetermined position in order to avoid interference between the robot finger and the aligner lever after transferring the wafer to the aligner. Has the problem of wasting unnecessary work and time.

  In the conventional aligner notch detection sensor, the notch detection sensor position is located below the chuck lever from the wafer, so the detection distance of the notch detection sensor is more than necessary to avoid interference with the chuck lever. There is a problem that the processing speed and accuracy in notch alignment are reduced.

  In the conventional aligner notch detection, when the position of the wafer notch overlaps with the chuck lever, the notch is hidden in the notch detection sensor and the notch cannot be detected. However, there is a troublesome problem that the process flow is distorted by the reprocessing time.

  In the conventional aligner, the structure that corresponds to the vertical motion and the rotational motion with one structure and the lever structure that swings in the vertical direction is not compatible with the frictionless sealing that can cope with the cleanliness of the same process, so it is sealed. There was a problem with cleanliness.

  In the transfer unit process layout shown in FIG. 1 (b), the present invention is configured so that the position of the notch alignment device is positioned above the robot shown in FIG. In the process layout method and the work between the robot and the aligner device that can save the space by saving the transport work and processing the transport and the notch alignment work in parallel, the mutual interference is eliminated, and in the sensor, In order to prevent the notch from being hidden by the chuck lever, and to invert the wafer to avoid adhesion of fine particles to the wafer surface, and to cope with wafer transfer in the vertical direction between the robot finger and the aligner chuck For the purpose of swinging robot fingers and claws Ri, Note, and its object is to provide said, a multifunction robot and aligner corresponding to the process layout and swing method.

Means for solving the problem

  In order to achieve the above object, in the conventional transfer process layout, the aligner apparatus is arranged as a process layout method in which the position of the aligner apparatus and the transfer work to the same position can be omitted, and the transfer work and the notch alignment process can be processed in parallel. There is a way to place it on top of the robot.

  Also, in the work between the robot and the aligner, a method of swinging the fingers and claws of the robot in order to cope with the mutual interference problem, the hidden notch problem, the wafer reversal function, and the vertical movement of the wafer. There is.

  In order to realize the above method, the multi-function robot (aligner-equipped robot) shown in FIG. 2 (a, b, c) has a body that constitutes a vertical movement part and a first joint part, and The aligner device and the first arm constituting the second joint, the second arm constituting the third joint, and the third arm constituting the fourth joint, In addition, it has a fixed claw, a fixed finger, a fixed finger base, and a movable claw, a movable finger, and a movable finger base. The above is connected or fixed through joint shafts, spline shafts and belts at each part, interlocking these series of structures, and having a robot transfer function and an aligner notch alignment function, so that both operations can be performed simultaneously. Is.

  In the above-mentioned multi-function robot, the body shown in FIGS. 3 and 4 has four Z axes, and is fixed to both ends of the four Z axes with a lower base and an upper base. The cover is fixed and the body is covered to form the body structure.

  In the above-mentioned body, in the vertically moving body, the same vertically moving body is incorporated into the four Z-axes formed between the two bases of the body through ball spline bearings at the four downward projections. Attach the first arm drive motor to the moving body. In addition, the movable base is fixed at the lower four convex portions of the vertical moving body, the bearing outer ring is fixed to the movable base, and the drive pulley is attached to the ball screw nut held by the bearing outer ring via the ball. The ball screw shaft is fixed and passed through the ball screw shaft, and the ball screw shaft is fixed to the ball screw fixing block, and the ball screw fixing block is fixed to the center of the lower base. A Z-axis drive motor is attached, a transmission pulley is fixed to the motor shaft, and the pulley and the drive pulley are connected by a belt. In addition, a second arm drive motor is attached. The above vertical moving body is in a state of being held on the four Z axes, and the ball screw nut is interlocked with the rotation of the Z axis driving motor so as to be able to move in the vertical direction.

  In the vertical moving body, the flange at the lower end of the housing is fixed at the center of the upper surface of the vertical moving body, and the housing holds the first joint hollow shaft via a bearing, and the first joint hollow In the shaft, the first arm is fixed to the upper end, and the drive gear is fixed to the lower end, and the drive gear meshes with the transmission gear fixed to the first arm drive motor shaft. The second arm transmission hollow shaft is held via bearings inside both ends of the first joint hollow shaft, and the second arm transmission hollow shaft has a second arm transmission pulley fixed to the upper end and a lower end thereof. Fixed the drive gear, which meshes with the transmission gear fixed to the second arm drive motor shaft. As described above, the housing, the first joint hollow shaft, and the second arm transmission shaft are interlocked with the vertical movement of the vertical moving body, and the first arm hollow shaft is interlocked with the rotation of the first arm drive motor, The second arm transmission shaft is interlocked with the rotation of the second arm drive motor.

  In the first joint hollow shaft, in the first arm fixed to the upper end thereof, the first arm shown in FIG. 5 is covered with a first arm lid. The second joint portion has a second joint support, the second joint support hollow shaft is fixed, the second joint support hollow shaft is held on the second joint support hollow shaft via a bearing, A drive pulley is fixed below the two-joint hollow shaft, and a magnetic fluid seal is applied to a location where the second joint hollow shaft and the first arm lid above the cross. In the first arm, the relay pulley shaft is fixed between the first joint portion and the second joint portion, and the relay pulley and the speed reduction pulley are incorporated into the relay pulley shaft via a bearing. In the pulley, the second arm transmission pulley and the relay pulley are connected by a belt, and the speed reduction pulley and the drive pulley are connected by a belt. Further, in the first arm lid, an aligner device is provided at a movement end position in the backward movement direction along the straight movement direction movement line shown in FIG. 12 (a, b, c). As described above, the first arm is linked to the first joint hollow shaft rotation, and the second joint hollow shaft is linked to the second arm transmission pulley rotation. Also, the center position of the aligner device provided on the first arm is positioned on the straight line movement line so that it is used at a predetermined position in the straight line movement, and is further located at the position overlapping the robot's trunk center point. Therefore, the moment of inertia in the turning motion of the robot is the smallest. Therefore, the notch alignment operation can be performed on the spot where the robot arm returns to the predetermined position, and high speed and stability in the turning motion are maintained.

  In the second joint hollow shaft in the first arm, in the second arm fixed to the upper end of the second joint hollow shaft, the second arm shown in FIG. 5 is covered with a second arm lid. is there. In addition, the third joint portion has a third joint support hollow shaft fixed thereto, and the third joint support hollow shaft is fixed to the third joint support hollow shaft via a bearing. In addition, a magnetic fluid seal is applied to a place where the third joint / drive pulley and the second arm lid cross each other. In the second arm, a third arm drive motor is attached between the second joint portion and the third joint portion, and a transmission pulley is fixed to the drive motor shaft. Further, the transmission pulley and the third joint / drive pulley are connected by a belt. As described above, the second arm is linked to the rotation of the second joint hollow shaft, and the third joint / drive pulley is linked to the rotation of the third arm driving motor.

  In the third joint / drive pulley of the second arm, the third arm shown in FIG. 6 is fixed to the upper end of the third joint / drive pulley, and the arm is covered with a third arm lid. It has a 4th joint part. The above is that the third arm is interlocked with the rotation of the third joint / drive pulley.

  The fourth joint housing shown in FIGS. 6 and 7 is fixed to the fourth joint portion, the fourth joint hollow shaft is held in the housing via a bearing, and a fixed finger base is attached to the tip of the fourth joint hollow shaft. Is fixed, a fixing finger is fixed to the upper end of the fixing finger base, and fixing claws are fixed to both forked ends of the fixing finger. The drive gear is fixed to the fourth joint hollow shaft in the third arm and the transmission gear is meshed with the drive gear. The transmission gear is fixed to the swing motor shaft. It fixes to the meshing position. As described above, the fourth joint hollow shaft has a rotation function, and the fixed claw, the fixed finger, and the fixed finger base are interlocked with the rotation of the fourth joint hollow shaft.

  In the fourth joint hollow shaft, a ball spline shaft is held on the fourth joint hollow shaft shown in FIGS. 6 and 7 via a ball spline bearing, and a movable finger base is fixed to the tip of the ball spline shaft. A movable finger is fixed to the upper end of the movable finger base, and a movable claw is fixed to both forks of the movable finger. The ball screw on one side of the ball spline shaft is assembled in the following order: thrust bracket, thrust bearing, spring seat, spring, feed drive gear, ball screw nut, thrust bearing, thrust bracket. It is fixed to a screw nut collar, and a transmission gear is meshed with the feed drive gear. The transmission gear is fixed to a feed motor shaft, and the feed motor is fixed to a position where both gears mesh. As described above, the ball spline shaft has the function of interlocking with the straight movement function and the rotation of the fourth joint hollow shaft. A movable claw, a movable finger, and a movable finger base are interlocked with the ball spline shaft. The ball screw nut has a function of moving toward the spring in the preload feeding described in the paragraphs 0046 and 0047.

  Also, a magnetic fluid seal is applied to the fourth joint housing collar shown in FIGS. 6 and 7, a fourth joint hollow shaft is passed through the seal, and the rotation part is frictionlessly sealed. In addition, a metal sprung is incorporated into the ball spline shaft moving portion between the fixed finger base and the movable finger base to provide frictionless sealing. The above structure eliminates friction in the sealing structure to prevent generation of fine particles due to friction and to completely contain fine particles generated from the internal structure of the arm.

  6 and 7, the fiber is passed through the movable finger base cavity, the sensor holder is fixed to the upper end, the notch detection sensor is passed through the holder, the O-ring is passed through the notch detection sensor, and the O-ring. Is inserted into the dent, and the movable finger is fixed at the upper end surface of the movable finger base, and the O-ring is deformed by being crushed between the holder and the movable finger, and the lower part is pressed and fixed by the deformation. In addition, the notch detection sensor is pressed and fixed on the inner side and has a complete sealing effect. The above is to enable the notch detection to be performed from the upper surface of the wafer, because, for the reason described in the paragraph 0051, the wafer transfer operation and the notch detection operation between the robot and the aligner device can be performed efficiently. In this structure, the sensor holder and sensor are fixed with an O-ring, and fine particles from the inside are contained.

  6 and 12, the operation of the both finger structure shown in FIGS. 6 and 12 is such that the wafer can be held and released. A fixed claw is arranged in the direction, and a movable claw is arranged in the forward direction. At that position, the movement of the two claws away from the wafer is an opening operation, and vice versa. Holding operation.

  In the opening operation of the both claws, the third arm moves in the backward movement direction from the wafer holding state to the opening operation, and the fixed claw and the movable claw are interlocked with the movement. Therefore, the fixed claw is moved away from the wafer from the position and enters the normal opening operation, but one movable claw should be directed in the opposite direction from the position. Therefore, the ball spline shaft that is linked to the movement of the third arm is moved in the opposite direction (forward direction), and the movable claw is linked to the movement, and the amount of the movement is released to the corrected movement amount in the opposite direction. The amount of movement is added. That is, the double movement amount is moved at the double feed rate in the opposite direction to the arm movement direction, and the two claws move away from the wafer at the same time by the movement, thereby opening the wafer. In the holding operation, the same movement amount as that in the opening operation is given in the opposite direction, and this is dealt with by changing the rotation direction of each motor. However, the preload feed amount described later is added to the movable finger.

  In preloading, in order to avoid generation of fine particles due to sliding friction at the holding point, the bifurcated fixed finger and movable finger are made of a non-elastic material or structure, and the preload generation source is from the spring inside the arm. For this purpose, the spring force point is used as a contact surface between the drive gear fixed to the ball screw nut and the thrust bearing in a normal feed movement. Then, when entering the preload feed, the ball screw nut moves in the spring direction, the drive gear moves away from the spring force point, and the spring force point moves to the ball that is built between the nut and bolt of the ball screw part, A spring force acts on a ball spline shaft that is integrated with the ball screw, and this force acts on the preload at the holding point of the claw and the wafer.

  In the above, the principle of movement of the ball screw nut in the preload feeding is that when the claw holding operation is shifted to the preloading operation, the holding point has already been determined in the wafer and each claw, and the fixed claw has stopped moving and stopped. is there. One movable claw cannot be physically moved and is stopped, and the ball spline shaft integrated with the ball screw bolt is interlocked with the stop. In the ball screw bolt in its stopped state, the ball screw nut continues to be preloaded and the rotation is accompanied by movement of the ball screw nut along the thread.

  Further, the fourth joint has a joint hollow shaft having a rotation function and a ball spline shaft interlocked with the rotation of the joint hollow shaft. Therefore, the fixed finger base, the fixed finger and the fixed claw connected to the hollow shaft of the joint, and the movable finger base, the movable finger and the movable claw connected to the ball spline shaft are linked to enable swing motion. The swing motion is obtained from the swing motor via the drive gear and transmission gear of the fourth joint hollow shaft, and the ball screw bolt that is integrated with the ball spline shaft also rotates with the swing motion. The ball screw nut is synchronized with the same rotation to correct the misalignment between the bolt and nut in the axial direction. The rotation of the ball screw nut is fed through the drive gear and transmission gear of the ball screw nut. Is what you get from.

  Therefore, as shown in FIGS. 12A, 12B and 12C, the fourth joint rotation structure moves the wafer from the top to the bottom by rotating the fingers 180 degrees after holding the wafer. Is made possible. As described above, the structure for the vertical movement between the finger and the aligner chuck requires only a moving distance necessary for the wafer transfer operation, and thus the apparatus can be reduced in size and simplified. Note that the amount of movement obtained from the swing motion is determined by the perpendicular distance between the fourth joint center line and the wafer surface, and the length of both finger bases may be determined in accordance with the required movement distance. Reference Figure 12

  Further, as shown in FIG. 12 (e), the robot joint is positioned on the upper surface of the wafer when the wafer is delivered to the aligner device by the fourth joint rotation structure, and the robot finger, aligner device chuck lever, Interference with nails was avoided. As described above, the aligner apparatus enters the notch alignment work on the spot when the wafer is received, and the robot waits on the spot and receives the wafer on the spot after the notch alignment work and enters the transfer work. .

  Then, due to the fourth joint rotation structure, the sensor provided above the movable finger base shown in FIG. 12 (e) is turned downward by the rotation of the finger by 80 degrees, and therefore the aligner device shown in FIG. 12 (f). The rotary table is raised, and the chuck lever and the claw are raised in conjunction with the rise. When the wafer is transferred, the aligner claw shown in FIG. The wafer is lowered while holding it. Therefore, a sensor is located above the wafer. The robot shown in FIG. 12 (h) moves the sensor slightly to the notch detection position M4 so that the sensor is positioned above the wafer, from which the notch detection can be performed. As described above, in the notch detection sensor, the problem that the notch cannot be detected because the notch is hidden in the chuck lever of the aligner device and the problem of the sensor detection distance setting condition are solved.

  Further, in the state where the wafer is held by the fixed claw and the movable claw by the fourth joint rotation structure, the fixed finger and the movable finger are rotated 180 degrees to invert the wafer. As described above, the surface of the wafer is turned downward by the reversal, and the adhesion of the fine particles contained in the airflow flowing downward from above is avoided on the surface.

  The aligner apparatus shown in FIG. 8 has a hook that constitutes the up-and-down moving part, a lid that constitutes the rotating part, and a rotating table that constitutes the opening and closing part. The chuck lever and claw can be opened and closed and the rotary table can be rotated and moved up and down.

  A cross roller bearing is incorporated under the center of the heel shown in FIG. 9 and a vertical drive gear is incorporated in the inner ring of the cross roller bearing, and a cam roller is fixed with a pin in a cylindrical place above the vertical drive gear. Moreover, after attaching the motor with the transmission gear fixed to the position where the vertical drive gear and the transmission gear mesh, the robot is fixed to the first arm lid of the robot.

  The lid shown in FIG. 9 is provided with a ring-shaped recess, to which a chuck motor is attached and a rotation motor is attached. Further, a cross roller bearing is incorporated in the center of the lid, and a magnetic fluid seal is fixed to the upper surface of the aligner lid with a built-in adhesive.

  The rotary body shown in FIG. 9 has two linear rotary bearings built in the center in advance, and ball spline bearings are built in the upper four convex parts, and the drive pulley is fixed below the center. There is a belt connected to a transmission pulley fixed to the rotary motor shaft, and a recess for spring incorporation is provided in the center. The same series of rotating bodies is connected to the cross roller bearing inner ring built in the center of the lid. Built-in and retained.

  In the rotary table shown in FIG. 9, guide shafts are fixed in advance at four downward convex portions, and bearings are incorporated above and below the other four downward convex portions, and a magnetic fluid seal is incorporated above them with an adhesive. Pass the lever shaft connected in the order of the claw, chuck lever, and collar through the above-mentioned bearing, fix the cam lever from below, and fix the spring lever on the cam lever tip and cam with the pin The roller is fixed, and a thrust bearing is installed on the center upper surface of the rotary table, and the vertical movement and chuck shaft are passed downward from above. Is inserted and fixed with screws to form a structure in which the cam roller follows the open / close cam surface. Shaft, collar, chuck levers, to obtain the opening and closing operation of the chuck claws in a series of structures which are connected in the order of nail interlocked.

  In the rotary table shown in FIG. 9, the vertical movement / chuck shaft built in the center and the guide shafts of the four convex parts are built in the linear rotary bearing built in the center of the rotating body and the upper four places. Pass through each ball spline bearing, connect the rotary table to the rotating body, and move up and down and chuck shaft protruding to the lower recess of the rotating body, thrust receiving seat, thrust bearing, spring seat, spring The drive gear with the vertical cam fixed in advance is fixed to the lower end of the vertical movement and chuck shaft, and the drive gear is linked to the rotation of the transmission gear fixed to the chuck motor shaft. Rotating movement of the open / close cam is obtained. In the above-described lid, rotating body, and rotary table, the lid is attached to the lower surface of the robot first arm from above the cage, so that it is cylindrical on the drive gear incorporated below the cage. A vertical cam rides on a cam roller fixed there, and the vertical movement of the rotary table is obtained there, where the entire structure of the aligner device is formed.

  In the aligner apparatus, the rotary table has a rotary motion, a vertical motion and a chuck function, and the rotational motion is used for the purpose of confirming the position of the notch on the outer periphery of the wafer. It is used for delivery to the robot finger, and the chuck is used for holding the wafer.

  Further, in order to obtain the chuck opening / closing operation from the horizontal swing motion, in the aligner apparatus in which the chuck lever holds the wafer, the lever shaft is located away from the wafer center point in the wafer shown in FIG. A center point is located, and a claw center point is located outside the outer periphery of the wafer. In the above, the claw movement type trace line generated by swinging the claw center point around the lever axis center point crosses both the connection line between the wafer center point and the lever axis center point, and both the wafer outer peripheral line, At the crossing point, the maximum opening width is obtained at the crossing point with the knot, and the holding point is obtained at the point crossing the wafer outer periphery. The holding point distance is proportional to the claw distance and the lever shaft distance, and the holding point can be changed to an appropriate position by changing the lever shaft distance or the claw distance.

  The above-described horizontal swing structure in the opening and closing operation of the chuck minimizes the opening and closing work area and enables frictionless sealing with a magnetic fluid seal.

Embodiments of the Invention

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described based on examples with reference to the drawings.
The embodiment shown in FIG. 1 (a) shows an embodiment based on the transport process layout method of the present invention, which eliminates the position of the aligner device and the transport work to the same position, and the transport work and the notch alignment. It is a process layout that can process work in parallel, and in order to realize this, the aligner device is arranged toward the robot, and the arrangement position is located at the end point of the backward movement in the straight line movement line M1 of the arm in the robot. It is a thing.

  In the embodiment shown in FIG. 1 (b), the aligner device is arranged at an individual position in the conventional transfer process layout, and therefore requires the position of the aligner device and the transfer work to the same position. Further, the conveyance work and the notch alignment work cannot be processed in parallel.

  In the embodiment shown in FIG. 2, the multi-function robot (equipped with an aligner function) has a body B1 that constitutes a vertical movement part B7 and a first joint part B6, and an aligner device B2 and a second joint part B5. The first arm A1, A1a constituting, further comprising the second arm A2, A2a constituting the third joint B4, the third arm A3, A3a constituting the fourth joint B3, And it has fixed claw Q3, fixed finger Q2, fixed finger base Q1 and movable claw V4, movable finger V3, movable finger base V6, and the above is connected or fixed around each joint in each part, A series of structures are interlocked.

  In the embodiment shown in FIG. 3, in the lower base W1, a ball screw fixing block Z5 is fixed at the center with a screw 7, and one end of four Z axes W3 is fitted into holes at four convex portions. Secure with screws 4. Then, the opposite end of the Z-axis W3 is fitted into the holes at the four convex portions of the upper base W4 and fixed with screws 1, and the body is covered with the cover W2 between the two bases. The upper part of the screw 5 is fixed with a screw 16 to form the same body B1.

  3 and 4, in the vertically movable body Z10, the ball spline bearing Z11 is incorporated into the holes at the four downwardly projecting portions, and the transmission gear K6 is screwed to the shaft 12 of the one arm drive motor K4. The one arm drive motor K4 is fixed to the motor base K5, and the motor base K5 is attached to the vertical moving body Z10 with the screw 22. Further, the movable base Z2 is fixed with screws 3 to the four downwardly projecting parts of the vertical moving body Z10, and the bearing outer ring Z3 is attached to the movable base Z2 with the screws 6, and the bearing outer ring Z3 is held via the balls. After the drive pulley Z4 is attached with the screw 8 below the ball screw nut Z1, the ball screw Z6 is passed through the ball screw nut Z1, and the Z-axis drive motor Z9 is attached to the movable base Z2 with the screw 21. The Z axis W3 of the book is incorporated.

  In the embodiment shown in FIGS. 3 and 4, a bearing H1 is fitted inside the both ends of the housing H2, and the bearing H1 is passed through the first joint hollow shaft K1 from above to the bearing H1 with the upper collar of the first joint hollow shaft K1. The inner ring of the bearing H1 is pressed by a bearing inner ring presser curler K2 and fixed with a screw 14 below the inner ring, and a driving gear K3 is fixed to the lower end surface with a screw 13 and the driving gear K3 is the first one. The arm drive motor K4 is engaged with a transmission gear K6 fixed to the shaft. Further, a bearing K7 is fitted inside both ends of the first joint hollow shaft K1, and the second arm transmission shaft S2 is passed through the bearing K7, and the second arm transmission shaft S2 is fitted with a bearing inner ring receiver S1 upward. After determining the height position, it is fixed with the screw 18, and the second arm transmission pulley F5 is fixed to the upper end with the screw 19, and the bearing inner ring pressing ring S3 is fitted below, and the drive gear S4 from below is attached. It is pressed and fixed with the screw 11, and the drive gear S4 is in a state of meshing with the transmission gear S5 fixed to the second arm drive motor S7 shaft. As described above, the lower collar of the housing H2 constituting the first joint hollow shaft and the second arm rod transmission shaft is attached to the upper surface of the vertical moving body Z10 with the screw 15.

  In the embodiment shown in FIG. 5, the first arm A1 is fixed to the upper end of the first joint hollow shaft K1 shown in FIG. 3 with a screw 19, and the second joint support hollow shaft E6 collar is attached to the first arm A1. Is fixed to the second joint with screws 31, bearings E5 are incorporated inside both ends of the second joint hollow shaft E3, inner rings of the bearing E5 are incorporated into the second joint support hollow shaft E6, A drive pulley E4 is fixed to the second joint hollow shaft E3 with a screw 30 inside the first arm. Then, the flange of the relay pulley shaft F3 is fixed between the first joint and the second joint with the screw 32, the speed reduction pulley F6 is fixed to the relay pulley F1 with the screw 34, and the bearings F2 are assembled at both ends thereof. Then, the inner ring of the bearing F2 is passed through the relay pulley shaft F3, and the inner ring above the bearing F2 is stopped by the inner ring retaining ring F7. Further, the second arm transmission pulley F5 and the relay pulley F1 are connected by a belt F4, and the deceleration pulley F6 and the driving pulley E4 are connected by a belt F8, and then the first arm cover A1a is covered from above and fixed with a screw 33. The first joint lid A1a is frictionlessly sealed with a magnetic fluid seal E2 where the second joint hollow shaft E3 crosses. In the above, the first arm A1 is interlocked with the rotational motion of the first joint hollow shaft K1, and the second joint hollow shaft E3 is interlocked with the rotational motion of the second arm transmission pulley F5.

  In the embodiment shown in FIG. 5, the second arm A2 is fixed to the upper end of the second joint hollow shaft E3 described above with the screw 42, and then the upper inner ring of the bearing E5 is pressed with the curler E1 with the screw 44. Fix it. In the second arm A2, the third joint support hollow shaft T1 collar is fixed to the third joint portion with screws 40, and bearings T2 are incorporated inside both ends of the third joint / drive pulley T3. The inner ring of the bearing T2 is incorporated into the third joint support hollow shaft T1, and the inner ring of the upper bearing T2 is fixed with two bearing holding nuts T5. In addition, the third arm drive motor J1 is fixed to the motor base J2 with the screw 41, the transmission pulley J3 is fixed to the third arm drive motor J1 shaft with the screw 46, and then between the second joint and the third joint. The motor base J2 is fixed with a screw 45, the transmission pulley J3 and the driving pulley T3 are connected by a belt J4, and then the second arm lid A2a is covered from above and fixed with a screw 43. A frictionless seal is provided with a magnetic fluid seal T4 where the third joint T3 crosses the second arm lid A2a. The second arm A2 is interlocked with the rotational motion of the second joint hollow shaft E3, and the third joint / drive pulley T3 is interlocked with the rotational motion of the transmission pulley J3.

  In the embodiment shown in FIGS. 6 and 7, the third arm A3 is fixed with a screw 66 to the upper end of the third joint hollow shaft / drive pulley T3 described above. Further, bearings G10 are incorporated at both ends of the fourth joint housing G3, the fourth joint housing G3 collar is fixed to the tip end surface of the third arm with a screw 60, and the magnetic fluid seal G1 is fixed to the tip of the collar. Then, a ball spline bearing G8 is incorporated inside the both ends of the fourth joint hollow shaft G7, and the fourth joint hollow shaft G7 is passed through an inner ring of the bearing G10 incorporated in the housing G3. At G7, the inner ring of the bearing G10 is fixed to the outer side of the arm by the inner ring retaining ring G2, and the inner ring of the arm inner bearing G10 is pressed by the drive gear G9 and fixed by the screw 67. Furthermore, after the swing motor G6 is fixed to the motor base G5 with the screw 69, the transmission gear G4 is fixed to the swing motor G6 axis with the screw 68, and the motor base G5 is fixed to the predetermined position with the screw 62, The transmission gear G4 and the drive gear G9 are engaged. The above enables the swing motion of the fourth joint.

  In the above description, the ball spline shaft L8 having the ball screw portion is inserted into the ball spline bearing G8 incorporated inside both ends of the fourth joint hollow shaft G7, and the thrust bracket L1 is screwed in place at the screw 63. Then, after the thrust bearing L2, the spring seat L3, and the spring L4 are inserted into the threaded portion of the ball spline shaft L8 in this order, the feed drive gear L5 is fixed to the ball screw nut L9 collar with the screw 600, The ball screw nut L9 is assembled into the ball screw portion, a thrust bearing L6 is brought into close contact with the drive gear L5, and the thrust bracket L7 is fixed in place with a screw 65. In addition, after the feed motor L12 is fixed to the motor base L11 with the screw 602, the transmission gear L10 is fixed to the feed motor L12 shaft with the screw 601. The motor base L11 is fixed to the predetermined position with the screw 64, and the transmission gear is fixed. L10 and drive gear L5 are brought into meshing state. As described above, the ball spline shaft L8 is interlocked with the swing motion of the fourth joint, and the linear motion of the ball spline shaft L8 and the linear motion of the ball screw nut L9 are enabled.

  In the embodiment shown in FIG. 6.7, the fixed finger base Q1 is fixed to the tip of the fourth joint hollow shaft G7 with the screw 75, and the fixed finger Q2 is fixed to the upper end surface of the fixed finger base Q1 with the screw 73. Fixing nails are fixed to both ends of the forked shape of the finger Q2 with an adhesive. Further, a metal bellows V8 is inserted at the tip of the ball spline shaft L8, and one collar is fixed to the fixed finger base Q1 with the screw 72, and then fixed to the opposite movable finger base V6 with the screw 72, and the movable finger base is fixed. The movable finger V3 is fixed to the upper end surface of the V6 with a screw 74, and the movable claw is fixed to the bifurcated tip of the movable finger V3 with an adhesive. In the above, the connecting body of the fixed claw Q3, the fixed finger Q2, and the fixed finger base Q1 is interlocked with the fourth joint hollow shaft G7, and the connecting body of the movable claw V4, the movable finger V3, and the movable finger base V6 is the ball spline shaft. It is linked to L8.

  In the embodiment shown in FIG. 6, the sensor holder V5 is fixed to the upper end of the cavity of the movable finger base V6 through the fiber, the notch detection sensor V1 is passed through the holder, and the O-ring V2 is mounted on the notch detection sensor V1. Then, the O-ring V2 is fitted into the recess, and the movable finger V3 is fixed to the upper end surface of the movable finger base V6 with a screw 74, where the O-ring is crushed between the holder and the movable finger and deformed. become. Due to the deformation, the holder V5 is pressed and fixed at the lower side, and the notch detection sensor V1 is pressed and fixed at the inner side, and a complete sealing effect is obtained. In the above, the notch detection can be performed from the upper surface of the wafer.

  In the embodiment shown in FIG. 8, the aligner apparatus has a flange U15 that constitutes the up-and-down moving part Y1, a lid R3 that constitutes the rotating part Y2, and further constitutes an opening / closing part Y3. The rotary table U23 is provided, and the structure described above enables the chuck lever C4 and the claw C5 to open and close and the rotary table U23 to rotate and move up and down.

  In the embodiment shown in FIG. 9, a cross roller bearing U3 is assembled below the center of the same U15, and its outer ring is fixed with a screw 2 via an outer ring presser U4, and the vertical drive gear U10 is fixed to the inner ring of the same cross roller bearing U3. Is fixed with a screw 3 via an inner ring presser U5, and a cam roller U2 is fixed with a pin U1 in a cylindrical place above the vertical drive gear U10. The transmission gear U11 is fixed to the vertical drive motor U13 shaft with the screw 1, the vertical drive motor U13 is fixed to the motor base Ul2 with the screw 24, and the motor base U12 is connected to the vertical drive gear U10 on the bottom surface of the flange U15. After attaching the screw 20 to the position where the transmission gear U13 meshes, the collar U15 shown in FIG. 8 is fixed to the inner surface of the robot first arm lid A1a with the screw 7.

  In the embodiment shown in FIG. 9, a ring-shaped recess is provided in the lid R3, and a motor base C16 to which a transmission gear C18 and a chuck motor C15 are attached is attached with screws 8, and the transmission gear is also provided. A motor base R4 to which R2 and a motor R7 are attached is attached with screws 18. Furthermore, a cross roller bearing R8 outer ring is incorporated in the center of the lid R3, the outer ring is fixed with screws 11 via an outer ring retainer R5, and a magnetic fluid seal R11 is incorporated on the upper surface of the aligner lid R3. Secure with.

  In the embodiment shown in FIG. 9, the rotary body R10 has two linear rotary bearings incorporated in the center thereof, ball spline bearings U17 are incorporated in the upper four convex portions, and a driving pulley below the center. R1 is fixed, and a recess for spring incorporation is provided in the center, and the same series of rotating bodies is incorporated into the inner ring of the cross roller bearing R8 incorporated in the lid R13 described in section 0080, and the inner ring is held down. Fix with screws 12 via R6.

  In the embodiment shown in FIG. 9, a guide shaft U19 is fixed in advance to the downward four convex portions with screws 17 on the rotary table U23, and bearings C9 are incorporated on the upper and lower portions of the other four convex portions. Then, a magnetic fluid seal C7 is fixed with a built-in adhesive above the lever shaft C8, which is connected in this order to the claw C5, the chuck lever C4, and the collar C6, through the bearing C9, and from below. The cam lever C10 is fixed with the screw 14, the spring lever C11 is fixed to the tip of the cam lever C10, the cam roller C3 is fixed with the pin C2, and the thrust bearing U21 is incorporated on the center upper surface of the rotary table U23. The vertical movement / chuck shaft C14 is passed downward from above and the thrust bearing U21 is moved from below the vertical movement / chuck shaft C14. By inserting the opening / closing cam C1 upward and fixing with the screw 22, a structure in which the cam roller C3 follows the opening / closing cam surface is formed. The cam roller includes the cam lever C10, the lever shaft C8, the collar C6, and the chuck lever. The opening and closing operation of the chuck claw C5 is obtained by connecting the C4 and the claw C5 and interlocking a series of structures.

  In the embodiment shown in FIG. 9, in the rotary table U23, the linear rotation in which the vertical movement / chuck shaft C14 incorporated in the center and the guide shaft U19 having four convex portions are incorporated in the center of the rotating body R10. Through the bearing R9 and the ball spline bearing U17 incorporated in the upper four places, the rotary table U23 is connected to the rotating body R10, and the vertical movement and chuck protruding from the lower recess of the rotating body R10. A thrust gear seat U9, a thrust bearing U8, a spring seat U7, and a spring U6 are inserted into the shaft Cl4 in this order, and a drive gear having a vertical cam C19 fixed in advance to the lower end of the vertical movement / chuck shaft C14 with a screw 4 Fix it. As described above, the mechanism constituting each of the rod, the rotating body, and the rotary table is connected or fixed to form one structure, and the rod U15 fixed in advance to the lower surface of the robot first arm there. By fixing the lid R3 with the screw 10 from above, the upper and lower cams C9 are mounted on the cam roller U2 fixed to the cylindrical portion on the drive gear U10 incorporated below the flange U15, and the aligner device The whole structure forms.

The invention's effect

  Since the present invention is configured as described above, the following effects can be obtained.

  By arranging the aligner device in the robot, the position of the aligner device can be omitted in the wafer transfer process, and the transfer operation to the same position can be omitted, so that the process space can be saved and the work time can be shortened.

  Further, by arranging the aligner device on the robot, notch alignment work can be performed in parallel with the turning movement and vertical movement of the robot, and the work time of the process can be shortened.

  Since the aligner device is arranged at the center point M3 of the robot, the moment of inertia in the turning motion of the robot is minimized, and therefore, it works most effectively on the speed and stability in the turning motion.

  Further, by arranging the aligner device on the straight movement direction movement line M1 of the robot arm, the arrangement position can be used as a predetermined position in the straight movement direction, and the notch alignment operation starts when the robot arm returns to the predetermined position. It is possible and eliminates time waste in the same work.

  The third arm is made of a magnetic fluid seal and metal bellows to make a completely hermetic structure without friction, and by allowing the fixed and movable fingers to swing and move straight, the particles generated from the mechanism are almost completely removed. It is possible to cope with a cleanness class 1 of 0.1 μm.

  In addition, the holding and releasing operation by the servo mechanism can eliminate the impact and friction at the holding point (contact point) between the wafer and each claw in the holding operation, and minimize the particles generated from the holding point. It is done.

  In the ball screw part, the ball screw bolt is moved during the wafer holding operation, and the ball screw nut is moved during the preload operation. The point of action moves from the thrust bearing surface to the ball screw ball and preload acts on the ball spline shaft integrated with the ball screw bolt, which is the holding point between the wafer and the fixed claw. Since there is no slip when preload is applied at the same holding point, there is almost no generation of fine particles due to the sliding friction, which is most effective for dealing with particles.

  Further, the fourth joint hollow shaft held by the rotary bearing incorporates a ball spline bearing, and the ball spline shaft is incorporated therein, thereby enabling the fourth joint hollow shaft to rotate. The ball spline shaft is interlocked with the rotational movement, and thus, a fixed finger base, a fixed finger, a fixed claw, and a movable finger fixed or connected to the ball spline shaft fixed or connected to the fourth joint hollow shaft. The platform, movable fingers, and movable claws have obtained a swing motion with a series of structures. This movement is used by the robot to move the wafer downward when the wafer is loaded into the aligner. Therefore, the robot and aligner In the meantime, it is possible to reduce the size of the aligner device by using a mechanism with the minimum vertical movement required for delivery. .

  In the swing motion, the function of moving the wafer downward and the function of reversing work, so that the surface of the wafer passed to the aligner is facing downward, and the adhesion of fine particles to the surface is avoided. It is effective for particle countermeasures in alignment work.

  Further, by moving the wafer downward and delivering it to the aligner device by the swing motion, each finger and claw are positioned upward with respect to the wafer, so that each finger and claw is aligned with the chuck lever of the aligner device. Since the arm does not interfere, the arm does not need to be retracted. Therefore, the wafer can be delivered on the spot and taken out on the spot, thereby eliminating the wasteful time in the delivery operation.

  In addition, by the above swing movement, a sensor is provided on the fixed finger to enable notch detection from the upper side of the wafer. Therefore, the chuck lever position of the aligner device positioned downward with respect to the wafer overlaps with the wafer notch position. However, the sensor can detect the notch without hiding the notch in the chuck lever, so the notch alignment work can be done within a predetermined time in any case, so the process flow can be smoothly advanced. is there.

  In addition, the sensor located on the fixed finger and positioned above the wafer does not interfere with the chuck lever of the aligner device, so the optimum notch detection distance (from the sensor head to the wafer surface) is obtained. It is most effective for accuracy and speed in notch detection work.

  In addition, since the chuck lever opening / closing structure of the aligner device obtains the opening / closing operation by the horizontal swing motion, the work area in the vertical direction can be minimized, which is effective for miniaturization.

  Also, the opening / closing operation of the aligner device is obtained from the horizontal swing motion of the chuck lever, thus enabling frictionless sealing with a magnetic fluid seal, which is effective for dealing with particles in notch alignment work.

It is a figure which shows the process layout of a conveyance unit. (A) It is a figure which shows the example which has arrange | positioned the process layout and aligner apparatus of this invention toward the robot. (B) It is a figure which shows the example which has the conventional process layout, an aligner apparatus, and a robot with an individual position. It is a figure which shows each site | part of a multifunctional robot. It is a figure which shows the trunk | drum structure of a multifunctional robot. It is a figure which shows the cross section in FIG. (A) It is a figure which shows the cross section AA. (B) It is a figure which shows the cross section BB. It is a figure which shows the 1st arm and 2nd arm structure of a multifunctional robot. It is a figure which shows the 3rd arm line fixed finger and movable finger structure of a multifunctional robot. It is a figure which expands the 3rd arm of a multifunctional robot, and shows the structure. It is a figure which shows each site | part of an aligner apparatus. It is a figure which shows the structure of an aligner apparatus. It is a top view of an aligner device. It is a figure which shows the cross section AA of an aligner apparatus. It is a figure which shows the work Example of a multifunctional robot. (A) It is a figure which shows a movement state holding a wafer and moving to a predetermined position (backward direction). (B) It is a figure which shows the swing movement state of a finger while moving to a predetermined position (backward direction). (C) It is a figure which shows the state which the movement to a predetermined position and a swing motion were completed, the wafer moved from the upper part to the downward direction, the wafer surface reversed, and the wafer can be delivered to an aligner. (D) It is a side view of FIG. (E) It is a P frame enlarged view of Drawing (d), and is a figure showing a position state where a wafer is held with a claw of a robot finger. (F) It is a P frame enlarged view of Drawing (d), and is a figure in which an aligner rotation table goes up and shows a delivery position state of a wafer. (G) It is a right side enlarged view from the P-frame center of FIG.4 (d), and is a figure which shows the position state which the aligner received the wafer from the robot, and descended, and the up-and-down positional relationship state with a sensor. (H) It is a right side enlarged view from the P frame center of FIG. (D), and is a figure which shows the state which the sensor moved to the notch detection position, and the state put into notch alignment operation | work. In an aligner apparatus, it is a figure which shows the principle which has obtained the opening / closing operation | movement from the horizontal swing motion of the chuck lever.

Explanation of symbols

W1 Lower base W2 Body cover W3 Z-axis W4 Upper base Z1 Ball screw nut Z2 Movable base Z3 Bearing outer ring Z4 Drive pulley Z5 Ball screw retaining block Z6 Ball screw bolt Z7 Timing belt Z8 Transmission pulley Z9 Z-axis drive motor Z10 Vertical moving body Z11 Ball spline bearing K1 First joint hollow shaft K2 Bearing inner ring presser curler K3 Drive gear K4 Drive motor K5 Motor stand K6 Transmission gear K7 Transmission shaft bearing S1 Transmission shaft bearing inner ring receiver S2 Second arm transmission shaft S3 Bearing inner ring press ring S4 Drive gear S5 Transmission gear S6 Motor base S7 Second arm drive motor H1 First joint bearing H2 Housing A1 First arm A1 First arm lid F1 Relay pulley F2 Bearing F3 Relay pulley shaft F4 Belt F 5 Second arm transmission pulley F6 Deceleration pulley F7 Inner ring retaining ring F8 Belt E1 Presser curler E2 Magnetic fluid seal E3 Second joint hollow shaft E4 Drive pulley E5 Joint bearing E6 Second joint support hollow shaft A2 Second arm A2a Second arm lid J1 Third arm drive motor J2 Motor base J3 Transmission pulley J4 Belt T1 Third joint support hollow shaft T2 Bearing T3 Third joint / drive pulley T4 Magnetic fluid seal T5 Bearing inner ring presser nut A3 Third arm A3a Third arm lid L1 Thrust Bracket L2 Thrust bearing L3 Spring seat L4 Spring L5 Feed drive gear L6 Thrust bearing L7 Thrust bracket L8 Shaft ball screw L9 Ball screw nut L10 Transmission gear L11 Motor base L12 Feed motor G1 Magnetic fluid seal G Inner ring retaining ring G3 Fourth joint housing G4 Transmission gear G5 Rotating motor base G6 Swing motor G7 Fourth joint hollow shaft G8 Ball spline bearing G9 Drive gear G10 Bearing Q1 Fixed finger base Q2 Fixed finger Q3 Claw V1 Notch detection sensor V2 O-ring V3 Movable finger V4 Claw V5 Sensor holder V6 Movable finger base V7 Lid V8 Metal bellows C1 Open / close cam C2 Pin C3 Cam roller C4 Chuck lever C5 Claw C6 Brim C7 Magnetic fluid seal C8 Lever shaft C9 Bearing C10 Cam lever C11 Spring hook C12 Spring C13 Spring hook C14 Vertical movement and chuck shaft C15 Chuck motor C16 Motor base C17 Drive gear C18 Transmission gear C19 Vertical cam U1 Pin U2 Cam roller U3 Cross roller bearing U4 Outer ring presser U5 Inner ring presser U6 Spring U7 Spring seat U8 Thrust bearing U9 Thrust receiving seat U10 Vertical drive gear U11 Transmission gear U12 Motor base U13 Vertical drive motor U14 Belt U15 桶 U16 Pellows lower boss U17 Ball spline bearing U18 Metal Perose U19 Guide shaft U20 Metal bellows upper boss U21 Thrust bearing U22 Lid U23 Rotary table R1 Drive pulley R2 Transmission pulley R3 Lid R4 Motor base R5 Outer ring presser R6 Inner ring presser R7 Rotating motor R8 Cross roller bearing R9 Linear rotary bearing R10 Rotating body R11 Magnetic Fluid seal

Claims (12)

By arranging the aligner device (B2) on the first arm lid (A1a) of the robot in the wafer transfer process layout, the position of the aligner device and the transfer operation to the same position can be omitted, and the transfer operation and the notch alignment operation can be performed. A method for laying out a wafer transfer process, which can be performed in parallel. In the notch alignment operation, the fixed finger (G2) and the movable finger (V3) of the robot are in contact with the chuck lever (C4) of the aligner device in response to a problem caused by mutual interference. Both fingers (G2, V3) are positioned above the wafer. In addition, the wafer can be moved in the vertical direction between the robot fingers (G2, V3) and the aligner, and the notch can be detected from above the wafer, and the wafer can be inverted. A method of swinging both claws (G3, V4) and both fingers (G2, V3) of the robot. A rotary table (U23) having a flange (15) constituting the vertical movement part (Y1), a lid (R3) constituting the rotation part (Y2), and constituting the opening / closing part (Y3) The aligner according to claim 1 or 2, further comprising a chuck lever (C4) and a chuck claw (C5). It has a first arm (A1, A1a) constituting the aligner device (B2) and the second joint part (B5), and a second arm (A2, A2a) constituting the third joint part (B4). And a third arm (A3, A3a) constituting the fourth joint (B3), and further, a fixed finger base (Q1), a fixed finger (Q2), a fixed claw (Q3), and a movable finger base The multifunction robot according to claim 1, further comprising (V6), a movable finger (V3), and a movable claw (V4). With the aligner device (B2) installed in a state where the wafer is held by the claws (C5), the center point (M3) of the wafer is positioned on the straight line (M1) and the robot body The multifunction robot according to claim 3, which is located at the center point (M3) and further on the surface of the first arm cover (A1a). The fourth joint housing (G3) is provided with a collar, fixed to the tip of the third arm (A3, A3a), and held through the fourth joint hollow shaft (G7) through the bearing (G10) through the housing (G3). In the fourth joint hollow shaft (G7), the drive gear (G9) is fixed inside the third arm (A3, A3a), the transmission gear (G4) is meshed with the drive gear (G9), and the swing motor is set there. (G6) The ball spline bearing (G8) is fixed to the fourth joint hollow shaft (G7) and the ball spline shaft (L8) having a ball screw portion is passed through the ball spline bearing (G8). To the ball screw portion of the ball spline shaft (L8), thrust bracket (L1), thrust bearing (L2), spring seat (L3), spring (L4 , Feed drive gear (L5), ball screw nut (L9), thrust bearing (L6), thrust bracket (L7) are put in order and assembled, and the feed drive gear (L5) is inserted into the collar of the ball screw nut (L9). The multi-function robot according to claim 3, wherein the multi-function robot is fixed, the transmission gear (L10) is meshed with the feed drive gear (L5), and the feed motor (L12) is fixed thereto. The fixed finger base (Q1), fixed finger (Q2), and fixed claw (Q3) are fixed and connected to the tip of the fourth joint hollow shaft (G7), and movable to the tip of the ball spline shaft (L8). The multifunction robot according to claim 2, wherein the finger base (V6), the movable finger (V3), and the movable claw (V4) are connected and fixed in order. A hollow portion is provided in the movable finger base (V6), a fiber is passed therethrough, a sensor holder (V5) is fitted above it, a sensor (V1) is passed through the sensor holder (V5), and this sensor (V1 The multi-function robot according to claim 3, wherein the O-ring (V2) is passed through, the O-ring (V2) is fitted into the recessed portion of the movable finger base (V6), and the movable finger (V3) is fixed thereto. . The magnetic fluid seal (G1) is fixed to the collar of the fourth joint housing (G3), the fourth joint hollow shaft (G7) is passed through the magnetic fluid seal (G1), and the fixed finger base (Q1) and the movable finger are passed. The multi-function robot according to claim 3, wherein the ball spline shaft (L8) between the bases (V6) is covered with a metal bellows (V8). The cage (U15) and the lid (R3) are fixed across the first arm lid (A1a) surface of the robot, the magnetic fluid seal (R11) is fixed to the upper surface of the lid (R3), and the rotating body (R10) A metal bellows (U18) is fixed between the rotary table (U23) and a magnetic fluid seal (C7) is fixed at the four lever shafts (C8) according to claim 9. Aligner equipment. Bearings (C9) are assembled at the upper and lower parts of the rotary table (U23), a magnetic fluid seal (C7) is fixed above it, a lever shaft (C8) is passed therethrough, and a lever (C4) is inserted into the collar (C6). ), The claw (C5) is fixed to the end of the lever, the cam lever (C10) is fixed to the lower side, the spring hook (C11) is fixed to the end of the lever, and the pin (C2) is used. The cam roller (C3) is fixed, and the spring (C12) is hung on the spring hooks (C11) and (R13), so that the cam roller (C3) is in close contact with the cam (C1) surface. , 3 aligner device. In the horizontal swing mechanism of the aligner chuck, the lever shaft center point (X2) is located at a position deviated from the wafer center point (X1), and the connection between the wafer center point (X1) and the lever center point (X2) The maximum opening width (I1) is obtained where (N1) overlaps the nail center point (X3), and the holding point (X4) where the nail movement trace (N3) and the wafer outer periphery (N2) cross each other. The aligner device according to claim 9 obtained.

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