CN104746038B - 合成cvd金刚石 - Google Patents
合成cvd金刚石 Download PDFInfo
- Publication number
- CN104746038B CN104746038B CN201510083320.2A CN201510083320A CN104746038B CN 104746038 B CN104746038 B CN 104746038B CN 201510083320 A CN201510083320 A CN 201510083320A CN 104746038 B CN104746038 B CN 104746038B
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- Prior art keywords
- cvd diamond
- synthesis
- diamond material
- diamond
- synthesis cvd
- Prior art date
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- 239000010432 diamond Substances 0.000 title claims abstract description 292
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 287
- 239000000463 material Substances 0.000 claims abstract description 214
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 187
- 238000003786 synthesis reaction Methods 0.000 claims abstract description 186
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 106
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 57
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 52
- 239000001257 hydrogen Substances 0.000 claims abstract description 49
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 41
- -1 hydrogen Chemical class 0.000 claims abstract description 25
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- 125000004435 hydrogen atom Chemical group [H]* 0.000 abstract description 23
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
- C23C16/0236—Pretreatment of the material to be coated by cleaning or etching by etching with a reactive gas
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/274—Diamond only using microwave discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/277—Diamond only using other elements in the gas phase besides carbon and hydrogen; using other elements besides carbon, hydrogen and oxygen in case of use of combustion torches; using other elements besides carbon, hydrogen and inert gas in case of use of plasma jets
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/10—Heating of the reaction chamber or the substrate
- C30B25/105—Heating of the reaction chamber or the substrate by irradiation or electric discharge
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Combustion & Propulsion (AREA)
- Plasma & Fusion (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Carbon And Carbon Compounds (AREA)
- Adornments (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0922449A GB2476478A (en) | 2009-12-22 | 2009-12-22 | Chemical vapour deposition diamond synthesis |
| GB0922449.4 | 2009-12-22 | ||
| CN201080058389.5A CN102666944B (zh) | 2009-12-22 | 2010-12-15 | 合成cvd金刚石 |
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Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
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| BE1019439A3 (fr) | 2010-07-30 | 2012-07-03 | Diarotech | Procede pour synthetiser par depot chimique en phase vapeur une matiere solide, en particulier du diamant, ainsi qu'un dispositif pour l'application du procede. |
| GB201112113D0 (en) * | 2011-07-14 | 2011-08-31 | Element Six Ltd | Single crystal diamond substrates for synthesis of single crystal diamond material |
| GB201121642D0 (en) | 2011-12-16 | 2012-01-25 | Element Six Ltd | Single crtstal cvd synthetic diamond material |
| CN106460226A (zh) * | 2014-07-15 | 2017-02-22 | 住友电气工业株式会社 | 单晶金刚石、制造单晶金刚石的方法和包含单晶金刚石的工具 |
| CN104182615B (zh) * | 2014-07-29 | 2017-06-20 | 北京科技大学 | 一种在三元相图中表示任意成分夹杂物数量的方法 |
| CN104775154B (zh) * | 2015-04-25 | 2017-06-27 | 哈尔滨工业大学 | 一种同质外延生长单晶金刚石时控制表面温度的方法 |
| CN104878447B (zh) * | 2015-06-04 | 2017-03-01 | 哈尔滨工业大学 | 一种同质外延生长单晶金刚石的籽晶衬底原位连接方法 |
| CN104975343B (zh) * | 2015-06-04 | 2017-08-25 | 哈尔滨工业大学 | 利用氢等离子体多次刻蚀/退火循环工艺提高金刚石籽晶质量的方法 |
| GB201516814D0 (en) | 2015-09-23 | 2015-11-04 | Element Six Technologies Ltd | Method of fabricating a plurality of single crystal CVD synthetic diamonds |
| AT517693B1 (de) * | 2015-11-11 | 2017-04-15 | Zkw Group Gmbh | Konverter für Leuchtvorrichtungen |
| GB201522502D0 (en) * | 2015-12-21 | 2016-02-03 | Element Six Technologies Ltd | Thick Optical quality synethetic polycrystalline Diamond Material with low bulk absorption and low microfeature density |
| GB201620415D0 (en) * | 2016-12-01 | 2017-01-18 | Element Six Tech Ltd | Single crystal synthetic diamond material via chemical vapour deposition |
| RU2660872C1 (ru) * | 2017-05-29 | 2018-07-10 | Общество с ограниченной ответственностью "СИНТЕЗ" (ООО "СИНТЕЗ") | Способ получения выращенных радиоактивных алмазов и выращенный радиоактивный алмаз |
| GB201904435D0 (en) | 2019-03-29 | 2019-05-15 | Element Six Tech Ltd | Single crystal synthetic diamond material |
| CA3168480A1 (en) | 2020-01-20 | 2021-07-29 | M7D Corporation | Method of growing larger diamonds |
| RU2746870C1 (ru) * | 2020-09-11 | 2021-04-21 | Федеральное государственное унитарное предприятие "ВСЕРОССИЙСКИЙ НАУЧНО-ИССЛЕДОВАТЕЛЬСКИЙ ИНСТИТУТ ОПТИКО-ФИЗИЧЕСКИХ ИЗМЕРЕНИЙ" (ФГУП "ВНИИОФИ") | Однофотонный источник излучения |
| CN112886370B (zh) * | 2021-01-08 | 2022-05-31 | 中国科学院理化技术研究所 | 金刚石拉曼长波激光装置及本征吸收带预填充方法 |
| GB2618050A (en) * | 2021-08-24 | 2023-11-01 | Element Six Tech Ltd | Raman laser system |
| GB2614521A (en) * | 2021-10-19 | 2023-07-12 | Element Six Tech Ltd | CVD single crystal diamond |
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| JPH03252396A (ja) * | 1990-02-27 | 1991-11-11 | Idemitsu Petrochem Co Ltd | ダイヤモンドの製造方法 |
| JPH0492894A (ja) * | 1990-08-03 | 1992-03-25 | Sumitomo Electric Ind Ltd | 高熱伝導性気相合成ダイヤモンド |
| JP2913796B2 (ja) * | 1990-08-09 | 1999-06-28 | 住友電気工業株式会社 | 気相合成ダイヤモンド |
| EP0671482A1 (en) | 1994-03-11 | 1995-09-13 | General Electric Company | Toughened chemically vapor deposited diamond |
| JP3484749B2 (ja) * | 1994-04-04 | 2004-01-06 | 住友電気工業株式会社 | ダイヤモンドの合成法 |
| US5672395A (en) | 1994-05-05 | 1997-09-30 | General Electric Company | Method for enhancing the toughness of CVD diamond |
| US5451430A (en) | 1994-05-05 | 1995-09-19 | General Electric Company | Method for enhancing the toughness of CVD diamond |
| JP3261687B2 (ja) * | 1994-06-09 | 2002-03-04 | 日本電信電話株式会社 | パッドコンディショナー及びその製造方法 |
| CA2182245C (en) * | 1996-07-29 | 2000-09-26 | Michael J. Ulczynski | Process for depositing adherent diamond thin films |
| GB0130004D0 (en) * | 2001-12-14 | 2002-02-06 | Diamanx Products Ltd | Coloured diamond |
| GB2430194B (en) * | 2002-09-06 | 2007-05-02 | Element Six Ltd | Coloured diamond |
| KR101052395B1 (ko) * | 2002-09-06 | 2011-07-28 | 엘리멘트 식스 리미티드 | 유색 다이아몬드 |
| GB0227261D0 (en) * | 2002-11-21 | 2002-12-31 | Element Six Ltd | Optical quality diamond material |
| FR2849867B1 (fr) | 2003-01-10 | 2005-03-25 | Centre Nat Rech Scient | Croissance diamant a grande vitesse par plasma micro-onde en regime pulse. |
| BRPI0515347A (pt) * | 2004-09-10 | 2008-07-22 | Carnegie Inst Of Washington | diamante de cristal único cvd ultra-resistente e crescimento tridimensional do mesmo |
| JP5296533B2 (ja) | 2005-05-25 | 2013-09-25 | カーネギー インスチチューション オブ ワシントン | 高成長速度での無色単結晶ｃｖｄダイヤモンド |
| JP5284575B2 (ja) * | 2006-10-31 | 2013-09-11 | 住友電気工業株式会社 | ダイヤモンド単結晶及びその製造方法 |
| EP1990313A1 (en) * | 2007-05-10 | 2008-11-12 | INSERM (Institut National de la Santé et de la Recherche Médicale) | Method to produce light-emitting nano-particles of diamond |
| JP2010540399A (ja) * | 2007-10-02 | 2010-12-24 | カーネギー インスチチューション オブ ワシントン | ダイヤモンドを低圧でアニールする方法 |
| CN104630882B (zh) * | 2009-06-26 | 2018-03-30 | 六号元素有限公司 | 用于制备鲜艳橙色着色的单晶cvd 金刚石的方法及其获得的产品 |
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2009
- 2009-12-22 GB GB0922449A patent/GB2476478A/en not_active Withdrawn
-
2010
- 2010-12-15 CN CN201080058389.5A patent/CN102666944B/zh active Active
- 2010-12-15 MY MYPI2012002815A patent/MY160769A/en unknown
- 2010-12-15 EP EP10795323.4A patent/EP2516701B1/en active Active
- 2010-12-15 SG SG2012045514A patent/SG181831A1/en unknown
- 2010-12-15 CN CN201510083320.2A patent/CN104746038B/zh active Active
- 2010-12-15 RU RU2012131169/05A patent/RU2516574C2/ru active
- 2010-12-15 CA CA2782159A patent/CA2782159C/en active Active
- 2010-12-15 JP JP2012545239A patent/JP5615937B2/ja active Active
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2012
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| RU2012131169A (ru) | 2014-01-27 |
| CN102666944A (zh) | 2012-09-12 |
| EP2516701A1 (en) | 2012-10-31 |
| HK1174068A1 (en) | 2013-05-31 |
| CA2782159C (en) | 2015-04-28 |
| WO2011076643A1 (en) | 2011-06-30 |
| MY160769A (en) | 2017-03-15 |
| CA2782159A1 (en) | 2011-06-30 |
| GB0922449D0 (en) | 2010-02-03 |
| CN102666944B (zh) | 2015-04-29 |
| SG2014015143A (en) | 2014-08-28 |
| GB2476478A (en) | 2011-06-29 |
| CN104746038A (zh) | 2015-07-01 |
| RU2516574C2 (ru) | 2014-05-20 |
| JP2014221713A (ja) | 2014-11-27 |
| SG181831A1 (en) | 2012-07-30 |
| JP5938790B2 (ja) | 2016-06-22 |
| IL220094A (en) | 2015-10-29 |
| JP2013514959A (ja) | 2013-05-02 |
| JP5615937B2 (ja) | 2014-10-29 |
| EP2516701B1 (en) | 2016-08-03 |
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