CN104656120B - 校正信息生成方法以及校正信息生成装置 - Google Patents
校正信息生成方法以及校正信息生成装置 Download PDFInfo
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- CN104656120B CN104656120B CN201410675937.9A CN201410675937A CN104656120B CN 104656120 B CN104656120 B CN 104656120B CN 201410675937 A CN201410675937 A CN 201410675937A CN 104656120 B CN104656120 B CN 104656120B
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- 238000000034 method Methods 0.000 title claims abstract description 28
- 238000012937 correction Methods 0.000 claims abstract description 43
- 238000001514 detection method Methods 0.000 claims abstract description 41
- 230000035945 sensitivity Effects 0.000 claims abstract description 36
- 238000003705 background correction Methods 0.000 claims abstract description 30
- 238000007689 inspection Methods 0.000 claims description 5
- 238000002441 X-ray diffraction Methods 0.000 description 12
- 239000000203 mixture Substances 0.000 description 6
- 238000009825 accumulation Methods 0.000 description 5
- 239000000843 powder Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 206010073306 Exposure to radiation Diseases 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/303—Accessories, mechanical or electrical features calibrating, standardising
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pulmonology (AREA)
- Radiology & Medical Imaging (AREA)
- Measurement Of Radiation (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013242291A JP6242185B2 (ja) | 2013-11-22 | 2013-11-22 | 補正情報生成方法および補正情報生成装置 |
| JP2013-242291 | 2013-11-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104656120A CN104656120A (zh) | 2015-05-27 |
| CN104656120B true CN104656120B (zh) | 2018-03-23 |
Family
ID=53045703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410675937.9A Active CN104656120B (zh) | 2013-11-22 | 2014-11-21 | 校正信息生成方法以及校正信息生成装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9341583B2 (enExample) |
| JP (1) | JP6242185B2 (enExample) |
| CN (1) | CN104656120B (enExample) |
| DE (1) | DE102014223692A1 (enExample) |
| GB (1) | GB2521734B (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10295484B2 (en) * | 2017-04-05 | 2019-05-21 | Bruker Axs, Inc. | Method and apparatus for extending angular coverage for a scanning two-dimensional X-ray detector |
| JP6775777B2 (ja) * | 2017-08-29 | 2020-10-28 | 株式会社リガク | Ｘ線回折測定における測定結果の表示方法 |
| JP6860463B2 (ja) * | 2017-10-03 | 2021-04-14 | 国立大学法人東海国立大学機構 | 繊維配向度の測定方法、繊維配向度測定装置、および繊維配向度測定装置の制御プログラム |
| GB2585673B (en) | 2019-07-10 | 2022-05-04 | The Nottingham Trent Univ | A sample inspection system |
| JP7300718B2 (ja) * | 2019-12-13 | 2023-06-30 | 株式会社リガク | 制御装置、システム、方法およびプログラム |
| JP2023102462A (ja) * | 2022-01-12 | 2023-07-25 | 株式会社不二越 | Ｘ線回折測定装置及びプログラム |
| CN119006613B (zh) * | 2024-10-22 | 2025-03-21 | 合肥埃科光电科技股份有限公司 | 一种面光源标定方法、相机平场矫正方法、系统及介质 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6431042A (en) * | 1987-07-27 | 1989-02-01 | Shimadzu Corp | X-ray deffraction method |
| JPH01265146A (ja) * | 1988-04-16 | 1989-10-23 | Mc Sci:Kk | Ｘ線回折装置 |
| JPH04138325A (ja) * | 1990-09-28 | 1992-05-12 | Shimadzu Corp | アレイ検出器の感度補正装置 |
| US6118846A (en) * | 1999-02-23 | 2000-09-12 | Direct Radiography Corp. | Bad pixel column processing in a radiation detection panel |
| US6350985B1 (en) | 1999-04-26 | 2002-02-26 | Direct Radiography Corp. | Method for calculating gain correction factors in a digital imaging system |
| JP2002098656A (ja) * | 2000-09-27 | 2002-04-05 | Kawasaki Steel Corp | めっき層に含まれる金属相の付着量のオンライン測定方法および装置 |
| JP2002250704A (ja) * | 2001-02-26 | 2002-09-06 | Rigaku Corp | Ｘ線測定装置及びｘ線測定方法 |
| US6995347B2 (en) * | 2002-09-25 | 2006-02-07 | Agfa-Gevaert N. V. | Shading correction method and apparatus |
| JP4008328B2 (ja) | 2002-09-30 | 2007-11-14 | 富士フイルム株式会社 | 放射線画像情報読取方法および装置 |
| JP2004191789A (ja) | 2002-12-12 | 2004-07-08 | Foundation For Advancement Of International Science | 物質構造解析用画像情報収集装置 |
| US7433507B2 (en) * | 2003-07-03 | 2008-10-07 | Ge Medical Systems Global Technology Co. | Imaging chain for digital tomosynthesis on a flat panel detector |
| DE102004025121A1 (de) | 2004-05-21 | 2005-12-15 | Bruker Axs Gmbh | Verfahren zum Betrieb eines Röntgenanalysegeräts mit zweidimensionalem Array-Detektor und Röntgenanalysegerät zum Durchführen des Verfahrens |
| US9609243B2 (en) * | 2007-05-25 | 2017-03-28 | Uti Limited Partnership | Systems and methods for providing low-noise readout of an optical sensor |
| US8642978B2 (en) * | 2008-05-22 | 2014-02-04 | Vladimir Balakin | Charged particle cancer therapy dose distribution method and apparatus |
| JP2010038722A (ja) * | 2008-08-05 | 2010-02-18 | Rigaku Corp | Ｘ線回折装置およびｘ線回折方法 |
| CN102802529B (zh) * | 2009-06-16 | 2015-09-16 | 皇家飞利浦电子股份有限公司 | 用于微分相衬成像的校正方法 |
| US8687766B2 (en) * | 2010-07-13 | 2014-04-01 | Jordan Valley Semiconductors Ltd. | Enhancing accuracy of fast high-resolution X-ray diffractometry |
| JP5475737B2 (ja) * | 2011-10-04 | 2014-04-16 | 富士フイルム株式会社 | 放射線撮影装置及び画像処理方法 |
-
2013
- 2013-11-22 JP JP2013242291A patent/JP6242185B2/ja active Active
-
2014
- 2014-10-24 US US14/523,226 patent/US9341583B2/en active Active
- 2014-10-29 GB GB1419200.9A patent/GB2521734B/en not_active Expired - Fee Related
- 2014-11-20 DE DE102014223692.4A patent/DE102014223692A1/de active Pending
- 2014-11-21 CN CN201410675937.9A patent/CN104656120B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015102397A (ja) | 2015-06-04 |
| JP6242185B2 (ja) | 2017-12-06 |
| CN104656120A (zh) | 2015-05-27 |
| GB2521734A (en) | 2015-07-01 |
| GB201419200D0 (en) | 2014-12-10 |
| US20150146960A1 (en) | 2015-05-28 |
| GB2521734B (en) | 2017-01-18 |
| US9341583B2 (en) | 2016-05-17 |
| DE102014223692A1 (de) | 2015-05-28 |
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| GR01 | Patent grant |