CN104647363B - 工业用机器人、工业用机器人的控制方法及工业用机器人的指示方法 - Google Patents

工业用机器人、工业用机器人的控制方法及工业用机器人的指示方法 Download PDF

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Publication number
CN104647363B
CN104647363B CN201510028045.4A CN201510028045A CN104647363B CN 104647363 B CN104647363 B CN 104647363B CN 201510028045 A CN201510028045 A CN 201510028045A CN 104647363 B CN104647363 B CN 104647363B
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CN
China
Prior art keywords
arm
hand
industrial robot
center
drive motor
Prior art date
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Active
Application number
CN201510028045.4A
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English (en)
Chinese (zh)
Other versions
CN104647363A (zh
Inventor
矢泽隆之
田中慎浩
渡边洋和
增泽佳久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Sankyo Seiki Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sankyo Seiki Manufacturing Co Ltd filed Critical Sankyo Seiki Manufacturing Co Ltd
Publication of CN104647363A publication Critical patent/CN104647363A/zh
Application granted granted Critical
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/102—Gears specially adapted therefor, e.g. reduction gears
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN201510028045.4A 2010-07-14 2011-07-01 工业用机器人、工业用机器人的控制方法及工业用机器人的指示方法 Active CN104647363B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010159770 2010-07-14
JP2010-159770 2010-07-14
CN201180034062.9A CN102985231B (zh) 2010-07-14 2011-07-01 工业用机器人、工业用机器人的控制方法及工业用机器人的指示方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201180034062.9A Division CN102985231B (zh) 2010-07-14 2011-07-01 工业用机器人、工业用机器人的控制方法及工业用机器人的指示方法

Publications (2)

Publication Number Publication Date
CN104647363A CN104647363A (zh) 2015-05-27
CN104647363B true CN104647363B (zh) 2016-04-20

Family

ID=45469325

Family Applications (3)

Application Number Title Priority Date Filing Date
CN201510028045.4A Active CN104647363B (zh) 2010-07-14 2011-07-01 工业用机器人、工业用机器人的控制方法及工业用机器人的指示方法
CN201510028120.7A Active CN104626133B (zh) 2010-07-14 2011-07-01 工业用机器人、工业用机器人的控制方法及工业用机器人的指示方法
CN201180034062.9A Active CN102985231B (zh) 2010-07-14 2011-07-01 工业用机器人、工业用机器人的控制方法及工业用机器人的指示方法

Family Applications After (2)

Application Number Title Priority Date Filing Date
CN201510028120.7A Active CN104626133B (zh) 2010-07-14 2011-07-01 工业用机器人、工业用机器人的控制方法及工业用机器人的指示方法
CN201180034062.9A Active CN102985231B (zh) 2010-07-14 2011-07-01 工业用机器人、工业用机器人的控制方法及工业用机器人的指示方法

Country Status (5)

Country Link
JP (1) JP5798118B2 (ko)
KR (1) KR101452650B1 (ko)
CN (3) CN104647363B (ko)
TW (1) TWI572467B (ko)
WO (1) WO2012008321A1 (ko)

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* Cited by examiner, † Cited by third party
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JP6035063B2 (ja) * 2012-06-29 2016-11-30 株式会社ダイヘン 基板搬送装置
WO2014024690A1 (ja) * 2012-08-09 2014-02-13 日本電産サンキョー株式会社 産業用ロボット
JP6051021B2 (ja) * 2012-08-09 2016-12-21 日本電産サンキョー株式会社 産業用ロボットおよび産業用ロボットの制御方法
JP5927724B2 (ja) * 2012-09-06 2016-06-01 本田技研工業株式会社 移動装置
WO2014106914A1 (ja) * 2013-01-07 2014-07-10 日本電産サンキョー株式会社 産業用ロボット
KR101458697B1 (ko) * 2013-04-19 2014-11-05 현대중공업 주식회사 기판 이송장치 및 이를 이용한 기판 이송방법
KR101597776B1 (ko) * 2014-01-13 2016-02-25 주식회사 에스에프에이 기판 이송 로봇
JP2015178161A (ja) * 2014-03-19 2015-10-08 株式会社安川電機 搬送ロボットおよび搬送システム
CN109476018B (zh) * 2016-07-28 2022-06-28 日本电产三协株式会社 工业用机器人
JP6786291B2 (ja) * 2016-07-28 2020-11-18 日本電産サンキョー株式会社 産業用ロボット
JP2018089765A (ja) * 2016-12-07 2018-06-14 日本電産サンキョー株式会社 産業用ロボット
CN106956290B (zh) 2017-04-17 2019-09-10 京东方科技集团股份有限公司 机械臂及其操作方法、机械臂装置及显示面板生产设备
JP6495405B1 (ja) * 2017-09-29 2019-04-03 株式会社バンダイ ロボット装置
TWI703188B (zh) * 2017-12-29 2020-09-01 財團法人工業技術研究院 聚醯亞胺混成材料、其前驅液及其製法
US10995237B2 (en) 2017-12-29 2021-05-04 Industrial Technology Research Institute Polyimide hybrid material, precursor solution and manufacture method thereof
JP7191564B2 (ja) * 2018-07-03 2022-12-19 日本電産サンキョー株式会社 産業用ロボット
CN113165130B (zh) * 2018-12-21 2023-03-24 报国股份有限公司 工件搬入搬出装置
JP2022076060A (ja) 2020-11-09 2022-05-19 日本電産サンキョー株式会社 産業用ロボットの教示方法
JP2022083199A (ja) * 2020-11-24 2022-06-03 日本電産サンキョー株式会社 産業用ロボット
KR102660372B1 (ko) * 2021-12-15 2024-04-26 현대무벡스 주식회사 화물 자동 운반 장치

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JPS62144186U (ko) * 1986-03-06 1987-09-11
JPH01240288A (ja) * 1988-03-18 1989-09-25 Mitsubishi Electric Corp 産業用ロボット
JPH04315593A (ja) * 1991-04-12 1992-11-06 Matsushita Electric Ind Co Ltd 産業用ロボット
JPH09162257A (ja) * 1995-12-05 1997-06-20 Metsukusu:Kk 薄型基板の搬送装置
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
JP3955499B2 (ja) * 2001-08-07 2007-08-08 日本電産サンキョー株式会社 ハンドの位置合わせ方法およびその装置
JP3881579B2 (ja) * 2002-03-29 2007-02-14 日本電産サンキョー株式会社 アーム駆動装置
JP2005005608A (ja) * 2003-06-13 2005-01-06 Ebara Corp 基板搬送ロボットのティーチング装置及びティーチング方法
JP4731267B2 (ja) * 2005-09-29 2011-07-20 日本電産サンキョー株式会社 ロボットのハンドおよびこれを用いたワーク搬送ロボット
JP4605560B2 (ja) * 2005-12-05 2011-01-05 日本電産サンキョー株式会社 産業用ロボット
JP5124096B2 (ja) * 2006-03-03 2013-01-23 川崎重工業株式会社 清潔空間用ロボットシステム
JP5016302B2 (ja) * 2006-12-01 2012-09-05 日本電産サンキョー株式会社 アーム駆動装置及び産業用ロボット
JP4970128B2 (ja) * 2007-04-27 2012-07-04 日本電産サンキョー株式会社 産業用ロボット及び集合処理装置
JP5280132B2 (ja) * 2008-08-26 2013-09-04 日本電産サンキョー株式会社 産業用ロボット
JP5178432B2 (ja) * 2008-09-26 2013-04-10 日本電産サンキョー株式会社 産業用ロボット

Also Published As

Publication number Publication date
CN104626133A (zh) 2015-05-20
KR20130031335A (ko) 2013-03-28
WO2012008321A1 (ja) 2012-01-19
TW201208839A (en) 2012-03-01
CN102985231B (zh) 2015-06-10
CN104647363A (zh) 2015-05-27
TWI572467B (zh) 2017-03-01
KR101452650B1 (ko) 2014-10-22
CN104626133B (zh) 2016-08-24
JP5798118B2 (ja) 2015-10-21
JPWO2012008321A1 (ja) 2013-09-09
CN102985231A (zh) 2013-03-20

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