CN102472369B - 旋转传递机构、输送装置和驱动装置 - Google Patents
旋转传递机构、输送装置和驱动装置 Download PDFInfo
- Publication number
- CN102472369B CN102472369B CN201080032830.2A CN201080032830A CN102472369B CN 102472369 B CN102472369 B CN 102472369B CN 201080032830 A CN201080032830 A CN 201080032830A CN 102472369 B CN102472369 B CN 102472369B
- Authority
- CN
- China
- Prior art keywords
- rotation
- section
- transfer machine
- rotary transfer
- solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/102—Gears specially adapted therefor, e.g. reduction gears
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/102—Gears specially adapted therefor, e.g. reduction gears
- B25J9/1035—Pinion and fixed rack drivers, e.g. for rotating an upper arm support on the robot base
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H1/00—Toothed gearings for conveying rotary motion
- F16H1/28—Toothed gearings for conveying rotary motion with gears having orbital motion
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H1/00—Toothed gearings for conveying rotary motion
- F16H1/28—Toothed gearings for conveying rotary motion with gears having orbital motion
- F16H1/46—Systems consisting of a plurality of gear trains each with orbital gears, i.e. systems having three or more central gears
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H37/00—Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00
- F16H37/02—Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00 comprising essentially only toothed or friction gearings
- F16H37/04—Combinations of toothed gearings only
- F16H37/041—Combinations of toothed gearings only for conveying rotary motion with constant gear ratio
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H1/00—Toothed gearings for conveying rotary motion
- F16H1/02—Toothed gearings for conveying rotary motion without gears having orbital motion
- F16H1/04—Toothed gearings for conveying rotary motion without gears having orbital motion involving only two intermeshing members
- F16H1/06—Toothed gearings for conveying rotary motion without gears having orbital motion involving only two intermeshing members with parallel axes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
Abstract
Description
Claims (9)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009-171524 | 2009-07-22 | ||
JP2009171524 | 2009-07-22 | ||
PCT/JP2010/004651 WO2011010448A1 (ja) | 2009-07-22 | 2010-07-20 | 回転伝達機構、搬送装置及び駆動装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102472369A CN102472369A (zh) | 2012-05-23 |
CN102472369B true CN102472369B (zh) | 2015-04-22 |
Family
ID=43498930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201080032830.2A Active CN102472369B (zh) | 2009-07-22 | 2010-07-20 | 旋转传递机构、输送装置和驱动装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9193067B2 (zh) |
JP (1) | JPWO2011010448A1 (zh) |
KR (1) | KR101322587B1 (zh) |
CN (1) | CN102472369B (zh) |
TW (1) | TWI456124B (zh) |
WO (1) | WO2011010448A1 (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5663638B2 (ja) * | 2012-10-11 | 2015-02-04 | 株式会社ティーイーエス | 基板移送装置 |
KR101898455B1 (ko) | 2016-03-31 | 2018-09-13 | 가부시키가이샤 아이.에스.티 | 폴리이미드 섬유 및 폴리이미드 섬유의 제조 방법 |
EP3464943B1 (en) * | 2016-05-27 | 2020-03-18 | Straight Line Drive, Inc. | System for converting rotating motion into linear motion |
US10843349B2 (en) | 2016-06-15 | 2020-11-24 | Sankyo Seisakusho Co. | Conveyance device |
JP7412248B2 (ja) * | 2020-03-30 | 2024-01-12 | 東京エレクトロン株式会社 | 搬送装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1777490A (en) * | 1929-12-23 | 1930-10-07 | Charles H Hardie | Gear mechanism |
BE582789A (zh) * | 1958-09-19 | |||
US3824875A (en) * | 1973-05-21 | 1974-07-23 | Egan Machinery Co | Drive for twin screw extruder |
GB1436491A (en) | 1973-07-06 | 1976-05-19 | Bhs Bayerische Berg | Epicyclic gear |
JP2564824B2 (ja) * | 1987-05-27 | 1996-12-18 | 神鋼電機株式会社 | クラツチ |
JPH11333778A (ja) * | 1998-05-29 | 1999-12-07 | Daihen Corp | 搬送用ロボット装置 |
JP4271350B2 (ja) * | 2000-06-26 | 2009-06-03 | ナブテスコ株式会社 | トラクションドライブ式駆動装置 |
JP4570737B2 (ja) | 2000-07-10 | 2010-10-27 | ナブテスコ株式会社 | トラクションドライブ減速機 |
KR100730661B1 (ko) * | 2000-07-10 | 2007-06-21 | 티에스 코포레이션 | 트랙션 구동 감속기, 트랙션 구동 감속기를 이용하는 운반장치, 및 운반 장치의 이축 출력 엔코더 기구 |
JP4884611B2 (ja) | 2000-09-14 | 2012-02-29 | ナブテスコ株式会社 | 偏心揺動型減速機を用いた搬送装置 |
JP2002349643A (ja) | 2001-05-25 | 2002-12-04 | Namiki Precision Jewel Co Ltd | 遊星ギヤードモータ及びその組立方法 |
US20030171184A1 (en) * | 2002-03-11 | 2003-09-11 | Russell Wige | Dual-input differential planetary gear transmission |
CN2597756Y (zh) * | 2003-02-19 | 2004-01-07 | 上海广浩光通讯器件有限公司 | 一种行星齿轮减速器 |
JP5263860B2 (ja) * | 2007-05-02 | 2013-08-14 | 独立行政法人産業技術総合研究所 | 高減速複合遊星歯車機構 |
US20110009232A1 (en) * | 2009-07-13 | 2011-01-13 | Alexander Kapelevich | Planetary gear |
-
2010
- 2010-07-20 WO PCT/JP2010/004651 patent/WO2011010448A1/ja active Application Filing
- 2010-07-20 KR KR1020127004066A patent/KR101322587B1/ko active IP Right Grant
- 2010-07-20 JP JP2011523548A patent/JPWO2011010448A1/ja active Pending
- 2010-07-20 CN CN201080032830.2A patent/CN102472369B/zh active Active
- 2010-07-20 US US13/384,903 patent/US9193067B2/en active Active
- 2010-07-21 TW TW099124016A patent/TWI456124B/zh active
Also Published As
Publication number | Publication date |
---|---|
KR20120042994A (ko) | 2012-05-03 |
TWI456124B (zh) | 2014-10-11 |
CN102472369A (zh) | 2012-05-23 |
TW201116742A (en) | 2011-05-16 |
US9193067B2 (en) | 2015-11-24 |
US20120251287A1 (en) | 2012-10-04 |
WO2011010448A1 (ja) | 2011-01-27 |
KR101322587B1 (ko) | 2013-10-28 |
JPWO2011010448A1 (ja) | 2012-12-27 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: ULVAC, INC. Effective date: 20120924 Owner name: ULVAC, INC. Free format text: FORMER OWNER: SOWA CO., LTD. MD CENTER Effective date: 20120924 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20120924 Address after: Kanagawa Applicant after: Ulvac Inc. Address before: Kanagawa Applicant before: KK SOWA MD Center Applicant before: Ulvac Inc. |
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GR01 | Patent grant |