WO2011010448A1 - 回転伝達機構、搬送装置及び駆動装置 - Google Patents
回転伝達機構、搬送装置及び駆動装置 Download PDFInfo
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- WO2011010448A1 WO2011010448A1 PCT/JP2010/004651 JP2010004651W WO2011010448A1 WO 2011010448 A1 WO2011010448 A1 WO 2011010448A1 JP 2010004651 W JP2010004651 W JP 2010004651W WO 2011010448 A1 WO2011010448 A1 WO 2011010448A1
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- WIPO (PCT)
- Prior art keywords
- rotation transmission
- transmission mechanism
- stage
- peripheral portion
- rotating body
- Prior art date
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H37/00—Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00
- F16H37/02—Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00 comprising essentially only toothed or friction gearings
- F16H37/04—Combinations of toothed gearings only
- F16H37/041—Combinations of toothed gearings only for conveying rotary motion with constant gear ratio
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/102—Gears specially adapted therefor, e.g. reduction gears
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/102—Gears specially adapted therefor, e.g. reduction gears
- B25J9/1035—Pinion and fixed rack drivers, e.g. for rotating an upper arm support on the robot base
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H1/00—Toothed gearings for conveying rotary motion
- F16H1/28—Toothed gearings for conveying rotary motion with gears having orbital motion
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H1/00—Toothed gearings for conveying rotary motion
- F16H1/28—Toothed gearings for conveying rotary motion with gears having orbital motion
- F16H1/46—Systems consisting of a plurality of gear trains each with orbital gears, i.e. systems having three or more central gears
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H1/00—Toothed gearings for conveying rotary motion
- F16H1/02—Toothed gearings for conveying rotary motion without gears having orbital motion
- F16H1/04—Toothed gearings for conveying rotary motion without gears having orbital motion involving only two intermeshing members
- F16H1/06—Toothed gearings for conveying rotary motion without gears having orbital motion involving only two intermeshing members with parallel axes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
Definitions
- the present invention relates to a rotation transmission mechanism, a conveyance device using the rotation transmission mechanism, and a drive device.
- Patent Document 1 includes a rotatable sun gear, a planetary gear that revolves while rotating around the sun gear, and a planet carrier that changes the revolution of the planetary gear to the rotation of the sun gear of the next stage.
- a speed reduction mechanism is described. This reduction mechanism is formed by superimposing a sun gear (including an input shaft), a planetary gear, and a planet carrier (including an output shaft) in three stages in the axial direction, and rotating the rotation shaft (input shaft) of the motor. Is decelerated and taken out from the output shaft.
- an object of the present invention is to provide a rotation transmission mechanism that can easily obtain a high reduction ratio with a small number of reduction stages, a conveyance device using the rotation transmission mechanism, and a drive device. With the goal.
- a rotation transmission mechanism is a rotation transmission mechanism having a first stage and a second stage, and includes a first rotating body and a second rotation.
- the first rotating body has a first outer peripheral portion and a second outer peripheral portion.
- the first outer peripheral portion is provided in the first stage.
- the second outer peripheral portion is provided in the second stage.
- the second rotating body has a first inner peripheral portion and a second inner peripheral portion.
- the first inner peripheral portion faces the first outer peripheral portion in the first stage.
- the second inner peripheral portion faces the second outer peripheral portion in the second stage.
- the drive rotator contacts the first outer peripheral portion and the first inner peripheral portion in the first stage and is rotated by a drive source.
- Each planetary rotating body abuts on the second outer peripheral portion and the second inner peripheral portion in the second stage, and revolves around the first rotating body.
- the second rotator that is in contact with the drive rotator at the first inner peripheral portion is rotated in one rotation direction (for example, it is rotated forward).
- the first rotating body that is in contact with the driving rotating body on the first outer peripheral surface is rotated in a rotation direction opposite to the one rotation direction (for example, this is referred to as reverse rotation).
- the rotation transmission mechanism can obtain a high reduction ratio.
- the rotation transmission mechanism can be easily downsized.
- the arm mechanism has a placement portion on which a conveyance object is placed and is extendable and contractible.
- the first rotation transmission mechanism is a first rotation transmission mechanism having a first stage and a second stage, and includes a first rotary body, a second rotary body, and a drive rotary body. And an output unit.
- the first rotating body has a first outer peripheral portion and a second outer peripheral portion. The first outer peripheral portion is provided in the first stage.
- the second outer peripheral portion is provided in the second stage.
- the second rotating body has a first inner peripheral portion and a second inner peripheral portion. The first inner peripheral portion faces the first outer peripheral portion in the first stage.
- the second inner peripheral portion faces the second outer peripheral portion in the second stage.
- the drive rotator contacts the first outer peripheral portion and the first inner peripheral portion in the first stage and is rotated by a drive source.
- Each planetary rotating body abuts on the second outer peripheral portion and the second inner peripheral portion in the second stage, and revolves around the first rotating body.
- the output unit outputs a revolving motion of the plurality of planetary rotating bodies to the arm mechanism in order to expand and contract the arm mechanism.
- the arm mechanism can be expanded and contracted by the first rotation transmission mechanism having a high reduction ratio, the expansion and contraction operation of the arm mechanism can be controlled with high accuracy.
- the drive device which concerns on one form of this invention comprises a rotation transmission mechanism and a to-be-driven part.
- the rotation transmission mechanism is a rotation transmission mechanism having a first stage and a second stage, and includes a first rotating body, a second rotating body, a driving rotating body, and a plurality of planetary rotating bodies. And have.
- the first rotating body has a first outer peripheral portion and a second outer peripheral portion.
- the first outer peripheral portion is provided in the first stage.
- the second outer peripheral portion is provided in the second stage.
- the second rotating body has a first inner peripheral portion and a second inner peripheral portion.
- the first inner peripheral portion faces the first outer peripheral portion in the first stage.
- the second inner peripheral portion faces the second outer peripheral portion in the second stage.
- the drive rotator contacts the first outer peripheral portion and the first inner peripheral portion in the first stage and is rotated by a drive source.
- Each planetary rotating body abuts on the second outer peripheral portion and the second inner peripheral portion in the second stage, and revolves around the first rotating body.
- the driven part is driven by the output of the rotation transmission mechanism by the revolution of each planetary rotating body.
- a rotation transmission mechanism is a rotation transmission mechanism having a first stage and a second stage, and includes a first rotary body, a second rotary body, and a drive rotary body. And a plurality of planetary rotating bodies.
- the first rotating body has a first outer peripheral portion and a second outer peripheral portion. The first outer peripheral portion is provided in the first stage. The second outer peripheral portion is provided in the second stage.
- the second rotating body has a first inner peripheral portion and a second inner peripheral portion. The first inner peripheral portion faces the first outer peripheral portion in the first stage. The second inner peripheral portion faces the second outer peripheral portion in the second stage.
- the drive rotator contacts the first outer peripheral portion and the first inner peripheral portion in the first stage and is rotated by a drive source.
- Each planetary rotating body abuts on the second outer peripheral portion and the second inner peripheral portion in the second stage, and revolves around the first rotating body.
- the second rotator that contacts the drive rotator at the first inner peripheral portion is rotated in one rotation direction.
- the first rotating body that is in contact with the driving rotating body on the first outer peripheral surface is rotationally driven in a rotation direction opposite to the one rotation direction.
- a plurality of planetary rotations are performed. The body revolves around the first rotating body while rotating.
- the rotation transmission mechanism can obtain a high reduction ratio.
- the rotation transmission mechanism can be easily downsized.
- the first rotating body may further include a top surface, a bottom surface, and a through-hole that penetrates the top surface and the bottom surface.
- a through-hole in the 2nd rotary body it can be used for various uses, for example as a hole which lets wiring, such as a cable, a cold water pipe, etc. pass.
- the first rotating body, the second rotating body, the driving rotating body, and each planetary rotating body may be formed by gears.
- the arm mechanism has a placement portion on which a conveyance object is placed and is extendable and contractible.
- the first rotation transmission mechanism is a first rotation transmission mechanism having a first stage and a second stage, and includes a first rotary body, a second rotary body, and a drive rotary body. And an output unit.
- the first rotating body has a first outer peripheral portion and a second outer peripheral portion. The first outer peripheral portion is provided in the first stage.
- the second outer peripheral portion is provided in the second stage.
- the second rotating body has a first inner peripheral portion and a second inner peripheral portion. The first inner peripheral portion faces the first outer peripheral portion in the first stage.
- the second inner peripheral portion faces the second outer peripheral portion in the second stage.
- the drive rotator contacts the first outer peripheral portion and the first inner peripheral portion in the first stage and is rotated by a drive source.
- Each planetary rotating body abuts on the second outer peripheral portion and the second inner peripheral portion in the second stage, and revolves around the first rotating body.
- the output unit outputs a revolving motion of the plurality of planetary rotating bodies to the arm mechanism in order to expand and contract the arm mechanism.
- the arm mechanism can be expanded and contracted by the first rotation transmission mechanism having a high reduction ratio, the expansion and contraction operation of the arm mechanism can be controlled with high accuracy.
- the said conveying apparatus may further comprise the 2nd rotation transmission mechanism.
- the second rotation transmission mechanism is a second rotation transmission mechanism having a first stage and a second stage, and includes a first rotation body, a second rotation body, and a drive rotation body. And a plurality of planetary rotating bodies and an output unit.
- the first rotating body has a first outer peripheral portion and a second outer peripheral portion.
- the first outer peripheral portion is provided in the first stage.
- the second outer peripheral portion is provided in the second stage.
- the second rotating body has a first inner peripheral portion and a second inner peripheral portion.
- the first inner peripheral portion faces the first outer peripheral portion in the first stage.
- the second inner peripheral portion faces the second outer peripheral portion in the second stage.
- the drive rotator contacts the first outer peripheral portion and the first inner peripheral portion in the first stage and is rotated by a drive source.
- Each planetary rotating body abuts on the second outer peripheral portion and the second inner peripheral portion in the second stage, and revolves around the first rotating body.
- the output unit outputs a revolving motion of the plurality of planetary rotating bodies to the arm mechanism in order to turn the arm mechanism.
- the arm mechanism can be turned by the second rotation transmission mechanism having a high reduction ratio, the turning operation of the arm mechanism can be controlled with high accuracy.
- the transport apparatus may further include an inner shaft and an outer shaft.
- the inner shaft is rotatable and transmits the rotational motion of the output portion of the first rotation transmission mechanism to the arm mechanism.
- the outer shaft is rotatable and is arranged on the outer side of the inner shaft so as to be coaxial with the inner shaft, and transmits the rotational movement of the output portion of the second rotation transmission mechanism to the arm mechanism.
- the second rotation transmission mechanism may be disposed above the first rotation transmission mechanism on a concentric shaft of the first rotation transmission mechanism.
- the second rotating body of the second rotation transmission mechanism may further include a top surface, a bottom surface, and a through hole penetrating the top surface and the bottom surface.
- the inner shaft may be coupled to the arm mechanism and the output portion of the first rotation transmission mechanism via the through hole of the second rotation transmission mechanism.
- the inner shaft is configured to penetrate the through hole of the second rotation transmission mechanism, even when the arm mechanism is turned, the first rotation transmission mechanism and the second rotation transmission mechanism are The spatial position of each drive source does not change. Therefore, it is possible to prevent the cable connected to the drive source from being wound around the transport device when the arm mechanism is turned. As a result, the arm mechanism can be turned 360 degrees without limitation.
- the second rotation transmission mechanism may be disposed below the first rotation transmission mechanism on a concentric shaft of the first rotation transmission mechanism.
- the second rotating body of the second rotation transmission mechanism may further include a top surface, a bottom surface, and a through hole penetrating the top surface and the bottom surface.
- the through hole of the second rotation transmission mechanism is used as, for example, a hole for passing a cable connected to the drive source of the first rotation transmission mechanism.
- the through hole is used as a hole through which the cable connected to the drive source of the first rotation transmission mechanism is passed, it is not necessary to wind the cable in the shape of a ring in advance, and the cable can be repeated. No bending displacement occurs. It is also possible to prevent the cable from being wrapped around the transport device.
- the drive device which concerns on one form of this invention comprises a rotation transmission mechanism and a to-be-driven part.
- the rotation transmission mechanism is a rotation transmission mechanism having a first stage and a second stage, and includes a first rotating body, a second rotating body, a driving rotating body, and a plurality of planetary rotating bodies. And have.
- the first rotating body has a first outer peripheral portion and a second outer peripheral portion.
- the first outer peripheral portion is provided in the first stage.
- the second outer peripheral portion is provided in the second stage.
- the second rotating body has a first inner peripheral portion and a second inner peripheral portion.
- the first inner peripheral portion faces the first outer peripheral portion in the first stage.
- the second inner peripheral portion faces the second outer peripheral portion in the second stage.
- the drive rotator contacts the first outer peripheral portion and the first inner peripheral portion in the first stage and is rotated by a drive source.
- Each planetary rotating body abuts on the second outer peripheral portion and the second inner peripheral portion in the second stage, and revolves around the first rotating body.
- the driven part is driven by the output of the rotation transmission mechanism by the revolution of each planetary rotating body.
- FIG. 1 is a view showing a rotation transmission mechanism according to the first embodiment of the present invention.
- 1A is a top view of the rotation transmission mechanism partially broken
- FIG. 1B is a cross-sectional view taken along the line FF ′ shown in FIG. 1A. It is the figure which looked at from the side.
- FIG. 1C is a cross-sectional view taken along the line GG ′ shown in FIG. 1B, and is a view of the rotation transmission mechanism as viewed from above.
- the output plate is omitted on the left side from EE ′ shown in FIG. 1 (A).
- the rotation transmission mechanism 10 is a two-stage rotation transmission mechanism, and includes an input side (lower stage) 10A (see FIG. 1C) and an output side (upper stage) 10B (FIG. 1 ( A) see).
- a hollow portion 9 is formed along the axis O-O ′ at the center of the rotation transmission mechanism 10.
- the rotation transmission mechanism 10 includes an inner rotation body (first rotation body) 1 that forms the inside of the rotation transmission mechanism 10 and an outer rotation body (second rotation body) 2 that forms the outside of the rotation transmission mechanism 10. Have.
- the rotation transmission mechanism 10 is disposed between the inner rotator 1 and the outer rotator 2, and is in contact with these rotators, the first planetary rotator 3, the second planetary rotator 4, and the drive rotator 5. And a rotating body 6.
- the rotation transmission mechanism 10 includes an output plate 11 that outputs the revolution of the planetary rotating bodies 3 and 4.
- the inner rotator 1 is rotatable around the axis OO ′.
- the inner rotating body 1 is formed such that the diameter of the input side 10A and the diameter of the output side 10B are different.
- a through-hole 8 is formed in the inner rotating body 1 so as to penetrate the center of the upper surface and the bottom surface.
- the inner rotator 1 has a first outer peripheral surface 1a on the input side 10A (lower stage) and a second outer peripheral surface 1b on the output side 10B (upper stage).
- the outer radius of the inner rotating body 1 on the input side will be R 11
- the outer radius of the inner rotating body 1 on the output side 10B will be described as R 12 .
- the outer rotator 2 is arranged coaxially with the inner rotator 1 and, like the inner rotator 1, is rotatable about the axis OO ′. Similarly to the inner rotator 1, the outer rotator 2 is formed so that the diameter of the input side 10A and the diameter of the output side 10B are different.
- the outer rotating body 2 has an input side 10A (lower stage), a first inner peripheral face 2a facing the first outer peripheral face 1a of the inner rotating body 1, and an output side 10B (upper stage). And a second inner peripheral surface 2b facing the second outer peripheral surface 1b.
- the drive rotator 5 has a cylindrical shape, is disposed on the input side 10 ⁇ / b> A, and contacts the outer peripheral surface 1 a of the inner rotator 1 and the inner peripheral surface 2 a of the outer rotator 2.
- the drive rotator 5 is connected to a motor 16 via an output shaft 15 of the motor.
- R in the radius of the drive rotator 5 will be described as R in .
- the rotating body 6 On the input side 10 ⁇ / b> A of the rotation transmission mechanism 10, the rotating body 6 is disposed at a position facing the driving rotating body 5 with the inner rotating body 1 interposed therebetween.
- the rotating body 6 has a cylindrical shape and has substantially the same radius as the radius R in of the driving rotating body.
- the rotator 6 is typically not connected to a motor.
- the rotary body 6 may be connected with a motor. In this case, the rotating body 6 is rotated by the motor so as to synchronize with the rotation of the driving rotating body 5.
- the first planetary rotator 3 and the second planetary rotator 4 have a cylindrical shape and are arranged on the output side 10B.
- the second outer peripheral surface 1b of the inner rotator 1 and the second outer rotator 2 are respectively second. It contacts the inner peripheral surface 2b.
- the first planetary rotator 3 and the second planetary rotator 4 are disposed at positions facing each other with the inner rotator 1 interposed therebetween.
- the first planetary rotator 3 and the second planetary rotator 4 are each provided with a support shaft 12 and a support shaft 13.
- the radius of the first planetary rotary member 3 and the second planetary rotary member 4 as R 3.
- the output plate 11 is supported by the support shaft 12 and the support shaft 13, and is rotatable about the axis O-O '.
- the output plate 11 is provided with an opening 14 in the center.
- the opening 14 and the above-described through-hole 8 form a hollow portion 9 of the rotation transmission mechanism.
- the hollow part 9 provided in the center of the rotation transmission mechanism 10 can be used for a wide variety of uses, for example, it is used as a hole through which wiring such as a cable or a cold water pipe passes.
- FIG. 2 is a diagram for explaining the operation of the rotation transmission mechanism 10.
- 2A is a diagram for explaining the operation on the input side 10A (lower stage)
- FIG. 2B is a diagram for explaining the operation on the output side (upper stage).
- the inner rotating body 1 Due to the clockwise rotation (reverse rotation) of the inner rotating body 1 and the counterclockwise rotation (forward rotation) of the outer rotating body 2, the inner rotating body 1 is disposed between the second outer peripheral surface 1 b and the second inner peripheral surface 2 b.
- the rotation and revolution of the planetary rotors 3 and 4 are started. In this case, a slight difference occurs in the absolute rotational speeds of the second inner peripheral surface 2b and the second outer peripheral surface 1b, so that the planetary rotators 3 and 4 are Can be revolved slowly.
- the inner rotator 1 When the drive rotator 5 is rotated once counterclockwise, the inner rotator 1 is rotated clockwise by an angle ⁇ 1 on the input side 10A, and therefore the inner rotator 1 is rotated clockwise by an angle ⁇ on the output side 10B. It is rotated once .
- the outer rotator 2 when the drive rotator 5 is rotated once counterclockwise, the outer rotator 2 is rotated counterclockwise by the angle ⁇ 2 on the input side 10A, and therefore the outer rotator 2 is also counterclockwise on the output side 10B. is the angle theta 2 rotates clockwise.
- the arc A′A 1 (relative movement distance between the contact points of the first planetary rotator 3 and the inner rotator 1) is expressed by the following equation (5)
- the arc B′B 2 (first The relative movement distance of the contact point between the planetary rotator 1 and the outer rotator 2 is expressed by the following equation (6).
- A′A 1 R 12 ⁇ ⁇ 1 + R 12 ⁇ ⁇ (5)
- B′B 2 R 22 ⁇ ⁇ 2 ⁇ R 22 ⁇ ⁇ (6).
- R 12 ⁇ ⁇ 1 + R 12 ⁇ ⁇ R 22 ⁇ ⁇ 2 ⁇ R 22 ⁇ ⁇ (7).
- the first planetary rotator 3 revolves around the inner rotator 1 by the angle ⁇ along the second outer peripheral surface 1 b of the inner rotator 1.
- the second planetary rotator 4 arranged at a position facing the first planetary rotator is also along the second outer peripheral surface 1b of the inner rotator 1 similarly to the first planetary rotator.
- the angle ⁇ revolves around the inner rotating body 1.
- the first planetary rotator 3 and the second planetary rotator 4 are each provided with the support shafts 12 and 13, and the output plates 11 are rotatably supported by the support shafts 12 and 13. ing. Therefore, when the drive rotor 5 is rotated once counterclockwise, the output plate 11 is rotated counterclockwise by the angle ⁇ about the axis O-O ′.
- FIG. 3 is a table showing an example of the radius (inner diameter or outer diameter) of each of the rotating bodies 1-5.
- the reduction ratio of the rotation transmission mechanism 10 is 1/540.
- other values may be taken for values such as the outer radius of the inner rotating body 1 and the inner radius of the outer rotating body.
- the rotation transmission mechanism 10 can easily realize a high reduction ratio of 1/100 or more. Further, since the rotation transmission mechanism 10 can obtain a high reduction ratio in two stages, the rotation transmission mechanism 10 can be easily reduced in size and thickness.
- the rotation axis of the drive rotator 5, that is, the input shaft is offset from the center axis (axis OO ′) of the rotation transmission mechanism 10, a hollow portion 9 is formed in the center of the rotation transmission mechanism 10,
- the hollow portion 9 can be used for various purposes. As described above, the hollow portion 9 is used, for example, as a hole through which wiring such as a cable or a cold water pipe passes.
- FIG. 4 is a view showing a rotation transmission mechanism according to the second embodiment.
- FIG. 4A is a top view of the rotation transmission mechanism partially broken.
- FIG. 4B is a cross-sectional view taken along the line F-F ′ shown in FIG. 4A and is a view of the rotation transmission mechanism as viewed from the side.
- FIG. 4C is a cross-sectional view taken along the line G-G ′ shown in FIG. 4B and is a view of the rotation transmission mechanism as viewed from above.
- the output plate is omitted on the left side from E-E ′ shown in FIG.
- each of the rotating bodies 1 to 6 described in the first embodiment is different from the first embodiment in that they are formed by gears (gears). Therefore, this point will be mainly described. .
- the rotation transmission mechanism 20 is disposed inside the rotation transmission mechanism 20 and is disposed coaxially with the sun gear 21 and the sun gear 21 that can rotate about the axis OO ′. 21 and a ring gear 22 rotatable on the outside of 21.
- a first planetary gear 23 and a second planetary gear 24 that revolve while rotating around the sun gear 21 are arranged on the output side 20B (upper stage) of the rotation transmission mechanism 20.
- the sun gear 21 is the inner rotating body 1 described in the first embodiment
- the ring gear 22 is the outer rotating body 2
- the first planetary gear 23 and the second planetary gear 24 are the first planetary rotating body. 3 and the second planetary rotating body 4 respectively.
- the drive gear 25 corresponds to the drive rotator 5
- the gear 26 corresponds to the rotator 6.
- FIG. 5 is a table showing an example of a combination of the pitch circle radius and the number of teeth of each of the gears 21 to 26.
- the pitch circle radii R (R 11 , R 12 , R 21 , R 22 , R in , R 3 ) of the gears 21 to 26 and the gears 21 to 26 are set.
- the relationship between the number of teeth N (N 11 , N 12 , N 21 , N 22 , N in , N 3 ) is expressed by the following formula (11).
- the reduction ratio can be obtained, and in the example shown in FIG. 5, the reduction ratio is 1/540. .
- FIG. 6 is a top view of the transfer device according to the present embodiment
- FIG. 7 is a cross-sectional view of the transfer device, and is a view of the transfer device as viewed from the side. In FIG. 7, the arm mechanism is not shown.
- the transport apparatus 100 includes an arm mechanism 30 and a base portion 120 for driving the arm mechanism 30.
- the base unit 120 includes an upper drive mechanism 40 and a lower drive mechanism 50 for expanding and contracting and turning the arm mechanism 30.
- the upper drive mechanism 40 includes an upper rotation transmission mechanism 41 and an upper motor 42 that drives the upper rotation transmission mechanism 41.
- the lower drive mechanism 50 includes a lower rotation transmission mechanism 51 and a lower motor 52 that drives the lower rotation transmission mechanism 51.
- the base portion 120 has a rotatable inner shaft 61 that transmits the rotation of the lower rotation transmission mechanism 51 to the arm mechanism 30 and an outer side of the inner shaft 61 that transmits the rotation of the upper rotation transmission mechanism 41 to the arm mechanism 30. And a rotatable outer shaft 62.
- the base portion 120 is connected to the outer shaft 62 and supports the arm mechanism 30 so as to be rotatable, a flange portion 71 that supports the outer shaft 62 via a ball bearing 81, a flange portion 71, The upper drive mechanism 40 and the support
- the arm mechanism 30 includes a parallel link mechanism 36, a mounting base attachment base 38 provided on the distal end side of the parallel link mechanism 36, and a mounting base 37 attached to the mounting base attachment base 38.
- the parallel link mechanism 36 includes a first link bar 31 to a fourth link bar 34 and a fifth link bar 35 shorter than these link bars.
- One end portion of the first link bar 31 is connected to the inner shaft 61 protruding from the center of the swivel base 63, and the other end portion of the first link bar 31 is connected to the fourth link bar 35 via the fifth link bar 35.
- One end of the second link bar 32 is connected to a driven shaft 64 rotatably attached to the swivel base 63 via a ball bearing 82.
- the other end of the second link bar 32 is connected to the third link bar 33 via the fifth link bar 35.
- a mounting table mounting base 38 is provided on the tip side of the third link bar 33 and the fourth link bar 34.
- a mounting table 37 for mounting a transport object (not shown) is mounted on the mounting table mounting base 38.
- the conveyance target is typically a semiconductor wafer substrate, for example, a glass substrate used for a display.
- the outer shaft 62 and the turntable 63 are fixed, and the arm mechanism 30 can turn together with the turntable 63 by the rotation of the outer shaft 62.
- the arm mechanism 30 can be expanded and contracted (bent) by the rotation of the inner shaft 61.
- the mounting table 37 is linearly movable in the centrifugal direction of the swivel base 63 by expansion and contraction (bending) of the parallel link mechanism 36.
- the upper rotation transmission mechanism 41 and the lower rotation transmission mechanism 51 are arranged coaxially, and the upper rotation transmission mechanism 41 is above the lower rotation transmission mechanism 51 (the lower rotation transmission mechanism 51 is below the upper rotation transmission mechanism 41). Be placed.
- the upper motor 42 and the lower motor 52 are provided with cables 43 and 53 used for power supply or the like, respectively.
- the upper drive mechanism 40 and the lower drive mechanism 50 are fixed to the support column 72, whereby the upper drive mechanism 40 and the lower drive mechanism 50 are fixed at predetermined positions inside the base portion 120.
- the inner shaft 61 is rotatably supported by the outer shaft 62 via a ball bearing 83.
- the upper end portion of the inner shaft 61 protrudes from the swivel base 63 and is connected to the first link bar 31 of the arm mechanism 30.
- the lower end portion of the inner shaft 61 is connected to the output plate 69 of the lower rotation transmission mechanism 51 through the coupling 65.
- the inner shaft 61 connects the arm mechanism 30 and the lower rotation transmission mechanism 51 via a hollow portion 60 (see FIG. 8) provided in the upper rotation transmission mechanism 41. That is, the hollow portion 60 of the upper rotation transmission mechanism 41 is used as a hole through which the inner shaft 61 passes.
- the upper part of the outer shaft 62 is fixed to the swivel base 63 as described above, and the lower part of the outer shaft 62 is connected to the swivel plate 66.
- the swivel plate 66 is a disk-shaped member having an opening at the center, and is connected to the output plate 68 of the upper rotation transmission mechanism 41 via a support column 67.
- FIG. 8 is a cross-sectional view of the upper drive mechanism 40, and is a view of the upper drive mechanism 40 as viewed from the side.
- members having the same functions and configurations as those of the rotation transmission mechanism 20 (rotation transmission mechanism formed by gears) according to the second embodiment described above are denoted by the same reference numerals, and different points are provided. The explanation is centered.
- the upper rotation transmission mechanism 41 includes a sun gear 21, a ring gear 22, a first planetary gear 23, a second planetary gear 24, a drive gear 25, a gear 26, and an output plate 68.
- the upper rotation transmission mechanism 41 further includes a rotatable output shaft 44 interposed between the first planetary gear 23 and the second planetary gear 24 and the output plate 68.
- the upper rotation transmission mechanism 41 includes a base member 45 serving as a base of the upper rotation transmission mechanism 41, a side wall member 46 that is fixed to the base member 45 and forms a side periphery of the upper rotation transmission mechanism 41, and the side wall member 46. And a holding plate 47 that holds the output shaft 44 from above.
- the sun gear 21 can rotate around the axis O-O ′, and the center of the sun gear 21 is hollow.
- the sun gear 21 is meshed with the drive gear 25 and the gear 26 on the input side 20A (lower stage), and meshed with the first planetary gear 23 and the second planetary gear 24 on the output side 20B (upper stage). Yes.
- the ring gear 22 is arranged coaxially with the sun gear 21, and meshes with the drive gear 25 and the gear 26 on the input side 20A on the inner periphery, and the first planetary gear 23 and the second planetary gear on the output side 20B. Meshed with the gear 24.
- the drive gear 25 arranged on the input side 20A is fixed to the output shaft 15 of the upper motor 42 via the connecting portion 48, and inputs the rotational movement of the upper motor 42 to the upper rotation transmission mechanism 41.
- the upper motor 42 is fixed to the base member 45 of the upper rotation transmission mechanism 41.
- the gear 26 that is disposed at a position facing the drive gear 25 with the sun gear 21 interposed therebetween rotates around the shaft 75 fixed to the base member 45 via the needle bearing 85. Supported as possible.
- the first planetary gear 23 and the second planetary gear 24 that are arranged on the output side 20B of the upper rotation transmission mechanism 41 and revolve around the sun gear 21 are shafts 76 and 77 via needle bearings 86 and 87, respectively. Is rotatably supported.
- the shafts 76 and 77 that rotatably support the first planetary gear 23 and the second planetary gear 24 are fixed to the output shaft 44.
- the output shaft 44 can rotate about the axis O-O ′ when the first planetary gear 23 and the second planetary gear 24 revolve around the sun gear 21.
- a through-hole 49 is formed in the center so as to penetrate the top surface and the bottom surface along the axis O-O '.
- the output shaft 44 is formed such that the outer diameter of the upper portion 44a of the output shaft 44 is larger than the outer diameter of the lower portion 44b of the output shaft.
- a first O-ring 88 is provided between the outer peripheral surface of the lower portion 44 b of the output shaft and the base member 45, and a second O-ring 88 is provided between the outer peripheral surface of the upper portion 44 a of the output shaft and the pressing plate 47.
- O-ring 89 is provided.
- the space surrounded by the output shaft 44, the base member 45, the side wall member 46, and the pressing plate 47 is sealed by the two O rings 88 and 89. Lubricants such as grease and oil are injected into the sealed space.
- the output plate 68 is fixed to the output shaft 44 above the output shaft 44, and can rotate about the axis OO ′ as a central axis together with the output shaft 44 by the revolution of the first planetary gear 23 and the second planetary gear 24. It is said that.
- An opening 14 is formed in the center of the output plate 68, and a hollow portion 60 of the upper rotation transmission mechanism is formed by the opening 14 and the through hole 49 of the output shaft 44.
- the configuration of the lower rotation transmission mechanism 51 is the same as the configuration of the upper rotation transmission mechanism 41, and thus the details thereof are omitted.
- members having the same functions and configurations as the upper rotation transmission mechanism 41 will be described with the same reference numerals.
- the drive gear 25 fixed to the motor output shaft 15 is rotated counterclockwise, for example, as viewed from above.
- the sun gear 21 meshing with the drive gear 25 is rotated clockwise, and the ring gear 22 is rotated counterclockwise.
- the sun gear 21 and the ring gear 22 are rotated, on the input side 20A, the gear 26 that meshes with the sun gear 21 and the ring gear 22 is rotated counterclockwise at a fixed position.
- the drive gear 25, the sun gear 21, the ring gear 22, the gear 26, the first planetary gear 23, the second planetary gear 24, and the output shaft 44 are rotated.
- the output shaft 44 is rotated, the output plate 68, the column 67, the swivel plate 66, the outer shaft 62, and the swivel base 63 are rotated, and the arm mechanism 30 is swung. If only the outer shaft 62 is rotated while the inner shaft 61 is fixed, the arm mechanism 30 expands and contracts while turning. Therefore, the inner shaft 61 is rotated in the same direction as the outer shaft 62 at the same speed by the lower drive mechanism 50 so that the arm mechanism 30 does not expand and contract.
- FIG. 9 is a perspective view showing a transfer apparatus 300 according to a comparative example.
- the transfer device 300 is connected to an arm mechanism 90 having a plurality of link bars 91 to 95 and a substrate holding part 96, a first motor 101 that extends and contracts the arm mechanism 90, and the first motor 101.
- the first cable 102 and the shaft 103 connecting the base end portion of the first link bar 91 and the first motor 101 are provided.
- the transfer device 300 includes a swivel base 111, and includes a transfer device body 110 in which a first motor is mounted, and a first gear 112 provided in the transfer device body 110.
- the transport device 300 is meshed with the second motor 104 that rotates the transport device main body 110 and the arm mechanism 90, the second cable 105 connected to the second motor, and the first gear 112, and the second gear And a second gear 107 provided on the output shaft 106 of the motor 104.
- the transport apparatus 300 when the first motor 101 is driven, the shaft 103 is rotated and the arm mechanism 90 is expanded and contracted. Further, when the second motor 104 is driven, the second gear 107 and the first gear 112 are rotated, and the transport device main body 110 and the arm mechanism 90 are turned.
- the transport device main body 110 is rotated together with the arm mechanism 90, so that the first motor 101 mounted in the transport device main body 110 is also rotated simultaneously. Resulting in. At this time, the first cable 102 connected to the first motor 101 is wound around the transport device 300. As a result, a load is applied to the cable, and the cable may be disconnected. In addition, since the cable is wound around the transfer device, there is a problem that the arm mechanism 90 cannot be rotated in one direction by 360 ° or more.
- a method of hanging the first cable 102 as it is can be considered.
- the arm mechanism 90 when the arm mechanism 90 is turned, a load due to twisting is applied to the first cable 102, and the first cable 102 may be disconnected.
- the second motor 104 is disposed immediately below the first motor 101, and the transfer motor main body is directly connected to the second motor 104.
- a method of rotating 110 is conceivable.
- the first cable 102 is wound around the second motor 104.
- the upper drive mechanism 40 and the lower drive mechanism 50 are respectively fixed to the support columns 72, so that the upper drive mechanism 40 itself and the lower drive mechanism 50 themselves do not rotate. Therefore, the cables 43 and 53 connected to the upper motor 42 and the lower motor 52 are not wound around the transport apparatus 100, and the problem that the cables 43 and 53 are broken does not occur.
- the transport apparatus 100 can solve the problem of cable winding. This is because the hollow portion 60 of the upper rotation transmission mechanism 41 is used as a hole through which the inner shaft 61 passes. Therefore, even when the arm mechanism 30 is turned, the upper motor 42 of the upper drive mechanism 40 and the lower portion of the lower drive mechanism 50 are used. This is because the spatial position of the motor 52 does not change, and the upper drive mechanism 40 and the lower drive mechanism 50 do not interfere with each other.
- the upper rotation transmission mechanism 41 and the lower rotation transmission mechanism 51 mounted on the transport apparatus 100 according to the present embodiment have a high reduction ratio (for example, about 1/500) as described above. Therefore, in this embodiment, the turning operation and the expansion / contraction operation of the arm mechanism 30 can be controlled with high accuracy.
- FIG. 10 is a cross-sectional view showing a transport apparatus according to the second embodiment of the present invention, and is a view of the transport apparatus as viewed from the side.
- the top view of the transport device according to the second embodiment is the same as that of FIG. 6 described above, and the side sectional view of the upper drive mechanism or the lower drive mechanism is the same as that of FIG.
- members having the same functions and configurations as those of the transport apparatus 100 according to the first embodiment described above are denoted by the same reference numerals, and description thereof is omitted or simplified. Turn into.
- the upper drive mechanism 40 rotates the inner shaft 61
- the lower drive mechanism 50 rotates the outer shaft
- the hollow portion 60 of the lower rotation transmission mechanism 51 connects the cable 43.
- the transport device 200 includes an upper drive mechanism 40 having an upper rotation transmission mechanism 41 and an upper motor 42, a lower rotation transmission mechanism 51 and a lower motor 52, and is disposed below the upper drive mechanism 40.
- the lower drive mechanism 50 is provided.
- the output plate 68 of the upper drive mechanism 40 is connected to the lower end portion of the inner shaft 61 through a coupling 65.
- the output plate 69 of the lower drive mechanism 50 is connected to the lower portion of the outer shaft 62 via a support column 74, a support column 73 and a turning plate 66.
- the upper drive mechanism 40 is fixed to the column 73 and the column 74, and the lower drive mechanism 50 is fixed to the column 72.
- the cable 43 connected to the upper motor 42 is drawn to the outside of the conveying device 200 through the hollow portion 60 of the lower rotation transmission mechanism 51. That is, the hollow portion 60 of the lower rotation transmission mechanism 51 is used as a hole through which the cable 43 of the upper motor 42 passes.
- the drive gear 25, the sun gear 21, the ring gear 22, the gear 26, the first planetary gear 23, and the second planetary gear 24 rotate, and the output shaft 44 and The output plate 68 rotates at a predetermined reduction ratio (for example, about 1/500).
- a predetermined reduction ratio for example, about 1/500.
- the hollow part 60 of the lower rotation transmission mechanism 51 is used as a hole through which the cable 43 passes in the transport apparatus 200, the cable 43 can be prevented from being wound around the transport apparatus 200. Thereby, it is possible to prevent the cable 43 from being broken. Further, in the transport apparatus 200, as in the transport apparatus 100 according to the first embodiment, the rotation transmission mechanisms 41 and 51 having a high reduction ratio are used. It can be controlled with accuracy.
- the rotation transmission mechanism 10 (or the rotation transmission mechanisms 20, 41, 51 and the following) is a simple structure that achieves a high reduction ratio, and can be easily reduced in size and thickness.
- the rotation transmission mechanism 10 can be used for various types of driving devices other than the above-described conveying devices 100 and 200.
- FIG. 11 is a functional block diagram showing the structure of the driving device.
- the drive device 150 includes a drive source 151 configured by a motor or the like, a rotation transmission mechanism 10, and a driven part 152 driven by the drive source 151 via the rotation transmission mechanism 10. .
- an X-axis table device that can move in one axial direction
- an XY-axis table device that can move in two in-plane directions
- a movable in three orthogonal directions XYZ axis table device rotary table device, hoisting type lifting device, humanoid robot, animal robot, rescue robot, machine tool, electric cylinder, electric jack, conveyor, crane, forklift and the like.
- Examples of the driving device 150 include a radio control device, an automatic door, an automatic pump, a blower device, a printing device, a vending machine, an automatic ticket gate, an elevator, an escalator, and an automatic reel for fishing.
- the driving device 150 is not limited to these.
- the drive device 150 listed as a usage form of the rotation transmission mechanism 10 is typically any device as long as it is a device driven by the drive source 151.
- the rotation transmission mechanism 10 outputs the input from the drive source 151 to the driven unit 152 at a high reduction ratio.
- the driven portion 152 is a member driven by the output of the rotation transmission mechanism 10.
- the driven unit 152 differs depending on the type of the driving device 150.
- the driven unit 152 is a rotary table
- the driving device 150 is a hoisting type lifting device
- the driven unit 152 is a drum that winds a rope by rotation.
- the driven unit 152 is, for example, a joint unit.
- the driving device 150 is an X-axis table device
- the driven portion 152 is an X-axis table.
- the driving device 150 is an electric cylinder or an electric jack
- the driven portion 152 is a rod.
- the driven unit 152 may be rotated by the output of the rotation transmission mechanism 10 or may be linearly moved by the output of the rotation transmission mechanism 10.
- the driven part 152 When the driven part 152 is rotated, the driven part 152 can be rotationally controlled (position control) with high accuracy by the high reduction ratio of the rotation transmission mechanism 10. For example, it is possible to control the rotation of the rotary table with high accuracy and to control the rotation of the joint portion of the humanoid robot with high accuracy. Further, the driven portion 152 can be rotated with a strong force (torque) by the high reduction ratio of the rotation transmission mechanism 10. For example, the drum of the hoisting type lifting device can be rotated with a strong force. In this case, even if a low power motor is used as the drive source 151, a large power lifting device can be obtained.
- the driven unit 152 can be linearly controlled (position control) with high accuracy by the high reduction ratio of the rotation transmission mechanism.
- the X-axis table of the X-axis table device can be linearly controlled (position control) with high accuracy.
- the driven portion 152 can be linearly driven with a high propulsive force due to the high reduction ratio of the rotation transmission mechanism.
- the electric cylinder and the rod of the electric jack can be linearly driven with a high propulsive force. In this case, even if a motor with low power is used as a drive source, an electric cylinder with high power or an electric jack can be obtained.
- the hollow part 9 (or hollow part 60) of the rotation transmission mechanism 10 (or the rotation transmission mechanism 20, 41, 51) is used for various applications as a hole through which a cable or a cold water pipe passes.
- the hollow portion 9 is not necessarily provided in the rotation transmission mechanism 10. Even if the rotation transmission mechanism 10 is not provided with the hollow portion 9, it is possible to control the position of the driven portion 142 with high accuracy or drive it with high thrust.
- Embodiments according to the present invention are not limited to the embodiments described above, and various modifications can be made.
- the upper rotation transmission mechanism 41 and the lower rotation transmission mechanism 51 used in the conveyance device 100 are described as being formed by gears.
- the present invention is not limited to this, and the rotation transmission mechanisms 41 and 51 used in the transport apparatus 100 may of course be formed of a rotating body.
- the relative position between the drive rotator 5 (or drive gear 25, and so on) and the rotator 6 (or gear 26, and so on) is 180 ° around the axis OO ′. It explained that it was a distant position. However, the relative position does not necessarily have to be 180 ° apart around the axis O-O ′. The same applies to the relative positions of the first planetary rotator and the second planetary rotator.
- the number of planetary rotators 3 and 4 has been described as two.
- the present invention is not limited to this, and the number of planetary rotating bodies may be two or more.
- the number of the drive rotators 5 and the rotators 6 may be two or more.
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Abstract
Description
前記第1の回転体は、第1の外周部と、第2の外周部とを有する。
前記第1の外周部は、前記第1の段に設けられる。
前記第2の外周部は、前記第2の段に設けられる。
前記第2の回転体は、第1の内周部と、第2の内周部とを有する。
前記第1の内周部は、前記第1の段で前記第1の外周部に対向する。
前記第2の内周部は、前記第2の段で前記第2の外周部に対向する。
前記駆動回転体は、前記第1の段で前記第1の外周部及び前記第1の内周部に当接し、駆動源により回転される。
前記各遊星回転体は、前記第2の段で前記第2の外周部及び前記第2の内周部に当接し、前記第1の回転体の周囲を公転する。
本発明では、駆動回転体が駆動源により回転されると、第1の内周部で駆動回転体に当接する第2の回転体が一の回転方向に回転される(例えば、これを正回転とする。)。また、第1の外周面で駆動回転体に当接する第1の回転体が一の回転方向とは逆の回転方向に回転される(例えばこれを逆回転とする。)。
この場合、複数の遊星回転体は、第2の段で第1の回転体の第2の外周部及び第2の回転体の第2の内周部に当接しているため、複数の遊星回転体は、自転しながら第1の回転体の周囲を公転する(例えばこれを正公転とする。)。このとき、第2の内周部及び第2の外周部のそれぞれの絶対値的な回転速度にわずかな差が発生するため、遊星回転体を第1の回転体の周囲で非常にゆっくりと公転させることができる。
これにより、本発明の一形態に係る回転伝達機構は、高い減速比を得ることができる。また、本発明では、2段で高い減速比を得ることが可能であるため、回転伝達機構の小型化も容易である。
前記アーム機構は、搬送対象物を載置する載置部を有し、伸縮可能である。
前記第1の回転伝達機構は、第1の段と、第2の段とを有する第1の回転伝達機構であって、第1の回転体と、第2の回転体と、駆動回転体と、出力部とを有する。
前記第1の回転体は、第1の外周部と、第2の外周部とを有する。
前記第1の外周部は、前記第1の段に設けられる。
前記第2の外周部は、前記第2の段に設けられる。
前記第2の回転体は、第1の内周部と、第2の内周部とを有する。
前記第1の内周部は、前記第1の段で前記第1の外周部に対向する。
前記第2の内周部は、前記第2の段で前記第2の外周部に対向する。
前記駆動回転体は、前記第1の段で前記第1の外周部及び前記第1の内周部に当接し、駆動源により回転される。
前記各遊星回転体は、前記第2の段で前記第2の外周部及び前記第2の内周部に当接し、前記第1の回転体の周囲を公転する。
前記出力部は、前記アーム機構を伸縮させるために、前記複数の遊星回転体の公転運動を前記アーム機構に出力する。
本発明では、高い減速比を有する第1の回転伝達機構によりアーム機構を伸縮させることができるため、高精度でアーム機構の伸縮動作を制御することができる。
前記回転伝達機構は、第1の段と、第2の段とを有する回転伝達機構であって、第1の回転体と、第2の回転体と、駆動回転体と、複数の遊星回転体とを有する。
前記第1の回転体は、第1の外周部と、第2の外周部とを有する。
前記第1の外周部は、前記第1の段に設けられる。
前記第2の外周部は、前記第2の段に設けられる。
前記第2の回転体は、第1の内周部と、第2の内周部とを有する。
前記第1の内周部は、前記第1の段で前記第1の外周部に対向する。
前記第2の内周部は、前記第2の段で前記第2の外周部に対向する。
前記駆動回転体は、前記第1の段で前記第1の外周部及び前記第1の内周部に当接し、駆動源により回転される。
前記各遊星回転体は、前記第2の段で前記第2の外周部及び前記第2の内周部に当接し、前記第1の回転体の周囲を公転する。
前記被駆動部は、前記各遊星回転体の公転による、前記回転伝達機構の出力により駆動される。
前記第1の回転体は、第1の外周部と、第2の外周部とを有する。
前記第1の外周部は、前記第1の段に設けられる。
前記第2の外周部は、前記第2の段に設けられる。
前記第2の回転体は、第1の内周部と、第2の内周部とを有する。
前記第1の内周部は、前記第1の段で前記第1の外周部に対向する。
前記第2の内周部は、前記第2の段で前記第2の外周部に対向する。
前記駆動回転体は、前記第1の段で前記第1の外周部及び前記第1の内周部に当接し、駆動源により回転される。
前記各遊星回転体は、前記第2の段で前記第2の外周部及び前記第2の内周部に当接し、前記第1の回転体の周囲を公転する。
本発明では、駆動回転体が駆動源により回転されると、第1の内周部で駆動回転体に当接する第2の回転体が一の回転方向に回転される。また、第1の外周面で駆動回転体に当接する第1の回転体が一の回転方向とは逆の回転方向に回転駆動される。
この場合、複数の遊星回転体は、第2の段で第1の回転体の第2の外周部及び第2の回転体の第2の内周部に当接しているため、複数の遊星回転体は、自転しながら第1の回転体の周囲を公転する。このとき、第2の内周部及び第2の外周部のそれぞれの絶対値的な回転速度にわずかな差が発生するため、遊星回転体を第1の回転体の周囲で非常にゆっくりと公転させることができる。
これにより、本発明の一形態に係る回転伝達機構は、高い減速比を得ることができる。また、本発明では、2段で高い減速比を得ることが可能であるため、回転伝達機構の小型化も容易である。
本発明では、第2の回転体に貫通口を設けることで、例えば、ケーブルなどの配線や、冷水パイプなどを通す穴として、様々な用途に用いることができる。
前記アーム機構は、搬送対象物を載置する載置部を有し、伸縮可能である。
前記第1の回転伝達機構は、第1の段と、第2の段とを有する第1の回転伝達機構であって、第1の回転体と、第2の回転体と、駆動回転体と、出力部とを有する。
前記第1の回転体は、第1の外周部と、第2の外周部とを有する。
前記第1の外周部は、前記第1の段に設けられる。
前記第2の外周部は、前記第2の段に設けられる。
前記第2の回転体は、第1の内周部と、第2の内周部とを有する。
前記第1の内周部は、前記第1の段で前記第1の外周部に対向する。
前記第2の内周部は、前記第2の段で前記第2の外周部に対向する。
前記駆動回転体は、前記第1の段で前記第1の外周部及び前記第1の内周部に当接し、駆動源により回転される。
前記各遊星回転体は、前記第2の段で前記第2の外周部及び前記第2の内周部に当接し、前記第1の回転体の周囲を公転する。
前記出力部は、前記アーム機構を伸縮させるために、前記複数の遊星回転体の公転運動を前記アーム機構に出力する。
本発明では、高い減速比を有する第1の回転伝達機構によりアーム機構を伸縮させることができるため、高精度でアーム機構の伸縮動作を制御することができる。
前記第2の回転伝達機構は、第1の段と、第2の段とを有する第2の回転伝達機構であって、第1の回転体と、第2の回転体と、駆動回転体と、複数の遊星回転体と、出力部とを有する。
前記第1の回転体は、第1の外周部と、第2の外周部とを有する。
前記第1の外周部は、前記第1の段に設けられる。
前記第2の外周部は、前記第2の段に設けられる。
前記第2の回転体は、第1の内周部と、第2の内周部とを有する。
前記第1の内周部は、前記第1の段で前記第1の外周部に対向する。
前記第2の内周部は、前記第2の段で前記第2の外周部に対向する。
前記駆動回転体は、前記第1の段で前記第1の外周部及び前記第1の内周部に当接し、駆動源により回転される。
前記各遊星回転体は、前記第2の段で前記第2の外周部及び前記第2の内周部に当接し、前記第1の回転体の周囲を公転する。
前記出力部は、前記アーム機構を旋回させるために、前記複数の遊星回転体の公転運動を前記アーム機構に出力する。
本発明では、高い減速比を有する第2の回転伝達機構によりアーム機構を旋回させることができるため、高精度でアーム機構の旋回動作を制御することができる。
前記内軸は、回転可能であり、前記第1の回転伝達機構の前記出力部の回転運動を前記アーム機構に伝達する。
前記外軸は、回転可能であり、前記内軸の外側に前記内軸と同軸で配置され、前記第2の回転伝達機構の前記出力部の回転運動を前記アーム機構に伝達する。
この場合、前記第2の回転伝達機構の前記第2の回転体は、上面と、底面と、前記上面及び底面を貫通する貫通口とをさらに有していてもよい。
また、この場合、前記内軸は、前記第2の回転伝達機構の前記貫通口を介して、前記アーム機構及び前記第1の回転伝達機構の出力部に連結されてもよい。
本発明では、アーム機構が旋回される場合、第1の回転伝達機構及び第2の回転伝達機構が、それぞれの回転伝達機構に設けられた駆動源により同方向に同速度で回転されることになる。本発明では、内軸が第2の回転伝達機構の貫通口を貫通された構成とされているので、アーム機構が旋回されたときでも第1の回転伝達機構及び第2の回転伝達機構の、それぞれの駆動源の空間的な位置は変わらない。よって、アーム機構が旋回されたときに、駆動源に接続されるケーブルが搬送装置の周囲に巻きついてしまうことを防止することができる。その結果、アーム機構を360度無制限に旋回させることができる。
この場合、前記第2の回転伝達機構の前記第2の回転体は、上面と、底面と、前記上面及び底面を貫通する貫通口とをさらに有していてもよい。
第2の回転伝達機構の貫通口は、例えば、第1の回転伝達機構の駆動源に接続されるケーブルを通す穴として利用される。本発明では、アーム機構が旋回される場合、第2の回転伝達機構の回転により、アーム機構と一緒に第1の回転伝達機構も回転することになる。この場合、第1の回転機構の駆動源も回転する。しかしながら、本発明では、貫通口が第1の回転伝達機構の駆動源に接続されたケーブルを通す穴として利用されているので、ケーブルをあらかじめとぐろ状に巻いておく必要もなく、ケーブルの繰り返しの曲げ変位も発生しない。また、ケーブルが搬送装置の周囲に巻きついてしまうことも防止することができる。
前記回転伝達機構は、第1の段と、第2の段とを有する回転伝達機構であって、第1の回転体と、第2の回転体と、駆動回転体と、複数の遊星回転体とを有する。
前記第1の回転体は、第1の外周部と、第2の外周部とを有する。
前記第1の外周部は、前記第1の段に設けられる。
前記第2の外周部は、前記第2の段に設けられる。
前記第2の回転体は、第1の内周部と、第2の内周部とを有する。
前記第1の内周部は、前記第1の段で前記第1の外周部に対向する。
前記第2の内周部は、前記第2の段で前記第2の外周部に対向する。
前記駆動回転体は、前記第1の段で前記第1の外周部及び前記第1の内周部に当接し、駆動源により回転される。
前記各遊星回転体は、前記第2の段で前記第2の外周部及び前記第2の内周部に当接し、前記第1の回転体の周囲を公転する。
前記被駆動部は、前記各遊星回転体の公転による、前記回転伝達機構の出力により駆動される。
図1は、本発明の第1実施形態に係る回転伝達機構を示す図である。図1(A)は、一部が破断された回転伝達機構の上面図であり、図1(B)は、図1(A)に示すF-F’線の断面図であり、回転伝達機構を側方から見た図である。図1(C)は、図1(B)に示すG-G’線の断面図であり、回転伝達機構を上方から見た図である。図1(A)では、図1(A)に示すE-E’から左は、出力板を省略して図示している。
次に、回転伝達機構10の動作について説明する。
θ1=2πRin/R11・・・(1)。
θ2=2πRin/R21・・・(2)。
AA1=R12・θ1・・・(3)。
BB2=R22・θ2・・・(4)。
A’A1=R12・θ1+R12・θ・・・(5)
B’B2=R22・θ2-R22・θ・・・(6)。
θ=2πRin(R22/R21-R12/R11)/(R22+R12)・・・(9)。
(減速比)=θ/2π=Rin(R22/R21-R12/R11)/(R22+R12)・・・(10)。
次に本発明の第2の実施形態に係る回転伝達機構について説明する。なお、第2実施形態の説明では、上述の第1実施形態と同一の構成、機能を有する部材については、同一符号を付し説明を省略、または簡略化する。
R=1/4N(R11=1/4N11、R12=1/4N12、R21=1/4N21、R22=1/4N22、Rin=1/4Nin、R3=1/4N3)・・・(11)。
次に、回転伝達機構の利用形態の一例として、回転伝達機構を搭載した搬送装置について説明する。
次に搬送装置100の動作について説明する。
次に、搬送装置の第2実施形態について説明する。
次に、回転伝達機構を搭載した駆動装置について説明する。
上記したように、回転伝達機構10(または、回転伝達機構20、41、51以下同様)は、単純な構造により高減速比が実現されており、小型化、薄型化も容易である。この回転伝達機構10は、上記した搬送装置100、200以外にも、さまざまな種類の駆動装置に用いることができる。
図11に示すように、駆動装置150は、モータ等により構成された駆動源151と、回転伝達機構10と、回転伝達機構10を介して駆動源151により駆動される被駆動部152とを有する。
また、回転伝達機構の高減速比により、被駆動部152を高推進力で直線駆動させることができる。例えば、電動シリンダ、電動ジャッキのロッドを高推進力で直線駆動させることができる。この場合、駆動源としてパワーの小さなモータが用いられても、大きなパワーの電動シリンダや、電動ジャッキなどを得ることができる。
本発明に係る実施の形態は、以上説明した実施の形態に限定されず、種々の変形が可能である。
2…外側回転体
3…第1の遊星回転体
4…第2の遊星回転体
5…駆動回転体
6…回転体
8、49…貫通口
9、60…中空部
10、20…回転伝達機構
11、68、69…出力板
16…モータ
21…太陽ギア
22…リングギア
23…第1の遊星ギア
24…第2の遊星ギア
25…駆動ギア
26…ギア
30…アーム機構
37…載置台
40…上部駆動機構
41…上部回転伝達機構
42…上部モータ
43、53…ケーブル
44…出力軸
50…下部駆動機構
51…下部回転伝達機構
52…下部モータ
61…内軸
62…外軸
100、200…搬送装置
150…駆動装置
151…駆動源
152…被駆動部
Claims (9)
- 第1の段と、第2の段とを有する回転伝達機構であって、
前記第1の段に設けられた第1の外周部と、前記第2の段に設けられた第2の外周部とを有する第1の回転体と、
前記第1の段で前記第1の外周部に対向する第1の内周部と、前記第2の段で前記第2の外周部に対向する第2の内周部とを有する第2の回転体と、
前記第1の段で前記第1の外周部及び前記第1の内周部に当接し、駆動源により回転される駆動回転体と、
前記第2の段で前記第2の外周部及び前記第2の内周部に当接し、前記第1の回転体の周囲を公転する複数の遊星回転体と
を具備する回転伝達機構。 - 請求項1に記載の回転伝達機構であって、
前記第1の回転体は、上面と、底面と、前記上面及び前記底面を貫通する貫通口とをさらに有する回転伝達機構。 - 請求項1に記載の回転伝達機構であって、
前記第1の回転体、前記第2の回転体、前記駆動回転体、及び前記各遊星回転体は、歯車により形成される回転伝達機構。 - 搬送対象物を載置する載置部を有し、伸縮可能なアーム機構と、
第1の段と、第2の段とを有する第1の回転伝達機構であって、前記第1の段に設けられた第1の外周部と、前記第2の段に設けられた第2の外周部とを有する第1の回転体と、前記第1の段で前記第1の外周部に対向する第1の内周部と、前記第2の段で前記第2の外周部に対向する第2の内周部とを有する第2の回転体と、前記第1の段で前記第1の外周部及び前記第1の内周部に当接し、駆動源により回転される駆動回転体と、前記第2の段で前記第2の外周部及び前記第2の内周部に当接し、前記第1の回転体の周囲を公転する複数の遊星回転体と、前記アーム機構を伸縮させるために前記複数の遊星回転体の公転運動を前記アーム機構に出力する出力部とを有する第1の回転伝達機構と
を具備する搬送装置。 - 請求項4に記載の搬送装置であって、
第1の段と、第2の段とを有する第2の回転伝達機構であって、前記第1の段に設けられた第1の外周部と、前記第2の段に設けられた第2の外周部とを有する第1の回転体と、前記第1の段で前記第1の外周部に対向する第1の内周部と、前記第2の段で前記第2の外周部に対向する第2の内周部とを有する第2の回転体と、前記第1の段で前記第1の外周部及び前記第1の内周部に当接し、駆動源により回転される駆動回転体と、前記第2の段で前記第2の外周部及び前記第2の内周部に当接し、前記第1の回転体の周囲を公転する複数の遊星回転体と、前記アーム機構を旋回させるために、前記複数の遊星回転体の公転運動を前記アーム機構に出力する出力部とを有する第2の回転伝達機構
をさらに具備する搬送装置。 - 請求項5に記載の搬送装置であって、
回転可能であり、前記第1の回転伝達機構の前記出力部の回転運動を前記アーム機構に伝達する内軸と、
回転可能であり、前記内軸の外側に前記内軸と同軸で配置され、前記第2の回転伝達機構の前記出力部の回転運動を前記アーム機構に伝達する外軸と
をさらに具備する搬送装置。 - 請求項6に記載の搬送装置であって、
前記第2の回転伝達機構は、前記第1の回転伝達機構の同心軸上で、前記第1の回転伝達機構の上方に配置され、
前記第2の回転伝達機構の前記第2の回転体は、上面と、底面と、前記上面及び底面を貫通する貫通口とをさらに有し、
前記内軸は、前記第2の回転伝達機構の前記貫通口を介して、前記アーム機構及び前記第1の回転伝達機構の出力部に連結される
搬送装置。 - 請求項6に記載の搬送装置であって、
前記第2の回転伝達機構は、前記第1の回転伝達機構の同心軸上で、前記第1の回転伝達機構の下方に配置され、
前記第2の回転伝達機構の前記第2の回転体は、上面と、底面と、前記上面及び底面を貫通する貫通口とをさらに有する
搬送装置。 - 第1の段と、第2の段とを有する回転伝達機構であって、前記第1の段に設けられた第1の外周部と、前記第2の段に設けられた第2の外周部とを有する第1の回転体と、前記第1の段で前記第1の外周部に対向する第1の内周部と、前記第2の段で前記第2の外周部に対向する第2の内周部とを有する第2の回転体と、前記第1の段で前記第1の外周部及び前記第1の内周部に当接し、駆動源により回転される駆動回転体と、前記第2の段で前記第2の外周部及び前記第2の内周部に当接し、前記第1の回転体の周囲を公転する複数の遊星回転体とを有する回転伝達機構と、
前記複数の遊星回転体の公転による、前記回転伝達機構の出力により駆動される被駆動部と
を具備する駆動装置。
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US10843349B2 (en) | 2016-06-15 | 2020-11-24 | Sankyo Seisakusho Co. | Conveyance device |
JP2021158326A (ja) * | 2020-03-30 | 2021-10-07 | 東京エレクトロン株式会社 | 搬送装置 |
JP7412248B2 (ja) | 2020-03-30 | 2024-01-12 | 東京エレクトロン株式会社 | 搬送装置 |
Also Published As
Publication number | Publication date |
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KR20120042994A (ko) | 2012-05-03 |
US20120251287A1 (en) | 2012-10-04 |
KR101322587B1 (ko) | 2013-10-28 |
US9193067B2 (en) | 2015-11-24 |
CN102472369A (zh) | 2012-05-23 |
JPWO2011010448A1 (ja) | 2012-12-27 |
TW201116742A (en) | 2011-05-16 |
CN102472369B (zh) | 2015-04-22 |
TWI456124B (zh) | 2014-10-11 |
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