CN104348444B - 振动元件、振动装置、电子设备以及移动体 - Google Patents
振动元件、振动装置、电子设备以及移动体 Download PDFInfo
- Publication number
- CN104348444B CN104348444B CN201410390120.7A CN201410390120A CN104348444B CN 104348444 B CN104348444 B CN 104348444B CN 201410390120 A CN201410390120 A CN 201410390120A CN 104348444 B CN104348444 B CN 104348444B
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- Prior art keywords
- arm
- driving
- driving arm
- drive
- vibration
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013166004A JP6435596B2 (ja) | 2013-08-09 | 2013-08-09 | 振動素子、振動デバイス、電子機器、および移動体 |
| JP2013-166004 | 2013-08-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104348444A CN104348444A (zh) | 2015-02-11 |
| CN104348444B true CN104348444B (zh) | 2018-07-10 |
Family
ID=52447435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410390120.7A Expired - Fee Related CN104348444B (zh) | 2013-08-09 | 2014-08-08 | 振动元件、振动装置、电子设备以及移动体 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9995582B2 (enExample) |
| JP (1) | JP6435596B2 (enExample) |
| CN (1) | CN104348444B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5974629B2 (ja) * | 2012-05-23 | 2016-08-23 | セイコーエプソン株式会社 | 振動片、振動片の製造方法、角速度センサー、電子機器、移動体 |
| JP2016065752A (ja) * | 2014-09-24 | 2016-04-28 | セイコーエプソン株式会社 | 振動片、角速度センサー、電子機器および移動体 |
| JP6582501B2 (ja) * | 2015-04-02 | 2019-10-02 | セイコーエプソン株式会社 | 振動素子、振動子、電子機器および移動体 |
| CN108183987B (zh) * | 2017-12-26 | 2020-09-15 | Oppo广东移动通信有限公司 | 电子装置 |
| JP7139610B2 (ja) | 2018-01-23 | 2022-09-21 | セイコーエプソン株式会社 | 振動素子、振動素子の製造方法、物理量センサー、慣性計測装置、電子機器および移動体 |
| JP7076546B2 (ja) * | 2018-06-13 | 2022-05-27 | 京セラ株式会社 | センサ素子および角速度センサ |
| JP7528565B2 (ja) | 2020-06-30 | 2024-08-06 | セイコーエプソン株式会社 | 振動素子の製造方法、振動素子および振動デバイス |
| JP7528566B2 (ja) | 2020-06-30 | 2024-08-06 | セイコーエプソン株式会社 | 振動素子の製造方法、振動素子および振動デバイス |
| WO2022024440A1 (ja) * | 2020-07-29 | 2022-02-03 | 株式会社村田製作所 | 共振子及び共振装置 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56158520A (en) * | 1980-05-12 | 1981-12-07 | Seiko Instr & Electronics Ltd | Oscillator |
| JP2005229143A (ja) * | 2004-02-10 | 2005-08-25 | Citizen Watch Co Ltd | 振動子 |
| JP2008011348A (ja) * | 2006-06-30 | 2008-01-17 | Seiko Epson Corp | 圧電振動片 |
| CN101405569A (zh) * | 2006-04-12 | 2009-04-08 | 松下电器产业株式会社 | 惯性力传感器 |
| JP2010263317A (ja) * | 2009-04-30 | 2010-11-18 | Epson Toyocom Corp | 屈曲振動片 |
| JP2012257141A (ja) * | 2011-06-10 | 2012-12-27 | Seiko Epson Corp | 水晶振動片、ジャイロセンサー、電子機器、水晶振動片の製造方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7043986B2 (en) * | 2003-02-05 | 2006-05-16 | Ngk Insulators, Ltd. | Vibrators and vibratory gyroscopes |
| JP2005345404A (ja) * | 2004-06-07 | 2005-12-15 | Nec Tokin Corp | 圧電振動ジャイロ用振動子及びその製造方法 |
| JP2008249489A (ja) * | 2007-03-30 | 2008-10-16 | Tdk Corp | 角速度センサ素子および角速度センサ装置 |
| TW201032470A (en) | 2008-10-24 | 2010-09-01 | Seiko Epson Corp | Bending vibration piece, bending vibrator, and piezoelectric device |
| JP2010193133A (ja) * | 2009-02-18 | 2010-09-02 | Epson Toyocom Corp | 屈曲振動片および屈曲振動子 |
| JP5085679B2 (ja) | 2010-03-15 | 2012-11-28 | 日本電波工業株式会社 | 圧電振動片および圧電デバイス |
| JP2011193399A (ja) * | 2010-03-16 | 2011-09-29 | Seiko Epson Corp | 振動片、振動子および圧電デバイス |
| JP2012147347A (ja) * | 2011-01-14 | 2012-08-02 | Seiko Epson Corp | 振動片、振動子、発振器及び電子機器 |
| JP5716557B2 (ja) * | 2011-06-14 | 2015-05-13 | セイコーエプソン株式会社 | 振動片、ジャイロセンサー、電子機器、振動片の製造方法 |
| JP6083110B2 (ja) | 2012-01-27 | 2017-02-22 | セイコーエプソン株式会社 | 振動素子、振動デバイス、ジャイロセンサーおよび電子機器 |
| JP2013181940A (ja) | 2012-03-05 | 2013-09-12 | Seiko Epson Corp | ジャイロセンサーおよび電子機器 |
| JP5966462B2 (ja) | 2012-03-13 | 2016-08-10 | セイコーエプソン株式会社 | ジャイロセンサーおよび電子機器 |
| JP5966461B2 (ja) | 2012-03-13 | 2016-08-10 | セイコーエプソン株式会社 | ジャイロセンサーおよび電子機器 |
| JP2013192013A (ja) * | 2012-03-13 | 2013-09-26 | Seiko Epson Corp | 振動素子、振動デバイスおよび電子機器 |
| JP6078957B2 (ja) | 2012-03-13 | 2017-02-15 | セイコーエプソン株式会社 | ジャイロセンサーおよび電子機器 |
| JP5966460B2 (ja) | 2012-03-13 | 2016-08-10 | セイコーエプソン株式会社 | ジャイロセンサーおよび電子機器 |
| US9222776B2 (en) * | 2012-03-13 | 2015-12-29 | Seiko Epson Corporation | Gyro sensor and electronic apparatus |
-
2013
- 2013-08-09 JP JP2013166004A patent/JP6435596B2/ja not_active Expired - Fee Related
-
2014
- 2014-08-08 US US14/454,888 patent/US9995582B2/en active Active
- 2014-08-08 CN CN201410390120.7A patent/CN104348444B/zh not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56158520A (en) * | 1980-05-12 | 1981-12-07 | Seiko Instr & Electronics Ltd | Oscillator |
| JP2005229143A (ja) * | 2004-02-10 | 2005-08-25 | Citizen Watch Co Ltd | 振動子 |
| CN101405569A (zh) * | 2006-04-12 | 2009-04-08 | 松下电器产业株式会社 | 惯性力传感器 |
| JP2008011348A (ja) * | 2006-06-30 | 2008-01-17 | Seiko Epson Corp | 圧電振動片 |
| JP2010263317A (ja) * | 2009-04-30 | 2010-11-18 | Epson Toyocom Corp | 屈曲振動片 |
| JP2012257141A (ja) * | 2011-06-10 | 2012-12-27 | Seiko Epson Corp | 水晶振動片、ジャイロセンサー、電子機器、水晶振動片の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20150040664A1 (en) | 2015-02-12 |
| JP2015035734A (ja) | 2015-02-19 |
| CN104348444A (zh) | 2015-02-11 |
| JP6435596B2 (ja) | 2018-12-12 |
| US9995582B2 (en) | 2018-06-12 |
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| GR01 | Patent grant | ||
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180710 |