CN104134645B - 一种封装导线材料结构及其加工方法 - Google Patents

一种封装导线材料结构及其加工方法 Download PDF

Info

Publication number
CN104134645B
CN104134645B CN201410303386.3A CN201410303386A CN104134645B CN 104134645 B CN104134645 B CN 104134645B CN 201410303386 A CN201410303386 A CN 201410303386A CN 104134645 B CN104134645 B CN 104134645B
Authority
CN
China
Prior art keywords
tungsten
gold
rod
microns
conductive wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201410303386.3A
Other languages
English (en)
Other versions
CN104134645A (zh
Inventor
刘伯彦
周斌
钟其龙
王晓靁
刘崇志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xiamen Crystal Embellish Photoelectric Group Co Ltd
Original Assignee
Xiamen Crystal Embellish Photoelectric Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xiamen Crystal Embellish Photoelectric Group Co Ltd filed Critical Xiamen Crystal Embellish Photoelectric Group Co Ltd
Priority to CN201410303386.3A priority Critical patent/CN104134645B/zh
Publication of CN104134645A publication Critical patent/CN104134645A/zh
Application granted granted Critical
Publication of CN104134645B publication Critical patent/CN104134645B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L24/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45163Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
    • H01L2224/45184Tungsten (W) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554Coating
    • H01L2224/45565Single coating layer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554Coating
    • H01L2224/45599Material
    • H01L2224/456Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45638Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45644Gold (Au) as principal constituent

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Processing (AREA)
  • Powder Metallurgy (AREA)

Abstract

本发明公开一种封装导线材料结构,由中间线芯和表面镀层组成,中间线芯为钨丝,表面镀层为金。加工方法是:模压,将钨粉挤压成一整根棒;预烧结,将棒放入氢气烧结炉中,高温使金属颗粒凝聚,致密性可到达约60%~70%;在垂熔炉中完全烧结,使钨棒的致密性达到约85%至95%,棒的内部钨晶体开始形成;断电,冷却;挤锻压加工,采用锤锻机捶打,直到直径达到6350 到 2540微米;再通过拉丝模拉拔,使其直径达到12.7微米,制成钨丝;钨丝镀金:镀金厚度约为2微米,制成具有内钨外金结构的封装导线材料。本发明避开了使用铜所衍生的问题,并减少金的使用量,降低成本。

Description

一种封装导线材料结构及其加工方法
技术领域
本发明涉及半导体及LED后段封装技术,特别与一种封装导线材料的结构及其加工方法有关。
背景技术
集成电路(Integrated Circuit;IC)封装内部接合方式,可分为打线接合、卷带式自动接合与覆晶接合,其中,打线接合由于制程成熟、成本低、布线弹性高,是目前应用最广的接合技术,约占所有封装产品90%。
打线接合使用的导线,分为金线、铜线与铝线,目前以金线为主流,原因在于金具备稳定性高、质软、延展性佳等物理特性优势,用于IC封装打线接合时,其良率、生产效率及线径微细化等表现,皆相当不错。然而,自1999年来,国际金价即一路走高,甚至在2009年金价突破每盎司1,000美元价位。金价高涨,使半导体封测业者与IC设计业者不得不正视金线高昂的成本,而积极投入其他金属打线技术研发,并计划导入量产。而铜打线技术发源于1980年代,除成本考虑外,铜的导电性、导热性及强韧度皆较金为佳,因此自2001年起,即大量应用于大功率组件及离散组件等线径粗、电负载量大的半导体产品。但受制于铜的硬度高于金,铜打线应用在IC封装时,由于电路复杂、结构脆弱、接脚细且密,导致打线技术难度大增、研发与认证投资不易回收。
众所皆知,铜线非常容易氧化,包括贮存及运输均必须特别留意隔绝空气,在打线接合过程更需要极严格的惰性气体保护;更严重的是由于铜线的易氧化及腐蚀特性,将会导致打线接合产品的可靠度偏低,另一方面因为铜线的强度与硬度较高,使其焊线作业参数较窄、速度较慢及良率较差,尤其在最近相当热门的迭球打线接合封装,铜线遭遇极大困难,迫使封装厂不得不采用“金铜混打”的变通方案,可是仍然不能完全克服迭球在金/铜界面所出现的质量不佳问题。
因应上述现存技术的缺点,本发明人对封装导线材料进行改进,本案由此产生。
发明内容
本发明的目的在于提供一种封装导线材料结构以及其加工方法,以避开了使用铜所衍生的问题,并减少金的使用量,降低成本。
为了达成上述目的,本发明的技术方案是:
一种封装导线材料结构,由中间线芯和表面镀层组成,中间线芯为钨丝,表面镀层为金,由此形成内钨外金的结构。
其中,中间线芯的钨丝直径为12.7微米,表面镀层的厚度为2微米。
一种封装导线材料加工方法,其步骤如下:
第一步,模压:将固定重量的钨粉放进不锈钢模具中,挤压成一整根棒;
第二步,预烧结:将第一步的这根易碎的棒放置在难熔金属器皿中,并放入氢气烧结炉中,高温1200~1600℃使金属颗粒不断地凝聚在一起;这一过程中,致密性可到达约60%~70%,粒度不会增加;
第三步,完全烧结:将钨棒的两端垂直夹持在垂熔炉的上、下夹头,采用低电压、高电流供电(电压9-12V,电流8000-12000A),使钨坯条自身升温。通过增大电流提高烧结温度,烧结温度最高达3000℃左右,而产生的热量会使钨棒的致密性达到约85%至95%,与此同时,棒的内部钨晶体开始形成;断电,通入循环水对上、下夹头进行冷却;
第四步,挤锻压加工:对第三步的棒加温到1200℃到1500℃,采用锤锻机捶打钨棒,直到钨棒的直径达到6350 到 2540微米;
第五步,拉拔:第四步挤锻压过的钨棒再通过拉丝模拉拔,使其直径达到12.7微米,制成钨丝;
第六步,钨丝镀金:对第五步已完成的钨丝进行镀金,镀金厚度约为2微米,制成具有内钨外金结构的封装导线材料。
采用上述方案后,本发明使用钨线镀金的方式来解决现有技术中的缺点,利用钨的耐高温、高韧性及延展性,高抗氧化能力(在常压下,要达到400~500℃,才会产生氧化反应,但反应的生成物WO3会形成一表面保护膜,阻止氧化深入内部),低电子迁移率,在高温下加工,可以制造出比金线更细之钨丝,但由于其高电阻值问题,故佐以表面镀金以减少电阻,提高电子传输的能力,并且钨丝镀金后,其将更为耐高温,抗腐蚀,热膨胀系数低。由于本发明主要使用钨丝为封装打线接合材料,大大减少金的使用量,也避开了使用铜所衍生的问题,达到降低成本,并改善现存技术的缺点。
附图说明
图1是本封装导线材料的结构示意图;
图2是本封装导线材料的加工方法流程图。
具体实施方式
如图1所示,本发明揭示的一种封装导线材料结构,由中间线芯1和表面镀层2组成,中间线芯1为钨丝,钨丝直径优选为12.7微米,表面镀层2为金,表面镀层的厚度优选为2微米,由此形成内钨外金的结构。
如图2所示,本发明揭示的一种封装导线材料是按如下步骤加工而成。
第一步,模压。
将固定重量的钨粉放进不锈钢模具中,挤压成一整根棒。
第二步,预烧结。
将第一步的这根易碎的棒放置在难熔金属器皿中,并放入氢气烧结炉中,高温1200~1600℃使金属颗粒不断地凝聚在一起;这一过程中,致密性可到达约60%~70%,粒度不会增加。
第三步,完全烧结。
将钨棒的两端垂直夹持在垂熔炉的上下夹头肩,采用低电压、高电流供电(电压9-12V,电流8000-12000A),使钨坯条自身升温。通过增大电流提高烧结温度,烧结温度最高达3000℃左右,而产生的热量会使钨棒的致密性达到约85%至95%,与此同时,棒的内部钨晶体开始形成;断电,通入循环水对上、下夹头进行冷却。
第四步,挤锻压加工。
第三步的钨棒是比较结实的,但在常温下还是比较脆的。本发明通过提高它的温度到1200℃到1500℃,钨棒可以变得更有韧性。在这一温度下,采用锤锻机捶打钨棒,钨棒被挤压。锤锻机是通过一种模具每分钟10000次有规律地捶打钨棒来减少钨棒的直径的装置。通常,每捶打一次钨棒的直径会减少12%。通过挤锻压,使晶体结构拉成变成纤维结构。但要使成品的强度和柔韧性得到改善,钨棒必须不断地被重新加热到1800~2500℃,且捶打要一直持续到钨棒的直径达到6350 到 2540微米。
第五步,拉拔。
第四步挤锻压过的钨棒直径偏粗,接下来要通过拉丝模拉拔使其直径变得更细。丝被通过硬质合金拉丝模或金刚石拉丝模润滑和拉拔,使其直径达到12.7微米,制成钨丝。
第六步,钨丝镀金。
对第五步已完成的钨丝进行镀金,镀金厚度约为2微米,制成具有内钨外金结构的封装导线材料。

Claims (1)

1.一种封装导线材料加工方法,其特征在于步骤如下:
第一步,模压:将固定重量的钨粉放进不锈钢模具中,挤压成一整根棒;
第二步,预烧结:将第一步的棒放置在难熔金属器皿中,并放入氢气烧结炉中,高温1200~1600℃使金属颗粒凝聚在一起,致密性到达60%~70%;
第三步,完全烧结:将第二步棒的两端垂直夹持在垂熔炉的上、下夹头,采用低电压、高电流供电,电压9-12V,电流8000-12000A,使钨坯条自身升温,通过增大电流提高烧结温度,烧结温度最高达3000℃±100℃,产生的热量使钨棒的致密性达到85%至95%,棒的内部钨晶体开始形成;断电,通入循环水对上、下夹头进行冷却;
第四步,挤锻压加工:对第三步的棒加温到1200℃到1500℃,采用锤锻机捶打钨棒,直到钨棒的直径达到6350 到 2540微米;
第五步,拉拔:第四步挤锻压过的钨棒再通过拉丝模拉拔,使其直径达到12.7微米,制成钨丝;
第六步,钨丝镀金:对第五步已完成的钨丝进行镀金,镀金厚度为2微米,制成具有内钨外金结构的封装导线材料。
CN201410303386.3A 2014-06-30 2014-06-30 一种封装导线材料结构及其加工方法 Active CN104134645B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410303386.3A CN104134645B (zh) 2014-06-30 2014-06-30 一种封装导线材料结构及其加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410303386.3A CN104134645B (zh) 2014-06-30 2014-06-30 一种封装导线材料结构及其加工方法

Publications (2)

Publication Number Publication Date
CN104134645A CN104134645A (zh) 2014-11-05
CN104134645B true CN104134645B (zh) 2017-06-27

Family

ID=51807274

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410303386.3A Active CN104134645B (zh) 2014-06-30 2014-06-30 一种封装导线材料结构及其加工方法

Country Status (1)

Country Link
CN (1) CN104134645B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115074794B (zh) * 2022-05-13 2023-06-30 重庆材料研究院有限公司 一种气体探测器用镀金钨丝的制备方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101521187A (zh) * 2008-02-28 2009-09-02 爱特梅尔公司 具有顶部及底部侧电连接的晶片级集成电路封装
CN201975388U (zh) * 2010-12-15 2011-09-14 广州佳博金丝科技有限公司 防氧化铜基键合丝
CN102324392A (zh) * 2011-10-19 2012-01-18 广东佳博电子科技有限公司 一种防氧化的铜基键合丝的制备工艺
TW201347060A (zh) * 2012-02-27 2013-11-16 Nippon Micrometal Corp 功率半導體裝置及其製造方法、以及接合線
CN204130521U (zh) * 2014-06-30 2015-01-28 厦门润晶光电有限公司 一种封装导线材料结构

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101521187A (zh) * 2008-02-28 2009-09-02 爱特梅尔公司 具有顶部及底部侧电连接的晶片级集成电路封装
CN201975388U (zh) * 2010-12-15 2011-09-14 广州佳博金丝科技有限公司 防氧化铜基键合丝
CN102324392A (zh) * 2011-10-19 2012-01-18 广东佳博电子科技有限公司 一种防氧化的铜基键合丝的制备工艺
TW201347060A (zh) * 2012-02-27 2013-11-16 Nippon Micrometal Corp 功率半導體裝置及其製造方法、以及接合線
CN204130521U (zh) * 2014-06-30 2015-01-28 厦门润晶光电有限公司 一种封装导线材料结构

Also Published As

Publication number Publication date
CN104134645A (zh) 2014-11-05

Similar Documents

Publication Publication Date Title
CN103474408B (zh) 一种表面有镀金层的金银合金键合丝及其制备方法
CN201975388U (zh) 防氧化铜基键合丝
CN109628793A (zh) 一种铜镀钯镀镍再镀金键合丝及其制备方法
CN104388861B (zh) 一种多晶串联led用微细银金合金键合线的制造方法
CN106011516B (zh) 一种掺杂金合金键合丝及其深冷处理制备方法
CN103194637A (zh) 一种键合合金银丝及制备方法
CN102324392B (zh) 一种防氧化的铜基键合丝的制备工艺
CN103219246B (zh) 一种镀钯镀银的双镀层键合铜丝的制造方法
CN103199073A (zh) 银钯合金单晶键合丝及其制造方法
CN103219249B (zh) 一种镀钯镀金的双镀层键合铜丝的制造方法
CN104134645B (zh) 一种封装导线材料结构及其加工方法
CN201435388Y (zh) 一种用于mosfet封装的引线框架
CN103219312B (zh) 一种镀钯镀金的双镀层键合铜丝
CN204130521U (zh) 一种封装导线材料结构
CN101170152A (zh) Led大功率管晶片散热方法
CN109449087A (zh) 一种铜镀钯再镀镍键合丝及其制备方法
CN110284023B (zh) 一种铜合金键合丝及其制备方法和应用
CN102222658A (zh) 多圈排列ic芯片封装件及其生产方法
CN104810462B (zh) 一种中大功率led驱动芯片的esop8引线框架
CN207637785U (zh) 新型高频微波大功率限幅器焊接组装结构
CN106244844A (zh) 一种半导体用的铜线及其制备方法
CN103996668A (zh) 银镧钙合金键合丝及其制造方法
CN109055800A (zh) 一种键合金线及其制备方法
CN103219247B (zh) 一种镀银键合铜丝的制造方法
CN103219311B (zh) 一种镀钯镀银的双镀层键合铜丝

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information

Address after: 361000 Fujian, Xiamen torch hi tech Zone (Xiangan) Industrial Zone, Yue Yue Road, No. 4, building No. 1, layer 1

Applicant after: SUNPHIRE Opt-tronic Co., Ltd.

Address before: 361000 Fujian, Xiamen torch hi tech Zone (Xiangan) Industrial Zone, Yue Yue Road, No. 4, building No. 1, layer 1

Applicant before: XIAMEN CRYSTAL EMBELLISH PHOTOELECTRIC CO., LTD.

COR Change of bibliographic data
GR01 Patent grant
GR01 Patent grant
PP01 Preservation of patent right
PP01 Preservation of patent right

Effective date of registration: 20181109

Granted publication date: 20170627

PD01 Discharge of preservation of patent
PD01 Discharge of preservation of patent

Date of cancellation: 20211109

Granted publication date: 20170627

PP01 Preservation of patent right
PP01 Preservation of patent right

Effective date of registration: 20211109

Granted publication date: 20170627