CN103958401B - 用于凝相制备三甲硅烷基胺的设备和方法 - Google Patents

用于凝相制备三甲硅烷基胺的设备和方法 Download PDF

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Publication number
CN103958401B
CN103958401B CN201280049320.5A CN201280049320A CN103958401B CN 103958401 B CN103958401 B CN 103958401B CN 201280049320 A CN201280049320 A CN 201280049320A CN 103958401 B CN103958401 B CN 103958401B
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solvent
temperature
tsa
reaction
trisilylamine
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CN103958401A (zh
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科尔·J·里特
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Air Liquide Advanced Materials Inc
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Voltaix Inc
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/087—Compounds containing nitrogen and non-metals and optionally metals containing one or more hydrogen atoms

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
CN201280049320.5A 2011-10-07 2012-10-04 用于凝相制备三甲硅烷基胺的设备和方法 Active CN103958401B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161544468P 2011-10-07 2011-10-07
US61/544,468 2011-10-07
PCT/US2012/058764 WO2013052673A2 (en) 2011-10-07 2012-10-04 Apparatus and method for the condensed phase production of trisilylamine

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CN103958401A CN103958401A (zh) 2014-07-30
CN103958401B true CN103958401B (zh) 2015-09-02

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US (1) US8568682B2 (enExample)
EP (2) EP2763934B1 (enExample)
JP (1) JP6175439B2 (enExample)
KR (1) KR101970850B1 (enExample)
CN (1) CN103958401B (enExample)
CA (1) CA2851242C (enExample)
SG (1) SG11201401185VA (enExample)
TW (2) TW201731765A (enExample)
WO (1) WO2013052673A2 (enExample)

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US9446958B2 (en) 2011-10-07 2016-09-20 L'Air Liquide Societe Anonyme L'Etude Et L'Exploitation Des Procedes Georges Claude Apparatus and method for the condensed phase production of trisilylamine
US9701540B2 (en) 2011-10-07 2017-07-11 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Apparatus and method for the condensed phase production of trisilylamine
JP5877702B2 (ja) * 2011-12-14 2016-03-08 株式会社ニューフレアテクノロジー 成膜装置および成膜方法
US20130209343A1 (en) * 2012-02-10 2013-08-15 American Air Liquide, Inc. Liquid phase synthesis of trisilylamine
WO2014181194A2 (en) * 2013-03-28 2014-11-13 L'air Liquide Societe Anonyme Pour I'etude Et L'exploitation Des Procedes Georges Claude Apparatus and method for the condensed phase production of trisilylamine
DE102013209802A1 (de) * 2013-05-27 2014-11-27 Evonik Industries Ag Verfahren zur gekoppelten Herstellung von Trisilylamin und Polysilazanen mit einer Molmasse bis 500 g/mol
US9284198B2 (en) 2013-06-28 2016-03-15 Air Products And Chemicals, Inc. Process for making trisilylamine
US9920077B2 (en) * 2013-09-27 2018-03-20 L'Air Liquide, SociétéAnonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Amine substituted trisilylamine and tridisilylamine compounds and synthesis methods thereof
DE102014204785A1 (de) * 2014-03-14 2015-09-17 Evonik Degussa Gmbh Verfahren zur Herstellung von reinem Trisilylamin
US11124876B2 (en) 2015-03-30 2021-09-21 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Si-containing film forming precursors and methods of using the same
US9777025B2 (en) 2015-03-30 2017-10-03 L'Air Liquide, Société pour l'Etude et l'Exploitation des Procédés Georges Claude Si-containing film forming precursors and methods of using the same
KR102752515B1 (ko) * 2015-12-18 2025-01-10 나타 세미컨덕터 머티리얼스 컴퍼니, 리미티드 오가노아미노실란의 제조 방법 및 오가노아미노실란으로부터 실릴아민을 제조하는 방법
US10192734B2 (en) 2016-12-11 2019-01-29 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploration des Procédés Georges Claude Short inorganic trisilylamine-based polysilazanes for thin film deposition
CN108394876B (zh) * 2017-02-07 2021-04-02 新疆晶硕新材料有限公司 氮硅烷及其生产方法、氮化硅及其生产方法
CN108147378B (zh) * 2018-02-07 2019-08-20 浙江博瑞电子科技有限公司 一种三甲基硅烷基胺的精制方法
DE112019007830T5 (de) 2019-10-22 2022-06-30 Linde Gmbh Systeme und Verfahren zur Herstellung von Trisilylamin
KR102435330B1 (ko) * 2020-08-21 2022-08-23 에스케이스페셜티 주식회사 트리실릴아민의 제조 장치 및 제조 방법
CN114409547A (zh) * 2022-01-27 2022-04-29 浙江普洛康裕制药有限公司 一种金刚烷胺的连续化生产方法及装置
CN115947317A (zh) * 2022-10-18 2023-04-11 洛阳中硅高科技有限公司 制备三甲硅烷基胺的系统及方法
CN115591259B (zh) * 2022-12-12 2023-04-07 天津绿菱气体有限公司 一种利用副产物再生三甲硅烷基胺的反应装置及方法

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US3927057A (en) * 1973-05-29 1975-12-16 Shinetsu Chemical Co Method for the preparation of organosilylamines
US20080319148A1 (en) * 2004-04-30 2008-12-25 Sumitomo Chemical Company, Limited Process for producing modified particle; carrier; catalyst component for addition polymerization; process for producing catalyst for addition polymerization; and process for producing addition polymer
US20110136347A1 (en) * 2009-10-21 2011-06-09 Applied Materials, Inc. Point-of-use silylamine generation

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US3809713A (en) 1973-03-01 1974-05-07 Union Carbide Corp Process for producing silazane compounds
JPS54135098A (en) * 1978-04-06 1979-10-19 Youngu Yun Sun Cylinder lock
JPS608967B2 (ja) * 1978-04-11 1985-03-07 旭硝子株式会社 窒化珪素を製造する方法
US4397828A (en) * 1981-11-16 1983-08-09 Massachusetts Institute Of Technology Stable liquid polymeric precursor to silicon nitride and process
US5132354A (en) * 1990-06-15 1992-07-21 Ethyl Corporation Silicon nitride precursor polymer
US5968611A (en) 1997-11-26 1999-10-19 The Research Foundation Of State University Of New York Silicon nitrogen-based films and method of making the same
JP4358492B2 (ja) * 2002-09-25 2009-11-04 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード 熱化学気相成長法によるシリコン窒化物膜またはシリコンオキシ窒化物膜の製造方法
JP4622350B2 (ja) * 2004-04-30 2011-02-02 住友化学株式会社 改質された粒子およびその製造方法、担体、付加重合用触媒成分、付加重合用触媒および付加重合体の製造方法
JP5589295B2 (ja) * 2009-03-30 2014-09-17 宇部興産株式会社 含窒素シラン化合物粉末及びその製造方法
WO2010141551A1 (en) * 2009-06-04 2010-12-09 Voltaix, Llc. Apparatus and method for the production of trisilylamine
US8461367B2 (en) 2010-01-15 2013-06-11 Shin-Etsu Chemical Co., Ltd. Preparation process of trisilylamine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3927057A (en) * 1973-05-29 1975-12-16 Shinetsu Chemical Co Method for the preparation of organosilylamines
US20080319148A1 (en) * 2004-04-30 2008-12-25 Sumitomo Chemical Company, Limited Process for producing modified particle; carrier; catalyst component for addition polymerization; process for producing catalyst for addition polymerization; and process for producing addition polymer
US20110136347A1 (en) * 2009-10-21 2011-06-09 Applied Materials, Inc. Point-of-use silylamine generation

Also Published As

Publication number Publication date
EP2763934B1 (en) 2019-09-04
US8568682B2 (en) 2013-10-29
CA2851242A1 (en) 2013-04-11
CN103958401A (zh) 2014-07-30
EP3590888A1 (en) 2020-01-08
CA2851242C (en) 2021-02-23
EP2763934A4 (en) 2015-04-22
JP6175439B2 (ja) 2017-08-02
KR20140098071A (ko) 2014-08-07
KR101970850B1 (ko) 2019-04-19
TW201731765A (zh) 2017-09-16
TW201326042A (zh) 2013-07-01
TWI579235B (zh) 2017-04-21
WO2013052673A2 (en) 2013-04-11
EP2763934A2 (en) 2014-08-13
JP2014528898A (ja) 2014-10-30
WO2013052673A3 (en) 2013-07-11
US20130089487A1 (en) 2013-04-11
SG11201401185VA (en) 2014-04-28
EP3590888B1 (en) 2022-02-16

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