CN103728505B - 检查装置 - Google Patents

检查装置 Download PDF

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Publication number
CN103728505B
CN103728505B CN201310481443.2A CN201310481443A CN103728505B CN 103728505 B CN103728505 B CN 103728505B CN 201310481443 A CN201310481443 A CN 201310481443A CN 103728505 B CN103728505 B CN 103728505B
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China
Prior art keywords
probe unit
mentioned
detection unit
unit mechanism
inspection
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CN201310481443.2A
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English (en)
Chinese (zh)
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CN103728505A (zh
Inventor
三浦佳
三浦一佳
高木也
高木一也
夏堀公士
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Micronics Japan Co Ltd
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Micronics Japan Co Ltd
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Publication of CN103728505A publication Critical patent/CN103728505A/zh
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  • Tests Of Electronic Circuits (AREA)
  • Liquid Crystal (AREA)
  • Measuring Leads Or Probes (AREA)
CN201310481443.2A 2012-10-15 2013-10-15 检查装置 Active CN103728505B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-228005 2012-10-15
JP2012228005A JP6084426B2 (ja) 2012-10-15 2012-10-15 検査装置

Publications (2)

Publication Number Publication Date
CN103728505A CN103728505A (zh) 2014-04-16
CN103728505B true CN103728505B (zh) 2016-06-22

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CN201310481443.2A Active CN103728505B (zh) 2012-10-15 2013-10-15 检查装置

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JP (1) JP6084426B2 (enExample)
CN (1) CN103728505B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104393837A (zh) * 2014-11-28 2015-03-04 苏州晟成光伏设备有限公司 高位el检查机放电触头连接机构
JP6422376B2 (ja) * 2015-03-06 2018-11-14 三菱電機株式会社 半導体装置検査用治具
KR102614075B1 (ko) * 2017-12-26 2023-12-14 주식회사 탑 엔지니어링 기판 검사 장치
KR102202033B1 (ko) * 2020-09-03 2021-01-12 주식회사 프로이천 캠승강식 오토 프로브장치
KR102202035B1 (ko) * 2020-09-03 2021-01-12 주식회사 프로이천 오토 프로브장치

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1343901A (zh) * 2000-09-12 2002-04-10 株式会社双晶技术 显示板或探测器块的支撑框架
CN1349100A (zh) * 2000-10-16 2002-05-15 株式会社双晶技术 显示板或电路板的检测装置
CN1530722A (zh) * 2003-03-10 2004-09-22 飞而康公司 自动探测设备用面板托架的液晶板自动把持装置及其方法
CN1598598A (zh) * 2003-09-18 2005-03-23 日本麦可罗尼克斯股份有限公司 显示面板的检查装置
CN1731203A (zh) * 2005-03-09 2006-02-08 飞而康公司 液晶显示器面板的检查装置及其检查方法
CN1847930A (zh) * 2005-04-15 2006-10-18 三星电子株式会社 液晶显示面板、液晶显示面板的检查装置以及检查方法
CN1967317A (zh) * 2005-11-15 2007-05-23 寇地斯股份有限公司 用于fpd的检查方法和装置
TW200844460A (en) * 2006-11-09 2008-11-16 Nihon Micronics Kk Probe positioning method, movable probe unit mechanism, and inspection apparatus
CN102436082A (zh) * 2010-08-24 2012-05-02 日本麦可罗尼克斯股份有限公司 平板状被检查体的检查装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100599A (ja) * 1982-11-30 1984-06-09 九州日本電気株式会社 半導体素子製造用自動選別装置
JPS59100600A (ja) * 1982-11-30 1984-06-09 九州日本電気株式会社 半導体素子製造用自動選別装置
JPS61272946A (ja) * 1985-05-28 1986-12-03 Nec Corp 半導体検査装置
JPH03252571A (ja) * 1990-03-01 1991-11-11 Tokyo Electron Ltd 基板の検査装置
JPH04177849A (ja) * 1990-11-13 1992-06-25 Nec Kyushu Ltd プロービング装置
JP2000180807A (ja) * 1998-12-15 2000-06-30 Micronics Japan Co Ltd 液晶基板の検査装置
JP2002222839A (ja) * 2001-01-29 2002-08-09 Advantest Corp プローブカード
JP2007285727A (ja) * 2006-04-12 2007-11-01 Tokyo Cathode Laboratory Co Ltd プローブカード配置ユニット及びプローブカードを有する測定装置
JP2010122092A (ja) * 2008-11-20 2010-06-03 Toshiba Corp プローブカード

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1343901A (zh) * 2000-09-12 2002-04-10 株式会社双晶技术 显示板或探测器块的支撑框架
CN1349100A (zh) * 2000-10-16 2002-05-15 株式会社双晶技术 显示板或电路板的检测装置
CN1530722A (zh) * 2003-03-10 2004-09-22 飞而康公司 自动探测设备用面板托架的液晶板自动把持装置及其方法
CN1598598A (zh) * 2003-09-18 2005-03-23 日本麦可罗尼克斯股份有限公司 显示面板的检查装置
CN1731203A (zh) * 2005-03-09 2006-02-08 飞而康公司 液晶显示器面板的检查装置及其检查方法
CN1847930A (zh) * 2005-04-15 2006-10-18 三星电子株式会社 液晶显示面板、液晶显示面板的检查装置以及检查方法
CN1967317A (zh) * 2005-11-15 2007-05-23 寇地斯股份有限公司 用于fpd的检查方法和装置
TW200844460A (en) * 2006-11-09 2008-11-16 Nihon Micronics Kk Probe positioning method, movable probe unit mechanism, and inspection apparatus
CN102436082A (zh) * 2010-08-24 2012-05-02 日本麦可罗尼克斯股份有限公司 平板状被检查体的检查装置

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JP2014081234A (ja) 2014-05-08
JP6084426B2 (ja) 2017-02-22
CN103728505A (zh) 2014-04-16

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