CN103711697B - 干式真空泵装置和在该干式真空泵所使用的控制装置 - Google Patents

干式真空泵装置和在该干式真空泵所使用的控制装置 Download PDF

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Publication number
CN103711697B
CN103711697B CN201310460434.5A CN201310460434A CN103711697B CN 103711697 B CN103711697 B CN 103711697B CN 201310460434 A CN201310460434 A CN 201310460434A CN 103711697 B CN103711697 B CN 103711697B
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CN
China
Prior art keywords
limit value
current limit
inverter
pump
motor
Prior art date
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Application number
CN201310460434.5A
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English (en)
Chinese (zh)
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CN103711697A (zh
Inventor
岩崎弘
岩崎弘一
中泽敏治
吉田真也
大山敦
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Ebara Corp
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Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Priority to CN201710586825.XA priority Critical patent/CN107237752B/zh
Publication of CN103711697A publication Critical patent/CN103711697A/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/22—Fluid gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S415/00—Rotary kinetic fluid motors or pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
CN201310460434.5A 2012-10-05 2013-09-30 干式真空泵装置和在该干式真空泵所使用的控制装置 Active CN103711697B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710586825.XA CN107237752B (zh) 2012-10-05 2013-09-30 干式真空泵装置和真空排气系统

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-222878 2012-10-05
JP2012222878A JP6050081B2 (ja) 2012-10-05 2012-10-05 ドライ真空ポンプ装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201710586825.XA Division CN107237752B (zh) 2012-10-05 2013-09-30 干式真空泵装置和真空排气系统

Publications (2)

Publication Number Publication Date
CN103711697A CN103711697A (zh) 2014-04-09
CN103711697B true CN103711697B (zh) 2017-11-10

Family

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CN201310460434.5A Active CN103711697B (zh) 2012-10-05 2013-09-30 干式真空泵装置和在该干式真空泵所使用的控制装置
CN201710586825.XA Active CN107237752B (zh) 2012-10-05 2013-09-30 干式真空泵装置和真空排气系统

Family Applications After (1)

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CN201710586825.XA Active CN107237752B (zh) 2012-10-05 2013-09-30 干式真空泵装置和真空排气系统

Country Status (4)

Country Link
JP (1) JP6050081B2 (enrdf_load_stackoverflow)
KR (1) KR101707267B1 (enrdf_load_stackoverflow)
CN (2) CN103711697B (enrdf_load_stackoverflow)
TW (1) TWI601881B (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107524608B (zh) * 2016-06-22 2019-11-01 泓记精密股份有限公司 电动燃油泵浦
JP6944249B2 (ja) * 2017-01-27 2021-10-06 株式会社荏原製作所 給水装置
JP2018178846A (ja) * 2017-04-12 2018-11-15 株式会社荏原製作所 真空ポンプ装置の運転制御装置、及び運転制御方法
FI20175411A1 (fi) * 2017-05-08 2018-11-09 Lappeenrannan Teknillinen Yliopisto Menetelmä ja ohjausjärjestelmä tyhjiöpumpun säätämiseksi
DE202018003585U1 (de) * 2018-08-01 2019-11-06 Leybold Gmbh Vakuumpumpe
CN111756296B (zh) * 2019-03-29 2022-06-17 安川电机（中国）有限公司 变频器及其输出电压的控制方法、真空系统的控制方法
KR102376859B1 (ko) * 2020-09-28 2022-03-22 주식회사 플랜 반도체 제조 설비의 배기 유체 처리 시스템 및 방법
JP7189394B1 (ja) * 2021-11-04 2022-12-13 株式会社アルバック 真空ポンプ、真空ポンプの制御方法、真空ポンプ用電力変換装置、圧縮機用電力変換装置および圧縮機
GB2619964B (en) * 2022-06-24 2024-12-25 Edwards Ltd Method for detection of a bearing condition of a vacuum pump
CN115145201B (zh) * 2022-07-19 2023-03-28 长沙昌佳自动化设备有限公司 一种干式真空泵专用控制器
CN116641881B (zh) * 2023-04-25 2024-01-23 北京通嘉宏瑞科技有限公司 真空泵控制方法、装置、计算机设备和存储介质

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1514133A (zh) * 2002-12-18 2004-07-21 株式会社丰田自动织机 真空泵的控制装置
US20050052146A1 (en) * 2003-09-10 2005-03-10 Osamu Someya Motor control system and vacuum pump equipped with the motor control system

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5963394A (ja) * 1982-10-04 1984-04-11 Tokuda Seisakusho Ltd 真空排気装置
JPH05202888A (ja) * 1992-01-29 1993-08-10 Hitachi Ltd ドライ真空ポンプの駆動制御方法とその装置並びにドライ真空ポンプ用電源装置
JPH06346892A (ja) * 1993-06-10 1994-12-20 Hitachi Ltd ドライ真空ポンプ装置
JPH11287195A (ja) * 1998-03-31 1999-10-19 Ebara Corp 可変速駆動ターボ形ポンプの特性制御装置
US6920946B2 (en) * 2001-09-27 2005-07-26 Kenneth D. Oglesby Inverted motor for drilling rocks, soils and man-made materials and for re-entry and cleanout of existing wellbores and pipes
JP2003172292A (ja) * 2001-12-04 2003-06-20 Shimadzu Corp ターボ分子ポンプ駆動用電源装置
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
GB0508872D0 (en) * 2005-04-29 2005-06-08 Boc Group Plc Method of operating a pumping system
GB0520470D0 (en) * 2005-10-07 2005-11-16 Boc Group Plc Method of operating a pumping system
KR100654813B1 (ko) * 2005-12-09 2006-12-08 삼성전자주식회사 Ｂｌｄｃ 모터의 속도제어 방법 및 냉장고의 냉장 또는냉동 속도 제어 방법
JP2007262906A (ja) * 2006-03-27 2007-10-11 Nabtesco Corp ２段式真空ポンプ
JP4425253B2 (ja) * 2006-08-30 2010-03-03 ダイキン工業株式会社 油圧ユニットおよび油圧ユニットにおけるモータの速度制御方法
JP5107013B2 (ja) * 2007-12-13 2012-12-26 三菱重工業株式会社 インバータ一体型電動圧縮機
JP5424784B2 (ja) * 2009-08-28 2014-02-26 株式会社荏原製作所 ドライ真空ポンプ用電源装置、及びその運転方法
JP5448677B2 (ja) * 2009-09-25 2014-03-19 株式会社荏原製作所 真空ポンプシステム、及びその運転方法
JP2011226364A (ja) * 2010-04-19 2011-11-10 Ebara Corp ドライ真空ポンプ装置の冷却構造、及び冷却方法
TWI491804B (zh) * 2010-04-19 2015-07-11 Ebara Corp 乾真空泵裝置及該乾真空泵裝置之冷卻方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1514133A (zh) * 2002-12-18 2004-07-21 株式会社丰田自动织机 真空泵的控制装置
US20050052146A1 (en) * 2003-09-10 2005-03-10 Osamu Someya Motor control system and vacuum pump equipped with the motor control system

Also Published As

Publication number Publication date
KR101707267B1 (ko) 2017-02-15
TW201418578A (zh) 2014-05-16
JP6050081B2 (ja) 2016-12-21
JP2014074380A (ja) 2014-04-24
CN103711697A (zh) 2014-04-09
CN107237752B (zh) 2019-05-28
KR20140044734A (ko) 2014-04-15
CN107237752A (zh) 2017-10-10
TWI601881B (zh) 2017-10-11

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