CN103528866B - 碳支持膜的制备方法 - Google Patents
碳支持膜的制备方法 Download PDFInfo
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- CN103528866B CN103528866B CN201310489148.1A CN201310489148A CN103528866B CN 103528866 B CN103528866 B CN 103528866B CN 201310489148 A CN201310489148 A CN 201310489148A CN 103528866 B CN103528866 B CN 103528866B
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- film
- supporting film
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- microslide
- carbon
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- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 36
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 35
- 238000002360 preparation method Methods 0.000 title claims abstract description 33
- 239000002184 metal Substances 0.000 claims abstract description 23
- 229910052751 metal Inorganic materials 0.000 claims abstract description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 12
- 239000007921 spray Substances 0.000 claims abstract description 12
- 238000004458 analytical method Methods 0.000 claims abstract description 9
- 239000002904 solvent Substances 0.000 claims abstract description 9
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 54
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 27
- 229910052802 copper Inorganic materials 0.000 claims description 27
- 239000010949 copper Substances 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 14
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical group CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000005516 engineering process Methods 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 6
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 6
- 239000012498 ultrapure water Substances 0.000 claims description 6
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 6
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- 230000003068 static effect Effects 0.000 claims description 3
- 150000001721 carbon Chemical class 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000000523 sample Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000002493 microarray Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000080 wetting agent Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 230000029087 digestion Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
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Abstract
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Claims (6)
Priority Applications (1)
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CN201310489148.1A CN103528866B (zh) | 2013-10-18 | 2013-10-18 | 碳支持膜的制备方法 |
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CN201310489148.1A CN103528866B (zh) | 2013-10-18 | 2013-10-18 | 碳支持膜的制备方法 |
Publications (2)
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CN103528866A CN103528866A (zh) | 2014-01-22 |
CN103528866B true CN103528866B (zh) | 2016-01-20 |
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CN201310489148.1A Active CN103528866B (zh) | 2013-10-18 | 2013-10-18 | 碳支持膜的制备方法 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105140083B (zh) * | 2015-06-24 | 2017-05-10 | 中国科学院生物物理研究所 | 透射电子显微镜载网制备方法 |
CN108660426B (zh) * | 2018-04-12 | 2019-08-23 | 中国科学院生物物理研究所 | 一种镍钛非晶合金微阵列支持膜的制备方法 |
CN110838428A (zh) * | 2018-08-17 | 2020-02-25 | 河南中镜科仪科技有限公司 | 一种透射电镜芳华膜载网及其制备方法 |
CN110702703B (zh) * | 2019-09-06 | 2020-09-29 | 中国科学院生物物理研究所 | 一种透射电镜分析用微阵列超薄支持膜的制备方法 |
CN111370279B (zh) * | 2020-03-18 | 2021-10-01 | 北京大学 | 电镜阵列载网的制备方法 |
CN113109370B (zh) * | 2021-03-29 | 2022-04-26 | 北京大学 | 一种多孔透射电镜支撑膜及超平整石墨烯电镜载网及其制备方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1487551A (zh) * | 2003-08-12 | 2004-04-07 | 攀枝花钢铁有限责任公司钢铁研究院 | 一种碳支持膜的制备方法 |
US6821692B1 (en) * | 1996-08-23 | 2004-11-23 | Clondiag Chip Technologies Gmbh | Kind of thin films for microsystem technology and microstructuring and their use |
WO2007126165A1 (en) * | 2006-04-28 | 2007-11-08 | Korea Basic Science Institute | A method for manufacturing ultra-thin carbon supporting film |
CN102074444A (zh) * | 2011-01-19 | 2011-05-25 | 中国科学院青岛生物能源与过程研究所 | 一种透射分析用微孔薄膜的制备方法 |
WO2012094634A2 (en) * | 2011-01-07 | 2012-07-12 | Dune Sciences, Inc. | Functionalized carbon membranes |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7713053B2 (en) * | 2005-06-10 | 2010-05-11 | Protochips, Inc. | Reusable template for creation of thin films; method of making and using template; and thin films produced from template |
US20130112610A1 (en) * | 2011-09-23 | 2013-05-09 | Brigham Young University, a Non-Profit Organization | Microsieve using carbon nanotubes |
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2013
- 2013-10-18 CN CN201310489148.1A patent/CN103528866B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6821692B1 (en) * | 1996-08-23 | 2004-11-23 | Clondiag Chip Technologies Gmbh | Kind of thin films for microsystem technology and microstructuring and their use |
CN1487551A (zh) * | 2003-08-12 | 2004-04-07 | 攀枝花钢铁有限责任公司钢铁研究院 | 一种碳支持膜的制备方法 |
WO2007126165A1 (en) * | 2006-04-28 | 2007-11-08 | Korea Basic Science Institute | A method for manufacturing ultra-thin carbon supporting film |
WO2012094634A2 (en) * | 2011-01-07 | 2012-07-12 | Dune Sciences, Inc. | Functionalized carbon membranes |
CN102074444A (zh) * | 2011-01-19 | 2011-05-25 | 中国科学院青岛生物能源与过程研究所 | 一种透射分析用微孔薄膜的制备方法 |
Non-Patent Citations (1)
Title |
---|
《第六章透射电镜样品制备技术》;郭素枝;《电子显微镜技术与应用》;20081031;94-96 * |
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CN103528866A (zh) | 2014-01-22 |
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Inventor after: Sun Fei Inventor after: Ji Gang Inventor before: Sun Fei |
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Effective date of registration: 20180213 Address after: 100101 Beijing city Chaoyang District Datun Road No. 15 Patentee after: Institute of Biophysics, Chinese Academy of Sciences Address before: 215500 Jindu Road, Changshu high and New Technology Industrial Development Zone, Suzhou, Suzhou, Jiangsu Province, 1 Patentee before: Lan Tuo bio tech ltd, Jiangsu |
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