CN103298768A - 压电材料、压电元件、排液头、超声波马达和除尘装置 - Google Patents
压电材料、压电元件、排液头、超声波马达和除尘装置 Download PDFInfo
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- CN103298768A CN103298768A CN2011800626024A CN201180062602A CN103298768A CN 103298768 A CN103298768 A CN 103298768A CN 2011800626024 A CN2011800626024 A CN 2011800626024A CN 201180062602 A CN201180062602 A CN 201180062602A CN 103298768 A CN103298768 A CN 103298768A
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
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- C—CHEMISTRY; METALLURGY
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
- C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
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- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
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- C—CHEMISTRY; METALLURGY
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- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
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- C04B35/26—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on ferrites
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- C04B35/475—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on bismuth titanates
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- C—CHEMISTRY; METALLURGY
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- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/6261—Milling
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Abstract
本发明提供实现高压电性能和高居里温度的压电材料。此外,提供使用压电材料的压电元件、排液头、超声波马达和除尘装置。该压电材料包括由下述通式(1)表示的钙钛矿型金属氧化物:xBaTiO3-yBiFeO3-zBi(M0.5Ti0.5)O3 (1),其中,M表示从Mg和Ni中选择的至少一种元素,x满足0.25≤x≤0.75,y满足0.15≤y≤0.70,z满足0.05≤z≤0.60,并且满足x+y+z=1。
Description
技术领域
本发明涉及压电材料,更具体地,涉及不含铅的压电材料。本发明还涉及使用该压电材料的压电元件、排液头、超声波马达和除尘装置。
背景技术
通常使用的压电材料是ABO3-型钙钛矿型金属氧化物例如钛酸锆酸铅(以下称为“PZT”)。但是,认为含有铅作为A-位点元素的PZT可能引起环境问题。因此,已希望具有不含铅的钙钛矿型金属氧化物的压电材料。
作为具有不含铅的钙钛矿型金属氧化物的压电材料,已知钛酸钡。PTL1公开了采用电阻加热/两步烧结技术制备的钛酸钡。该专利文献记载了采用两步烧结技术烧结纳米尺寸的钛酸钡粉末时,能够得到具有优异的压电性的陶瓷。但是,钛酸钡具有如下问题:由于其居里温度低,为125℃,因此其不适合在高温下的器件运转。
此外,作为增加钛酸钡的居里温度的尝试,NPL1公开了钛酸钡和铁酸铋的固溶体。但是,随着铁酸铋的固溶量增加,居里温度增加,同时压电性能显著地降低。
换言之,在不含铅的钙钛矿型金属氧化物的压电材料中难以同时实现高压电性能和高居里温度。
引用列表
专利文献
PTL1:日本专利申请公开No.2008-150247
NPL1:“Journal of Applied Physics”2008,第87卷,第2期,第855-862页
发明内容
技术问题
为了解决这样的问题而完成了本发明,其目的在于提供能够实现高压电性能和高居里温度的压电材料。此外,本发明提供使用该压电材料的压电元件、排液头、超声波马达和除尘装置。
问题的解决方案
根据本发明,提供压电材料,包括由下述通式(1):xBaTiO3-yBiFeO3-zBi(M0.5Ti0.5)O3表示的钙钛矿型金属氧化物,其中M表示从Mg和Ni中选择的至少一种元素,x满足0.25≤x≤0.75,y满足0.15≤y≤0.70,z满足0.05≤z≤0.60,并且满足x+y+z=1。
根据本发明,提供压电材料,包括由下述通式(2):xBaTiO3-yBiFeO3-zBi(M0.5Ti0.5)O3表示的钙钛矿型金属氧化物,其中M表示从Mg和Ni中选择的至少一种元素,x满足0.10≤x<0.25,y满足0.15≤y≤0.30,z满足0.45≤z≤0.75,并且满足x+y+z=1。
根据本发明,提供压电材料,包括由下述通式(3):lBaTiO3-mBiFeO3-nBi(M0.5Ti0.5)O3表示的钙钛矿型金属氧化物,其中M表示从Mg和Ni中选择的至少一种元素,l满足0<l<1,m满足0<m<1,n满足0<n<1,并且满足l+m+n=1,其中该压电材料为陶瓷,并且该陶瓷的晶粒具有扩散相变结构。
根据本发明,提供压电元件,包括:第一电极;压电材料;和第二电极,其中该压电材料包括上述的压电材料。
根据本发明的排液头使用上述的压电元件。
根据本发明的超声波马达使用上述的压电元件。
根据本发明的除尘装置使用上述的压电元件。
本发明的有利效果
根据本发明,能够提供实现高压电性能和高居里温度的压电材料。通过使用本发明的压电材料,能够提供具有与使用包括铅的压电材料的情形下的那些相等或高于其的喷嘴密度和排出性能的排液头。
通过使用本发明的压电材料,能够提供具有与使用包括铅的压电材料的情形下的那些相等或高于其的驱动力和耐久性的超声波马达。
通过使用本发明的压电材料,能够提供具有与使用包括铅的压电材料的情形下的那些相等或高于其的除尘效率的除尘装置。
附图说明
图1A和1B是表示本发明的压电材料的实施方案的相图。
图2A、2B和2C是本发明的压电材料的晶粒内的微观结构的概念图。
图3A和3B是表示本发明的排液头的结构的实施方案的示意图。
图4A和4B是表示本发明的超声波马达的结构的实施方案的示意图。
图5A和5B是表示本发明的除尘装置的实施方案的示意图。
图6A、6B和6C是表示图5A和5B中所示的本发明的压电元件的结构的示意图。
图7A和7B是表示本发明的除尘装置的振动原理的示意图。
图8是实施例3、4和13以及比较例5的X-射线衍射图。
图9是表示本发明的压电材料的组成的相图。
具体实施方式
以下对本发明的实施方案进行说明。
根据本发明,提供压电材料,包括由下述通式(1)表示的钙钛矿型金属氧化物:xBaTiO3-yBiFeO3-zBi(M0.5Ti0.5)O3(1),其中M表示从Mg和Ni中选择的至少一种元素,x满足0.25≤x≤0.75,y满足0.15≤y≤0.70,z满足0.05≤z≤0.60,并且满足x+y+z=1。
根据本发明,还提供压电材料,包括由下述通式(2)表示的钙钛矿型金属氧化物:xBaTiO3-yBiFeO3-zBi(M0.5Ti0.5)O3(2),其中M表示从Mg和Ni中选择的至少一种元素,x满足0.10≤x<0.25,y满足0.15≤y≤0.30,z满足0.45≤z≤0.75,并且满足x+y+z=1。
本发明的钙钛矿型金属氧化物是指如Iwanami PhysicochemicalDictionary,第5版(Iwanami Shoten,1998年2月20日出版)中记载的具有钙钛矿型结构的金属氧化物,该钙钛矿型结构是理想的立方结构。具有钙钛矿型结构的金属氧化物通常由ABO3的化学式表示。钙钛矿型金属氧化物中,元素A和B在晶胞中以离子的形式占据称为A位点和B位点的特定的位置。例如,在立方晶胞中,元素A位于立方体的顶点,而元素B位于体心。元素O作为氧的阴离子占据面心位置。
由通式(1)表示的金属氧化物是指由BaTiO3、BiFeO3和Bi(M0.5Ti0.5)O3表示的三种钙钛矿型金属氧化物的固溶体。通式(1)中,位于A位点的金属元素主要是Ba和Bi,并且位于B位点的金属元素是从Ti、Fe、Mg和Ni中选择的至少一种元素。
通式(1)中,A位点与B位点之间的元素含量比表示为1:1。但是,即使元素含量比轻微地迁移,只由钙钛矿型结构组成的单相状态也包括在本发明的范围内。例如,铅型压电材料中,公知过度使用A-位点Pb时或者在复合钙钛矿型结构中实际的B-位点元素比常常从化学计量比迁移。
例如,由使用X-射线衍射或电子衍射的结构分析,确定压电材料是钙钛矿型结构。
通式(1)中,表示BaTiO3的丰度的x的范围满足0.25≤x≤0.75。优选地,满足0.25≤x≤0.55。此外,通式(2)中,x的范围满足0.10≤x<0.25。如果x小于0.10,可发生钙钛矿型结构以外的晶相(以下,将该晶相称为“次级相”)。另一方面,如果x大于0.75,居里温度变得低于200℃,因此在高温区域中压电性可能消失。本说明书中,居里温度是指铁电性消失的温度。作为确定居里温度的方法,有使测定温度变化的同时直接测定铁电性消失的温度的方法和使测定温度变化的同时通过使用某频率的微交变磁场来测定介电常数以由此确定介电常数变得最大的温度的方法。
本发明的压电材料中希望的居里温度为200℃-500℃,更优选地,200℃-450℃。如果居里温度为200℃或更高,能够提供将该材料用于器件时特性变动小的材料。此外,如果居里温度为500℃或更低,能够提供将该材料用于元件时容易极化的材料。
通式(1)中,表示BiFeO3的丰度的y的范围满足0.15≤y≤0.70。优选地,满足0.20≤y≤0.70。此外,通式(2)中,y的范围满足0.15≤y≤0.30。如果y小于0.15,不管x取何值,由于下述原因而发生问题。具体地,如果y小于0.15并且x为0.5或更大,居里温度可能降低。此外,如果x小于0.5,可能产生次级相。另一方面,如果y大于0.70,绝缘性可能劣化。
通式(1)中,表示Bi(M0.5Ti0.5)O3的丰度的z的范围满足0.05≤z≤0.60。优选地,满足0.05≤z≤0.25。此外,通式(2)中,z的范围满足0.45≤z≤0.75。如果z小于0.05,不管x取何值,由于下述原因而发生问题。具体地,如果z小于0.05并且x为0.5或更大,居里温度可能降低。此外,如果x小于0.5,绝缘性可能劣化。另一方面,如果z大于0.75,可能产生次级相。
通式(1)中,Bi(M0.5Ti0.5)O3中的M表示从Mg和Ni中选择的至少一种元素。M可以只是Mg或者只是Ni,或者可包括Mg和Ni两者。Mg和Ni为二价,并且与四价Ti形成准三价离子,结果能够实现与三价Bi的电荷平衡。这种情况下,优选地,M与Ti之比为1:1。此外,通式(1)中,Bi(M0.5Ti0.5)O3中M和Ti的元素含量都表示为0.5。但是,即使该元素含量迁移到0.4-0.6的范围内的值,只由钙钛矿型结构构成的单相状态也包括在本发明的范围内。
此外,本发明的压电材料可包括特性调节成分和制造过程中包括的杂质成分。
通式(1)中,M表示从Mg和Ni中选择的至少一种元素。满足0.25≤x≤0.75、0.15≤y≤0.70和0.05≤z≤0.60时,压电常数d33 *为100(pm/V)或更大,并且居里温度为200℃或更高。在此,图1是本发明的压电材料的一个实施方案的相图,该图中上述范围由区域A表示。
本说明书中,压电常数d33 *是由电场畸变曲线的电场和畸变梯度确定的常数。其中,由于以下原因而添加符号*。通常使用的压电常数d33表示只是33-方向上的压电性。而该计算方法中,存在轻微的有助于33-方向以外的方向的可能性。根据本发明的压电材料,在通式(1)中,满足0.25≤x≤0.55、0.20≤y≤0.70和0.05≤z≤0.25。
通式(1)中,M是从Mg和Ni中选择的至少一种元素。满足0.25≤x≤0.55、0.20≤y≤0.70和0.05≤z≤0.25时,压电常数d33 *为200(pm/V)或更大,并且居里温度为200℃或更高。其中,上述范围由图1中的范围B表示。
图9表示上述区域A,其表示本发明的压电材料的组成,并且表示范围C,其同样表示本发明的压电材料的组成并且由通式(2)表示。具有对应于由通式(2)表示的范围C的组成的本发明的压电材料具有100(pm/V)或更大的压电常数d33 *和200℃或更高的居里温度。
本发明的压电材料含有从Mn和Cu中选择的至少一种,因此压电材料的绝缘性和密度得到改善。如果使压电材料的绝缘性改善,能够耐受施加高电场时的极化过程。因此,使电能与机械能之间的转换效率改善。此外,如果使压电材料的密度改善,则使压电性和机械强度改善。
优选地,根据本发明的压电材料以0.05质量%-3.0质量%含有从锰(Mn)和铜(Cu)中选择的至少一种元素。如果从Mn和Cu中选择的至少一种元素的量小于0.05质量%,可能使绝缘性和密度的改善降低,如果该量大于3.0质量%,可能产生次级相。
对用于本发明的压电材料中含有的Mn和Cu的原料并无特别限制。Mn的情况下,可使用二价Mn化合物或四价Mn化合物。同样地,Cu的情况下,可使用一价Cu化合物或二价Cu化合物。此外,可使用固体粉末或液体原料。Mn原料的实例包括氧化锰、二氧化锰、醋酸锰和碳酸锰。Cu材料的实例包括氧化铜和硝酸铜。
此外,对本发明的压电材料中含有的Mn和Cu的位置并无特别限制。Mn和Cu可含有在钙钛矿型结构的B位点或者可作为氧化物含有在晶粒间界以致能够预期相同的效果。关于根据本发明的压电材料,优选压电材料为陶瓷,该陶瓷的晶粒的平均当量圆直径为500nm-5μm,并且晶粒的最大当量圆直径为5μm-10μm。
本文中使用的术语“陶瓷”是指通过热处理而烧结的晶体颗粒的聚集体(也称为块体)或者所谓的多晶,其中其主要成分为金属氧化物。该术语也包括烧结后加工的产物。但是,该术语不包括任何粉末或粉末分散浆料。
本文中使用的“当量圆直径”是指在显微镜观察法中通常提及的“投影面积当量圆直径”并且表示具有与晶粒的投影面积相同的面积的圆的直径。本发明中,对该测定当量圆直径的方法并无特别限制。例如,通过使用偏光显微镜或扫描电子显微镜拍摄压电陶瓷的表面,并且对得到的拍摄图像进行图像处理,能够确定当量圆直径。确定晶粒的当量圆直径时的放大倍率为例如约5-5,000。取决于放大倍率,可选择性地使用光学显微镜和电子显微镜。不由陶瓷的表面的图像而由研磨的表面或截面的图像也能够确定当量圆直径。
本文中使用的“平均当量圆直径”是指对通过拍摄压电陶瓷而得到的拍摄图像进行图像处理所得到的当量圆直径的平均值。平均值可以体积平均或数平均,但优选数平均。
本文中使用的“最大当量圆直径”是指对通过拍摄压电陶瓷而得到的拍摄图像进行图像处理所得到的当量圆直径的最大值。
优选地,晶粒的平均当量圆直径为500nm-5μm。该范围内,存在如下优点:在压电材料的晶粒中容易存在后述的扩散相变结构。另一方面,如果平均当量圆直径小于500nm,密度可能降低以致不能获得充分的压电性。此外,如果平均当量圆直径大于5μm,机械强度可能劣化。
此外,优选晶粒的最大当量圆直径为5μm-10μm。该范围内,存在如下优点:在压电材料的晶粒中容易存在后述的扩散相变结构。另一方面,如果平均当量圆直径小于5μm,密度可能降低以致不能获得充分的压电性。此外,如果平均当量圆直径大于10μm,机械强度可能劣化。
关于本发明的压电材料,优选地,压电材料为陶瓷,构成陶瓷的晶粒具有扩散相变结构。
如果使用透射型电子显微镜(TEM)对本发明的压电材料进行结构分析,可知取决于组成区域,晶粒的微观结构不同。图2A-2C是本发明的压电材料中晶粒的微观结构的概念图,并且参照图2A-2C对该微观结构进行说明。作为晶粒的微观结构,有三种类型:图2A中所示的组成区域称为极性纳米区域(以下称为PNR),其中任意方向上几纳米的自发极化的非常局部的区域占主导;图2B中所示的组成区域(以下称为“畴区域(domain region)”),其中在任意方向上几十至几百纳米的自发极化的区域占主导;和图2C中所示的组成区域,其中PNR存在于畴区域中。本发明中,将图2C中所示的、PNR存在于畴区域中的微观结构称为“扩散相变结构(Diffuse Phase Transition)”。此外,图2A中所示的区域也称为驰豫区域(relaxor region)。
接下来,参照图1A和1B对该微观结构存在于何种组成区域中进行说明。
PNR占主导的区域存在于图1A和1B中所示的y=0且x≤0.5的范围内和z=0且x≥0.4的范围内。由于该区域中矫顽电场小,因此特征在于,获得良好的对于电场的位移响应。此外,压电性倾向于增加。但是,介电常数的频率分散大,因此即使在恒定温度下,压电性对于频率也变得不稳定。这是不优选的。
畴区域存在于图1A和1B中所示的y=0且x>0.5的范围内和z=0且x<0.4的范围内。该区域中,成为压电性的起源的畴的结构稳定,因此在恒定温度下压电性稳定。但是,由于矫顽电场大,对施加的电场的位移响应可能慢。这是不优选的。
图1A中所示的区域A中存在扩散相变结构。该区域具有其中PNR占主导的区域的压电性高的特征和畴区域的压电性稳定的特征。这是优选的。作为特定的特性,压电性d33 *为100(pm/V)或更高,并且居里温度为200℃或更高。
本发明的压电材料是由下述通式(3)表示的钙钛矿型金属氧化物制成的压电材料:
lBaTiO3-mBiFeO3-nBi(M0.5Ti0.5)O3 (3),
其中M表示从Mg和Ni中选择的至少一种元素,l满足0<l<1,m满足0<m<1,n满足0<n<1,并且满足l+m+n=1。此外,该压电材料为陶瓷,并且该陶瓷的晶粒具有扩散相变结构。
由于晶粒具有扩散相变结构,因此压电性高且稳定,而且居里温度高。
通式(3)中,A位点和B位点之间的元素含量比表示为1:1。但是,即使元素含量比迁移到约0.9:1.1,只由钙钛矿型结构构成的单相状态包括在本发明的范围内。
此外,对本发明的压电材料的制造方法并无特别限制。
制造陶瓷时,能够采用在常压下将氧化物、碳酸盐、硝酸盐、草酸盐等的固体粉末烧结的通常的方法。此外,能够采用切割烧结的陶瓷并且将它们重叠以粘接的方法或者使陶瓷粉末成为片状并且将它们重叠的带式铸塑法(tape casting method)以致实现多层结构。
原料由金属化合物例如钡(Ba)化合物、钛(Ti)化合物、铋(Bi)化合物、铁(Fe)化合物、镁(Mg)化合物、镍(Ni)化合物、Mn化合物和Cu化合物制成。
能够使用的Ba化合物的实例包括氧化钡、碳酸钡、草酸钡、醋酸钡、硝酸钡和钛酸钡。
能够使用的Ti化合物的实例包括氧化钛。
能够使用的Bi化合物的实例包括氧化铋和硝酸铋。
能够使用的Fe化合物的实例包括氧化铁、氯化铁和硝酸铁。
能够使用的Mg化合物的实例包括氧化镁、草酸镁、氯化镁和碳酸镁。
能够使用的Ni化合物的实例包括氧化镍、硝酸镍、氯化镍和草酸镍。
能够使用的Mn化合物的实例包括碳酸锰、氧化锰、二氧化锰和醋酸锰。
能够使用的Cu化合物的实例包括氧化铜、硝酸铜和硫酸铜。
此外,对烧结法并无特别限制。烧结法的实例包括使用电炉的烧结法、电加热法、微波烧结法、毫米波烧结法和热等静压(HIP)法。
对烧结温度并无限制,但优选为压电陶瓷的晶体能够充分生长的温度。优选的烧结温度为800℃-1,150℃,更优选为900℃-1,030℃。在上述范围内的温度下烧结的压电陶瓷显示良好的压电性。
为了使通过烧结工艺得到的压电陶瓷的特性稳定,优选在上述范围内使烧结温度保持恒定以进行烧结工艺1小时-24小时。烧结的压电陶瓷的相对密度优选为90%或更高,更优选95%或更高。这是因为,如果相对密度低于90%,压电陶瓷的相对介电常数显著降低,并且机械强度也降低。用于增加相对密度的方式的实例包括添加锰或铜的方法和使用带式铸塑法以制造成型体的方法。
以下对使用本发明的压电材料的压电元件进行说明。
根据本发明的压电元件是至少包括第一电极、压电材料和第二电极的压电元件,并且该压电材料是上述的压电材料。
第一电极和第二电极均由具有约5nm-2,000nm的厚度的导电层形成。对导电层的材料并无特别限制,并且可以是压电元件中通常使用的材料。这样的材料的实例包括金属例如Ti、Pt、Ta、Ir、Sr、In、Sn、Au、Al、Fe、Cr、Ni、Pd、Ag和Cu以及这些金属的氧化物。第一电极和第二电极各自可由这些材料中的一种形成或者可通过将其两种以上层叠而得到。第一电极和第二电极可由彼此不同的材料形成。
对第一电极和第二电极的制造方法并无限制。第一电极和第二电极可通过对金属糊进行烘焙或者通过溅射、气相沉积等而形成。此外,第一电极和第二电极可图案化为所需的形状而使用。
图3A和3B均是表示本发明的排液头的构成的实施方案的示意图。如图3A和3B中所示,本发明的排液头是包括本发明的压电元件101的排液头。压电元件101是至少包括第一电极1011、压电材料1012和第二电极1013的压电元件。如图3B中所示,根据需要将压电材料1012图案化。
图3B是排液头的示意图。该排液头包括排出口105、独立液室102、用于将独立液室102与排出口105连接的连通孔106、液室隔壁104、共同液室107、隔膜103和压电元件101。图3B中为矩形的压电元件101均可以是矩形以外的形状例如椭圆形、圆形或平行四边形。通常,压电材料1012均具有与独立液室102的形状相符的形状。
参照图3A对本发明的排液头中包括的压电元件101的附近详细说明。图3A是图3B中所示的排液头的宽度方向上的压电元件的截面图。将压电元件101的截面形状表示为矩形,但可以是梯形或倒梯形。图3A中,将第一电极1011用作下部电极,将第二电极1013用作上部电极。但是,第一电极1011和第二电极1013的配置并不限于上述。例如,可将第一电极1011用作下部电极,或者可用作上部电极。同样地,第二电极1013可用作上部电极,或者可用作下部电极。此外,在隔膜103与下部电极之间可存在缓冲层108。
应指出的是,由器件的制造方法引起那些名称上的不同,在任何情况下能够获得本发明的效果。
排液头中,由于压电材料1012的膨胀和收缩,隔膜103垂直波动以将压力施加于独立液室102内的液体。结果,将该液体从排出口105排出。本发明的排液头能够用于打印机用途或电子器件的制造。
隔膜103具有1.0μm-15μm、优选地1.5μm-8μm的厚度。对隔膜的材料并无限制,优选为Si。用于隔膜的Si可用B或P掺杂。此外,隔膜上的缓冲层和电极层可用作隔膜的一部分。
缓冲层108具有5nm-300nm、优选10nm-200nm的厚度。
用当量圆直径表示,排出口105的大小为5μm-40μm。排出口105的形状可以是圆形,或者可以是星形、正方形或三角形。
接下来,对使用本发明的压电元件的超声波马达进行说明。
图4A和4B是表示本发明的超声波马达的构成的实施方案的示意图。
图4A表示超声波马达,其中本发明的压电元件由单板形成。该超声波马达包括换能器201、因由压力弹簧(未示出)施加的压力而与换能器201的滑动表面接触的转子202和经设置以与转子202一体化的输出轴203。换能器201由金属弹性环2011、本发明的压电元件2012和将压电元件2012与弹性环2011粘结的有机粘合剂2013(例如环氧或氰基丙烯酸酯系粘合剂)形成。本发明的压电元件2012由在第一电极(未示出)和第二电极(未示出)之间夹持的压电材料形成。
将相位彼此相差π/2的两相交流电压施加于本发明的压电元件,导致在换能器201中产生弯曲行波,因此换能器201的滑动表面上的每个点经历椭圆运动。转子202与换能器201的滑动表面压接时,转子202受到来自换能器201的摩擦力以在与弯曲行波相反的方向上旋转。将被驱动体(未示出)与输出轴203接合,并且通过转子202的旋转力驱动。
将电压施加于压电材料导致起因于横向压电效应的压电材料的膨胀和收缩。将弹性体例如金属与压电元件接合时,压电材料的膨胀和收缩使弹性体弯曲。本文中所述类型的超声波马达利用该原理。
接下来,将包括具有层叠结构的压电元件的超声波马达示于图4B中。换能器204由在管状金属弹性体2041之间夹持的层叠压电元件2042形成。层叠压电元件2042是由多个层叠压电材料(未示出)形成的元件,并且包括在该层叠体的外表面上的第一电极和第二电极以及在该层叠体的内表面上的内部电极。将金属弹性体2041用螺栓栓接以致可将压电元件2042夹持在该弹性体之间并且由该弹性体固定。于是,形成换能器204。
将相位彼此不同的交流电压施加于压电元件2042,使换能器204产生彼此正交的两个振动。将两个振动合成以形成用于驱动换能器204的顶部的圆振动。应指出的是,在换能器204的上部形成狭窄的圆周槽以使用于驱动的振动的位移增大。
在来自加压用弹簧206的压力下,使转子205与换能器204接触以获得用于驱动的摩擦力。转子205由轴承可旋转地支撑。
接下来,对使用本发明的压电元件的除尘装置进行说明
图5A和5B是表示本发明的除尘装置的实施方案的示意图。除尘装置310包括板状压电元件330和隔膜320。对隔膜320的材料并无限制。将除尘装置310用于光学器件的情况下,透明材料或反射材料能够用作隔膜320的材料。压电元件330包括压电材料331、第一电极332和第二电极333。
图6A-6C是表示图5A和5B中所示的压电元件330的结构的示意图。图6A和6C分别表示压电元件330的前表面结构和后表面结构。图6B表示侧表面结构。如图6A-6C中所示,压电元件330包括压电材料331、第一电极332和第二电极333。第一电极332和第二电极333经设置以与压电材料331的板表面相对。图6C中,将其上设置第一电极332的压电元件330的前表面称为第一电极表面336。图6A中,将其上设置第二电极333的压电元件330的前表面称为第二电极表面337。
在此,本发明中的电极表面是指其上设置电极的压电元件的表面。例如,如图6A-6C中所示,第一电极332可周围延伸到第二电极表面337。
如图5A和5B中所示,关于压电元件330和隔膜320,将隔膜320的板表面固定于压电元件330的第一电极表面336。驱动压电元件330时,在压电元件330与隔膜320之间产生应力,以致在隔膜中产生面外振动。本发明的除尘装置310是利用隔膜320的面外振动将附着于隔膜320的表面的异物例如灰尘除去的装置。该面外振动是指隔膜在光轴方向上,即隔膜的厚度方向上移动的弹性振动。
图7A和7B是表示本发明的除尘装置310的振动原理的示意图。图7A表示将具有相同相位的交流电场施加于一对左右压电元件330以致在隔膜320中产生面外振动的状态。形成一对左右压电元件330的压电陶瓷的极化方向与压电元件330的厚度方向相同,并且以第7振动模式驱动除尘装置310。图7B表示将以180°具有相反相位的交流电压施加于一对左右压电元件330以致在隔膜320中产生面外振动的状态。以第6振动模式驱动除尘装置310。本发明的除尘装置310是通过选择性地利用至少2种振动模式从而能够有效地将附着于隔膜的表面的灰尘除去的装置。
如上所述,本发明的压电元件适合应用于排液头、超声波马达和除尘装置。
本发明提供能够实现高压电性能和高居里温度的新型压电材料。应指出的是,利用其介电特性,本发明的压电材料能够用于各种用途例如电容器用材料、存储器用材料和传感器用材料。
通过使用本发明的压电材料,能够提供具有与使用含铅的压电材料的情形相同或更高的喷嘴密度和排出力的排液头。
通过使用本发明的压电材料,能够提供具有与使用含铅的压电材料的情形相同或更高的驱动力和耐久性的超声波马达。
通过使用本发明的压电材料,能够提供具有与使用含铅的压电材料的情形相同或更高的除尘效率的除尘装置。
本发明的压电材料能够用于器件例如超声波换能器、压电致动器、压电传感器和铁电存储器以及排液头和马达。
以下通过实施例对本发明的压电材料更具体地说明。但是,本发明不受下述实施例限制。
(BaTiO3-BiFeO3-Bi(Mg0.5Ti0.5)O3的实例)(实施例1-16和比较例1-6)
(制造方法)
作为原料,使用钛酸钡(由Sakai Chemical Industry Co.,Ltd.制造;粒径为100nm)、氧化铋(由Rare Metallic Co.,Ltd.制造;纯度为99.999%)、氧化铁(由Rare Metallic Co.,Ltd.制造;纯度为99.9%)、氧化镁(由Rare Metallic Co.,Ltd.制造;纯度为99.9%)和氧化钛(由Ishihara Sangyo Kaisha,Ltd.制造;纯度为99.9%)。通过秤重而实现表1的组成,将乙醇用作溶剂,并且在球磨机中进行湿式混合24小时。然后,在80℃下进行干燥,并且在800-900℃的温度下将混合粉末煅烧6小时。将煅烧的粉末粉碎并且再次使用乙醇作为溶剂进行球磨机湿式混合16小时。然后,添加2质量%的聚乙烯醇(PVA)作为粘结剂,进行球磨机混合1小时,然后在80℃下进行干燥以致得到了造粒粉。
接下来,将得到的造粒粉粉碎并且用250μm网眼的筛进行粒径选择。将粒径选择后得到的粉末填充到模具中并且以200MPa压力单轴加压,以制成具有10mm的直径的盘状成型体。
然后,在700℃下从得到的成型体中将粘结剂除去10小时,并且在900-1,000℃的温度下将该成型体烧结6小时以致得到了烧结体。然后,将得到的烧结体研磨以具有0.4mm的厚度。
(结构评价)
通过其中由ICP重量分析形成了校正曲线的X-射线荧光分析(XRF),评价研磨的烧结体的组成。
通过X-射线衍射(XRD)的2θ-θ测定,评价烧结体的晶体结构。此外,使用TEM进行详细的结构分析。
采用阿基米德法评价烧结体的密度。作为密度的测定值与由X-射线衍射测定的晶体结构分析确定的理论密度之比,确定相对密度。
通过SEM观察烧结体的晶粒的平均当量圆直径和最大当量圆直径,并且作为数平均确定平均当量圆直径。
(电特性评价)
为了评价研磨的烧结体的电特性,将烧结体加工成具有0.4mm的厚度、15mm的长度和4mm的宽度的条状,并且在前后表面上形成银电极以制造压电元件。
通过由电场畸变曲线的电场和畸变梯度确定压电常数d33*来评价压电性。作为畸变值,采用施加60kV/cm的电场时的值,并且计算压电常数。
此外,由介电常数的温度特性的峰位置确定居里温度。通过以3℃/分钟升温的同时以1MHz/10℃测定介电常数来确定介电常数的温度特性。
将这些评价的结果示于表1中。表1中,组成栏x、y和z分别表示BaTiO3、BiFeO3和Bi(Mg0.5Ti0.5)O3的摩尔比。晶体结构栏中,其中只存在钙钛矿型结构的状态表示为“○”,其中存在次级相的状态表示为“×”。
由荧光X-射线分析的结果发现,在烧结后组成也如秤重那样。结构评价中,由X-射线衍射结构分析(2θ-θ测定)发现比较例6以外的实施例中只存在钙钛矿型结构。其中,将实施例3、4和13以及比较例5的X-射线衍射图示于图8中。此外,在只具有钙钛矿型结构的全部样品中,作为相对密度,密度为90%或更高。此外,在实施例的样品中,晶粒的平均当量圆直径为0.5μm-5.0μm,并且晶粒的最大当量圆直径为5.2μm-9.8μm。于是,作为使用TEM的结构分析的结果,在全部实施例的样品中确认了扩散相变结构。关于比较例,在比较例1、2、3和6中PNR占主导,而在比较例4和5中畴区域占主导。
关于电特性,在实施例的组成范围内的全部样品中,压电常数d33 *为100(pm/V)或更大,居里温度为200℃或更高。
(实施例17-23:含有Mn或Cu的材料)
(制造方法)
作为原料,使用钛酸钡(由Sakai Chemical Industry Co.,Ltd.制造;粒径为100nm)、氧化铋(由Rare Metallic Co.,Ltd.制造;纯度为99.999%)、氧化铁(由Rare Metallic Co.,Ltd.制造;纯度为99.9%)、氧化镁(由Rare Metallic Co.,Ltd.制造;纯度为99.9%)、氧化钛(由Ishihara Sangyo Kaisha,Ltd.制造;纯度为99.9%)、碳酸锰和氧化铜。通过秤重而实现表2的组成,并且采用与实施例1-16中相同的方法制造烧结体。
(结构评价)
对于研磨的烧结体,通过采用与实施例1-16中相同的方法,对组成、晶体结构、密度以及晶粒的平均当量圆直径和最大当量圆直径进行了评价。
(电特性评价)
采用与实施例1-16中相同的方法对研磨的烧结体的电特性进行了评价。
将这些评价的结果示于表2中。表2中,组成栏x、y和z分别表示BaTiO3、BiFeO3和Bi(Mg0.5Ti0.5)O3的摩尔比。此外,Mn量和Cu量分别表示相对于100质量份xBaTiO3-yBiFeO3-zBi(Mg0.5Ti0.5)O3的质量。此外,晶体结构栏中,将其中只存在钙钛矿型结构的状态表示为“○”。
由荧光X-射线分析的结果发现,烧结后组成也如秤重那样。
结构评价中,由X-射线衍射结构分析发现所有样品中只存在钙钛矿型结构。此外,在所有样品中,作为相对密度,密度为94%或更高,其为比不含锰或铜的实施例1-16中的值高的值。然后,在所有的样品中评价晶粒的平均当量圆直径和最大当量圆直径。平均当量圆直径为1.0μm-4.2μm,并且最大当量圆直径为5.4μm-9.9μm。此外,作为使用TEM的结构分析的结果,在所有的样品中确认了扩散相变结构。
关于电特性,在所有的样品中,压电常数d33 *为110(pm/V)或更大,并且居里温度为200℃或更高。
(BaTiO3-BiFeO3-Bi(Ni0.5Ti0.5)O3的实例)(实施例24-33和比较例7-10)
(制造方法A:通常烧结法)
作为原料,使用钛酸钡(由Sakai Chemical Industry Co.,Ltd.制造;粒径为100nm)、氧化铋(由Rare Metallic Co.,Ltd.制造;纯度为99.999%)、氧化铁(由Rare Metallic Co.,Ltd.制造;纯度为99.9%)、氧化镍(由Rare Metallic Co.,Ltd.制造;纯度为99.9%)和氧化钛(由Ishihara Sangyo Kaisha,Ltd.制造;纯度为99.9%)。通过秤重实现了表3的组成,并且使用乙醇作为溶剂在球磨机中进行湿式混合24小时。然后,在80℃下进行干燥,并且在750-850℃的温度下将该混合粉末煅烧6小时。
将煅烧的粉末粉碎并且再次使用乙醇作为溶剂在球磨机中进行湿式混合16小时。接下来,在80℃下将该混合粉末干燥,然后在850-900℃的温度下再次煅烧6小时。然后,添加2质量%的PVA作为粘结剂,进行球磨机混合1小时。然后,在80℃下进行干燥,于是得到了造粒粉。
接下来,将得到的造粒粉粉碎并且用250μm网眼的筛进行粒径选择。将粒径选择后得到的粉末填充到模具中并且以200MPa压力单轴加压,以制成具有10mm的直径的盘状成型体。
然后,在500℃下从得到的成型体中将粘结剂除去10小时,并且在950-1,030℃的温度下将该成型体烧结6小时以致得到了烧结体。然后,将得到的烧结体研磨以具有0.4mm的厚度。
(制造方法B:带式铸塑法)
作为原料,使用钛酸钡(由Sakai Chemical Industry Co.,Ltd.制造;粒径为100nm)、氧化铋(由Rare Metallic Co.,Ltd.制造;纯度为99.999%)、氧化铁(由Rare Metallic Co.,Ltd.制造;纯度为99.9%)、氧化镍(由Rare Metallic Co.,Ltd.制造;纯度为99.9%)和氧化钛(由Ishihara Sangyo Kaisha,Ltd.制造;纯度为99.9%)。通过秤重实现了表3的组成,并且使用乙醇作为溶剂在球磨机中进行湿式混合24小时。然后,在80℃下进行干燥,并且在750-850℃的温度下将该混合粉末煅烧6小时。
将煅烧的粉末粉碎并且再次使用乙醇作为溶剂在球磨机中进行湿式混合16小时。接下来,在80℃下将该混合粉末干燥,然后在850-900℃的温度下再次煅烧6小时。然后,将55体积%甲苯和45体积%乙醇的混合溶液添加到该混合粉末中以成为90质量%。相对于粉末量,均以6质量%向其添加作为粘结剂的具有400,000的平均分子量的聚乙烯基吡咯烷酮(PVP)和增塑剂(邻苯二甲酸丁酯)。在球磨机中进行该混合物的湿式混合5小时以制造浆料。
接下来,使用刮刀装置,将该浆料形成为具有40-45μm的厚度的带状并且干燥。进而,将该带材切成2×2cm2大小的片材,将它们的40片层叠并且在80℃下以100kg/cm2(9.8MPa)的压力接合10分钟以致得到了具有1.8mm的厚度的成型体。
然后,在650℃下从得到的成型体中将粘结剂除去10小时,并且在950-1,030℃的温度下将该成型体烧结6小时以致得到了烧结体。然后,研磨得到的烧结体以具有0.4mm的厚度。
(结构评价)
对于研磨的烧结体,通过采用与实施例1-23中相同的方法,对组成、晶体结构、密度以及晶粒的平均当量圆直径和最大当量圆直径进行了评价。
(电特性评价)
采用与实施例1-23中相同的方法对研磨的烧结体的电特性进行了评价。
将这些评价的结果示于表3中。表3中,组成栏x、y和z分别表示BaTiO3、BiFeO3和Bi(Ni0.5Ti0.5)O3的摩尔比。晶体结构栏中,将其中只存在钙钛矿型结构的状态表示为“○”,将其中存在次级相的状态表示为“×”。
由荧光X-射线分析的结果发现,烧结后组成也如秤重那样。
结构评价中,由X-射线衍射结构分析发现,比较例10以外的实施例中只存在钙钛矿型结构。此外,在只具有钙钛矿型结构的所有样品中,作为相对密度,密度为90%或更高,可知通过使用带式铸塑法相对密度增加为97%或更高。此外,在实施例的样品中,晶粒的平均当量圆直径为0.9μm-5.0μm,并且晶粒的最大当量圆直径为6.1μm-9.8μm。然后,作为使用TEM的结构分析的结果,在实施例的所有样品中确认了扩散相变结构。关于比较例,在比较例7和8中PNR为主导,而在比较例9和10中畴区域为主导。
关于电特性,在实施例的组成范围内的所有样品中,压电常数d33*为105(pm/V)或更大,并且居里温度为200℃或更高。
(实施例34-39:含有Mn或Cu的材料)
(制造方法)
作为原料,使用钛酸钡(由Sakai Chemical Industry Co.,Ltd.制造;粒径为100nm)、氧化铋(由Rare Metallic Co.,Ltd.制造;纯度为99.999%)、氧化铁(由Rare Metallic Co.,Ltd.制造;纯度为99.9%)、氧化镍(由Rare Metallic Co.,Ltd.制造;纯度为99.9%)、氧化钛(由Ishihara Sangyo Kaisha,Ltd.制造;纯度为99.9%)、碳酸锰和氧化铜。通过秤重实现了表4的组成,并且采用与实施例1-33中相同的方法制造烧结体。
(结构评价)
对于研磨的烧结体,通过采用与实施例1-33中相同的方法,对组成、晶体结构、密度以及晶粒的平均当量圆直径和最大当量圆直径进行了评价。
(电特性评价)
采用与实施例1-33中相同的方法对研磨的烧结体的电特性进行了评价。
将这些评价的结果示于表4中。表4中,组成栏x、y和z分别表示BaTiO3、BiFeO3和Bi(Ni0.5Ti0.5)O3的摩尔比。此外,Mn量和Cu量分别表示相对于100质量份xBaTiO3-yBiFeO3-zBi(Ni0.5Ti0.5)O3的质量。此外,晶体结构栏中,将其中只存在钙钛矿型结构的状态表示为“○”。
由荧光X-射线分析的结果发现,烧结后组成也如秤重那样。
结果评价中,由X-射线衍射结构分析发现在所有样品中只存在钙钛矿型结构。此外,在所有样品中,作为相对密度,密度为94%或更高,其为比不含锰或铜而采用相同的方法制造的实施例24-33中的样品高的值。然后,在所有样品中,评价晶粒的平均当量圆直径和最大当量圆直径。平均当量圆直径为0.5μm-4.0μm,并且最大当量圆直径为6.1μm-10.0μm。此外,作为使用TEM的结构分析的结果,在所有样品中确认了扩散相变结构。
关于电特性,在所有样品中,压电常数d33 *为100(pm/V)或更大,并且居里温度为200℃或更高。
(BaTiO3-BiFeO3-Bi(Mg0.5Ti0.5)O3的另一实例)(实施例40-45和比较例11)
(制造方法)
通过使用与实施例1-16中相同的原料,通过秤重实现了表5的组成,并且采用与实施例1-16中相同的方法制造烧结体。
(结构评价)
对于研磨的烧结体,通过使用与实施例1-39中相同的方法,对组成、晶体结构、密度以及晶粒的平均当量圆直径和最大当量圆直径进行了评价。
(电特性评价)
采用与实施例1-39中相同的方法,对研磨的烧结体的电特性进行了评价。
将这些评价的结果示于表5中。表5中,组成栏x、y和z分别表示BaTiO3、BiFeO3和Bi(Mg0.5Ti0.5)O3的摩尔比。晶体结构栏表示其中只存在钙钛矿型结构的状态。
由荧光X-射线分析的结果发现,烧结后组成也如秤重那样。
结构评价中,由X-射线衍射结构分析发现所有样品中只存在钙钛矿型结构。此外,所有样品中,作为相对密度,密度为90%或更高。然后,在所有样品中对晶粒的平均当量圆直径和最大当量圆直径进行了评价。平均当量圆直径为3.9μm-7.5μm,并且最大当量圆直径为8.4μm-13.7μm。此外,作为使用TEM的结构分析的结果,在所有样品中确认了扩散相变结构。
关于电特性,所有的样品中压电常数d33 *为100(pm/V)或更大,居里温度为200℃或更高。
(实施例46-51:含有Mn或Cu的材料)
(制造方法)
通过使用与实施例17-23相同的原料,通过秤重实现了表6的组成,并且采用与实施例17-23中相同的方法,制造烧结体。
(结构评价)
对于研磨的烧结体,通过使用与实施例1-45中相同的方法,对组成、晶体结构、密度以及晶粒的平均当量圆直径和最大当量圆直径进行了评价。
(电特性评价)
采用与实施例1-45中相同的方法对研磨的烧结体的电特性进行了评价。
将这些评价的结果示于表6中。表6中,组成栏x、y和z分别表示BaTiO3、BiFeO3和Bi(Mg0.5Ti0.5)O3的摩尔比。此外,Mn量和Cu量分别表示相对于100质量份xBaTiO3-yBiFeO3-zBi(Mg0.5Ti0.5)O3的质量。此外,晶体结构栏中,将其中只存在钙钛矿型结构的状态表示为“○”。
由荧光X-射线分析的结果发现,烧结后组成也如秤重那样。
结构评价中,由X-射线衍射结构分析发现所有样品中只存在钙钛矿型结构。此外,所有样品中,作为相对密度,密度为94%或更高,其为比不含锰或铜的实施例40-45中的值高的值。然后,在所有样品中对晶粒的平均当量圆直径和最大当量圆直径进行了评价。平均当量圆直径为3.1μm-6.5μm,并且最大当量圆直径为8.2μm-10.0μm。此外,作为使用TEM的结构分析的结果,在所有样品中确认了扩散相变结构。
关于电特性,在全部样品中压电常数d33 *为100(pm/V)或更大,居里温度为200℃或更高。
(BaTiO3-BiFeO3-Bi(Ni0.5Ti0.5)O3的另一实例)(实施例52-57和比较例11)
(制造方法)
通过使用与实施例24-33中相同的原料,通过秤重实现了表7的组成,并且采用与实施例24-33中相同的方法制造烧结体。
(结构评价)
对于研磨的烧结体,通过采用与实施例1-51中相同的方法,对组成、晶体结构、密度以及晶粒的平均当量圆直径和最大当量圆直径进行了评价。
(电特性评价)
采用与实施例1-51中相同的方法对研磨的烧结体的电特性进行了评价。
将这些评价的结果示于表7中。表7中,组成栏x、y和z分别表示BaTiO3、BiFeO3和Bi(Ni0.5Ti0.5)O3的摩尔比。晶体结构栏中,将其中只存在钙钛矿型结构的状态表示为“○”。
由荧光X-射线分析的结果发现,烧结后组成也如秤重那样。
结构评价中,由X-射线衍射结构分析发现所有样品中这存在钙钛矿型结构。此外,在所有样品中,作为相对密度,密度为90%或更高。然后,在所有样品中,对晶粒的平均当量圆直径和最大当量圆直径进行了评价。平均当量圆直径为3.4μm-7.9μm,并且最大当量圆直径为7.2μm-14.6μm。此外,作为使用TEM的结构分析的结果,在所有样品中确认了扩散相变结构。
关于电特性,在所有样品中,压电常数d33 *为100(pm/V)或更大,并且居里温度为200℃或更高。
(实施例58-63:含有Mn或Cu的材料)
(制造方法)
通过使用与实施例34-39中相同的原料,通过秤重实现了表8的组成,并且采用与实施例34-39中相同的方法制造烧结体。
(结构评价)
对于研磨的烧结体,通过采用与实施例1-57中相同的方法,对组成、晶体结构、密度以及晶粒的平均当量圆直径和最大当量圆直径进行了评价。
(电特性评价)
采用与实施例1-57中相同的方法,对研磨的烧结体的电特性进行了评价。
将这些评价的结果示于表8中。表8中,组成栏x、y和z分别表示BaTiO3、BiFeO3和Bi(Ni0.5Ti0.5)O3的摩尔比。此外,Mn量和Cu量分别表示相对于100质量份xBaTiO3-yBiFeO3-zBi(Ni0.5Ti0.5)O3的质量。此外,晶体结构栏中,将其中只存在钙钛矿型结构的状态表示为“○”。
由荧光X-射线分析的结果发现,烧结后组成也如秤重的那样。
结构评价中,由X-射线衍射结构分析发现所有样品中只存在钙钛矿型结构。此外,所有样品中,作为相对密度,密度为94%或更高,其为比不含锰或铜的实施例52-57中的值高的值。然后,在所有样品中,对晶粒的平均当量圆直径和最大当量圆直径进行了评价。平均当量圆直径为2.8μm-6.5μm,并且最大当量圆直径为6.2μm-9.8μm。此外,作为使用TEM的结构分析的结果,在所有样品中确认了扩散相变结构。
关于电特性,所有样品中,压电常数d33 *为100(pm/V)或更大,并且居里温度为200℃或更高。
(根据实施例8的排液头)
通过使用与实施例8中相同的压电材料,制备图3A和3B中所示的排液头。确认响应输入的电信号而从排液头排出墨。
(根据实施例20的超声波马达)
通过使用与实施例20中相同的压电材料,制备图4A和4B中所示的超声波马达。响应于交流电压的施加,确认马达的旋转行为。
(根据实施例30的除尘装置)
通过使用与实施例30中相同的压电材料,制备图5A和5B中所示的除尘装置。喷射塑料珠后施加交流电压时,确认令人满意的除尘率。
根据本发明,能够提供不含对环境有害的成分、具有高压电性能的压电材料。此外,本发明能够提供使用该压电材料的压电元件、排液头、超声波马达和除尘装置。
附图标记列表
101 压电元件
102 独立液室
103 隔膜
104 液室隔壁
105 排出口
106 连通孔
107 共同液室
108 缓冲层
1011 第一电极
1012 压电材料
1013 第二电极
201 换能器
202 转子
203 输出轴
204 换能器
205 转子
206 弹簧
2011 弹性环
2012 压电元件
2013 有机粘合剂
2041 金属弹性体
2042 层叠压电元件
310 除尘装置
320 隔膜
330 压电元件
331 压电材料
332 第一电极
333 第二电极
336 第一电极表面
337 第二电极表面
尽管已参照例示实施方案对本发明进行了说明,但应理解本发明并不限于所公开的例示实施方案。下述权利要求的范围应给予最宽泛的解释以包括所有这样的变形以及等同的结构和功能。
本申请要求于2010年12月28日提交的日本专利申请No.2010-292819和于2011年9月6日提交的日本专利申请No.2011-194072的权益,在此通过引用将它们全文并入本文。
Claims (11)
1.压电材料,包括由下述通式(1)表示的钙钛矿型金属氧化物:
xBaTiO3-yBiFeO3-zBi(M0.5Ti0.5)O3 (1)
其中M表示从Mg和Ni中选择的至少一种元素,x满足0.25≤x≤0.75,y满足0.15≤y≤0.70,z满足0.05≤z≤0.60,并且满足x+y+z=1。
2.根据权利要求1的压电材料,其中通式(1)中x满足0.25≤x≤0.55,y满足0.20≤y≤0.70,和z满足0.05≤z≤0.25。
3.压电材料,包括由下述通式(2)表示的钙钛矿型金属氧化物:
xBaTiO3-yBiFeO3-zBi(M0.5Ti0.5)O3 (2)
其中M表示从Mg和Ni中选择的至少一种元素,x满足0.10≤x<0.25,y满足0.15≤y≤0.30,z满足0.45≤z≤0.75,并且满足x+y+z=1。
4.根据权利要求1-3的任一项的压电材料,其中该压电材料以0.05质量%-3.0质量%含有从Mn和Cu中选择的至少一种元素。
5.根据权利要求1-4的任一项的压电材料,其中该压电材料包括陶瓷,其中该陶瓷的晶粒的平均当量圆直径为500nm-5μm,和其中该晶粒的最大当量圆直径为5μm-10μm。
6.根据权利要求1-5的任一项的压电材料,其中该压电材料包括陶瓷,和其中该陶瓷的晶粒具有扩散相变结构。
7.压电材料,包括由下述通式(3)表示的钙钛矿型金属氧化物:
lBaTiO3-mBiFeO3-nBi(M0.5Ti0.5)O3 (3),
其中M表示从Mg和Ni中选择的至少一种元素,l满足0<l<1,m满足0<m<1,n满足0<n<1,并且满足l+m+n=1,
其中该压电材料包括陶瓷,和
其中该陶瓷的晶粒具有扩散相变结构。
8.压电元件,包括:
第一电极;
压电材料;和
第二电极,
其中该压电材料包括根据权利要求1-7的任一项所述的压电材料。
9.排液头,包括:
液室,该液室包括振动部,该振动部包括根据权利要求8的压电元件;和
与该液室连通的排出口。
10.超声波马达,包括:
包括根据权利要求8的压电元件的振动体;和
与该振动体接触的移动体。
11.除尘装置,包括振动部,该振动部包括根据权利要求8的压电元件。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010292819 | 2010-12-28 | ||
JP2010-292819 | 2010-12-28 | ||
JP2011194072A JP5864168B2 (ja) | 2010-12-28 | 2011-09-06 | 圧電材料、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置 |
JP2011-194072 | 2011-09-06 | ||
PCT/JP2011/080555 WO2012091147A1 (en) | 2010-12-28 | 2011-12-22 | Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device |
Publications (2)
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EP2658826B1 (en) | 2015-02-25 |
CN103298768B (zh) | 2014-12-03 |
KR20130111610A (ko) | 2013-10-10 |
EP2658826A1 (en) | 2013-11-06 |
US9306149B2 (en) | 2016-04-05 |
KR101541022B1 (ko) | 2015-08-13 |
JP5864168B2 (ja) | 2016-02-17 |
JP2012148954A (ja) | 2012-08-09 |
WO2012091147A1 (en) | 2012-07-05 |
US20130270965A1 (en) | 2013-10-17 |
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