CN103240992A - 喷墨头和喷墨头的制造方法 - Google Patents
喷墨头和喷墨头的制造方法 Download PDFInfo
- Publication number
- CN103240992A CN103240992A CN2012105075293A CN201210507529A CN103240992A CN 103240992 A CN103240992 A CN 103240992A CN 2012105075293 A CN2012105075293 A CN 2012105075293A CN 201210507529 A CN201210507529 A CN 201210507529A CN 103240992 A CN103240992 A CN 103240992A
- Authority
- CN
- China
- Prior art keywords
- electrode
- substrate
- ink gun
- framework
- resin molding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000000758 substrate Substances 0.000 claims abstract description 47
- 229920005989 resin Polymers 0.000 claims abstract description 38
- 239000011347 resin Substances 0.000 claims abstract description 38
- 238000000465 moulding Methods 0.000 claims description 31
- 239000000853 adhesive Substances 0.000 claims description 20
- 230000001070 adhesive effect Effects 0.000 claims description 20
- 238000009434 installation Methods 0.000 claims description 17
- 238000007639 printing Methods 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000000976 ink Substances 0.000 description 50
- 229920000052 poly(p-xylylene) Polymers 0.000 description 7
- 239000012528 membrane Substances 0.000 description 5
- URLKBWYHVLBVBO-UHFFFAOYSA-N Para-Xylene Chemical group CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 description 4
- 239000004519 grease Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229920005601 base polymer Polymers 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1606—Coating the nozzle area or the ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14362—Assembling elements of heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
本发明提供一种油墨不会顺着树脂膜与电极接触的喷墨头以及喷墨头的制造方法。该喷墨头具备:基板;压电元件,具有被形成为梳齿状的侧壁、由侧壁形成的压力室和设置在压力室内侧的电极即压力室电极;基板电极,是与压力室电极连接并配置在基板上的电极;框体,设置在基板电极上,并具有用于安装掩膜的安装部;树脂膜,端部延伸到安装部;喷嘴板,经由树脂膜安装到框体上;以及粘合剂层,覆盖树脂膜的端部,并与掩膜粘合。
Description
相关申请的交叉参考
申请人基于并要求于2012年2月14日向日本专利局提交的申请号为2012-029156的发明专利申请的优先权益,并将其全部内容结合于此,作为参考。
技术领域
本发明的实施方式涉及喷墨头和喷墨头的制造方法。
背景技术
喷墨头具备由上下粘合的极性不同的压电元件形成的多个侧壁和设置于该侧壁的电极。通过向电极施加的电压使侧壁发生弹性形变,以通过该变形使侧壁所形成的压力室的容积发生变化。通过该压力室的容积变化来进行油墨的抽吸和喷吐。
在此,由于有可能使用水溶性油墨,因此需要对电极进行绝缘。现有技术中,利用例如派瑞林(Parylene)(注册商标)等对二甲苯类聚合物为代表的树脂覆盖电极。但是油墨有可能从该树脂膜的端部侵入腐蚀电极。
针对这个问题,提出了在树脂膜的端部配置油脂(grease)的技术。
但是,即使是利用该技术,一旦油墨与油脂接触,油脂有可能溶于油墨,油墨可能会与电极接触。
现有技术文献
专利文献
专利文献1:日本特开2009-202473号公报
发明内容
因此,谋求油墨不会顺着树脂膜与电极接触的喷墨头和喷墨头的制造方法。
为了解决上述课题,本发明的一个实施方式提供一种喷墨头,用于形成图像,具备:基板;压电元件,具有被形成为梳齿状的侧壁、由侧壁形成的压力室和设置在压力室内侧的电极即压力室电极;基板电极,是与压力室电极连接并配置在基板上的电极;框体,设置在基板电极上,并具有用于安装围绕外周的掩膜的安装部;树脂膜,覆盖压力室电极和基板电极,且端部延伸到安装部;喷嘴板,具有喷吐油墨的喷墨孔,并经由树脂膜安装到框体上;以及粘合剂层,覆盖树脂膜的端部,并与掩膜粘合。
附图说明
图1是包含喷墨头的喷墨头主体部的立体图。
图2是喷墨头的立体图。
图3是喷墨头的沿图2中AA线的截面图。
图4是喷墨头的沿图2中BB线的截面图。
图5是图4的用虚线圈起来的部分的放大图。
具体实施方式
以下利用附图对喷墨头及喷墨头的制造方法的一个实施方式进行详细说明。
本实施方式的用于形成图像的喷墨头具备:基板;压电元件,具有被形成为梳齿状的侧壁、由侧壁形成的压力室和设置在压力室内侧的电极即压力室电极;基板电极,是与压力室电极连接并配置在基板上的电极;框体,设置在基板电极上,并具有用于安装围绕外周的掩膜的安装部;树脂膜,覆盖压力室电极和基板电极,且端部延伸到安装部;喷嘴板,具有喷吐油墨的喷墨孔,并经由树脂膜安装到框体上;以及粘合剂层,覆盖树脂膜的端部,并与掩膜粘合。
图1是包含本实施方式的喷墨头的喷墨头主体部100的立体图。如图1所示,喷墨头主体部100具备配置在前端的喷墨头101和支撑喷墨头101的掩膜201。
图2是喷墨头101的立体图。如图2所示,喷墨头101具备由铝等形成的基板11、设置在基板11上的压电元件12、以围绕压电元件12方式配置的框体13以及具有喷墨孔15并覆盖压电元件12和框体13的喷嘴板14。
喷墨头101在由基板11、压电元件12、框体13以及喷嘴板14围成的空间具有共通液体室16。
图3是喷墨头101的沿图2中AA线的截面图。如图3所示,压电元件12具备利用粘合剂12B粘合极性不同的压电元件12A1、12A2并形成梳齿状的多个侧壁12S。侧壁12S在间隙形成压力室12R。
在侧壁12S和压力室12R的底面,压力室电极12C作为电极被配置在表面。还设置有覆盖压力室电极12C的树脂膜300。
压力室12R与共通液体室16连通。压力室电极12C与向压电元件12施加电压的驱动元件连接。喷嘴板14的喷墨孔15设置在与压力室12R对应的位置。
压电元件12例如可以使用PZT(锆钛酸铅)。树脂膜例如可以使用派瑞林(注册商标)等对二甲苯类聚合物。如果使用派瑞林(注册商标),可以是任何等级。
一旦被施加电压,侧壁12S发生变形,通过该变形,压力室12R的容积发生变化。利用该容积变化来进行油墨的抽吸和从喷墨孔15的喷吐。
图4是喷墨头101的沿图2中BB线的截面图。如图4所示,喷墨头101被以喷嘴板14侧朝向记录介质侧的方式安装到掩膜201上。
图5是图4的用虚线圈起来的部分的放大图。如图5所示,喷墨头101具备:基板11;配置在基板11上的电极即基板电极304;设置在基板电极304上并具有用于安装掩膜201的安装部13A的框体13;端部延伸到安装部13A的树脂膜300;经由树脂膜300被安装在框体13上的喷嘴板14;经由各向异性导电膜(ACF)303连接到基板电极304的驱动电路连接部305;以及覆盖树脂膜300的端部并粘合到掩膜201的粘合剂层301。
优选安装部13A比框体13的上端低一段,形状无所谓。
树脂膜300覆盖压力室电极12C和基板电极304,还覆盖从基板11的一部分到框体13A的部分。即,树脂膜300的端部被配置在框体13的外周端部的内侧且安装部13A的内侧端部的外侧。
形成粘合剂层301的粘合剂使用耐油墨性的粘合剂。该耐油墨性的粘合剂例如可以使用环氧树脂类的粘合剂。利用点胶机来涂布耐油墨性的粘合剂。
基板电极304和框体13、框体13和喷嘴板14通过粘合剂302被粘合。基板电极304与压力室电极12C连接。
对于本实施方式的喷墨头101,树脂膜300的端部全部被粘合剂层301覆盖。因此,油墨不会触到树脂膜300的端部。
下面,就本实施方式的喷墨头101的制造方法进行说明。
(1)在基板11上粘合一对压电元件12。利用夹具对一对压电元件12的距离进行定位。
(2)切削压电元件12,形成作为压力室12R的槽。可以利用金刚石轮进行该切削。
(3)在槽的内部形成压力室电极12C。压力室电极12C利用例如通过无电解电镀生成镍薄膜来形成。
(4)在基板11上粘合框体13。
(5)在压电元件12上形成树脂膜300。树脂膜300是通过CVD(化学气相沉积法)来成膜的。
树脂膜300一直形成到框体13的安装部13A。
如果树脂使用派瑞林(注册商标),则使派瑞林以厚度为1μm~10μm的方式成膜。另外,派瑞林(注册商标)可以是任意等级。
在不需要生成树脂膜300的部位例如通过聚酰亚胺胶带等遮蔽胶带进行遮蔽。或者,也可以在形成了树脂膜300之后,利用夹具来实现只覆盖需要的部位,通过基于等离子处理的蚀刻来除去不需要的树脂膜300。
(6)将通过激光照射等预先形成有喷墨孔15的喷嘴板14粘合到框体13上。
(7)通过各向异性导电膜303将基板电极304和驱动电路连接部305热压接合(热压焊)。
(8)通过耐油墨性的粘合剂将掩膜201与框体13粘合。
利用耐油墨性粘合剂形成的粘合剂层301覆盖树脂膜300的端部。粘合剂层301也可以被形成为覆盖驱动电路连接部305和驱动电路连接部305与框体13之间的基板电极304。
(9)在基板11上粘合油墨供给管和油墨排出管。
如上所述,本实施方式的喷墨头101具备包括:基板11;压电元件12,具有被形成为梳齿状的侧壁12S、由侧壁12S形成的压力室12R和设置在压力室12R内侧的电极即压力室电极12C;基板电极304,与压力室电极12C连接,并被配置在基板11上;并被配置在基板11上,框体13,被设置在基板电极304上,并具有用于安装掩膜201的安装部13A;树脂膜300,其端部延伸到安装部13A;喷嘴板14,经由树脂膜300安装在框体13上;以及粘合剂层301,覆盖树脂膜300的端部,并与掩膜201粘合。
因此,具有油墨不会顺着树脂膜接触到电极的效果。
虽然对几个实施方式进行了说明,但只是作为例子介绍了这些实施方式,不是为了限制发明的范围。可以通过其他的各种方式实施这些实施方式,在不脱离发明宗旨的范围内,可以进行各种省略、置换、更改。这些实施方式及其变形包含于发明范围和宗旨内,同样包含于权利要求的范围中所述的发明及其同等的范围内。
Claims (6)
1.一种喷墨头,用于形成图像,其特征在于,具备:
基板;
压电元件,具有被形成为梳齿状的侧壁、由所述侧壁形成的压力室和设置在所述压力室内侧的电极即压力室电极;
基板电极,是与所述压力室电极连接并配置在所述基板上的电极;
框体,设置在所述基板电极上,并具有用于安装围绕外周的掩膜的安装部;
树脂膜,覆盖所述压力室电极和所述基板电极,且端部延伸到所述安装部;
喷嘴板,具有喷吐油墨的喷墨孔,所述喷嘴板经由所述树脂膜安装到所述框体上;以及
粘合剂层,覆盖所述树脂膜的端部,并与所述掩膜粘合。
2.根据权利要求1所述的喷墨头,其中,所述树脂膜的端部被配置在所述框体的外周端部的内侧且所述安装部的内侧端部的外侧。
3.根据权利要求2所述的喷墨头,其中,所述喷墨头还具有与驱动所述压电元件的驱动电路连接的驱动电路连接部,
所述粘合剂层被形成为还覆盖所述驱动电路连接部和所述驱动电路连接部与所述框体之间的所述基板电极。
4.一种喷墨头的制造方法,该喷墨头用于形成图像,其特征在于,所述制造方法包括:
成膜树脂膜、以使所述树脂膜覆盖基板电极且端部到达框体的安装部的工序,其中,所述框体设置在所述基板电极上,并具有用于安装围绕外周的掩膜的所述安装部,所述基板电极是配置在基板上的电极;以及
形成覆盖所述树脂膜的端部并与所述掩膜粘合的粘合剂层的工序。
5.根据权利要求4所述的喷墨头的制造方法,其中,将所述树脂膜的端部配置在所述框体的外周端部的内侧且所述安装部的内侧端部的外侧。
6.根据权利要求5所述的喷墨头的制造方法,其中,所述喷墨头还具有与驱动所述压电元件的驱动电路连接的驱动电路连接部,
在所述制造方法中,将所述粘合剂层形成为还覆盖所述驱动电路连接部和所述驱动电路连接部与所述框体之间的所述基板电极。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012029156A JP5504296B2 (ja) | 2012-02-14 | 2012-02-14 | インクジェットヘッド及びインクジェットヘッドの製造方法 |
JP2012-029156 | 2012-02-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103240992A true CN103240992A (zh) | 2013-08-14 |
CN103240992B CN103240992B (zh) | 2015-07-15 |
Family
ID=48921013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210507529.3A Expired - Fee Related CN103240992B (zh) | 2012-02-14 | 2012-11-30 | 喷墨头和喷墨头的制造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8998374B2 (zh) |
JP (1) | JP5504296B2 (zh) |
CN (1) | CN103240992B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107346803A (zh) * | 2016-05-05 | 2017-11-14 | 上海珏芯光电科技有限公司 | 硅基背板led显示器的制造方法 |
CN110077115A (zh) * | 2018-01-26 | 2019-08-02 | 东芝泰格有限公司 | 喷墨头及其制造方法以及喷墨打印机 |
CN111421958A (zh) * | 2019-01-10 | 2020-07-17 | 东芝泰格有限公司 | 喷墨头、喷墨装置以及喷墨头的制造方法 |
CN111452506A (zh) * | 2019-01-22 | 2020-07-28 | 东芝泰格有限公司 | 液体喷头以及液体喷出装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9259924B2 (en) * | 2012-09-18 | 2016-02-16 | Ricoh Company, Ltd. | Printing apparatus and printed material manufacturing method |
JP5768037B2 (ja) | 2012-12-12 | 2015-08-26 | 株式会社東芝 | インクジェットヘッド |
JP6449600B2 (ja) * | 2014-09-10 | 2019-01-09 | エスアイアイ・プリンテック株式会社 | 液体噴射ヘッドの製造方法、液体噴射ヘッド、および液体噴射記録装置 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002120368A (ja) * | 2000-10-16 | 2002-04-23 | Ricoh Co Ltd | 静電型インクジェットヘッド及びその製造方法 |
JP2002160364A (ja) * | 2000-11-27 | 2002-06-04 | Seiko Instruments Inc | インクジェットヘッド |
JP2004042453A (ja) * | 2002-07-11 | 2004-02-12 | Canon Inc | インクジェット記録ヘッドおよびインクジェット記録装置 |
US20070176985A1 (en) * | 2006-02-02 | 2007-08-02 | Yoshio Takeuchi | Liquid jetting head and liquid jetting apparatus |
JP2009202473A (ja) * | 2008-02-28 | 2009-09-10 | Toshiba Tec Corp | インクジェットヘッドの製造方法およびインクジェットヘッド |
US20100238237A1 (en) * | 2009-03-18 | 2010-09-23 | Toshiba Tec Kabushiki Kaisha | Ink jet head with laser-machined nozzles and method of manufacturing ink jet head |
US20110032311A1 (en) * | 2009-08-07 | 2011-02-10 | Toshiba Tec Kabushiki Kaisha | Inkjet print head and method of manufacture therefor |
CN102189789A (zh) * | 2010-03-02 | 2011-09-21 | 东芝泰格有限公司 | 喷墨头、喷墨记录装置 |
CN102218922A (zh) * | 2010-04-01 | 2011-10-19 | 精工电子打印科技有限公司 | 液体喷射头及液体喷射装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09300633A (ja) * | 1996-05-13 | 1997-11-25 | Ricoh Co Ltd | インクジェットヘッド |
US6808250B2 (en) * | 1997-01-10 | 2004-10-26 | Konica Corporation | Production method of ink-jet head |
JP3456516B2 (ja) * | 1997-06-26 | 2003-10-14 | セイコーエプソン株式会社 | インクジェット記録ヘッド用圧電振動子ユニットの製造方法 |
JP2002326354A (ja) * | 2001-03-01 | 2002-11-12 | Seiko Instruments Inc | ヘッドチップ |
JP4223247B2 (ja) | 2002-08-12 | 2009-02-12 | シャープ株式会社 | 有機絶縁膜の製造方法及びインクジェットヘッド |
JP2010069799A (ja) * | 2008-09-19 | 2010-04-02 | Toshiba Tec Corp | インクジェットヘッド、インクジェットヘッドの製造方法 |
JP2011062866A (ja) * | 2009-09-16 | 2011-03-31 | Toshiba Tec Corp | インクジェットヘッド |
-
2012
- 2012-02-14 JP JP2012029156A patent/JP5504296B2/ja active Active
- 2012-11-30 CN CN201210507529.3A patent/CN103240992B/zh not_active Expired - Fee Related
-
2013
- 2013-01-08 US US13/736,798 patent/US8998374B2/en not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002120368A (ja) * | 2000-10-16 | 2002-04-23 | Ricoh Co Ltd | 静電型インクジェットヘッド及びその製造方法 |
JP2002160364A (ja) * | 2000-11-27 | 2002-06-04 | Seiko Instruments Inc | インクジェットヘッド |
JP2004042453A (ja) * | 2002-07-11 | 2004-02-12 | Canon Inc | インクジェット記録ヘッドおよびインクジェット記録装置 |
US20070176985A1 (en) * | 2006-02-02 | 2007-08-02 | Yoshio Takeuchi | Liquid jetting head and liquid jetting apparatus |
JP2009202473A (ja) * | 2008-02-28 | 2009-09-10 | Toshiba Tec Corp | インクジェットヘッドの製造方法およびインクジェットヘッド |
US20100238237A1 (en) * | 2009-03-18 | 2010-09-23 | Toshiba Tec Kabushiki Kaisha | Ink jet head with laser-machined nozzles and method of manufacturing ink jet head |
US20110032311A1 (en) * | 2009-08-07 | 2011-02-10 | Toshiba Tec Kabushiki Kaisha | Inkjet print head and method of manufacture therefor |
CN102189789A (zh) * | 2010-03-02 | 2011-09-21 | 东芝泰格有限公司 | 喷墨头、喷墨记录装置 |
CN102218922A (zh) * | 2010-04-01 | 2011-10-19 | 精工电子打印科技有限公司 | 液体喷射头及液体喷射装置 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107346803A (zh) * | 2016-05-05 | 2017-11-14 | 上海珏芯光电科技有限公司 | 硅基背板led显示器的制造方法 |
CN110077115A (zh) * | 2018-01-26 | 2019-08-02 | 东芝泰格有限公司 | 喷墨头及其制造方法以及喷墨打印机 |
CN110077115B (zh) * | 2018-01-26 | 2021-12-21 | 东芝泰格有限公司 | 喷墨头及其制造方法以及喷墨打印机 |
CN111421958A (zh) * | 2019-01-10 | 2020-07-17 | 东芝泰格有限公司 | 喷墨头、喷墨装置以及喷墨头的制造方法 |
CN111452506A (zh) * | 2019-01-22 | 2020-07-28 | 东芝泰格有限公司 | 液体喷头以及液体喷出装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2013166254A (ja) | 2013-08-29 |
JP5504296B2 (ja) | 2014-05-28 |
CN103240992B (zh) | 2015-07-15 |
US20130208055A1 (en) | 2013-08-15 |
US8998374B2 (en) | 2015-04-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103240992A (zh) | 喷墨头和喷墨头的制造方法 | |
US8905522B2 (en) | Ink-jet head and method of manufacturing ink-jet head | |
JP6572689B2 (ja) | Memsデバイスの製造方法 | |
US11787178B2 (en) | Liquid ejection head and recording device | |
JP2017124540A (ja) | 配線基板、memsデバイス及び液体噴射ヘッド | |
JP4692534B2 (ja) | シリコン製ノズル基板、シリコン製ノズル基板を備えた液滴吐出ヘッド、液滴吐出ヘッドを搭載した液滴吐出装置、及びシリコン製ノズル基板の製造方法 | |
US10272682B2 (en) | Piezoelectric device, liquid ejecting head, manufacturing method of piezoelectric device, and manufacturing method of liquid ejecting device | |
CN102211456A (zh) | 液体喷射头及液体喷射装置 | |
JP4735281B2 (ja) | 液滴吐出ヘッド、液滴吐出装置、液滴吐出ヘッドの製造方法及び液滴吐出装置の製造方法 | |
CA2486454C (en) | Ink jet apparatus | |
JP4600403B2 (ja) | 液体移送装置 | |
JP2007112075A (ja) | 静電アクチュエータ、液滴吐出ヘッド、液滴吐出装置並びに静電デバイスの各製造方法 | |
JP2013188954A (ja) | インクジェットヘッド及びインクジェットヘッドの製造方法 | |
JP6358068B2 (ja) | 圧電デバイス、液体噴射ヘッド、圧電デバイスの製造方法、及び、液体噴射ヘッドの製造方法 | |
JP2007318870A (ja) | 静電アクチュエータ、液滴吐出ヘッド、液滴吐出装置及び静電デバイス並びにそれらの製造方法 | |
JP2015100919A (ja) | 液滴吐出ヘッドの製造方法、液滴吐出ヘッド及び画像形成装置 | |
JP2011206919A (ja) | 液体噴射ヘッド及び液体噴射装置 | |
JP2017130477A (ja) | 実装装置 | |
JP2010137441A (ja) | 静電アクチュエーター、液滴吐出ヘッド、液滴吐出装置及び静電デバイス | |
JP2011000893A (ja) | シリコン製ノズル基板、シリコン製ノズル基板を備えた液滴吐出ヘッド、液滴吐出ヘッドを搭載した液滴吐出装置、及びシリコン製ノズル基板の製造方法 | |
JP2007168393A (ja) | 液滴吐出ヘッド、液滴吐出装置、および液滴吐出ヘッドの製造方法 | |
JP2008194985A (ja) | 液体噴射ヘッドの製造方法 | |
JP2009006617A (ja) | 静電アクチュエータ、液滴吐出ヘッド、液滴吐出装置、静電アクチュエータの製造方法、液滴吐出ヘッドの製造方法及び液滴吐出装置の製造方法 | |
JP2008100438A (ja) | 液滴吐出ヘッドの製造方法及び液滴吐出装置の製造方法 | |
JP2010142016A (ja) | 静電アクチュエーター、液滴吐出ヘッド、液滴吐出装置及び静電デバイス |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150715 Termination date: 20191130 |