CN103137672A - 兼容自对准孔和表面沟道的金-氧-半场效应管的栅极膜结构及其制造方法 - Google Patents
兼容自对准孔和表面沟道的金-氧-半场效应管的栅极膜结构及其制造方法 Download PDFInfo
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- CN103137672A CN103137672A CN2011103828833A CN201110382883A CN103137672A CN 103137672 A CN103137672 A CN 103137672A CN 2011103828833 A CN2011103828833 A CN 2011103828833A CN 201110382883 A CN201110382883 A CN 201110382883A CN 103137672 A CN103137672 A CN 103137672A
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CN2011103828833A CN103137672A (zh) | 2011-11-25 | 2011-11-25 | 兼容自对准孔和表面沟道的金-氧-半场效应管的栅极膜结构及其制造方法 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1430249A (zh) * | 2002-01-03 | 2003-07-16 | 联华电子股份有限公司 | 避免尖峰现象的方法 |
US20040195635A1 (en) * | 2003-04-02 | 2004-10-07 | Hynix Semiconductor Inc. | Semiconductor device and method for manufacturing the same |
US20040209432A1 (en) * | 2003-04-16 | 2004-10-21 | Ku Ja-Hum | Nickel salicide process with reduced dopant deactivation |
CN101136328A (zh) * | 2006-08-29 | 2008-03-05 | 东部高科股份有限公司 | 半导体器件的栅极及其形成方法 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1430249A (zh) * | 2002-01-03 | 2003-07-16 | 联华电子股份有限公司 | 避免尖峰现象的方法 |
US20040195635A1 (en) * | 2003-04-02 | 2004-10-07 | Hynix Semiconductor Inc. | Semiconductor device and method for manufacturing the same |
US20040209432A1 (en) * | 2003-04-16 | 2004-10-21 | Ku Ja-Hum | Nickel salicide process with reduced dopant deactivation |
CN101136328A (zh) * | 2006-08-29 | 2008-03-05 | 东部高科股份有限公司 | 半导体器件的栅极及其形成方法 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140107 |
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Effective date of registration: 20140107 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Applicant before: Shanghai Huahong NEC Electronics Co., Ltd. |
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Application publication date: 20130605 |