CN102834340B - 基板匣、基板保管装置及基板处理系统 - Google Patents

基板匣、基板保管装置及基板处理系统 Download PDF

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Publication number
CN102834340B
CN102834340B CN201180018294.5A CN201180018294A CN102834340B CN 102834340 B CN102834340 B CN 102834340B CN 201180018294 A CN201180018294 A CN 201180018294A CN 102834340 B CN102834340 B CN 102834340B
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CN
China
Prior art keywords
cylinder
substrate
mouth
plate
plate shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201180018294.5A
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English (en)
Chinese (zh)
Other versions
CN102834340A (zh
Inventor
浜田智秀
木内彻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of CN102834340A publication Critical patent/CN102834340A/zh
Application granted granted Critical
Publication of CN102834340B publication Critical patent/CN102834340B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H20/00—Advancing webs
    • B65H20/30—Arrangements for accumulating surplus web
    • B65H20/32—Arrangements for accumulating surplus web by making loops
    • B65H20/34—Arrangements for accumulating surplus web by making loops with rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2402/00—Constructional details of the handling apparatus
    • B65H2402/50—Machine elements
    • B65H2402/52—Bearings, e.g. magnetic or hydrostatic bearings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00—Parts for transporting or guiding the handled material
    • B65H2404/10—Rollers
    • B65H2404/13—Details of longitudinal profile
    • B65H2404/131—Details of longitudinal profile shape
    • B65H2404/1313—Details of longitudinal profile shape concave
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00—Parts for transporting or guiding the handled material
    • B65H2404/10—Rollers
    • B65H2404/13—Details of longitudinal profile
    • B65H2404/131—Details of longitudinal profile shape
    • B65H2404/1314—Details of longitudinal profile shape convex
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00—Parts for transporting or guiding the handled material
    • B65H2404/10—Rollers
    • B65H2404/13—Details of longitudinal profile
    • B65H2404/132—Details of longitudinal profile arrangement of segments along axis
    • B65H2404/1321—Segments juxtaposed along axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2408/00—Specific machines
    • B65H2408/20—Specific machines for handling web(s)
    • B65H2408/21—Accumulators
    • B65H2408/217—Accumulators of rollers type, e.g. with at least one fixed and one movable roller
    • B65H2408/2172—Accumulators of rollers type, e.g. with at least one fixed and one movable roller several cascaded loops of rollers

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Electroluminescent Light Sources (AREA)
  • Storing, Repeated Paying-Out, And Re-Storing Of Elongated Articles (AREA)
  • Advancing Webs (AREA)
  • Packaging Frangible Articles (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
CN201180018294.5A 2010-04-09 2011-04-11 基板匣、基板保管装置及基板处理系统 Active CN102834340B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US32236010P 2010-04-09 2010-04-09
US61/322,360 2010-04-09
US42320710P 2010-12-15 2010-12-15
US61/423,207 2010-12-15
PCT/JP2011/059006 WO2011126133A1 (ja) 2010-04-09 2011-04-11 基板カートリッジ、基板保管装置及び基板処理システム

Publications (2)

Publication Number Publication Date
CN102834340A CN102834340A (zh) 2012-12-19
CN102834340B true CN102834340B (zh) 2015-09-16

Family

ID=44763068

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180018294.5A Active CN102834340B (zh) 2010-04-09 2011-04-11 基板匣、基板保管装置及基板处理系统

Country Status (6)

Country Link
JP (1) JP5838964B2 (ja)
KR (3) KR101845682B1 (ja)
CN (1) CN102834340B (ja)
HK (1) HK1175154A1 (ja)
TW (1) TWI574904B (ja)
WO (1) WO2011126133A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BR112015023787B1 (pt) * 2013-03-15 2021-05-04 Comfortex Corporation método para transição de pilhas de pré-formas em um sistema para tratamentos de janela
KR20160024882A (ko) * 2013-06-27 2016-03-07 피코순 오와이 원자층 증착 반응기 내 기판 웹 트랙의 형성
CN114721231B (zh) * 2022-04-17 2023-04-11 江苏晟驰微电子有限公司 一种用于光刻版清洗的工装夹具

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1415079A (en) * 1972-12-22 1975-11-26 Dornier Gmbh Lindauer Storage apparatus for a web of material
JPS545846B2 (ja) * 1974-02-22 1979-03-22
JPS6194957A (ja) * 1984-10-16 1986-05-13 Toppan Printing Co Ltd 帯状体のアキユムレ−タ−
JPH0225219A (ja) * 1988-07-12 1990-01-26 Mitsubishi Heavy Ind Ltd 極薄帯板巻取り機の張力調整装置
JPH02107769A (ja) * 1988-10-18 1990-04-19 Mitsubishi Heavy Ind Ltd 連続蒸着設備
EP0761582A2 (de) * 1995-09-12 1997-03-12 MANNESMANN Aktiengesellschaft Vertikaler Bandspeicher
EP0989084A2 (en) * 1998-09-22 2000-03-29 Curt G. Joa, Incorporated Counterbalanced web accumulator

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1333110A (en) * 1970-12-30 1973-10-10 Wean United Inc Accumulator for strip-like material
US3993233A (en) * 1976-01-16 1976-11-23 Eastman Kodak Company Web slack box having a plurality of sections
JPS545846A (en) * 1977-06-17 1979-01-17 Toyo Kohan Co Ltd Mechanicalltype double loop apparatus
JP2858365B2 (ja) * 1989-08-09 1999-02-17 株式会社デンソー 帯状材料のアキュームレータ
JPH089374B2 (ja) * 1990-03-13 1996-01-31 株式会社村田製作所 テーピング自動選別装置
JPH1087131A (ja) * 1996-09-11 1998-04-07 Denso Corp 帯状材の貯蔵方法及び装置
US6258408B1 (en) * 1999-07-06 2001-07-10 Arun Madan Semiconductor vacuum deposition system and method having a reel-to-reel substrate cassette
JP2004520975A (ja) * 2001-03-02 2004-07-15 ジェームズ ハーディー リサーチ プロプライアトリー リミテッド スパッタリングによって積層シート材料を形成する方法および装置
EP1270471A1 (de) * 2001-06-25 2003-01-02 Solipat Ag Vorrichtung zur Aufnahme einer Warenbahn, Dämpfvorrichtung und Verfahren zum Einführen einer Warenbahn in eine solche Vorrichtung
WO2006100868A1 (ja) 2005-03-18 2006-09-28 Konica Minolta Holdings, Inc. 有機化合物層の形成方法、有機ｅｌ素子の製造方法、有機ｅｌ素子
WO2008075493A1 (ja) * 2006-12-18 2008-06-26 Sharp Kabushiki Kaisha 基材処理装置及びそれを用いた表示装置の製造方法
JP5104301B2 (ja) * 2007-12-28 2012-12-19 コニカミノルタホールディングス株式会社 有機エレクトロルミネッセンスパネルの製造方法
JP5056682B2 (ja) * 2008-09-04 2012-10-24 コニカミノルタホールディングス株式会社 有機エレクトロルミネッセンス素子の製造方法、有機エレクトロルミネッセンス素子およびその製造装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1415079A (en) * 1972-12-22 1975-11-26 Dornier Gmbh Lindauer Storage apparatus for a web of material
JPS545846B2 (ja) * 1974-02-22 1979-03-22
JPS6194957A (ja) * 1984-10-16 1986-05-13 Toppan Printing Co Ltd 帯状体のアキユムレ−タ−
JPH0225219A (ja) * 1988-07-12 1990-01-26 Mitsubishi Heavy Ind Ltd 極薄帯板巻取り機の張力調整装置
JPH02107769A (ja) * 1988-10-18 1990-04-19 Mitsubishi Heavy Ind Ltd 連続蒸着設備
EP0761582A2 (de) * 1995-09-12 1997-03-12 MANNESMANN Aktiengesellschaft Vertikaler Bandspeicher
EP0989084A2 (en) * 1998-09-22 2000-03-29 Curt G. Joa, Incorporated Counterbalanced web accumulator

Also Published As

Publication number Publication date
HK1175154A1 (en) 2013-06-28
KR20180034708A (ko) 2018-04-04
KR20170118243A (ko) 2017-10-24
JPWO2011126133A1 (ja) 2013-07-11
WO2011126133A1 (ja) 2011-10-13
TWI574904B (zh) 2017-03-21
KR101845682B1 (ko) 2018-04-04
KR101892424B1 (ko) 2018-08-27
KR20130037674A (ko) 2013-04-16
JP5838964B2 (ja) 2016-01-06
KR101788348B1 (ko) 2017-10-19
TW201210926A (en) 2012-03-16
CN102834340A (zh) 2012-12-19

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