JPS545846A - Mechanicalltype double loop apparatus - Google Patents

Mechanicalltype double loop apparatus

Info

Publication number
JPS545846A
JPS545846A JP7103677A JP7103677A JPS545846A JP S545846 A JPS545846 A JP S545846A JP 7103677 A JP7103677 A JP 7103677A JP 7103677 A JP7103677 A JP 7103677A JP S545846 A JPS545846 A JP S545846A
Authority
JP
Japan
Prior art keywords
mechanicalltype
double loop
loop apparatus
apparatus
double
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7103677A
Inventor
Akira Nishida
Toshiaki Matsubara
Original Assignee
Toyo Kohan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Kohan Co Ltd filed Critical Toyo Kohan Co Ltd
Priority to JP7103677A priority Critical patent/JPS545846A/en
Publication of JPS545846A publication Critical patent/JPS545846A/en
Application status is Pending legal-status Critical

Links

JP7103677A 1977-06-17 1977-06-17 Mechanicalltype double loop apparatus Pending JPS545846A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7103677A JPS545846A (en) 1977-06-17 1977-06-17 Mechanicalltype double loop apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7103677A JPS545846A (en) 1977-06-17 1977-06-17 Mechanicalltype double loop apparatus

Publications (1)

Publication Number Publication Date
JPS545846A true JPS545846A (en) 1979-01-17

Family

ID=13448886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7103677A Pending JPS545846A (en) 1977-06-17 1977-06-17 Mechanicalltype double loop apparatus

Country Status (1)

Country Link
JP (1) JPS545846A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038179U (en) * 1983-08-25 1985-03-16
JPS6045366U (en) * 1983-09-06 1985-03-30
CN102834340A (en) * 2010-04-09 2012-12-19 株式会社尼康 Substrate cartridge, substrate storage device, and substrate processing system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038179U (en) * 1983-08-25 1985-03-16
JPS6045366U (en) * 1983-09-06 1985-03-30
CN102834340A (en) * 2010-04-09 2012-12-19 株式会社尼康 Substrate cartridge, substrate storage device, and substrate processing system
TWI574904B (en) * 2010-04-09 2017-03-21 尼康股份有限公司 A substrate tray, a substrate storage device and a substrate processing system

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