TWI574904B - A substrate tray, a substrate storage device and a substrate processing system - Google Patents

Description

Substrate crucible, substrate storage device, and substrate processing system

The present invention relates to a substrate cassette, a substrate storage device, and a substrate processing system.

Priority is claimed on U.S. Provisional Application No. 61/322,360, filed on Apr. 9, 2010, the entire disclosure of which is incorporated herein by reference.

Examples of the display elements constituting the display device such as a display device include a liquid crystal display element and an organic electroluminescence (organic EL) element. At present, such display elements are becoming mainstream with active devices that form thin film transistors (TFTs) on the surface of the substrate corresponding to the respective pixels.

In recent years, a technique of forming a display element on a sheet-like substrate (for example, a film member or the like) has been proposed. As such a technique, for example, a roll to roll method (hereinafter, abbreviated as "reel method") is widely known (for example, refer to Patent Document 1). In the reel method, a sheet-like substrate (for example, a strip-shaped film member) wound around one of the supply rollers on the substrate supply side is fed, and the fed substrate is wound on the substrate recovery side. The desired processing is applied to the substrate by a processing device disposed between the supply roller and the recovery roller.

During the transfer of the substrate to the winding, the gate electrode, the gate insulating film, the semiconductor film, and the source of the TFT are formed using a plurality of processing devices (units) by using a plurality of transfer rollers or the like. - a gate electrode or the like, which sequentially forms constituent elements of the display element on the surface to be processed of the substrate. For example, in the case of forming an organic EL element, a light-emitting layer, an anode, a cathode, a circuit, and the like are sequentially formed on a substrate.

When the substrate wound around the recovery roller is fed out, the most end portion at the time of winding becomes the leading end and the substrate is fed out. Therefore, in the case where the substrate is repeatedly patterned, it is necessary to consider the order of the pattern forming process to be reversed when the substrate is wound and the substrate is fed. As described above, it is necessary to manage the front end and the end of the substrate each time, so that there is a problem that the management burden becomes large.

Patent Document 1: International Publication No. 2006/100868

In the reel-to-reel method, since the length of one substrate is long, the burden of substrate management is reduced.

It is an object of the present invention to provide a substrate management apparatus, a substrate stack, and a substrate processing system capable of reducing the burden on substrate management.

a substrate 一 having a accommodating portion for accommodating a substrate formed in a strip shape; an unloading port disposed in the accommodating portion for carrying out the substrate; and a loading port being disposed in the accommodating portion for loading the substrate; And a guiding portion that guides the end portion of the substrate received in the accommodating portion from the loading port to the carrying port.

A substrate processing system according to a first aspect of the invention includes: a substrate according to a first aspect of the present invention; and a substrate processing apparatus having a connection portion connected to the substrate.

In a substrate storage device according to one aspect, a substrate having a strip shape and having flexibility is folded back and held in a plurality of times in a longitudinal direction, and is characterized in that: a first folded portion is provided such that surfaces of the substrate face each other The second folded portion is configured to fold back the first portion in such a manner that the back surface of the first portion of the substrate that is folded back to one side with respect to the first folded portion is opposite to each other; the direction changing portion is configured to be in the substrate The second folded portion is folded back to the second portion opposite to the first folded portion toward the first folded portion; and the third folded portion is the third portion of the substrate that is converted by the direction changing portion. A portion of the third portion is folded back along the surface or back of the fourth portion of the substrate that is folded back to the other side of the first portion by the first folded portion.

According to the aspect of the invention, the burden on the substrate management can be reduced.

(First embodiment)

The first embodiment will be described with reference to the drawings.

Fig. 1 is a side cross-sectional view showing the configuration of a substrate 匣CTR of the present embodiment.

As shown in FIG. 1, the substrate 匣 (or the sheet storage) CTR includes an accommodating portion 1 for accommodating a sheet-like substrate (for example, a strip-shaped film member), and carrying the sheet-like substrate into the accommodating portion 1 Port 2, a transfer port 3 for carrying out the sheet substrate from the accommodating portion 1, and a guide portion 4 for guiding the sheet substrate from the carry-in port 2 to the transfer port 3, the control portion 5, and the connected portion in the accommodating portion 1. Interface 6. The substrate 匣CTR is placed on, for example, the floor F of a manufacturing plant.

In the following description, the XYZ orthogonal coordinate system is set, and the positional relationship of each member will be described with reference to this XYZ orthogonal coordinate system. Specifically, the predetermined direction on the plane parallel to the ground surface F is the X-axis direction, the direction orthogonal to the X-axis direction on the plane is the Y-axis direction, and the direction perpendicular to the plane is the Z-axis direction. Further, the directions of rotation (inclination) around the X-axis, the Y-axis, and the Z-axis are θX, θY, and θZ directions, respectively.

As the sheet substrate, for example, a resin film or a foil such as stainless steel can be used. As the resin film, for example, a polyethylene resin, a polypropylene resin, a polyester resin, an ethylene vinyl copolymer resin, a polyvinyl chloride resin, a cellulose resin, a polyamide resin, a polyimide resin, or the like may be used. Materials such as polycarbonate resin, polystyrene resin, and vinyl acetate resin.

The size of the sheet-like substrate in the Y direction (short side direction) is, for example, about 50 cm to 2 m, and the dimension in the X direction (longitudinal direction) is, for example, 10 m or more. Of course, this size is only an example and is not limited to this example. For example, the size of the sheet substrate in the Y direction may be 50 cm or less, or may be 2 m or more. In the present embodiment, a sheet substrate having a size of more than 2 m in the Y direction is also applicable. Further, the dimension of the sheet substrate in the X direction may be 10 m or less.

The sheet substrate is formed to have a thickness of, for example, 1 mm or less and has flexibility. Here, the term "flexibility" refers to a property in which the substrate can be bent without being broken or broken by applying a predetermined force to at least its own weight. Further, for example, the property of being bent by the predetermined force described above is also included in the flexibility indicated. Further, the flexibility described above varies depending on the material, size, thickness, temperature, and the like of the substrate. Further, as the sheet substrate, a strip-shaped substrate may be used, or a plurality of unit substrates may be connected to form a strip shape.

The sheet substrate is preferably one which is less subject to heat such as 200 ° C and which has a small thermal expansion coefficient. For example, an inorganic filler may be mixed in the resin film to lower the coefficient of thermal expansion. Examples of the inorganic filler include titanium oxide, zinc oxide, aluminum oxide, cerium oxide, and the like.

The accommodating portion 1 has, for example, a casing 10 having a plurality of wall surfaces. The plurality of wall surfaces are disposed at positions that constitute, for example, the respective faces of the rectangular parallelepiped. The casing 10 can also be placed such that the surface on the -Z side is directly in contact with the floor surface F, or can be placed on the floor F through, for example, a caster. The cover 10 may be provided with an openable and closable cover portion (not shown).

The carry-in 2 is formed in the wall 10a of the case X, for example, on the +X side. For example, the guide plates 21 and 22 and the carry-in drum (drive roller) 23 are provided in the carry-in port 2. The guide sheets 21 and 22 are disposed at positions on the front and back surfaces of the sheet-like substrate. The guide plate 21 is formed to protrude toward the +X side with respect to the guide plate 22. The loading roller 23 guides the sheet substrate carried in from the loading port 2 to the inside of the housing portion 1.

The outlet 3 is formed in the wall 10a of the case X, for example, on the +X side. Further, the unloading port 3 is formed on the upper side (+Z side) of the wall surface 10a. The transfer port 3 is disposed, for example, on the lower side (-Z side) of the carry-in port 2. As described above, in the present embodiment, the carry-in port 2 and the carry-out port 3 are disposed on the same wall surface 10a of the casing 10. Further, the wall surface 10a is provided with a connected port 6 to the outside. For example, the guide plates 31 and 32 and the carry-out drum (drive drum) 33 are provided in the carry-out port 3. The guide sheets 31 and 32 are disposed at positions on the front and back surfaces of the sheet-like substrate. The guide plate 31 is formed to protrude toward the +X side with respect to the guide plate 32. The carry-out drum 33 guides the sheet substrate in the casing 10 to the carry-out port 3.

The guide portion 4 is provided inside the casing 10. The guiding portion 4 has a fixed guiding plate 41, a first roller (driving roller) 42, a parallel guiding plate 43, a second roller (driving roller) 44, a movable guiding plate 45, and a plurality of folding mechanisms 46. The folding mechanism 46 is disposed in plural in the depth direction of the casing 10 from the wall surface 10a on which the inlet 2 and the outlet 3 are disposed.

The fixed guide plate 41 is a plate-like member that is horizontally fixed to the inner wall of the casing 10 from immediately after the loading roller 23 to immediately before the first roller 42. The fixed guide plate 41 is disposed in parallel with, for example, the X direction. The dimension of the fixed guide plate 41 in the Y direction is formed to be larger than, for example, the dimension of the short side direction of the sheet substrate, but is configured to support both sides of the width of the sheet substrate in the Y direction and not to support the width direction of the sheet substrate. The central department is also available. Further, the fixed guide plate 41 may be divided into a plurality of guide plates, and the plurality of guide plates may be arranged at equal intervals in the X direction. The fixed guide plate 41 guides the sheet-like substrate carried in, for example, the loading roller 23 to the -X direction.

The first roller 42 is disposed in the vicinity of the -X side end portion of the fixed guide plate 41. The first roller 42 is fixed to the inner wall of the casing 10 so as to be rotatable in the θZ direction. The first roller 42 conveys the sheet substrate guided by the fixed guide plate 41 to the parallel guide plate 43.

The parallel guide sheets 43 are fixed to the plate-like members of the casing 10. The parallel guide plate 43 has an inner guide plate 43a disposed on the +X side and an outer side guide plate 43b disposed on the -X side. The inner guide plate 43a and the outer guide plate 43b are disposed to face each other in a state of being erected with respect to a horizontal plane, that is, a state in which the plate surface is parallel to the YZ plane.

The inner guide plate 43a and the outer guide plate 43b are disposed via a gap through which the sheet substrate can pass (in the present embodiment, a gap in the X direction). The end portions of the inner guide plate 43a and the outer guide plate 43b on the +Z side are formed to be bent toward the +X side, for example, toward the first roller 42, and the end portions on the -Z side are respectively directed toward, for example, the second roller 44 toward + The X side is curved to form.

The second roller 44 is disposed at an end portion on the depth side (-X side) inside the casing 10 and is in the vicinity of the -Z-side end portion of the parallel guide plate 43. The second roller 44 is configured to be rotatable in the θY direction. The second roller 44 holds the front and back surfaces of the sheet substrate guided by the parallel guide sheets 43 and conveys them to the movable guide sheets 45. A rotation drive mechanism (not shown) is connected to the first roller 42 and the second roller 44, for example.

The movable guide plate 45 guides the sheet substrate conveyed by the second roller 44. Fig. 2 is a view showing the configuration along the A-A cross section of Fig. 1. As shown in FIG. 2, a recessed portion 11 is formed in each of the inner surface of the wall portion 10b on the +Y side and the wall portion 10c on the -Y side of the casing 10. The concave portion 11 is formed to have a long side in the X direction, for example. The recessed portion 11 is provided with a shaft portion 12 that is attached to, for example, a rotation in the θX direction.

The movable guide plate 45 is attached to the casing 10 through the shaft portion 12. The shaft portion 12 is rotatable in the θX direction. The shaft portion 12 is connected to a rotation drive mechanism (not shown). The rotation drive mechanism adjusts the rotation angle, the rotation speed, the rotation timing, and the like of the shaft portion 12 by, for example, the control unit 5, but the basic operation is as shown in FIG. 2, as long as the movable guide plate 45 is substantially horizontal. It suffices to rotate between the state of being substantially perpendicular to the recessed portion 11.

By adjusting the rotation angle of the shaft portion 12, for example, the movable guide plate 45 is switched between a state parallel to the Y direction and a state parallel to the Z direction (a state in which the front end portion faces the -Z direction). The movable guide plate 45 supports both end portions of the sheet-like substrate conveyed by the second roller 44 in the Y direction, for example, in a state parallel to the Y direction. Moreover, the movable guide plate 45 is housed in the recessed portion 11 in a state parallel to the Z direction, for example. As described above, the movable guiding plate 45 is provided to be able to enter and exit on the guiding path of the sheet substrate.

As shown in FIG. 1, a plurality of folding mechanisms 46 have a first moving roller 47 and a second moving roller 48. The folding mechanisms 46 are configured to be identical to each other. The first moving roller 47 is disposed, for example, in plural on the -Z side of the sheet substrate. The plurality of first moving rollers 47 are disposed at predetermined intervals along the X direction, for example. The second moving roller 48 is disposed, for example, in plural on the +Z side of the sheet substrate. The plurality of second moving rollers 48 are disposed at predetermined intervals, for example, along the X direction.

Each of the second moving rollers 48 is disposed between the adjacent first moving rollers 47 in the X direction. Therefore, the first moving roller 47 and the second moving roller 48 are alternately arranged, for example, in the X direction. Further, for example, the first moving roller 47 and the second moving roller 48 are disposed so as not to overlap when viewed on, for example, the XY plane. FIG. 3 is a view showing the configuration of the folding mechanism 46.

As shown in FIG. 3, the first moving roller 47 and the second moving roller 48 have the same configuration, respectively, and the folding mechanism 46 in the state shown in FIG. 3 is attached to the lower side of the casing 10 shown in FIG. The first moving roller 47 constitutes the second moving roller 48 by reversing the folding mechanism 46 in the state shown in Fig. 3 upside down and attaching it to the upper side of the casing 10 shown in Fig. 2 . The first moving roller 47 and the second moving roller 48 have a fixing portion 51, a movable portion 52, a support portion 53, and a roller portion 54, respectively.

The fixing portion 51 has, for example, a pair of driving walls 51a fixed to the inner wall of the casing 10, and a rod-shaped guiding rod 51b that connects the pair of driving sources 51a. The fixing portion 51 aligns and fixes the pair of driving sources 51a such that the guide bar 51b is parallel to the Y axis. For the pair of driving sources 51a, for example, a configuration using a pneumatic or hydraulic piston or a ball screw and a nut can be used. The drive source 51a controls the amount of driving, the drive timing, and the like by, for example, the control unit 5.

The movable portion 52 has a pair of sliders 52a movable along the guide bar 51b, and an expansion and contraction portion 52b that expands and contracts in the Z direction in accordance with the movement of the pair of sliders 52a. The pair of sliders 52a are moved by, for example, a pair of driving sources 51a. In the configuration shown in Fig. 3, for example, the pair of sliders 52a are moved in the center in the left-right direction, and the stretchable portion 52b is elongated on the +Z side. Further, for example, the pair of sliders 52a are moved at the end portions in the horizontal direction in the drawing, and the elasticized portion 52b is shortened in the -Z direction.

Further, the state in which the expansion-contraction portion 52b of the folding-back mechanism 46 is minimized is taken as an initial state.

The support portion 53 is fixed to the front end of the +Z side of the expansion and contraction portion 52b. The support portion 53 is configured to be movable in the Z direction by the expansion and contraction operation of the expansion and contraction portion 52b. A roller portion 54 is attached to the support portion 53. The roller portion 54 is configured to be rotatable in the θY direction, for example. The roller portion 54 is suspended with a portion such as a sheet substrate. Further, the diameter of the roller portion 54 that bends the sheet substrate is set within a range in which the sheet substrate is not plastically deformed when the sheet substrate is folded in a U shape. For example, even a sheet substrate of PET (polyethylene terephthalate) or PEN (polyethylene naphthalate) having a thickness of about 50 μm is deposited in an unprocessed state and on the surface of the sheet. The processing state of the metal film or the UV-curable resin layer or the like, and the minimum radius of curvature allowed in the U-shaped folding back are also different, so that the state of the sheet substrate to be stored can be considered (for example, the processing procedure for processing the sheet substrate) The content, etc.) is used to select the diameter of the roller portion 54.

In FIGS. 1 and 2, the first moving roller 47 and the second moving roller 48 respectively show a state in which the elasticized portion 52b is shortened. As the expansion/contraction portion 52b is in an extended state, as shown in FIG. 1, the roller portion 54 is disposed at the position 47S with respect to the first movement roller 47, and is disposed at the position 48S with respect to the second movement roller 48.

Fig. 4 is a view showing the configuration of a substrate processing system SYS according to an embodiment of the present invention.

As shown in FIG. 4, the substrate processing system SYS has a substrate supply unit SU that supplies the sheet substrate FB, a substrate processing apparatus PR that processes the processed surface Fp of the sheet substrate FB, and a substrate recovery unit CL that collects the sheet substrate FB. And controlling the control unit CONT of the various departments.

In the present embodiment, the substrate 匣CTR is used as the device for the substrate supply unit SU and the substrate recovery unit CL. A connection portion CN to the substrate 匣CTR is provided in the substrate processing apparatus PR. The connection portion CN of the substrate processing apparatus PR is configured, for example, to be connected to the connected port 6 of the substrate 匣CTR. The substrate processing system SYS is installed, for example, at a factory or the like. In the present embodiment, the transfer port 3 of the substrate 匣CTR functions as the substrate supply unit SU, and the transfer port 2 functions as the substrate recovery unit CL.

In the substrate processing system SYS, various processes are performed on the surface of the sheet substrate FB while the sheet substrate FB is fed from the substrate 匣CTR transfer port 3 and the sheet substrate FB is recovered by the substrate 匣CTR transfer port 2. The substrate processing system SYS can be used to form a display element (electronic element) such as an organic EL element or a liquid crystal display element on the sheet substrate FB. Of course, the substrate processing system SYS may be used in the case of forming components other than these components.

The substrate 匣CTR feeds the sheet substrate FB accommodated in the accommodating portion 1 from the delivery port 3 and supplies it to the substrate processing apparatus PR. Further, the substrate 匣CTR collects the sheet substrate FB from the substrate processing apparatus PR from the transfer port 2. Further, the substrate 匣CTR is guided by the guide portion 4 to the front end portion of the sheet substrate FB collected from the carry-in port 2, for example, to the carry-out port 3.

The substrate processing apparatus PR transports the sheet substrate FB supplied from the substrate 3 of the substrate 匣CTR to the transfer port 2 of the substrate 匣CTR, and processes the processed surface Fp of the sheet substrate FB during the transfer. The substrate processing apparatus PR includes, for example, a processing apparatus PA, a conveying apparatus CV, and an aligning apparatus (not shown).

The processing device PA has various processing units for forming a TFT or an organic EL element on the processed surface Fp of the sheet substrate FB. The processing unit includes, for example, a partition wall forming device that forms a partition wall on the surface Fp to be processed, an electrode forming device that forms an electrode for driving the TFT or the organic EL element, and a light-emitting layer for forming a light-emitting layer. Device, etc. More specifically, a film forming apparatus such as a droplet applying apparatus (for example, an ink jet type coating apparatus or a screen printing type coating apparatus), a vapor deposition apparatus, and a sputtering apparatus, or an exposure apparatus, a developing apparatus, and a surface modification may be mentioned. Quality device, cleaning device, etc. Each of these devices is suitably provided, for example, on a transport path of the sheet substrate FB. Further, as the processing device PA, a lead attaching portion to which a guide head is attached to the end portion of the sheet substrate FB in the transport direction may be used.

The transport device CV has a roller device R that transports, for example, the sheet substrate FB to the loading port 2 side in the substrate processing device PR. The roller device R is provided in a plurality of transport paths along the sheet substrate FB, for example. A drive mechanism (not shown) is attached to at least a part of the plurality of roller devices R. The sheet substrate FB is conveyed in the X-axis direction by rotating the roller device R. For example, a part of the plurality of roller devices R may be configured to be movable in a direction orthogonal to the conveying direction. Further, the transfer device CV may have a configuration in which a lead is attached to an end portion of the sheet substrate FB, and may have a configuration in which the guide holding portion CVL of the guide is held.

In the transport apparatus CV, the sheet-like substrate FB is transported so that the loading position and the carry-out position of the sheet substrate FB are both the +X side of the substrate processing apparatus PR. For example, the conveying device CV has a folding drum RR. By the folding roller RR, the conveying device CV conveys, for example, the sheet substrate FB supplied from the +X side end portion of the substrate processing apparatus PR to the -X side, and returns to the +X side by the folding roller RR to return to the side. The sheet substrate FB is conveyed so that the end portion of the substrate processing apparatus PR is on the +X side.

The alignment device detects alignment marks provided at both end portions in the width direction of the sheet substrate FB, for example, and performs an alignment operation of the sheet substrate FB on the processing device PA based on the detection result. The alignment device has an alignment camera that detects an alignment mark provided on the sheet substrate FB, or the sheet substrate FB is in the X direction, the Y direction, the Z direction, the θX direction, and the θY direction according to the detection result of the alignment camera. An adjustment mechanism that finely adjusts at least one of the θZ directions.

In the substrate processing system SYS configured as described above, display elements (electronic elements) such as an organic EL element or a liquid crystal display element are manufactured under the control of the control unit CONT. Hereinafter, a procedure for manufacturing a display element using the substrate processing system SYS having the above configuration will be described with reference to FIG.

First, the substrate 匣CTR is mounted on the connection portion CN of the substrate processing apparatus PR. In the substrate 匣CTR, since the transfer port 2 into which the sheet substrate FB is carried and the transfer port 3 for carrying out the sheet substrate FB are provided on the same wall surface 10a as shown in Fig. 1, the port 6a of the wall surface 10a is connected. It can be connected to the connection unit CN. In other words, the substrate 匣CTR can be simply and accurately connected to the substrate processing apparatus PR by the mechanical connection accuracy of the connection portion CN and the connected port 6 on the substrate 匣 side.

Further, as shown in FIG. 6, the sheet substrate FB accommodated in the substrate 匣CTR is wound around a plurality of first rollers 42 and a plurality of second rollers 44, and is accommodated in a state of being folded back a plurality of times. Next, the sheet substrate FB from the substrate 匣CTR is carried out by a method described later.

After the substrate 匣CTR is mounted, the control unit 5 rotates the carry-out drum 33 to feed the sheet substrate FB from the delivery port 3. The control device CONT transfers the chip substrate FB in the substrate processing device PR while the sheet substrate FB is being transported from the transfer port 3 to the transfer port 2, and the substrate processing device PR is transported by the substrate processing device PR. The constituent elements of the display elements are sequentially formed on the sheet substrate FB by the processing device PA.

On the other hand, the control unit 5 introduces the sheet substrate FB processed by the substrate processing apparatus PR into the substrate cassette CTR by the loading roller 23 of the loading port 2. By the control of the carry-out roller 33 and the carry-in roller 23, the processed surface Fp of the sheet-form substrate FB can be continuously conveyed to the substrate processing apparatus PR. In the substrate 匣CTR, the sheet substrate FB passing through the substrate processing apparatus PR is guided to the fixed guide sheet 41 through the carry-in drum 23.

The sheet substrate FB guided to the fixed guide plate 41, for example, as shown in FIG. 5, passes through the first roller 42, the parallel guide plate 43, and the second roller 44 to reach the movable guide plate 45. At this time, the control unit 5 causes the pair of movable guide plates 45 to be in a state of being parallel to the Y direction in advance, and the expansion and contraction portion 52b of the folding mechanism 46 having the first moving roller 47 and the folding of the second moving roller 48 are previously made. The expansion/contraction portion 52b of the mechanism 46 is in a contracted state (state of Fig. 2). That is, the expansion-contraction portion 52b of the folding mechanism 46 is brought into an initial state.

Then, the front end portion of the sheet-like substrate FB is guided in the +X direction while the both ends of the Y-direction are supported by the movable guide plate 45. The control unit 5 stops the driving of the carry-out roller 33 after the end portion of the control unit 5 is supported by the guide sheet 31 (the state of FIG. 5) before passing through the sheet substrate FB of the carry-out roller 33.

After the driving of the carry-out roller 33 is stopped, the control unit 5 temporarily stops the loading roller 23 and grips the front end portion of the sheet substrate FB. The control unit 5 cuts off the driving of the first roller 42 and the second roller 44 from the drive shaft, and is in a state of being rotatable by the movement of the sheet substrate FB. Thereafter, the control unit 5 reopens the drive of the carry-in drum 23.

After the driving of the loading roller 23 is resumed, the sheet substrate FB is again fed by the loading port 2, and is guided to the movable guiding plate 45 through the loading roller 23, the first roller 42 and the second roller 44. After the movable guide plate 45 is housed in the recessed portion 11, the control unit 5 has the first moving roller 47 (54) and the second moving roller 48 (54) based on the amount of conveyance from the sheet substrate FB of the second roller 44. The extension portion 52b of the folding mechanism 46 is extended so as to gradually move upward or downward, so that excessive tension is not applied to the sheet substrate FB.

By this operation, the first moving roller 47 gradually presses the sheet substrate FB from the surface on the -Z side of the sheet substrate FB in the +Z direction. On the other hand, the second moving roller 48 gradually presses the sheet substrate FB toward the -Z direction from the surface on the +Z side of the sheet substrate FB. As a result, as shown in Fig. 6, the elasticized portion 52b of the folding mechanism 46 having the first moving roller 47 and the elasticized portion 52b of the folding mechanism 46 having the second moving roller 48 are in an extended state. Further, the sheet substrate FB is wound around one of the first moving roller 47 and one of the second moving roller 48, and is housed in a state of being folded back in the X direction. When the first moving roller 47 and the second moving roller 48 are in a state of being extended to the maximum movable range, the control unit 5 stops the driving of the loading roller 23.

Since the first moving roller 47 and the second moving roller 48 are disposed so as not to overlap in the X direction, the sheet substrate FB does not contact during the movement of the first moving roller 47 and the second moving roller 48. The winding is suspended from the first moving roller 47 and the second moving roller 48 and folded back. Therefore, even when the first moving roller 47 and the second moving roller 48 are moved to the maximum position within the movable range, the sheet substrates FB are in a state of not contacting each other (non-contact state).

When the sheet-like substrate FB is carried out from this state, the control unit 5 drives the carry-out roller 33 or the first roller 42 in a state where the driving of the loading roller 23 is stopped (in the state in which the end portion of the sheet-like substrate FB is held) Two rollers 44 and the like. At the same time, the control unit 5 controls the drive source 51a such that the expansion and contraction portion 52b of the folding mechanism 46 having the first moving roller 47 and the expansion and contraction portion 52b of the folding mechanism 46 having the second moving roller 48 are gradually contracted. In this case, the control unit 5 sequentially extends the expansion-contraction portion 52 of the folding-back mechanism 46 from the depth direction side of the substrate 匣CTR toward the wall surface 10a side in the expansion-contraction portion 52b of the plurality of folding mechanisms 46. After the sheet substrate FB is substantially horizontally opened between the second roller 44 and the carry-out roller 33, the control unit 5 releases the terminal of the sheet substrate FB from the loading roller 23, and the movable guiding plate 45 is parallel to the Y direction. In the state, the terminal end of the sheet substrate FB is guided to the carry-out drum 33. In this manner, while the sheet substrate FB is supplied, the sheet substrate FB is recovered and processed in the substrate processing apparatus PR.

As described above, according to the present embodiment, the accommodating portion 1 for accommodating the sheet-like substrate FB, the transfer port 3 for accommodating the sheet-like substrate FB, and the accommodating portion 1 are provided, and the sheet-like substrate FB is carried in. In the transfer port 2, the end portion Fh of the sheet substrate FB accommodated in the accommodating portion 1 is guided from the transfer port 2 to the guide portion 4 of the transfer port 3, so that the sheet substrate FB accommodated in the substrate 匣CTR is FB At the time of delivery, the sheet substrate FB is fed so that the end portion Fh is at the front end during storage. Therefore, it is not necessary to manage the front end and the extreme end of the sheet substrate FB each time. Thereby, the burden on the management of the sheet substrate FB can be alleviated in the substrate processing system SYS.

(Second embodiment)

Next, a second embodiment of the present invention will be described.

In the substrate 本 of the present embodiment, the configuration of the movable guiding plate 45 is different from that of the first embodiment. Therefore, the difference will be mainly described. The other configuration is the same as that of the first embodiment, and thus the description thereof is omitted or simplified.

Fig. 7 is a view showing the configuration of the substrate 匣CTR2 of the present embodiment. Fig. 8 is a view showing the configuration along the line B-B in Fig. 7.

As shown in FIG. 7 and FIG. 8, in the present embodiment, the movable guide plate 45 is divided in the X direction, and a plurality of plate-like members 45a are disposed in a state of being separated from each other in the X direction. That is, the movable guiding plate 45 is formed, for example, in a rectangular shape. Each of the plate-like members 45a may be configured to be individually rotatable, for example, and may be configured such that a plurality of plate-like members 45a are integrally rotatable. Moreover, the shape (comb shape) in which one of the plate-shaped members 45a is connected to each other may be used.

By forming the movable guide plate 45 into a rectangular shape (or a comb shape), for example, during the period from the second roller 44 to the carry-out roller 33 before the end portion Fh of the sheet substrate FB, the first moving roller 47 can be previously moved. The roller portion 54 is lifted up to the position 54F. The position 54F is a position at which the upper surface of the plurality of plate-like members 45a constituting the movable guide plate 45 and the outer circumferential surface of each of the roller portions 54 have substantially the same height (position in the Z direction). Therefore, the conveyance guide path of the sheet substrate FB can be stably ensured.

The technical scope of the present invention is not limited to the above-described embodiments, and may be appropriately modified without departing from the spirit and scope of the invention.

For example, in the above-described embodiment, the configuration in which the transfer inlet 2 is disposed on the +Z side and the transfer port is disposed on the -Z side will be described as an example, but the invention is not limited thereto. For example, as shown in FIG. 9A, the transfer inlet 2 may be disposed on the -Z side (lower side), and the transfer port 3 may be disposed on the +Z side (upper side). In the configuration shown in FIG. 9A, the sheet substrate FB carried in from the loading port 2 on the -Z side is guided by the fixed guide plate 41 disposed on the -Z side in the -X direction, and then transmitted through the first roller ( The drive roller 42 and the parallel guide plate 43 are guided in the +Z direction. The sheet-like substrate FB passing through the parallel guide plate 43 and the second roller (driving roller) 44 is guided to, for example, the movable guide plate 45 and the folding-back mechanism 46 disposed on the +Z side.

In the above-described embodiment, the first moving roller 47 and the second moving roller 48 disposed on the front side and the back side of the sheet substrate FB in the folding mechanism 46 are configured to move up and down in the opposite direction of the Z direction, but In the present embodiment, for example, as shown in FIG. 9A, the sheet substrate FB is placed in the initial state, that is, the end portion of the sheet substrate FB before reaching the outlet 3, and the sheet substrate FB between the outlet 3 and the drum 44 is shown. When the state is substantially horizontal, the second moving roller 48 located above the sheet substrate is moved in the -Z direction. Therefore, the first moving roller 47 can be pivotally supported at a position above the substrate 匣CTR (+Z direction).

In the configuration shown in Fig. 9A, for example, the first moving roller 47 is fixed, and only the second moving roller 48 is elongated in the Z direction on both side walls of the substrate 匣CTR (the side wall in the plane parallel to the paper surface of Fig. 9A). The guide groove is guided to move in the Z direction. Therefore, at both ends of the second moving roller 48, similarly to the first moving roller 47 shown in Fig. 9A, for example, a protruding shaft portion is formed to be engaged with the guiding groove.

In the fixed moving first moving roller 47, for example, as shown in FIG. 9B, the shaft portion 47A projecting on both end sides of the drum 47 is rotatably provided with an annular bearing 47B, respectively, and the bearing 47B is mounted with a movable guiding plate. Above the 45. Therefore, even if the first moving roller 47 rotates in the θY direction, the movable guiding plate 45 is switched to a substantially horizontal state (substantially parallel to the X direction) indicated by a solid line in FIG. 9A or a substantially vertical state indicated by a broken line. (substantially parallel to the Z direction). This switching is performed in accordance with the transport procedure of the sheet substrate FB, and the movable guide plates 45 respectively supported by the plurality of first moving rollers 47 are simultaneously or sequentially (procedural) by a drive mechanism (not shown).

The movable guide plate 45 is disposed in a state of being disposed between the adjacent first moving rollers 47 in a state of being disposed parallel to, for example, the X direction (or an inclination of a plurality of ascending gradients in the traveling direction of the sheet substrate). . However, as shown in FIG. 9A, a gap in which the front end of the guide plate 45 is not in contact with the adjacent roller 47 may be provided. Moreover, in a state of being arranged in parallel with the Z direction, as shown in FIG. 9B, the state is retracted from between the adjacent first moving rollers 47.

Further, in the configuration shown in Fig. 9A, a slider member 49 for adjusting the timing of the movement of the second moving roller 48 in the Z direction is provided. The slider member 49 has a support portion (a claw portion) that engages with a shaft portion at both ends of each of the second moving rollers 48, and a guide recess groove that guides the shaft portion. For example, two adjacent second moving rollers 48 will be described as an example.

As shown in Fig. 10, the slider member 49 has support portions (claw portions) 49c, 49d for supporting the shaft portions 48Aa and 48Ab of the adjacent two second moving rollers 48, and guiding the shaft portions 48Aa and 48Ab. The guide recess grooves 49a, 49b. The adjacent support portions 49c, 49d have different dimensions in the X direction. Specifically, the dimension of the support portion 49c in the X direction is formed to be larger than the dimension of the support portion 49d in the X direction.

Therefore, as shown in FIGS. 11A, 11B, 11C, and 11D, when the slider member 49 is moved in the +X direction, the shaft portion 48Ab supported by the support portion 49d having a short dimension in the X direction is first released from the support state. The second moving roller 48 having the shaft portion 48Ab moves in the -Z direction while pressing the sheet substrate FB. When the slider member 49 is further moved in the +X direction, the shaft portion 48Aa supported by the support portion 49c having a large dimension in the X direction is released from the support state, and the second moving roller 48 having the shaft portion 48Aa is also in the form of a sheet. The substrate FB is pressed down and moved in the -Z direction. As described above, since the slider member 49 is formed to have a support portion having a different size in the X direction, the second moving roller 48 disposed in the X direction can be adjusted by, for example, moving the slider member 49 in the +X direction. - Z direction movement (falling) timing.

Further, by the slider member 49, the shaft portion of each of the second moving rollers 48 is held again, for example, as shown in Fig. 12A, the positions of all the second moving rollers 48 and the first moving roller 47 in the Z direction are substantially the same. Next, for example, the entire slider member 49 is moved from the -Z side to the +Z side. In other words, as shown in FIG. 9A, when all of the second moving rollers 48 are located at the lowermost side and the sheet substrate FB is stored (storage) for the longest state, the sheet-like substrate FB is sequentially taken out from the delivery port 3 to the processing apparatus side. Each of the second moving rollers 48 corresponds to a sheet shape by pressing (clamping) the sheet substrate FB without sliding by the first roller (driving roller) 42 or the second roller (driving roller) 44 that is in a driving stop state. The amount of conveyance of the substrate FB from the delivery port 3 gradually moves upward (+Z direction), and the state shown in FIG. 12A is obtained. Thereafter, as shown in Fig. 12B, the slider member 49 is moved in the X direction so that the guide recess groove 49e and the guide recess groove 49f coincide with the positions of the shaft portions 48Aa, 48Ab of the respective second moving rollers 48, so that the shaft The portions 48Aa, 48Ab enter the guide recess grooves 49e, 49f, respectively. After the slider member 49 supports the shaft portions of all the second moving rollers 48, for example, the second roller 44 and the carry-out roller 33 are driven to carry out the sheet substrate FB.

Further, as shown in FIG. 13A and FIG. 13B, a configuration in which, for example, the engagement edge portion 49g is provided in one portion of the slider member 49 may be employed. In this case, the dimension L1 in the X direction of the guide recess groove 49a and the dimension L2 in the X direction of the guide recess groove 49b are formed in the same size in advance. In this case, as shown in Fig. 13B, after all of the second moving rollers 48 are moved to the lowermost portion in the -Z direction, the slider member 49 is moved directly in the -Z direction, and is engaged with the axis of the guiding recess groove 49a. The portion 48Aa is freely movable to the +Z side through the guide recess groove 49h at its position. On the other hand, the shaft portion 48Ab that is engaged with the guide recess groove 49b is locked by the engagement edge portion 49g to the +Z side.

In the above embodiment, since the sheet substrate FB is pressed down toward the -Z side by the weight of the second moving roller 48, when the sheet substrate FB is taken out from the delivery port 3, each of the second moving rollers 48 is When the rotational friction is extremely small, the tension corresponding to the weight of the second moving roller 48 itself is imparted to the sheet substrate FB. Therefore, by selecting the weight of the second moving roller 48, the tension of the sheet substrate FB fed to the processing apparatus can be set to an appropriate range.

Further, in the above-described embodiment, the inlet 2 and the outlet 3 are provided on the same wall surface 10a of the casing 10 of the substrate 匣CTR. However, the present invention is not limited thereto. For example, as shown in Fig. 14, the inlet 2 and the outlet are provided. 3 may be disposed on different wall surfaces of the casing 10.

As shown in FIG. 14, for example, wall faces 10a and 10d are provided in the casing 10 of the substrate 匣CTR. Among them, the inlet 2 is provided in the wall surface 10a. The carry-out port 3 is provided in the wall surface 10d. Further, although FIG. 14 shows a configuration in which the carry-in 2 is disposed on the +Z side and the transfer port 3 is disposed on the -Z side, the present invention is not limited thereto, and the positions of the carry-in 2 and the transfer 3 in the Z direction can be arbitrarily set (+ The Z side, the -Z side, the center of the Z direction, and the like can be appropriately set). Further, the connected ports 6A and 6D are provided on the wall surface 10a and the wall surface 10d, respectively.

Fig. 15 is a schematic view showing the configuration of a substrate processing system SYS using the substrate 匣CTR shown in Fig. 14.

As shown in FIG. 15, in this case, the substrate processing apparatus PR is connected to the substrate 匣CTR at both end portions on the +X side and the -X side. For example, the connection portion CN at the end portion on the +X side is connected to the connected port 6A on the wall surface 10a side of the substrate 匣CTR. Further, the connection portion CN of the end portion on the -X side is connected to the connected port 6D on the wall surface 10d side of the substrate 匣CTR. As described above, the substrate 匣CTR may be used as the substrate supply unit SU and the substrate collection unit CL. In this case, the substrate 匣CTR provided in the substrate supply unit SU stores the sheet substrate as shown in FIGS. 6 and 9A, and the substrate 匣CTR is disposed in the substrate collection unit CL, and is processed by the substrate processing apparatus PR. The sheet substrate may be recovered by the substrate 匣CTR on the substrate collection portion CL side.

In the above-described embodiment, the configuration in which one of the inlet 2 and the outlet 3 of the substrate 匣CTR is provided is described as an example. However, the present invention is not limited thereto, and a plurality of the inlet 2 and the outlet 3 are provided in plurality. It can also be constructed. For example, in the configuration shown in Fig. 16, a plurality of outlets (for example, two outlets 3A and 3B) are provided in one casing 10. Further, the guide portion 4 has a path switching mechanism (movable guide plate or the like) 40 that switches the guide path of the sheet substrate FB of the casing 10 from the carry-in port 2 to the carry-out ports 3A and 3B. The switching operation of the path switching mechanism 40 can be controlled by, for example, the control unit 5. In addition, although the configuration shown in FIG. 16 is described by taking a configuration in which a plurality of the outlets 3A and 3B are provided as an example, the present invention is not limited thereto. For example, the plurality of (two or more) inlets 2 are provided. The configuration may be such that three or more configurations may be provided for the outlet 3 . In the configuration shown in Fig. 16, the case where the carry-in port 2 and the transfer port 3 (3A and 3B) are disposed on the individual wall faces 10a and 10d will be described. However, the present invention is not limited thereto, and a plurality of the same wall faces are formed. The configuration of the entrance 2 and the outlet 3 may be adopted. Of course, a plurality of the inlets 2 and the outlets 3 may be formed in a plurality of wall surfaces (for example, the wall surfaces 10a and 10d, respectively).

Further, the transfer port and the transfer port may be provided on the top of the case 10 of the substrate 匣CTR. Thus, in the case where the substrate processing apparatus PR group is provided on the second floor of the manufacturing plant, the substrate 匣CTR and the floor are provided on the first floor. The sheet substrate can be efficiently transported between the upper substrate processing apparatuses PR.

(Third embodiment)

Next, a third embodiment of the present invention will be described with reference to Fig. 17 .

In the substrate cassette of the present embodiment, the configuration in which the first moving roller 47 and the second moving roller 48 are folded back in the plurality of times in the inside of the substrate substrate is different from that in the first embodiment, and therefore the difference is centered on the difference Be explained. The other configuration is the same as that of the first embodiment, and thus the description thereof is omitted or simplified.

In the first embodiment shown in Figs. 5 to 8, the movement of the first moving roller 47 and the second moving roller 48 adjacent to each other in the Z direction is reversed (compensated). Therefore, as shown in Fig. 17, the pair of the first moving roller 47 and the second moving roller 48 adjacent to each other is suspended at both ends of the timing belts 103A, 103B. The timing belts 103A, 103B are configured such that the pulleys 100A, 100B rotatably supported above the side walls of the substrate, for example, are suspended in an inverted U shape.

The ends of the timing belts 103A, 103B are fixed to bearings 47B, 48B which are rotatably supported by the shaft portions at both ends of the rollers 47, 48. If the weights of the first moving roller 47 and the second moving roller 48 are substantially the same, even if the rotational driving force (torque) is not applied to the pulleys 100A, 100B in an ideal state, the height positions of the rollers 47, 48 are continuously maintained. Its location.

The drive pulley 102 is coaxially fixed to one of the pulleys 100A, 100B, for example, on the side of the pulley 100A, coaxially with the pulleys 100A, 100B, and the endless belt 104 is hung between the drive pulleys 102 adjacent to the X direction. Therefore, when the drive pulley 102 positioned at the extreme end in the X direction is driven by the motor, all the drive pulleys 102, that is, all the pulleys 100A, 100B are rotated at the same speed, for example, when all of the first moving rollers 47 move upward together All of the second moving rollers 48 move together downward.

Fig. 17 is a view showing the state (initial loading state) of Fig. 5 (or Fig. 7) of the first embodiment, and the sheet substrate FB is loaded above each of the first moving rollers 47 and below each of the second moving rollers 48. Space. In this state, when the driving pulley 102 driven by the motor is rotated, all of the first moving rollers 47 move upward together, and while supporting the back surface of the sheet substrate FB, they are lifted up to the uppermost position, and at the same time, all the second The moving roller 48 moves downward together and pulls down to the lowest position while being in contact with the surface of the sheet substrate FB, whereby the sheet substrate FB is stored in the substrate stack in the same manner as in the above-described FIG.

(Fourth embodiment)

Fig. 18 is a perspective view showing the configuration of a substrate storage device according to a fourth embodiment.

As shown in FIG. 18, the substrate storage device STR includes a container CT that accommodates a flexible substrate S in a strip shape, and a plurality of folded portions RC on which the substrate S is suspended. The substrate storage device STR stores the substrate S in a container CT placed on the floor surface FL, for example, and is stored in a state of being suspended in a plurality of folded portions RC.

Hereinafter, in the description of the substrate storage device STR, the XYZ orthogonal coordinate system is set, and the positional relationship of each member will be described with reference to the XYZ orthogonal coordinate system. In the following illustration, the ground FL is set to the XY plane among the XYZ orthogonal coordinate systems. Among the XY planes, the short side direction of the substrate S is the Y-axis direction, and the direction orthogonal to the Y-axis direction is the X-axis direction. Further, it is assumed that the direction perpendicular to the floor surface FL (XY plane) is the Z-axis direction.

The container CT, for example, is formed into a rectangular parallelepiped shape having six wall faces. A housing chamber RM surrounded by the six wall faces is formed inside the container CT. The container CT has two openings (EN, EX) on the same wall surface CTa. The opening of one of the substrates is carried into the substrate transfer inlet EN of the storage chamber RM. The other opening is a substrate carrying outlet EX that carries out the substrate of the storage chamber RM. In the present embodiment, the configuration in which the substrate loading port EN is disposed on the -Z side of the substrate carrying-out port EX will be described as an example. However, the arrangement may be reversed.

A carry-in roller Rn is provided in the vicinity of the substrate transfer inlet EN in the storage chamber RM. The loading roller Rn is provided with a pair at a position where the substrate S is held in the Z direction. The loading roller Rn can be rotated in such a manner that the substrate S carried in from the substrate loading port EN is introduced into the storage chamber RM.

A carry-out roller Rx is provided in the vicinity of the substrate discharge port EX in the storage chamber RM. The carry-out roller Rx is provided with a pair at a position where the substrate S is held in the Z direction. The carry-out roller Rx can be rotated so that the substrate S carried out from the substrate discharge port EX is sent out to the outside of the storage chamber RM.

The plurality of folded portions RC have any one of a plurality of (here, 15) rollers R1 to R15 provided in the storage chamber RM. Each of the rollers R1 to R15 has a shaft portion Ra parallel to the Y direction. Each of the rollers R1 to R15 is rotatably supported by, for example, a wall portion on the +Y side and the -Y side of the container CT. A cylindrical outer peripheral portion Rb on which the accommodated substrate S is suspended is provided around the shaft portion Ra of each of the rollers R1 to R15.

Each of the rollers R1 to R15 is disposed in the transport path of the substrate S from the substrate transfer inlet EN to the substrate discharge port EX. Hereinafter, the arrangement of the rollers R1 to R15 will be specifically described.

Among the plurality of rollers R1 to R15, four rollers R1, R3, R5 and R7 are arranged side by side on a straight line parallel to the X-axis direction. Similarly, the three rollers R2, R4, and R6 are arranged side by side on a straight line parallel to the X-axis direction. The three rollers R2, R4 and R6 are disposed on the -Z side of the four rollers R1, R3, R5 and R7.

Further, among the plurality of rollers R1 to R15, four rollers R9, R11, R13 and R15 are arranged side by side on a straight line parallel to the X-axis direction. The four rollers R9, R11, R13 and R15 are arranged adjacent to the +Z side of the four rollers R1, R3, R5 and R7.

Further, among the plurality of rollers R1 to R15, three rollers R10, R12 and R14 are arranged side by side on a straight line parallel to the X-axis direction. The three rollers R10, R12, and R14 are disposed on the -Z side of the four rollers R1, R3, R5, and R7, and are disposed adjacent to the +Z sides of the three rollers R2, R4, and R6.

The row of rollers arranged side by side in the X direction in the above manner is provided in four rows in the Z direction.

Among the four rows of rollers, two rows at the two ends of the Z direction (+Z side ends: rollers R9, R11, R13, and R15, -Z side ends: rollers R2, R4, and R6) are compared with the drums. The diameter of the other two rows of rollers is formed to be large.

As described above, the two rollers R1 and R15 having different diameters among the rollers R1 to R15 are arranged adjacent to each other in the Z direction (wherein the diameter of the roller R1 is smaller than the diameter of the roller R15. Hereinafter, only "R1 < R15" is described. ). Further, rollers R2 and R14 (R14 < R2), rollers R3 and R13 (R3 < R13), rollers R4 and R12 (R12 < R4), rollers R5 and R11 (R5 < R11), rollers R6 and R10 (R10 < R6) ), the rollers R7 and R9 (R9 < R7) are also arranged adjacent to each other in the Z direction.

The substrate S is suspended from the rollers R1 to R15 in order to guide the transport path from the substrate carry-in EN to the substrate transfer exit EX. The substrate S is sequentially suspended in the +X direction from the respective rollers from the substrate carry-in EN to the roller R7. Specifically, the substrate S is folded back in the -Z direction by the roller R1. The downstream side of the drum R1 among the substrates S is folded back in the +Z direction by the drum R2. The downstream side of the drum R2 among the substrates S is folded back in the -Z direction by the drum R3. In the above manner, from the drum R1 to the drum R7, the substrate S is alternately folded back in the +Z direction and the -Z direction.

The substrate S suspended from the drum R7 is suspended from the drum R9 via a drum R8 for direction change. The substrate S is sequentially suspended in the -X direction from the respective rollers (R9 to R15) from the drum R9 to the substrate discharge port EX. Specifically, the substrate S is folded back in the -Z direction by the roller R9. The downstream side of the drum R9 among the substrates S is folded back in the +Z direction by the drum R10. The downstream side of the drum R10 among the substrates S is folded back in the -Z direction by the drum R11. In the above manner, from the drum R9 to the drum R15, the substrate S is alternately folded back in the +Z direction and the -Z direction, and the substrate S is accommodated so that the substrate S overlaps in the X direction.

In the substrate S in which the transport path is guided from the substrate transfer inlet EN to the substrate discharge port EX, the substrate transfer inlet EN is in a state in which the first surface Sa faces the +Z side and the second surface Sb faces the -Z side. In addition, the substrate carrying-out port EX is in a state in which the first surface Sa faces the -Z side and the second surface Sb faces the +Z side.

In the present embodiment, the substrate S is folded back in the drum R6 so that the first surface Sa of the substrate S faces each other. Further, a portion of the substrate S that is folded back to the downstream side of the roller R6 by the roller R6 is referred to as a first portion S1. Further, the portion of the substrate S that is folded back by the roller R6 to the opposite direction to the first portion S1 is referred to as a fourth portion S4.

In the drum R7, the first portion S1 is folded back such that the second surface Sb of the first portion S1 faces each other. Further, a portion of the substrate S which is folded back to the downstream side of the roller R7 by the roller R7 is referred to as a second portion S2.

In the drum R8 and the drum R9, the direction is switched such that the second portion S2 faces the drum R6. Further, a portion of the substrate S that has been converted by the direction of the drum R8 and the drum R9 is referred to as a third portion S3.

In the drum R10, the third portion S3 is folded back along the first surface Sa of the fourth portion S4. At the same time, for example, the third portion S3 is folded back by the roller R10 so that the third portion S3 and the fourth portion S4 move in opposite directions in a state where the substrate S moves from the substrate carry-in EN to the substrate carry-out EX.

Since the substrate S is folded back from the drum R6 to the drum R10 in the above-described manner, the portion of the substrate S suspended from the rollers R1 to R7 and the portion of the substrate S suspended from the rollers R9 to R15 are arranged to overlap in the Z direction. In the embodiment, the diameter of the roller row on the central portion side of the storage chamber RM is smaller than the diameter of the roller row roller on the end surface side in the Z direction. Therefore, the portions of the substrate S that overlap in the Z direction do not contact each other.

The portion between the drum R1 and the drum R2 suspended in the substrate S of the rollers R1 to R15 is parallel to the YZ plane. As described above, the four rollers R1, R3, R5, and R7 constituting the roller row in the second row from the +Z side among the four rows of the roller rows, and the three rollers constituting the roller column of the most-Z side are arranged. The position of the rollers R1 to R7 in the X direction is adjusted such that the substrate S between R2 and R4 and R6 is parallel to the YZ plane.

Similarly, the four rollers R9, R11, R13, and R15 constituting the most +Z side roller row among the four rows of the roller rows, and the three rollers constituting the second column from the -Z side are arranged. The position of the drums R9 to R15 in the X direction is adjusted such that the substrate S between R10 and R12 and R14 are parallel to the YZ plane.

In the above description, the case where the substrate S moves from the substrate carry-in EN toward the substrate transfer opening EX in the storage chamber RM will be described as an example. However, for example, the substrate S moves from the substrate transfer opening EX toward the substrate transfer inlet EN in the storage chamber RM. In the case of the same, the same description can be made. In this case, since the moving direction of the substrate S is opposite to the above description, the substrate carrying-out EX side is the upstream side and the substrate carrying-in EN side is the downstream side.

As shown in FIG. 18, for example, in the drum R10, the substrate S is folded back so that the second surface Sb of the substrate S faces each other. Further, a portion of the substrate S that is folded back to the downstream side of the roller R10 by the roller R10 is referred to as a first portion T1. Further, a portion of the substrate S which is folded back by the roller R10 to the opposite direction to the first portion T1 is referred to as a fourth portion T4.

In the drum R9, the first portion T1 is folded back in such a manner that the first surface Sa of the first portion T1 opposes each other. Further, a portion of the substrate S that is folded back to the downstream side of the roller R9 by the roller R9 is referred to as a second portion T2.

In the drum R9 and the drum R8, the direction is switched such that the second portion T2 faces the drum R10. Further, a portion of the substrate S that has been converted by the direction of the drum R8 and the drum R9 is referred to as a third portion T3.

In the drum R6, the third portion T3 is folded back along the second surface Sb of the fourth portion T4. At the same time, the third portion T3 is folded back by the roller R6 so that the third portion T3 and the fourth portion T4 move in opposite directions in a state where the substrate S moves from the substrate carry-out exit EX to the substrate carry-in EN, for example.

As described above, when the substrate S moves from the substrate unloading port EX to the substrate carrying-in EN, the substrate S is folded back from the drum R10 to the drum R6 in the above-described manner. Therefore, the portion of the substrate S that is suspended from the rollers R1 to R7 and the portion of the substrate S that is suspended from the rollers R9 to R15 are arranged to overlap in the Z direction.

As described above, according to the present embodiment, the substrate S is accommodated in the storage chamber RM in a state in which the substrate S is folded in the wavy direction and arranged to overlap in the Z direction. Therefore, the substrate can be efficiently accommodated in the limited space of the storage chamber RM. S. Thereby, the substrate storage device STR having a high storage capacity of the substrate S can be obtained.

(Fifth Embodiment)

Next, a fifth embodiment of the present invention will be described.

Fig. 19 is a view showing the configuration of the substrate storage device STR2 of the present embodiment. In the present embodiment, the configuration of the plurality of folded portions RC is different from that of the fourth embodiment. Therefore, the description will be focused on this point. Further, other configurations are the same as those of the fourth embodiment. The same components as those in the fourth embodiment are denoted by the same reference numerals to omit or simplify the description. Further, in the present embodiment, the XYZ orthogonal coordinate system will be described in the same manner as the fourth embodiment.

As shown in FIG. 19, the substrate storage device STR2 constitutes a plurality of folded portions RC such that the substrate S is triple-arranged in the Z direction. The folded portion RC has any one of a plurality of rollers R21 to R44.

Among the rollers R21 to R44, eleven rollers are arranged on the -Z side with respect to the central portion of the storage chamber RM in the Z direction. Among them, four rollers R21, R23, R25 and R27, four rollers R29, R31, R33 and R35, and three rollers R37, R39 and R41 are arranged side by side in the X direction.

Further, among the rollers R21 to R44, 13 rollers are arranged on the +Z side with respect to the central portion of the storage chamber RM in the Z direction. Among them, three rollers R22, R24 and R26, four rollers R28, R30, R32 and R34, and four rollers R36, R38, R40 and R42 are arranged side by side in the X direction. Further, rollers R43 and R44 are provided along the inner wall of the +Z side of the container CT.

As described above, in the present embodiment, the row of the rollers arranged in the X direction is provided in six rows in the Z direction. The row of the six rows of rollers is provided in three rows on the +Z side from the central portion of the storage chamber RM in the Z direction, and three rows on the -Z side. Among the accommodating chambers RM, the diameter of the roller row from the end portion side in the Z direction toward the roller row of the center portion side is gradually reduced.

After the substrate S is carried into the storage chamber RM through the loading roller Rn from the substrate loading inlet EN, the substrate S is folded back in the +Z direction by the roller R21. The downstream side of the drum R21 among the substrates S is folded back in the -Z direction by the drum R22. The substrate S is similarly reciprocated in the +Z direction and the -Z direction on the rollers R23 to R27.

The downstream side of the roller R27 in the substrate S is folded back by the roller R28 for direction change to change the direction. The downstream side of the roller R28 in the substrate S is alternately folded back in the +Z direction and the -Z direction by the rollers R29 to R34, and is re-turned by the roller R35 for direction change.

The downstream side of the drum R35 in the substrate S is alternately folded back in the +Z direction and the -Z direction by the rollers R36 to R41, and is turned by the rollers R42 and R43 for direction change. In the above manner, the substrate S is disposed in a state of being overlapped in the X direction. Further, the downstream side of the drum R43 in the substrate S faces the substrate discharge port EX, is suspended by the drum R44, and is carried out from the substrate discharge port EX through the carry-out drum Rx.

Among the substrates S suspended by the rollers R21 to R42, for example, a portion between the rollers R21 and the roller R22 is parallel to the YZ plane. As described above, the positions of the rollers R21 to R42 in the X direction are adjusted so that the portion of the substrate S that hangs from the center portion in the Z direction of the storage chamber RM is parallel to the YZ plane.

In the present embodiment, the substrate S is folded back in the drum R26 so that the second surface Sb of the substrate S faces each other. Further, a portion of the substrate S that is folded back to the downstream side of the roller R26 by the roller R26 is referred to as a first portion S21. Further, the portion of the substrate S that is folded back by the roller R26 to the opposite direction to the first portion S21 is referred to as a fourth portion S24.

In the drum R27, the first portion S21 is folded back such that the first surface Sa of the first portion S21 opposes each other. Further, a portion of the substrate S that is folded back to the downstream side of the roller R27 by the roller R27 is referred to as a second portion S22.

In the drum R28 and the drum R29, the direction is switched such that the second portion S22 faces the drum R26. Further, a portion of the substrate S that has been converted by the direction of the drum R28 and the drum R29 is referred to as a third portion S23.

In the drum R30, the third portion S23 is folded back along the first surface Sa of the fourth portion S24. At the same time, for example, the third portion S23 is folded back by the roller R30 so that the third portion S23 and the fourth portion S24 move in opposite directions in a state where the substrate S moves from the substrate carry-in EN to the substrate carry-out EX.

Since the substrate S is folded back from the drum R26 to the drum R30 in the above-described manner, the portion of the substrate S suspended from the rollers R21 to R27 and the portion of the substrate S suspended from the rollers R29 to R35 are arranged to overlap in the Z direction.

Further, in the drum R33, the substrate S is folded back so that the second surface Sb of the substrate S faces each other. Further, a portion of the substrate S that is folded back to the downstream side of the roller R33 by the roller R33 is referred to as a first portion T21. Further, a portion of the substrate S that is folded back by the roller R33 to the opposite direction to the first portion T21 is referred to as a fourth portion T24.

In the drum R34, the first portion T21 is folded back in such a manner that the first surface Sa of the first portion T21 opposes each other. Further, a portion of the substrate S that is folded back to the downstream side of the roller R34 by the roller R34 is referred to as a second portion T22.

In the drum R35 and the drum R36, the direction is switched such that the second portion T22 faces the drum R33. Further, a portion of the substrate S that has been converted by the direction of the drum R35 and the drum R36 is referred to as a third portion T23.

In the drum R37, the third portion T23 is folded back along the first surface Sa of the fourth portion T24. At the same time, the third portion T23 is folded back by the roller R37 so that the third portion T23 and the fourth portion T24 move in opposite directions in a state where the substrate S moves from the substrate carry-in EN to the substrate carry-out EX, for example.

Since the substrate S is folded back from the drum R33 to the drum R37 in the above-described manner, the portion of the substrate S suspended from the rollers R29 to R35 and the portion of the substrate S suspended from the rollers R36 to R42 are arranged to overlap in the Z direction.

In the present embodiment, since the diameter of the roller row from the end portion on the end side in the Z direction toward the center portion on the side of the storage chamber RM is small, the portions of the substrate S that overlap in the Z direction do not overlap each other. contact.

Further, the method of determining the diameter of the roller having a small diameter is the same as that of the first embodiment described above.

As described above, according to the present embodiment, the substrate S is accommodated in the storage chamber RM in a state in which the substrate S is folded in the wavy direction and arranged in the Z direction, so that the substrate can be efficiently accommodated in the limited space of the storage chamber RM. S. Thereby, the substrate storage device STR2 having a high housing capacity of the substrate S can be obtained.

(Sixth embodiment)

Next, a sixth embodiment of the present invention will be described.

Fig. 20 is a view showing the configuration of the substrate storage device STR3 of the present embodiment. In the present embodiment, the substrate carrying-in EN and the substrate carrying-out EX are different from each other in the container CT, which is different from the fifth embodiment. Further, the configuration of the folded portion RC is different from that of the fifth embodiment. The other configuration is the same as that of the fifth embodiment. Further, in the present embodiment, the XYZ orthogonal coordinate system will be described in the same manner as the above embodiment.

As shown in FIG. 20, the substrate carry-in EN is provided in the wall portion CTa on the -X side of the container CT. On the other hand, the substrate discharge port EX is provided in the wall portion CTb on the +X side of the container CT. As described above, the substrate carrying-in EN and the substrate carrying-out EX are provided in different wall portions in the X direction in the container CT.

The arrangement of the rollers R21 to R42 is the same as that of the fifth embodiment. Therefore, the positional relationship between the first portion S21 to the fourth portion S24 and the first portion T21 to the fourth portion T24 of the substrate S is also the same as that of the fifth embodiment. In the present embodiment, since the rollers R43 and R44 of the fifth embodiment are not provided, the space of the storage chamber RM can be correspondingly reduced.

Further, since the substrate S is not folded back in the drum R43, the positional relationship between the first surface Sa and the second surface Sb of the substrate S carried in from the substrate loading port EN and the first surface of the substrate S carried out from the substrate carrying-out port EX can be made. The positional relationship between Sa and the second side Sb is the same. Specifically, both the substrate carry-in EN and the substrate carry-out EX are the first surface Sa of the substrate S facing the +Z side, and the second surface Sb is facing the -Z side.

The technical scope of the present invention is not limited to the above-described embodiments, and may be appropriately modified without departing from the spirit and scope of the invention.

For example, in the fifth embodiment and the sixth embodiment, the position of the rollers R21 to R42 in the X direction is adjusted such that the portion of the substrate S that hangs in the central portion in the Z direction of the storage chamber RM is parallel to the YZ plane. The examples are described, but are not limited thereto.

The diameter of the rollers R36, R38, R40, and R42 arranged in the X direction and the diameters of the rollers R28, R30, R32, and R34 disposed in the X direction are the end portions of the storage chamber RM from the end portion side toward the center portion side in the Z direction. The diameters of the rollers R22, R24, and R26 arranged in the X direction are gradually reduced, and the diameters of the rollers R37, R39, and R41 disposed in the X direction are arranged in the X direction from the center portion side of the storage chamber RM toward the ground side. The diameters of the rollers R35, R33, R31, and R29 and the diameters of the rollers R21, R23, R25, and R27 disposed in the X direction are gradually increased. For example, as shown in FIG. 21, the substrate S is placed across the storage chamber. It is also possible to arrange the rollers R21 to R42 so that the portion in which the center portion of the RM is suspended in the Z direction is inclined with respect to the YZ plane. In this case, compared with the fifth embodiment and the sixth embodiment, the distance of the drum in the X direction is small. Therefore, the container CT can be miniaturized in the X direction.

Further, in Fig. 21, the limitation of the diameter of the rollers R24 and R37 of the minimum diameter is as described in the first embodiment. Further, the limits of the diameters of the plurality of rollers of the minimum diameter in Fig. 20 are also the same.

In FIG. 21, the substrate S between the rollers R23, R33, and R37 and the rollers R24, R32, and R38 is described as a representative, but the same portions may be similarly described. Further, in the fourth embodiment, the row of the rollers R36, R38, R40, and R42 from the end portion of the storage chamber RM in the Z direction faces the roller R22, R24, and R26 of the center portion side. It becomes smaller, so the same explanation can be made.

In each of the above-described embodiments, the guide portion for guiding the substrate S so as to carry the substrate S from the substrate loading port EN and then suspending the substrate S from the respective rollers R21 to R42 is appropriately provided in the storage chamber RM. It can also be constructed. Thereby, the substrate S can be surely suspended from the respective rollers R21 to R42.

Further, as a modification of the above embodiment, for example, the arrangement of the drum shown in Fig. 22 is also possible. For the three rollers R43, R28, R42, three rollers R27, R29, R41, three rollers R26, R30, R40, three rollers R25, R31, R39, 3 in the Z direction The rollers R24, R32, R38, the three rollers R23, R33, R37, and the three rollers R22, R34, and R36 respectively connect the ends of the shaft Ra (Fig. 18) extending in the Y direction by the joint member 210 (this joint member 210) Can be moved in the Z direction). That is, the three rollers R43, R28, and R42 are attached to the connecting member 210a, the three rollers R27, R29, and R41 are attached to the connecting member 210b, and the three rollers R26, R30, and R40 are attached to the connecting member 210c, and three. The rollers R25, R31, and R39 are attached to the connecting member 210d, and the three rollers R24, R32, and R38 are attached to the connecting member 210e, and the three rollers R23, R33, and R37 are attached to the connecting member 210f and the three rollers R22 and R34. The R36 is attached to the joint member 210g. Further, the connecting members 210a to 210g are disposed in advance so that two of the three rollers are arranged side by side in the X direction and the remaining one of the rollers is alternately exposed on the +Z side and the -Z side. That is, the rollers R42, R29, R40, R31, R38, R33, and R36 are arranged side by side in the X direction, and the rollers R28, R27, R30, R25, R32, R23, and R34 are arranged side by side in the X direction. Further, the rollers R41, R39, and R37 are exposed on the +Z side, and the rollers R43, R26, R24, and R22 are exposed on the -Z side. Among the two rows of rollers arranged side by side in the X direction, a fixed roller 220A is disposed on the +X side of the rollers R28, R27, R30, R25, R32, R23, and R34, and rollers R42, R29, R40, R31, R38, and R33 are disposed. A fixed roller 220B is disposed on the -X side of the R36.

In this state, as shown in FIG. 22, the substrate S is first linearly transported from the loading roller Rn in the +X direction to pass between the drum R34 and the drum R22, between the drum R32 and the drum R24, and between the drum R30 and the drum. The fixed roller 220A on the +X side is reached between R26 and between the roller R28 and the roller R43, and is folded back in the -X direction by the fixed roller 220A. Next, to pass between the drum R28 and the drum R42, between the drum R29 and the drum R27, between the drum R40 and the drum R30, between the drum R31 and the drum R25, between the drum R38 and the drum R32, the drum R33 and the drum R32 Between the roller R36 and the roller R34, the fixed roller 220B on the -X side is reached, and the fixed roller 220B is folded back in the +X direction. Thereafter, the carry-out roller Rx is reached so as to pass between the drum R37 and the drum R33, between the drum R39 and the drum R31, and between the drum R41 and the drum R29.

Next, as shown in FIG. 23, the connection members 210a, 210c, 210e, and 210g are moved to the +Z side, and the connection members 210b, 210d, and 210f are moved to the -Z side. By this operation, the substrate S is suspended in each of the rollers. With this configuration, the substrate S can be suspended in each of the rollers in a short time.

In the above-described embodiment, the configuration of each of the rollers is described as an example in which the configuration of the shaft portion Ra and the outer peripheral portion Rb and the outer peripheral portion Rb are formed in a cylindrical shape. However, the present invention is not limited thereto.

For example, as shown in FIG. 24A and FIG. 24B, the drum R22 which is a folded-back portion for folding the sheet-like substrate FB may be configured to include the disk drum 233 having the shaft portion 231 and the plurality of flange portions 232. In this case, the shaft portion 231 also serves as a connecting portion that connects the plurality of flange portions 232 to each other. In addition, in FIGS. 24A and 24B, the rollers R22, R32, and R36 of the fifth embodiment and the sixth embodiment are typically shown, but the other rollers may have the same configuration. Further, even the drum of the fourth embodiment can have the same configuration.

As shown in Fig. 24B, a plurality of flange portions 232 are arranged side by side at intervals in the Y direction. The flange portions 232 connected to the central portion of the shaft portion 231 in the Y direction are spaced apart from each other by a flange portion 232 that is connected to the end portion of the shaft portion 231 in the Y direction. Moreover, the dimension (thickness) of the flange portion 232 connected to the central portion of the shaft portion 231 in the Y direction is larger than the thickness of the flange portion 232 that is connected to the end portion of the shaft portion 231 in the Y direction. This configuration is only an example. For example, the flange portions 232 may be arranged at equal intervals in the Y direction, and the thickness of the flange portions 232 may be the same.

Further, for example, as shown in FIG. 25 and FIG. 26, the two disc rollers 233 having the shaft portion 231 and the plurality of flange portions 232 may be arranged in combination in the portion where the diameter of the folded portion is increased. In this configuration, as shown in Fig. 26, the two disc cylinders 233 may be shifted in the Y direction, and the flange portion 232 of one of the two disc cylinders 233 may be inserted into the two disc cylinders 233. One of the flange portions 232 has a configuration. In this case, by adjusting the interval between the two disc rollers 233 in the X direction, the diameter of the folded portion can be set to a desired value. Therefore, it is possible to suppress the size of the Z direction from becoming large.

Further, in the sheet substrate FB, the disc drum 233 having the same configuration can be used for all of the folded portions having different diameters. Further, since the distance P between the shaft portions 231 is narrower than the diameter of the flange portion 232, the width of the design is widened.

In addition, in FIG. 25, the structure in which the group of the disk cylinders 233 is adjacent to the three groups in the Z direction is described as an example, but the present invention is not limited thereto, and for example, the disk drum 233 is formed in two groups adjacent to each other in the Z direction. The same description can be made for the configuration of four or more adjacent groups. Further, in the configuration shown in Fig. 25, the intervals of the disc cylinders 233 adjacent in the Z direction are equal, but may be different intervals.

In this case, the minimum diameter of the flange portion 232 is set within a range that does not plastically deform even if the sheet substrate FB is folded back into a U shape.

Further, the disc drum 233 shown in FIGS. 24A, 24B, 25, and 26 may be configured such that the shaft portion 231 and the flange portion 232 are fixed, and the shaft portion 231 and the flange portion 232 are independently rotatable. It can also be constructed.

Further, as shown in FIGS. 27 and 28, the fluid pad 240 may be used as the air turning roller. Fig. 28 is a view showing the configuration of the cross section taken along line A-A in Fig. 27. In the configuration shown in Figs. 27 and 28, a pair of rollers 244 are provided at positions of both ends of the support substrate S in the Y direction. The drum 244 has a cylindrical outer surface 244a formed in a cylindrical shape. A pair of rollers 244 are rotatably supported by the side walls 245 through the transmission shaft 242.

A plurality of fluid pads 240 are disposed between the pair of rollers 244. The plurality of fluid pads 240 are disposed, for example, at intervals in the Y direction. The fluid pad 240 is supported by the shaft 242 through the bearing 241. The fluid pad 240 has a pad surface 240a formed in an arc shape. The diameter of the pad surface 240a is set to correspond to the diameter of the outer circumferential surface 244a of the drum 244. The pad surface 240a and the outer peripheral surface 244a are in a state in which the positional relationship is fixed. The fluid pad 240 is configured to hardly rotate around the shaft 242 by the locking pin 246 fixed to the side wall 245.

A groove portion 240b is formed in the pad surface 240a of the fluid pad 240. The groove portion 240b is connected to the gas supply portion 248 through a flow path 247 provided inside the fluid pad 240 and a pipe body 249 connected to the flow path 247. The gas supply portion 248 can supply a press gas. The gas system from the gas supply unit 248 is supplied to the groove portion 240b via the flow path 247, and is ejected onto the pad surface 240a.

In the configuration shown in Fig. 27, both end portions of the substrate S in the Y direction are frictionally contacted with the outer circumferential surface 244a of the drum 244 to be supported. In this state, when the drum 244 rotates, the rotation of the drum 244 is transmitted to the substrate S through the outer peripheral surface 244a, and the substrate S is moved. When the gas is supplied from the gas supply portion 248 while the substrate S is suspended from the drum 244, the fluid layer 250 is formed between the supported surface of the substrate S and the pad surface 240a. Further, although the diameter of the pad surface 240a of the fluid pad 240 is substantially the same as the diameter of the roller 244, the thickness of the fluid layer 250 (several μm to several tens of μm) may be slightly reduced.

The length of the circumferential direction of the fluid layer 250 (the direction of rotation of the shaft 242) formed by the fluid pad 240 is set to be the same as the length of the circumferential direction of the roller 244 that is in frictional contact with the substrate S. In the example shown in Fig. 27, it is set to be approximately 180 degrees.

In addition, the roller 244 may be configured to be freely rotatable by frictional contact with the substrate S when the substrate S is moved while applying the desired tension to the substrate S, and may be connected to the shaft 242. The drive roller of the drive mechanism such as the motor shown in the figure may be configured.

Further, for example, as shown in FIG. 29, a configuration in which a plurality of the fluid pads 240 and the rollers 244 are disposed in the X direction and a diameter of the folded portion of the sheet substrate FB may be adjusted. In such a configuration, not the entire area in the circumferential direction of the pad surface 240a of the fluid pad 240 is opposed to the substrate S, but only a quarter of the area in the circumferential direction is opposite to the substrate S as shown in FIG. . Therefore, the groove portion 240b is formed in advance in the pad surface 240a only in the area of the quarter. Thereby, the range of the circumferential direction of the fluid layer 250 can be adjusted.

Further, for example, as shown in FIG. 30, the air bearing mechanism 260 may be used. This air bearing mechanism 260 has a pair of guiding members 261, a holding member 262 that holds the pair of guiding members 261, and an air supply portion 263 that supplies air to the guiding members 261.

The guiding member 261 is formed by, for example, a porous member made of ceramics or the like. The surface (guide surface) 261 of the guiding member 261 is formed as a part of the cylindrical surface (about 90 degrees). Air from the air supply portion 263 is ejected from the guide surface 261a, for example. The holding member 262 holds a pair of guiding members 261. In the holding member 262, the guiding surface 261a is held in a state in which the guiding members 261 are spaced apart from each other in the X direction toward the +X side and the -X side.

Fig. 31 shows the configuration in which the air bearing mechanism 260 described above is used in the folded portion. As shown in FIG. 31, although the air bearing mechanism 260 is adjacently used in the Z direction, the size of each of the folded portion holding members 262 in the X direction is different. Specifically, the size of the holding member 262A of the air bearing mechanism 260 disposed on the most +Z side is the largest in the X direction, and the holding member 262B, the holding member 262C, and the holding member 262D are sequentially arranged with respect to the holding member 262A, the -Z side. The size in the X direction gradually becomes smaller.

As described above, by adjusting the size of the holding member 262, the diameter of the folded portion can be changed. Further, compared with the case of using a roller, since the size of the Z direction is substantially half, it is sufficient, and therefore it can be a small structure. Therefore, a plurality of folded portions can be provided in the Z direction, and the size of the container in the Z direction can also be reduced.

Further, in the above-described embodiment, the case where the roller is used as the folded portion is described as an example in which the diameter of the roller in the Y direction is constant, but the invention is not limited thereto. For example, as shown in FIG. 32A, the diameter may be increased from the end portion in the Y direction of the outer peripheral portion Rb to the central portion. Moreover, as shown in FIG. 32B, the diameter may be reduced from the end portion in the Y direction of the outer peripheral portion Rb to the central portion.

In the above-described embodiment, the configuration in which the roller is used as the folded-back portion is a configuration in which the diameter of the roller row roller on the end portion side in the Z direction toward the center portion side of the storage chamber RM is gradually reduced. The description is made, but it is not limited to this. For example, as shown in Fig. 33, the configuration may be the same for all the rollers.

In this case, the distance L3 between the X-directions of the adjacent roller groups in the Z direction may be larger than the pitch of the above embodiment. Further, the drum groups adjacent in the Z direction may be disposed at a predetermined distance L4 from each other in the X direction. As described above, the present invention can be applied even in the case where the diameters of the drums are the same.

CTR. . . Substrate

FB. . . Sheet substrate

SYS. . . Substrate processing system

PR. . . Substrate processing device

CONT. . . Control device

CN. . . Connection

Fh. . . Front end

1. . . Containment department

2. . . Move in

3,3A,3B. . . Move out

4. . . Guide

5. . . Control department

S. . . Substrate

Sa. . . First side

Sb. . . Second side

S1, S21, T1, T21. . . first part

S2, S22, T2, T22. . . the second part

S3, S23, T3, T23. . . the third part

S4, S24, T4, T24. . . fourth part

CT. . . container

CTa, CTb. . . Wall

FL. . . ground

RM. . . Containment room

EN. . . Substrate transfer

EX. . . Substrate outlet

Rn. . . Moving into the drum

Rx. . . Moving out of the drum

R1 ~ R15, R21 ~ R44, 244. . . roller

Ra. . . Shaft

Rb. . . Peripheral part

231. . . Shaft

232. . . Flange

233. . . Disc roller

240. . . Fluid pad

240a. . . Mat surface

240b. . . Groove

248. . . Gas supply department

250. . . Fluid layer

260. . . Air bearing mechanism

261. . . Guide member

261a. . . Guide surface

262. . . Holding member

263. . . Air supply department

STR, STR2, STR3. . . Substrate storage device

Fig. 1 is a view showing the configuration of a substrate 第一 of the first embodiment.

Fig. 2 is a view showing the configuration of the substrate 本 of the embodiment.

Fig. 3 is a view showing the configuration of a part of the substrate cassette of the embodiment.

Fig. 4 is a view showing the configuration of a substrate processing system of the embodiment.

Fig. 5 is a view showing the operation of a part of the substrate processing system of the embodiment.

Fig. 6 is a view showing the operation of a part of the substrate processing system of the embodiment.

Fig. 7 is a view showing the configuration of a substrate 第二 of the second embodiment.

Fig. 8 is a view showing the configuration of the substrate 本 of the embodiment.

Fig. 9A is a view showing another configuration of the substrate cassette.

Fig. 9B is a view showing another configuration of the substrate cassette.

Fig. 10 is a view showing another configuration of the substrate cassette.

Fig. 11A is a view showing another configuration of the substrate cassette.

Fig. 11B is a view showing another configuration of the substrate cassette.

Fig. 11C is a view showing another configuration of the substrate cassette.

Fig. 11D is a view showing another configuration of the substrate cassette.

Fig. 12A is a view showing another configuration of the substrate cassette.

Fig. 12B is a view showing another configuration of the substrate cassette.

Fig. 13A is a view showing another configuration of the substrate cassette.

Fig. 13B is a view showing another configuration of the substrate cassette.

Fig. 14 is a view showing another configuration of the substrate cassette.

Fig. 15 is a view showing another configuration of the substrate processing system.

Fig. 16 is a view showing another configuration of the substrate cassette.

Fig. 17 is a view showing the configuration of a part of the substrate cassette of the third embodiment.

Fig. 18 is a perspective view showing the configuration of a substrate storage device according to a fourth embodiment.

Fig. 19 is a cross-sectional view showing the configuration of a substrate storage device according to a fifth embodiment.

Fig. 20 is a cross-sectional view showing the configuration of a substrate storage device according to a sixth embodiment.

Fig. 21 is a view showing another configuration of the substrate storage device.

Fig. 22 is a view showing another configuration of the substrate storage device.

Fig. 23 is a view showing another configuration of the substrate storage device.

Fig. 24A is a view showing another configuration of the substrate storage device.

Fig. 24B is a view showing another configuration of the substrate storage device.

Fig. 25 is a view showing another configuration of the substrate storage device.

Fig. 26 is a view showing another configuration of the substrate storage device.

Fig. 27 is a view showing another configuration of the substrate storage device.

Fig. 28 is a view showing another configuration of the substrate storage device.

Fig. 29 is a view showing another configuration of the substrate storage device.

Fig. 30 is a view showing another configuration of the substrate storage device.

Fig. 31 is a view showing another configuration of the substrate storage device.

Fig. 32A is a view showing another configuration of the substrate storage device.

Fig. 32B is a view showing another configuration of the substrate storage device.

Fig. 33 is a view showing another configuration of the substrate storage device.

CTR. . . Substrate

F. . . ground

1. . . Containment department

2. . . Move in

3. . . Move out

4. . . Guide

5. . . Control department

6. . . Connected port

10. . . Box

10a. . . Wall

11. . . Concave

21,22. . . Guide plate

twenty three. . . Moving into the drum

31,32. . . Guide plate

33. . . Moving out of the drum

41. . . Fixed guide

42. . . First roller

43. . . Parallel guide

43a. . . Inner guide

43b. . . Outer guide

44. . . Second roller

45. . . Movable guide

46. . . Reentry mechanism

47. . . First moving roller

48. . . Second moving roller

Claims (34)

A substrate sheet which can be accommodated in a strip-shaped flexible sheet substrate, which is folded back in a plurality of times in a longitudinal direction of a strip shape, and includes a housing portion having a plurality of wall surfaces, and the sheet substrate is The retracted state is accommodated; the ejecting port is disposed on one wall surface of the accommodating portion for carrying out the sheet substrate in the longitudinal direction; and the carrying inlet is disposed on one wall surface of the accommodating portion for the sheet The substrate is carried in the longitudinal direction; a plurality of first guiding members are disposed in the receiving portion and disposed at intervals to hold the surface side of the sheet substrate; and the plurality of second guiding members are disposed on The accommodating portion is disposed at intervals to hold the back side of the sheet substrate; and the third guiding member is disposed at a portion of the guiding path of the sheet substrate for being carried in from the loading port. The front end portion of the sheet substrate is guided to the transfer port between the first guiding member and the second guiding member. The substrate cartridge of claim 1, further comprising: a moving mechanism that bends the sheet substrate on the surface side by the first guiding member, and the second guiding member is bent on the back side The sheet substrate is configured to relatively move the plurality of first guiding members and the plurality of second guiding members. The substrate of claim 2, wherein the moving mechanism has a first step of adjusting a movement timing of each of the plurality of first guiding members Adjust the organization. The substrate cartridge of claim 2 or 3, wherein the moving mechanism has a second adjustment mechanism that adjusts a movement timing of each of the plurality of second guiding members. The substrate cartridge of claim 1 or 2, wherein the third guiding member has a movable guiding plate that is movable in a manner of being able to partially enter and exit the guiding path of the sheet substrate. The substrate cartridge of claim 5, which has a switching mechanism for switching the movable guiding plate in and out corresponding to the guiding condition of the sheet substrate. The substrate cartridge of claim 1 or 2, wherein the third guiding member has one of a guiding portion disposed on the guiding path of the sheet substrate and is disposed opposite to each other across the sheet substrate Pair of guide plates. The substrate cartridge of claim 7, wherein the pair of guiding plates have a first guiding plate disposed in a state of being erected with respect to a horizontal plane, and a second guiding disposed opposite to the first guiding plate Leadboard. The substrate cartridge of claim 5, wherein the outlet and the inlet are disposed on the same wall surface of the plurality of wall surfaces. The substrate of claim 5, wherein the outlet and the inlet are respectively disposed on different wall surfaces of the plurality of wall surfaces. The substrate of claim 5, wherein at least one of the transfer port and the transfer port is provided on the wall surface of the accommodating portion in order to provide a plurality of guide paths in the accommodating portion; the accommodating portion A path switching mechanism for switching the plurality of guiding paths is provided therein. The substrate according to claim 5, wherein the first guiding member and the second guiding member have a cylindrical surface for bending and holding the sheet substrate in the longitudinal direction. The substrate according to claim 5, wherein the first guiding member and the second guiding member are rollers that are bent and held in the longitudinal direction and rotatable in the circumferential direction. A substrate processing system comprising: the substrate according to any one of claims 9 to 11; and a substrate processing apparatus having a connection portion connected to the substrate. The substrate processing system of claim 14, wherein the substrate has a connected portion connected to the substrate processing device; and the transfer port and the transfer port are provided in the connected portion. The substrate processing system of claim 15, wherein the connected portion has a first surface facing the substrate processing device; and the transfer port and the transfer port are provided on the first surface. The substrate processing system of claim 15, wherein the connected portion has a second surface facing the substrate processing device; and at least one of the transfer port and the transfer port is disposed on the second surface. The substrate processing system according to any one of claims 14 to 17, wherein the substrate processing apparatus has a lead mounting portion on which a lead is mounted at a front end of the sheet substrate supplied to the loading port of the substrate . The substrate processing system of claim 18, wherein the substrate processing apparatus has a head holding portion that holds the lead attached to a front end of the sheet substrate that is carried out from the transfer port of the substrate. The substrate processing system according to any one of claims 14 to 17, wherein the substrate processing apparatus is provided in plurality, and further comprising a transfer device that transports the substrate to each of the plurality of substrate processing apparatuses. A substrate storage device is characterized in that a substrate having a strip shape and having flexibility is folded back and held in a plurality of times in a longitudinal direction, and is characterized in that: a first folded portion is provided in such a manner that surfaces of the substrate face each other The second folded portion is folded back such that the back surface of the first portion of the substrate that is folded back to one side with respect to the first folded portion is opposite to each other; the direction changing portion is configured to In the substrate, the second folded portion is folded back to the second portion opposite to the first folded portion toward the first folded portion; and the third folded portion is replaced by the direction in the substrate A portion of the third portion after the direction change is folded back along the surface or back surface of the fourth portion of the substrate that is folded back to the other side of the first portion by the first folded portion. The substrate storage device according to claim 21, further comprising: a housing portion that accommodates the first folded portion, the second folded portion, the third folded portion, and the direction changing portion; and the carrying portion that carries the substrate To the accommodating portion; the unloading portion, the substrate is carried out from the accommodating portion; a first guiding portion guiding the substrate from the loading portion to one of the first folded portion and the third folded portion; and a second guiding portion for the substrate from the first folded portion and the third portion The other side of the turn-back portion is guided to the carry-out portion. The substrate storage device according to claim 22, wherein the storage portion has a plurality of wall surfaces, and the loading portion and the removal portion are disposed on the same wall surface of the plurality of wall surfaces. The substrate storage device according to claim 22, wherein the storage portion has a plurality of wall surfaces, and the loading portion and the removal portion are respectively provided on different wall surfaces of the plurality of wall surfaces. The substrate storage device according to any one of claims 21 to 24, wherein the first folded portion, the second folded portion, the third folded portion, and the direction changing portion respectively have at least one suspended substrate Substrate hanging portion. The substrate storage device according to any one of claims 21 to 24, wherein at least three of the substrate hanging portions are arranged on a straight line. The substrate storage device according to claim 25, wherein the substrate hanging portion is formed in a cylindrical shape. The substrate storage device according to claim 27, wherein the substrate hanging portion is formed to gradually decrease in diameter along one of the straight lines. The substrate storage device of claim 28, wherein the substrate hanging portion has: The flange portion is provided in a plurality of short sides of the substrate so as to match one of the short sides of the substrate, and supports one of the portions of the substrate on the outer peripheral surface; and the connecting portion connects the plurality of the flange portions to each other. The substrate storage device of claim 25, wherein the substrate hanging portion has a fluid pad; the fluid pad is configured to dispose a fluid between the region where the substrate is suspended and the substrate, and the substrate is supported by the fluid At least part. The substrate storage device of claim 30, wherein the fluid pad is configured to be separable in a longitudinal direction of the substrate in a suspended state; the separated portions of the fluid pad are disposed to be at the long side Move in direction. The substrate storage device according to claim 30, wherein the fluid pad is disposed in a plurality of the short sides of the substrate and supports one of the substrates. A substrate 可 that can be connected to a processing device that applies a predetermined process to a long strip-shaped flexible substrate, and includes: a accommodating portion having a space surrounded by a plurality of wall surfaces, wherein the flexibility is provided in the space The substrate is folded back and stored in the longitudinal direction for a plurality of times; the transfer port is disposed on a wall surface of the plurality of wall surfaces of the accommodating portion facing the processing device, and the substrate is carried out toward the processing device along the longitudinal direction; a plurality of wall surfaces of the accommodating portion are disposed on a wall surface facing the processing device, and the substrate is carried in a longitudinal direction to recover the substrate from the processing device; and a plurality of guiding members are disposed in the space of the accommodating portion Inside, and in the air The flexible substrate is held in a plurality of times in the longitudinal direction, and the guide plate is disposed in the space of the accommodating portion, and the flexible substrate is carried into the accommodating portion from the loading port. The manner in which the front end is guided to the outlet is movably or fixedly disposed on one of the guiding paths of the flexible substrate. A substrate 可 connected to a processing device for applying a predetermined process to a strip-shaped flexible sheet substrate, comprising: a accommodating portion having a space surrounded by a plurality of wall surfaces, wherein the substrate 匣The sheet substrate is folded back and stored in the longitudinal direction for a plurality of times, and the transfer port is provided on the first wall surface of the plurality of wall surfaces of the accommodating portion facing the processing device, and the sheet substrate is oriented in the longitudinal direction. The loading device is disposed on the first wall surface of the accommodating portion, and the sheet substrate is carried in the longitudinal direction to recover the sheet substrate from the processing device; and the plurality of first guiding members are disposed on the The accommodating portion is disposed at intervals to hold the surface side of the sheet substrate; a plurality of second guiding members are disposed in the accommodating portion and disposed at intervals to hold the back side of the sheet substrate And a third guiding member disposed at a portion of the guiding path of the sheet substrate for passing the front end of the sheet substrate loaded from the carrying inlet through the first guiding member and the second guiding Between components The unloading port is guided.