TWI627120B - Component manufacturing device - Google Patents

Abstract

The conveying device of the present invention includes: a first guide that bends obliquely to change a conveying direction of the sheet substrate from a first direction to a second direction different from the first direction, and is to be a second direction The conveyed sheet substrate is obliquely bent to change the conveying direction of the sheet substrate from the second direction to the second direction in the third direction different from the second direction, and is provided in the first guide and the first guide At least one of the two guides adjusts at least one of a position of the first guide and a position of the second guide, and an adjustment mechanism for adjusting a position of the sheet substrate in a direction intersecting the second direction.

Description

Component manufacturing device

The present invention relates to a transfer device and a substrate processing device.

Examples of display elements constituting display devices such as display devices include liquid crystal display elements, organic motor light-emitting (organic EL) elements, and electrophoretic elements for electronic paper. At present, such display elements are gradually becoming mainstream after forming a switching element (Thin Film Transistor: TFT) called a thin film transistor on the surface of a substrate, and an active device on which respective display elements are formed.

In recent years, a technique of forming a display element on a sheet substrate (for example, a film member or the like) has been proposed. As such a technique, for example, a roll to roll method (hereinafter, simply referred to as "winding method") is widely known (for example, refer to Patent Document 1). In the winding method, a sheet-like substrate (for example, a strip-shaped film member) wound around a substrate supply side is fed, and the supplied substrate is wound on a recovery side of the substrate recovery side. Wrap the substrate.

While the substrate is being conveyed to the time of being wound, for example, a plurality of processing apparatuses are used to form a gate, a gate oxide film, a semiconductor film, a source-drain, etc. of the TFT, using a plurality of processing apparatuses. The constituent elements of the display element are sequentially formed on the surface to be processed of the substrate. For example, in the case of forming an organic EL element, a light-emitting layer, an anode, a cathode, a motor circuit, and the like are sequentially formed on a substrate.

At the time of formation of the display element, in order to arrange the constituent elements on the substrate with high precision, for example, the positional alignment between the processing apparatus and the substrate is required. Therefore, the development of a substrate and the substrate A technique of adjusting the rotational speed of the position adjusting roller to adjust the position of the substrate by arranging the position adjusting rollers at the ends in the orthogonal direction.

[Advanced technical literature]

[Patent Document 1] International Publication No. 2006/100868

However, the position adjustment may cause a force in a direction different from the conveying direction to act on the substrate due to a difference in the rotational speed between the rollers for position adjustment, and the substrate may be wrinkled or the like, for example.

Further, the surface to be treated is in contact with, for example, the transport roller during the substrate conveyance, and may affect the processing state of the surface to be processed. Therefore, it is required to have a configuration in which contact with the processed surface of the substrate is minimized after performing various processes on the processed surface of the substrate.

It is an object of the present invention to provide a conveying apparatus and a substrate processing apparatus capable of improving the positioning accuracy of a substrate. Another object of the present invention is to provide a transfer apparatus and a substrate processing apparatus capable of transporting a substrate while suppressing contact with a substrate to be processed.

A conveying apparatus according to a first aspect of the present invention is for conveying a belt-shaped sheet substrate, and includes: a first guide, the sheet substrate conveyed from the first direction (or in the first direction) is inclined After bending, the conveying direction of the sheet substrate is changed from the first direction to a second direction different from the first direction; and the second guide is conveyed from the second direction (or to the second direction) After the sheet substrate is bent obliquely, the conveying direction of the sheet substrate is changed from the second direction to a third direction different from the second direction; and an adjustment mechanism is provided in the first guide At least one of the member and the second guide member for adjusting at least one of a position of the first guide member and a position of the second guide member to adjust the sheet substrate in a direction crossing the second direction position.

A substrate processing apparatus according to a second aspect of the present invention includes: a conveying device that conveys a belt-shaped sheet substrate; and a processing device that performs predetermined processing on the sheet substrate; and the conveying device uses the conveying device of the above aspect.

A conveying apparatus according to a third aspect of the present invention is a belt-shaped sheet substrate, comprising: a first guide that supports the back surface of the sheet substrate and is conveyed from the first direction (or to the first direction) The sheet substrate is obliquely bent to change the conveying direction of the sheet substrate from the first direction to a second direction different from the first direction; the second guide supports the sheet substrate a back surface of the back substrate, wherein the sheet substrate conveyed from the second direction (or in a second direction) is obliquely bent to change a conveying direction of the sheet substrate from the second direction to the second direction a third direction different from the third direction; and the third guide member supports the back surface of the sheet substrate, and the sheet substrate conveyed from the third direction (or in the third direction) is obliquely bent to The conveyance direction of the sheet substrate is converted from the third direction to a fourth direction different from the third direction.

A substrate processing apparatus according to a fourth aspect of the present invention includes: a conveying device that conveys a belt-shaped sheet substrate; and a processing device that performs predetermined processing on the sheet substrate; and the conveying device uses the conveying device of the above aspect.

A substrate processing apparatus according to a fifth aspect of the present invention is characterized in that the surface of the strip-shaped sheet substrate is subjected to a predetermined process, and the first guide member supports the back surface of the sheet substrate and is transported from the first direction ( Or the sheet substrate in the first direction is obliquely bent so that the conveying direction of the sheet substrate is changed from the first direction to a second direction different from the first direction; the second guide member is supported The back surface of the sheet substrate is bent obliquely from the second direction (or in the second direction) to change the conveying direction of the sheet substrate from the second direction to a third direction different from the second direction; the third guiding member supports the back surface of the sheet substrate, and the sheet substrate conveyed from the third direction (or in the third direction) is obliquely bent And folding, the conveying direction of the sheet substrate is changed from the third direction to a fourth direction different from the third direction; and the fourth guide supports the back surface of the sheet substrate and is transported from the fourth direction And (or in the fourth direction) the sheet The substrate is bent obliquely to change the transport direction of the sheet substrate from the fourth direction to a fifth direction different from the fourth direction; and the first processing unit is in the first guide and the first The surface of the sheet substrate is subjected to a predetermined process between the two guide members.

According to the above aspect of the invention, the position of the substrate can be adjusted with high positioning accuracy as compared with the prior art. Further, according to the aspect of the invention, it is possible to convey the substrate while suppressing contact with the processed surface of the substrate.

10‧‧‧Processing device

11, 12‧‧‧ drive mechanism

30‧‧‧Transporting device

40‧‧‧Adsorption Department

50‧‧‧Alignment device

51‧‧‧Aligned camera

52, 53‧‧ ‧ adjustment agencies

60, 62‧ ‧ bearing components

61, 63‧‧‧ drive mechanism

64‧‧‧stage drive mechanism

80, 80a, 80b‧‧‧ bottom

81, 81a, 81b‧‧‧ apex

AM‧‧ Alignment mark

CA‧‧‧Detection area

CL‧‧‧Substrate Recycling Department

CONT‧‧‧Control Department

C1~C8‧‧‧ central axis

FB‧‧‧Sheet substrate

FPA‧‧‧ substrate processing device

Fp‧‧‧ processing surface

F1~F5‧‧‧First~Part 5

G‧‧‧Guide roller

G1, G21‧‧‧ first guide roller

G2, G2‧‧‧ second guide roller

G3’‧‧‧3rd guide roller

G3, G25‧‧‧ first hammer-like members

G4, G26‧‧‧ second hammer member

G23‧‧‧3rd guide roller

G24‧‧‧fourth guide roller

G27‧‧‧ third hammer member

G28‧‧‧fourth hammer member

G1a, G2a, G21a-G24a‧‧‧ roller surface

G3a, G4a, G21a~G24a‧‧‧ roller surface

G25a~G28a‧‧‧ side

PR‧‧‧Substrate Processing Department

R‧‧‧Roller

Sa‧‧‧ bearing surface

ST‧‧‧ stage device

SU‧‧‧Substrate Supply Department

Fig. 1 is a general view showing a schematic configuration of a substrate processing apparatus according to an embodiment.

Fig. 2 is a side sectional view showing a part of the configuration of the conveying apparatus of the embodiment.

Fig. 3 is a plan view showing a part of the configuration of the conveying device of the embodiment.

Fig. 4 is a view showing the conveyance operation of the substrate processing apparatus of the embodiment.

Fig. 5 is a view showing a conveying operation of the substrate processing apparatus of the second embodiment.

Fig. 6 is a view showing a partial configuration of a conveying device of a substrate processing apparatus according to a third embodiment.

Fig. 7 is a perspective view showing a part of the configuration of the conveying device of the embodiment.

Fig. 8 is a view showing another configuration of the conveying device of the embodiment.

Fig. 9 is a general view showing a schematic configuration of a substrate processing apparatus according to a fourth embodiment.

Fig. 10 is a plan view showing a part of the configuration of the conveying device of the embodiment.

Fig. 11 is a view showing a partial configuration of a conveying apparatus of a fifth embodiment.

Fig. 12 is a view showing a partial configuration of a conveying device of a sixth embodiment.

Fig. 13 is a view showing another configuration of the conveying device of the embodiment.

<First Embodiment>

Fig. 1 is a view showing the configuration of a substrate processing apparatus FPA of the first embodiment.

As shown in FIG. 1, the substrate processing apparatus FPA has a substrate supply unit SU that supplies a sheet substrate (for example, a strip-shaped film member) FB, and a substrate processing unit PR that processes the surface (processed surface) of the sheet substrate FB, The substrate recovery unit CL of the sheet substrate FB is recovered, and the control unit CONT that controls the respective units. The substrate processing apparatus FPA is provided, for example, at a factory or the like.

The substrate processing apparatus FPA is a roll-to-roll method in which various processes are applied to the surface of the sheet substrate FB after the sheet substrate FB is fed from the substrate supply unit SU to the time when the sheet substrate FB is collected by the substrate collection unit CL. (Hereinafter, abbreviated as "winding method"). The substrate processing apparatus FPA can be used to form a display element (electronic element) such as an organic EL element or a liquid crystal display element on the sheet substrate FB. Of course, the processing device FPA can also be used in the case of forming components other than these components.

For the sheet substrate FB to be processed by the substrate processing apparatus FPA, for example, a foil (film) such as a resin film or stainless steel can be used. As the resin film, for example, a polyethylene resin, a polypropylene resin, a polyester resin, an ethylene vinyl copolymer resin, a polyvinyl chloride resin, a cellulose resin, a polyamide resin, a polyimide resin, a polycarbonate can be used. Materials such as ester resin, polystyrene resin, and polyvinyl ethyl ester resin.

The dimension of the sheet substrate FB in the Y direction (short side direction) is, for example, about 1 m to 2 m, and the dimension in the X direction (longitudinal direction) is, for example, 10 m or more. Of course, this size is only an example and is not limited to this example. For example, the Y-direction dimension of the sheet substrate FB is 1 m or less or 50 cm or less, and may be 2 m or more. Moreover, the dimension of the sheet substrate FB in the X direction may be 10 m or less.

The sheet substrate FB is formed to have flexibility, for example. Here, the term "flexibility" refers to a property in which the substrate can be bent without being broken or broken by applying a predetermined force to at least its own weight. Further, for example, the property of being bent by the predetermined force described above is also included in the flexibility indicated. Further, the flexibility described above varies depending on the material, size, thickness, temperature, and the like of the substrate. Further, the sheet substrate FB may be formed by using a strip-shaped substrate or a substrate in which a plurality of units are connected to each other to form a strip shape.

The sheet substrate FB is preferably one which is subjected to a relatively high temperature (for example, about 200 ° C) and whose heat is not substantially changed in size (small thermal deformation). For example, an inorganic filler may be mixed in the resin film to lower the thermal expansion coefficient. Examples of the inorganic filler include titanium oxide, zinc oxide, aluminum oxide, cerium oxide, and the like.

The substrate supply unit SU supplies and supplies the sheet substrate FB wound in a roll shape to the substrate processing unit PR, for example. The substrate supply unit SU is provided with, for example, a shaft portion for winding the sheet substrate FB, a rotary drive source for rotating the shaft portion, and the like. As a matter of course, it is also possible to provide, for example, a cover portion for covering the sheet substrate FB wound in a roll state, and the like, in place of the substrate supply portion SU.

The substrate collecting portion CL is obtained by winding the sheet substrate FB from the substrate processing portion PR, for example, in a roll shape. Similarly to the substrate supply unit SU, the substrate collection unit CL is provided with a shaft portion for winding the sheet substrate FB, a rotation drive source for rotating the shaft portion, and a cover portion for covering the recovered sheet substrate FB. In the case where the substrate processing unit PR cuts the sheet substrate FB into a flat shape, for example, the substrate collecting portion CL may be configured to collect the sheet substrate FB in a stacked state, for example. The composition of the sheet substrate FB is recovered in a state different from the state of being wound into a roll.

The substrate processing unit PR transports the sheet substrate FB supplied from the substrate supply unit SU to the substrate collection unit CL, and processes the processed surface Fp of the sheet substrate FB during the transfer process. The substrate processing unit PR includes, for example, the processing device 10, the transfer device 30, the alignment device 50, and the like.

The processing apparatus 10 has various means for forming, for example, an organic EL element on the processed surface Fp of the sheet substrate FB. As such a device, for example, a partition wall forming device for forming a partition wall on the surface Fp to be processed, an electrode forming device for forming an electrode for driving the organic EL element, and a light-emitting layer forming device for forming a light-emitting layer Wait. Specifically, there are a film forming device such as a droplet applying device (for example, an inkjet coating device or a spin coating coating device), a vapor deposition device, and a sputtering device, and an exposure device, a developing device, and a surface modifying device. Washing device, etc. Each of these devices is suitably provided, for example, on a transport path of the sheet substrate FB.

For example, two or more processing devices can be arranged along the transport direction.

The conveyance device 30 has a roller device R that conveys the sheet substrate FB to the substrate collection portion CL in the substrate processing portion PR, and a guide roller that is disposed on the flow side and the downstream side of the processing device 10 with the processing device 10 interposed therebetween. G. A plurality of transport paths of the drum device R along the sheet substrate FB are provided, for example. A drive mechanism (not shown) is attached to the roller device R of at least a part of the plurality of roller devices R. By the rotation of the roller device R, the sheet substrate FB is conveyed in the X-axis direction. Further, for example, a part of the plurality of roller devices R may be arranged to be movable in a direction orthogonal to the conveying direction.

Further, in the conveying device 30 of the present embodiment, in the conveying direction of the sheet substrate FB, on the flow side and the downstream side of the guide roller G, in order to prevent the tension from being applied to the sheet substrate FB, the sheet substrate FB is slackened. Department (not shown).

2 and 3 are schematic views showing the configuration of the processing device 10 and the guide roller G. Fig. 2 shows the configuration when the substrate processing apparatus FPA is viewed from the side (+X direction). Fig. 3 shows the configuration when the substrate processing apparatus FPA is viewed from above (+Z direction).

As shown in FIGS. 2 and 3, the guide roller G has a first guide roller G1 and a second guide roller G2. The first guide roller G1 is formed, for example, in a columnar shape or a cylindrical shape, and is disposed on the upstream side in the transport direction of the sheet substrate FB with respect to the processing apparatus 10. The second guide roller G2 is formed, for example, in a columnar shape or a cylindrical shape, and is disposed on the downstream side in the conveying direction of the sheet substrate FB with respect to the processing apparatus 10.

The first guide roller G1 is a first portion of the sheet substrate FB that is conveyed from the upstream side of the first guide roller G1 in the first direction (+X direction) (before being guided by the first guide roller G1) The portion of the first guide roller G1 and the upper side of the sheet substrate FB) F1 (the width direction: here, the Y direction) is disposed such that the central axis C1 is inclined. The first guide roller G1 guides the back surface of the sheet substrate FB on the drum surface (guide surface) G1a.

Moreover, the sheet substrate FB conveyed from the upstream side of the first guide roller G1 is in a state in which the back surface Fq of the sheet substrate FB faces upward.

The first guide roller G1 bends the sheet substrate FB in the oblique direction with respect to the short side direction of the sheet substrate FB and folds back the sheet substrate FB along the drum surface of the first guide roller G1, whereby the sheet substrate FB is pressed. The conveyance direction is changed from the first direction to the second direction (-Y direction). In the present embodiment, the first guide roller G1 can substantially bend the sheet substrate FB obliquely. The sheet substrate FB can be bent while being twisted by the first guide roller G1. In the sheet substrate FB, a portion of the peripheral surface inclined with respect to the transport direction (first direction) can be formed in a portion guided by the first guide roller G1. The sheet substrate FB having the traveling direction of the first direction (+X direction) enters the first guide roller G1. The sheet substrate FB having the traveling direction in the second direction (-Y direction) comes out of the first guide roller G1. In the present embodiment, the second direction is, for example, a direction orthogonal to the first direction. For example, the sheet substrate FB folded back by the first guide roller G1 is oriented in the second direction, and the processed surface Fp thereof is directed upward (on the side of the processing apparatus 10). Further, the sheet substrate FB is supported by the drum surface G1a of the first guide roller G1 until the first portion F1 and the second portion (before being guided to the second guide roller G2) before the first guide roller G1 The portions, that is, the second guide roller G2 and the upper flow side portion F2 of the sheet substrate FB are parallel to each other.

The second guide roller G2 is disposed so as to be inclined in the oblique direction with respect to the second portion F2 of the sheet substrate FB conveyed from the upstream side of the second guide roller G2 in the second direction. The second guide roller G2 guides the back surface of the sheet substrate FB on the drum surface (guide surface) G2a.

Moreover, in the sheet substrate FB conveyed from the upstream side of the second guide roller G2, as shown in Fig. 2, the processed surface Fp of the sheet substrate FB is directed upward.

The second guiding roller G2 bends the second portion F2 of the sheet substrate FB in the oblique direction with respect to the short side direction of the sheet substrate FB, and folds the sheet substrate FB along the surface of the roller of the second guiding roller G2. Then, the conveyance direction of the sheet substrate FB is changed from the second direction to the third direction (+X direction). In the present embodiment, the second guide roller G2 can substantially bend the sheet substrate FB obliquely. The sheet substrate FB can be bent while being twisted by the second guide roller G2. In the portion of the sheet substrate FB that is guided by the second guide roller G2, a relative transport direction can be formed (the Two directions) a part of the inclined surface. The sheet substrate FB having the traveling direction in the second direction (-Y direction) enters the second guide roller G2. The sheet substrate FB having the traveling direction of the third direction (+X direction) comes out of the second guide roller G2. In the present embodiment, the third direction is, for example, a direction parallel to the first direction. In the third direction, for example, the back surface Fq faces upward, and the processed surface Fp faces downward, in the sheet direction FB folded back by the second guide roller G2. Further, the sheet substrate FB is supported by the drum surface G2a of the second guide roller G2 until the second portion F2 and the third portion (the portion before being guided by the third guide roller G3', that is, the third guide The leader roller G3' and the upper flow side portion F3 of the sheet substrate FB are parallel to each other.

In the transport direction of the sheet substrate FB, the flow side portion (first portion F1) in the transport direction of the first guide roller G1 in the sheet substrate FB is in the +X direction (first direction), in the first guide A portion (second portion F2) between the drum G1 and the second guide roller G2 is a portion in the -Y direction (second direction) on the downstream side in the conveying direction of the second guide roller G2 (third portion F3) Then it becomes the +X direction (the third direction) again. In this manner, the sheet substrate FB is conveyed by a crank-shaped path in which the first guide roller G1 and the second guide roller G2 are bent.

The first guide roller G1 is supported by, for example, a bearing member 60. The bearing member 60 is provided with a drive mechanism 61 that drives the first guide roller G1. The drive mechanism 61 rotates the first guide roller G1 in the central axis direction.

The second guide roller G2 is supported by, for example, the bearing member 62 similarly to the first guide roller G1. The bearing member 62 is provided with a drive mechanism 63 that drives the second guide roller G2. The drive mechanism 63 rotates the second guide roller G2 in the central axis direction.

Further, for example, the first guide roller G1 and the second guide roller G2 are provided with detection devices (not shown) such as an encoder that detects a rotation amount, a rotation speed, and the like. The detection result using the detection device is sent to, for example, the control unit CONT.

A stage device ST that supports the sheet substrate FB is disposed between the first guide roller G1 and the second guide roller G2. The stage device ST is disposed on the back side with respect to the second portion F2 of the sheet substrate FB The side (-Z side) has a support surface Sa that supports the second portion F2 of the sheet substrate FB. The support surface Sa is formed, for example, as a flat surface or a surface having a curvature.

When the support surface Sa is, for example, a flat surface, the stage device ST is disposed such that the support surface Sa is parallel to the XY plane. A stage driving mechanism 64 is provided in the stage device ST. The stage driving mechanism ST is provided to be movable in the X direction, the Y direction, and the Z direction by, for example, the stage driving mechanism 64.

The stage device ST has an adsorption unit 40 (see FIG. 2) on the support surface Sa. The adsorption portion 40 is disposed, for example, at one or a plurality of locations on the support surface Sa. A suction mechanism 41 such as a suction pump is connected to the adsorption unit 40. Therefore, the stage device ST can support the second portion F2 of the sheet substrate FB while being adsorbed on the support surface Sa.

Returning to Fig. 1, the alignment device 50 performs an alignment operation on the sheet substrate FB. The alignment device 50 has an alignment camera 51 that detects the positional state of the sheet substrate FB, and the sheet substrate FB in the X direction, the Y direction, the Z direction, the θ X direction, and the θ according to the detection result of the alignment camera 51. A first adjustment mechanism (first adjustment unit) 52 and a second adjustment mechanism (second adjustment unit) 53 that are finely adjusted in the Y direction and the θ Z direction.

As shown in FIG. 3, an alignment mark AM is formed on the surface of the sheet substrate FB (the surface on the surface to be processed Fp). The alignment marks AM are formed on the surface of the sheet substrate FB, for example, at both end portions in the short side direction of the sheet substrate FB. In Fig. 3, only a pair of alignment marks AM are shown, but actually, a plurality of ends are arranged along the respective ends of the sheet substrate FB.

Further, the alignment camera 51 in the present embodiment is disposed to face the end portions in the short-side direction of the sheet substrate FB, respectively. In the present embodiment, the alignment camera 51 detects the alignment marks AM at both end portions of the sheet substrate FB. The detection area CA of each of the alignment cameras 51 is set to, for example, an area including the alignment mark AM.

The first adjustment mechanism 52 supports, for example, both end portions of the first guide roller G1. The first adjustment mechanism 52 moves the first guide roller G1 in a direction parallel to the central axis of the first guide roller G1, for example, the first guide roller G1 is orthogonal or intersects with the XY plane in the XY plane. In-plane mobile. Further, the first adjustment mechanism 52 rotates the first guide roller G1 about the θX direction, the θY direction, and the θZ direction. Further, the first adjustment mechanism 52 can set the rotation center of each rotation direction to one end portion of both end portions of the first guide roller G1 or to a central portion of the first guide roller G1 in the central axis direction.

The second adjustment mechanism 53 supports, for example, both end portions of the second guide roller G2. The second adjustment mechanism 53 moves the second guide roller G2 in a direction parallel to the central axis of the second guide roller G2, for example, the second guide roller G2 is orthogonal or intersecting with the XY plane in the XY plane. Move inside. Further, the second adjustment mechanism 53 rotates the second guide roller G2 in the θX direction, the θY direction, and the θZ direction. Further, the second adjustment mechanism 53 can set the rotation center of each rotation direction to, for example, one end portion of both end portions of the second guide roller G2 or a central portion set in the central axis direction of the second guide roller G2. .

The alignment camera 51 detects the alignment mark AM and sends the detection result to the control unit CONT. The control unit CONT sends an adjustment signal for adjusting the position of the first guide roller G1 based on the detection result to the adjustment mechanism 52, and sends an adjustment signal for adjusting the position of the second guide roller G2 to the adjustment mechanism 53. The adjustment mechanism 52 adjusts the position of the first guide roller G1 in accordance with an adjustment signal from the control unit CONT. The adjustment mechanism 53 adjusts the position of the second guide roller G2 based on the adjustment signal from the control unit CONT. Further, the control unit CONT may generate an adjustment signal without using the detection result of the alignment camera 51, and may send the generated adjustment signal to the adjustment mechanisms 52 and 53.

In the substrate processing apparatus FPA configured as described above, a display element (electronic element) such as an organic EL element or a liquid crystal display element is manufactured by a control of the control unit CONT. Hereinafter, a process of manufacturing a display element using the substrate processing apparatus FPA having the above configuration will be described.

First, the strip-shaped sheet substrate FB wound around the reel is attached to the substrate supply portion SU. The control unit CONT rotates the reel to feed the sheet substrate FB from the substrate supply unit SU from this state. The sheet substrate FB passing through the substrate processing portion PR is wound around the reel of the substrate collecting portion CL. By controlling the substrate supply unit SU and the substrate collection unit CL, the substrate processing unit PR can be continuously moved. The processed surface Fp of the sheet substrate FB is sent.

When the sheet substrate FB is fed from the substrate supply unit SU to the substrate recovery unit CL, the control unit CONT applies the sheet substrate FB to the substrate processing unit PR in the substrate processing unit PR. The constituent elements of the display elements are sequentially formed on the sheet substrate FB by the processing device 10 while being transported.

When the processing device 10 is processed, the control unit CONT performs alignment of the sheet substrate FB using the alignment device 50. For example, the alignment camera AM detects the alignment mark AM of the sheet substrate FB and adjusts the driving amount of the roller device R of the conveying device 30, for example, and the guide roller G (the first guide roller G1 and the second guide) according to the detection result. The position and posture of the roller G2), the amount of rotation, the rotation speed, and the like.

Next, the case where the position and posture of the guide roller G (the first guide roller G1 and the second guide roller G2) are adjusted will be described.

4 shows that the first guide roller G1 and the second guide roller G2 are moved in the parallel direction (the -X direction in FIG. 4) by the equal movement amount each time from the state shown in FIG. status. In this case, the sheet substrate FB is tensioned by the first guide roller G1 and the second guide roller G2 in a state of being folded back. Therefore, when the first guide roller G1 and the second guide roller G2 are moved in the above manner, the respective folding positions are moved by the same distance in the -X direction, and accordingly, the second sheet substrate FB Part F2 moves in the -X direction.

In this manner, even if the first guide roller G1 and the second guide roller G2 are moved, the direction of the force acting on the sheet substrate FB does not change, so that the movement direction acting on the sheet substrate FB can be suppressed or eliminated. The power in different directions. Therefore, for example, in the case where the sheet substrate FB does not wrinkle or the like, the second portion F2 of the sheet substrate FB can be moved in a direction orthogonal to the conveyance direction. After the movement of the guide roller G, the control unit CONT moves the stage device ST in the X direction and the Y direction in cooperation with, for example, the position of the second portion F2 of the sheet substrate FB.

Moreover, in the conveying direction of the sheet substrate FB, on the flow side and the second side of the first guide roller G1 The slack portion of the sheet substrate FB is provided on the lower flow side of the guide roller G2, so that even if the position of the first guide roller G1 and the position of the second guide roller G2 are adjusted, the action on the sheet substrate FB can be suppressed or eliminated. force.

After adjusting the X-direction and the Y-direction position of the stage device ST, the control unit CONT moves the stage device ST in the +Z direction, and abuts the back surface of the sheet substrate FB against the support surface Sa. By this operation, the surface of the sheet substrate FB is supported by the support surface Sa of the stage device ST. At this time, the control unit CONT can also adsorb the sheet substrate FB to the adsorption unit 40 of the stage device ST, for example. Further, before the back surface of the sheet substrate FB is brought into contact with the support surface Sa of the stage device ST, the first guide roller G1 and the second guide roller G2 may be brought close to each other (reduced interval) to make the sheet substrate FB is slack. By loosening the sheet substrate FB, the sheet substrate FB can be brought into contact with and adsorbed on the support surface Sa of the stage device ST without tension. Moreover, the control unit CONT moves the stage device ST to the +Z side, for example, while supporting the sheet substrate FB, thereby adjusting the Z-direction position of the sheet substrate FB. In this case, the control unit CONT moves the first guide roller G1 and the second guide roller G2 in the Z direction depending on the amount of movement of the stage device ST in the Z direction.

After the alignment of the sheet substrate FB in the Z direction is performed, the control unit CONT performs predetermined processing on the processed surface Fp of the second portion F2 of the sheet substrate FB by the processing device 10. When the processing is performed while the second portion F2 of the sheet substrate FB is being conveyed, the control unit CONT performs the above-described processing while adjusting the processing timing of the processing apparatus 10 and the conveyance timing of the sheet substrate FB. When the sheet substrate FB is adsorbed to the stage device ST, the control unit CONT moves the stage device ST in the conveyance direction (for example, the -Y direction) of the substrate, for example, in accordance with the movement of the sheet substrate FB.

By repeating the above-described series of processes on the sheet substrate FB, the constituent elements of the display elements are formed on the processed surface Fp of the sheet substrate FB.

As described above, according to the present embodiment, the sheet substrate FB conveyed from the first direction (+X direction) is obliquely bent in the width direction (Y direction) of the sheet substrate FB, The first guide roller G1 that converts the conveyance direction of the sheet substrate FB from the first direction to the second direction (−Y direction) different from the first direction, and the sheet substrate conveyed from the second direction (the sheet substrate conveyed in the second direction) FB is obliquely bent in the width direction (X direction) of the sheet substrate FB, and the conveyance direction of the sheet substrate FB is changed from the second direction to the second direction. a second guiding roller G2 having a different third direction (+X direction), and a first guiding roller G1 and a second guiding roller G2 for respectively adjusting the position of the first guiding roller G1 and the second guiding Since the position of the guide roller G2 and the adjustment mechanism for adjusting the position of the sheet substrate FB in the direction intersecting the second direction are suppressed, the force in the direction different from the conveyance direction acts on the sheet substrate FB. In this way, the sheet substrate FB can be conveyed with high conveyance precision while suppressing defects such as wrinkles on the sheet substrate FB.

Further, according to the present embodiment, since the second portion F2 located between the first guide roller G1 and the second guide roller G2 is processed in the sheet substrate FB, the sheet substrate FB can be made in the sheet substrate FB. Part of the processing is efficient.

<Second embodiment>

Next, a second embodiment of the present invention will be described. In the present embodiment, a substrate processing apparatus having the same configuration as that of the substrate processing apparatus FPA of the first embodiment will be described. Hereinafter, in the case where each component of the substrate processing apparatus is described, the same reference numerals as those used in the first embodiment are used.

In the present embodiment, an operation of tilting the first guide roller G1 and the second guide roller G2 in the θZ direction to incline the sheet substrate FB with respect to the conveyance direction will be described.

FIG. 5 is a view showing a state in which the sheet substrate FB is conveyed when the first guide roller G1 and the second guide roller G2 are rotated in the θZ direction. In FIG. 5, the first guide roller G1 is rotated while the first portion F1 and the third portion F3 of the sheet substrate FB are respectively maintained in the conveyance direction while maintaining the tension of the second portion of the sheet substrate FB. State.

For example, only the first guide roller G1 is maintained while maintaining the conveying direction of the first portion F1. In the case of rotation, in order to avoid a change in the conveying direction of the third portion F3, the control portion CONT rotates the first guide roller G1 and the second guide roller G2 in the θZ direction in synchronization, and causes the second guide roller G2 to move toward - Move in the X direction. At this time, the center of rotation of the second guide roller G2 may be offset from the center of rotation of the first guide roller G1.

At this time, the control unit CONT makes the first guide roller G1 and the first guide roller in order to match the timing, the rotation direction, the rotation angle, and the rotation speed between the first guide roller G1 and the second guide roller G2. The two guide rollers G2 rotate. Moreover, the control unit CONT moves the second guide roller G2 in the -X direction in accordance with the amount by which the sheet substrate FB is displaced by the rotation of the first guide roller G1.

According to this embodiment, the first guide roller G1 and the second guide roller G2 can be rotated in the θZ direction so that the second portion F2 of the sheet substrate FB is transported in the opposite direction to the second portion F2 (-Y Direction) tilt (tilt). Further, it is possible to prevent the force in the direction different from the respective conveyance directions from acting on the first portion F1 to the third portion F3 of the sheet substrate FB, and it is possible to prevent defects such as wrinkles from occurring in the sheet substrate FB. In this way, it is possible to carry out conveyance with higher precision while maintaining the conveyance state of the sheet substrate FB.

Further, in the present embodiment, the case where the position of the second guide roller G2 in the X direction is not changed without changing the position of the first guide roller G1 in the X direction has been described as an example, but the present invention is not limited thereto. For example, both the first guide roller G1 and the second guide roller G2 may be moved in the X direction. Further, the rotation directions of the first guide roller G1 and the second guide roller G2 are not limited to the directions shown in FIG. 5, and may be rotated, for example, in a direction opposite to the direction shown in FIG.

<Third embodiment>

Next, a third embodiment of the present invention will be described.

In the present embodiment, the first guide and the second guide provided in the substrate processing apparatus are described, and for example, a hammer-shaped member is used. In the substrate processing apparatus of the present embodiment, the components other than the first guide and the second guide are the same as those of the above-described respective embodiments, and therefore, the same reference numerals will be given.

Fig. 6 shows the configuration when the substrate processing apparatus FPA is viewed from above (+Z direction).

As shown in Fig. 6, in the conveying device 30, the first weight member G3 and the second guide member use the second hammer member G4. Of course, the first hammer member G3 or the second hammer member G4 may be applied only to one of the first guide and the second guide.

The first hammer member G3 and the second hammer member G4 are formed, for example, in a conical shape. Specifically, the first hammer-shaped member G3 and the second hammer-shaped member G4 each have a circular bottom surface (one end portion) 80a and 80b, and have a vertex (the other end portion) 81a and 81b from the bottom surface 80a and 80b. The side of the diameter that gradually becomes smaller (guide surface).

The first hammer member G3 has a central axis C3 passing through the center point of the bottom surface 80a and the apex 81a. The first hammer-shaped member G3 is disposed such that its central axis C3 is parallel to the width direction (Y direction) of the first portion F1 of the sheet substrate FB. The first hammer-shaped member G3 is provided with a drive mechanism 61 that rotates the hammer-shaped member G3 around the central axis C3. The drive mechanism 61 also drives the first hammer member G3 in the X direction, the Y direction, and the θZ direction. The first hammer member G3 guides the sheet substrate on the side surface (guide surface) G3a. The sheet substrate FB is supported by the side surface G3a of the first hammer-shaped member G3 until the processed surface Fp is parallel between the first portion F1 and the second portion F2.

The second hammer member G4 has a central axis C4 passing through the center point of the bottom surface 80b and the apex 81b. The second hammer-shaped member G4 is disposed such that the central axis C4 is parallel to the width direction (X direction) of the second portion F2 of the sheet substrate FB. The second hammer-shaped member G4 is provided with a drive mechanism 63 that rotates the hammer-shaped member G4 around the central axis C4. The drive mechanism 61 also drives the second hammer member G4 in the X direction, the Y direction, and the θZ direction. The second hammer-shaped member G4 guides the sheet substrate on the side surface (guide surface) G4a. The sheet substrate FB is supported by the side surface G4a of the second hammer-shaped member G4 until the processed surface Fp is parallel between the second portion F2 and the third portion F3.

In the substrate processing apparatus FPA configured in this manner, when the second portion F2 of the sheet substrate FB is moved in the -X direction, the control portion CONT can cause the first hammer member G3 and the second hammer member G4 to The -X direction moves the equal amount of movement, for example. By the first hammer member G3 and The movement of the second hammer-shaped member G4 moves the position at which the sheet substrate FB is wound in the -X direction, and accordingly, the second portion F2 of the sheet substrate FB moves in the -X direction.

As described above, according to the present embodiment, even if the first weight member G3 and the second hammer member G4 are moved, the force in the direction different from the conveyance direction can be suppressed from acting on the sheet substrate FB. The material substrate FB does not cause wrinkles or the like, and the second portion F2 of the sheet substrate FB is moved.

Further, when the first hammer member G3 and the second hammer member G4 are used, as shown in FIG. 8, the second hammer member G4 may be disposed as the central axis C4 of the second hammer member G4 and the first The central axis C4 of the hammer member G3 is formed in parallel. Also in this case, the same effects as those shown in Fig. 6 can be exhibited. Further, as compared with the configuration shown in Fig. 6, since the movement of the stage device ST can be made wider, it can be explained that it is a preferable configuration. Further, the configuration shown in FIG. 8 is configured such that the central axis C3 and the central axis C4 are parallel in the Y direction, but the configuration is not limited thereto. It is also possible to arrange, for example, a configuration in which the central axis C3 and the central axis C4 are parallel in the X direction.

Further, the shape of the first hammer-shaped member G3 and the second hammer-shaped member G4 is not limited to, for example, a configuration in which a conical shape is formed as shown in FIGS. 6 to 8 . For example, it is also possible to adopt a configuration in which another hammer shape (a conical shape or a polygonal hammer shape) is formed. Further, for example, a tapered portion may be formed in one of the cylindrical members, and the tapered portion may be used to bend the sheet substrate FB.

In each of the above embodiments, the configuration in which the first guide and the second guide are rotated is described as an example, but the present invention is not limited thereto. For example, a cylindrical member fixed to the substrate processing apparatus FPA, a cylindrical member, or a hammer-shaped member may be used. When such a cylindrical member, a cylindrical member, or a hammer-shaped member is used, the position adjustment of the sheet substrate FB can be performed in the same operation as the guide roller G except that the rotation of the roller G is not performed. .

Further, in the case of using such a fixed cylindrical member, a cylindrical member, and a hammer-shaped member, only the guide surface on the back surface of the support sheet substrate FB can be retained, and portions other than the guide surface can be removed.

Further, in each of the above embodiments, a cylindrical member, a cylindrical member, and a hammer member are used. In the case of the first guide member and the second guide member, the configuration in which the first guide member and the second guide member are brought into contact with the sheet substrate FB is described as an example, but the invention is not limited thereto. For example, it is also possible to form a configuration in which the sheet substrate FB and the guide are in a non-contact state. As such a configuration, for example, a gas layer is formed on the surfaces of the first guide and the second guide, and the configuration of the sheet substrate FB is maintained through the gas layer.

Further, in the above-described embodiment, the alignment camera 51 is disposed in the portion between the first guide roller G1 and the second guide roller G2 in the sheet substrate FB, and the detection result of the alignment camera 51 is used to drive the first. The configuration of a guide roller G1 and a second guide roller G2 is described as an example. In addition, for example, at least one of the upstream side in the transport direction from the first guide roller G1 and the downstream side in the transport direction from the second guide roller G2 may be disposed, and other alignment cameras may be provided. In this case, an adjustment mechanism for adjusting the position of the sheet substrate FB according to the detection result of the separately arranged alignment camera may be separately provided. Further, as such an adjustment mechanism, for example, a roller device R or other configuration can be used.

Further, in the above-described embodiment, the configuration in which the alignment of the sheet substrate FB is performed using the alignment mark AM formed on the sheet substrate FB has been described as an example, but the present invention is not limited thereto. For example, even when the alignment mark is not formed on the sheet substrate FB, the alignment camera 51 may detect both sides parallel to the conveyance direction of the sheet substrate FB, and use the detection result to perform the sheet substrate FB. The composition of the position alignment.

In the above-described embodiment, the case where the support surface Sa of the support sheet substrate FB is formed into a flat surface in the stage device ST has been described as an example, but the present invention is not limited thereto. The application of the present invention can be applied regardless of, for example, that the support surface Sa is formed into a concave or convex curved surface. Further, it is also possible to arrange the drum on the stage device ST and use one of the surface of the drum as the support surface Sa.

In the above embodiment, the case where the sheet substrate FB is adsorbed to the stage device ST after the alignment of the sheet substrate FB is described as an example, but the present invention is not limited thereto. For example, the sheet substrate FB may be adsorbed to the adsorption unit 40 of the stage device ST before the position of the sheet substrate FB is aligned. In this case, when the positional alignment of the sheet substrate FB is performed, for example, the stage device ST is The drive is synchronized with the driving of the first guide roller G1 and the second guide roller G2, and the position of the sheet substrate FB is adjusted while maintaining the direction of the force acting on the sheet substrate FB.

The first guide and the second guide described in the above embodiment are not limited to being disposed at a position where the processing device 10 is interposed, and can be appropriately disposed in the transport path of the sheet substrate FB in the substrate processing apparatus FPA. Further, in the above embodiment, the processing device 10 disposed between the first guide and the second guide may be singular or plural.

Further, a slack portion (not shown) may be formed between the first guide roller G1 and the roller device R on the upstream side of the first guide roller G1, and the downstream side of the second guide roller G2 and the second guide roller G2 may be formed. A slack is formed between the roller devices R. Further, the roller device R on the upstream side and the roller device R on the downstream side may be in contact with the front and back surfaces of the sheet substrate FB, and the sheet substrate FB may be sandwiched.

<Fourth embodiment>

Next, a fourth embodiment of the present invention will be described. Fig. 9 is a view showing the configuration of a substrate processing apparatus FPA according to a fourth embodiment of the present invention. In the following description, the same or equivalent components as those in the above-described embodiments are denoted by the same reference numerals, and the description thereof will be simplified or omitted.

In the present embodiment, as shown in FIG. 9, the substrate processing unit PR transports the sheet substrate FB supplied from the substrate supply unit SU to the substrate collection unit CL, and performs the processed surface Fp of the sheet substrate FB during the transfer. deal with. The substrate processing unit PR includes, for example, a processing device 10, a transfer device 30, an alignment device (not shown), and the like.

The processing device 10 includes various processing units (for example, the processing unit 10A and the processing unit 10B) for forming, for example, an organic EL element on the processed surface Fp of the sheet substrate FB. As such a processing portion, for example, a partition wall forming device for forming a partition wall on the surface Fp to be processed, an electrode forming device for forming an electrode for driving the organic EL element, and a light emitting layer for forming the light emitting layer are provided. Layer forming device or the like. Specifically, there are a film forming device such as a droplet applying device (for example, an inkjet coating device or a spin coating coating device), a vapor deposition device, and a sputtering device, and an exposure device and a developing device. Surface modification device, cleaning device, and the like. These devices are suitably provided, for example, on the transport path of the sheet substrate FB.

The conveyance device 30 has a roller device R that conveys the sheet substrate FB toward the substrate collection portion CL side in the substrate processing portion PR, and is disposed on the flow side and the downstream side of the processing device 10 so as to sandwich the processing device 10 Guide roller G. The roller device R is provided, for example, in plural along the transport path of the sheet substrate FB. A drive mechanism (not shown) is attached to the roller device R of at least a part of the plurality of roller devices R. The sheet substrate FB is conveyed in the X-axis direction by the rotation of the roller device R. Further, for example, a part of the plurality of roller devices R may be configured to be movable in a direction orthogonal to the conveying direction. In the entire substrate processing unit PR, the sheet substrate FB is transported in the +X direction.

FIG. 10 is a schematic view showing the configuration of the processing device 10 and the guide roller G. Moreover, FIG. 10 shows the configuration when the substrate processing apparatus FPA is viewed from above (+Z direction).

As shown in FIG. 10, the guide roller G has a first guide roller G21, a second guide roller G22, a third guide roller G23, and a fourth guide roller G24. The first guide roller G21 to the fourth guide roller G24 are arranged in order from the upstream side to the downstream side of the transport path of the sheet substrate FB. The first guide roller G21 to the fourth guide roller G24 are formed, for example, in a cylindrical shape or a cylindrical shape.

The first guide roller G21 is disposed to be guided by the first guide roller G21 with respect to the first portion of the sheet substrate FB conveyed from the upstream side of the first guide roller G21 in the first direction (+X direction) The front portion, that is, the short side direction (width direction: here, Y direction) with respect to the first guide roller G21 and the upper side portion F1 of the sheet substrate FB, the central axis C1 is inclined in the oblique direction. The first guide roller G21 guides the back surface of the sheet substrate FB on the drum surface (guide surface) G21a. Moreover, the sheet substrate FB conveyed from the upstream side of the first guide roller G21 is in a state in which the back surface Fq of the sheet substrate FB faces upward.

The first guide roller G21 bends the first portion F1 of the sheet substrate FB obliquely with respect to the short side direction of the sheet substrate FB, and folds back the sheet base along the drum surface of the first guide roller G21. The plate FB converts the conveyance direction of the sheet substrate FB from the first direction to the second direction (-Y direction). In the present embodiment, the first guide roller G21 can substantially bend the sheet substrate FB obliquely. The sheet substrate FB can be bent while being twisted by the first guide roller G21. In the portion of the sheet substrate FB that is guided by the first guide roller G21, a peripheral surface that is inclined with respect to the transport direction (first direction) can be formed. The sheet substrate FB having the traveling direction of the first direction (+X direction) enters the first guide roller G21. The sheet substrate FB having the traveling direction of the second direction (-Y direction) comes out of the first guide roller G21. In the present embodiment, the second direction is, for example, a direction orthogonal to the first direction. The first guide roller G21 folds back the sheet substrate FB while supporting the back surface Fq of the sheet substrate FB. For example, the sheet substrate FB folded back by the first guide roller G21 faces the processed surface Fp in the second direction (on the side of the processing apparatus 10). Further, the sheet substrate FB is supported by the drum surface G21a of the first guide roller G21 until the first portion F1 and the second portion F2 described later are parallel to each other after the first guide roller G21.

The second guide roller G22 is disposed so as to be opposite to the second portion of the sheet substrate FB (the portion guided by the second guide roller G22) from the upstream side of the second guide roller G22 to the second direction, That is, the center axis C2 is inclined to the oblique direction with respect to the second guide roller G22 and the upper flow side portion F2 of the sheet substrate FB. The second guide roller G22 guides the back surface of the sheet substrate FB on the drum surface (guide surface) G22a. Moreover, in the sheet substrate FB conveyed from the upstream side of the second guide roller G22, as shown in FIG. 10, the processed surface Fp of the sheet substrate FB is directed upward.

The second guiding roller G22 bends the second portion F2 of the sheet substrate FB in an oblique direction with respect to the short side direction of the sheet substrate FB, and folds back the sheet substrate FB along the surface of the roller of the second guiding roller G22. The conveyance direction of the sheet substrate FB is changed from the second direction to the third direction (+X direction). In the present embodiment, the second guide roller G22 can substantially bend the sheet substrate FB obliquely. The sheet substrate FB can be bent while twisting through the second guide roller G22. In the sheet substrate FB, a portion of the peripheral surface inclined with respect to the transport direction (second direction) can be formed in a portion guided by the second guide roller G22. Sheet base having a traveling direction in the second direction (-Y direction) The plate FB enters the second guide roller G22. The sheet substrate FB having the traveling direction of the third direction (+X direction) comes out of the second guide roller G22. In the present embodiment, the third direction is, for example, a direction parallel to the first direction. The second guide roller G22 folds back the sheet substrate FB while supporting the back surface Fq of the sheet substrate FB. For example, in the third direction, the sheet substrate FB folded back by the second guide roller G22 is in a state in which the back surface Fq faces upward and the processed surface Fp faces downward. Further, the sheet substrate FB is supported by the drum surface G22a of the second guide roller G22 until the second portion F2 and the third portion F3 described later are parallel to each other after the second guide roller G22.

The third guide roller G23 is disposed to be guided by the third guide roller G23 with respect to the third portion of the sheet substrate FB conveyed from the upstream side of the third guide roller G23 in the third direction (+X direction). The front portion, that is, the short side direction (width direction: here, Y direction) with respect to the third guide roller G23 and the upper side portion F3 of the sheet substrate FB, the central axis C3 is inclined obliquely. The third guide roller G23 guides the back surface of the sheet substrate FB on the drum surface (guide surface) G23a. In addition, in the sheet substrate FB which is conveyed from the upstream side of the third guide roller G23, the back surface Fq of the sheet substrate FB is oriented upward as shown in FIG.

The third guiding roller G23 bends the third portion F3 of the sheet substrate FB in an oblique direction with respect to the short side direction of the sheet substrate FB, and folds back the sheet substrate FB along the drum surface of the third guiding roller G23. The conveyance direction of the sheet substrate FB is changed from the third direction to the fourth direction (+Y direction). In the present embodiment, the third guide roller G23 can substantially bend the sheet substrate FB obliquely. The sheet substrate FB can be bent while being twisted through the third guide roller G23. In the sheet substrate FB, a portion of the peripheral surface inclined with respect to the transport direction (third direction) can be formed in a portion guided by the third guide roller G23. The sheet substrate FB having the traveling direction in the third direction (+X direction) enters the third guide roller G23. The sheet substrate FB having the traveling direction of the fourth direction (+Y direction) comes out of the third guide roller G23. In the present embodiment, the fourth direction is, for example, a direction orthogonal to the first direction and the third direction and a direction opposite to the second direction. The third guide roller G23 folds back the sheet substrate FB while supporting the back surface Fq of the sheet substrate FB. E.g, The sheet substrate FB folded back by the third guide roller G23 is processed in the fourth direction so that the processed surface Fp faces upward and can be processed by the processing apparatus 10. Further, the sheet substrate FB is supported by the drum surface G23a of the third guide roller G23 until the third portion and the fourth portion to be described later are parallel to each other before the third guide roller G23.

The fourth guide roller G24 is disposed to be the fourth portion of the sheet substrate FB (the fourth guide roller G24) that is transported from the upper flow side of the fourth guide roller G24 to the fourth direction (+Y direction). The portion before the guiding, that is, the fourth guiding roller G24 and the upper side portion F4 of the sheet substrate FB, the central axis C4 thereof is inclined in the oblique direction. The fourth guide roller G24 guides the back surface of the sheet substrate FB on the drum surface (guide surface) G24a. In addition, as shown in FIG. 10, the sheet substrate FB conveyed from the upstream side of the fourth guide roller G24 is in a state in which the processed surface Fp of the sheet substrate FB is directed upward.

The fourth guiding roller G24 bends the fourth portion F4 of the sheet substrate FB in an oblique direction with respect to the short side direction of the sheet substrate FB, and folds back the sheet substrate FB along the drum surface of the fourth guiding roller G24. The conveyance direction of the sheet substrate FB is changed from the fourth direction to the fifth direction (+X direction). In the present embodiment, the fourth guide roller G24 can substantially bend the sheet substrate FB obliquely. The sheet substrate FB is bent while being twisted by the fourth guide roller G24. In the portion of the sheet substrate FB guided by the fourth guide roller G24, a partial peripheral surface inclined with respect to the transport direction (fourth direction) can be formed. The sheet substrate FB having the traveling direction of the fourth direction (+Y direction) enters the fourth guide roller G24. The sheet substrate FB having the traveling direction of the fifth direction (+X direction) comes out of the fourth guide roller G24. In the present embodiment, the fifth direction is parallel to, for example, the first direction and the third direction. The fourth guide roller G24 folds back the sheet substrate FB while supporting the back surface Fq of the sheet substrate FB. For example, in the fifth direction, the sheet substrate FB folded back by the fourth guide roller G24 is in a state in which the back surface Fq faces upward and the processed surface Fp faces downward. Further, the sheet substrate FB is supported by the drum surface G24a of the fourth guide roller G24 until after the fourth guide roller G24, the fourth portion F4 and the fifth portion F5 (by the fourth guide roller G24) The guided portion, that is, the fourth guide roller G24 and the lower flow side portion of the sheet substrate FB are parallel to each other.

The conveyance direction of the sheet substrate FB conveyed by the four guide rollers G21 to G24 is the +X direction (first direction) in the first portion F1 and the -Y direction (second direction) in the second portion F2. The third portion F3 is again in the +X direction (third direction), the fourth portion F4 is in the +Y direction (fourth direction), and the fifth portion F5 is in the +X direction (the fifth direction).

At this time, the sheet substrate FB faces the front surface Fq of the first direction, the third direction, and the fifth direction sheet substrate FB, and the processed surface Fp of the sheet substrate FB in the second direction and the third direction. Above.

As described above, the processed surface Fp is directed downward before the processing surface 10 of the sheet substrate FB is processed by the processing apparatus 10 (the processing unit 10A and the processing unit 10B), so that the dust and the like can be reduced. The attachment of the surface Fp is processed.

As described above, the sheet substrate FB is conveyed by a crank-shaped path in which the first guide roller G21, the second guide roller G22, the third guide roller G23, and the fourth guide roller G24 are each an angled corner. In addition, the sheet substrate FB which is bent by the fourth guide roller G24 is conveyed in the fifth direction, that is, in the conveyance direction of the sheet substrate FB which is the entire substrate processing portion PR.

Moreover, as shown in FIG. 10, the processing apparatus 10 has the processing part 10A and the processing part 10B. The processing unit 10A is disposed at a position between the first guide roller G21 and the second guide roller G22 in the Y direction, for example, and is disposed to face the processed surface Fp of the second portion F2 of the sheet substrate FB. The processing unit 10B is disposed at a position between the third guide roller G23 and the fourth guide roller G24 in the Y direction, for example, and is disposed to face the processed surface Fp of the fourth portion F4 of the sheet substrate FB. In the present embodiment, the processing unit 10A and the processing unit 10B perform processing such as mutual exclusion.

The processing unit 10A is connected to, for example, the drive mechanism 11 and is provided to be movable in, for example, the X direction and the Y direction. For example, the processing unit 10A is movable between the first position A1 on the second portion F2 and the second position A2 on the fourth portion F4 (moving in the X direction). Moreover, the processing unit 10A can be in the second part Move on the F2 and the fourth part F4 (moving in the Y direction).

The processing unit 10B is connected to, for example, the drive mechanism 12 and is provided to be movable in the X direction and the Y direction, for example. For example, the processing unit 10B can move between the first position B1 on the fourth portion F4 and the second position B2 on the second portion F2 (moving in the X direction). Further, the processing unit 10B is movable on the second portion F2 and the fourth portion F4 (moving in the Y direction).

The first guide roller G21 to the fourth guide roller G24 are supported by, for example, a bearing member (not shown). A drive mechanism (not shown) that rotates the first guide roller G21 to the fourth guide roller G24 is provided in each of the bearing members. The drive mechanism rotates the first guide roller G21 to the fourth guide roller G24 around the central axes C1 to C4, respectively.

Further, a configuration in which the stage device is disposed on the -Z side of the second portion F2 and the fourth portion F4 of the sheet substrate FB may be employed. The stage device supports a portion to be processed by the processing unit 10A and the processing unit 10B. The support surface of the stage device supporting the second portion F2 and the fourth portion F4 may be a flat surface or a curved surface.

An alignment device (not shown) performs an alignment operation on the sheet substrate FB. The alignment device has an alignment camera (not shown) that detects the positional state of the sheet substrate FB, and an X-direction, a Y-direction, a Z-direction, a θX direction, a θY direction, and a θZ according to the detection result of the alignment camera. An adjustment mechanism (not shown) for finely adjusting the sheet substrate FB in the direction. Further, an alignment mark (not shown) is formed on the processed surface Fp of the sheet substrate FB. The alignment marks are formed on both ends of the processed surface Fp, for example, the short side direction of the sheet substrate FB.

In the substrate processing apparatus FPA configured as described above, a display element (electronic element) such as an organic EL element or a liquid crystal display element is manufactured by a control of the control unit CONT. Hereinafter, a process of manufacturing a display element using the substrate processing apparatus FPA having the above configuration will be described.

First, the strip-shaped sheet substrate FB wound around the reel is attached to the substrate supply portion SU. The control unit CONT rotates the reel to feed the sheet substrate FB from the substrate supply unit SU from this state. The sheet substrate FB passing through the substrate processing unit PR is wound by a roll of the substrate collecting portion CL. By controlling the substrate supply unit SU and the substrate collection unit CL, the processed surface Fp of the sheet substrate FB can be continuously conveyed to the substrate processing unit PR.

The control unit CONT applies the sheet substrate FB to the substrate processing unit PR while the sheet substrate FB is being ejected from the substrate supply unit SU to the substrate collection unit CL. The components of the display elements are sequentially formed on the sheet substrate FB by the processing device 10 (including the processing units of the processing unit 10A and the processing unit 10B).

In this case, as shown in FIG. 10, the sheet substrate FB is folded back in a state where the first guide roller G21, the second guide roller G22, the third guide roller G23, and the fourth guide roller G24 support the back surface Fq. Therefore, after the processing unit 10A and the processing unit 10B, the sheet substrate FB is conveyed without being in contact with the four guide rollers G21 to G24.

Further, the sheet substrate FB is transported so as to face the processing unit 10A and the processing unit 10B by the processed surface Fp of each of the second portion F2 and the fourth portion F4 corresponding to the processing unit 10A and the processing unit 10B. . In this case, for example, the second portion F2 and the fourth portion F4 are aligned in the X direction. Therefore, the processing unit 10A that processes the processed surface Fp of the second portion F2 can process the processed surface Fp of the fourth portion F4, and conversely, the processing portion 10B that processes the processed surface Fp of the fourth portion F4 can also process the second The processed surface Fp of the portion F2.

Further, according to the present embodiment, the substrate processing apparatus FPA includes the first guide roller G21 to the fourth guide roller G24. Therefore, the sheet substrate FB can be transported in the direction in which the sheet substrate FB is transported. The transport direction (for example, the +X direction) of the entire substrate processing apparatus FPA.

Further, since the second portion F2 and the fourth portion F4 of the sheet substrate FB are in a state in which the processed surface Fp is aligned in the direction of the processing portions 10A and 10B, the processing portions 10A and 10B are easily in the second portion F2 and Move between the four parts F4. In this way, a variety of processing operations can be performed.

Further, in the present embodiment, the processed surface Fp of the second portion F2 is processed by the processing unit 10A, The processing unit 10B has described the configuration of the processed surface Fp of the fourth portion F4, but the configuration is not limited thereto. For example, when the processing unit 10B is omitted, the fourth guide roller G24 may be omitted, and the sheet substrate FB may be conveyed by the first guide roller G21, the second guide roller G22, and the third guide roller G23.

As described above, according to the present embodiment, since the transfer device 30 is provided with at least three of the first guide roller G21, the second guide roller G22, and the third guide roller G23, it is possible to support only the sheet. The sheet substrate FB is conveyed while the back surface Fq of the substrate FB is being conveyed. According to this, it is possible to convey the sheet substrate FB while preventing contact with the processed surface Fp of the sheet substrate FB from the outside.

<Fifth Embodiment>

Next, a fifth embodiment of the present invention will be described.

In the present embodiment, as the first to fourth guides provided in the substrate processing apparatus, for example, a hammer-shaped member is used. In the following description, the same or equivalent components as those in the above-described embodiments are denoted by the same reference numerals, and the description thereof will be simplified or omitted.

The configuration of the substrate processing apparatus FPA as viewed from above (+Z direction) is shown in FIG.

As shown in FIG. 11, the conveying device 30 uses the first hammer-shaped member G25 as a first guide and the second hammer-shaped member G26 as a second guide. The third hammer member G27 is used as the third guide, and the fourth hammer member G28 is used as the fourth guide. Of course, it is also possible to form a hammer-shaped member using only one of the first to fourth guides.

Fig. 12 is a view showing the configuration of the first hammer-shaped member G25 as an example. As shown in FIGS. 11 and 12, the first hammer-shaped member G25 to the fourth hammer-shaped member G28 are each formed in a conical shape. Specifically, the first hammer-shaped member G25 to the fourth hammer-shaped member G28 each have a circular bottom surface (one end portion) 80 and an apex (the other end portion) 81, and have an outer diameter formed from the bottom surface 80 toward the apex 81. The side of the smaller size (guide surface). The first hammer-shaped member G25 to the fourth hammer-shaped member G28 have central axes C5 to C8 passing through the center point of the bottom surface 80 and the apex 81, respectively.

The first hammer-shaped member G25 is disposed such that the central axis C5 is parallel to the width direction (Y direction) of the first portion F1 of the sheet substrate FB. The first hammer-shaped member G25 is provided with a drive mechanism (not shown) that rotates the first hammer-shaped member G25 around the central axis C5. The first hammer-shaped member G25 guides the sheet substrate on the side surface (guide surface) G25a. The sheet substrate FB is supported by the side surface G25a of the first hammer-shaped member G25 until the processed surface Fp is parallel to the second portion F2 at the first portion F1.

The second hammer-shaped member G26 is disposed such that the central axis C6 is parallel to the width direction (X direction) of the second portion F2 of the sheet substrate FB. The second hammer-shaped member G26 is provided with a drive mechanism (not shown) that rotates the second hammer-shaped member G26 around the central axis C6. The second hammer-shaped member G26 guides the sheet substrate on the side surface (guide surface) G26a. The sheet substrate FB is supported by the side surface G26a of the second hammer-shaped member G26 until the processed surface Fp is parallel to the third portion F3 at the second portion F2.

The third hammer-shaped member G27 is disposed such that the central axis C7 is parallel to the width direction (Y direction) of the third portion F3 of the sheet substrate FB. The third hammer-shaped member G27 is provided with a drive mechanism (not shown) that rotates the third hammer-shaped member G27 about the central axis C7. The third hammer-shaped member G27 guides the sheet substrate on the side surface (guide surface) G27a. The sheet substrate FB is supported by the side surface G27a of the third hammer-shaped member G27 until the processed surface Fp is parallel to the fourth portion F4 at the third portion F3.

The fourth hammer-shaped member G28 is disposed such that the central axis C8 is parallel to the width direction (X direction) of the fourth portion F4 of the sheet substrate FB. The fourth hammer-shaped member G28 is provided with a drive mechanism (not shown) that rotates the fourth hammer-shaped member G28 around the central axis C8. The fourth hammer member G28 guides the sheet substrate on the side surface (guide surface) G28a. The sheet substrate FB is supported on the side surface G28a of the fourth hammer-shaped member G28 until the processed surface Fp is parallel to the fifth portion F5 at the fourth portion F4.

As described above, according to the present embodiment, the first hammer-shaped member G25 to the fourth hammer-shaped member G28 are folded back to the sheet substrate FB, and in this case, the back surface Fq of the sheet substrate FB can be supported. The sheet substrate FB is conveyed. According to this, it is possible to convey the sheet substrate FB while preventing contact with the processed surface Fp of the sheet substrate FB from the outside.

Moreover, when the first hammer-shaped member G25 to the fourth hammer-shaped member G28 are used, for example, FIG. As shown, the center axis C5 of the first hammer member G25 may be parallel to the central axis C8 of the fourth hammer member G28, and the center axis C6 of the second hammer member G26 and the center of the third hammer member G27 may be formed. The first hammer-shaped member G25 to the fourth hammer-shaped member G28 are disposed in such a manner that the shaft C7 is parallel.

With this configuration, the same effects as those shown in Fig. 11 can be exhibited. Further, the distance between the second portion F2 of the sheet substrate FB and the fourth portion F4 becomes closer than that of the configuration shown in FIG. Therefore, the processing portions 10A and 10B are easily moved between the second portion F2 and the fourth portion F4, which is a preferable configuration.

Further, the shapes of the first hammer-shaped member G25 to the fourth hammer-shaped member G28 are preferably formed into a conical shape as shown in FIGS. 11 to 13 , but may be formed into other hammer shapes (inert cone shape, The composition of a polygonal hammer. Further, for example, a tapered portion may be formed in one of the cylindrical members, and the tapered portion may be used to bend the sheet substrate FB.

Further, in each of the above embodiments, the configuration in which the first to fourth guides are rotated is described as an example, but the present invention is not limited thereto. For example, a cylindrical member fixed to the substrate processing apparatus FPA, a cylindrical member, or a hammer-shaped member may be used. When such a cylindrical member, a cylindrical member, or a hammer-shaped member is used, the position adjustment of the sheet substrate FB can be performed in the same operation as the guide roller G except that the rotation of the roller G is not performed. .

Further, in the case of using such a fixed cylindrical member, a cylindrical member, and a hammer-shaped member, only the guide surface on the back surface of the support sheet substrate FB can be retained, and portions other than the guide surface can be removed.

Further, in the above embodiments, when the guide roller G, the columnar member, the cylindrical member, and the hammer member are used as the first to fourth guides, the sheet substrate FB is brought into contact with The configuration of the first to fourth guides is described as an example, but is not limited thereto. For example, it is also possible to form a configuration in which the sheet substrate FB and each of the guide members are in a non-contact state. In such a configuration, for example, a gas layer is formed on the surfaces of the first to fourth guides, and the configuration of the sheet substrate FB is maintained through the gas layer.

The first to fourth guides described in the above embodiments are not limited to, for example, a sheet base. The transport path of the board FB is disposed in the vicinity of the processing device 10, and may be appropriately disposed at another position. Further, the configuration of the first to fourth guides of the above-described embodiment may be configured to be repeated, for example, in the X direction.

Further, in the above embodiment, the case where the processing unit 10A and the processing unit 10B are differently processed is described as an example, but the present invention is not limited thereto. For example, when the same processing is performed between the processing unit 10A and the processing unit 10B, the application of the present invention is also possible.

Further, in the above embodiment (see, for example, FIG. 11), the sheet substrate FB is folded back in the +Y direction by the third guide so that the second portion F2 and the fourth portion F4 of the sheet substrate FB are in the X The configuration in which the directions are arranged adjacent to each other is not limited thereto, and the sheet substrate FB may be folded back in the opposite direction to the second portion F2 (for example, the -Y direction in FIG. 10) by the third guide.

Further, in the above embodiment, the first guide member is folded back until the first portion F1 and the second portion F2 are parallel to each other, but the second portion F2 may be folded back above or below the first portion F1. The relationship between the second portion F2 and the third portion F3, the third portion F3 and the fourth portion F4, and the fourth portion F4 and the fifth portion F5 are also not limited to being parallel.

Further, in the above embodiment, the first direction and the third direction, and the relationship between the second direction and the fourth direction are parallel to each other. However, the present invention is not limited to being parallel, and may be a direction other than parallel.

Further, since the roller device R on the upstream side of the first guide roller G21 functions as a transport roller before the surface to be processed of the sheet substrate FB, the roller device R can be brought into contact with the sheet substrate FB. The sheet substrate FB is sandwiched between the front surface and the back surface. Further, after performing all the processes on the processed surface of the sheet substrate FB, the flow side of the fourth guide roller G24 may be contacted to contact the back surface and the surface of the sheet substrate FB and sandwich the sheet substrate FB. The roller device R is configured.

The technical scope of the present invention is not limited to the above-described embodiments, and may be appropriately modified without departing from the scope of the invention.

Claims (11)

A device manufacturing apparatus for manufacturing an electronic component by transporting a sheet substrate having a flexible strip in a longitudinal direction while manufacturing the electronic component on the sheet substrate a cylindrical member that bends the sheet substrate conveyed in the first direction obliquely in a plane parallel to the surface of the sheet substrate, and then converts the conveying direction of the sheet substrate into the first direction Differently passing through the second direction of the processing device; the second cylindrical member obliquely aligns the sheet substrate conveyed in the second direction and processed by the processing device in a plane parallel to the surface of the sheet substrate After the bending, the conveying direction of the sheet substrate is converted into a third direction different from the second direction; and the mark detecting portions are respectively disposed at both ends of the short side direction intersecting with the longitudinal direction of the sheet substrate. a pair of marks is detected in the transport path of the sheet substrate in the second direction; and an adjustment mechanism is adjusted in a plane parallel to the surface of the sheet substrate according to the detection result of the mark detecting portion Position or angle of the first cylindrical member or the second cylindrical member. The component manufacturing apparatus of claim 1, wherein the first cylindrical member or the second cylindrical member has a central axis extending obliquely with respect to a short side direction of the sheet substrate, and is driven by a driving mechanism The center shaft is rotationally driven. The component manufacturing apparatus of claim 2, wherein the central axis of the first cylindrical member and the second cylindrical member are disposed in a transport path to the second direction The relationship in which the surface of the sheet substrate is parallel is substantially parallel or substantially orthogonal, and the first direction and the third direction are substantially parallel. The component manufacturing apparatus of claim 3, wherein the adjustment mechanism has: a first adjustment portion that adjusts the first cylinder in a plane parallel to a surface of the sheet substrate in a transport path in the second direction The position or angle of the member; The second adjustment unit adjusts a position or an angle of the second cylindrical member in a plane parallel to the surface of the sheet substrate in the transport path in the second direction. The component manufacturing apparatus of claim 4, wherein the adjustment mechanism includes a control unit that allows the sheet substrate passing through the transport path in the second direction to be in a plane parallel to the surface of the sheet substrate In the tilting mode, the first adjustment unit and the second adjustment unit are controlled based on the detection result of the mark detecting unit. The component manufacturing apparatus according to claim 5, wherein the processing apparatus includes: a stage device disposed in the transport path in the second direction, and having the back surface of the sheet substrate as having a flat surface or curvature The support surface on which the surface is supported. The device manufacturing apparatus according to claim 6, wherein the stage device has a stage driving mechanism for moving the supporting surface in a direction orthogonal to a surface of the sheet substrate. The component manufacturing apparatus of claim 7, wherein the support surface of the stage device has an adsorption portion for adsorbing the back surface of the sheet substrate. A component manufacturing apparatus for manufacturing an electronic component by transporting a flexible sheet substrate to a longitudinal direction while manufacturing the electronic component on the sheet substrate a first guide having a first bottom surface that defines a center point on the first central axis, and an outer diameter gradually increases from a vertex set on the first central axis toward the first bottom surface Forming and supporting a first side of a portion of the sheet substrate rotatable about the first central axis; the tapered second guide having a relationship parallel or orthogonal to the first central axis And forming a second bottom surface of the circular center point on the second central axis of the arrangement, and forming and supporting the outer diameter from the apex set on the second central axis toward the second bottom surface a second side of a portion of the sheet substrate rotatable about the second central axis; and a drive mechanism for shifting the transport direction after being supported by the first side of the first guide The first substrate and the second guide are rotated by the first substrate supporting the second side surface of the second guide member and then transferring the transport direction to the longitudinal direction; and the first guide member and the first guide member The sheet substrate is processed by the processing device in the transport path between the second guides. The component manufacturing apparatus of claim 9, further comprising: a first adjusting mechanism that adjusts a position or an angle of the first central axis of the first guiding member; and a second adjusting mechanism that adjusts the second guiding member The position or angle of the second central axis. The component manufacturing apparatus according to claim 10, further comprising: a control unit that inclines the sheet substrate conveyed from the first guide to the second guide by a short crossing with the longitudinal direction The first adjustment mechanism and the second adjustment mechanism are controlled in a side direction manner.